JP7083199B1 - 3D modeling equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a configuration of a three-dimensional modeling apparatus capable of arranging a plurality of galvano scanners in a state as compact as possible with reference to the center position of a table surface and realizing uniform irradiation. SOLUTION: A plurality of galvano scanners 3 are set in parallel with adjacent longitudinal directions as opposite directions, and a straight line L extending from a center position P of a surface of a table 4 in a direction orthogonal to the parallel direction. On the other hand, the rotating surfaces of the second mirror 32 are arranged so as to be within a predetermined distance range, or a plurality of galvano scanners 3 are set so that the adjacent longitudinal directions are in the same direction. The rotation surface of the second mirror 32 is relative to a straight line L orthogonal to the parallel direction from the center position P and a position within a distance of ½ of the longitudinal distance of the galvano scanner 3 from the position P. A three-dimensional modeling device that achieves the above-mentioned task by arranging them so as to be within a predetermined distance. [Selection diagram] FIG. 3 (a)

Description

The present invention is intended for a three-dimensional modeling apparatus that employs a plurality of galvano scanners that scan a laser beam or an electron beam that passes through a dynamic focus lens and sequentially focuses in a two-dimensional direction.

In three-dimensional modeling in which a sintered surface is formed by irradiating a powder layer 5 laminated on a table surface with a laser beam or an electron beam, a galvano scanner uses a laser beam or an electron beam transmitted through a dynamic focus lens whose focal length can be adjusted. Scanning is performed so as to focus on or in the vicinity of the sintered surface.

The three-dimensional modeling method that realizes efficient scanning by adopting two or four galvano scanners that realize the scanning is described as the invention described in Patent Document 1 (hereinafter referred to as "prior application invention 1"). It has been disclosed.

Moreover, the prior invention 1 requires that the distance between the reflection positions of the second mirrors facing each other in the horizontal direction be 150 mm or less or 100 mm or less, and the two or four galvano scanners are compact. The explanation of the arrangement is given.

However, in the second mirror, the width in the direction orthogonal to the rotation center axis is not always constant, and it has not been clarified at all what design width can be 150 mm or less or 100 mm or less.

However, the above-mentioned purpose of 150 mm or less or 100 mm or less may be established when the design width is within the range of common technical knowledge, but the grounds for why the maximum value of 150 mm or less or 100 mm or less can be adopted. Is completely unknown.

Therefore, the invention 1 of the prior application does not objectively present a configuration in which the galvano scanner has a compact arrangement regardless of the design width in the direction orthogonal to the rotation center axis of the second mirror. do not have.

In general, the closer each of the plurality of second mirrors is to the center position of the table surface or the reference line extending from the center position, the more uniform irradiation can be realized.

However, with reference to FIGS. 5, 6 and 13 of Patent Document 1, the second mirror (X-axis galvano mirrors 32a, 42a, 52a, 62a) is at the center position of the modeling table 5 (center position of the housings 14 and 114). It is far from the center position, and no device has been devised to enable both a compact arrangement based on the center position and uniform irradiation.

As described above, in the publicly known techniques including the prior invention 1, the center position of the table surface is set regardless of the design width in the direction orthogonal to the rotation center axis of the second mirror and the reflection position of the laser beam or the electron beam. We do not propose a configuration that achieves both a compact layout as a standard and uniform irradiation.

Japanese Patent No. 6,793,806

The present invention provides a configuration of a three-dimensional modeling apparatus capable of arranging a plurality of galvano scanners in a state as compact as possible with respect to the center position of the table surface and realizing uniform irradiation. The task is to do.

In order to achieve the above object, the basic configuration of the present invention is
(1) A squeegee that stacks powder on a table via traveling, and a three-dimensional modeling apparatus equipped with a plurality of galvano scanners that scan a laser beam or an electron beam on the powder layer. Each galvano scanner is a three-dimensional modeling apparatus. The first mirror that rotates with respect to the laser beam or electron beam transmitted through the dynamic focus lens via the rotation center axis in the direction orthogonal to the transmission direction, and the first mirror in a state independent of the rotation of the first mirror. 1 It is orthogonal to the direction of the rotation center axis in the mirror, and it is reflected from the second mirror that rotates via the rotation center axis in the horizontal direction, and is based on the orthogonal coordinates of the laser beam or electron beam. Scanning in the dimensional direction is realized, and the region containing the oscillation source of the laser beam or the electron beam is the rear end side of the plurality of galvano scanners, and the region containing the first mirror is the front end side. In addition to being parallel to the longitudinal direction, which is the same direction as the transmission direction, the longitudinal direction of adjacent galvano scanners in units of two on both sides of the parallel direction is set only in the opposite direction. In each galvano scanner, the second mirror is rotated with respect to a straight line extending in a direction orthogonal to the horizontal direction with respect to the parallel direction from the center position of the table surface. In addition to setting the central axis in the parallel direction, the parallel to the rotating surface of each second mirror and the end portion of the rotating surface at a position orthogonal to the rotating central axis. Arrange the straight lines in a state of sandwiching them from both sides in the direction, or accommodate the region on the tip side accommodating the first mirror as described above and the laser beam or electron beam oscillation source as described above. Whether the straight line is separated from the straight line together with the region on the rear end side, and the end portion is close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror. Or, as described above, with the entire region on the front end side accommodating the first mirror, and on the opposite side of the straight line to the region on the rear end side accommodating the laser beam or electron beam oscillation source as described above. A three-dimensional modeling device, in which the end portions are arranged in a state of being close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror.
(2) A squeegee that stacks powder on a table via traveling, and a three-dimensional modeling apparatus equipped with a plurality of galvano scanners that scan a laser beam or an electron beam on the powder layer. Each galvano scanner is a three-dimensional modeling apparatus. The first mirror that rotates with respect to the laser beam or electron beam transmitted through the dynamic focus lens via the rotation center axis in the direction orthogonal to the transmission direction, and the first mirror in a state independent of the rotation of the first mirror. 1 It is orthogonal to the direction of the rotation center axis in the mirror, and it is reflected from the second mirror that rotates via the rotation center axis in the horizontal direction, and is based on the orthogonal coordinates of the laser beam or electron beam. Scanning in the dimensional direction is realized, and the region containing the oscillation source of the laser beam or the electron beam is the rear end side of the plurality of galvano scanners, and the region containing the first mirror is the front end side. In addition to being parallel to the longitudinal direction, which is the same direction as the transmission direction, the longitudinal direction of adjacent galvano scanners in units of two on both sides of the parallel direction is set only in the same direction. In each galvano scanner, the center position of the table surface and the distance of 1/2 of the distance from the rear end of the oscillation source of the laser beam or the electron beam to the rotation region of the first mirror with respect to the center position. A straight line extending in a direction orthogonal to the parallel direction from a specific position selected in the region between the position and the position deviating along the parallel direction. Regarding the second mirror , the rotation center axis of each second mirror is set in the parallel direction, and the rotation center axis is set on the surface that rotates for the reflection in each second mirror and the rotation center axis. For the ends located at positions orthogonal to the above, the straight lines are arranged in a state of sandwiching the straight lines from both sides in the parallel direction, or the region on the tip side accommodating the first mirror as described above. And, as described above, it is separated from the straight line together with the region on the rear end side accommodating the laser beam or the electron beam oscillation source, and the end portion is from the length of the rotation center axis of the second mirror with respect to the straight line. Are arranged in close proximity at small distances, or as described above, with the entire region on the tip side accommodating the first mirror, with respect to the straight line, the laser beam or electron beam oscillation source as described above. Arranged in a state where the end portion is close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror. do 3D modeling device, which is either
(3) The three-dimensional modeling apparatus according to the basic configurations (1) and (2), wherein one galvano scanner is arranged on a straight line extending in the parallel direction from the center position.
(4) The above-mentioned case where the surface rotating for the reflection in each second mirror in each galvano scanner adjacent to each other at the same height position forms the minimum tilt angle with respect to the horizontal direction. The basic configuration (1), characterized in that they are arranged in a state of being close to a straight line set in a parallel direction at a distance smaller than the length of the rotation center axis of the second mirror. 2) 3D modeling device,
(5) The rotating surfaces of the second mirrors of the galvano scanners adjacent to each other at different height positions are set in the parallel direction when forming the minimum tilt angle with respect to the horizontal direction. The tertiary of the basic configurations (1) and (2), characterized in that the rotation center axis and the projecting end on the rotating surface on the direction side are located on the opposite side of the straight line. Former modeling equipment,
Consists of.

In the basic configuration (1), each adjacent galvano scanner is parallel to each other, and the longitudinal direction is set only in the opposite direction, and then horizontal from the center position of the table surface to the parallel direction. The following three types of arrangement states can be selected for the rotating surface of the second mirror and the end portion with reference to a straight line extending in a direction orthogonal to the direction.

a. Arranged with the straight line sandwiched from both sides b. It is separated from the straight line together with the region on the front end side accommodating the first mirror as described above and the region on the rear end side accommodating the laser beam or electron beam oscillation source as described above, and the end portion is said. Arranged in a state of being close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror c. As described above, the entire region on the front end side accommodating the first mirror and the region on the rear end side accommodating the laser beam or electron beam oscillation source as described above with respect to the straight line are opposite to the straight line. And the end is arranged close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror.

In the case of the arrangement of a, since the rotation surface of the second mirror is within the range of the rotation center axis region with respect to the straight line set from the center position, it is substantially uniform in the parallel direction. While achieving such irradiation, the longitudinal region of each galvano scanner is also within a predetermined distance with respect to the straight line, and a compact arrangement can be realized along the parallel direction.

In the case of the arrangement of b, the rotating surface of the second mirror accommodates the region on the distal end side accommodating the first mirror as described above and the laser beam or electron beam oscillation source as described above. Since it is separated from the straight line together with the region on the rear end side, the second mirror rotates with respect to the straight line, although it is slightly inferior in uniform irradiation and a compact configuration as compared with the case of a. Since they are close to each other at a distance smaller than the length of the central axis, uniform irradiation and a compact arrangement equivalent to the case a can be realized.

Even in the case of the arrangement of c, the rotating surface of the second mirror has the entire region on the tip side accommodating the first mirror as described above, and the laser beam or the electron beam as described above with respect to the straight line. Since it is separated from the region on the rear end side accommodating the oscillation source at a position opposite to that of the rear end side, the end portion is inferior to the case of the above a in uniform irradiation, but the end portion is the first with respect to the straight line. Since the two mirrors are set so as to be close to each other at a distance smaller than the length of the rotation center axis of the mirror, uniform irradiation similar to the case of a above can be realized, while uniform irradiation of each galvano scanner can be realized. Since the region in the longitudinal direction intersects the straight line, a more compact arrangement than in the case of a can be realized.

In this way, in any of the arrangements a, b, and c, uniform irradiation by the second mirror and a compact arrangement of the second mirror are realized, while the adjacent galvano scanners are set in a parallel state in the opposite direction. By doing so, the space on the table surface can be effectively utilized.

In the basic configuration (2), the adjacent galvano scanners are parallel to each other and the longitudinal directions are set to be the same, and then the laser beam or the electron beam is used with respect to the center position of the table surface and the center position. It was selected in the region between the position deviating along the parallel direction by half the distance from the rear end of the oscillation source to the rotation region of the first mirror. With respect to a straight line extending in a direction orthogonal to the parallel direction from a specific position along the horizontal direction, each second mirror rotates on a surface that rotates for the reflection and a surface that rotates. The following three types of arrangement states can be selected for the end portion located in the direction orthogonal to the center of motion axis.

a. Arranged with the straight line sandwiched from both sides b. It is separated from the straight line together with the region on the front end side accommodating the first mirror as described above and the region on the rear end side accommodating the laser beam or electron beam oscillation source as described above, and the end portion is said. Arranged in a state of being close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror c. As described above, the entire region on the front end side accommodating the first mirror and the region on the rear end side accommodating the laser beam or electron beam oscillation source as described above with respect to the straight line are opposite to the straight line. And the end is arranged close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror.

The position where the straight line is extended in the basic configuration (2) is not limited to the center position of the table surface, and the parallel distance is ½ of the longitudinal distance of the galvano scanner from the center position. It deviates in the direction of.

The reason why such an extension position is set as such a deviation region is that in the case of the basic configuration (2), since each galvano scanner is parallel in the same direction, the space on the table surface is effectively utilized. In that respect, since it is inferior to the basic configuration (1), it is intended to achieve both uniform irradiation by the second mirror and effective utilization of the space on the table surface.

The basic configuration (2) based on such compatibility is inferior to the basic configuration (1) in effective utilization of the space on the table surface and uniform irradiation by the second mirror, but the deviation distance is large. It is not significantly different in uniform irradiation because it is limited to a distance of 1/2 of the longitudinal distance in the galvano scanner.

Moreover, the basic configuration (2) is superior to the basic configuration (1) in terms of compact arrangement in the parallel direction.

The degree of uniform irradiation by each of the arrangements a, b, and c in the basic configuration (2) and the contrast of the compact arrangement are the same as in the case of the above a, b, and c in the basic configuration (1).

As described above, even in the basic configuration (2) based on any of the arrangements a, b, and c, uniform irradiation of the second mirror 32 and a compact arrangement of the second mirrors 32 are realized. The space on the surface of the table 4 can be effectively utilized, and a more compact arrangement state can be realized for the arrangement of the entire galvano scanner 3 than the basic configuration (1).

In most cases, the center position of the table surface and its vicinity correspond to the region where the three-dimensional modeling is continuously continued.

Therefore, in the basic configurations (1) and (2), when one galvano scanner is arranged on a straight line extending in the parallel direction from the center position as in the basic configuration (3), In most cases, the galvano scanner contributes to continuous three-dimensional modeling, and can contribute to efficient modeling.

In the basic configurations (1) and (2), as in the basic configuration (4), the surface that rotates due to the reflection in each second mirror in each galvano scanner adjacent to each other at the same height position is , When forming the minimum tilt angle with respect to the horizontal direction, the straight line set in the parallel direction is close to the straight line set in the parallel direction at a distance smaller than the length of the rotation center axis of the second mirror. When they are arranged in a straight line, the distance between the surfaces rotating due to the reflection in each second mirror in the direction of the straight line is small, and the distance is compact in the direction of the straight line. The configuration can be realized.

In particular, even in the embodiment in which the second mirrors face each other due to the slight state, the surfaces rotating due to the reflection in each second mirror do not come into contact with each other and are stable due to the proximity state. Rotation can be realized.

In the basic configurations (1) and (2), as in the basic configuration (5), the second mirrors of the galvano scanners adjacent to each other at different height positions are arranged at the same position in the parallel direction. If so, there is a galvano scanner adjacent to each other if the end of the surface that rotates due to the reflection in each second mirror forms the minimum tilt angle with respect to the horizontal direction. Since it extends to the end of the rotating surface up to the region to be formed, a more compact configuration can be realized in the linear direction as compared with the case of the basic configuration (4).

In the plan view of the first embodiment based on the basic configuration (1), (a) shows the case of two pieces, (b) shows the case of three pieces, and (c) shows the case of four pieces. , (D) shows the case of 5 pieces, and (e) shows the case of 6 pieces. Note that (b) and (d) indicate the feature points of the basic configuration (3). Further, the solid line L in the vertical direction indicates a straight line extending in a direction orthogonal to the horizontal direction with respect to the parallel direction from the center position of the table surface, and the straight line D is a parallel direction from the center position of the table surface. Shows a straight line extended to. In the plan view of the second embodiment based on the basic configuration (2), (a) shows the case of two pieces, (b) shows the case of three pieces, and (c) shows the case of four pieces. , (D) shows the case of 5 pieces, and (e) shows the case of 6 pieces. Note that (b) and (d) indicate the feature points of the basic configuration (3). Further, the solid line L in the vertical direction is parallel to the center position of the table surface and the center position by half the distance from the oscillation source of the laser beam or the electron beam to the first mirror. A straight line extending in a direction orthogonal to the horizontal direction with respect to a parallel direction from a specific position selected in the region between the position deviating along the direction is shown, and the straight line D is a straight line. A straight line extending in a parallel direction from the center position of the table surface is shown, and d indicates a distance along the parallel direction between the center position and the straight line. It is a plan view of the basic configuration (1) in which the adjacent galvano scanners are set by the unit of every two, and shows the case where the arrangement of a is adopted. The solid line L in the vertical direction indicates a straight line extending in a direction orthogonal to the horizontal direction with respect to the parallel direction from the center position of the table surface, and the straight line D is a parallel direction from the center position of the table surface. Shows an extended straight line. It is a plan view of the basic configuration (1) in which each galvano scanner adjacent to each other is set by the unit of every two, and shows the case where the arrangement of b is adopted. The solid line L in the vertical direction indicates a straight line extending in a direction orthogonal to the horizontal direction with respect to the parallel direction from the center position of the table surface, and the straight line D is a parallel direction from the center position of the table surface. Shows an extended straight line. It is a plan view of the basic configuration (1) in which each galvano scanner adjacent to each other is set by the unit of every two, and shows the case where the arrangement of c is adopted. The solid line L in the vertical direction indicates a straight line extending in a direction orthogonal to the horizontal direction with respect to the parallel direction from the center position of the table surface, and the straight line D is a parallel direction from the center position of the table surface. Shows an extended straight line. It is a plan view of the basic configuration (1) in which adjacent galvano scanners are set by units of two, and the arrangement of b is adopted for the galvano scanner on one side, and the galvano scanner on the other side. The case where the arrangement of c is adopted is shown. The solid line L in the vertical direction indicates a straight line extending in a direction orthogonal to the horizontal direction with respect to the parallel direction from the center position of the table surface, and the straight line D is a parallel direction from the center position of the table surface. Shows an extended straight line. It is a plan view of the basic configuration (2) in which each adjacent galvano scanner is set in the unit of every two, and shows the case where the arrangement of a is adopted. The solid line L in the vertical direction is parallel to the center position of the table surface and the center position by half the distance from the oscillation source of the laser beam or the electron beam to the first mirror. A straight line extending in a direction orthogonal to the parallel direction from a specific position selected in the region between the position and the position deviating along the direction is shown as a straight line D. Indicates a straight line extending in a parallel direction from the center position of the table surface, and d indicates the distance between the center position and the selected position. It is a plan view of the basic configuration (2) in which each adjacent galvano scanner is set in the unit of every two, and shows the case where the arrangement of b is adopted. The solid line L in the vertical direction is parallel to the center position of the table surface and the center position by half the distance from the oscillation source of the laser beam or the electron beam to the first mirror. A straight line extending in a direction orthogonal to the parallel direction from a specific position selected in the region between the position and the position deviating along the direction is shown as a straight line D. Indicates a straight line extending in a parallel direction from the center position of the table surface, and d indicates the distance between the center position and the selected position. It is a plan view of the basic configuration (2) in which each adjacent galvano scanner is set in the unit of every two, and shows the case where the arrangement of c is adopted. The solid line L in the vertical direction is parallel to the center position of the table surface and the center position by half the distance from the oscillation source of the laser beam or the electron beam to the first mirror. A straight line extending in a direction orthogonal to the parallel direction from a specific position selected in the region between the position and the position deviating along the direction is shown as a straight line D. Indicates a straight line extending in a parallel direction from the center position of the table surface, and d indicates the distance between the center position and the selected position. It is a plan view of the basic configuration (2) in which each adjacent galvano scanner is set in units of two, and the arrangement of b is adopted for the galvano scanner on one side, and the galvano scanner on the other side is used. The case where the arrangement of c is adopted is shown. The solid line L in the vertical direction is parallel to the center position of the table surface and the center position by half the distance from the oscillation source of the laser beam or the electron beam to the first mirror. A straight line extending in a direction orthogonal to the parallel direction from a specific position selected in the region between the position and the position deviating along the direction is shown as a straight line D. Indicates a straight line extending in a parallel direction from the center position of the table surface, and d indicates the distance between the center position and the selected position. It is a plan view which shows the characteristic point of the basic structure (4), and (a), (b), (c), and (d) are FIG. 3 (a), FIG. 3 (b), and FIG. 4 (c), respectively. , Corresponds to FIG. 4 (d). The dotted line E is shown in FIGS. 3 (a), 3 (b), 3 (c), 3 (d), 4 (a), 4 (b), 4 (c), and 4 (c). A straight line extending in a direction parallel to the straight line D in (d) is shown. It is a plan view which shows the characteristic point of the basic structure (5), and (a), (b), and (c) correspond to FIG. 3 (a), FIG. 3 (d), and FIG. 4 (c), respectively. There is. The dotted line E is shown in FIGS. 3 (a), 3 (b), 3 (c), 3 (d), 4 (a), 4 (b), 4 (c), and 4 (c). A straight line extending in a direction parallel to the straight line D in (d) is shown. 2 (a) is a plan view and a side view showing an embodiment in which the second mirrors of the galvano scanners adjacent to each other at different height positions are arranged at different positions along the parallel direction. The case of the basic configuration (1) is shown, and the case of (b) shows the case of the basic configuration (2). The arrows in both directions on the straight line L in each of the plan views (a) and (b) indicate that the lower side view is the side view in the straight line L. An embodiment is shown in which a part of the configuration of each galvano scanner is tilted with respect to the horizontal direction, and (a) is tilted so that the longitudinal direction reaches the position of the rotation center axis in the first mirror. It is a side view in the longitudinal direction which shows the case of arranging in a state, and (b) arranges the longitudinal direction of each galvano scanner along the horizontal direction, and makes the projecting direction of the 2nd mirror upward. It is a side view of the direction orthogonal to the longitudinal direction which shows the case where the rotation direction of each 2nd mirror in the adjacent galvano scanners is set in the opposite direction, and is arranged at the same inclination angle, and (c) is a galvano. The longitudinal direction of the scanner is arranged in an inclined state so as to face upward up to the position of the rotation center axis in the first mirror, the rotation center axis of the first mirror is set in the vertical direction, and the second mirror is projected. A side view is shown when the product is arranged at an inclination angle such that the direction is upward. The arrows in both directions in FIG. 8A indicate a state in which the first mirror reflects a laser beam or an electron beam traveling in an upward tilting direction in the horizontal direction. It is a schematic side view for calculating the distance of the central position of the rotation center axis between two 2nd mirrors based on the basic structure (5) shown in FIG.

As shown in FIGS. 3 (a), 3 (b), 3 (c), and 3 (d), the basic configuration (1) is a squeegee in which powder is laminated on a table 4 via running. A three-dimensional modeling apparatus including a plurality of galvano scanners 3 for scanning a laser beam or an electron beam 7 on a powder layer 5, and each galvano scanner 3 is a laser beam or an electron beam 7 transmitted through a dynamic focus lens 2. On the other hand, the rotation center axis in the first mirror 31 is independent of the rotation of the first mirror 31 and the first mirror 31 that rotate via the rotation center axis 30 in the direction orthogonal to the transmission direction. A two-dimensional direction relative to the orthogonal coordinates of the laser beam or electron beam 7 due to reflection from the second mirror 32 that is orthogonal to the direction of 30 and rotates via the rotation center axis 30 in the horizontal direction. Scanning is realized, and the region containing the oscillation source 1 of the laser beam or the electron beam 7 is the rear end side of the plurality of galvano scanners 3, and the region containing the first mirror 31 is the front end. The longitudinal direction in the galvano scanner 3 adjacent to each other in units of two on both sides of the parallel direction while being parallel to the longitudinal direction which is the same direction as the transmission direction is set to the opposite direction only. The second mirror 32 is set with respect to the straight line L extending in the direction orthogonal to the parallel direction from the center position P of the surface of the table 4 in each galvano scanner 3. The rotation center axis 30 of each second mirror 32 is set in the parallel direction, and each second mirror 32 is rotated on a surface that rotates for the reflection and a surface that rotates on the second mirror 32. The end portions located at positions orthogonal to the moving center axis 30 are arranged in a state of sandwiching the straight line L from both sides in the parallel direction, or the first mirror 31 is accommodated as described above. The second mirror is separated from the straight line L together with the region on the front end side and the region on the rear end side accommodating the laser beam or the electron beam oscillation source 1 as described above, and the end portion thereof is relative to the straight line L. Arrange them in close proximity at a distance smaller than the length of the rotation center axis 30 of 32, or in the straight line L together with the entire region on the tip side accommodating the first mirror 31 as described above. On the other hand, as described above, the side opposite to the region on the rear end side accommodating the laser beam or the electron beam oscillation source 1, and the end portion is the rotation center of the second mirror 32 with respect to the straight line L. Closed at a distance smaller than the length of the shaft 30 It is a three-dimensional modeling device that is either arranged in a state.

As shown in FIGS. 3 (a), 3 (b), 3 (c), and 3 (d), in the basic configuration (1), each galvano scanner 3 is based on the above a, b, and c. Individual arrangements can be selected, but in any arrangement, uniform irradiation by the second mirror 32 is realized, and the distance between the second mirrors 32 is compactly arranged, while in the parallel direction. The fact that the space on the surface of the table 4 is effectively used has already been explained in the section of effect.

3 (a), 3 (b), 3 (c), and 3 (d) are based on a configuration in which each adjacent galvano scanner 3 is used as two units, and the adjacent galvano scanners 3 are used as two units. It is based on the fact that the irradiation region of the second mirror 32 can be appropriately allocated after setting the longitudinal direction in No. 3 only in the reverse direction.

However, it is naturally possible to adopt a configuration that secures a necessary and sufficient irradiation area by adopting the galvano scanner 3 that is out of the two adjacent units in this way, and this point is the basic configuration ( As will be described later in line with 3).

As shown in FIGS. 4 (a), 4 (b), 4 (c), and 4 (d), the basic configuration (2) is a squeegee in which powder is laminated on a table 4 via running. A three-dimensional modeling apparatus including a plurality of galvano scanners 3 for scanning a laser beam or an electron beam 7 on a powder layer 5, and each galvano scanner 3 is a laser beam or an electron beam 7 transmitted through a dynamic focus lens 2. On the other hand, the rotation center axis in the first mirror 31 is independent of the rotation of the first mirror 31 and the first mirror 31 that rotate via the rotation center axis 30 in the direction orthogonal to the transmission direction. Two-dimensional direction with respect to the orthogonal coordinates of the laser beam or electron beam 7 due to reflection from the second mirror 32 that is orthogonal to the direction of 30 and rotates via the rotation center axis 30 in the horizontal direction. Scanning is realized, and the region containing the oscillation source 1 of the laser beam or the electron beam 7 is the rear end side of the plurality of galvano scanners 3, and the region containing the first mirror 31 is the front end. The longitudinal direction of the galvano scanners 3 adjacent to each other in units of two on both sides of the parallel direction is parallel to the longitudinal direction which is the same direction as the transmission direction. In each galvano scanner 3, the center position P on the surface of the table 4 and the rotation region of the first mirror 31 are reached from the rear end of the oscillation source 1 of the laser beam or the electron beam 7 with respect to the center position P. Along the horizontal direction with respect to the parallel direction from a specific position selected in the region between the position and the position deviating along the parallel direction by a distance of 1/2 of the distance to. With respect to the straight line L extending in the orthogonal direction, the second mirror 32 is set in the parallel direction with the rotation center axis 30 of each second mirror 32 in the parallel direction, and is rotated in each second mirror 32 for the reflection. The end portions of the moving surface and the rotating surface located in the direction orthogonal to the rotation center axis 30 are arranged in a state of sandwiching the straight line L from both sides in the parallel direction. Along with the region on the front end side accommodating the first mirror 31 as described above and the region on the rear end side accommodating the laser beam or electron beam oscillation source 1 as described above, the region is separated from the straight line L and the end thereof. The portions are arranged in a state of being close to the straight line L at a distance smaller than the length of the rotation center axis 30 of the second mirror 32, or accommodate the first mirror 31 as described above. With respect to the straight line L together with the entire area on the tip side , The rotation center axis of the second mirror 32 with respect to the straight line L, which is on the side opposite to the region on the rear end side accommodating the laser beam or the electron beam oscillation source 1 as described above. It is a three-dimensional modeling apparatus that is either arranged in a close state at a distance smaller than the length of 30 .

As shown in FIGS. 4 (a), 4 (b), 4 (c), and 4 (d), even in the basic configuration (4), each galvano scanner 3 has 3 according to the above a, b, and c. Individual arrangements can be selected, but in any arrangement, uniform irradiation by the second mirror 32 and compact arrangement of the second mirrors 32 are realized, while the space on the surface of the table 4 is effective. As already explained in the section on effects, it is possible to realize a more compact arrangement state than in the case of the basic configuration (1) for the entire galvano scanner 3.

As shown in FIGS. 4 (a), 4 (b), 4 (c), and 4 (d), even in the basic configuration (2), the adjacent galvano scanners 3 are used as two units. The longitudinal direction of the adjacent galvano scanners 3 is set only in the same direction. However, regarding the adoption of the configuration of such two units and the basis of the setting, the basic configuration (1) ) Is the same.
However, it is naturally possible to adopt a configuration that secures a necessary and sufficient irradiation area by adopting the galvano scanner 3 that is out of the two adjacent units in this way, and this point is the basic configuration ( As will be described later in line with 3).

The basic configuration (3) has the parallel direction from the center position P as shown in FIGS. 1 (b) and 1 (d) of the first embodiment and FIGS. 2 (b) and 2 (d) of the second embodiment described later. It is characterized in that one galvano scanner 3 is arranged on the straight line L extended in.

The realization of efficient 3D modeling with such feature points has already been pointed out in the section on effects.

In FIGS. 1 (b) and 1 (d) and FIGS. 2 (b) and 2 (d), the galvano scanner 3 on the straight line D by the dotted line passing through the center position P of the surface of the table 4 is the adjacent galvano scanner 3. Although it is out of the unit of every two pieces, the galvano scanner 3 which realizes the feature points of the basic configuration (3) while being a single galvano scanner 3 exerts an important function for efficient three-dimensional modeling. ..
However, the galvano scanner 3 deviated from the two units is not only when it is arranged on the straight line D as in the basic configuration (3), but also when it is separated from the straight line D and another galvano scanner 3 is arranged. It can be arranged at an end or an intermediate portion between the end and the straight line D.

As shown in FIGS. 5 (a), (b), (c), and (d), the basic configuration (4) is adjacent to each other at the same height position in the basic configurations (1) and (2). In each of the second mirrors 32 of each galvano scanner 3, the surface rotating due to the reflection is set to a straight line E set in the parallel direction when forming the minimum tilt angle with respect to the horizontal direction. On the other hand, it is characterized in that they are arranged in a state of being close to each other at a distance smaller than the length of the rotation center axis 30 of the second mirror 32.

With the above feature points, in the basic configuration (4), it is possible to realize a compact arrangement state for each galvano scanner 3 adjacent to each other in the direction of the straight line L, and this point has already been described in the section of effect. As explained.

As shown in FIGS. 6A, 6B, and 6C, the basic configuration (5) is a galvano scanner 3 adjacent to each other at different height positions in the basic configurations (1) and (2). The rotating surface of each of the second mirrors 32 in the above is the rotation center axis 30 and the rotating surface with respect to the straight line D set in the parallel direction in the case of the minimum inclination angle with respect to the horizontal direction. It is characterized in that the end portion on the side of the projecting direction is located on the opposite side.

Due to such feature points, in the basic configuration (5), the rotation surface of each second mirror 32 extends to the region where the adjacent galvano scanner 3 exists when the inclination angle is the minimum, so that the straight line D is formed. It has already been explained in the section of effect that a configuration more compact than the basic configuration (4) can be realized in the direction.

In the basic configurations (4) and (5), FIGS. 3 (a), 3 (d), 4 (a), (b), (c), 5 (a), (c), 6 As shown in (a), (b), and (c), the second mirrors 32 in the adjacent galvano scanners 3 are arranged at the same position in the parallel direction and in opposite directions to each other. It is possible to select and adopt an embodiment characterized in that the rotation direction is set, and FIG. 3 (b), FIG. 3 (c), FIG. 4 (d), and FIG. 5 ( b), as shown in FIGS. 5 (d), 7 (a), and (b), each second mirror 32 in each adjacent galvano scanner 3 is arranged in the horizontal direction with respect to the parallel direction. Select and adopt an embodiment characterized in that they are arranged in opposite directions with respect to the straight line L set in the direction orthogonal to each other and the rotation directions in the opposite directions are set. can do.

The galvano scanners are common in that the functions of the second mirrors 32 are equally shared when the sintered surface 6 is formed by irradiating the powder layer 5 of the laser beam or the electron beam 7 in each of the above embodiments. It is the same even in the compact arrangement state of 3, and it does not mean that they are different from each other.

Normally, the rotation center angle of the second mirror 32 is 45 ° with respect to the horizontal direction, and the rotation amplitude is ± 11 °.

Therefore, the minimum tilt angle is 45 ° -11 ° = 34 °.

If it corresponds to the minimum tilt angle, it is orthogonal to the rotation center axis 30 of the second mirror 32 in the case of the embodiment in which the second mirrors 32 in the adjacent galvano scanners 3 are arranged so as to face each other. When the width in the direction of rotation is 50 mm, the width of the tilt angle in the rotation direction is
50 mm x cos 34 ° ≒ 50 mm x 0.829 ≒ 41.5 mm
Therefore, the distance of the rotation center shaft 30 can be set to 45 mm in consideration of the margin width of 3.5 mm.

On the other hand, in the case of the basic configuration (5) shown in FIG. 6, a more compact configuration can be realized in the direction of the straight line D as compared with the above embodiment.

Specifically, two galvano scanners 3 having a second mirror 32 having a width of 50 mm from the upper end to the lower end in the rotation stage are adopted, and the central position of each rotation center axis 30 is Q. The minimum value that can be adopted at the minimum distance of the distance of the center position Q of the rotation center axis 30 between the two second mirrors 32 when the laser beam or the electron beam 7 incident in the horizontal direction is reflected. In line with FIG. 9, it will be clarified as follows.

が成立する。 As shown in FIG. 9, a laser beam or an electron beam 7 in the horizontal direction is incident on the upper second mirror 32, and the inclination angle of the second mirror 32 with respect to the horizontal direction is α, and the lower second mirror 32 is used. The rotation center axis 30 of the upper second mirror 32 when the inclination angle of the mirror 32 with respect to the horizontal direction is β and the lower end of the upper second mirror 32 abuts on the laser beam or electron beam 7 reflected by the mirror. The horizontal distance between the center position Q and the lower end position of the lower second mirror 32 is x, the vertical distance is y, and the distance between the upper end and the lower end of each second mirror 32. Is 2L, and the transmission distance until the reflected laser beam or electron beam 7 comes into contact with the lower end of the lower second mirror 32 is a.

Is established.

Here, even when the upper second mirror 32 reaches the maximum tilt angle γ ₁ , the lower end of the upper second mirror 32 and the center position Q of the lower second mirror 32 in the rotation center axis 30. When the height positions are the same and the contact state is as shown in FIG. 9, the lower end of the upper second mirror 32 may collide with the rotating surface of the lower second mirror 32. do not have.

であることから、

が成立する。 When the upper second mirror 32 has the minimum tilt angle γ ₂ which is the requirement, and the tilt angle of the lower second mirror 32 maintains β, the height positions are the same. By FIG.

Because it is

Is established.

When the distance a until the laser beam or the electron beam 7 is reflected from the upper second mirror 32 and comes into contact with the lower end of the lower second mirror 32 has a maximum value, the lower second mirror 32 has a maximum value. Corresponds to the situation just before reaching the state where it is most difficult to block the laser beam or the electron beam 7 reflected from the upper second mirror 32.

を得ることができる。 In order for the a to be the maximum value,
β = maximum tilt angle γ ₁
Needs to be established, and in the end

Can be obtained.

が成立する。 As in the basic configuration (2), the tilt angle of the upper first mirror 31 is the minimum value γ ₂ , and as described above,
β = γ ₁
If so,

Is established.

という近似式が成立する。 Generally, since γ ₁ = 56 ° and γ ₂ = 34 ° are usually present,

The approximate expression is established.

When the width of the upper end and the lower end in the rotation stage is 2L = 50 mm
x≈31.7 mm
Can be obtained.

Therefore, when the margin width of 2.3 mm is taken into consideration, the minimum of the central position Q on the rotation center axis 30 of the upper second mirror 32 and the center position Q on the rotation center axis 30 of the lower second mirror 32. The distance can be set to 34 mm.

As described in line with the second mirror 32 on the left side of FIG. 9, the horizontal one-sided width of the second mirror 32 at the minimum tilt angle of 34 ° is.
25 mm x cos 34 ° = 25 mm x 0.8290 ≒ 20.7 mm.

であることが判明する。 Therefore, considering that the numerical value when both second mirrors 32 exhibit the minimum tilt angle is 41.4 mm, the minimum distance of 34 mm is the partial region of both second mirrors 32. It clearly supports the fact that they overlap in the horizontal direction even when the minimum tilt angle is exhibited without reaching the horizontal angle.
If the above approximate expression of x≈1.266L is established,

Turns out to be.

Normally, each galvano scanner 3 is arranged in a horizontal state in the height direction.
However, the basic configurations (1) and (2) are not limited to such a horizontal state.

That is, as shown in FIGS. 8A, 8B, and 8C, it is also possible to adopt an embodiment in which each galvano scanner 3 is tilted with respect to the horizontal direction.

Specifically, as shown in FIG. 8A, the longitudinal direction of each galvano scanner 3 is arranged in an inclined state so as to face upward until the position of the rotation center axis 30 in the first mirror 31. An embodiment characterized in that the rotation center axis 30 of the first mirror 31 is tilted according to the tilt angle, and the first mirror 31 reflects a laser beam or an electron beam 7 in the horizontal direction. As shown in FIG. 8B, the longitudinal direction of each galvano scanner 3 is arranged along the horizontal direction, and the second mirror 32 is arranged in an inclined state such that the projecting direction of the second mirror 32 faces upward, and the first By installing the rotation center axis 30 of the mirror 31 in the direction of tilting according to the tilt angle, the first mirror 31 reflects the laser beam or the electron beam 7 in the tilt direction, and the adjacent galvano An embodiment characterized in that the rotation direction of each second mirror 32 in the scanner 3 is set in the opposite direction can also be adopted.

In the case of the embodiment shown in FIG. 8A, since it is necessary that the laser beam or electron beam 7 inclined upward and the first mirror 31 reflect in the horizontal direction, FIG. 8 (a) shows the embodiment. As shown in a), the rotation center axis 30 of the first mirror 31 is not in the vertical direction but in the vertical direction in order to reflect the laser beam or the electron beam 7 traveling in the upwardly inclined direction in the horizontal direction. As shown in FIG. 8A, it is indispensable to set the tilting direction in accordance with the tilting angle with respect to the tilting direction.

In the embodiment shown in FIG. 8B, in order to travel straight in the horizontal direction and reflect the laser beam or the electron beam 7 in a direction in which the laser beam or the electron beam 7 is inclined upward along the direction in which the second mirror 32 is projected. It is necessary to set the rotation center axis 30 of the first mirror 31 in a direction in which the rotation center axis 30 is tilted according to the tilt angle, as shown in FIG. 8B, with respect to the direction, not in the vertical direction. Make it indispensable.

On the other hand, as shown in FIG. 8 (c), the galvano scanner 3 is arranged in an inclined state in which the longitudinal direction of the galvano scanner 3 faces upward up to the position of the rotation center axis 30 in the first mirror 31, and the first mirror 31 is arranged. When the embodiment characterized in that the rotation center axis 30 of the above is set in the vertical direction and is arranged at an inclination angle such that the projecting direction of the second mirror 32 faces upward, the upper side is adopted. The laser beam or electron beam 7 traveling in the direction inclined toward the surface is reflected upward by the first mirror 31 having the rotation center axis 30 set in the vertical direction in the direction in which the second mirror 32 is projected. Therefore, as shown in FIGS. 8A and 8B, it is not necessary to set the rotation center axis 30 of the first mirror 31 in the tilt direction.

The embodiment shown in FIG. 8C is the simplest in the method of setting the rotation center shaft 30 of the first mirror 31.

In the case of each of the embodiments shown in FIGS. 8A, 8B, and 8C, it is possible to realize a more compact arrangement of each galvano scanner 3 in the parallel direction.

In the case of each of the above embodiments, the position of the second mirror 32 with respect to the surface of the table 4 is high, but as a result, the change state of the irradiation angle with respect to the powder layer is small.

Generally, in three-dimensional modeling, the rotation speeds of the first mirror 31 and the second mirror 32 are controlled in order to make the degree of irradiation by the second mirror 32 uniform, and the irradiation angle is small. The rotation speeds of the first mirror 31 and the second mirror 32 are set to be smaller.
However, uniform irradiation is not always guaranteed by the control by the above setting.

In such a case, in the case of each of the above-described embodiments, the accuracy of the control can be improved because the change state of the tilt angle is small.
It should be noted that the embodiment shown in FIG. 8A can be evaluated to be superior to the embodiment shown in FIG. 8B in terms of the effect of the compact configuration and the degree of improvement in the accuracy of the control. can.

In the basic configurations (1), (2), (3), (4), and (5), a cutting tool for cutting the surface of the sintered three-dimensional model is not indispensable, but it depends on the precise shape. Cutting tools are often used to realize three-dimensional objects.

Hereinafter, the description will be given according to an embodiment.

In the first embodiment, as shown in FIGS. 1 (a), (b), (c), (d), and (e), two, four, or two or four are based on the basic configuration (1). Six galvano scanners 3 are arranged point-symmetrically with respect to the center position P, or one of three or five galvano scanners 3 is arranged on the center position P, and the remaining two or The remaining four galvano scanners 3 are arranged symmetrically with respect to a straight line L extending in the parallel direction from the center position P.

With such feature points, the first embodiment can actually exert the effect of the basic configuration (1).

In the second embodiment, as shown in FIGS. 2 (a), (b), (c), (d), and (e), two galvano scanners 3 or two galvano scanners 3 are used on the basis of the basic configuration (2). It is characterized in that three, four, five, or six are arranged.

With such feature points, the second embodiment can actually exert the effect of the basic configuration (2).

The present invention is epoch-making in that a plurality of galvano scanners can realize an extremely compact configuration based on the center position of the table surface and contribute to the formation of an efficient sintered surface. , Its range of use is wide.

1 Laser beam or electron beam oscillation source 2 Dynamic focus lens 3 Galvano scanner 30 Rotation center axis 31 First mirror 32 Second mirror 4 Table 7 Laser beam or electron beam P Center position of table surface D From center position of table surface A straight line by a dotted line extending in a parallel direction along the longitudinal direction of the galvano scanner L A straight line extending from the center position of the table surface in a direction orthogonal to the parallel direction Q The center position of the rotation center axis 30

Claims (16)

It is a three-dimensional modeling device equipped with a squeegee that stacks powder on a table via traveling, and a plurality of galvano scanners that scan a laser beam or an electron beam on the powder layer. Each galvano scanner is a dynamic focus lens. In the first mirror in a state independent of the rotation of the first mirror and the first mirror that rotate via the rotation center axis in the direction orthogonal to the transmission direction with respect to the laser beam or the electron beam transmitted through. Two-dimensional direction relative to the orthogonal coordinates of the laser beam or electron beam due to reflection from the second mirror that is orthogonal to the direction of the center of rotation and rotates through the center of rotation in the horizontal direction. Scanning is realized, and a plurality of galvano scanners have a region containing a laser beam or an electron beam oscillation source on the rear end side and a region containing the first mirror on the front end side. In addition to being parallel to the longitudinal direction, which is the same direction as the transmission direction, the longitudinal direction of the galvano scanners adjacent to each other in units of two on both sides of the parallel direction is set only in the opposite direction. In each galvano scanner, the second mirror and the rotation center axis of each second mirror are set with respect to a straight line extending in a direction orthogonal to the horizontal direction from the center position of the table surface to the parallel direction. In addition to being set in the parallel direction, the end portion of each second mirror that rotates due to the reflection and is located at a position perpendicular to the rotation center axis on the rotating surface immediately in the parallel direction. Then, the straight lines are arranged so as to be sandwiched from both sides, or the region on the tip side accommodating the first mirror as described above and the laser beam or electron beam oscillation source as described above are accommodated. Arranged in a state where the end portion is separated from the straight line together with the region on the rear end side and the end portion is close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror, or the above-mentioned As described above, the entire region on the distal end side accommodating the first mirror and the region on the rear end side accommodating the laser beam or electron beam oscillation source as described above with respect to the straight line are opposite to the straight line. A three-dimensional modeling device in which the ends are arranged in a state of being close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror. Two, four, or six galvano scanners are placed point-symmetrically with respect to the center position, or one of the three or five galvano scanners is placed on the center position. The three-dimensional modeling apparatus according to claim 1, wherein the remaining two or four galvano scanners are arranged line-symmetrically with respect to a straight line extending in the parallel direction from the center position. .. It is a three-dimensional modeling device equipped with a squeegee that stacks powder on a table via traveling, and a plurality of galvano scanners that scan a laser beam or an electron beam on the powder layer. Each galvano scanner is a dynamic focus lens. In the first mirror in a state independent of the rotation of the first mirror and the first mirror that rotate via the rotation center axis in the direction orthogonal to the transmission direction with respect to the laser beam or the electron beam transmitted through. Two-dimensional direction relative to the orthogonal coordinates of the laser beam or electron beam due to reflection from the second mirror that is orthogonal to the direction of the center of rotation and rotates through the center of rotation in the horizontal direction. Scanning is realized, and a plurality of galvano scanners have a region containing a laser beam or an electron beam oscillation source on the rear end side and a region containing the first mirror on the front end side. In addition to being parallel to the longitudinal direction, which is the same direction as the transmission direction, the longitudinal direction of the galvano scanners adjacent to each other in units of two on both sides of the parallel direction is set only in the same direction. In each galvano scanner, the center position of the table surface and the center position are halved of the distance from the rear end of the oscillation source of the laser beam or the electron beam to the rotation region of the first mirror. With respect to a straight line extending in a direction orthogonal to the parallel direction from a specific position selected in the region between the position and the position deviating along the parallel direction, the first. The two mirrors are set so that the rotation center axis of each second mirror is in the parallel direction, and the rotation center axis is orthogonal to the rotation center axis in the rotation surface and the rotation surface of each second mirror. With respect to the end portion at the position in the direction, the straight line is arranged in a state of sandwiching the straight line from both sides in the parallel direction, or the region on the tip side accommodating the first mirror as described above and the above-mentioned region. As described above, a distance away from the straight line together with the region on the rear end side accommodating the laser beam or the electron beam oscillation source, and the end portion of the straight line is smaller than the length of the rotation center axis of the second mirror. Arrange in close proximity to each other, or accommodate the laser beam or electron beam oscillation source as described above for the straight line together with the entire region on the tip side that accommodates the first mirror as described above. Is it arranged on the opposite side of the region on the rear end side and in a state where the end portion is close to the straight line at a distance smaller than the length of the rotation center axis of the second mirror? A three-dimensional modeling device that is one of the above. The three-dimensional modeling apparatus according to claim 3, wherein two, three, four, five, or six galvano scanners are arranged. The three-dimensional modeling apparatus according to any one of claims 1 and 2, wherein one galvano scanner is arranged on a straight line extending in the parallel direction from the center position. The planes that rotate for reflection in each second mirror of adjacent galvano scanners at the same height position are parallel to each other when forming the minimum tilt angle with respect to the horizontal direction. Claims 1, 2, 3, 4, characterized in that they are arranged in a state of being close to a straight line set in a direction at a distance smaller than the length of the rotation center axis of the second mirror. The three-dimensional modeling apparatus according to any one of 5. The sixth aspect of claim 6, wherein the second mirrors of the adjacent galvano scanners are arranged at the same position along the parallel direction, and the rotation directions in the opposite directions are set. Three-dimensional modeling device. The minimum inclination of the second mirror that reflects the laser beam or electron beam incident in the horizontal direction with the rotation center axis as the center position for each second mirror having a width of 50 mm in the direction orthogonal to the rotation center axis. The three-dimensional modeling apparatus according to claim 7, wherein the angle is 34 ° and the distance between the rotation center axes of both second mirrors is 45 mm. The second mirrors in the adjacent galvano scanners are arranged in opposite directions with respect to the straight line set in the direction orthogonal to the parallel direction in the horizontal direction , and mutually. The three-dimensional modeling apparatus according to claim 6, wherein the rotation direction is set in the opposite direction . The rotating surface of each second mirror in each galvano scanner adjacent to each other at different height positions is relative to a straight line set in the parallel direction when forming the minimum tilt angle with respect to the horizontal direction. 1 . The three-dimensional modeling apparatus described in item 1. The tertiary according to claim 10, wherein the second mirrors in the adjacent galvano scanners are arranged at the same position along the parallel direction, and the rotation directions in the opposite directions are set. Former modeling equipment. The minimum inclination of the second mirror that reflects the laser beam or electron beam incident in the horizontal direction with the rotation center axis as the center position for each second mirror having a width of 50 mm in the direction orthogonal to the rotation center axis. The three-dimensional modeling apparatus according to claim 11, wherein the angle is 34 ° , and the distance between the rotation center axes of both second mirrors is 34 mm in the horizontal direction. The three-dimensional modeling apparatus according to claim 10, wherein the second mirrors of the galvano scanners adjacent to each other at different height positions are arranged at different positions along the parallel direction. The longitudinal direction of each galvano scanner is arranged in an inclined state so as to face upward up to the position of the rotation center axis in the first mirror, and the rotation center axis of the first mirror is tilted according to the inclination angle. The three-dimensional modeling apparatus according to any one of claims 1, 2, 3, 4, and 5, wherein the first mirror reflects a laser beam or an electron beam in the horizontal direction. The longitudinal direction of each galvano scanner is arranged along the horizontal direction and is arranged in an inclined state so that the projecting direction of the second mirror faces upward, and the rotation center axis of the first mirror is immediately set to the inclination angle. By installing the mirror in the tilting direction, the first mirror reflects the laser beam or the electron beam in the tilting direction, and the rotation direction of each second mirror in the adjacent galvano scanner is set in the opposite direction. The three-dimensional modeling apparatus according to any one of claims 1, 2, 3, and 4. The longitudinal direction of the galvano scanner is arranged in an inclined state so as to face upward up to the position of the rotation center axis in the first mirror, the rotation center axis of the first mirror is set in the vertical direction, and the protrusion of the second mirror. The three-dimensional modeling apparatus according to any one of claims 1, 2, 3, 4, and 5, wherein the three-dimensional modeling apparatus is arranged at an inclination angle such that the installation direction is upward .

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