JPH10175084A - Line type laser marker device, its optical device and its marking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To uniformize marking depth and to improve marking quality by scanning and emitting on a mask surface such an incident laser beam from a laser generator as deflected in an oscillatory manner in the direction roughly orthogonally crossing the scanning direction. SOLUTION: A laser beam outgoing from a laser generator 1 is shaped in its beam by means of a beam adjusting lens 2. In addition, the beam is made incident on a polygon mirror 3 through an optical device 10 equipped with a prism 11 arranged rotatably on the optical path, reflected and passed through a field lens 4, scanning a liquid crystal mask 5 in one direction, i.e., in its longitudinal direction. Furthermore, the laser beam is made to form an image reducibly by an image-forming lens 6, transformed into a parallel luminous flux by an image relay lens 7, and then reflected by an image scanning mirror 8a, 8b, forming an image on the marking surface of a work through an objective lens 9. In this case, the image-forming position is moved by oscillating the scanning mirror 8a, 8b each in the X and Y directions, so that a larger pattern as a whole is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser marker device, and more particularly, to a line type laser marker device that scans a laser beam in only one direction, and a method of engraving the same.

[0002]

2. Description of the Related Art In recent years, arbitrary characters, symbols, figures, and the like are placed on a work made of metal, resin, ceramic, paper, cloth, or the like.
As one method of imprinting a pattern by a combination of patterns and the like, a laser marker device using a laser beam is often used. This laser marker device forms the pattern to be marked on a mask, and irradiates the mask with laser light while performing raster scanning to mark. 2. Description of the Related Art Conventionally, a liquid crystal laser marker device using a mask constituted by a liquid crystal display, a laser marker device using a mask having a predetermined pattern, and the like have been used.

[0003] Among the above-mentioned liquid crystal laser marker devices, a line type laser marker device which performs scanning on a mask surface in only one direction has been proposed because of its mechanical simplicity. For example, Japanese Unexamined Patent Publication No. 6-226476 is well known. According to this technique, the pattern of the work to be marked is divided into a plurality of patterns each having a size corresponding to one scanning line (this is called a division pattern). The plurality of division patterns are sequentially displayed on a liquid crystal mask, and each pattern is displayed. Scanning is performed for each pattern, and marking for one line is performed. Then, every time the display pattern of the mask display is changed, the engraved area on the work is engraved while being shifted by one division pattern, so that one pattern synthesized as a whole is engraved. .

FIG. 22 shows a trajectory of a laser beam when a pattern for one row is scanned on the surface of the liquid crystal mask 5. In the figure, each circle represents one shot of a laser beam when a pulse of laser light is output by a Q switch or the like. A cross section orthogonal to the optical axis of the laser beam has a substantially circular shape, and the intensity distribution of the laser beam on this cross section is often a Gaussian type as shown in FIG. In the figure, the horizontal axis represents the distance from the center of the laser beam cross section, and the vertical axis represents the beam intensity. At this time, the intensity is highest at the center of the beam cross section,
The strength becomes smaller toward the outer periphery.

[0005]

However, when the laser beam as described above is engraved in one direction as shown in FIG. 22, the portion on the center line of the line is the most engraved depth (the depth of the groove dug by the laser beam). (Depth) becomes deeper, and gradually becomes shallower at positions separated in a direction orthogonal to the center line. FIG. 24 shows the engraved depth of a cross section orthogonal to the scanning direction. The horizontal axis represents the distance from the center line of the line, and the vertical axis represents the engraved depth. As can be seen from the figure, the depth on the center line is different from the depth of the line end perpendicular to the center line. Has become.
In addition, this may result in a defective product being determined by the appearance inspection after the marking, which leads to a decrease in yield.

In order to solve this problem, as in a conventional area type laser marker device, a scan mirror and a relay lens are arranged in front of a polygon mirror to two-dimensionally raster-scan a liquid crystal mask surface. There is a method in which a mask surface is scanned in a plane so that the beam intensity becomes uniform. However, in this method, a reduction in the engraving speed for one engraving pattern,
There is a problem that the size of the entire apparatus is increased and the cost is increased.

[0007] A method has also been proposed in which an optical element for converting a unimodal beam into a bimodal beam is inserted before the polygon mirror. That is, local maximum values of the laser beam intensity are generated at different positions in the beam, and the intensity is pseudo-flattened. Thus, performing scanning on the liquid crystal mask surface in two lines is also considered to be an effective means for making the marking depth uniform. However, this method has a problem in that the loss of laser power is large, and thus the color developability is poor, that is, the power threshold level is smaller than the power threshold level at which the work can be imprinted. In this case, as a measure to improve the color development, it is conceivable to increase the power of the laser output or to reduce the engraving speed by lowering the rotation speed of the polygon mirror. This is a negative factor on the surface, which is not desirable.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a line type laser marker device capable of making a line marking depth uniform without impairing device performance such as a marking speed and a device size. An object of the present invention is to provide an optical device and an engraving method thereof.

[0009]

Means for Solving the Problems, Functions and Effects In order to achieve the above object, according to the first aspect of the present invention, a laser beam emitted from a laser oscillator 1 is incident on a scanner. The laser light is irradiated in one direction by scanning and irradiating the surface of the mask on which a pattern to be engraved on the work is drawn, and the laser light transmitted from the mask is applied to a predetermined engraved position of the work to apply the pattern. In a line type laser marker device for engraving, the laser beam is provided between the laser oscillator 1 and the scanner, and vibrates the laser light incident from the laser oscillator 1 in a direction substantially orthogonal to the scanning direction. The configuration is provided with an optical device 10 for deflecting light.

According to the first aspect of the present invention, the optical device 10 oscillately deflects the laser light incident from the laser oscillator in a direction substantially orthogonal to the scanning direction and emits the laser light to the scanner. Then, the scanner scans and irradiates the mask surface with the vibratingly deflected laser light. by this,
Since the laser light is irradiated on the mask surface while oscillating in a direction substantially perpendicular to the scanning direction, the laser beam intensity per unit area of the mask surface becomes substantially uniform. As a result, the marking depth becomes uniform, so that the marking quality is improved.

The invention described in claim 2 is the first invention.
In the line-type laser marker device described in the above, the optical device 10, the prism 11, 31 wherein the incident surface 21 on which the laser light is incident and the exit surface 22 from which the laser light exits are non-parallel,
Rotation driving means 32 for rotating the prisms 11 and 31 around an axis intersecting the incident surface 21 is provided.

According to a ninth aspect of the present invention, the laser beam emitted from the laser oscillator 1 is deflected in a predetermined direction and is incident on a scanner, and the scanner causes the deflected laser beam to form a pattern. In an optical device for a line-type laser marker device in which the pattern is engraved with the transmitted laser light by being scanned in one direction on the drawn mask surface, an incident surface 21 on which laser light from the laser oscillator 1 is incident; The optical device is provided with prisms 11 and 31 that are non-parallel to the emission surface 22 from which the incident laser light is emitted, and are rotatably provided around an axis that intersects the incidence surface 21.

According to a sixteenth aspect of the present invention, a laser beam emitted from the laser oscillator 1 is scanned in one direction on a mask surface on which a pattern is drawn, and a laser beam transmitted from the mask is irradiated on a work. In the marking method of the line type laser marker device for marking the pattern, the laser light emitted from the laser oscillator 1 is rotationally deflected in the mask surface and scanned on the mask surface.

According to the second, ninth and sixteenth aspects, when the laser beam is scanned on the mask surface while being rotationally deflected within the mask surface, the trajectory of the laser beam on the mask surface becomes trochoidal or cycloidal. State. Such a locus can be drawn as follows. By rotating a prism (referred to as a declination prism) having a predetermined angle between the incident surface and the emission surface of the laser light around an axis intersecting the incident surface, and making the laser light incident on the incident surface, the emission is achieved. A laser beam that is rotationally deflected about the optical axis on the incident side is emitted from the surface. When this rotationally deflected laser light is scanned on a mask surface by a scanner, the laser beam draws a trochoidal or cycloidal trajectory. As a result, the laser beam is irradiated on the mask surface while swinging in a direction substantially perpendicular to the scanning direction.
At this time, the trajectory of the laser beam is made substantially uniform on the mask surface by adjusting the rotation speed and scanning speed of the deflection prism, and the size of the predetermined angle formed by the entrance surface and the emission surface of the deflection prism. Since the laser beam is distributed, the laser beam intensity per unit area of the mask surface becomes substantially uniform.
As a result, the marking depth becomes uniform, so that the marking quality is improved.

The invention according to claim 3 is the same as the invention according to claim 2.
, The prism 31 is formed by cutting a cylindrical light transmitting member at two surfaces that are non-parallel to one another and at least one surface is non-parallel to the bottom surface.

According to a tenth aspect of the present invention, in the optical device for a line type laser marker device according to the ninth aspect, the prism 31 includes a cylindrical light transmitting member having at least one surface non-parallel to the bottom surface. And two non-parallel to each other
It is formed by cutting the surface.

According to the third and tenth aspects of the present invention,
The deflection prism has a cross-section viewed from an incident surface, such as when a light-transmitting member such as a cylindrical glass is cut at two surfaces that are nonparallel to at least one surface and nonparallel to each other. May be configured as a prism having a circular or elliptical shape. Therefore, such a deflection prism can be easily manufactured, which is advantageous in cost.

The invention described in claim 4 is the first invention.
In the line type laser marker device, the optical device 10 is made of a light transmitting material such as glass, and the incident surface 21 on which the laser light from the laser oscillator 1 is incident, and the incident laser light is emitted. A parallel plate 35 that is parallel to the light exit surface 22 and is rotatable around an axis that forms a predetermined angle other than a right angle with respect to the light incident surface 21 and that makes the laser light incident parallel to the rotation center axis; A rotation drive unit 32 for rotating the parallel plate 35 around the rotation center axis is provided.

According to an eleventh aspect of the present invention, the laser light emitted from the laser oscillator 1 is deflected in a predetermined direction and is incident on a scanner, and the scanner draws a pattern on the deflected laser light. An optical device for a line-type laser marker device in which the pattern is engraved with the transmitted laser light by being scanned in one direction on the surface of the mask, which is formed of a light transmitting material such as glass, The incident surface 21 on which the laser light is incident and the exit surface 22 from which the incident laser light exits are parallel to each other, and the incident surface 2
This is an optical device in which a parallel plate 35 for allowing laser light to enter at a predetermined angle other than a right angle with respect to 1 is rotatably provided around an axis parallel to the optical axis of the laser light.

According to the invention described in claims 4 and 11,
For example, a parallel plate made of a light transmitting material such as glass is provided, and one of two parallel surfaces of the parallel plate is a laser light incident surface,
The other surface is an emission surface. Then, the parallel plate is rotated about a rotation axis that forms a predetermined angle other than a right angle with respect to the incident surface, and the laser beam is incident parallel to the rotation center axis. At this time, with the rotation of the parallel plate, the angle formed between the optical axis on the incident side of the laser beam and the incident surface will periodically change, so that it rotates about the optical axis on the incident side,
In addition, the laser light parallel to the optical axis is emitted after being deflected on the emission surface. Therefore, when the rotationally deflected laser light is scanned on the mask surface by the scanner, the laser beam draws a trochoidal or cycloidal trajectory. As a result, the laser beam is irradiated on the mask surface while swinging in a direction substantially perpendicular to the scanning direction. At this time, by adjusting the rotation speed and scanning speed of the parallel plate, the angle between the optical axis and the incident surface, and the size of the parallel plate, the trajectory of the laser beam is substantially uniform on the mask surface. Since the laser beam is distributed, the laser beam intensity per unit area of the mask surface becomes substantially uniform. As a result, the marking depth becomes uniform, so that the marking quality is improved.

The invention described in claim 5 is the same as the invention in claim 4.
In the line-type laser marker device described in (1), the outer shape of the incident surface 21 of the parallel plate 35 is circular or elliptical.

According to a twelfth aspect of the present invention, in the optical device for a line type laser marker device according to the eleventh aspect,
The outer shape of the incident surface 21 of the parallel plate 35 is circular or elliptical.

According to the fifth and twelfth aspects of the invention,
The parallel plate has a circular or elliptical outer shape of an incident surface. Such a parallel plate can be manufactured by cutting a cylindrical light-transmitting member parallel or non-parallel to the bottom surface at two parallel surfaces. Thereby, the parallel plate can be easily manufactured, which is advantageous in cost.

The invention described in claim 6 is the first invention.
In the line-type laser marker device described in the above, the optical device 10 is made of a light transmitting material such as glass, and is provided with a deflecting member 40 rotatably disposed, and a deflecting member 40 around the rotation center axis. And a rotation driving means 32 for rotating, and the deflecting member 40 is a flat incident surface on which the laser beam is incident at a position E orthogonal to the rotation center axis and at a predetermined distance from the rotation center axis. And a deflection curved surface which periodically deflects the laser light incident from the incident surface 21 in at least two or more different directions within the specific plane including the optical axis with the rotation and emits the laser light. An emission surface 22 is provided.

According to a fifteenth aspect of the present invention, a laser beam emitted from the laser oscillator 1 is scanned in one direction on a mask surface on which a pattern is drawn, and a laser beam transmitted from the mask is irradiated on a work. In the marking method of the line type laser marker device for marking the pattern, the laser beam emitted from the laser oscillator 1 is vibratedly deflected in a direction substantially orthogonal to the scanning direction, and the laser light is emitted on the mask surface. Are scanned.

According to the invention described in claims 6 and 15,
When scanning is performed while oscillating the laser light on the mask surface in a direction substantially orthogonal to the scanning direction, the laser beam draws a locus of a substantially triangular wave on the mask surface. Such a locus can be drawn as follows. A position E at a predetermined distance from the center of rotation of the incident surface of the deflecting member.
, The laser light is transmitted and reaches the emission surface.
With the rotation of the deflecting member, the laser light is periodically deflected in at least two or more different directions within a specific plane including the optical axis by the deflection curved surface provided on the emission surface. At this time, the deflected laser light is scanned on the mask surface by the scanner, and the periodic deflection is guided so as to be substantially orthogonal to the scanning direction. As a result, the laser beam is irradiated on the mask surface while swinging in a direction substantially perpendicular to the scanning direction. At this time, by adjusting the rotation speed and scanning speed of the deflecting member, the deflection direction and the deflection angle, etc., the trajectory of the laser beam becomes uniformly distributed on the mask surface. The laser beam intensity becomes substantially uniform. As a result, the marking depth becomes uniform and the marking quality is improved.

[0027] The invention described in claim 7 is the same as in claim 6.
In the line-type laser marker device described in the above, the deflecting member 40 has a wavefront member 42 having a wavefront that smoothly undulates at a predetermined period along the trajectory 43 of the laser light accompanying the rotation, or A polyhedral member 45 arranged along the locus 46 and having surfaces similar to a plurality of adjacent surfaces on the outer peripheral side surface of the polygonal pyramid, or a polyhedral member 45 arranged along the locus 48 and It is formed by any one of the conical members 47 having a surface similar to the outer peripheral side surface.

According to a thirteenth aspect of the present invention, the laser light emitted from the laser oscillator 1 is deflected in a predetermined direction and is incident on a scanner, and the scanner draws a pattern on the deflected laser light. An optical device for a line type laser marker device in which the pattern is engraved with the transmitted laser light by being scanned in one direction on the surface of the mask, which is formed of a light transmitting material such as glass, and a rotatable deflection member 40
The deflecting member 40 has a flat incident surface 21 at which the laser beam is incident at a position E perpendicular to the rotation center axis and at a predetermined distance from the rotation center axis. Incident laser light, within a specific plane including this optical axis, having an emission surface 22 having a deflection curved surface that periodically deflects and emits in accordance with the rotation in at least two or more different directions, The deflection curved surface has a wavefront member 42 having a wavefront that smoothly rises and falls at a predetermined period along a locus 43 of the position E due to the rotation, or the locus 46.
And a polyhedral member 45 having surfaces similar to a plurality of mutually adjacent surfaces of the outer peripheral side surface of the polygonal pyramid, or arranged along the trajectory 48, and the outer peripheral side surface of the cone. The optical device is formed by any one of the conical members 47 having similar surfaces.

According to the seventh and thirteenth aspects of the invention,
The deflection curved surface of the exit surface of the deflecting member is a wavefront member having a wavefront in which the position on the incident surface where the laser beam is incident smoothly rises and falls at a predetermined period along a locus drawn on the exit surface side with the rotation of the deflecting member. Or, arranged along the trajectory, and a polyhedral member having surfaces similar to a plurality of adjacent surfaces of the outer peripheral side surface of the polygonal pyramid, or disposed along the trajectory,
And it is formed by any one of the conical members having a surface similar to the outer peripheral side surface of the conical body. With these deflection curved surfaces, the incident laser light is periodically deflected in at least two or more different directions within a specific plane including the optical axis and emitted. This makes it possible to irradiate the laser beam on the mask surface while swinging in a direction substantially perpendicular to the scanning direction. At this time, by adjusting the rotation speed and scanning speed of the deflecting member, the deflection direction and the deflection angle, etc., the trajectory of the laser beam becomes uniformly distributed on the mask surface. The laser beam intensity becomes substantially uniform. As a result, the marking depth becomes uniform, so that the marking quality is improved.

The invention described in claim 8 is the first invention.
In the line type laser marker device, the optical device 10 is disposed between the laser oscillator 1 and the scanner so as to be able to vibrate in a specific direction inclined at a predetermined angle with respect to the optical axis of the laser light. A prism 51 for deflecting the laser light in a direction substantially orthogonal to the scanning direction at the time of the vibration, and a vibration means 52 for vibrating the prism 51 in the vibration direction are provided. .

According to a fourteenth aspect of the present invention, there is provided an optical apparatus for a line type laser marker device for deflecting a laser beam emitted from a laser oscillator 1 in a predetermined direction and irradiating a mask via a scanner. The laser light is vibrated in a specific direction inclined at a predetermined angle with respect to the optical axis of the laser light from the first laser light, and at the time of this vibration, the incident laser light is at least two or more different in a specific plane including the optical axis. A prism 51 for deflecting light in the direction of the
1 is an optical device including a vibration means 52 for vibrating in the vibration direction.

According to the invention described in claims 8 and 14,
The laser beam is vibrated in a specific direction inclined at a predetermined angle with respect to the optical axis, and the laser beam incident at the time of the vibration is directed to at least two or more different directions in a specific plane including the optical axis (in the scanning direction). A prism that deflects and emits light (in a direction perpendicular to the direction) is provided. When the oscillatory laser light emitted from the prism is scanned on the mask surface by the scanner, the laser beam can be irradiated on the mask surface while swinging in a direction substantially orthogonal to the scanning direction. At this time, the trajectory of the laser beam is uniformly distributed on the mask surface by adjusting the frequency, scanning speed, deflection direction, deflection angle, and the like, so that the laser beam intensity per unit area of the mask surface is reduced. It becomes almost uniform. As a result, the marking depth becomes uniform and the marking quality is improved.

[0033]

Embodiments of the present invention will be described below in detail with reference to the drawings. In the following description,
Although an example in which a liquid crystal mask is used as a mask is shown, the invention is not limited to this. First, based on FIGS.
An embodiment will be described. FIG. 1 is a perspective view of a main part of the laser marker device according to the first embodiment. This laser marker device has a laser oscillator 1 composed of, for example, a YAG laser oscillator as a laser light source, and a laser beam emitted from the laser oscillator 1 is shaped into a beam by a beam adjusting lens 2. The shaped beam enters the polygon mirror 3 via the optical device 10 having the prism 11 rotatably arranged on the optical path, is reflected by the polygon mirror 3 and passes through the field lens 4. The liquid crystal mask 5 is scanned in one direction, that is, in the longitudinal direction of the liquid crystal mask 5.

The laser light transmitted through the liquid crystal mask 5 is reduced and imaged by the imaging lens 6. This image is converted into a parallel light beam by the image relay lens 7, further reflected by the image scan mirrors 8 a and 8 b, and then imaged on the marking surface of the work W via the objective lens 9. At this time, assuming that the engraving surface of the work W is the XY plane, the image forming position on the engraving surface can be moved by swinging the image scan mirrors 8a and 8b in the X direction and the Y direction, respectively. Then, an image is synthesized by this moving mechanism,
It is possible to imprint a larger pattern as a whole.

FIG. 2 shows an optical device 10 according to this embodiment.
3A is a configuration diagram illustrating an example of a rotation driving unit of the prism 11 of FIG. The prism 11 is configured by a prism (hereinafter, referred to as a deflected prism) in which a surface on which the laser beam A is incident and a surface on which the laser beam A is emitted are non-parallel. The laser light A passes through substantially the center of the incident surface and the exit surface. The prism 11 is attached so as to be in contact with the hollow cylindrical member 12, and is disposed so that the central axis of the cylindrical member 12 coincides with the optical axis of the laser beam A. Further, on the outer peripheral surface of the cylindrical member 12, an outer peripheral member 13 made of, for example, a synthetic resin and having a large coefficient of friction is provided. Further, the outer peripheral surface of the outer peripheral member 13 is supported by at least three rollers 17 attached to a chassis (not shown) of the laser marker device, and each roller 17 and the outer peripheral surface of the outer peripheral member 13 rotate relative to each other. Contact freely.

An outer peripheral member 15 having a cylindrical outer peripheral surface and having a large friction coefficient like the outer peripheral member 13 is also provided on the outer peripheral portion of the rotatable rotating member 14.
The outer peripheral surfaces of the outer peripheral member 13 and the outer peripheral member 15 are pressed against each other, and the direction of the rotation axis of the rotating member 14 is arranged to be parallel to the central axis of the cylindrical member 12. The rotating member 14 is rotated by a rotation driving unit 32 such as an electric motor. When the rotation driving means 32 rotates the rotating member 14, the outer peripheral member 15
The cylindrical member 12 rotates about the central axis due to the rotational friction of the outer peripheral member 13 and the prism 11 rotates about the optical axis.

Now, the incident surface of the prism 11 is
Assuming that the emission surface is inclined at a predetermined angle, the laser beam A emitted from the emission surface forms a predetermined angle with respect to the optical axis direction on the incident side. FIG. 3 is an explanatory diagram of this operation. In FIG.
The entrance surface 21 and the exit surface 22 of the prism 11 intersect at a predetermined angle θ on the extension surface thereof, and when the laser beam A enters the entrance surface 21 at right angles, the laser beam A emitted from the exit surface 22 It is assumed that the light is refracted by an angle δ with respect to the optical axis direction on the incident side. Further, the refractive index of the prism 11 is set to n. Here, it is assumed that a point at which the optical axis intersects the emission surface 22 is B, and a straight line C passing through the point B and perpendicular to the emission surface 22 is assumed.

At this time, the angle between the optical axis on the incident side and the straight line C is θ, and the angle α between the optical axis on the output side and the straight line C is α.
Is expressed by the following equation 1 in consideration of the sign of the angle.

## EQU00001 ## The relationship between the refractive index n and the refraction angle is expressed by Expression 2 according to the formula of α = θ + δ Snell.

N · sin θ = sin α Now, if both the angle θ and the angle α are small,
Equation 2 is obtained from the relationship of Equation 1,

[Mathematical formula-see original document] n.theta. =. Theta. +. Delta.

Δ = (n−1) · θ Thus, the laser beam A emitted from the emission surface 22 is refracted by the angle δ based on Expression 4 with respect to the optical axis direction on the incident side.

When the prism 11 is rotating around the optical axis on the incident side, the laser beam on the output side is refracted by the angle δ and the outer peripheral surface of the cone around the optical axis on the incident side. Rotate to form This rotation speed ω is the same as the rotation speed ω of the prism 11. The rotating laser light is incident on the polygon mirror 3, and the laser light from the reflecting surface is scanned in one direction on the surface of the liquid crystal mask 5 at a scanning speed V corresponding to the rotation speed of the polygon mirror 3. At this time, the laser beam scans in one direction at the scanning speed V while rotating at the rotation speed ω in the plane of the liquid crystal mask 5, so that the trajectory has a trochoidal or cycloidal shape as shown in FIG. It becomes a trajectory. Then, according to the ratio between the rotation speed ω and the scanning speed V, it is possible to form a trochoid or a cycloid. Further, the density at which the laser light trajectory per unit area passes can be adjusted by this ratio.

In this manner, by oscillating the laser beam trajectory in the direction orthogonal to the scanning direction and adjusting the rotation speed ω and the scanning speed V as described above, the Adjustment can be made so that the laser light intensity distribution becomes uniform. As a result, the laser beam intensity on the surface of the liquid crystal mask 5 is made uniform without lowering the scanning speed V, so that the marking depth becomes uniform without sacrificing the marking speed. This improves the quality of the stamp appearance. In the present embodiment, the prism 11 is rotated around an axis orthogonal to the incident surface 21 and the laser light A is incident so as to be orthogonal to the incident surface 21. However, the present invention is not limited to this. That is, the incident surface 21
May be rotated about an axis that intersects at a predetermined angle other than perpendicular to the laser beam A, and the laser beam A may be incident on the incident surface 21 so as to intersect at a predetermined angle other than perpendicular. At this time, the angle formed between the incident surface 21 and the rotation axis and the angle formed between the incident surface 21 and the incident laser light A are adjusted so that the light emitted from the emission surface is substantially trochoidal on the surface of the liquid crystal mask 5. Alternatively, it is possible to draw a cycloidal locus, and the optical device 10a has the same operation and effect as described above.

Next, a second embodiment will be described with reference to FIGS. FIG. 5 is a perspective view showing the optical device 10b of the present embodiment, and FIG. 6 is a side view thereof. In the prism 31, the incident surface 21 on which the laser light A is incident and the exit surface 22 from which the laser light A exits are non-parallel, and the outer shape of the prism 31 viewed from the incident surface 21 is circular or elliptical. . Such a prism 31 can be formed by cutting a cylindrical light transmitting member by two surfaces that are non-parallel to at least one surface and non-parallel to the bottom surface. In the present embodiment, an example is shown in which a cylindrical light transmitting member is cut such that one surface is parallel to the bottom surface and the other surface is non-parallel to the bottom surface. The prism 31 is provided rotatably around the circular or elliptical center line. The rotation shaft of the rotation driving means 32 is attached to the center of rotation of the prism 31.
2 rotates in a predetermined direction. The prism 31 and the rotation driving means 32 are arranged between the beam adjusting lens 2 and the polygon mirror 3 so that the laser light A is incident on the incident surface 21 at right angles. (See Fig. 1)

The operation of such a configuration will be described below. When the prism 31 rotates, the inclination angle β of the emission surface 22 with respect to the optical axis of the laser light A as viewed from the side in FIG. 6 changes within a predetermined angle range. That is, the inclination angle β swings within an angle range of (90 ° ± θ) around 90 °. Now, the prism 31 is shown in FIG.
When the laser beam A is in the position drawn by the solid line, the laser beam A is deflected downward by an angle δ with respect to the optical axis on the incident side at the point D1 on the emission surface 22 as shown in FIG. , The laser light A is deflected upward by an angle δ with respect to the optical axis on the incident side at the point D2 on the emission surface 22 as shown in FIG. As can be seen from this, the outgoing light from the outgoing surface 22 has its deflection point reciprocating between the points D1 and D2 and the same as the prism 31 around the optical axis on the incident side from this deflection point. Will rotate in the direction of rotation. The laser beam A emitted from the prism 31 is reflected by the polygon mirror 3 and scans the surface of the liquid crystal mask 5. by this,
Similar to the locus shown in FIG. 4, the laser beam draws a substantially trochoidal or cycloidal locus. However, the radius of gyration of the locus in the plane of the liquid crystal mask 5 is the point D of the refraction point.
It changes with reciprocation between 1 and point D2. However, since this variation is very small compared to the size of the liquid crystal mask 5,
The locus in the plane of the liquid crystal mask 5 is considered to be substantially the same as in the case of the previous embodiment.

As described above, also in this embodiment,
The laser beam trajectory can be swung in a direction orthogonal to the scanning direction, and by adjusting the rotation speed ω of the prism 31 and the scanning speed V of the polygon mirror 3, the unit area of the liquid crystal mask 5 can be changed. Can be adjusted. As a result, the laser beam intensity on the surface of the liquid crystal mask 5 is made uniform without lowering the scanning speed V, so that the marking depth becomes uniform without sacrificing the marking speed. Therefore, the quality of the stamp appearance is improved.

In the above description of the present embodiment, the outer shape of the prism 31 as viewed from the incident surface 21 is circular or elliptical. However, the present invention is not limited to this. The shape may be non-parallel, and the external shape viewed from the incident surface 21 does not matter. For example, the optical device 1 shown in FIG.
Like 0c, similar to the prism 11 shown in the previous embodiment, the shape viewed from the incident surface 21 may be a polygon (a quadrangle in FIG. 1). In the present embodiment, the prism 31 is rotated around an axis orthogonal to the incident surface 21 and the laser light A is incident so as to be orthogonal to the incident surface 21. However, the present invention is not limited to this. That is,
The laser light A is rotated about an axis that intersects the incident surface 21 at a predetermined angle other than perpendicular to the incident surface 21 and the laser light A is incident on the incident surface 2.
Alternatively, the light may be incident so as to intersect at a predetermined angle other than perpendicular to 1. At this time, the angle formed between the incident surface 21 and the rotation axis and the angle formed between the incident surface 21 and the incident laser light A are adjusted so that the light emitted from the emission surface is substantially trochoidal on the surface of the liquid crystal mask 5. Alternatively, it is possible to draw a cycloidal locus, and the optical device 10b has the same operation and effect as described above.

Next, a third embodiment will be described with reference to FIGS. FIG. 8 is a perspective view of a main part of the present embodiment. In the figure, a parallel plate 35 made of a light transmitting material such as glass is provided rotatably, and is rotated in a predetermined direction by a rotation driving unit 32. The parallel entrance surface 21 and exit surface 22 of the parallel plate 35 are
Is attached at a predetermined angle θ (excluding 90 °) with respect to the rotation center axis. Here, in the present embodiment, the outer shape of the parallel plate 35 is circular, and the cylindrical member is cut by two surfaces parallel to the bottom surface, but is not limited to this shape. For example, the cylindrical member may be formed by cutting the base member in two planes that are non-parallel to each other and parallel to each other, or may be formed by cutting the polygonal column member in two parallel planes. .

The parallel plate 35 and the rotation driving means 32 are arranged between the beam adjusting lens 2 and the polygon mirror 3 so that the laser light A is incident on the incident surface 21 in parallel with the direction of the rotation center axis. I have. (See FIG. 1)
With the rotation of the parallel plate 35, the incident angle of the laser light on the incident surface 21 changes, that is, “θθ
(180 ° −θ) ”.

FIG. 9 illustrates the operation of the present embodiment. Now, when the parallel plate 35 is at a position as shown in FIG. 9A with respect to the laser light A, the light emitted from the emission surface 22 is parallel to the optical axis on the incident side and at a distance from the optical axis. The light is emitted downward by a distance L in the figure. When the parallel plate 35 is at a position shown in FIG. 9 (2) with respect to the laser beam A, the light emitted from the emission surface 22 is parallel to the optical axis on the incident side and at a distance from the optical axis. The light is emitted upward by a distance L in the figure. The distance L is set by the thickness of the parallel plate 35 and the angle θ between the parallel plate 35 and the rotation center axis. Accordingly, with the rotation of the parallel plate 35, the emitted light draws a cylindrical surface whose center is the optical axis on the incident side and whose distance from the optical axis is L. The emitted light is reflected by the polygon mirror 3 and scans the surface of the liquid crystal mask 5, so that the laser beam draws a trochoidal or cycloidal trajectory, similarly to the trajectory shown in FIG.

In this way, it is possible to traverse the laser beam trajectory in a direction orthogonal to the scanning direction on the surface of the liquid crystal mask 5. Further, by adjusting the rotation speed ω of the parallel plate 35 and the scanning speed V of the polygon mirror 3, the laser light intensity distribution per unit area of the liquid crystal mask 5 can be adjusted. As a result, the laser beam intensity on the surface of the liquid crystal mask 5 is made uniform without lowering the scanning speed V, so that the marking depth becomes uniform without sacrificing the marking speed. Therefore, the quality of the stamp appearance is improved. Also,
The emitted light becomes parallel to the optical axis, and the distance L from the optical axis can be easily adjusted by the thickness and the inclination angle of the parallel plate 35, so that it is easy to adjust the locus of the mask plane.

Next, a fourth embodiment will be described with reference to FIGS. FIG. 10 is a perspective view of a main part of an optical device 10e according to the present embodiment. Deflection member 40
Is transmitted through the incident laser light A and emitted.
The light is emitted while being deflected in two or more directions in a plane including the optical axis, and the transmitting portion is made of a light transmitting material such as glass. The deflecting member 40 is disposed in a circular shape on a circular plate 41 and on one surface of the circular plate 41.
And a wavefront member 42 having a wavefront refraction surface. The disk 41 and the wavefront member 42 are made of the above-described light transmitting material, and the surface of the wavefront member 42 opposite to the wavefront is a disk 41.
It is attached by sticking to. The deflecting member 40 is rotatably provided, and is rotated by a rotation driving unit (not shown) (for example, equivalent to the rotation driving unit 32 in FIG. 5). The laser beam is applied to the wavefront member 42 of the disc 41.
The incident surface 21 is opposite to the incident surface 21, and the incident surface 21 is orthogonal to the center axis of the rotation. Then, the deflecting member 40 is set so that the optical axis of the laser beam A is parallel to the rotation center axis.
Is disposed between the beam adjusting lens 2 and the polygon mirror 3. (See FIG. 1).
Are incident orthogonally to the incident surface 21 of the first lens, pass through the disk 41 and the wavefront member 42, and are emitted from the wavefront-like refraction surface of the wavefront member 42.

When the deflecting member 40 rotates while the laser light A is incident on the incident surface 21, the trajectory 43 of the position E where the laser light A is incident on the disk 41 becomes a circle centered on the rotation axis. . Along the trajectory 43, a wavefront member 42 is provided. FIG. 11 shows a cross-sectional view PP along the locus 43. When the wavefront of the wavefront member 42 makes a round along the trajectory 43, a predetermined number of waves are formed, and for example, a wavefront expressed by a sine wave or another continuous gentle vibration function. Composed of
The wavefront member 42 may be integrally formed by molding or may be formed of a plurality of members divided for each cycle of the wavefront.

The operation of the deflecting member 40 having such a configuration will be described with reference to FIG. Now, as shown in FIG. 12 (1) and FIG. 12 (3), when the laser beam A is incident on an inclined surface different from the peak or valley of the wavefront, the emitted light depends on the inclination angle of this inclined surface. Refracts according to direction and angle.
In FIG. 12 (1), it is refracted downward, and in FIG. 12 (3), it is refracted upward. In addition, as shown in FIG.
Is incident on the surface corresponding to the peak of the peak or valley of the wavefront, the emitted light goes straight without being refracted. By rotating the deflecting member 40 in a predetermined direction, the incident position of the laser beam moves along the wavefront of the trajectory 43, so that the outgoing light has a predetermined angle range centered on the optical axis direction on the incident side (see FIG. 1
In (2), the vibration is continuous (in the vertical direction). Therefore, by setting the direction in which the emitted light fluctuates in a direction perpendicular to the scanning direction of the liquid crystal mask 5, the liquid crystal mask 5
Can be uniformly scanned on the surface of the.

FIG. 13 shows the trajectory of the laser beam on the liquid crystal mask 5 in this embodiment. As shown in the figure, the laser beam is scanned while swinging at a predetermined cycle (equal to the cycle of the wavefront) in a direction orthogonal to the scanning direction.
The trajectory is substantially triangular. Here, the locus shape changes depending on the relationship between the wavefront waveform, the number of waves per rotation of the deflecting member 40, the rotation speed ω of the deflecting member 40, and the scanning speed V. Therefore, by setting these relationships to predetermined values, the intensity distribution of the laser beam per unit area in the plane of the liquid crystal mask 5 can be made uniform. As a result, it is possible to make the marking depth uniform.

In this embodiment, the laser beam is made to enter the incident surface 21 of the deflecting member 40 at right angles. However, the present invention is not limited to this. That is, for example, in a plane orthogonal to the radial direction of the disc 41 passing through the incident position E,
Further, the laser light may be incident from a direction inclined at a predetermined angle with respect to the incident surface 21. In this case, the incident laser light is refracted in a predetermined direction by the disk 41, and the refracted laser light passes through the wavefront member 42 and reaches the emission surface 22, where it is deflected. The direction of this deflection is
Similarly to the above description, continuously in a plurality of directions in a plane including the optical axis (in this case, a plane including the optical axis and orthogonal to the radial direction of the disk 41 passing through the incident position E). Swing. By scanning the emitted laser light on the surface of the liquid crystal mask 5 in the same manner as described above, the intensity distribution of the laser beam per unit area in the surface of the liquid crystal mask 5 can be made uniform.

Next, a fifth embodiment will be described with reference to FIGS. In the present embodiment, as an alternative to the wavefront member 42 in the above-described fourth embodiment, a polyhedral member having a polygonal pyramid side peripheral portion is used for the emission surface 22.
FIG. 14 is a perspective view of the deflection member 40 of the optical device 10f at this time. A plurality of polyhedral members 45 are arranged closely adjacent to each other on a surface of the disk 41 opposite to the incident surface 21 along a locus 46 drawn by the incident position E of the laser beam A. The disk 41 and the plurality of polyhedral members 45 are made of a light transmitting material such as glass, and the surface of the polyhedral member 45 on the side opposite to the polyhedral side is attached to the disk 41 by bonding or the like. Also,
The deflecting member 40 is rotatably provided, and is rotated by rotation driving means (not shown) (for example, equivalent to the rotation driving means 32 in FIG. 5). The laser light is incident on the incident surface 21 of the disk 41 on the side opposite to the polyhedral member 45, and the incident surface 2
1 is orthogonal to the center axis of the rotation. The deflecting member 40 is disposed between the beam adjusting lens 2 and the polygon mirror 3 so that the optical axis of the laser beam A is parallel to the rotation center axis. Therefore, the laser beam is incident perpendicularly to the incident surface 21 of the disk 41, passes through the disk 41 and the polyhedral member 45, and is emitted from the polyhedral emission surface 22 of the polyhedral member 45. .

The outgoing surface 22 of each polyhedral member 45 is formed by a polyhedron similar to a plurality of adjacent sides of the polygonal pyramid, and in FIG. 14, it is similar to three adjacent sides of a predetermined polygonal pyramid. It has a shape. Each polyhedral member 45 is formed in an annular shape along the trajectory 46 such that the emission surface 22 is on the opposite side of the incidence surface 21 and the apex of the polygonal pyramid coincides with the rotation center of the disk 41. It is arranged.
FIG. 15 shows a sectional view QQ along the locus 46 at this time. The laser light A is incident on the incident surface 21 of the deflecting member 40 having the cross-sectional shape, and the deflecting member 40 having the cross-sectional shape continuously crosses the laser light as the deflecting member 40 rotates.

The operation of the deflecting member 40 having such a configuration will be described with reference to FIG. Now, as shown in FIG. 16A, when the emission surface 22 at the center of the polyhedral member 45 crosses the laser beam A, in this example, the optical axis is
Are emitted, and the emitted light goes straight without being refracted on the emission surface 22. Next, as shown in FIGS. 16 (2) and 16 (3),
When a plane different from the emission surface 22 at the center crosses the laser beam A, the optical axis forms a predetermined angle other than 90 ° with the emission surface 22, so that the emission light is directed in a direction corresponding to the inclination angle. And refracted according to the angle. The light is refracted upward in FIG. 16 (2) and downward in FIG. 16 (3). The deflection member 40
Is rotated in a predetermined direction, so that the incident position of the laser beam A is sequentially along the trajectory 46 ((1) in FIG. 16 →
(2) → (3) → (1)), the emitted light is at a predetermined angle around the optical axis direction on the incident side (in FIG. 16,
(Up and down). Therefore, by setting the direction in which the emitted light fluctuates in a direction perpendicular to the scanning direction of the liquid crystal mask 5, the surface of the liquid crystal mask 5 can be uniformly scanned.

FIG. 17 shows the trajectory of the laser beam on the liquid crystal mask 5 in this embodiment. As shown in the figure, since the laser beam is scanned while swinging at a predetermined period (equal to the period of the multi-plane) in a direction orthogonal to the scanning direction,
The trajectory is substantially triangular. Here, each polyhedral member 45
The shape of the trajectory changes depending on the relationship between the number of surfaces, the angle between adjacent surfaces, the number of polyhedral members 45 per rotation of the deflecting member 40, the rotational speed ω of the deflecting member 40, the scanning speed V, and the like. Therefore, by setting these relationships to predetermined values, the intensity distribution of the laser beam per unit area in the plane of the liquid crystal mask 5 can be made uniform. As a result, it is possible to make the marking depth uniform.

In this embodiment, the laser beam is made to enter the incidence surface 21 of the deflecting member 40 at right angles. However, the present invention is not limited to this. That is, for example, the laser beam may be incident on a plane orthogonal to the center line of the polygonal pyramid of the polyhedral member 45 and in a direction inclined at a predetermined angle with respect to the incident surface 21. In this case, the incident laser light is refracted in a predetermined direction by the disk 41, and the refracted laser light passes through the polyhedral member 45 and reaches the emission surface 22, where it is deflected. The direction of this deflection is, as described above, an emission surface in a plane including the optical axis (in this case, a plane including the optical axis and perpendicular to the polygonal pyramid center line of the polyhedral member 45). The deflection surface swings in a plurality of predetermined directions corresponding to the respective surfaces of the 22 deflection curved surfaces. By scanning the emitted laser light on the surface of the liquid crystal mask 5 in the same manner as described above, the intensity distribution of the laser beam per unit area in the surface of the liquid crystal mask 5 can be made uniform.

Next, a sixth embodiment will be described with reference to FIGS. FIG. 18 is a perspective view of the deflection member 40 of the optical device 10g according to the present embodiment. In the present embodiment, the deflecting member 40 is composed of a disc 41 and a conical member 47. As an alternative to the polyhedral member 45 in the above-described fifth embodiment, a conical member using a conical side outer peripheral portion for the refraction surface. 47 are used. On the surface opposite to the incident surface 21 of the disk 41, a locus 48 of the incident position E of the laser beam A is drawn.
, A plurality of conical members 47 are disposed closely adjacent to each other. The disk 41 and the plurality of conical members 47 are made of a light transmitting material such as glass, and the surface of the conical member 47 on the side opposite to the conical side surface is attached to the disk 41 by attaching or the like. The deflecting member 40 is rotatably provided, and is rotated by a rotation driving unit (not shown) (for example, equivalent to the rotation driving unit 32 in FIG. 5). The incident surface 21 of the disk 41 on which the laser light is incident is orthogonal to the central axis of the rotation. The deflecting member 40 is disposed between the beam adjusting lens 2 and the polygon mirror 3 so that the optical axis of the laser beam A is parallel to the rotation center axis. Therefore, the laser beam is incident perpendicularly to the incident surface 21 of the disk 41, passes through the disk 41 and the conical member 47, and is emitted from the conical emission surface 22 of the conical member 47. You.

The exit surface 22 of each conical member 47 has the same shape as a part of the side surface of the cone. Each conical member 47
Are arranged annularly along the trajectory 48 such that the emission surface 22 is on the opposite side to the incidence surface 21 and the apex of the cone is coincident with the center of rotation of the disk 41. I have. The cross-sectional shape along the trajectory 48 is such that arc-shaped members are closely arranged. The laser light A is incident on the incident surface 21 having this cross-sectional shape, and the deflecting member 40 having the above-mentioned cross-sectional shape continuously crosses the laser light with the rotation of the deflecting member 40. Thereby, the laser light A
Is continuously deflected by the conical emission surface 22 in a plurality of predetermined directions in a plane including the optical axis (in FIG. 18, a plane including the optical axis and orthogonal to the incident surface 21). Also, when switching to the exit surface 22 of the adjacent conical member 47, it is deflected discontinuously. Thus, FIG.
A locus as shown in FIG. 9 is drawn.

FIG. 19 shows the trajectory of the laser beam on the liquid crystal mask 5 in this embodiment. As shown in the figure, since the laser beam is scanned while being swung in a direction perpendicular to the scanning direction at a predetermined period (equal to the period of the conical member 47), the trajectory is substantially triangular. Here, the locus shape changes depending on the relationship between the radius of the arc of each conical member 47, the number of conical members 47 per one rotation of the deflecting member 40, the rotation speed ω of the deflecting member 40, the scanning speed V, and the like. Therefore, by setting these relationships to predetermined values, the intensity distribution of the laser beam per unit area in the plane of the liquid crystal mask 5 can be made uniform. As a result, it is possible to make the marking depth uniform.

In this embodiment, the laser beam is made to be incident on the incident surface 21 of the deflecting member 40 at right angles. However, the present invention is not limited to this. That is, for example, in a plane orthogonal to the conical center line of the conical member 47 and the incident surface 2
Laser light may be incident from a direction inclined at a predetermined angle with respect to 1. In this case, the incident laser light is
The laser light is refracted in a predetermined direction by 1, and the refracted laser light passes through the conical member 47 and reaches the emission surface 22, where it is deflected. The deflection direction is the plane including the optical axis (in this case, the plane including the optical axis and orthogonal to the conical center line of the conical member 47) in the same manner as described above.
And continuously changes in a plurality of predetermined directions, and changes discontinuously when switching to the emission surface 22 of the adjacent conical member 47. By scanning the emitted laser light on the surface of the liquid crystal mask 5 in the same manner as described above, the intensity distribution of the laser beam per unit area in the surface of the liquid crystal mask 5 can be made uniform.

Further, a seventh embodiment will be described with reference to FIGS. FIG. 20 shows a side view of a main part of the present embodiment. The prism 51 can move up and down, and vibrates in the up and down direction by vibrating means 52 attached to a lower part thereof. The vibration means 52 can be composed of, for example, a piezoelectric element, a vibration coil for driving a speaker, and the like. The prism 51 has an incident surface 21 parallel to the vertical movement direction, and the laser light A is incident on the incident surface 21 perpendicularly. A deflection curved surface having a plurality of adjacent surfaces on the outer peripheral portion of the side surface of the polygonal prism is disposed on the exit surface 22 opposite to the entrance surface 21, and a horizontal component of the plurality of surfaces (perpendicular to the paper). ) Are parallel to each other.

The operation of the above configuration will be described. Incident surface 21 of prism 51 vibrated by vibrating means 52
When the laser light A enters from above, the laser light A crosses the plurality of emission surfaces, so that the laser light A is emitted while being vibratingly deflected vertically corresponding to each surface. The emitted laser light is applied to the liquid crystal mask 5 via the polygon mirror 3. As a result, as shown in FIG. 21, the laser beam is scanned while being swung in the direction perpendicular to the scanning direction in the plane of the liquid crystal mask 5 at a predetermined cycle (equal to the drive cycle of the vibration means 52). It has a substantially triangular wave shape. Here, the locus shape changes depending on the relationship between the driving cycle time, the magnitude of the driving amplitude, the scanning speed V, and the like. Therefore, by setting these relationships to predetermined values, the liquid crystal mask 5
The intensity distribution of the laser beam per unit area in the plane can be made uniform. As a result, it is possible to make the marking depth uniform.

In the present embodiment, the deflection curved surface of the exit surface of the prism 51 is formed by a plurality of adjacent surfaces on the outer peripheral portion of the side surface of the polygonal prism, but is not limited to this. And a curved surface that deflects in at least two or more different directions. For example, it can be formed with a smooth wavefront or a curved surface similar to the outer peripheral side surface of a cylinder. In the present embodiment, the vibration direction is a direction orthogonal to the optical axis, but is not limited to this. For example, the prism 51 and the vibrating means 52 are arranged so as to vibrate in a direction inclined at a predetermined angle different from a right angle with respect to the optical axis, and so that a plane perpendicular to the emission surface 22 includes the optical axis. At this time, the laser light is deflected on the emission surface 22 in at least two or more different directions corresponding to the deflection curved surface of the emission surface 22 within a plane including the optical axis.

[Brief description of the drawings]

FIG. 1 is a perspective view of a main part of a laser marker device according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram illustrating an example of a rotation drive section of the prism according to the first embodiment.

FIG. 3 is an explanatory diagram of an operation of a prism according to the first embodiment.

FIG. 4 shows a trajectory diagram of a laser beam on a mask surface according to the first embodiment.

FIG. 5 is a perspective view of an optical device according to a second embodiment.

FIG. 6 shows a side view of FIG.

FIG. 7 is a configuration diagram illustrating another example of the optical device according to the second embodiment.

FIG. 8 is a perspective view of an optical device according to a third embodiment.

FIG. 9 is an operation explanatory view in the third embodiment.

FIG. 10 is a perspective view of a main part of an optical device according to a fourth embodiment.

FIG. 11 is a view showing the P of the deflection member in FIG. 10 of the fourth embodiment;
FIG.

FIG. 12 is an operation explanatory view in the fourth embodiment.

FIG. 13 shows a trajectory diagram of a laser beam on a mask surface according to a fourth embodiment.

FIG. 14 is a perspective view of a deflection member according to a fifth embodiment.

FIG. 15 is a view showing Q of the deflection member in FIG.
The Q sectional view is shown.

FIG. 16 is an operation explanatory view in the fifth embodiment.

FIG. 17 shows a trajectory diagram of a laser beam on a mask surface according to a fifth embodiment.

FIG. 18 is a perspective view of a deflection member according to a sixth embodiment.

FIG. 19 is a trajectory diagram of a laser beam on a mask surface according to a sixth embodiment.

FIG. 20 shows a side view of a main part in a seventh embodiment.

FIG. 21 shows a trajectory diagram of a laser beam on a mask surface according to a seventh embodiment.

FIG. 22 is an explanatory diagram of a laser beam trajectory on a mask surface according to the related art.

FIG. 23 shows a light intensity distribution in a cross section of a laser beam.

FIG. 24 shows the engraved depth in the case of FIG. 22 for explaining the problem in the prior art.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 laser oscillator 2 beam adjusting lens 3 polygon mirror 4 field lens 5 liquid crystal mask 6
... image forming lens, 7 ... image relay lens, 8a, 8b ... image scan mirror, 9 ... objective lens, 10, 10a-10h
... Optical device, 11, 31, 51 ... Prism, 12 ... Cylindrical member, 13, 15 ... Outer peripheral member, 14 ... Rotating member, 17 ...
Roller, 21: incident surface, 22: outgoing surface, 32: rotating drive means, 35: parallel plate, 40: deflecting member, 41: disk, 4
2. Wavefront member, 43, 46, 48: locus, 45: polyhedral member, 47: conical member, 52: vibrating means.

Claims (16)

[Claims] A laser beam emitted from a laser oscillator (1) is incident on a scanner, and the laser beam scans the laser beam in one direction on a surface of a mask on which a pattern for engraving a workpiece is drawn. In the line type laser marker device which irradiates the laser beam transmitted from the mask to a predetermined engraving position of the work and engraves the pattern, the line type laser marker device is disposed between the laser oscillator (1) and the scanner. And
And a line type laser marker device comprising an optical device (10) for oscillatingly deflecting the laser light incident from the laser oscillator (1) in a direction substantially orthogonal to the scanning direction. The optical device (10) has an incident surface (21) on which the laser light is incident and an exit surface (2) on which the laser light exits.
2) non-parallel prisms (11) and (31), and rotation driving means (32) for rotating the prisms (11) and (31) around an axis intersecting the incident surface (21). The line type laser marker device according to claim 1, wherein 3. The prism (31) includes a cylindrical light transmitting member having at least one surface non-parallel to a bottom surface, and
3. The line-type laser marker device according to claim 2, wherein the line-type laser marker device is formed by cutting two non-parallel surfaces. 4. The optical device (10) is made of a light transmitting material such as glass, and an incident surface (21) on which a laser beam from the laser oscillator (1) is incident, and an incident laser beam. The emission surface (22) for emitting light is parallel to the laser light, and the laser light can be rotated about an axis forming a predetermined angle other than a right angle with respect to the incident surface (21), and the laser light is incident parallel to the rotation center axis. 2. The line-type laser marker device according to claim 1, further comprising: a parallel plate (35) for rotating the parallel plate (35) around the rotation center axis. 3. 5. The line-type laser marker device according to claim 4, wherein an outer shape of said entrance surface of said parallel plate is circular or elliptical. 6. The optical device (10) is composed of a light transmitting material such as glass and is rotatably disposed. A deflecting member (40) is provided around the rotation center axis. ), And the deflection member (40) is provided at a position (E) orthogonal to the rotation center axis and at a predetermined distance from the rotation center axis. A flat incident surface (21) on which the laser beam is incident, and the laser light incident from the incident surface (21) is rotated in at least two or more different directions in a specific plane including the optical axis by the rotation. The line-type laser marker device according to claim 1, further comprising: an emission surface (22) having a deflection curved surface that deflects and emits periodically. 7. The line-type laser marker device according to claim 6, wherein the deflecting member (40) smoothly moves the deflecting curved surface at a predetermined cycle along a trajectory (43) of the laser light accompanying the rotation. A wavefront member (42) having an undulating wavefront, or a polyhedral member (45) arranged along the trajectory (46) and having surfaces similar to a plurality of adjacent surfaces on the outer peripheral side surface of the polygonal pyramid (45) Or a conical member (47) disposed along the trajectory (48), and having a surface similar to the outer peripheral side surface of the cone.
A line type laser marker device formed by any one of the above. 8. The optical device (10) is disposed between the laser oscillator (1) and the scanner so as to be capable of oscillating in a specific direction inclined at a predetermined angle with respect to the optical axis of the laser light. A prism (51) for vibrating the laser light in a direction substantially orthogonal to the scanning direction during the vibration; and a vibrating means for vibrating the prism (51) in the vibration direction.
The line type laser marker device according to claim 1, further comprising (52). 9. A laser beam emitted from a laser oscillator (1) is deflected in a predetermined direction and is incident on a scanner, and the deflected laser beam is applied to a surface of a mask on which a pattern is drawn by the scanner. In the optical device for a line type laser marker device, which is scanned in one direction and the pattern is engraved with the transmitted laser light, an incident surface (21) on which laser light from a laser oscillator (1) is incident
Prisms (11) and (31), whose output surfaces (22) from which the incident laser light is output are non-parallel, are provided rotatably around an axis intersecting the incident surface (21). Optical device for a line type laser marker device. 10. The prism (31) is formed by cutting a cylindrical light transmitting member at two surfaces that are non-parallel to one another and at least one surface is non-parallel to the bottom surface. An optical device for a line-type laser marker device according to claim 9. 11. A laser beam emitted from a laser oscillator (1) is deflected in a predetermined direction and is incident on a scanner. The scanner causes the deflected laser beam to fall on a mask surface on which a pattern is drawn. An optical device for a line-type laser marker device which is scanned in one direction and the pattern is engraved with the transmitted laser light, comprising a light transmitting material such as glass and a laser oscillator.
The incident surface (21) on which the laser light from (1) is incident is parallel to the exit surface (22) from which the incident laser light is emitted, and a predetermined angle other than a right angle with respect to the incident surface (21). An optical device for a line-type laser marker device, characterized in that a parallel plate (35) on which laser light is incident is rotatably provided around an axis parallel to the optical axis of the laser light. 12. An outer shape of said entrance surface (21) of said parallel plate (35) is circular or elliptical.
An optical device for the line-type laser marker device as described in the above. 13. A laser beam emitted from a laser oscillator (1) is deflected in a predetermined direction and is incident on a scanner. The scanner causes the deflected laser beam to fall on a mask surface on which a pattern is drawn. An optical device for a line-type laser marker device that is scanned in one direction and the pattern is engraved with the transmitted laser light, comprising a light transmitting material such as glass and a rotatable deflection member (40). The deflecting member (40) has a flat incidence surface (21) in which the laser beam is incident at a position (E) orthogonal to the rotation center axis and at a predetermined distance from the rotation center axis, and An emission surface having a deflection curved surface that periodically deflects laser light incident from the incident surface (21) in accordance with the rotation in at least two or more different directions in a specific plane including the optical axis and emits the laser light. (22), wherein the deflecting curved surface is Trajectory of the position due to (E) (4
A wavefront member (42) having a wavefront that smoothly undulates at a predetermined cycle along 3), or a plurality of surfaces that are arranged along the trajectory (46) and are adjacent to each other on the outer peripheral side surface of the polygonal pyramid. A polyhedral member (45) having a similar surface, or a conical member (47) disposed along the trajectory (48) and having a surface similar to the outer peripheral side surface of the cone is formed. An optical device for a line-type laser marker device. 14. An optical device for a line-type laser marker device for deflecting a laser beam emitted from a laser oscillator (1) in a predetermined direction and irradiating the mask via a scanner, wherein the laser beam is emitted from the laser oscillator (1). Vibrated in a specific direction inclined at a predetermined angle with respect to the optical axis of the laser light, at the time of this vibration, the incident laser light in a specific plane including this optical axis,
A prism (51) that deflects and emits light in at least two or more different directions, and vibrating means that vibrates the prism (51) in the vibration direction
(52) An optical device for a line-type laser marker device, comprising: 15. A laser beam emitted from a laser oscillator (1) is scanned in one direction on a mask surface on which a pattern is drawn, and a laser beam transmitted from the mask is applied to a work to irradiate the pattern. In the marking method of a line type laser marker device for marking, the laser beam emitted from a laser oscillator (1) is vibratedly deflected in a direction substantially orthogonal to the scanning direction and scanned on the mask surface. An engraving method for a line-type laser marker device, characterized in that: 16. A laser beam emitted from a laser oscillator (1) is scanned in one direction on a mask surface on which a pattern is drawn, and a laser beam transmitted from the mask is irradiated on a work to change the pattern. A marking method of a line type laser marker device for marking, wherein the laser beam emitted from a laser oscillator (1) is rotationally deflected in the mask surface and scanned on the mask surface. How to engrave the device.