JP6714269B1 - 3D modeling method and 3D modeling apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a configuration that enables efficient and uniform three-dimensional modeling by two-dimensional scanning because all the laser beams that are scanned after passing through a plurality of galvano scanners contribute to the formation of a sintered surface. To provide. SOLUTION: A first mirror 31 vibrating via a rotation axis 30 orthogonal to the transmission direction of a laser beam 7 transmitted through a dynamic focus lens 2 and a rotation axis 30 of the first mirror 31, and the horizontal direction. The plurality of galvano scanners 3 that realize the scanning of the laser beam 7 along the two-dimensional directions of the rectangular coordinates or the cylindrical coordinates by the reflection from the second mirror 32 that vibrates via the rotation axis 30 of Based on the control for the vibration, the vibration range is adjustable, and the area of the sintered surface 6 at or near the focal point of the laser beam 7 which is obliquely applied to the surface of the table 4 is selectable. A three-dimensional modeling method and apparatus that achieves the above object. [Selection diagram] Figure 1

Description

The present invention is directed to a three-dimensional modeling method and a three-dimensional modeling apparatus that employs a plurality of galvano scanners that two-dimensionally scan a laser beam that sequentially passes through a dynamic focus lens and is focused.

In the three-dimensional modeling in which the sintered surface is formed by irradiating the powder layer laminated on the table with the laser beam, the laser beam transmitted through the dynamic focus lens that can adjust the focal length is struck by the galvano scanner. Is being scanned.

When a plurality of galvano scanners that realize the above-mentioned scanning are adopted, and a laser beam transmitted through the plurality of galvano scanners is obliquely irradiated to the table surface to irradiate in the orthogonal direction On the other hand, a three-dimensional modeling method that realizes efficient scanning by a plurality of laser beams after the space required for three-dimensional modeling is set compactly is disclosed in Patent Document 1 (hereinafter referred to as “Prior invention 1”). Similarly, a plurality of galvano scanners 3, 3a are employed and the laser beams 7, 7a transmitted through the plurality of galvano scanners 3, 3a are oblique to the table surface. The configuration of a three-dimensional modeling apparatus that exerts the above-mentioned effects by irradiating in a direction is also disclosed as the invention described in Patent Document 2 (hereinafter referred to as "prior invention 2").

However, in the prior inventions 1 and 2, the scanning (scanning) of the laser beams 7 and 7a is performed on the entire flat surface located above the entire area surface of the table 13 (see FIG. 1 of Patent Document 1). , ABSTRACT, third column, line 22, fourth column, line 40, the disclosure that all flat surfaces in claim 1 are to be scanned, and FIG. 1 of Patent Document 2, ABSTRACT, third column, line 9, fourth. (Disclosure that all flat surfaces in column 26 are common scanning targets, and disclosure that the laser beam in claim 1 moves while crossing the flat surfaces).

The flat surface corresponds to the focal plane 5 formed as a control for the focus adjustment units 9 and 9a (FIG. 4 of Patent Document 1 and FIG. 4 of Patent Document 2), but in the entire area of the focal plane 5, the laser is used. Sintering by irradiation of the beams 7 and 7a is not performed, and irradiation of the laser beams 7 and 7a at the focus of the focal plane 5 is performed only by the control of the focus adjustment units 9 and 9a. However, it is essential to control the laser beams 7 and 7a so that they do not reach the focal plane 5 in a region where sintering is not required.

Because, if such control is not performed, the entire flat surface, that is, the entire area of the focal plane 5, is always subject to sintering, and a forming area of the sintered surface is required in accordance with each focal surface 5. This makes it impossible to select according to

However, performing the irradiation accompanied by the scanning of the laser beam on the region where the sintered surface is not formed means that inefficient three-dimensional modeling is performed in terms of performing unnecessary scanning and irradiation.

In each of the Galvano scanners 3 and 3a of the prior inventions 1 and 2, the first mirror that reflects the laser beams 7 and 7a that have passed through the focus adjusting units 9 and 9a and the laser beam 7 that is reflected from the first mirror, A second mirror for further reflecting 7a is provided.
However, in the prior inventions 1 and 2, there is no description about the first mirror and the second mirror, and as a result, how the first mirror and the second mirror are based on the center position on the upper surface of the table 13 is used as a reference. It is attributed to whether or not they are arranged, which is completely unspecified and which can be selected.

Therefore, it is naturally possible to select a design in which each second mirror is arranged outside each first mirror with reference to the center position of the surface of the table 13.

Incidentally, FIG. 3 showing prior inventions 1 and 2 suggests that each second mirror is arranged inside each first mirror with respect to the center position. The above merely illustrates the embodiment (the description of FIG. 3), and the disclosure of FIG. 3 does not serve as a basis for denying that the above selection is possible.

However, in the case of such a design, as compared with the design by the opposite arrangement, that is, the design in which the second mirror is arranged inside the first mirror with reference to the center position, the distance between the second mirrors is increased. Inevitably, when the laser beam exceeds the center position to form the sintered surface, the illuminance decreases as the distance from the center position increases, while the illuminance decreases on the table surface. On the other hand, in the case of irradiation in the vertical direction, the shape of the sintered surface becomes inaccurate by forming a substantially elliptical sintered surface instead of forming a substantially circular sintered surface. However, it is unavoidable that the contour at the boundary of the sintered surface becomes unclear due to.

In addition, in the cases of the prior inventions 1 and 2, the direction of the rotation axis in which the second mirror vibrates is unspecified, and the technical drawbacks due to such unspecified are as described later.

US 10,029,333B2 publication US9,314,972B2 publication

The present invention provides a three-dimensional modeling configuration that includes a plurality of galvano scanners for a laser beam that passes through a dynamic focus lens and that enables efficient and uniform two-dimensional scanning and irradiation of the laser beam. Is an issue.

In order to achieve the above object, the basic configuration of the present invention is
(1) A three-dimensional modeling method that includes a process of laminating powder on a table through running of a squeegee and a process of sintering a laminated powder layer by irradiating a laser beam, wherein a dynamic focus lens is used in the irradiation. To the laser beam transmitted through the first mirror and the first mirror vibrating via the rotation axis in the direction orthogonal to the transmission direction, and the state orthogonal to the direction of the rotation axis in the first mirror independent of the vibration of the first mirror. , And employs a plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from a second mirror that vibrates via a horizontal rotation axis. Moreover, by making the vibration range of each first mirror and each second mirror adjustable, the area of the sintered surface by the irradiation of the laser beam transmitted through each galvano scanner can be selected, and the focal length of the dynamic focus lens can be selected. Is adjusted to irradiate the sintered surface at or near the focal position of the laser beam, and the first mirror in each galvano scanner vibrates via the rotary shaft in the direction oblique to the table surface, and A three-dimensional modeling method in which the laser beam transmitted through the dynamic focus lens is horizontal and the rotation axis of the first mirror is orthogonal to the direction of the laser beam,
(2) A three-dimensional modeling method which includes a process of laminating powder on a table through running of a squeegee, and a process of sintering a laminated powder layer by laser beam irradiation, wherein a dynamic focus lens is used in the irradiation. To the laser beam transmitted through the first mirror and the rotation axis of the first mirror that vibrates via the rotation axis in the direction orthogonal to the transmission direction via the arm, A laser beam cylinder is reflected by a second mirror that vibrates as a unit at a distance, is orthogonal to the direction of the rotation axis of the first mirror, and vibrates through the horizontal rotation axis. By adopting a plurality of galvano scanners that realize scanning in two-dimensional directions based on coordinates, and by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, each galvano scanner can be adjusted. The area of the sintered surface can be freely selected by irradiation of the laser beam transmitted through the scanner, and by adjusting the focal length of the dynamic focus lens, the sintered surface is irradiated at or near the focal position of the laser beam, The first mirror in each galvano scanner vibrates via the rotation axis in the direction oblique to the table surface, and the laser beam transmitted through the dynamic focus lens is horizontal, and the rotation axis of the first mirror is A three-dimensional modeling method orthogonal to the direction of the laser beam,
(3) A three-dimensional modeling apparatus including a squeegee that stacks powder on a table through running and a sintering device that irradiates the powder layer with a laser beam, and through the irradiation, a dynamic focus lens is transmitted. A first mirror that vibrates via a rotation axis in a direction orthogonal to the transmission direction with respect to the laser beam, and a state independent of vibration of the first mirror, and is orthogonal to the direction of the rotation axis in the first mirror; In addition, a plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and By providing the control device for adjusting the vibration range of the vibration driving device for one mirror and the vibration driving device for each second mirror respectively, the area of the sintered surface by the irradiation of the laser beam can be selected and the dynamic focus can be achieved. By adjusting the focal length of the lens, the sintered surface is irradiated at or near the focal position of the laser beam, and the first mirror in each galvano scanner vibrates via the rotation axis in the direction oblique to the table surface. In addition, the laser beam transmitted through the dynamic focus lens is horizontal, and the rotation axis of the first mirror is orthogonal to the direction of the laser beam.
(4) A three-dimensional modeling apparatus including a squeegee that stacks powder on a table through running, and a sintering device that irradiates the powder layer with a laser beam, wherein the dynamic focus lens is transmitted during the irradiation. The laser beam is connected to the first mirror that vibrates through the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror through the arm, thereby equidistant positions around the rotation axis. The laser beam has a cylindrical coordinate as a reference by reflection from a second mirror that vibrates as a unit and is orthogonal to the direction of the rotation axis of the first mirror and that vibrates via the horizontal rotation axis. Of a plurality of galvano scanners that realize two-dimensional scanning, and a control device that adjusts the vibration range of the vibration drive device for each first mirror and a vibration drive device for each second mirror. By providing a control device that can adjust the vibration range, the area of the sintered surface by laser beam irradiation can be selected, and by adjusting the focal length of the dynamic focus lens, the focus position of the laser beam or its vicinity can be set. Irradiates the sintered surface, the first mirror in each galvano scanner vibrates via the rotation axis in the direction oblique to the table surface, and the laser beam transmitted through the dynamic focus lens is horizontal. A three-dimensional modeling apparatus in which the rotation axis of the first mirror is orthogonal to the direction of the laser beam,
(5) A three-dimensional modeling method which includes a process of laminating powder on a table through running of a squeegee, and a process of sintering a laminated powder layer by laser beam irradiation, wherein a dynamic focus lens is used in the irradiation. To the laser beam transmitted through the first mirror and the first mirror vibrating via the rotation axis in the direction orthogonal to the transmission direction, and the state orthogonal to the direction of the rotation axis in the first mirror independent of the vibration of the first mirror. , And employs a plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from a second mirror that vibrates via a horizontal rotation axis. Moreover, by making the vibration range of each first mirror and each second mirror adjustable, the area of the sintered surface by the irradiation of the laser beam transmitted through each galvano scanner can be selected, and the focal length of the dynamic focus lens can be selected. by adjusting at the focal position or the vicinity thereof of the laser beam is irradiated sintered surface, with reference to the center position of the table surface, tertiary that each first mirror is disposed outside the respective second mirror Original modeling method,
(6) A three-dimensional modeling method, in which powders are laminated on a table through running of a squeegee, and sintering is performed by irradiating a laser beam on the laminated powder layer, which is a dynamic focus lens in the irradiation. To the laser beam transmitted through the first mirror and the rotation axis of the first mirror that vibrates via the rotation axis in the direction orthogonal to the transmission direction via the arm, A laser beam cylinder is reflected by a second mirror that vibrates as a unit at a distance, is orthogonal to the direction of the rotation axis of the first mirror, and vibrates through the horizontal rotation axis. By adopting a plurality of galvano scanners that realize scanning in two-dimensional directions based on coordinates, and by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, each galvano scanner can be adjusted. The area of the sintered surface can be freely selected by irradiation of the laser beam transmitted through the scanner, and by adjusting the focal length of the dynamic focus lens, the sintered surface is irradiated at or near the focal position of the laser beam, 3D modeling methods based on the center position of the table surface, and the respective first mirror disposed outside the respective second mirror,
(7) A three-dimensional modeling apparatus including a squeegee that stacks powder on a table through running and a sintering device that irradiates the powder layer with a laser beam, and through the irradiation, a dynamic focus lens is transmitted. A first mirror that vibrates via a rotation axis in a direction orthogonal to the transmission direction with respect to the laser beam, and a state independent of vibration of the first mirror, and is orthogonal to the direction of the rotation axis in the first mirror; In addition, a plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and By providing the control device for adjusting the vibration range of the vibration driving device for one mirror and the vibration driving device for each second mirror respectively, the area of the sintered surface by the irradiation of the laser beam can be selected and the dynamic focus can be achieved. The sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length of the lens, and each first mirror is arranged outside each second mirror with reference to the center position of the table surface. to have three-dimensional modeling apparatus,
(8) A three-dimensional modeling apparatus including a squeegee that stacks powder on a table via running and a sintering device that irradiates the powder layer with a laser beam, and through the irradiation, a dynamic focus lens is transmitted. The laser beam is connected to the first mirror that vibrates through the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror through the arm, thereby equidistant positions around the rotation axis. The laser beam has a cylindrical coordinate as a reference by reflection from a second mirror that vibrates as a unit and is orthogonal to the direction of the rotation axis of the first mirror and that vibrates via the horizontal rotation axis. Of a plurality of galvano scanners that realize two-dimensional scanning, and a control device that adjusts the vibration range of the vibration drive device for each first mirror and a vibration drive device for each second mirror. By providing a control device that can adjust the vibration range, the area of the sintered surface by laser beam irradiation can be selected, and by adjusting the focal length of the dynamic focus lens, the focus position of the laser beam or its vicinity can be set. Te is irradiated sintered surface, with reference to the center position of the table surface, three-dimensional modeling apparatus is disposed outside the respective second mirror each first mirror,
(9) A three-dimensional modeling method including the steps of laminating powder on a table through running of a squeegee and sintering the laminated powder layer by irradiating a laser beam, wherein a dynamic focus lens is used in the irradiation. To the laser beam transmitted through the first mirror and the first mirror vibrating via the rotation axis in the direction orthogonal to the transmission direction, and the state orthogonal to the direction of the rotation axis in the first mirror independent of the vibration of the first mirror. , And employs a plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from a second mirror that vibrates via a horizontal rotation axis. Moreover, by making the vibration range of each first mirror and each second mirror adjustable, the regions that are selected as adjustable as the sintered surface due to the irradiation of the laser beam transmitted through each galvanometer scanner are in agreement, and By adjusting the focal length in the dynamic focus lens, the three-dimensional modeling method of irradiating the sintered surface at or near the focal position of the laser beam,
(10) A three-dimensional modeling method that includes a process of laminating powder on a table through running of a squeegee, and a process of sintering a laminated powder layer by irradiating a laser beam, wherein a dynamic focus lens is used in the irradiation. To the laser beam transmitted through the first mirror and the rotation axis of the first mirror that vibrates via the rotation axis in the direction orthogonal to the transmission direction and the arm via the arm. A laser beam cylinder is reflected by a second mirror that vibrates as a unit at a distance, is orthogonal to the direction of the rotation axis of the first mirror, and vibrates through the horizontal rotation axis. By adopting a plurality of galvano scanners that realize scanning in two-dimensional directions based on coordinates and by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, each galvano scanner can be adjusted. The area that can be adjusted as the sintered surface by the irradiation of the laser beam that has passed through the scanner is adjustable , and furthermore, by adjusting the focal length of the dynamic focus lens, sintering is performed at or near the focal position of the laser beam. 3D modeling method illuminating the surface,
(11) A three-dimensional modeling apparatus including a squeegee that stacks powder on a table through running, and a sintering device that irradiates the powder layer with a laser beam, wherein the dynamic focus lens is transmitted during the irradiation. A first mirror that vibrates via a rotation axis in a direction orthogonal to the transmission direction with respect to the laser beam, and a state independent of vibration of the first mirror, and is orthogonal to the direction of the rotation axis in the first mirror; In addition, a plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and By providing a control device for adjusting the vibration range of the vibration driving device for one mirror and the vibration driving device for each second mirror, respectively, the regions that are selected as adjustable as the sintered surface by the irradiation of the laser beam coincide with each other. Further, by adjusting the focal length of the dynamic focus lens, the three-dimensional modeling apparatus irradiating the sintered surface at or near the focal position of the laser beam,
(12) A three-dimensional modeling apparatus including a squeegee that stacks powder on a table through running, and a sintering device that irradiates a laser beam to the powder layer, wherein the irradiation passes through a dynamic focus lens. The laser beam is connected to the first mirror that vibrates through the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror through the arm, so that equidistant positions around the rotation axis can be obtained. The laser beam has a cylindrical coordinate as a reference by reflection from a second mirror that vibrates as a unit and is orthogonal to the direction of the rotation axis of the first mirror and that vibrates via the horizontal rotation axis. Of a plurality of galvano scanners that realize two-dimensional scanning, and a control device that adjusts the vibration range of the vibration drive device for each first mirror and a vibration drive device for each second mirror. by providing a control unit for freely adjusting the oscillation range, and adjustably selected region as a sintering surface by laser beam irradiation is matched, yet by adjusting the focal length in the dynamic focus lens, the laser beam 3D modeling device irradiating the sintered surface at or near the focal point of
(13) Any one of the above (5), (6), (9), (10), characterized in that the first mirror in each galvano scanner vibrates via a vertical rotation axis that is orthogonal to the table surface. The three-dimensional modeling method according to one item,
(14) Any of the above (7), (8), (11), and (12), wherein the first mirror in each galvano scanner vibrates via a vertical rotation axis orthogonal to the table surface. The three-dimensional modeling apparatus according to one item,
Consists of.
Furthermore, in the basic configurations (1), (2), (3) and (4),
(15) The technical premise is the configuration of the reference example in which the first mirror in each galvano scanner vibrates via the rotation axis in the direction oblique to the table surface.

Three-dimensional modeling method according to basic configurations (1), (2) , (5), (6), (9), (10) and basic configurations (3), (4) , (7), (8), ( Also in the three-dimensional modeling apparatus according to 11) and 12) , the prior application inventions 1 and 2 are the same in that the space for the three-dimensional modeling is set compactly and efficient scanning is realized by a plurality of laser beams. Even if a failure or an accident occurs in a specific galvano scanner, it is possible to achieve the same effect as the above, but it is also possible to clear the failure or the accident by operating another galvano scanner. Such effects are also the same as in the cases of the prior inventions 1 and 2.
Considering the horizontal size of the galvano scanner and the area of the table surface, the basic configurations (1), (2), (3), (4) , (5), (6), (7), The actual number of the plurality of galvano scanners in (8), (9), (10), (11), and (12) is often 2 to 6.

Therefore, the basic configurations (1), (2), (3), (4) , (5), (6), (7), (8), (9), (10), (11), (12) In () , by making the vibration range of the first mirror and the vibration range of the second mirror adjustable, it is possible to irradiate the sintered surface with all the laser beams that have passed through the plurality of galvano scanners. Therefore, useless scanning and irradiation as in the prior inventions 1 and 2 can be avoided.

As a result, in scanning and energy consumption in three-dimensional modeling, it is possible to realize more efficient three-dimensional modeling as compared with the prior inventions 1 and 2.

In addition, a direction orthogonal to the laser beam transmitting direction is adopted as the rotation axis direction of the first mirror, and the rotation axis direction of the first mirror is set as the rotation axis of the second mirror. By being in the orthogonal state and in the horizontal direction, it is possible to realize uniform two-dimensional scanning (scanning) of the laser beam on the horizontal surface along the table surface.

Not only that, when the laser beam is transmitted in the horizontal direction, the direction of the rotation axis of the second mirror can be set parallel to the transmission direction. The spacing can be set to a compact state.

Further, in the basic configurations (1), (2), (3), (4), (5), (6), (7) and (8) , the laser beam transmitted through a plurality of galvano scanners is used. It is also possible to adopt an embodiment in which the sintered surfaces are mutually independent and different areas, and which cannot be realized in the prior inventions 1 and 2.

In the basic configurations (9), (10), (11), and (12) , the regions of the sintered surface due to the irradiation of the laser beams transmitted through the plurality of galvano scanners are the same, but the vibration of the first mirror is the same. Considering that it can be realized only by making the range and the vibration range of the second mirror adjustable, each of the basic configurations is the same as each of the adjustable functions in the basic configuration using a plurality of galvano scanners. Can be evaluated as an invention that effectively binds.

Particularly, in the basic configurations (5), (6), (7), and (8) , the required area of the sintered surface can be freely selected, and further, in the examples described below, the second The interval between the mirrors can be made compact and the contour at the boundary of the sintered surface can be made clear.

It is a side view which shows the structure of the reference example (15) which is a technical premise of the three-dimensional modeling method of basic structure (1), and the three-dimensional modeling apparatus of basic structure (3) (however, two dynamic focus lenses and (The case where two galvano scanners are adopted is shown.), (a) shows the case where the laser beam transmitted through the dynamic focus lens is oblique to the table surface, and (b) shows the basic configuration ( As in 1) and (3), the case where the laser beam is in the horizontal direction like the table surface is shown. The laser beam that passes through the dynamic focus lens naturally includes a direction that is oblique or orthogonal to the paper surface of FIGS. 1A and 1B. In consideration of such an inclusion state, the laser beam travels. The mark at the tip of the directional arrow indicates the reflection position. It is a side view which shows the structure of the reference example (15) which is a technical premise of the three-dimensional modeling method of basic structure (2), and the three-dimensional modeling apparatus of basic structure (4) (however, two dynamic focus lenses and (The case where two galvano scanners are adopted is shown.), (a) shows the case where the laser beam transmitted through the dynamic focus lens is oblique to the table surface, and (b) shows the basic configuration ( 2) and (4) show the case where the laser beam is in the horizontal direction like the table surface. It should be noted that the laser beam that passes through the dynamic focus lens naturally includes a direction that is oblique or orthogonal to the paper surface of FIGS. 2A and 2B, and the laser beam travels in consideration of such an inclusion state. The mark at the tip of the directional arrow indicates the reflection position. The three-dimensional modeling method of the basic configurations (5) and (9) and the three-dimensional modeling apparatus of the basic configurations (7) and (11) , showing the configurations when the basic configurations (13) and (14) are adopted. It is a side view (however, the case where two dynamic focus lenses and two galvano scanners are adopted is shown). The laser beam passing through the dynamic focus lens naturally includes a direction oblique or orthogonal to the paper surface of FIG. 3, and in consideration of such an inclusion state, the laser beam at the tip of the arrow indicating the traveling direction of the laser beam is taken into consideration.・The mark indicates the reflection position. The three-dimensional modeling method of the basic configurations (6) and (10) and the three-dimensional modeling apparatus of the basic configurations (8) and (12) , showing the configurations when the basic configurations (13) and (14) are adopted. It is a side view (however, the case where two dynamic focus lenses and two galvano scanners are adopted is shown). The laser beam passing through the dynamic focus lens naturally includes a direction oblique or orthogonal to the paper surface of FIG. 4, and in consideration of such an inclusion state, at the tip of the arrow indicating the traveling direction of the laser beam.・The mark indicates the reflection position. In the basic configuration (1), (2), (3), (4) , (5), (6), (7), (8), (9), (10), (11), (12) FIG. 6A is a schematic diagram illustrating a direction of a rotation axis in which a first mirror and a second mirror vibrate when a laser beam transmitted through a dynamic focus lens obliquely intersects a horizontal direction, and FIG. It shows a case where the direction of the rotation axis of the mirror is horizontal (the rotation axis of the first mirror is orthogonal to the transmission direction and does not form a vertical direction), (b). Shows the case where the direction of the rotation axis of the second mirror is the transmission direction (the transmission direction diagonally intersecting the table surface is set to the direction orthogonal to the paper surface, so that The oblique table surface does not have a flat shape orthogonal to the paper surface as shown in (a), but as shown in (b), the table surface obliquely intersects the direction of the paper surface with a predetermined width in the vertical direction. (C) shows the case where the rotation axis of the second mirror is orthogonal to both the direction of the rotation axis of the first mirror and the transmission direction (also (c)). Further, as in (b), since the transmission direction obliquely intersecting with the table surface is set to the direction orthogonal to the paper surface, the table surface obliquely intersecting with the transmission direction is shown in (c). As such, it is represented by a state in which it intersects with the direction of the paper in the vertical direction with a predetermined width. In FIGS. 5A, 5B, and 5C, the-mark indicates the direction from the back side to the front side of the paper, and the X mark indicates the direction from the front side to the back side of the paper. The basic configurations (9), (10), (11) and (12) are shown, and (a) shows the stage of forming the center position of the amplitude due to the vibration when the second mirror of each galvano scanner vibrates. It shows an embodiment in which the irradiation positions of the reflected light reflected on the sintered surface are the same, and (b) shows that the reflected light is reflected from a position that does not correspond to the center position of the vibration in the second mirror of each galvano scanner. 2 shows an embodiment in which the irradiation positions of the reflected light on the irradiation surface are the same. In the basic configurations (1), (2), (3), (4), (5), (6), (7), and (8), the sintered surface by the laser beam transmitted through the plurality of galvano scanners is FIG. 6 is a side view showing an embodiment in which the regions are independent of each other and different regions, (a) shows a case where the regions are adjacent to each other, and (b) shows that the regions are separated from each other. , (C) show the case where the regions overlap each other at the boundary.

The three-dimensional modeling method of the basic configurations (1) , (2), (5), (6), (9), and (10) is performed by laminating powder on the table 4 through running of a squeegee, and laminating powder. It is basically premised that each process of sintering the layer 5 by irradiating the laser beam 7 is performed, and the basic configurations (3) , (4), (7), (8), (11), and (12) The three-dimensional modeling apparatus is basically premised to include a squeegee that stacks powder on the table 4 through running and a sintering apparatus that irradiates the powder layer 5 with a laser beam 7.

On which it puts each basic premise, the basic configuration (1), (5), (9) the method and the basic configuration of (3), (7), devices (11), FIGS. 1 (a) or As shown in either FIG. 1B or FIG. 3 , in the irradiation of the laser beam 7, the laser beam 7 oscillated by the laser beam oscillation source 1 and transmitted through the dynamic focus lens 2 has a transmission direction different from that of the laser beam 7. The first mirror 31 vibrates via the rotation shaft 30 in the orthogonal direction, and the first mirror 31 is orthogonal to the direction of the rotation shaft 30 in the state independent of the vibration of the first mirror 31, and is horizontal. A plurality of galvano scanners 3 are used, which realize scanning in a two-dimensional direction based on the Cartesian coordinates of the laser beam 7 by reflection from the second mirror 32 that vibrates via the rotating shaft 30. Among the configurations based on such adoption, in the prior inventions 1 and 2, the direction of the rotary shaft 30 in which the second mirror 32 vibrates is not disclosed at all.

As a result, the fact that the prior inventions 1 and 2 are extremely insufficient in specifying the configuration of the invention is as described below with reference to FIGS. 5(a), 5(b) and 5(c). ..

The fact that the direction of the rotation axis 30 of the first mirror 31 is orthogonal to the transmission direction of the laser beam 7 allows the laser beam 7 to scan within a plane including the transmission direction due to the vibration through the rotation axis 30. Therefore, the technically required requirements are met.

In order to realize two-dimensional scanning in the horizontal direction along the surface of the table 4 by the scanning by the first mirror 31 and the scanning by the second mirror 32, the direction of the rotation axis 30 in the second mirror 32 is the first direction. It is essential that the mirror 31 is orthogonal to the direction of the rotation axis 30.

When the two-dimensional scanning is realized via the first mirror 31 and the second mirror 32, the second mirror 32 is provided with respect to the rotation axis 30 orthogonal to the transmission direction of the laser beam 7 of the first mirror 31. As the direction of the rotating shaft 30, the horizontal direction as shown in FIG. 5A, the transmission direction of the laser beam 7 as shown in FIG. 5B, and the first direction as shown in FIG. It is possible to envision three cases in which the mirror 31 is not only orthogonal to the direction of the rotation axis 30 but also orthogonal to the transmission direction of the laser beam 7.

In the case of the direction shown in FIG. 5(a), the reflected light from the first mirror along the plane including the transmission direction (the reflected light scanning along the front and back directions of the paper surface indicated by points and crosses) By vibrating the second mirror 32 via the rotary shaft 30 along the horizontal direction, uniform scanning can be realized along the horizontal direction along the surface of the table 4.

On the other hand, in the case of the direction shown in FIG. 5B, since the transmission direction of the laser beam 7 obliquely intersects with the surface of the table 4, the rotary shaft 30 of the second mirror 32 forms the horizontal direction. I'm not doing it.

Therefore, the distance from the horizontal plane along the surface of the table 4 varies depending on the position where the laser beam 7 is reflected from the second mirror 32, and uniform scanning cannot be realized along the horizontal plane.

Specifically, as shown in FIG. 5B, the scanning line of the laser beam 7 reflected from the second mirror 32 at the position of the end portion in the back side direction of the paper surface indicated by the mark x, and the paper surface indicated by the mark. Since the scanning line of the laser beam 7 reflected by the second mirror 32 at the end portion in the front side direction is different in the distance with respect to the horizontal plane, the length of each scanning line must also be different.

As a result, in the reflection on the second mirror 32 shown in FIG. 5B, it is impossible to realize uniform and accurate two-dimensional scanning in the horizontal plane along the surface of the table 4.

Similarly, also in the case shown in FIG. 5C, the direction of the rotation axis 30 in the second mirror 32 is not formed in the horizontal direction as shown in FIG. The distance with respect to the horizontal plane differs depending on the position where the generated laser beam 7 is reflected by the second mirror 32, and as shown in FIG. 5C, the second mirror is provided at the positions of the front and back sides of the paper. Since the lengths of the scanning lines in the laser beam 7 reflected by the laser beam 32 are different from those in the reflected laser beam 7, it is impossible to realize uniform and accurate two-dimensional scanning in the horizontal plane along the surface of the table 4.

However, in the prior inventions 1 and 2, although the case where the laser beam 7 transmitted through the dynamic focus lens 2 obliquely intersects with the horizontal direction is included, the rotation axis in the second mirror 32 is included. Since the direction of 30 is not described at all, the direction of the rotation axis 30 of the second mirror 32 is unspecified, and it is completely unknown which one of FIGS. 5A, 5B, and 5C is adopted. Is.

In such a case, in FIG. 3 of the prior inventions 1 and 2, the laser beam 7 reflected from the first mirror 31 is seemingly scanned in the left-right direction of the paper surface. 5(a), (b) and (b), considering that the direction of the rotation axis 30 in the second mirror 32 can be realized in any of the cases of FIGS. 5(a), (b), and (c). ) And (c) are included.

Therefore, the methods of the basic configurations (1) , (5), and (9) and the devices of the basic configurations (3), (7), and (11) specify the direction of the rotation axis 30 in the second mirror 32 in the horizontal direction. By doing so, it is clearly superior in technical contents to the prior inventions 1 and 2 in that the uniform and accurate two-dimensional scanning is realized in the horizontal direction.

Based on the above-mentioned respective basic premise, the methods of the basic configurations (2), (6) and (10) and the devices of the basic configurations (4), (8) and (12) are as shown in FIG. As shown in any one of the figures, in the irradiation of the laser beam 7, the rotation axis 30 orthogonal to the transmission direction is set for the laser beam 7 oscillated by the laser beam oscillation source 1 and transmitted through the dynamic focus lens 2. By connecting the first mirror 31 vibrating through the first mirror 31 and the rotation shaft 30 of the first mirror 31 via the arm 34, the first mirror 31 vibrates integrally at the equidistant positions around the rotation shaft 30, and the Galvano that realizes two-dimensional scanning based on the cylindrical coordinates of the laser beam 7 by reflection from the second mirror 32 that oscillates through the rotation axis 30 in the direction orthogonal to the rotation axis 30 of the first mirror 31. A plurality of scanners 3 are adopted, and such adoption is different from the prior inventions 1 and 2 which are based on the scanning of the laser beam 7 in the two-dimensional direction based on the orthogonal coordinates.

The directions of the rotary shafts 30 in the first mirror 31 and the second mirror 32 in the methods of the basic configurations (2) , (6) and (10) and the devices of the basic configurations (4), (8) and (12) are The method is the same as in the methods of configurations (1) , (5), and (9) and the devices of basic configurations (3), (7), and (11), and as a result, as shown in FIG. Thus, it is possible to realize uniform two-dimensional scanning on the horizontal surface along the surface of the table 4.

As shown in FIGS. 2A, 2</b>B and 4, the state in which the vibration of the first mirror 31 is performed via the rotary shaft 30 in the direction orthogonal to the direction of passing through the dynamic focus lens 2 is as follows. As in the case of the methods of the basic configurations (1) , (5), and (9) and the devices of the basic configurations (3), (7), and (11), the vibration drive that drives the rotation by the rotary shaft 30. The state realized by the device 310 and being performed via the rotary shaft 30 of the second mirror 32 in the direction orthogonal to the rotary shaft 30 of the first mirror 31 is the vibration driving the rotation by the rotary shaft 30. It is realized by the driving device 320.

Among the two-dimensional scanning of the laser beam 7 based on the cylindrical coordinates, the vibration of the first mirror 31 realizes the scanning along the angular direction (θ direction), and the vibration of the second mirror 32 causes the radial direction. Scanning along the (r direction) is realized.

The second mirror 32 in the methods of the basic configurations (2) , (6) and (10) and the devices of the basic configurations (4), (8) and (12) vibrate together with the first mirror 31 and vibrate. However, such vibration is not in an independent state, and differs from the basic configurations (1) and (3) in this respect.

To explain the reason why the above-mentioned integrated state is required, between the Cartesian coordinates (x, y) and the cylindrical coordinates (r, θ),
x=rcos θ,
y=rsin θ
And r is an independent parameter, but it is derived from the fact that an independent state corresponding to the independent parameters x and y can be realized by cooperation with the independent parameter θ, that is, by integration.

Such vibration of the second mirror 32 is normally caused by the vibration driving device 320 being connected to the vibration driving device 310 as shown in FIGS. 2(a), (b) and FIG. It can be realized by being supported by an arm 34 extending from a vibrating column 33 that vibrates by the rotation supporting 31.

A configuration relating to application of voltage or conduction of current to the vibration driving device 320 necessary for operating the vibration driving device 320 in a state where the vibration driving device 320 is supported by the arm 34 is a design matter of those skilled in the art. Belong to
However, as shown by the thin dotted lines in FIGS. 2A, 2B and 4, for example, the power supply 35 is provided in the conduction region on both sides in the longitudinal direction of the vibration column 33, which is divided by the insulating portion of the vibration column 33. The rotary ring 36 arranged two on the side and the conductive rotary ring 37 arranged on the side of the vibration drive device 320 (four rotary rings 36, 37 in total) and each rotary ring 36, 37. This can be realized through a conductive support 38 that is rotatably supported and fixed at a predetermined position (in FIGS. 2 and 4, each support 38 is independent of each other). It shows the case where it is fixed to the vibration driving device 310.).

The methods of the basic configurations (1) , (5) and (9) and the devices of the basic configurations (3), (7) and (11) are suitable for rectangular three-dimensional modeling, and the basic configuration (2) The methods of (6) and (10) and the devices of basic configurations (4), (8) and (12) are suitable for three-dimensional modeling having a curved outer peripheral surface such as a circular shape or an elliptical shape.

Basic configuration (1) , (2), (5), (6), (9), (10) method and basic configuration (3) , (4), (7), (8), (11) , (12) can be applied to polygonal three-dimensional modeling.

In the reference example (15) , as shown in FIGS. 1A, 1B, 2A, and 2B, the direction in which the first mirror 31 in each galvano scanner 3 obliquely intersects the surface of the table 4 It is characterized by vibrating through the rotating shaft 30 of.

That is, in the reference example (15) , the rotary shaft 30 of the first mirror 31 is set in a direction obliquely intersecting the surface of the table 4, thereby realizing a compact design in the vertical direction.

As shown in FIGS. 1A and 2A, in the reference example (15) , the direction of the laser beam 7 that has passed through the dynamic focus lens 2 is also set to be oblique to the surface of the table 4. By doing so, it is possible to further promote a compact design in the vertical direction.

However, the direction of the laser beam 7 need not intersect the plane of the table 4 at all.

That is, in the case of the reference example (15) , as shown in FIGS. 1B and 2B, the laser beam 7 transmitted through the dynamic focus lens 2 is in the horizontal direction and the first mirror 31 The basic configurations (1), (2), (3), and (4) in which the rotation axis 30 is orthogonal to the direction of the laser beam 7 can be adopted.

In the case of the basic configurations (1), (2), (3), and (4) , the rotary shaft 30 of each first mirror 31 obliquely intersects the surface of the table 4 to enable a compact design in the vertical direction. On the other hand, it is possible to realize a simple design in which the direction of the laser beam 7 that oscillates from the laser beam oscillation source 1 and that passes through the dynamic focus lens 2 is horizontal.

Moreover, in the basic configurations (1), (2), (3), and (4) , the rotation axis of the second mirror 32 that is orthogonal to the direction of the rotation axis 30 of the first mirror 31 and is horizontal. It is also possible to select the direction of the rotation axis 30 parallel to the transmission direction of the laser beam 7 as the direction of 30, so that the space between the first mirror 31 and the second mirror 32 can be made compact. Becomes

As shown in FIGS. 3 and 4, the basic configurations (13) and (14) are such that the first mirror 31 in each galvano scanner 3 vibrates via the vertical rotation shaft 30 orthogonal to the surface of the table 4. It has a feature.

That is, similar to the conventional galvano scanner 3, the horizontal direction is used as the reference for the vibration of the first mirror 31, and the vertical direction is used as the reference for the vibration of the second mirror 32, thereby realizing stable operation. You can

Moreover, in the basic configurations (13) and (14) , since the direction of the rotation axis 30 of the first mirror 31 is vertical, the direction of the rotation axis 30 of the second mirror 32 is the rotation axis of the first mirror 31. It is naturally possible to select a horizontal direction extending over 360° which is orthogonal to the direction of 30, and it is also possible to select a horizontal direction parallel to the direction of the laser beam 7 that has passed through the dynamic focus lens 2.

In the basic configuration (1), (2), (3), (4) , (5), (6), (7), (8), (9), (10), (11), (12) The typical examples of the vibration direction of the first mirror 31 and the vibration direction of the second mirror 32 are the structure of Reference Example (15) and the basic structures (1), (2), (3) and (4) , For example, considering that there may be a configuration in which the vibration of the first mirror 31 is along the vertical plane and the vibration direction of the second mirror 32 is along the horizontal plane, the basic configurations (1), (2), (3), (4) , (5), (6), (7), (8), (9), (10), (11) and (12) are never the configuration of Reference Example (15) and It is not limited to the basic configurations (1), (2), (3), and (4) .

In the basic configurations (9), (10), (11), and (12), the vibration range of the first mirror 31 and the vibration range of the second mirror 32 are adjustable, so that a plurality of galvano scanners 3 can be installed. As the sintered surface 6 by the irradiation of the transmitted laser beam 7, the regions that can be adjusted are matched, but in each of the basic configurations, as shown in FIG. When the second mirror 32 vibrates, the irradiation position on the sintered surface 6 of the reflected light reflected at the stage of forming the center position of the amplitude due to the vibration is the same, and FIG. As described above, when the second mirror 32 of each Galvano scanner 3 vibrates, the irradiation position on the sintered surface 6 of the reflected light reflected from the position that does not correspond to the center position of the amplitude of the vibration is the same. Either can be adopted.

As shown in FIGS. 6A and 6B, when the regions of the sintered surface 6 due to the irradiation of the laser beam 7 from the respective galvano scanners 3 are coincident with each other, the sintering is rapidly performed by the overlapping sintering. The connection surface 6 is formed, which can further promote efficient three-dimensional modeling.

In the case of the embodiment shown in FIG. 6A, in the second mirror 32, by adjusting the amplitude on both sides of the center position of vibration, the sintered surface with the center position P in the horizontal direction of the table 4 as a reference. The six areas can be freely selected.

On the other hand, in the case of the embodiment shown in FIG. 6B, the area of the sintered surface 6 can be selected at any position apart from the horizontal center position P of the table 4.

In the basic configurations (1), (2), (3), (4), (5), (6), (7), (8) , the vibration range of the first mirror 31 and the vibration of the second mirror 32. By making the range adjustable, it is possible to adopt an embodiment in which the sintered surfaces 6 formed by the laser beams 7 that have passed through the plurality of galvano scanners 3 are independent of each other and are in different regions. Is characterized in that the regions are adjacent to each other as shown in FIG. 7A, and the regions are apart from each other as shown in FIG. 7B. The present invention can be adopted, as shown in FIG. 7C, in which the regions are overlapped at the boundary.

The shapes of the sintered surfaces 6 that are independent of each other and that form different regions are varied, but by irradiating the laser beams 7 from a plurality of galvano scanners 3, the various shapes of the sintered surfaces are changed. The reason why the surface 6 is applicable is that the area of the sintered surface 6 is freely selectable in each of the basic configurations.

In the case of the respective embodiments shown in FIGS. 7A, 7B, and 7C, the sintered surfaces 6 that are mutually independent and different regions are simultaneously and simultaneously irradiated by the plurality of galvano scanners 3. It is possible to realize efficient three-dimensional modeling in that it is realized all at once.

In the basic configurations (5), (6), (7), (8), as shown in FIGS. 1(a), (b) and FIGS. 2(a), (b), the center of the surface of the table 4 Each second mirror 32 is arranged inside each first mirror 31 with reference to the position P.

In the case of such an arrangement, the interval between the second mirrors 32 is made compact, and as a result, the laser beam 7 reflected from each second mirror 32 exceeds the central position P and the sintered surface 6 is reached. In comparison with the case where the contour at the boundary of the sintered surface 6 in the case of forming is arranged opposite to the above arrangement, that is, each second mirror 32 is arranged outside the center position P with respect to each first mirror 31. The adverse effect that the illuminance becomes smaller as the sintered surface 6 becomes farther from the center position, and when the surface of the table 4 is irradiated in the vertical direction, a substantially circular sintered surface 6 is formed. Instead, it is possible to obtain a clearer state by reducing the degree of the adverse effect that the shape of the sintered surface 6 becomes inaccurate due to the formation of the substantially elliptical sintered surface 6. ..

Basic structure (5), (6), (7), as a reference example against the (8), as shown in FIGS. 3 and 4, with reference to the center position P of the surface of the table 4, the first mirror 31 It is also possible to adopt a configuration in which one of the first mirrors 31 is arranged outside one of the second mirrors 32 and the other of the first mirrors 31 is arranged inside of the other of the second mirrors 32.

Even in the case of such a reference example , it is possible to avoid the adverse effect of disposing each first mirror 31 inside each second mirror 32.

However, as shown in FIGS. 1A and 1B and FIGS. 2A and 2B, compared with the embodiment in which each first mirror 31 is arranged outside each second mirror 32, the above-mentioned adverse effects There is no choice but to halve the degree of avoidance.

Examples will be described below.

In the embodiment, as shown in FIGS. 1A, 1B, 2A, 2B, 3 and 4, when the second mirror 32 of each galvano scanner 3 vibrates, The reflected light reflected at the stage of forming the center position of the amplitude forms an oblique direction with respect to the surface of the table 4.

Due to the above characteristics, in the embodiment, the position of each galvano scanner 3 in the vertical direction (height direction) is set lower than in the case where the laser beam 7 is orthogonal to the surface of the table 4, and then the first mirror 31 and By making each vibration range of the second mirror 32 adjustable, the required area of the sintered surface 6 on the surface of the table 4 can be made selectable.
However, adoption of such an embodiment is not necessarily a laser beam 7 is meant to exclude embodiments such as perpendicular to the plane of the table 4.

INDUSTRIAL APPLICABILITY The present invention is epoch-making in terms of realizing efficient three-dimensional modeling, and its application range is wide.

1 Laser Beam Oscillator 2 Dynamic Focus Lens 3 Galvano Scanner 30 Rotation Shaft 31 First Mirror 32 Second Mirror 310 Vibration Driving Device for First Mirror 320 Vibration Driving Device for Second Mirror 33 Rotating Vibration Support 34 Arm 35 Power Supply 36 Rotating ring on the power supply side 37 Rotating ring on the side of the vibration driving device for the second mirror 38 Conductive column supporting the rotating ring 4 Table 5 Powder layer 6 Sintered surface 7 Laser beam P Center position Q, Q of the table surface ′ Axisymmetric reference position arranged in the opposite direction at a predetermined equidistant distance from P

Claims (16)

A three-dimensional modeling method, which includes a process of laminating powder on a table through running of a squeegee, and a process of sintering a laminated powder layer by irradiating a laser beam, wherein the irradiation passes through a dynamic focus lens. A first mirror that vibrates via a rotation axis in a direction orthogonal to the transmission direction with respect to the laser beam, and a state independent of vibration of the first mirror, and is orthogonal to the direction of the rotation axis in the first mirror; In addition, a plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and By making the vibration range of the first mirror and each second mirror adjustable, the area of the sintered surface by the irradiation of the laser beam transmitted through each galvanometer scanner can be selected, and by adjusting the focal length of the dynamic focus lens. , The sintered surface is irradiated at or near the focus position of the laser beam, the first mirror in each galvano scanner vibrates via the rotation axis in the direction oblique to the table surface, and the dynamic focus lens The three-dimensional modeling method in which the laser beam transmitted through is horizontal and the rotation axis of the first mirror is orthogonal to the direction of the laser beam. A three-dimensional modeling method, which includes a process of laminating powder on a table through running of a squeegee, and a process of sintering a laminated powder layer by irradiating a laser beam, wherein the irradiation passes through a dynamic focus lens. The laser beam is connected to the first mirror that vibrates through the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror through the arm, thereby equidistant positions around the rotation axis. The laser beam has a cylindrical coordinate as a reference by reflection from a second mirror that vibrates as a unit and is orthogonal to the direction of the rotation axis of the first mirror and that vibrates via the horizontal rotation axis. By adopting a plurality of galvano scanners that realize two-dimensional scanning, and by making it possible to adjust the vibration range of each first mirror and the vibration range of each second mirror, each galvano scanner is transmitted. The area of the sintered surface can be selected by irradiation of the laser beam, and the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length of the dynamic focus lens. The first mirror in the table vibrates via the rotation axis in the direction oblique to the table surface, and the laser beam transmitted through the dynamic focus lens is in the horizontal direction, and the rotation axis of the first mirror is 3D modeling method orthogonal to the direction. A squeegee that stacks powder on a table through running, a three-dimensional modeling apparatus that includes a sintering device that irradiates the powder layer with a laser beam, and in the irradiation, a laser beam that has passed through a dynamic focus lens is used. On the other hand, the first mirror vibrating via the rotation axis in the direction orthogonal to the transmission direction and the state perpendicular to the direction of the rotation axis of the first mirror independent of the vibration of the first mirror, and horizontal A plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates via the rotation axis of By providing each of the vibration driving device and the control device for adjusting the vibration range of the vibration driving device with respect to each of the second mirrors, the area of the sintered surface due to the irradiation of the laser beam can be selected and the focus of the dynamic focus lens can be selected. By adjusting the distance, the sintered surface is irradiated at or near the focal position of the laser beam, and the first mirror in each galvano scanner vibrates via the rotation axis in the direction oblique to the table surface, Moreover, the three-dimensional modeling apparatus in which the laser beam transmitted through the dynamic focus lens is horizontal and the rotation axis of the first mirror is orthogonal to the direction of the laser beam. A squeegee that stacks powder on a table through running, a three-dimensional modeling apparatus that includes a sintering device that irradiates the powder layer with a laser beam, and in the irradiation, a laser beam that has passed through a dynamic focus lens is used. On the other hand, by connecting the first mirror that vibrates through the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror through the arm, they are integrated at equidistant positions around the rotation axis. By virtue of the reflection from the second mirror which is oscillated by the second mirror and which is orthogonal to the direction of the rotation axis of the first mirror and which oscillates through the horizontal rotation axis. A control device that employs a plurality of galvano scanners that realizes dimensional scanning and that adjusts the vibration range of the vibration drive device for each first mirror and the vibration range of the vibration drive device for each second mirror are set. By providing an adjustable control device, the area of the sintered surface by laser beam irradiation can be selected, and the focal length of the dynamic focus lens can be adjusted to sinter at or near the focal position of the laser beam. The surface is illuminated, the first mirror in each galvanometer scanner vibrates via the rotation axis in the direction oblique to the table surface, and the laser beam transmitted through the dynamic focus lens is horizontal. A three-dimensional modeling apparatus in which the rotation axis of one mirror is orthogonal to the direction of the laser beam. A three-dimensional modeling method, which includes a process of laminating powder on a table through running of a squeegee, and a process of sintering a laminated powder layer by irradiating a laser beam, wherein the irradiation passes through a dynamic focus lens. A first mirror that vibrates via a rotation axis in a direction orthogonal to the transmission direction with respect to the laser beam, and a state independent of vibration of the first mirror, and is orthogonal to the direction of the rotation axis in the first mirror; In addition, a plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and By making the vibration range of the first mirror and each second mirror adjustable, the area of the sintered surface by the irradiation of the laser beam transmitted through each galvanometer scanner can be selected, and by adjusting the focal length of the dynamic focus lens. at the focal position or near the laser beam is irradiated sintered surface, with reference to the center position of the table surface, 3D modeling method of the respective first mirror is disposed outside the respective second mirror .. A three-dimensional modeling method, which includes a process of laminating powder on a table through running of a squeegee, and a process of sintering a laminated powder layer by irradiating a laser beam, wherein the irradiation passes through a dynamic focus lens. The laser beam is connected to the first mirror that vibrates through the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror through the arm, thereby equidistant positions around the rotation axis. The laser beam has a cylindrical coordinate as a reference by reflection from a second mirror that vibrates as a unit and is orthogonal to the direction of the rotation axis of the first mirror and that vibrates via the horizontal rotation axis. By adopting a plurality of galvano scanners that realize two-dimensional scanning, and by making it possible to adjust the vibration range of each first mirror and the vibration range of each second mirror, each galvano scanner is transmitted. The area of the sintered surface can be selected by irradiation with the laser beam, and the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length of the dynamic focus lens. the center position as a reference, 3D modeling method of the respective first mirror is disposed outside the respective second mirror. A squeegee that stacks powder on a table through running, a three-dimensional modeling apparatus that includes a sintering device that irradiates the powder layer with a laser beam, and in the irradiation, a laser beam that has passed through a dynamic focus lens is used. On the other hand, the first mirror vibrating via the rotation axis in the direction orthogonal to the transmission direction and the state perpendicular to the direction of the rotation axis of the first mirror independent of the vibration of the first mirror, and horizontal A plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates via the rotation axis of By providing each of the vibration driving device and the control device for adjusting the vibration range of the vibration driving device with respect to each of the second mirrors, the area of the sintered surface due to the irradiation of the laser beam can be selected and the focus of the dynamic focus lens can be selected. by adjusting the distance, and irradiating the sintered surface in focus on or near the laser beam, based on the center position of the table surface, and the respective first mirror disposed outside the respective second mirror 3D modeling device. A squeegee that stacks powder on a table through running, a three-dimensional modeling apparatus that includes a sintering device that irradiates the powder layer with a laser beam, and in the irradiation, a laser beam that has passed through a dynamic focus lens is used. On the other hand, by connecting the first mirror that vibrates through the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror through the arm, they are integrated at equidistant positions around the rotation axis. By virtue of the reflection from the second mirror which is oscillated by the second mirror and which is orthogonal to the direction of the rotation axis of the first mirror and which oscillates through the horizontal rotation axis. A control device that employs a plurality of galvano scanners that realizes dimensional scanning and that adjusts the vibration range of the vibration drive device for each first mirror and the vibration range of the vibration drive device for each second mirror are set. By providing an adjustable control device, the area of the sintered surface by laser beam irradiation can be selected, and the focal length of the dynamic focus lens can be adjusted to sinter at or near the focal position of the laser beam. surface is irradiated with, reference to the center position of the table surface, three-dimensional modeling apparatus is disposed outside the respective second mirror each first mirror. A three-dimensional modeling method, which includes a process of laminating powder on a table through running of a squeegee, and a process of sintering a laminated powder layer by irradiating a laser beam, wherein the irradiation passes through a dynamic focus lens. A first mirror that vibrates via a rotation axis in a direction orthogonal to the transmission direction with respect to the laser beam, and a state independent of vibration of the first mirror, and is orthogonal to the direction of the rotation axis in the first mirror; In addition, a plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and By making the vibration ranges of the first mirror and the second mirrors adjustable, the regions that can be adjusted as the sintered surface by the irradiation of the laser beam transmitted through the galvanoscanners are aligned, and the dynamic focus A three-dimensional modeling method in which the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length of the lens. A three-dimensional modeling method, which includes a process of laminating powder on a table through running of a squeegee, and a process of sintering a laminated powder layer by irradiating a laser beam, wherein the irradiation passes through a dynamic focus lens. The laser beam is connected to the first mirror that vibrates through the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror through the arm, thereby equidistant positions around the rotation axis. The laser beam has a cylindrical coordinate as a reference by reflection from a second mirror that vibrates as a unit and is orthogonal to the direction of the rotation axis of the first mirror and that vibrates via the horizontal rotation axis. By adopting a plurality of galvano scanners that realize two-dimensional scanning, and by making it possible to adjust the vibration range of each first mirror and the vibration range of each second mirror, each galvano scanner is transmitted. The regions that can be freely adjusted as the sintered surface by the irradiation of the laser beam are aligned, and the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length of the dynamic focus lens. 3D modeling method. A squeegee that stacks powder on a table through running, a three-dimensional modeling apparatus that includes a sintering device that irradiates the powder layer with a laser beam, and in the irradiation, a laser beam that has passed through a dynamic focus lens is used. On the other hand, the first mirror vibrating via the rotation axis in the direction orthogonal to the transmission direction and the state perpendicular to the direction of the rotation axis of the first mirror independent of the vibration of the first mirror, and horizontal A plurality of galvano scanners that realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates via the rotation axis of By providing each of the vibration driving device and the control device that makes it possible to adjust the vibration range of the vibration driving device with respect to each of the second mirrors, the regions that can be adjusted as the sintered surface due to the irradiation of the laser beam coincide with each other. Moreover, the three-dimensional modeling apparatus irradiates the sintered surface at or near the focal position of the laser beam by adjusting the focal length of the dynamic focus lens. A squeegee that stacks powder on a table through running, a three-dimensional modeling apparatus that includes a sintering device that irradiates the powder layer with a laser beam, and in the irradiation, a laser beam that has passed through a dynamic focus lens is used. On the other hand, by connecting the first mirror that vibrates through the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror through the arm, they are integrated at equidistant positions around the rotation axis. By virtue of the reflection from the second mirror which is oscillated by the second mirror and which is orthogonal to the direction of the rotation axis of the first mirror and which oscillates through the horizontal rotation axis. A control device that employs a plurality of galvano scanners that realizes dimensional scanning and that adjusts the vibration range of the vibration drive device for each first mirror and the vibration range of the vibration drive device for each second mirror are set. By providing a control device that is adjustable, the regions that are selected as adjustable as the sintered surface by laser beam irradiation are in agreement, and the focal position of the laser beam is adjusted by adjusting the focal length of the dynamic focus lens. Or a three-dimensional modeling device that irradiates the sintered surface in the vicinity thereof. The three-dimensional modeling method according to any one of claims 5, 6, 9, and 10, wherein the first mirror in each galvano scanner vibrates via a vertical rotation axis that is orthogonal to the table surface. The three-dimensional modeling apparatus according to any one of claims 7, 8, 11, and 12, wherein the first mirror in each galvano scanner vibrates via a vertical rotation axis that is orthogonal to the table surface. When the second mirror of each galvano scanner vibrates, the reflected light reflected at the stage of forming the center position of the amplitude due to the vibration forms an oblique direction with respect to the table surface. The three-dimensional modeling method according to any one of 5, 6, 9, and 10. 5. When the second mirror of each galvano scanner vibrates, the reflected light reflected at the stage of forming the center position of the amplitude due to the vibration forms an oblique direction with respect to the table surface. The three-dimensional modeling apparatus according to any one of 7, 7, 8, 11, and 12.

Images