JP7021818B1 - 3D modeling equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional modeling apparatus adopting a galvano scanner which can effectively utilize the space of a table surface and can be arranged under a space with a margin. SOLUTION: Two to six galvano scanners 3 in which an oscillation source 1, a dynamic focus lens 2, a first mirror 31 and a second mirror 32 of a laser beam or an electron beam 7 are housed in a frame 5 are placed on a table 4. A mirror 6 that refractes and reflects a laser beam or an electron beam 7 is installed at a midway portion in the longitudinal direction of the galvano scanner 3, or a rotation center of the first mirror 31. A shaft 30 is installed, and the frame 5 is bent or curved around the circumference supporting the mirror 6 or the circumference supporting the rotation center shaft 30 of the first mirror 31, and intersects the distal end side longitudinal direction of the galvano scanner 3. , Or a three-dimensional modeling device that achieves the above-mentioned problems by arranging in a parallel state and a state of forming a regular polygon, or in a parallel state in the opposite direction. [Selection diagram] Fig. 1

Description

The present invention provides a galvano scanner in which a laser beam or electron beam that passes through a dynamic focus lens and is sequentially focused is scanned in a two-dimensional direction, and a frame surrounding the laser beam or electron beam is bent or curved. The target is three-dimensional modeling equipment that uses multiple devices.

In three-dimensional modeling in which a sintered surface is formed by irradiating a powder layer laminated on a table surface with a laser beam or an electron beam, a laser beam or an electron beam transmitted through a dynamic focus lens whose focal length can be adjusted is transmitted by a galvano scanner. Scanning is performed so as to focus on or near the sintered surface.

As shown in Patent Document 1, the galvano scanner 3 includes a laser beam or electron beam oscillation source 1, a dynamic focus lens 2, a first mirror 31 and a second mirror 32, but the laser beam or electron beam oscillation source 1 is provided. A longitudinal direction is formed such that the accommodation region of the first mirror 31 is on the rear end side and the accommodation region of the first mirror 31 is on the front end side, and each component is included in the frame along the longitudinal direction.

In FIGS. 1, 2, 3 and 4 of Patent Document 1, the illustration is made such that the second mirror 32 is included in the extension of the first mirror 31 in the longitudinal direction, but in reality, in most cases. As shown in FIGS. 5 and 11 of Patent Document 2, the second mirror (mirror 34) is projected from the accommodation region of the first mirror (mirror 33) in a direction orthogonal to the longitudinal direction.

Therefore, in the case of the conventional galvano scanners shown in Patent Documents 1 and 2, at least the rear end side region is the rear end side and the region containing the oscillation source of the laser beam or the electron beam is the rear end side, and the first mirror is accommodated. A linear longitudinal direction is adopted with the region on the tip side as the tip side.

The basic rationale for adopting the linear longitudinal direction is that the laser beam or electron beam travels straight from the oscillation source to the first mirror.

However, the distance from the oscillation source of the laser beam or the electron beam to the second mirror is a scale comparable to the front-back and left-right directions of the table surface, and a galvano scanner having a longitudinal direction of such a scale is used as a table. When a plurality of them are arranged inside the surface, the rear end side in the longitudinal direction may protrude from the table surface in the horizontal direction.

Nevertheless, the configuration of a galvano scanner that does not protrude from the table surface and is compact and can be applied to a table surface having a small area has not been studied so far.

Japanese Patent Publication No. 6713672 Japanese Unexamined Patent Publication No. 3-193434

The present invention effectively utilizes the space of the table surface even when two to six galvano scanners are arranged in a crossed state or a parallel state, and even on a table surface having a small area, under a sufficient space. The challenge is to provide a configuration for a 3D modeling device that employs a galvano scanner that can be installed.

In order to solve the above problems, the basic configuration of the present invention is
(1) A three-dimensional modeling apparatus equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the stacking . The galvano scanner is a laser beam. Alternatively, it is independent of the oscillation source of the electron beam, the laser beam or the dynamic focus lens that transmits the electron beam, and the rotation of the first mirror and the first mirror that rotate via the rotation center axis in the direction orthogonal to the transmission direction. In the state, the second mirrors that are orthogonal to the direction of the rotation center axis of the first mirror and rotate via the horizontal rotation center axis are arranged in the frame, and the laser beam or the electron is formed. A longitudinal direction is formed in which the region accommodating the oscillation source of the beam is the rear end side and the region accommodating the first mirror is the distal end side. In the longitudinal direction, the second from the distal end side is formed. The accommodation area of the mirror is projected, and a mirror that performs refraction and reflection with respect to the laser beam or the electron beam is installed in the middle portion in the longitudinal direction, and the frame bends around the portion that supports the mirror. Or, in a curved three-dimensional modeling device, two to six galvano scanners are provided, and the center position of the rotation center axis of each second mirror is set horizontally with respect to the center position of the table surface. The two, three, four, five, or six galvano scanners are arranged at equal distances, and the longitudinal direction of the tip side of the two, three, four, five, or six galvano scanners is 180 ° and 120, respectively, with respect to the center position. A three-dimensional modeling device, which is arranged in a radial state in an intersecting state with equal angles of °, 90 °, 72 °, and 60 °.
(2) A three-dimensional modeling apparatus equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the stacking . The galvano scanner is a laser beam. Alternatively, it is independent of the oscillation source of the electron beam, the laser beam or the dynamic focus lens that transmits the electron beam, and the rotation of the first mirror and the first mirror that rotate via the rotation center axis in the direction orthogonal to the transmission direction. In the state, the second mirrors that are orthogonal to the direction of the rotation center axis in the first mirror and rotate via the rotation center axis in the horizontal direction are arranged in the frame, and the laser beam or the electron is formed. A longitudinal direction is formed in which the region accommodating the beam oscillation source is the rear end side and the region accommodating the first mirror is the distal end side. In the longitudinal direction, the second from the distal end side is formed. A mirror accommodating area is projected, and a mirror that performs refraction reflection to a laser beam or an electron beam is installed in the middle portion in the longitudinal direction, and the frame bends around a portion that supports the mirror. Or, in a curved three-dimensional modeling device, two to six galvano scanners are provided, and the center position of the rotation center axis of each second mirror is set in the horizontal direction with respect to the center position of the table surface. Two, three, four, five, or six galvano scanners are arranged at equal distances, and the longitudinal directions on the tip side of the galvano scanners are parallel to each other at an intersection angle of 0 °, 60. They are arranged to form a regular triangle side with a ° intersection angle, a square side with a 90 ° intersection angle, a regular pentagonal side with a 108 ° intersection angle, and a regular hexagonal side with a 120 ° intersection angle. Three-dimensional modeling device,
(3) A three-dimensional modeling apparatus equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the stacking . The galvano scanner is a laser beam. Alternatively, it is independent of the oscillation source of the electron beam, the laser beam or the dynamic focus lens that transmits the electron beam, and the rotation of the first mirror and the first mirror that rotate via the rotation center axis in the direction orthogonal to the transmission direction. In the state, the second mirrors that are orthogonal to the direction of the rotation center axis in the first mirror and rotate via the rotation center axis in the horizontal direction are arranged in the frame, and a laser beam or an electron is formed. A longitudinal direction is formed in which the region accommodating the beam oscillation source is the rear end side and the region accommodating the first mirror is the distal end side. In the longitudinal direction, the second from the distal end side is formed. A mirror accommodating area is projected, and a mirror that performs refraction reflection with respect to a laser beam or an electron beam is installed in the middle portion in the longitudinal direction, and the frame bends around a portion that supports the mirror. Alternatively, in a curved three-dimensional modeling apparatus, two to six galvano scanners are provided, and the longitudinal direction of the distal region of each galvano scanner is parallel, and the longitudinal direction of the distal region of adjacent galvano scanners is parallel. Is set in the opposite direction, and with respect to a straight line extending in a direction orthogonal to the parallel direction from the center position of the table surface in each galvano scanner along the horizontal direction, the rotation center axis of each second mirror. Are arranged in a state of overlapping with the straight line along the parallel direction, or in a state of overlapping with the straight line in a direction orthogonal to the parallel direction.
(4) A three-dimensional modeling apparatus equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the stacking . The galvano scanner is a laser beam. Alternatively, it is independent of the oscillation source of the electron beam, the laser beam or the dynamic focus lens that transmits the electron beam, and the rotation of the first mirror and the first mirror that rotate via the rotation center axis in the direction orthogonal to the transmission direction. In the state, the second mirrors that are orthogonal to the direction of the rotation center axis in the first mirror and rotate via the rotation center axis in the horizontal direction are arranged in the frame, and the laser beam or the electron is formed. A longitudinal direction is formed in which the region accommodating the oscillation source of the beam is on the rear end side and the region accommodating the second mirror is on the front end side. In a three-dimensional modeling apparatus in which a rotation center axis is installed and the frame is bent or curved around a portion supporting the rotation center axis of the first mirror, two to six galvano scanners are provided. , And the center position of the rotation center axis of each second mirror is arranged at equal distances in the horizontal direction with respect to the center position of the table surface, and two, three, or four. Or, the longitudinal direction of the tip side of 5 or 6 galvano scanners radiates at equal angles of 180 °, 120 °, 90 °, 72 °, and 60 ° with respect to the center position. Three-dimensional modeling equipment that is placed,
(5) A three-dimensional modeling apparatus equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the stacking . The galvano scanner is a laser beam. Alternatively, it is independent of the oscillation source of the electron beam, the laser beam or the dynamic focus lens that transmits the electron beam, and the rotation of the first mirror and the first mirror that rotate via the rotation center axis in the direction orthogonal to the transmission direction. In the state, the second mirrors that are orthogonal to the direction of the rotation center axis in the first mirror and that rotate via the rotation center axis in the horizontal direction are arranged in the frame, and a laser beam or an electron is formed. A longitudinal direction is formed in which the region accommodating the beam oscillation source is on the rear end side and the region accommodating the second mirror is on the front end side. In a three-dimensional modeling device in which a rotation center axis is installed and the frame is bent or curved around a portion supporting the rotation center axis of the first mirror, two to six galvano scanners are provided. , And the center position of the rotation center axis of each second mirror is arranged equidistantly along the horizontal direction with respect to the center position of the table surface, and two, three, or four. Or, the longitudinal direction of the tip of 5 or 6 galvano scanners is parallel at 0 ° intersection angle, equidistant triangle side at 60 ° intersection angle, square side at 90 ° intersection angle, 108. A three-dimensional modeling device arranged to form a regular pentagonal side with an intersection angle of ° and a regular hexagonal side with an intersection angle of 120 °.
(6) A three-dimensional modeling apparatus equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the stacking . The galvano scanner is a laser beam. Alternatively, it is independent of the oscillation source of the electron beam, the laser beam or the dynamic focus lens that transmits the electron beam, and the rotation of the first mirror and the first mirror that rotate via the rotation center axis in the direction orthogonal to the transmission direction. In the state, the second mirrors that are orthogonal to the direction of the rotation center axis in the first mirror and rotate via the rotation center axis in the horizontal direction are arranged in the frame, and a laser beam or an electron is formed. A longitudinal direction is formed in which the region accommodating the beam oscillation source is on the rear end side and the region accommodating the second mirror is on the front end side. In a three-dimensional modeling device in which a rotation center axis is installed and the frame is bent or curved around a portion supporting the rotation center axis of the first mirror, two to six galvano scanners are provided. In addition, the longitudinal direction of the distal region of each galvano scanner is parallel, and the longitudinal direction of the distal region of adjacent galvano scanners is set in the opposite direction. With respect to a straight line extending in a direction orthogonal to the direction, the rotation center axis of each second mirror is arranged along the parallel direction so as to overlap the straight line, or the above-mentioned A three-dimensional modeling device that is arranged in a state that overlaps with the straight line in a direction orthogonal to the parallel direction.
Consists of.

The frame of the galvano scanner in the basic configurations (1), (2), (3), (4), (5), and (6) is bent or curved in the middle portion in the longitudinal direction, and forms different directions. Therefore, it has a two-dimensional shape.

Therefore, when 2 to 6 galvano scanners are adopted, the space on the table surface can be effectively utilized by the two-dimensional shape.

Moreover, in terms of the distance between the oscillation source of the laser beam or the electron beam and the second mirror on the tip side, the galvano scanners of the basic configurations (1), (2), (3), (4), (5), and (6). Is clearly shorter than the galvano scanners such as Patent Documents 1 and 2.

As a result, the galvano scanners of the basic configurations (1), (2), (3), (4), (5), and (6) can effectively utilize the space of the table surface having a small area.

In the basic configurations (1), (2), (4), and (5), these effects are realized by simple control as described later, and are uniform while effectively utilizing the space on the table surface. Irradiation can be realized.

On the other hand, in the case of the basic configurations (3) and (6), the space on the table surface is basically configured by setting the longitudinal direction of the tip side region of each galvano scanner to be parallel to each other. It can be used more effectively than in the cases of 1), (2), (4) and (5).

The effects of such basic configurations (1), (2), (3), (4), (5), (6) are derived from the arrangement of bent or curved galvano scanners.

It is a plan view about one galvano scanner which is the base of the basic structure (1), (2), (3), (4), (5), (6), and (a) is bent. The cases of the basic configurations (1), (2), and (3) in which the frame is adopted are shown, and (b) is the basic configurations (4), (5), and (b) in which the curved frame is adopted. The case of 6) is shown. Note that R in (a) indicates a portion of the frame that supports the mirror that performs refraction reflection, and this point is the same in the cases of FIGS. 2 (a) and 5 (a). In the basic configurations (1), (2), (4), and (5), the center position of the rotation center axis of each second mirror in the galvano scanner is set horizontally with respect to the center position of the table surface. It is a plan view explaining the state of arranging equidistantly according to two galvano scanners, and (a) is a basic configuration (1), which adopts a bent frame. The case of 2) is shown, and (b) shows the case of the basic configuration (4) and (5) which adopts the curved frame. It is a plan view which shows the arrangement state of a basic structure (1) and (4), and (a), (b), (c) (d), (e) are 2, 3, 4, respectively. 5 and 6 galvano scanners are shown. However, the case where each frame is bent is shown, and the illustration of individual components in each galvano scanner is omitted. It is a plan view which shows the arrangement state of a basic structure (2) and (5), and (a), (b), (c), (d), and (e) are 2, 3, and 4, respectively. 5 and 6 galvano scanners are shown. However, the case where each frame is bent is shown, and the illustration of individual components in each galvano scanner is omitted. It is a plan view which shows the arrangement state of the basic structure (3), (6), and (a) arranges the rotation center axis of each 2nd mirror along the parallel direction along the longitudinal direction, and is A case of the basic configuration (3) in which a bent frame is adopted is shown, and in (b), the rotation center axes of the second mirrors are arranged in a direction orthogonal to a parallel direction along the longitudinal direction. However, the case of the basic configuration (6) in which the curved frame is adopted is shown. It is a plan view which shows the structure of the Example in the basic structure (3), (6), and (a), (b), (c), (d), (e) are two, three, respectively. Shown are 4, 5, and 6 galvano scanners. However, the case where each frame is curved is shown, and the illustration of individual components in each galvano scanner is omitted.

As shown in FIGS. 1A, 2A, and 3A, the basic configuration (1) is a squeegee in which powder is laminated on a table 4 via traveling, and a laser beam for a powder layer formed by the lamination. Alternatively, the galvano scanner 3 is a three-dimensional modeling apparatus including a galvano scanner 3 that scans the electron beam 7, and the galvano scanner 3 is a dynamic focus lens 2 that transmits the oscillation source 1 of the laser beam or the electron beam 7 and the laser beam or the electron beam 7. , The rotation center axis 30 in the first mirror 31 in a state independent of the rotation of the first mirror 31 and the first mirror 31 that rotate via the rotation center axis 30 in the direction orthogonal to the transmission direction. The second mirror 32, which is orthogonal to the direction and rotates via the rotation center axis 30 in the horizontal direction, is arranged in the frame 5, and accommodates the oscillation source 1 of the laser beam or the electron beam 7. A longitudinal direction is formed in which the region is the rear end side and the region accommodating the first mirror 31 is the distal end side. In the longitudinal direction, the accommodating region of the second mirror 32 protrudes from the distal end side. A mirror 6 is installed in the middle of the longitudinal direction to perform refraction and reflection on the laser beam or the electron beam 7, and the frame 5 is bent or bent around the portion R supporting the mirror 6. In a curved three-dimensional modeling apparatus, two to six galvano scanners 3 are provided, and the center position Q of the rotation center axis 30 of each second mirror 32 is referred to the center position P of the surface of the table 4. The center position P is arranged in the horizontal direction at equal distances, and the longitudinal direction of the tip side of the two, three, four, five, or six galvano scanners 3 is the center position P. As a reference, it is a three-dimensional modeling device that is arranged in a radial state in an intersecting state at equal angles of 180 °, 120 °, 90 °, 72 °, and 60 °, respectively.

That is, the individual galvano scanners 3 shown in FIG. 1 (a) are arranged equidistantly as shown in FIG. 2 (a), and then the arrangement in the crossed state as shown in FIG. 3 is adopted.

As shown in FIGS. 1A, 2A, and 4A, the basic configuration (2) is a squeegee in which powder is laminated on a table 4 via traveling, and a laser beam for a powder layer formed by the lamination. Alternatively, the galvano scanner 3 is a three-dimensional modeling apparatus including a galvano scanner 3 that scans the electron beam 7, and the galvano scanner 3 is a dynamic focus lens 2 that transmits the oscillation source 1 of the laser beam or the electron beam 7 and the laser beam or the electron beam 7. , The rotation center axis 30 in the first mirror 31 in a state independent of the rotation of the first mirror 31 and the first mirror 31 that rotate via the rotation center axis 30 in the direction orthogonal to the transmission direction. Second mirrors 32 that are orthogonal to the direction and rotate via the rotation center axis 30 in the horizontal direction are arranged in the frame 5, and accommodate the oscillation source 1 of the laser beam or the electron beam 7. A longitudinal direction is formed in which the region is the rear end side and the region accommodating the first mirror 31 is the distal end side. In the longitudinal direction, the accommodating region of the second mirror 32 protrudes from the distal end side. A mirror 6 is installed in the middle of the longitudinal direction to perform refractive reflection and reflection on the laser beam or the electron beam 7, and the frame 5 is bent or bent around the portion R supporting the mirror 6. In a curved three-dimensional modeling apparatus, two to six galvano scanners 3 are provided, and the center position Q of the rotation center axis 30 of each second mirror 32 is referred to the center position P of the surface of the table 4. The two, three, four, five, or six galvano scanners 3 are arranged at equal distances in the horizontal direction, and the longitudinal direction of the tip side of the two, three, four, five, or six galvano scanners 3 is 0 °, respectively. A parallel state by the intersection angle, a regular triangle side by the intersection angle of 60 °, a square side by the intersection angle of 90 °, a regular pentagonal side by the intersection angle of 108 °, and a regular hexagonal side by the intersection angle of 120 ° are formed. It is a three-dimensional modeling device that is arranged so as to do.

That is, the individual galvano scanners 3 shown in FIG. 1 (a) are arranged equidistantly as shown in FIG. 2 (a), and then the arrangement in the crossed state as shown in FIG. 4 is adopted.

As shown in FIGS. 1A, 5A, and 5B, the basic configuration (3) is a squeegee in which powder is laminated on a table 4 via traveling, and a laser beam for a powder layer formed by the lamination. Alternatively, the galvano scanner 3 is a three-dimensional modeling apparatus including a galvano scanner 3 that scans the electron beam 7, and the galvano scanner 3 is a dynamic focus lens 2 that transmits the oscillation source 1 of the laser beam or the electron beam 7 and the laser beam or the electron beam 7. , The rotation center axis 30 in the first mirror 31 in a state independent of the rotation of the first mirror 31 and the first mirror 31 that rotate via the rotation center axis 30 in the direction orthogonal to the transmission direction. Second mirrors 32 that are orthogonal to the direction and rotate via the rotation center axis 30 in the horizontal direction are arranged in the frame 5, and accommodate the oscillation source 1 of the laser beam or the electron beam 7. A longitudinal direction is formed in which the region is the rear end side and the region accommodating the first mirror 31 is the distal end side. In the longitudinal direction, the accommodating region of the second mirror 32 protrudes from the distal end side. A mirror 6 that is provided and that performs refractive reflection with respect to the laser beam or the electron beam 7 is installed in the middle portion in the longitudinal direction, and the frame 5 is bent or bent around the portion R that supports the mirror 6. In a curved three-dimensional modeling apparatus, two to six galvano scanners 3 are provided, and the longitudinal directions of the distal end side regions of each galvano scanner 3 are parallel to each other, and the distal end side regions of adjacent galvano scanners 3 are connected. The longitudinal direction is set in the opposite direction, and each galvano scanner 3 has a straight line L extending in a direction orthogonal to the parallel direction from the center position P of the surface of the table 4 along the horizontal direction. 2 The rotation center axis 30 of the mirror 32 is arranged in a state of overlapping with the straight line L along the parallel direction, or arranged in a state of overlapping with the straight line L in a direction orthogonal to the parallel direction. It is a three-dimensional modeling device.

That is, the individual galvano scanners 3 shown in FIG. 1 (a) are arranged so that the longitudinal directions of the adjacent galvano scanners 3 are parallel to each other as shown in FIGS. 5 (a) and 5 (b). It is adopted.
In the basic configurations (1), (2), and (3), as shown in FIG. 1 (a), the direction in which the second mirror 32 projects from the longitudinal direction on the tip side and the longitudinal direction in the frame 5. Although the rear end side region forms the same direction as the projecting direction, it is naturally possible to set both projecting directions in opposite directions as shown in FIG. 5A.

As shown in FIG. 1A, in the basic configurations (1), (2), and (3), each frame 5 is around a portion R that supports a mirror 6 that refracts and reflects a laser beam or an electron beam 7. Although it is bent or curved, the technical significance based on such bending or bending is as already explained in the section of effect.

In the basic configurations (1) and (2), as shown in FIG. 2A, a plurality of galvano scanners 3 are provided, and the central position Q of the rotation center axis 30 of each second mirror 32 is set as a table. They are arranged equidistantly along the horizontal direction with respect to the center position P of the surface of the surface 4, and by such an arrangement, the irradiation region of each second mirror 32 is arranged with the center position P of the surface of the table 4 as a reference. A uniform irradiation state can be realized by simple control in either the case where the above is evenly divided or the case where the irradiation areas of the second mirrors 32 are shared.

The basic configuration (1) is two or three as shown in FIGS. 1 (a), 2 (a), 3 (a), (b), (c), (d), and (e). The longitudinal direction of the tip side of the four, four, five, or six galvano scanners 3 is equal to 180 °, 120 °, 90 °, 72 °, and 60 ° with respect to the center position P, respectively. It is characterized by being arranged in a radial state at the crossing state.

With such feature points, in the basic configuration (1), the second mirror 32 is arranged not only equidistantly from the center position P of the surface of the table 4 but also at an equidistant angle, so that the powder layer is uniformly irradiated. It can be realized.

When the linear galvano scanner 3 according to the prior art is arranged radially, the gap between the longitudinal regions of the galvano scanner 3 increases as the distance from the center position P of the surface of the table 4 increases, and the surface of the table 4 increases. It is inevitable that the degree of effective use of the space will decrease.

However, as shown in FIGS. 3 (a), (b), (c), (d), and (e), in the case of the basic configuration (1), each galvano scanner is located from the center position P of the surface of the table 4. Even if the longitudinal directions of the galvano scanners 3 are separated, the voids in the longitudinal region of each galvano scanner 3 do not increase due to the fact that the frame 5 of the galvano scanner 3 is bent or curved in the middle portion of the longitudinal direction. , The space on the surface of the table 4 can be effectively used.

Moreover, such a bent or curved configuration confirms that the table 4 having a small area is adopted in the table 4 by FIGS. 3 (a), (b), (c), (d), and (e).

The basic configuration (2) is two or three as shown in FIGS. 1 (a), 2 (a), 4 (a), (b), (c), (d), and (e). The longitudinal directions of the tips of the galvano scanners 3, 4, 5, or 6, are parallel at a crossing angle of 0 °, sides of a regular triangle at a crossing angle of 60 °, and crossing at 90 °, respectively. It is characterized by being arranged so as to form a square side depending on an angle, a regular pentagonal side having a 108 ° crossing angle, and a regular hexagonal side having a 120 ° crossing angle.

Due to the above feature points, even in the basic configuration (2), each second mirror 32 is not only equidistant from the center position P of the surface of the table 4 but also equidistant as in the case of the basic configuration (1). By arranging them, uniform irradiation can be realized.

Moreover, since the rear end region side of the frame 5 of each galvano scanner 3 protrudes to the outside of each side of an equilateral triangle, a square, a regular pentagon, and a regular hexagon in a parallel state, the table is the same as in the conventional technique. When the surface of 4 is adopted, it is possible to realize an arrangement state in which the tip side region surrounds the center position P of the surface of the table 4 in a compact state, that is, an arrangement state in which the center position P is close to the center position P. ..

As a result, a galvano scanner 3 having a linear longitudinal direction as in the prior art is adopted, and the center position P of the surface of the table 4 is set in a parallel state or in each side of an equilateral triangle, a square, a regular pentagon, and a regular hexagon. A more uniform irradiation state by the second mirror 32 can be realized as compared with the case of the enclosed arrangement state.

As shown in FIGS. 5A and 5B, the basic configuration (3) includes 2 to 6 galvano scanners 3, and the longitudinal direction of the distal end side region of each galvano scanner 3 is parallel to each other. , The longitudinal direction of the tip side region of the adjacent galvano scanners 3 is set in the opposite direction, and in each galvano scanner 3, the direction orthogonal to the parallel direction from the center position P of the surface of the table 4 along the horizontal direction. The rotation center axis 30 of each second mirror 32 is arranged along the parallel direction so as to overlap the straight line L, or in a direction orthogonal to the parallel direction. It is characterized in that it is arranged in a state overlapping with the straight line L.

Due to the above characteristics, in the basic configuration (3), by arranging the rotation center axis 30 of the second mirror 32 in a state overlapping with the straight line L, uniform irradiation by the second mirror 32 and uniform irradiation by the second mirror 32 and the second mirror 32 are performed. A compact array of can be realized.

Moreover, by setting the adjacent galvano scanners 3 in a parallel state in the opposite direction, the space on the surface of the table 4 can be effectively utilized.

Further, when the parallel state is set in the opposite direction as described above, the bending direction or the bending direction of the adjacent galvano scanners 3 is mutually reversed, and the space on the surface of the table 4 is effective. It can further promote the utilization.

As shown in FIGS. 1 (b), 2 (b), and 3 in FIG. 3, the basic configuration (4) includes a squeegee in which powder is laminated on a table 4 via traveling, and a laser beam for a powder layer formed by the lamination. Alternatively, it is a three-dimensional modeling apparatus provided with a galvano scanner 3 that scans the electron beam 7, and the galvano scanner 3 is a dynamic focus lens 2 that transmits the oscillation source 1 of the laser beam or the electron beam 7 and the laser beam or the electron beam 7. , The rotation center axis 30 of the first mirror 31 in a state independent of the rotation of the first mirror 31 and the first mirror 31 that rotate via the rotation center axis 30 in the direction orthogonal to the transmission direction. The second mirror 32, which is orthogonal to the direction and rotates via the rotation center axis 30 in the horizontal direction, is arranged in the frame 5, and accommodates the oscillation source 1 of the laser beam or the electron beam 7. A longitudinal direction is formed in which the region is the rear end side and the region accommodating the second mirror 32 is the distal end side, and the rotation center axis 30 of the first mirror 31 is formed in the middle portion of the longitudinal direction. In a three-dimensional modeling apparatus in which the frame 5 is bent or curved around a portion supporting the rotation center axis 30 of the first mirror 31, the frame 5 is provided with 2 to 6 galvano scanners 3. Moreover, the central position Q of the rotation center axis 30 of each second mirror 32 is arranged at equal distances in the horizontal direction with respect to the center position P of the surface of the table 4, and two or three are arranged. , Or, the longitudinal direction of the tip side of the four, five, or six galvano scanners 3 is 180 °, 120 °, 90 °, 72 °, and 60 ° with respect to the center position P, respectively. It is a three-dimensional modeling device that is arranged in a radial state at the crossing state.

That is, the individual galvano scanners 3 shown in FIG. 1 (b) are arranged equidistantly as shown in FIG. 2 (b), and then the arrangement in the crossed state as shown in FIG. 3 is adopted.

As shown in FIGS. 1 (b), 2 (b), and 4 in FIG. 4, the basic configuration (5) is for a squeegee in which powder is laminated on a table 4 via running, and a layer forming the powder. A three-dimensional modeling apparatus including a galvano scanner 3 that scans a laser beam or an electron beam 7. The galvano scanner 3 is a dynamic focus that transmits the oscillation source 1 of the laser beam or the electron beam 7, the laser beam, or the electron beam 7. The rotation center axis of the first mirror 31 in a state independent of the rotation of the lens 2, the first mirror 31 rotating via the rotation center axis 30 in the direction orthogonal to the transmission direction, and the rotation of the first mirror 31. Second mirrors 32 that are equidistant to the direction of 30 and rotate via the rotation center axis 30 in the horizontal direction are arranged in the frame 5, and accommodate the oscillation source 1 of the laser beam or the electron beam 7. A longitudinal direction is formed in which the region is the rear end side and the region accommodating the second mirror 32 is the tip side, and the rotation center axis of the first mirror 31 is formed in the middle portion of the longitudinal direction. In a three-dimensional modeling apparatus in which 30 is installed and the frame 5 is bent or curved around a portion supporting the rotation central axis 30 of the first mirror 31, 2 to 6 galvano scanners 3 are installed. The center position Q of the rotation center axis 30 of each second mirror 32 is arranged equidistantly along the horizontal direction with respect to the center position P of the surface of the table 4, and two or two are arranged. The longitudinal directions of the tips of the three, four, five, or six galvano scanners 3 are parallel at a cross angle of 0 °, equidistant sides at a cross angle of 60 °, and 90 °, respectively. It is a three-dimensional modeling device arranged to form a square side with an intersection angle, a regular pentagonal side with an intersection angle of 108 °, and a regular hexagonal side with an intersection angle of 120 °.

That is, the individual galvano scanners 3 shown in FIG. 1 (b) are arranged equidistantly as shown in FIG. 2 (b), and then the arrangement in the crossed state as shown in FIG. 4 is adopted.

As shown in FIGS. 1B and 5A and 5B, the basic configuration (6) is a squeegee in which powder is laminated on a table 4 via traveling, and a laser beam for a powder layer formed by the lamination. Alternatively, the galvano scanner 3 is a three-dimensional modeling apparatus including a galvano scanner 3 that scans the electron beam 7, and the galvano scanner 3 is a dynamic focus lens 2 that transmits the oscillation source 1 of the laser beam or the electron beam 7 and the laser beam or the electron beam 7. , The rotation center axis 30 in the first mirror 31 in a state independent of the rotation of the first mirror 31 and the first mirror 31 that rotate via the rotation center axis 30 in the direction orthogonal to the transmission direction. Second mirrors 32 that are orthogonal to the direction and rotate via the rotation center axis 30 in the horizontal direction are arranged in the frame 5, and accommodate the oscillation source 1 of the laser beam or the electron beam 7. A longitudinal direction is formed in which the region is the rear end side and the region accommodating the second mirror 32 is the distal end side, and the rotation center axis 30 of the first mirror 31 is formed in the middle portion of the longitudinal direction. In a three-dimensional modeling apparatus in which the frame 5 is bent or curved around a portion supporting the rotation center axis 30 of the first mirror 31, the frame 5 is provided with 2 to 6 galvano scanners 3. Moreover, the longitudinal direction of the distal end side region of each galvano scanner 3 is parallel, and the longitudinal direction of the distal end side region of the adjacent galvano scanners 3 is set in the opposite direction, and the center of the surface of the table 4 in each galvano scanner 3 is set. With respect to the straight line L extending in the direction orthogonal to the parallel direction from the position P in the horizontal direction, the rotation center axis 30 of each second mirror 32 overlaps with the straight line L along the parallel direction. It is a three-dimensional modeling apparatus that is arranged in a state of being arranged or in a state of overlapping with the straight line L in a direction orthogonal to the parallel direction.

That is, as shown in FIGS. 5 (a) and 5 (b), the individual galvano scanners 3 shown in FIG. 1 (b) are arranged so that the longitudinal directions of the adjacent galvano scanners 3 are parallel to each other. Is adopted.
In the basic configurations (4), (5), and (6), as shown in FIG. 1 (b), the direction in which the second mirror 32 projects from the longitudinal direction on the tip side and the longitudinal direction in the frame 5 Although the rear end side region forms the same direction as the projecting direction, it is naturally possible to set both projecting directions in opposite directions as shown in FIG. 5 (b) described later. ..

As shown in FIG. 1 (b), in the basic configurations (4), (5), and (6), each frame 5 is bent or bent around a portion supporting the rotation center axis 30 of the first mirror 31. Although it is curved, the technical significance based on such bending or bending is as already explained in the section of effect.

In the basic configurations (4) and (5), as shown in FIG. 2 (b), a plurality of galvano scanners 3 are provided, and the central position Q of the rotation center axis 30 of each second mirror 32 is set as a table. They are arranged equidistantly along the horizontal direction with respect to the center position P of the surface of the surface 4, and by such an arrangement, the irradiation region of each second mirror 32 is arranged with the center position P of the surface of the table 4 as a reference. A uniform irradiation state can be realized by simple control in either the case where the above is evenly divided or the case where the irradiation areas of the second mirrors 32 are shared.

The basic configuration (4) has two or three as shown in FIGS. 1 (b), 2 (b), 3 (a), (b), (c), (d), and (e). The longitudinal direction of the tip side of the four, four, five, or six galvano scanners 3 is equal to 180 °, 120 °, 90 °, 72 °, and 60 ° with respect to the center position P, respectively. It is characterized by being arranged in a radial state at the crossing state.

Due to such feature points, in the basic configuration (4), the second mirror 32 is arranged not only equidistantly from the center position P of the surface of the table 4 but also at an equidistant angle as in the case of the basic configuration (1). Thereby, uniform irradiation to the powder layer can be realized.

When the linear galvano scanner 3 according to the prior art is arranged radially, the gap between the longitudinal regions of the galvano scanner 3 increases as the distance from the center position P of the surface of the table 4 increases, and the surface of the table 4 increases. It is inevitable that the degree of effective use of the space will decrease.

However, as shown in FIGS. 3 (a), (b), (c), (d), and (e), in the case of the basic configuration (4), each galvano scanner is located from the center position P of the surface of the table 4. Even if the longitudinal directions of the galvano scanners 3 are separated, the voids in the longitudinal region of each galvano scanner 3 do not increase due to the fact that the frame 5 of the galvano scanner 3 is bent or curved in the middle portion of the longitudinal direction. , The space on the surface of the table 4 can be effectively used.

Moreover, such a bent or curved configuration confirms that the table 4 having a small area is adopted in the table 4 by FIGS. 3 (a), (b), (c), (d), and (e).

The basic configuration (5) has two or three as shown in FIGS. 1 (b), 2 (b), 4 (a), (b), (c), (d), and (e). The longitudinal directions of the tips of the galvano scanners 3, 4, 5, or 6, are parallel at a crossing angle of 0 °, sides of a regular triangle at a crossing angle of 60 °, and crossing at 90 °, respectively. It is characterized by being arranged so as to form a square side depending on an angle, a regular pentagonal side having a 108 ° crossing angle, and a regular hexagonal side having a 120 ° crossing angle.

Due to the above feature points, even in the basic configuration (5), each second mirror 32 is not only equidistant from the center position P of the surface of the table 4 but also equidistant as in the case of the basic configuration (2). By arranging them, uniform irradiation can be realized.

Moreover, since the rear end region side of the frame 5 of each galvano scanner 3 protrudes to the outside of each side of an equilateral triangle, a square, a regular pentagon, and a regular hexagon in a parallel state, the table is the same as in the case of the prior art. When the surface of 4 is adopted, it is possible to realize an arrangement state in which the tip side region surrounds the center position P of the surface of the table 4 in a compact state, that is, an arrangement state in which the center position P is close to the center position P. ..

As a result, a galvano scanner 3 having a linear longitudinal direction as in the prior art is adopted, and the center position P of the surface of the table 4 is set in a parallel state or in each side of an equilateral triangle, a square, a regular pentagon, and a regular hexagon. A more uniform irradiation state by the second mirror 32 can be realized as compared with the case of the enclosed arrangement state.

As shown in FIGS. 1 (b), 5 (a), and (b), the basic configuration (6) includes 2 to 6 galvano scanners 3, and the longitudinal length of the distal end region of each galvano scanner 3. The directions are parallel, and the longitudinal direction of the tip side region of the adjacent galvano scanners 3 is set to be opposite to each other. In each galvano scanner 3, the horizontal direction is relative to the parallel direction from the center position P of the surface of the table 4. With respect to the straight line L extending in the direction orthogonal to the straight line L, the rotation center axis 30 of each second mirror 32 is arranged along the parallel direction so as to overlap with the straight line L, or the parallel direction. It is characterized in that it is arranged in a state overlapping with the straight line L in a direction orthogonal to the straight line L.

Due to the above characteristics, in the basic configuration (6), as in the case of the basic configuration (3), the rotation center axis 30 of the second mirror 32 is arranged in a state of overlapping with the straight line L, so that the second mirror 32 is second. Uniform irradiation by the mirror 32 and a compact arrangement of the second mirror 32 can be realized.

Moreover, by setting the adjacent galvano scanners 3 in a parallel state in the opposite direction, the space on the surface of the table 4 can be effectively utilized.

Further, when the parallel state is set in the opposite direction as described above, the bending direction or the bending direction of the adjacent galvano scanners 3 is mutually reversed, and the space on the surface of the table 4 is effective. It can further promote the utilization.

Hereinafter, the description will be given according to an embodiment.

In the basic configurations (1), (2), (3), (4), (5), and (6), the angle at which the frame 5 of the galvano scanner 3 bends or bends is the front end side region and the rear end side. It is usually 90 ° with respect to the crossing angle in the straight line direction including the region and not bending and bending.
However, it is not necessary to limit the temperature to 90 °.

That is, in the first embodiment, the bending or bending angle of the frame 5 is 60 ° to 120 ° with respect to the bending and non-curving linear crossing angles including the front end side region and the rear end side region. It is characterized by.

Even in such an angle range, the effect in each basic configuration can be ensured.

In the basic configurations (1), (2), (3), (4), (5), and (6), the region where the frame 5 is bent or curved is equidistant from the rear end side and the tip side in the longitudinal direction. In many cases, a position equidistant from the rear end side and the tip side is selected as the center position of bending or bending.

However, the bent or curved region of the frame 5 as in the second embodiment is within a region of 1/3 or more of the total distance in the longitudinal direction from the rear end in the longitudinal direction, and is from the tip in the longitudinal direction to the longitudinal direction. It is also possible to adopt a configuration characterized by being within a region of 1/3 or more of the total distance of.

Even in such a division of the area, the effect of each basic configuration can be exhibited.

Example 3 is based on the basic configurations (3) and (6), and has two or two as shown in FIGS. 6 (a), (b), (c), (d), and (e). The four or six galvano scanners 3 are arranged point-symmetrically with respect to the center position P (in the case of FIGS. 6A, 6C, 6E), or 3 or 5 galvanoscanns are arranged. One of the scanners 3 is arranged on the center position P, and the remaining two or four galvano scanners 3 are lined with reference to a straight line L extending in the parallel direction from the center position P. It is characterized in that it is arranged symmetrically (in the case of FIGS. 6 (b) and 6 (d)).

With respect to such feature points, in the third embodiment, the feature points of the basic configurations (3) and (6) can be concretely realized.

Actually, as shown in FIGS. 6 (a), 6 (b), (c), (d), and (e), in the third embodiment, the adjacent galvano scanners 3 set in the parallel state in the opposite direction By reversing the bending direction or the bending direction, the effective utilization of the space on the surface of the table 4 is promoted, and this point is obvious from each of the above drawings.

In this way, a frame in which the longitudinal direction of the galvano scanner is bent or curved in the middle portion between the rear end side region and the front end side region is adopted, and two to six galvano scanners are crossed or longitudinally. In the present invention, which is set in parallel and in the opposite direction, while effectively utilizing the space on the table surface, it can be adopted for a table with a small area, while it is compact due to the arrangement configuration of a plurality of galvano scanners. It is possible to realize uniform irradiation by the arrangement of the second mirrors and each second mirror, and the range of use thereof is enormous.

1 Laser beam or electron beam oscillation source 2 Dynamic focus lens 3 Galvano scanner 30 Rotation center axis 31 First mirror 32 Second mirror 4 Table 5 Frame 6 Mirror that refracts and reflects the laser beam or electron beam 7 Laser beam or electron beam P Center position of the table surface D Dotted line extending in the parallel direction along the longitudinal direction of the galvano scanner from the center position of the table surface L Extending from the center position of the table surface in the direction orthogonal to the parallel direction Straight line Q Center position of rotation center axis 30 R Part in the frame supporting the mirror that performs refraction reflection

Claims (9)

A three-dimensional modeling device equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam against the powder layer formed by the stack. The galvano scanner is a laser beam or an electron beam. In a state independent of the rotation of the first mirror and the first mirror that rotate via the oscillation source, the dynamic focus lens that transmits the laser beam or the electron beam, and the rotation center axis in the direction orthogonal to the transmission direction. The second mirrors, which are orthogonal to the direction of the rotation center axis of the first mirror and rotate via the horizontal rotation center axis, are arranged in the frame, and the laser beam or the electron beam is oscillated. A longitudinal direction is formed in which the region accommodating the source is the rear end side and the region accommodating the first mirror is the distal end side. In the longitudinal direction, the region accommodating the second mirror is accommodated from the distal end side. A mirror is installed in the middle of the longitudinal direction where the region is projected, and the frame reflects the laser beam or the electron beam, and the frame bends or bends around the portion supporting the mirror. The three-dimensional modeling device is equipped with 2 to 6 galvano scanners, and the center position of the rotation center axis of each second mirror is set at the same distance in the horizontal direction with respect to the center position of the table surface. The longitudinal direction of the tip side of 2, 3, 3, 4, 5, or 6 galvano scanners is 180 °, 120 °, and 90 with respect to the center position, respectively. A three-dimensional modeling device that is arranged in a radial state in an intersecting state with equal angles of °, 72 °, and 60 °. A three-dimensional modeling apparatus equipped with a squeegee in which powder is laminated on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the lamination . The galvano scanner is a laser beam or an electron beam. In a state independent of the rotation of the first mirror and the first mirror that rotate via the oscillation source, the dynamic focus lens that transmits the laser beam or the electron beam, and the rotation center axis in the direction orthogonal to the transmission direction. The second mirrors, which are orthogonal to the direction of the rotation center axis of the first mirror and rotate via the rotation center axis in the horizontal direction, are arranged in the frame, and the laser beam or the electron beam is oscillated. A longitudinal direction is formed in which the region accommodating the source is the rear end side and the region accommodating the first mirror is the distal end side. In the longitudinal direction, the region accommodating the second mirror is accommodated from the distal end side. A mirror is installed in the middle of the longitudinal direction where a region is projected, and the frame reflects the laser beam or the electron beam, and the frame bends or bends around the portion supporting the mirror. The three-dimensional modeling device is equipped with 2 to 6 galvano scanners, and the center position of the rotation center axis of each second mirror is set at the same distance in the horizontal direction with respect to the center position of the table surface. , And the longitudinal directions of the tips of two, three, four, five, or six galvano scanners are parallel at a cross angle of 0 ° and crossed at 60 °, respectively. Three-dimensional modeling arranged to form a regular triangle side by angle, a square side by 90 ° intersection angle, a regular pentagonal side by 108 ° intersection angle, and a regular hexagonal side by 120 ° intersection angle. Device. A three-dimensional modeling apparatus equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the stacking . The galvano scanner is a laser beam or an electron beam. In a state independent of the rotation of the first mirror and the first mirror that rotate via the oscillation source, the dynamic focus lens that transmits the laser beam or the electron beam, and the rotation center axis in the direction orthogonal to the transmission direction. The second mirrors, which are orthogonal to the direction of the rotation center axis of the first mirror and rotate via the rotation center axis in the horizontal direction, are arranged in the frame, and the laser beam or the electron beam is oscillated. A longitudinal direction is formed in which the region accommodating the source is the rear end side and the region accommodating the first mirror is the tip side. In the longitudinal direction, the region accommodating the second mirror is accommodated from the tip side. A mirror is installed in the middle portion of the longitudinal direction in which a region is projected, and a mirror that performs refraction reflection with respect to a laser beam or an electron beam is installed, and the frame is bent or curved around the portion supporting the mirror. In the three-dimensional modeling apparatus, two to six galvano scanners are provided, the longitudinal direction of the distal region of each galvano scanner is parallel, and the longitudinal direction of the distal region of adjacent galvano scanners is opposite. With respect to a straight line extending in a direction orthogonal to the parallel direction from the center position of the table surface in each galvano scanner in the horizontal direction, the rotation center axis of each second mirror is set to the above. A three-dimensional modeling apparatus that is arranged in a state that overlaps with the straight line along a parallel direction, or is arranged in a state that overlaps with the straight line in a direction orthogonal to the parallel direction. A three-dimensional modeling device equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the stacking . The galvano scanner is a laser beam or an electron beam. In a state independent of the rotation of the first mirror and the first mirror that rotate via the oscillation source, the dynamic focus lens that transmits the laser beam or the electron beam, and the rotation center axis in the direction orthogonal to the transmission direction. The second mirrors, which are orthogonal to the direction of the rotation center axis of the first mirror and rotate via the rotation center axis in the horizontal direction, are arranged in the frame, and the laser beam or the electron beam is oscillated. A longitudinal direction is formed with the region accommodating the source as the rear end side and the region accommodating the second mirror as the tip end side, and the rotation center of the first mirror is formed in the middle portion of the longitudinal direction. In a three-dimensional modeling apparatus in which a shaft is installed and the frame is bent or curved around a portion supporting a rotation center axis of the first mirror, two to six galvano scanners are provided and each is provided. The center positions of the rotation center axes of the second mirror are arranged at equal distances in the horizontal direction with respect to the center position of the table surface, and two, three, four, or five pieces are arranged. Or, the longitudinal directions of the tips of the six galvano scanners are arranged in a radial state at equal angles of 180 °, 120 °, 90 °, 72 °, and 60 ° with respect to the center position, respectively. Three-dimensional modeling equipment. A three-dimensional modeling apparatus equipped with a squeegee in which powder is laminated on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the lamination . The galvano scanner is a laser beam or an electron beam. In a state independent of the rotation of the first mirror and the first mirror that rotate via the oscillation source, the dynamic focus lens that transmits the laser beam or the electron beam, and the rotation center axis in the direction orthogonal to the transmission direction. The second mirrors, which are orthogonal to the direction of the rotation center axis of the first mirror and rotate via the rotation center axis in the horizontal direction, are arranged in the frame, and the laser beam or the electron beam is oscillated. A longitudinal direction is formed with the region accommodating the source as the rear end side and the region accommodating the second mirror as the tip end side, and the rotation center of the first mirror is formed in the middle portion of the longitudinal direction. In a three-dimensional modeling device in which a shaft is installed and the frame is bent or curved around a portion supporting the rotation center axis of the first mirror, two to six galvano scanners are provided and each is provided. The center positions of the rotation center axes of the second mirror are arranged equidistantly along the horizontal direction with respect to the center position of the table surface, and two, three, four, or five pieces. Or, the longitudinal directions of the tips of the six galvano scanners are parallel at 0 ° intersection angle, equidistant triangle side at 60 ° intersection angle, square side at 90 ° intersection angle, and 108 ° intersection, respectively. A three-dimensional modeling device arranged to form a regular pentagonal side depending on the angle and a regular hexagonal side with an intersection angle of 120 °. A three-dimensional modeling apparatus equipped with a squeegee that stacks powder on a table via traveling, and a galvano scanner that scans a laser beam or an electron beam with respect to the powder layer formed by the stacking . The galvano scanner is a laser beam or an electron beam. In a state independent of the rotation of the first mirror and the first mirror that rotate via the oscillation source, the dynamic focus lens that transmits the laser beam or the electron beam, and the rotation center axis in the direction orthogonal to the transmission direction. The second mirrors, which are orthogonal to the direction of the rotation center axis of the first mirror and rotate via the rotation center axis in the horizontal direction, are arranged in the frame, and the laser beam or the electron beam is oscillated. A longitudinal direction is formed with the region accommodating the source as the rear end side and the region accommodating the second mirror as the tip end side, and the rotation center of the first mirror is formed in the middle portion of the longitudinal direction. In a three-dimensional modeling apparatus in which a shaft is installed and the frame is bent or curved around a portion supporting a rotation center axis of the first mirror, two to six galvano scanners are provided and each is provided. The longitudinal direction of the distal region of the galvano scanner is parallel, and the longitudinal direction of the distal region of adjacent galvano scanners is set in the opposite direction. , With respect to a straight line extending in a direction orthogonal to the horizontal direction, the rotation center axis of each second mirror is arranged along the parallel direction so as to overlap the straight line, or is aligned with the parallel direction. A three-dimensional modeling device that is arranged in a state that overlaps with the straight line in orthogonal directions. 1. The three-dimensional modeling apparatus according to any one of 2, 3, 4, 5, and 6. The bent or curved region of the frame is within one-third or more of the total longitudinal distance from the rear end of the longitudinal direction and at least one-third of the total longitudinal distance from the longitudinal tip. The three-dimensional modeling apparatus according to any one of claims 1, 2, 3, 4, 5, 6, and 7, characterized in that it is within the region. Two, four, or six galvano scanners are placed point-symmetrically with respect to the center position, or one of the three or five galvano scanners is placed on the center position. One of claims 3 or 6, wherein the remaining two or four galvano scanners are arranged line-symmetrically with respect to a straight line extending in the parallel direction from the center position. The three-dimensional modeling device described in the section.

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