JP2021066059A - Three-dimensional shaping method and three-dimensional shaping device - Google Patents

Abstract

To provide a configuration capable of performing three-dimensional shaping using efficient and uniform two-dimensional scanning by laser beams used for scanning after transmitted through a plurality of galvano scanners all contributing to formation of a sintered surface.SOLUTION: A three-dimensional shaping method and device employs a plurality of galvano scanners 3 that realize scanning with laser beams 7 along a two-dimensional direction of orthogonal or cylindrical coordinates by reflections from a first mirror 31, which vibrates via a rotation shaft 30 that is orthogonal to a transmission direction of the laser beams 7 transmitted through a dynamic focus lens 2, and from a second mirror 32, which vibrates via a horizontal rotation shaft 30 that is orthogonal to the rotation shaft 30 of the first mirror 31. A range of the vibration is made freely adjustable on the basis of control of the vibration, and then a region on a sintered surface 6 of a focal point or a nearby position thereof of the laser beams 7 incident from a direction inclined with respect to the surface of a table 4 is made freely selectable.SELECTED DRAWING: Figure 1

Description

The present invention is intended for a three-dimensional modeling method and a three-dimensional modeling apparatus that employ a plurality of galvano scanners that scan a laser beam that passes through a dynamic focus lens and sequentially focuses in a two-dimensional direction.

In three-dimensional modeling in which a sintered surface is formed by irradiating a powder layer laminated on a table with a laser beam, a laser beam transmitted through a dynamic focus lens whose focal length can be adjusted is transmitted by a galvano scanner to the sintered surface of the laser beam. Is being scanned.

When a plurality of galvano scanners that realize the scanning are adopted instead of one, and a laser beam transmitted through the plurality of galvano scanners is irradiated obliquely to the table surface to irradiate the table surface in the orthogonal direction. In comparison, a three-dimensional modeling method that realizes efficient scanning with a plurality of laser beams while setting the space required for three-dimensional modeling compactly is the invention described in Patent Document 1 (hereinafter, "Prior Invention 1"). , And similarly, a plurality of galvano scanners 3 and 3a are adopted, and the laser beams 7 and 7a transmitted through the plurality of galvano scanners 3 and 3a are obliquely inclined with respect to the table surface. The configuration of the three-dimensional modeling apparatus that exerts the above effect by irradiating in the direction is also disclosed as the invention described in Patent Document 2 (hereinafter referred to as "prior application invention 2").

However, in the prior inventions 1 and 2, the laser beams 7 and 7a are scanned on the entire flat surface located above the entire region surface of the table 13 (FIG. 1 of Patent Document 1). , ABSTRACT, column 3, line 22, column 4, line 40, disclosure that the entire flat surface in claim 1 is subject to scanning, and FIG. 1, ABSTRACT, column 3, line 9, fourth of Patent Document 2. The disclosure item in column 26 that all flat surfaces are subject to common scanning, and the disclosure item in claim 1 that the laser beam moves across the flat surface).

The flat surface corresponds to the focal surface 5 formed as a control for the focal adjustment units 9 and 9a (FIG. 4 of Patent Document 1 and FIG. 4 of Patent Document 2), but the laser is used in the entire region of the focal surface 5. Sintering is not performed by irradiation of the beams 7 and 7a, but by controlling the focus adjustment units 9 and 9a, only the region of the focal plane 5 that needs to be sintered is irradiated at the focal point of the laser beams 7 and 7a. In the region where sintering is not required, it is essential to control the laser beams 7 and 7a so that the focal points do not reach the focal plane 5.

This is because, if such control is not performed, the entire flat surface, that is, the entire region of the focal plane 5 is always subject to sintering, and a region for forming the sintered surface is required according to each focal plane 5. This is because it becomes impossible to select according to the above.

However, irradiating a region that does not form a sintered surface with scanning of a laser beam means that inefficient three-dimensional modeling is performed in terms of unnecessary scanning and irradiation.

In the galvano scanners 3 and 3a of the prior inventions 1 and 2, naturally, the first mirror reflecting the laser beams 7 and 7a transmitted through the focus adjustment units 9 and 9a and the laser beam 7 reflected from the first mirror, It is provided with a second mirror that further reflects 7a.
However, in the prior inventions 1 and 2, there is no description about the first mirror and the second mirror, and as a result, how the first mirror and the second mirror are based on the center position on the upper surface of the table 13. It is completely unspecified whether or not they are arranged, and any of them can be selected.

Therefore, it is naturally possible to select a design in which each second mirror is arranged outside each first mirror with reference to the center position of the surface of the table 13.

Incidentally, FIG. 3 showing the prior inventions 1 and 2 suggests that each second mirror is arranged inside each first mirror with reference to the center position, but FIG. 3 Is merely an illustration of the embodiment (explanatory part regarding Fig. 3), and the disclosure of FIG. 3 is by no means a basis for denying that the above selection is possible.

However, in the case of such a design, the distance between the second mirrors is compared with the design in which the second mirror is arranged inside the first mirror with respect to the center position. Inevitably, when the laser beam exceeds the center position to form a sintered surface, the illuminance decreases as the distance from the center position increases, while on the table surface. On the other hand, in the case of irradiation in the vertical direction, the shape of the sintered surface becomes inaccurate due to the formation of a substantially elliptical sintered surface instead of the formation of a substantially circular sintered surface. Due to this, the defect that the contour at the boundary of the sintered surface becomes unclear cannot be avoided.

Moreover, in the cases of the prior inventions 1 and 2, the direction of the rotation axis in which the second mirror vibrates is unspecified, and the technical drawbacks due to such unspecified will be described later.

US10,029,333B2 Gazette US9,314,972B2 Gazette

The present invention provides a three-dimensional modeling configuration that enables efficient and uniform two-dimensional scanning and irradiation of a laser beam while providing a plurality of galvano scanners for a laser beam transmitted through a dynamic focus lens. Is the subject.

In order to achieve the above object, the basic configuration of the present invention is
(1) A three-dimensional modeling method in which powders are laminated on a table through running a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. A state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate with respect to the laser beam transmitted through the lens beam through the rotation axis in the direction orthogonal to the transmission direction. It employs multiple galvano scanners that are located in the lens and realize two-dimensional scanning based on the orthogonal coordinates of the laser beam by reflection from the second mirror that vibrates through the horizontal rotation axis. Moreover, by making the vibration range of each of the first mirror and each of the second mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be freely selected, and the focal length in the dynamic focus lens. A three-dimensional modeling method that irradiates the sintered surface at or near the focal length of the laser beam by adjusting
(2) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. The laser beam transmitted through the lens vibrates integrally with the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, and is orthogonal to the direction of the rotation axis in the first mirror. Adopted multiple galvano scanners that realize two-dimensional scanning based on the cylindrical coordinates of the laser beam by reflection from the second mirror that is in a state and vibrates via the horizontal rotation axis. In addition, by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be freely selected, and the dynamic focus is described. A three-dimensional modeling method in which the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length in the lens.
(3) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam is in a state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction. In addition, multiple galvano scanners that realize two-dimensional scanning based on the orthogonal coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each first By providing a vibration drive device for one mirror and a control device for adjusting the vibration range of the vibration drive device for each second mirror, the region of the sintered surface due to the irradiation of the laser beam can be freely selected, and the dynamic focus is described. A three-dimensional modeling device that irradiates the sintered surface at or near the focal position of the laser beam by adjusting the focal length in the lens.
(4) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam vibrates integrally with the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, and is in a state orthogonal to the direction of the rotation axis in the first mirror. In addition, multiple galvano scanners that realize two-dimensional scanning based on the cylindrical coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each By providing a control device that can adjust the vibration range of the vibration drive device for the first mirror and a control device that can adjust the vibration range of the vibration drive device for each second mirror, the sintered surface can be subjected to laser beam irradiation. A three-dimensional modeling device that allows the region to be freely selected and irradiates the sintered surface at or near the focal position of the laser beam by adjusting the focal length of the dynamic focus lens.
(5) The three-dimensional structure according to any one of (1) and (2), which is a basic configuration in which the first mirror of each galvano scanner vibrates via a rotation axis in a direction obliquely intersecting with the table surface. Modeling method and basic configuration The three-dimensional modeling device according to any one of (3) and (4).
(6) The three-dimensional structure according to any one of (1) and (2), wherein the first mirror in each galvano scanner vibrates via a rotation axis in the vertical direction orthogonal to the table surface. Modeling method and basic configuration The three-dimensional modeling device according to any one of (3) and (4).
Consists of.

Even in the three-dimensional modeling method according to the basic configurations (1) and (2) and the three-dimensional modeling apparatus according to the basic configurations (3) and (4), the space for three-dimensional modeling is set compactly and a plurality of laser beams are used. In terms of realizing efficient scanning, the same effects as those of the prior inventions 1 and 2 can be exhibited, and even if a failure or accident occurs in a specific galvano scanner, the operation of another galvano scanner can be performed. It is also possible to clear the failure or accident, and such an effect is also the same as in the cases of the prior inventions 1 and 2.
Considering the horizontal size of the galvano scanner and the area of the table surface, the actual number of the plurality of galvano scanners in the basic configurations (1), (2), (3), and (4) is In many cases, the number is 2 to 6.

However, in the basic configurations (1), (2), (3), and (4), the vibration range of the first mirror and the vibration range of the second mirror can be adjusted to transmit a plurality of galvano scanners. Irradiation to the sintered surface is realized for all the laser beams, and unnecessary scanning and irradiation as in Inventions 1 and 2 can be avoided.

As a result, in terms of scanning and energy consumption in the three-dimensional modeling, it is possible to realize more efficient three-dimensional modeling as compared with the prior inventions 1 and 2.

Moreover, the direction of the rotation axis in which the first mirror vibrates is the direction orthogonal to the direction in which the laser beam is transmitted, and the direction in which the second mirror vibrates is the direction of the rotation axis in the first mirror. By being in the orthogonal state and in the horizontal direction, it is possible to realize uniform scanning of the laser beam in the two-dimensional direction on the horizontal plane along the table plane.

Not only that, when the transmission direction of the laser beam is the horizontal direction, the direction of the rotation axis in the second mirror can be set parallel to the transmission direction, and the first mirror and the second mirror can be set. The interval can be set to a compact state.

Further, in each of the basic configurations, as will be described later, the sintered surfaces of the laser beams transmitted through the plurality of galvano scanners are independent of each other and have different regions, which cannot be realized in the prior inventions 1 and 2. Such an embodiment can also be adopted.

In each of the basic configurations, as will be described later, an embodiment characterized in that the regions of the sintered surface due to irradiation of laser beams transmitted through a plurality of galvano scanners are the same can be adopted. Considering that such an embodiment can be realized only by making the vibration range of the first mirror and the vibration range of the second mirror adjustable, each of the basic configurations is a plurality of galvano scanners. It can be evaluated as an invention in which each of the adjustable functions is effectively combined in the basic configuration in which the above-mentioned adjustable functions are adopted.

In particular, each of the configurations of Examples 1, 2, 3, and 4, which will be described later, exerts a unique effect on the basis of the configuration in which the regions of the above-mentioned sintered surfaces are the same, and is said to be adjustable. It can be evaluated that the function to be used is used particularly effectively.

It is a side view which shows the configuration when the 3D modeling method of the basic configuration (1) and the 3D modeling apparatus of the basic configuration (3), and the basic configuration (5) is adopted (however, two dynamic focus). (A) and (a) show the case where the laser beam transmitted through the dynamic focus lens is oblique with respect to the table surface, and (b) shows the case where the lens and two galvano scanners are adopted. The case where the laser beam is horizontal like the table surface is shown. The laser beam transmitted through the dynamic focus lens naturally includes a direction obliquely or orthogonal to the paper surface of FIGS. 1A and 1B, and the progress of the laser beam is taken into consideration in consideration of such a subsumption state. The ・ mark at the tip of the arrow indicating the direction indicates the reflection position. It is a side view which shows the configuration when the 3D modeling method of the basic configuration (2) and the 3D modeling apparatus of the basic configuration (4), and the basic configuration (5) is adopted (however, two dynamic focus). (A) and (a) show the case where the laser beam transmitted through the dynamic focus lens is oblique with respect to the table surface, and (b) shows the case where the lens and two galvano scanners are adopted. The case where the laser beam is horizontal like the table surface is shown. The laser beam transmitted through the dynamic focus lens naturally includes a direction obliquely or orthogonal to the paper surface of FIGS. 2A and 2B, and the progress of the laser beam is taken into consideration in consideration of such a subsumption state. The ・ mark at the tip of the arrow indicating the direction indicates the reflection position. It is a side view which shows the 3D modeling method of the basic configuration (1) and the 3D modeling apparatus of the basic configuration (3), and the configuration when the basic configuration (6) is adopted (however, two dynamic focus). The case where a lens and two galvano scanners are adopted is shown.). The laser beam transmitted through the dynamic focus lens naturally includes a direction obliquely or orthogonal to the paper surface of FIG. 3, and in consideration of such a subsumption state, at the tip of an arrow indicating the traveling direction of the laser beam.・ The mark indicates the reflection position. It is a side view which shows the 3D modeling method of the basic configuration (2) and the 3D modeling apparatus of the basic configuration (4), and the configuration when the basic configuration (6) is adopted (however, two dynamic focus). The case where a lens and two galvano scanners are adopted is shown.). The laser beam transmitted through the dynamic focus lens naturally includes a direction obliquely or orthogonal to the paper surface of FIG. 4, and in consideration of such a inclusion state, at the tip of an arrow indicating the traveling direction of the laser beam.・ The mark indicates the reflection position. In the basic configurations (1), (2), (3), and (4), the rotation axis in which the first mirror and the second mirror vibrate when the laser beam transmitted through the dynamic focus lens is obliquely crossed in the horizontal direction. In the schematic diagram illustrating the direction of, (a) shows a case where the direction of the rotation axis in the second mirror is the horizontal direction (the rotation axis in the first mirror is orthogonal to the transmission direction). The vertical direction is not formed.), (B) shows the case where the direction of the rotation axis in the second mirror is the transmission direction (the transmission diagonally intersecting the table surface). As long as the direction is set to be orthogonal to the paper surface, the table surface obliquely intersecting with the transmission direction is not a flat shape orthogonal to the paper surface as shown in (a), but as shown in (b). , It is attributed to the state of being obliquely intersected with the direction of the paper surface in the vertical direction with a predetermined width.) In (c), the rotation axis of the second mirror is the direction of the rotation axis of the first mirror and In the case where both of the transmission directions are orthogonal to each other ((c) is also the same as (b)), as long as the transmission direction diagonally intersecting with the table surface is set to be orthogonal to the paper surface, as long as it is set. As shown in (c), the table surface obliquely intersecting the transmission direction is represented by a state in which the table surface diagonally intersects the direction of the paper surface in the vertical direction with a predetermined width). In addition, in FIG. 5A, (b), and (c), a mark indicates a direction from the back surface to the front surface of the paper surface, and x mark indicates a direction from the front surface to the back surface of the paper surface. An embodiment is shown in which the regions of the sintered surface due to the irradiation of laser beams transmitted through a plurality of galvano scanners are the same, and (a) shows the vibration caused by the vibration in the second mirror of each galvano scanner. Shows an embodiment in which the irradiation positions of the reflected light reflected at the stage of forming the center position of the above are the same on the sintered surface, and (b) is the center position of vibration in the second mirror of each galvano scanner. An embodiment in which the irradiation positions on the irradiation surface of the reflected light reflected from the non-corresponding position are the same is shown. It is a side view which shows the embodiment that the sintered surface by the laser beam transmitted through a plurality of galvano scanners is independent from each other and is a different region, and (a) shows the case where the said region is adjacent, (a). b) indicates that the regions are separated from each other, and (c) indicates that the regions overlap at each other's boundaries.

The three-dimensional modeling methods of the basic configurations (1) and (2) go through each process of laminating powder on the table 4 through running of a squeegee and sintering by irradiating the laminated powder layer 5 with a laser beam 7. The three-dimensional modeling apparatus of the basic configurations (3) and (4) irradiates the squeegee in which the powder is laminated on the table 4 and the powder layer 5 with the laser beam 7. The basic premise is that it is equipped with a sintering device.

Based on each of the above basic assumptions, the method of the basic configuration (1) and the apparatus of the basic configuration (3) are irradiated with the laser beam 7 as shown in FIGS. 1 (a), 1 (b) and 3. The first mirror 31 and the first mirror 31 vibrate with respect to the laser beam 7 oscillated by the laser beam oscillation source 1 and transmitted through the dynamic focus lens 2 via the rotation axis 30 in the direction orthogonal to the transmission direction. In a state independent of the vibration of the laser beam 7, the laser beam 7 is reflected from the second mirror 32 which is orthogonal to the direction of the rotation axis 30 in the first mirror 31 and vibrates through the rotation axis 30 in the horizontal direction. A plurality of galvano scanners 3 that realize scanning in a two-dimensional direction based on orthogonal coordinates are adopted. Among the configurations based on such adoption, in the prior inventions 1 and 2, the second is used. The direction of the rotating shaft 30 in which the mirror 32 vibrates is not clarified at all.

As a result, the fact that the prior inventions 1 and 2 are extremely insufficient in specifying the constitution of the invention is as described below in accordance with FIGS. 5 (a), 5 (b) and 5 (c). ..

The fact that the direction of the rotation axis 30 in the first mirror 31 is orthogonal to the transmission direction of the laser beam 7 enables the laser beam 7 to scan in a plane including the transmission direction due to vibration through the rotation axis 30. Therefore, it corresponds to the requirements that are naturally required in terms of technology.

In order to realize two-dimensional scanning in the horizontal direction along the surface of the table 4 by scanning by the first mirror 31 and scanning by the second mirror 32, the direction of the rotation axis 30 in the second mirror 32 is the first. It is indispensable that the mirror 31 is orthogonal to the direction of the rotation axis 30.

In the case of realizing scanning in the two-dimensional direction via the first mirror 31 and the second mirror 32, the second mirror 32 has a rotation axis 30 orthogonal to the transmission direction of the laser beam 7 of the first mirror 31. The direction of the rotation axis 30 is the horizontal direction as shown in FIG. 5 (a), the transmission direction of the laser beam 7 as shown in FIG. 5 (b), and the first direction as shown in FIG. 5 (c). It is possible to assume three cases: not only the direction orthogonal to the direction of the rotation axis 30 in the mirror 31, but also the direction orthogonal to the transmission direction of the laser beam 7.

In the case of the direction shown in FIG. 5A, the reflected light from the first mirror along the plane including the transmission direction (the reflected light scanned along the front and back directions of the paper surface by the dots and x marks) is emitted. Due to the vibration of the second mirror 32 along the rotation axis 30 along the horizontal direction, uniform scanning can be realized along the horizontal direction along the surface of the table 4.

On the other hand, in the case of the direction shown in FIG. 5B, since the transmission direction of the laser beam 7 is oblique to the surface of the table 4, the rotation axis 30 in the second mirror 32 forms a horizontal direction. I'm not doing it.

Therefore, the distance from the horizontal plane along the surface of the table 4 differs depending on the position where the laser beam 7 reflects from the second mirror 32, and uniform scanning along the horizontal plane cannot be realized.

Specifically, as shown in FIG. 5B, the scanning line of the laser beam 7 reflected from the second mirror 32 at the position of the end portion in the back side direction of the paper surface indicated by the cross, and the paper surface indicated by the mark. Since the scanning lines of the second mirror 32 and the laser beam 7 reflected at the front end of the laser beam 7 are different in distance from the horizontal plane, the lengths of the scanning lines must also be different.

As a result, in the reflection in the second mirror 32 shown in FIG. 5B, uniform and accurate scanning in the two-dimensional direction cannot be realized in the horizontal plane along the surface of the table 4.

Similarly, also in the case shown in FIG. 5 (c), since the direction of the rotation axis 30 in the second mirror 32 does not form the horizontal direction as shown in FIG. 5 (a), it is reflected by the first mirror 31. The distance to the horizontal plane differs depending on the position where the laser beam 7 is reflected by the second mirror 32, and as shown in FIG. 5C, the second mirror is located at the positions of the front and back ends of the paper surface. The length of the scanning line in the reflected laser beam 7 is different from that of 32, and it is not possible to realize uniform and accurate scanning in the two-dimensional direction in the horizontal plane along the surface of the table 4.

However, in the prior inventions 1 and 2, the rotation axis in the second mirror 32 includes the case where the laser beam 7 transmitted through the dynamic focus lens 2 is oblique to the horizontal direction. Since the direction of 30 is not explained at all, the direction of the rotation axis 30 of the second mirror 32 is unspecified, and it is completely unknown which of FIGS. 5A, 5B, and 5C is adopted. Is.

In such a case, in FIG. 3 of the prior inventions 1 and 2, the laser beam 7 reflected from the first mirror 31 is scanned in the left-right direction of the paper surface, but such scanning in the left-right direction is performed. Considering that the direction of the rotation axis 30 in the second mirror 32 can be realized in any of the cases of FIGS. 5 (a), 5 (b), and (c), FIGS. 5 (a) and 5 (b). ) And (c) are included in the case of any of the configurations.

Therefore, the basic configurations (1) and (3) realize uniform and accurate two-dimensional scanning in the horizontal direction by specifying the direction of the rotation axis 30 in the second mirror 32 in the horizontal direction. , Compared to the prior inventions 1 and 2, the technical content is clearly superior.

Based on each of the basic assumptions, the method of the basic configuration (2) and the apparatus of the basic configuration (4) are the laser beam oscillation sources in the irradiation of the laser beam 7, as shown in FIGS. 2 and 4. The laser beam 7 oscillated by 1 and transmitted through the dynamic focus lens 2 vibrates integrally with the first mirror 31 and the first mirror 31 that vibrate via the rotation axis 30 orthogonal to the transmission direction. In addition, scanning in the two-dimensional direction based on the cylindrical coordinates of the laser beam 7 is performed by reflection from the second mirror 32 that vibrates via the rotation axis 30 in the direction orthogonal to the rotation axis 30 of the first mirror 31. A plurality of realized galvano scanners 3 are adopted, and such adoption is different from the prior inventions 1 and 2 based on the scanning in the two-dimensional direction of the laser beam 7 with reference to the Cartesian coordinates. doing.

The directions of the rotation shafts 30 in the first mirror 31 and the second mirror 32 of the basic configurations (2) and (4) are the same as those of the basic configurations (1) and (3), and as a result, FIG. As shown in a), uniform two-dimensional scanning can be realized on the horizontal plane along the plane of the table 4.

As shown in FIGS. 2 (a), 2 (b) and 4, the state in which the vibration of the first mirror 31 is performed via the rotation axis 30 in the direction orthogonal to the direction through which the dynamic focus lens 2 is transmitted is Similar to the basic configurations (1) and (3), it is realized by the vibration driving device 310 that drives the rotation by the rotating shaft 30, and is orthogonal to the rotating shaft 30 of the first mirror 31 of the second mirror 32. The state of being performed via the rotation shaft 30 in the direction of rotation is realized by the vibration drive device 320 that drives the rotation by the rotation shaft 30.

Of the two-dimensional scanning of the laser beam 7 with reference to the cylindrical coordinates, the vibration of the first mirror 31 realizes the scanning along the angular direction (θ direction), and the vibration of the second mirror 32 realizes the scanning in the radial direction. Scanning along (r direction) is realized.

The second mirror 32 in the basic configurations (2) and (4) vibrates integrally with the first mirror 31, and such vibration is not in an independent state, and in this respect, the basic configurations (1) and ( It is different from 3).

To explain the rationale for requiring the integrated state, between the Cartesian coordinates (x, y) and the cylindrical coordinates (r, θ),
x = rcosθ,
y = rsinθ
Is established, and even if r is an independent parameter, it is derived that an independent state corresponding to the independent parameters x and y can be realized by cooperation with the independent parameter θ, that is, integration.

Such vibration of the second mirror 32 is usually caused by the vibration driving device 320 connected to the vibration driving device 310 and the first mirror as shown in FIGS. 2 (a), 2 (b) and 4. This can be achieved by being supported by an arm 34 extending from a vibration strut 33 that realizes vibration by rotation that supports 31.

The configuration relating to the application of voltage or the conduction of current to the vibration drive device 320, which is necessary for operating the vibration drive device 320 in a state where the vibration drive device 320 is supported by the arm 34, is a matter of design by those skilled in the art. Belongs.
However, for example, as shown by the thin dotted lines in FIGS. 2 (a), 2 (b) and 4, the power supply 35 is formed in the conductive regions on both sides of the vibration support column 33 in the longitudinal direction divided by the insulating portion of the vibration support column 33. Two rotating rings 36 arranged on the side, two conductive rotating rings 37 (a total of four rotating rings 36, 37) arranged on the vibration driving device 320 side, and the respective rotating rings 36, 37. It can be realized via a conductive support column 38 that is supported in a rotatable state and fixed in a predetermined position (in FIGS. 2 and 4, each support column 38 is in an independent state. The case where it is fixed to the vibration drive device 310 is shown.).

The method of the basic configuration (1) and the device of the basic configuration (3) are suitable for rectangular three-dimensional modeling, and the method of the basic configuration (2) and the device of the basic configuration (4) are circular or elliptical. It is suitable for three-dimensional modeling with a curved outer peripheral surface such as shape.

Each method of the basic configuration (1) and (2) and each device of the basic configuration (3) and (4) can be adapted to three-dimensional modeling of a polygonal shape.

In the basic configuration (5), as shown in FIGS. 1 (a) and 1 (b) and FIGS. 2 (a) and 2 (b), the direction in which the first mirror 31 in each galvano scanner 3 obliquely intersects the surface of the table 4. It is characterized in that it vibrates via the rotating shaft 30 of the above.

That is, in the basic configuration (5), a compact design is realized in the vertical direction by setting the rotation axis 30 of the first mirror 31 in a direction obliquely intersecting with the surface of the table 4.

As shown in FIGS. 1A and 2A, in the basic configuration (5), the direction of the laser beam 7 transmitted through the dynamic focus lens 2 is also set to be oblique with respect to the surface of the table 4. By doing so, it is possible to further promote a compact design in the vertical direction.

However, the direction of the laser beam 7 is by no means required to be oblique to the surface of the table 4.

That is, in the basic configuration (5), as shown in FIGS. 1 (b) and 2 (b), the laser beam 7 transmitted through the dynamic focus lens 2 is in the horizontal direction, and the rotation axis of the first mirror 31 is An embodiment characterized in that 30 is orthogonal to the horizontal direction can be adopted.

In the case of the above embodiment, the rotation axis 30 of each first mirror 31 is obliquely intersected with the surface of the table 4 to enable a compact design in the vertical direction, while oscillating from the laser beam oscillation source 1 and It is possible to realize a simple design in which the direction of the laser beam 7 passing through the dynamic focus lens 2 is the horizontal direction.

Moreover, in the embodiment, the direction of the rotation axis 30 of the second mirror 32, which is orthogonal to the direction of the rotation axis 30 of the first mirror 31 and is horizontal, is parallel to the transmission direction of the laser beam 7. As a result, it is possible to make the space between the first mirror 31 and the second mirror 32 compact.

As shown in FIGS. 3 and 4, the basic configuration (6) is characterized in that the first mirror 31 in each galvano scanner 3 vibrates via a rotation axis 30 in the vertical direction orthogonal to the surface of the table 4.

That is, as in the case of the conventional galvano scanner 3, the vibration of the first mirror 31 is based on the horizontal direction, and the vibration of the second mirror 32 is based on the vertical direction to realize stable operation. Can be done.

Moreover, in the basic configuration (6), since the direction of the rotation axis 30 of the first mirror 31 is vertical, the direction of the rotation axis 30 of the second mirror 32 is the direction of the rotation axis 30 of the first mirror 31. It is possible to select the horizontal direction over 360 ° orthogonal to each other, and of course, it is also possible to select the horizontal direction parallel to the direction of the laser beam 7 transmitted through the dynamic focus lens 2.

In the basic configurations (1), (2), (3), and (4), typical examples of the vibration direction of the first mirror 31 and the vibration direction of the second mirror 32 are the configurations of the basic configurations (5) and (6). However, considering that, for example, there may be a configuration in which the vibration of the first mirror 31 is along the vertical plane and the vibration direction of the second mirror 32 is along the horizontal plane, the basic configuration (1), (2), (3), and (4) are by no means limited to the basic configurations (5) and (6).

In each of the basic configurations, the vibration range of the first mirror 31 and the vibration range of the second mirror 32 are adjustable so that the sintered surface 6 is irradiated with the laser beams 7 transmitted through the plurality of galvano scanners 3. An embodiment in which the regions are the same can be adopted, and in the embodiment, as shown in FIG. 6A, when the vibration in the second mirror 32 of each galvano scanner 3 is performed, the amplitude due to the vibration is increased. An embodiment in which the irradiation positions of the reflected light reflected at the stage of forming the central position on the sintered surface 6 are the same, and as shown in FIG. 6B, vibration in the second mirror 32 of each galvano scanner 3. At this time, any of the embodiments in which the irradiation positions of the reflected light reflected from the position not corresponding to the central position of the vibration due to the vibration on the sintered surface 6 are the same can be adopted.

As shown in FIGS. 6 (a) and 6 (b), when the regions of the sintered surface 6 due to the irradiation of the laser beam 7 from each galvano scanner 3 are the same, the layers are quickly fired by the superimposed sintering. The connecting surface 6 is formed, which can further promote efficient three-dimensional modeling.

In the case of the embodiment shown in FIG. 6A, the sintered surface of the second mirror 32 with reference to the center position P in the horizontal direction of the table 4 by adjusting the amplitudes on both sides of the center position of vibration. The area of 6 can be freely selected.

On the other hand, in the case of the embodiment shown in FIG. 6B, the region of the sintered surface 6 can be selected at any time at an arbitrary position away from the horizontal center position P of the table 4.

In each of the basic configurations, the vibration range of the first mirror 31 and the vibration range of the second mirror 32 are adjustable so that the sintered surfaces 6 by the laser beams 7 transmitted through the plurality of galvano scanners 3 are mutually adjusted. An embodiment, which is an independent and different region, can be adopted, and in the embodiment, as shown in FIG. 7A, the regions are adjacent to each other. An embodiment characterized in that the regions are separated from each other as shown in 7 (b), and characterized in that the regions overlap at a boundary as shown in FIG. 7 (c). It is possible to adopt the embodiment of the above.

The shapes of the sintered surfaces 6 that are independent of each other and form different regions are various, but various shapes are sintered by irradiation of laser beams 7 from a plurality of galvano scanners 3. The reason why it can be applied to the surface 6 is that the region of the sintered surface 6 can be freely selected in each of the basic configurations.

In the case of each of the embodiments shown in FIGS. 7A, 7B, and 7C, the sintered surfaces 6 which are independent of each other and are different regions are simultaneously irradiated from a plurality of galvano scanners 3. Efficient three-dimensional modeling can be realized in that it is realized at once.

Hereinafter, examples will be described.

In the first embodiment, as shown in FIGS. 1 (a), 1 (b), 2 (a), (b), 3 and 4, when the second mirror 32 of each galvano scanner 3 is vibrated, the vibration is caused. It is characterized in that the reflected light reflected at the stage of forming the center position of the amplitude due to the above forms an oblique direction with respect to the surface of the table 4.

Due to the above characteristics, in the first embodiment, the position of each galvano scanner 3 in the vertical direction (height direction) is lower than that in the case where the laser beam 7 is orthogonal to the surface of the table 4, and then the first mirror 31 By making each vibration range of the second mirror 32 adjustable, the required region of the sintered surface 6 on the surface of the table 4 can be freely selected.

However, the adoption of such an embodiment does not necessarily mean excluding the embodiment in which the laser beam 7 is orthogonal to the plane of the table 4.

In the second embodiment, as shown in FIGS. 1 (a) and 1 (b) and FIGS. 2 (a) and 2 (b), each second mirror 32 is set to the first one with reference to the center position P of the surface of the table 4. It is characterized in that it is arranged inside the mirror 31.

Due to the above characteristics, in the second embodiment, the distance between the second mirrors 32 is made compact, and as a result, the laser beam 7 reflected from the second mirrors 32 exceeds the center position P to form the sintered surface 6. Regarding the contour at the boundary of the sintered surface 6 in the case of forming, as compared with the case where the arrangement is opposite to the above arrangement, that is, each second mirror 32 is arranged outside each first mirror 31 and outside the center position P. As the sintered surface 6 becomes farther from the center position, the illuminance decreases, and in the case of irradiation in the vertical direction with respect to the surface of the table 4, a substantially circular sintered surface 6 is formed. Instead, a clearer state can be obtained by reducing the degree of adverse effect that the shape of the sintered surface 6 becomes inaccurate due to the formation of the sintered surface 6 having a substantially elliptical shape.

In the second embodiment, as shown in FIGS. 3 and 4, one of the first mirrors 31 is arranged outside the one of the second mirrors 32 with reference to the center position P of the surface of the table 4, and each of them is arranged. A configuration characterized in that the other side of the first mirror 31 is arranged inside the other side of each second mirror 32 can also be adopted.

Even in the above configuration, the harmful effects of arranging each of the first mirrors 31 inside each of the second mirrors 32 can be avoided.

However, as shown in FIGS. 1 (a) and 1 (b) and 2 (a) and 2 (b), the above-mentioned adverse effects are compared with the embodiment in which each first mirror 31 is arranged outside each second mirror 32. There is no choice but to halve the degree of avoidance.

The invention of the present application is epoch-making in that it realizes efficient three-dimensional modeling, and its range of use is wide.

1 Laser beam oscillation source 2 Dynamic focus lens 3 Galvano scanner 30 Rotating axis 31 First mirror 32 Second mirror 310 Vibration drive device for the first mirror 320 Vibration drive device for the second mirror 33 Rotatable vibration support column 34 Arm 35 Power supply 36 Rotating ring on the power supply side 37 Rotating ring on the vibration drive device side with respect to the second mirror 38 Conductive support column supporting the rotating ring 4 Table 5 Powder layer 6 Sintered surface 7 Laser beam P Center position of the table surface Q, Q ´ A reference position of line symmetry that is arranged in the opposite direction to the P at a predetermined equivalent distance.

In particular, in the first embodiment described later , the required region of the sintered surface can be freely selected, and in the second embodiment described later, the distance between the second mirrors is made compact so that the sintered surface can be selected. The contour at the boundary can be made clear.

The present invention is intended for a three-dimensional modeling method and a three-dimensional modeling apparatus that employ a plurality of galvano scanners that scan a laser beam that passes through a dynamic focus lens and sequentially focuses in a two-dimensional direction.

In three-dimensional modeling in which a sintered surface is formed by irradiating a powder layer laminated on a table with a laser beam, a laser beam transmitted through a dynamic focus lens whose focal length can be adjusted is transmitted by a galvano scanner to the sintered surface of the laser beam. Is being scanned.

When a plurality of galvano scanners that realize the scanning are adopted instead of one, and a laser beam transmitted through the plurality of galvano scanners is irradiated obliquely to the table surface to irradiate the table surface in the orthogonal direction. In comparison, a three-dimensional modeling method that realizes efficient scanning with a plurality of laser beams while setting the space required for three-dimensional modeling compactly is the invention described in Patent Document 1 (hereinafter, "Prior Invention 1"). , And similarly, a plurality of galvano scanners 3 and 3a are adopted, and the laser beams 7 and 7a transmitted through the plurality of galvano scanners 3 and 3a are obliquely inclined with respect to the table surface. The configuration of the three-dimensional modeling apparatus that exerts the above effect by irradiating in the direction is also disclosed as the invention described in Patent Document 2 (hereinafter referred to as "prior application invention 2").

However, in the prior inventions 1 and 2, the laser beams 7 and 7a are scanned on the entire flat surface located above the entire region surface of the table 13 (FIG. 1 of Patent Document 1). , ABSTRACT, column 3, line 22, column 4, line 40, disclosure that the entire flat surface in claim 1 is subject to scanning, and FIG. 1, ABSTRACT, column 3, line 9, fourth of Patent Document 2. The disclosure item in column 26 that all flat surfaces are subject to common scanning, and the disclosure item in claim 1 that the laser beam moves across the flat surface).

The flat surface corresponds to the focal surface 5 formed as a control for the focal adjustment units 9 and 9a (FIG. 4 of Patent Document 1 and FIG. 4 of Patent Document 2), but the laser is used in the entire region of the focal surface 5. Sintering is not performed by irradiation of the beams 7 and 7a, but by controlling the focus adjustment units 9 and 9a, only the region of the focal plane 5 that needs to be sintered is irradiated at the focal point of the laser beams 7 and 7a. In the region where sintering is not required, it is essential to control the laser beams 7 and 7a so that the focal points do not reach the focal plane 5.

This is because, if such control is not performed, the entire flat surface, that is, the entire region of the focal plane 5 is always subject to sintering, and a region for forming the sintered surface is required according to each focal plane 5. This is because it becomes impossible to select according to the above.

However, irradiating a region that does not form a sintered surface with scanning of a laser beam means that inefficient three-dimensional modeling is performed in terms of unnecessary scanning and irradiation.

In the galvano scanners 3 and 3a of the prior inventions 1 and 2, naturally, the first mirror reflecting the laser beams 7 and 7a transmitted through the focus adjustment units 9 and 9a and the laser beam 7 reflected from the first mirror, It is provided with a second mirror that further reflects 7a.
However, in the prior inventions 1 and 2, there is no description about the first mirror and the second mirror, and as a result, how the first mirror and the second mirror are based on the center position on the upper surface of the table 13. It is completely unspecified whether or not they are arranged, and any of them can be selected.

Therefore, it is naturally possible to select a design in which each second mirror is arranged outside each first mirror with reference to the center position of the surface of the table 13.

Incidentally, FIG. 3 showing the prior inventions 1 and 2 suggests that each second mirror is arranged inside each first mirror with reference to the center position, but FIG. 3 Is merely an illustration of the embodiment (explanatory part regarding Fig. 3), and the disclosure of FIG. 3 is by no means a basis for denying that the above selection is possible.

However, in the case of such a design, the distance between the second mirrors is compared with the design in which the second mirror is arranged inside the first mirror with respect to the center position. Inevitably, when the laser beam exceeds the center position to form a sintered surface, the illuminance decreases as the distance from the center position increases, while on the table surface. On the other hand, in the case of irradiation in the vertical direction, the shape of the sintered surface becomes inaccurate due to the formation of a substantially elliptical sintered surface instead of the formation of a substantially circular sintered surface. Due to this, the defect that the contour at the boundary of the sintered surface becomes unclear cannot be avoided.

Moreover, in the cases of the prior inventions 1 and 2, the direction of the rotation axis in which the second mirror vibrates is unspecified, and the technical drawbacks due to such unspecified will be described later.

US10,029,333B2 Gazette US9,314,972B2 Gazette

The present invention provides a three-dimensional modeling configuration that enables efficient and uniform two-dimensional scanning and irradiation of a laser beam while providing a plurality of galvano scanners for a laser beam transmitted through a dynamic focus lens. Is the subject.

In order to achieve the above object, the basic configuration of the present invention is
(1) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. A state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate with respect to the laser beam transmitted through the laser beam through the rotation axis in the direction orthogonal to the transmission direction. It employs multiple galvano scanners that realize scanning in the two-dimensional direction based on the orthogonal coordinates of the laser beam by reflection from the second mirror that is located in the laser beam and vibrates via the horizontal rotation axis. Moreover, by making the vibration range of each of the first mirror and each of the second mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be freely selected, and the focal distance in the dynamic focus lens. By adjusting the above, the sintered surface is irradiated at or near the focal position of the laser beam, and the first mirror in each galvano scanner vibrates along the rotation axis in the direction obliquely intersecting with the table surface. A three-dimensional modeling method in which the laser beam transmitted through the dynamic focus lens is in the horizontal direction and the rotation axis of the first mirror is orthogonal to the direction of the laser beam.
(2) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. The laser beam transmitted through the lens vibrates integrally with the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, and is orthogonal to the direction of the rotation axis in the first mirror. Adopted multiple galvano scanners that realize scanning in the two-dimensional direction based on the cylindrical coordinates of the laser beam by reflection from the second mirror that is in a state and vibrates via the horizontal rotation axis. In addition, by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be freely selected, and the dynamic focus is described. By adjusting the focal length in the lens, the sintered surface is irradiated at or near the focal position of the laser beam, and the first mirror in each galvano scanner vibrates along the rotation axis in the direction obliquely intersecting with the table surface. A three-dimensional modeling method in which the laser beam transmitted through the dynamic focus lens is in the horizontal direction and the rotation axis of the first mirror is orthogonal to the direction of the laser beam.
(3) A three-dimensional modeling apparatus equipped with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam is in a state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction. In addition, a plurality of galvano scanners that realize scanning in the two-dimensional direction based on the orthogonal coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each first By providing a vibration drive device for one mirror and a control device for adjusting the vibration range of the vibration drive device for each second mirror, the region of the sintered surface due to the irradiation of the laser beam can be freely selected, and the dynamic focus By adjusting the focal distance in the lens, the sintered surface is irradiated at or near the focal position of the laser beam, and the first mirror in each galvano scanner vibrates along the rotation axis in the direction obliquely intersecting with the table surface. A three-dimensional modeling device in which the laser beam transmitted through the dynamic focus lens is in the horizontal direction and the rotation axis of the first mirror is orthogonal to the direction of the laser beam.
(4) A three-dimensional modeling apparatus equipped with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam vibrates integrally with the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, and is in a state orthogonal to the direction of the rotation axis in the first mirror. In addition, multiple galvano scanners that realize scanning in the two-dimensional direction based on the cylindrical coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each By providing a control device that can adjust the vibration range of the vibration drive device for the first mirror and a control device that can adjust the vibration range of the vibration drive device for each second mirror, the sintered surface can be subjected to laser beam irradiation. The region is freely selectable, and the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal distance in the dynamic focus lens, and the first mirror in each galvano scanner obliquely intersects the table surface. A three-dimensional modeling device that vibrates via a rotation axis in the direction of movement, and the laser beam that has passed through the dynamic focus lens is in the horizontal direction, and the rotation axis of the first mirror is orthogonal to the direction of the laser beam. ,
(5) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiation with a laser beam. In the irradiation, a dynamic focus lens is used. A state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate with respect to the laser beam transmitted through the lens via the rotation axis in the direction orthogonal to the transmission direction. It employs multiple galvano scanners that realize scanning in the two-dimensional direction based on the orthogonal coordinates of the laser beam by reflection from the second mirror that is located in the lens and vibrates through the horizontal rotation axis. Moreover, by making the vibration range of each of the first mirror and each of the second mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be freely selected, and the focal length in the dynamic focus lens. By adjusting the above, the sintered surface is irradiated at or near the focal length of the laser beam , and each first mirror is placed outside each second mirror with reference to the center position of the table surface. A three-dimensional modeling method in which one of the first mirrors is arranged outside one of the second mirrors and the other of the first mirrors is arranged inside the other of the second mirrors.
(6) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiation with a laser beam. In the irradiation, a dynamic focus lens is used. The laser beam transmitted through the lens vibrates integrally with the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, and is orthogonal to the direction of the rotation axis in the first mirror. Adopted multiple galvano scanners that realize scanning in the two-dimensional direction based on the cylindrical coordinates of the laser beam by reflection from the second mirror that is in a state and vibrates via the horizontal rotation axis. In addition, by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be freely selected, and the dynamic focus is described. By adjusting the focal length in the lens, the sintered surface is irradiated at or near the focal position of the laser beam , and each first mirror is placed outside each second mirror with reference to the center position of the table surface. Or, one of the first mirrors is arranged outside the one of the second mirrors, and the other of the first mirrors is arranged inside the other of the second mirrors. ,
(7) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam is in a state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction. In addition, multiple galvano scanners that realize scanning in the two-dimensional direction based on the orthogonal coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each first By providing a vibration drive device for one mirror and a control device for adjusting the vibration range of the vibration drive device for each second mirror, the region of the sintered surface due to the irradiation of the laser beam can be freely selected, and the dynamic focus is described. By adjusting the focal length in the lens, the sintered surface is irradiated at or near the focal position of the laser beam , and each first mirror is placed outside each second mirror with reference to the center position of the table surface. Or, a three-dimensional modeling device in which one of the first mirrors is arranged outside the one of the second mirrors and the other of the first mirrors is arranged inside the other of the second mirrors. ,
(8) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam vibrates integrally with the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, and is in a state orthogonal to the direction of the rotation axis in the first mirror. In addition, multiple galvano scanners that realize scanning in the two-dimensional direction based on the cylindrical coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each By providing a control device that can adjust the vibration range of the vibration drive device for the first mirror and a control device that can adjust the vibration range of the vibration drive device for each second mirror, the sintered surface can be subjected to laser beam irradiation. The region is freely selectable, and the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length in the dynamic focus lens , and each first mirror is based on the center position of the table surface. Is placed outside each second mirror, or one of each first mirror is placed outside of one of each second mirror, and the other of each first mirror is placed outside of the other of each second mirror. Three-dimensional modeling device placed inside,
(9) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. A state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate with respect to the laser beam transmitted through the lens via the rotation axis in the direction orthogonal to the transmission direction. It employs multiple galvano scanners that are located in the lens and realize two-dimensional scanning based on the orthogonal coordinates of the laser beam by reflection from the second mirror that vibrates through the horizontal rotation axis. Moreover, by making the vibration ranges of each of the first mirror and each of the second mirror adjustable, the regions freely selected as the sintered surface by the irradiation of the laser beam transmitted through each galvano scanner are the same , and the above-mentioned A three-dimensional modeling method in which the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length in the dynamic focus lens.
(10) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiation with a laser beam. In the irradiation, a dynamic focus lens is used. The laser beam transmitted through the lens vibrates integrally with the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, and is orthogonal to the direction of the rotation axis in the first mirror. Adopted multiple galvano scanners that realize two-dimensional scanning based on the cylindrical coordinates of the laser beam by reflection from the second mirror that is in a state and vibrates via the horizontal rotation axis. In addition, by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, the regions freely selected as the sintered surface by the irradiation of the laser beam transmitted through each galvano scanner match. cage, yet by adjusting the focal length in the dynamic focus lens, 3D modeling method in focal position or near the laser beam is irradiated sintered surface,
(11) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam is in a state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction. In addition, multiple galvano scanners that realize two-dimensional scanning based on the orthogonal coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each first By providing a vibration drive device for one mirror and a control device for adjusting the vibration range of the vibration drive device for each second mirror, the regions freely selected as the sintered surface by the irradiation of the laser beam are matched. cage, yet the the adjustment of the focal length in the dynamic focusing lens, the laser beam focal position or by irradiating the sintered surface has a three-dimensional modeling apparatus in the vicinity of,
(12) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam vibrates integrally with the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, and is in a state orthogonal to the direction of the rotation axis in the first mirror. In addition, multiple galvano scanners that realize two-dimensional scanning based on the cylindrical coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each by providing a control unit for freely adjusting the oscillation range of the oscillating drive for the control device and the second mirror to freely adjust the oscillation range of the oscillating drive to the first mirror, as a sintering surface by laser beam irradiation A three-dimensional modeling apparatus in which freely selected regions match and the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length in the dynamic focus lens.
(13) Any of the above (5), (6), (9), and (10), wherein the first mirror in each galvano scanner vibrates via a rotation axis in the vertical direction orthogonal to the table surface. The three-dimensional modeling method described in item 1,
(14) Any of the above (7), (8), (11), and (12), wherein the first mirror in each galvano scanner vibrates via a rotation axis in the vertical direction orthogonal to the table surface. The three-dimensional modeling device described in item 1,
Consists of.
Further, in the basic configurations (1), (2), (3) and (4),
(15) The technical premise is the configuration of a reference example in which the first mirror in each galvano scanner vibrates via a rotation axis in a direction obliquely intersecting with the table surface.

Three-dimensional modeling method and basic configuration (3), (4) , (7), (8), ( 10) by basic configuration (1), (2) , (5), (6), (9), (10) Even in the three-dimensional modeling apparatus according to 11) and (12) , prior inventions 1 and 2 are realized in that efficient scanning is realized by a plurality of laser beams while setting the space for three-dimensional modeling compactly. Even if a failure or accident occurs in a specific galvano scanner, it is possible to clear the failure or accident by operating another galvano scanner. The effect is also the same as in the cases of the prior inventions 1 and 2.
Considering the horizontal size of the galvano scanner and the area of the table surface, the basic configurations (1), (2), (3), (4) , (5), (6), (7), The actual number of the plurality of galvano scanners in (8), (9), (10), (11), and (12) is often 2 to 6.

However, the basic configurations (1), (2), (3), (4) , (5), (6), (7), (8), (9), (10), (11), (12) In) , by making the vibration range of the first mirror and the vibration range of the second mirror adjustable, it is possible to irradiate the sintered surface with all the laser beams transmitted through the plurality of galvano scanners. Therefore, unnecessary scanning and irradiation as in the prior inventions 1 and 2 can be avoided.

As a result, in terms of scanning and energy consumption in the three-dimensional modeling, it is possible to realize more efficient three-dimensional modeling as compared with the prior inventions 1 and 2.

Moreover, the direction of the rotation axis in which the first mirror vibrates is the direction orthogonal to the direction in which the laser beam is transmitted, and the direction in which the second mirror vibrates is the direction of the rotation axis in the first mirror. By being in the orthogonal state and in the horizontal direction, it is possible to realize uniform scanning of the laser beam in the two-dimensional direction on the horizontal plane along the table plane.

Not only that, when the transmission direction of the laser beam is the horizontal direction, the direction of the rotation axis in the second mirror can be set parallel to the transmission direction, and the first mirror and the second mirror can be set. The interval can be set to a compact state.

Furthermore, in the basic configurations (1), (2), (3), (4), (5), (6), (7), and (8) , a laser beam transmitted through a plurality of galvano scanners is used. It is also possible to adopt an embodiment in which the sintered surfaces are independent of each other and have different regions, which cannot be realized in the prior inventions 1 and 2.

In the basic configurations (9), (10), (11), and (12) , the regions of the sintered surface due to the irradiation of the laser beams transmitted through the plurality of galvano scanners are the same, but the vibration of the first mirror Considering that it can be realized for the first time by making the range and the vibration range of the second mirror adjustable, each of the basic configurations is the above-mentioned adjustable function in the basic configuration that employs a plurality of galvano scanners. Can be evaluated as an invention that effectively binds.

In particular, in the basic configurations (5), (6), (7), and (8) , the required sintered surface region can be freely selected, and further, in the embodiment described later, the second The distance between the mirrors can be made compact, and the contour at the boundary of the sintered surface can be made clear.

It is a side view which shows the structure of the 3D modeling method of the basic structure (1) and the structure of the reference example (15) which is a technical premise of the 3D modeling device of the basic structure (3) (however, two dynamic focus lenses and The case where two galvano scanners are adopted is shown.), (A) shows the case where the laser beam transmitted through the dynamic focus lens is oblique to the table surface, and (b) shows the case where the basic configuration (b) is adopted. As shown in 1) and (3), the case where the laser beam is in the horizontal direction like the table surface is shown. The laser beam transmitted through the dynamic focus lens naturally includes a direction obliquely or orthogonal to the paper surface of FIGS. 1A and 1B, and the progress of the laser beam is taken into consideration in consideration of such a subsumption state. The ・ mark at the tip of the arrow indicating the direction indicates the reflection position. It is a side view which shows the structure of the 3D modeling method of the basic structure (2) and the structure of the reference example (15) which is a technical premise of the 3D modeling device of the basic structure (4) (however, two dynamic focus lenses and The case where two galvano scanners are adopted is shown.), (A) shows the case where the laser beam transmitted through the dynamic focus lens is oblique to the table surface, and (b) shows the case where the basic configuration (b) is adopted. As shown in 2) and (4), the case where the laser beam is in the horizontal direction like the table surface is shown. The laser beam transmitted through the dynamic focus lens naturally includes a direction obliquely or orthogonal to the paper surface of FIGS. 2A and 2B, and the progress of the laser beam is taken into consideration in consideration of such a subsumption state. The ・ mark at the tip of the arrow indicating the direction indicates the reflection position. The three-dimensional modeling method of the basic configurations (5) and (9) and the configurations of the three-dimensional modeling apparatus of the basic configurations (7) and (11) when the basic configurations (13) and (14) are adopted are shown. It is a side view (however, it shows the case where two dynamic focus lenses and two galvano scanners are adopted). The laser beam transmitted through the dynamic focus lens naturally includes a direction obliquely or orthogonal to the paper surface of FIG. 3, and in consideration of such a subsumption state, at the tip of an arrow indicating the traveling direction of the laser beam.・ The mark indicates the reflection position. The three-dimensional modeling method of the basic configurations (6) and (10) and the configurations of the three-dimensional modeling apparatus of the basic configurations (8) and (12) when the basic configurations (13) and (14) are adopted are shown. It is a side view (however, it shows the case where two dynamic focus lenses and two galvano scanners are adopted). The laser beam transmitted through the dynamic focus lens naturally includes a direction obliquely or orthogonal to the paper surface of FIG. 4, and in consideration of such a inclusion state, at the tip of an arrow indicating the traveling direction of the laser beam.・ The mark indicates the reflection position. In the basic configurations (1), (2), (3), (4) , (5), (6), (7), (8), (9), (10), (11), (12) A schematic diagram illustrating the direction of the rotation axis in which the first mirror and the second mirror vibrate when the laser beam transmitted through the dynamic focus lens is obliquely intersected with the horizontal direction is shown in FIG. 2A. It shows the case where the direction of the rotation axis in the mirror is the horizontal direction (the rotation axis in the first mirror is orthogonal to the transmission direction and does not form a vertical direction), (b). Indicates a case where the direction of the rotation axis in the second mirror is the transmission direction (as long as the transmission direction obliquely intersecting with the table surface is set to be orthogonal to the paper surface, the transmission direction and The diagonally intersecting table surface is not a flat shape orthogonal to the paper surface as shown in (a), but is in a state of being obliquely intersected with the direction of the paper surface in the vertical direction with a predetermined width as shown in (b). (C) also indicates a case where the rotation axis in the second mirror is orthogonal to both the direction of the rotation axis of the first mirror and the transmission direction ((c)). Further, as in (b), as long as the transmission direction obliquely intersecting with the table surface is set to be orthogonal to the paper surface, the table surface obliquely intersecting with the transmission direction is shown in (c). As described above, it is attributed to the state of being obliquely intersected with the direction of the paper surface in the vertical direction with a predetermined width.) In addition, in FIG. 5A, (b), and (c), a mark indicates a direction from the back surface to the front surface of the paper surface, and x mark indicates a direction from the front surface to the back surface of the paper surface. The basic configurations (9), (10), (11), and (12) are shown, and (a) is at the stage of forming the center position of the vibration due to the vibration in the second mirror of each galvano scanner. It shows an embodiment in which the irradiation positions of the reflected reflected light on the sintered surface are the same, and (b) is reflected from a position that does not correspond to the center position of vibration in the second mirror of each galvano scanner. An embodiment in which the irradiation positions on the irradiation surface of the reflected light are the same is shown. In the basic configurations (1), (2), (3), (4), (5), (6), (7), and (8), the sintered surface by the laser beam transmitted through the plurality of galvano scanners is It is a side view which shows the embodiment which is independent from each other and is a different region, (a) shows the case where the said region is adjacent, (b) shows that the said region is separated from each other. , (C) show the case where the regions overlap at each other's boundaries.

The three-dimensional modeling methods of the basic configurations (1) , (2), (5), (6), (9), and (10) are the lamination of powder on the table 4 through the running of the squeegee, and the laminated powder. It is a basic premise that the layer 5 undergoes each process of sintering by irradiating the laser beam 7, and has the basic configurations (3) , (4), (7), (8), (11), and (12) . It is a basic premise that the three-dimensional modeling apparatus includes a squeegee for laminating powder on the table 4 via traveling, and a sintering apparatus for irradiating the powder layer 5 with a laser beam 7.

Based on each of the above basic assumptions, the methods of the basic configurations (1) , (5) and (9) and the devices of the basic configurations (3) , (7) and (11) are shown in FIG. 1 (a) or As shown in either FIG. 1B or FIG. 3, in the irradiation of the laser beam 7, the transmission direction is the same as that of the laser beam 7 oscillated by the laser beam oscillation source 1 and transmitted through the dynamic focus lens 2. In a state independent of the vibrations of the first mirror 31 and the first mirror 31 vibrating via the rotating shaft 30 in the orthogonal direction, the direction perpendicular to the direction of the rotating shaft 30 in the first mirror 31 and in the horizontal direction. A plurality of galvano scanners 3 that realize scanning in a two-dimensional direction based on the Cartesian coordinates of the laser beam 7 by reflection from the second mirror 32 vibrating via the rotation axis 30 are adopted. Among the configurations based on such adoption, in the prior inventions 1 and 2, the direction of the rotating shaft 30 in which the second mirror 32 vibrates is not clarified at all.

As a result, the fact that the prior inventions 1 and 2 are extremely insufficient in specifying the constitution of the invention is as described below in accordance with FIGS. 5 (a), 5 (b) and 5 (c). ..

The fact that the direction of the rotation axis 30 in the first mirror 31 is orthogonal to the transmission direction of the laser beam 7 enables the laser beam 7 to scan in a plane including the transmission direction due to vibration through the rotation axis 30. Therefore, it corresponds to the requirements that are naturally required in terms of technology.

In order to realize two-dimensional scanning in the horizontal direction along the surface of the table 4 by scanning by the first mirror 31 and scanning by the second mirror 32, the direction of the rotation axis 30 in the second mirror 32 is the first. It is indispensable that the mirror 31 is orthogonal to the direction of the rotation axis 30.

In the case of realizing scanning in the two-dimensional direction via the first mirror 31 and the second mirror 32, the second mirror 32 has a rotation axis 30 orthogonal to the transmission direction of the laser beam 7 of the first mirror 31. The direction of the rotation axis 30 is the horizontal direction as shown in FIG. 5 (a), the transmission direction of the laser beam 7 as shown in FIG. 5 (b), and the first direction as shown in FIG. 5 (c). It is possible to assume three cases: not only the direction orthogonal to the direction of the rotation axis 30 in the mirror 31, but also the direction orthogonal to the transmission direction of the laser beam 7.

In the case of the direction shown in FIG. 5A, the reflected light from the first mirror along the plane including the transmission direction (the reflected light scanned along the front and back directions of the paper surface by the dots and x marks) is emitted. Due to the vibration of the second mirror 32 along the rotation axis 30 along the horizontal direction, uniform scanning can be realized along the horizontal direction along the surface of the table 4.

On the other hand, in the case of the direction shown in FIG. 5B, since the transmission direction of the laser beam 7 is oblique to the surface of the table 4, the rotation axis 30 in the second mirror 32 forms a horizontal direction. I'm not doing it.

Therefore, the distance from the horizontal plane along the surface of the table 4 differs depending on the position where the laser beam 7 reflects from the second mirror 32, and uniform scanning along the horizontal plane cannot be realized.

Specifically, as shown in FIG. 5B, the scanning line of the laser beam 7 reflected from the second mirror 32 at the position of the end portion in the back side direction of the paper surface indicated by the cross, and the paper surface indicated by the mark. Since the scanning lines of the second mirror 32 and the laser beam 7 reflected at the front end of the laser beam 7 are different in distance from the horizontal plane, the lengths of the scanning lines must also be different.

As a result, in the reflection in the second mirror 32 shown in FIG. 5B, uniform and accurate scanning in the two-dimensional direction cannot be realized in the horizontal plane along the surface of the table 4.

Similarly, also in the case shown in FIG. 5 (c), since the direction of the rotation axis 30 in the second mirror 32 does not form the horizontal direction as shown in FIG. 5 (a), it is reflected by the first mirror 31. The distance to the horizontal plane differs depending on the position where the laser beam 7 is reflected by the second mirror 32, and as shown in FIG. 5C, the second mirror is located at the positions of the front and back ends of the paper surface. The length of the scanning line in the reflected laser beam 7 is different from that of 32, and it is not possible to realize uniform and accurate scanning in the two-dimensional direction in the horizontal plane along the surface of the table 4.

However, in the prior inventions 1 and 2, the rotation axis in the second mirror 32 includes the case where the laser beam 7 transmitted through the dynamic focus lens 2 is oblique to the horizontal direction. Since the direction of 30 is not explained at all, the direction of the rotation axis 30 of the second mirror 32 is unspecified, and it is completely unknown which of FIGS. 5A, 5B, and 5C is adopted. Is.

In such a case, in FIG. 3 of the prior inventions 1 and 2, the laser beam 7 reflected from the first mirror 31 is scanned in the left-right direction of the paper surface, but such scanning in the left-right direction is performed. Considering that the direction of the rotation axis 30 in the second mirror 32 can be realized in any of the cases of FIGS. 5 (a), 5 (b), and (c), FIGS. 5 (a) and 5 (b). ) And (c) are included in the case of any of the configurations.

Therefore, the methods of the basic configurations (1) , (5), and (9) and the devices of the basic configurations (3), (7), and (11) specify the direction of the rotation axis 30 in the second mirror 32 in the horizontal direction. By doing so, it is clearly superior in technical content as compared with the prior inventions 1 and 2 in that uniform and accurate two-dimensional scanning is realized in the horizontal direction.

On which puts the respective basic premise, basic structure (2), device (6), the method and the basic configuration of (10) (4), (8), (12), in FIG. 2 or FIG. 4 As shown in any of the above, in the irradiation of the laser beam 7, the rotation axis 30 oscillated by the laser beam oscillation source 1 and transmitted through the dynamic focus lens 2 has a rotation axis 30 orthogonal to the transmission direction. From the second mirror 32 that vibrates integrally with the first mirror 31 and the first mirror 31 that vibrate through the first mirror 31 and vibrates via the rotating shaft 30 in the direction orthogonal to the rotating shaft 30 of the first mirror 31. A plurality of galvano scanners 3 that realize scanning in a two-dimensional direction based on the cylindrical coordinates of the laser beam 7 by reflection are adopted, and such adoption is such that the laser beam 7 based on the orthogonal coordinates is adopted. It is different from the prior inventions 1 and 2 which are based on scanning in the two-dimensional direction.

The directions of the rotation shaft 30 in the first mirror 31 and the second mirror 32 in the methods of the basic configurations (2) , (6) and (10) and the devices of the basic configurations (4), (8) and (12) are basic. The method of the configuration (1) , (5), (9) and the basic configuration (3), (7), (11) are the same as in the case of the apparatus, and as a result, as shown in FIG. 5 (a). , A uniform two-dimensional scan can be realized on the horizontal plane along the plane of the table 4.

As shown in FIGS. 2 (a), 2 (b) and 4, the state in which the vibration of the first mirror 31 is performed via the rotation axis 30 in the direction orthogonal to the direction through which the dynamic focus lens 2 is transmitted is Vibration drive driving the rotation by the rotating shaft 30 as in the case of the methods of the basic configurations (1) , (5) and (9) and the devices of the basic configurations (3), (7) and (11). The state realized by the device 310 and performed via the rotation shaft 30 in the direction orthogonal to the rotation shaft 30 of the first mirror 31 of the second mirror 32 is the vibration driving the rotation by the rotation shaft 30. It is realized by the drive device 320.

Of the two-dimensional scanning of the laser beam 7 with reference to the cylindrical coordinates, the vibration of the first mirror 31 realizes the scanning along the angular direction (θ direction), and the vibration of the second mirror 32 realizes the scanning in the radial direction. Scanning along (r direction) is realized.

The second mirror 32 in the methods of the basic configurations (2) , (6) and (10) and the devices of the basic configurations (4), (8) and (12) vibrates integrally with the first mirror 31. Therefore, such vibration is not in an independent state, and is different from the basic configurations (1) and (3) in this respect.

To explain the rationale for requiring the integrated state, between the Cartesian coordinates (x, y) and the cylindrical coordinates (r, θ),
x = rcosθ,
y = rsinθ
Is established, and even if r is an independent parameter, it is derived that an independent state corresponding to the independent parameters x and y can be realized by cooperation with the independent parameter θ, that is, integration.

Such vibration of the second mirror 32 is usually caused by the vibration driving device 320 connected to the vibration driving device 310 and the first mirror as shown in FIGS. 2 (a), 2 (b) and 4. This can be achieved by being supported by an arm 34 extending from a vibration strut 33 that realizes vibration by rotation that supports 31.

The configuration relating to the application of voltage or the conduction of current to the vibration drive device 320, which is necessary for operating the vibration drive device 320 in a state where the vibration drive device 320 is supported by the arm 34, is a matter of design by those skilled in the art. Belongs.
However, for example, as shown by the thin dotted lines in FIGS. 2 (a), 2 (b) and 4, the power supply 35 is formed in the conductive regions on both sides of the vibration support column 33 in the longitudinal direction divided by the insulating portion of the vibration support column 33. Two rotating rings 36 arranged on the side, two conductive rotating rings 37 (a total of four rotating rings 36, 37) arranged on the vibration driving device 320 side, and the respective rotating rings 36, 37. It can be realized via a conductive support column 38 that is supported in a rotatable state and fixed in a predetermined position (in FIGS. 2 and 4, each support column 38 is in an independent state. The case where it is fixed to the vibration drive device 310 is shown.).

The methods of the basic configurations (1) , (5), and (9) and the devices of the basic configurations (3), (7), and (11) are suitable for rectangular three-dimensional modeling, and the basic configuration (2). , (6), (10) and basic configurations (4), (8), (12) are suitable for three-dimensional modeling having a curved outer peripheral surface such as a circular shape or an elliptical shape.

Basic configuration (1) , (2), (5), (6), (9), (10) methods and basic configuration (3) , (4), (7), (8), (11) Each of the devices (12) can be adapted to three-dimensional modeling of a polygonal shape.

In the reference example (15) , as shown in FIGS. 1 (a) and 1 (b) and FIGS. 2 (a) and 2 (b), the direction in which the first mirror 31 in each galvano scanner 3 obliquely intersects the surface of the table 4. It is characterized in that it vibrates via the rotating shaft 30 of the above.

That is, in Reference Example (15) , a compact design is realized in the vertical direction by setting the rotation axis 30 of the first mirror 31 in a direction obliquely intersecting with the surface of the table 4.

As shown in FIGS. 1 (a) and 2 (a), in the reference example (15) , the direction of the laser beam 7 transmitted through the dynamic focus lens 2 is also set to be oblique with respect to the surface of the table 4. By doing so, it is possible to further promote a compact design in the vertical direction.

However, the direction of the laser beam 7 is by no means required to be oblique to the surface of the table 4.

That is, in the case of the reference example (15) , as shown in FIGS. 1 (b) and 2 (b), the laser beam 7 transmitted through the dynamic focus lens 2 is in the horizontal direction, and the first mirror 31 The basic configurations (1), (2), (3), and (4) in which the rotation axis 30 is orthogonal to the direction of the laser beam 7 can be adopted.

In the case of the basic configurations (1), (2), (3), and (4) , the rotation axis 30 of each first mirror 31 is obliquely intersected with the surface of the table 4, enabling a compact design in the vertical direction. On the other hand, it is possible to realize a simple design in which the direction of the laser beam 7 that oscillates from the laser beam oscillation source 1 and passes through the dynamic focus lens 2 is the horizontal direction.

Moreover, in the basic configurations (1), (2), (3), and (4) , the rotation axis of the second mirror 32 is orthogonal to the direction of the rotation axis 30 of the first mirror 31 and is in the horizontal direction. As the direction of 30, the direction of the rotation axis 30 parallel to the transmission direction of the laser beam 7 can be selected, and as a result, the space between the first mirror 31 and the second mirror 32 can be made compact. It becomes.

In the basic configurations (13) and (14) , as shown in FIGS. 3 and 4, the first mirror 31 in each galvano scanner 3 vibrates through the rotation axis 30 in the vertical direction orthogonal to the surface of the table 4. It is a feature.

That is, as in the case of the conventional galvano scanner 3, the vibration of the first mirror 31 is based on the horizontal direction, and the vibration of the second mirror 32 is based on the vertical direction to realize stable operation. Can be done.

Moreover, in the basic configurations (13) and (14) , since the direction of the rotation axis 30 of the first mirror 31 is vertical, the direction of the rotation axis 30 of the second mirror 32 is the rotation axis of the first mirror 31. It is possible to select a horizontal direction over 360 ° orthogonal to the direction of 30, and of course it is also possible to select a horizontal direction parallel to the direction of the laser beam 7 transmitted through the dynamic focus lens 2.

In the basic configurations (1), (2), (3), (4) , (5), (6), (7), (8), (9), (10), (11), (12) Typical examples of the vibration direction of the first mirror 31 and the vibration direction of the second mirror 32 are the configuration and the basic configuration (1), (2), (3), (4) of the reference example (15). For example, considering that the vibration of the first mirror 31 may be along the vertical plane and the vibration direction of the second mirror 32 may be along the horizontal plane, the basic configurations (1), (2), (3), (4) , (5), (6), (7), (8), (9), (10), (11), (12) never have the configuration of reference example (15) and It is not limited to the basic configurations (1), (2), (3), and (4).

In the basic configurations (9), (10), (11), and (12) , a plurality of galvano scanners 3 are provided by making the vibration range of the first mirror 31 and the vibration range of the second mirror 32 adjustable. The regions of the sintered surface 6 due to the irradiation of the transmitted laser beam 7 are the same, but in each of the basic configurations , as shown in FIG. 6A, vibration in the second mirror 32 of each galvano scanner 3 At that time, the embodiment in which the irradiation positions of the reflected light reflected at the stage of forming the central position of the vibration due to the vibration on the sintered surface 6 are the same, and as shown in FIG. 6B, each galvano scanner 3 Any of the embodiments in which the irradiation positions of the reflected light reflected from the position not corresponding to the center position of the vibration due to the vibration on the sintered surface 6 of the second mirror 32 of the second mirror 32 are the same can be adopted. it can.

As shown in FIGS. 6 (a) and 6 (b), when the regions of the sintered surface 6 due to the irradiation of the laser beam 7 from each galvano scanner 3 are the same, the layers are quickly fired by the superimposed sintering. The connecting surface 6 is formed, which can further promote efficient three-dimensional modeling.

In the case of the embodiment shown in FIG. 6A, the sintered surface of the second mirror 32 with reference to the center position P in the horizontal direction of the table 4 by adjusting the amplitudes on both sides of the center position of vibration. The area of 6 can be freely selected.

On the other hand, in the case of the embodiment shown in FIG. 6B, the region of the sintered surface 6 can be selected at any time at an arbitrary position away from the horizontal center position P of the table 4.

In the basic configurations (1), (2), (3), (4), (5), (6), (7), and (8) , the vibration range of the first mirror 31 and the vibration of the second mirror 32 By making the range adjustable, it is possible to adopt an embodiment in which the sintered surfaces 6 by the laser beams 7 transmitted through the plurality of galvano scanners 3 are independent of each other and are different regions. Further, as shown in FIG. 7A, the embodiments are characterized in that the regions are adjacent to each other, and as shown in FIG. 7B, the regions are separated from each other. As shown in FIG. 7 (c), the embodiment characterized in that the regions overlap at the boundary can be adopted.

The shapes of the sintered surfaces 6 that are independent of each other and form different regions are various, but various shapes are sintered by irradiation of laser beams 7 from a plurality of galvano scanners 3. The reason why it can be applied to the surface 6 is that the region of the sintered surface 6 can be freely selected in each of the basic configurations.

In the case of each of the embodiments shown in FIGS. 7A, 7B, and 7C, the sintered surfaces 6 which are independent of each other and are different regions are simultaneously irradiated from a plurality of galvano scanners 3. Efficient three-dimensional modeling can be realized in that it is realized at once.

In the basic configurations (5), (6), (7), and (8), as shown in FIGS. 1 (a), 1 (b) and 2 (a), (b), the center of the surface of the table 4. Each second mirror 32 is arranged inside each first mirror 31 with reference to the position P.

In the case of such an arrangement, the distance between the second mirrors 32 is made compact, and as a result, the laser beam 7 reflected from the second mirrors 32 exceeds the center position P and the sintered surface 6 is used. Regarding the contour at the boundary of the sintered surface 6 in the case of forming the above, as compared with the case where the arrangement is opposite to the above arrangement, that is, each second mirror 32 is arranged outside each first mirror 31 and outside the center position P. As the sintered surface 6 becomes farther from the center position, the illuminance decreases, and in the case of irradiation in the vertical direction with respect to the surface of the table 4, a substantially circular sintered surface 6 is formed. Instead, a clearer state can be obtained by reducing the degree of adverse effect that the shape of the sintered surface 6 becomes inaccurate due to the formation of the sintered surface 6 having a substantially elliptical shape. ..

As another configuration in the basic configurations (5), (6), (7), and (8) , as shown in FIGS. 3 and 4, each first mirror 31 is based on the center position P of the surface of the table 4. It is also possible to adopt a configuration in which one of the first mirrors 31 is arranged outside the one of the second mirrors 32 and the other of the first mirrors 31 is arranged inside the other of the second mirrors 32.

Even in the case of such another configuration, the harmful effect of arranging each of the first mirrors 31 inside each of the second mirrors 32 can be avoided.

However, as shown in FIGS. 1 (a) and 1 (b) and 2 (a) and 2 (b), the above-mentioned adverse effects are compared with the embodiment in which each first mirror 31 is arranged outside each second mirror 32. There is no choice but to halve the degree of avoidance.

Hereinafter, examples will be described.

In the embodiment, as shown in FIGS. 1 (a), 1 (b), 2 (a), (b), 3 and 4, the vibration of the second mirror 32 of each galvano scanner 3 is caused by the vibration. The reflected light reflected at the stage of forming the center position of the amplitude forms an oblique direction with respect to the surface of the table 4.

Due to the above characteristics, in the embodiment, the position of each galvano scanner 3 in the vertical direction (height direction) is set lower than that in the case where the laser beam 7 is orthogonal to the surface of the table 4, and then the first mirror 31 and the first mirror 31 and By making each vibration range of the second mirror 32 adjustable, the required region of the sintered surface 6 on the surface of the table 4 can be freely selected.
However, adoption of such an embodiment is not necessarily a laser beam 7 is meant to exclude embodiments such as perpendicular to the plane of the table 4.

The invention of the present application is epoch-making in that it realizes efficient three-dimensional modeling, and its range of use is wide.

1 Laser beam oscillation source 2 Dynamic focus lens 3 Galvano scanner 30 Rotating axis 31 First mirror 32 Second mirror 310 Vibration drive device for the first mirror 320 Vibration drive device for the second mirror 33 Rotatable vibration support column 34 Arm 35 Power supply 36 Rotating ring on the power supply side 37 Rotating ring on the vibration drive device side with respect to the second mirror 38 Conductive support column supporting the rotating ring 4 Table 5 Powder layer 6 Sintered surface 7 Laser beam P Center position of the table surface Q, Q ´ A reference position of line symmetry that is arranged in the opposite direction to the P at a predetermined equivalent distance.

In order to achieve the above object, the basic configuration of the present invention is
(1) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. A state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate with respect to the laser beam transmitted through the laser beam through the rotation axis in the direction orthogonal to the transmission direction. A plurality of galvano scanners are used to realize scanning in the two-dimensional direction based on the orthogonal coordinates of the laser beam by the reflection from the second mirror that is located in the lens and vibrates through the axis of rotation in the horizontal direction. Moreover, by making the vibration range of each first mirror and each second mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be freely selected, and the focal distance in the dynamic focus lens. By adjusting the above, the sintered surface is irradiated at or near the focal position of the laser beam, and the first mirror in each galvano scanner vibrates along the rotation axis in the direction obliquely intersecting with the table surface. A three-dimensional modeling method in which the laser beam transmitted through the dynamic focus lens is in the horizontal direction and the rotation axis of the first mirror is orthogonal to the direction of the laser beam.
(2) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. By connecting the laser beam that has passed through the laser beam to the first mirror that vibrates via the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror via the arm, the surroundings of the rotation axis, etc. A cylinder of a laser beam due to reflection from a second mirror that vibrates integrally at a distance position , is orthogonal to the direction of the rotation axis in the first mirror, and vibrates via the rotation axis in the horizontal direction. By adopting multiple galvano scanners that realize scanning in the two-dimensional direction based on the coordinates, and by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, each galvano The region of the sintered surface is freely selectable by irradiating the laser beam transmitted through the scanner, and the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal distance in the dynamic focus lens. The first mirror in each galvano scanner vibrates along the rotation axis in the direction obliquely intersecting the table surface, and the laser beam transmitted through the dynamic focus lens is in the horizontal direction, and the rotation axis of the first mirror is the relevant. A three-dimensional modeling method that is orthogonal to the direction of the laser beam,
(3) A three-dimensional modeling apparatus equipped with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam is in a state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction. In addition, a plurality of galvano scanners that realize scanning in the two-dimensional direction based on the orthogonal coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each first By providing a vibration drive device for one mirror and a control device for adjusting the vibration range of the vibration drive device for each second mirror, the region of the sintered surface due to the irradiation of the laser beam can be freely selected, and the dynamic focus By adjusting the focal distance in the lens, the sintered surface is irradiated at or near the focal position of the laser beam, and the first mirror in each galvano scanner vibrates along the rotation axis in the direction obliquely intersecting with the table surface. A three-dimensional modeling device in which the laser beam transmitted through the dynamic focus lens is in the horizontal direction and the rotation axis of the first mirror is orthogonal to the direction of the laser beam.
(4) A three-dimensional modeling apparatus equipped with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. By connecting the laser beam to the rotation axis of the first mirror that vibrates via the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror via the arm, the positions at equal distances around the rotation axis. The laser beam is based on the cylindrical coordinates due to the reflection from the second mirror that vibrates as a unit and is orthogonal to the direction of the rotation axis in the first mirror and vibrates through the rotation axis in the horizontal direction. A control device that employs a plurality of galvano scanners that realize scanning in the two-dimensional direction and that can adjust the vibration range of the vibration drive device for each first mirror, and a vibration drive device for each second mirror. By providing a control device that can adjust the vibration range, the region of the sintered surface due to the irradiation of the laser beam can be freely selected, and by adjusting the focal distance in the dynamic focus lens, the focal position of the laser beam or its vicinity can be adjusted. The first mirror in each galvano scanner vibrates along the axis of rotation in the direction obliquely intersecting the table surface, and the laser beam transmitted through the dynamic focus lens is in the horizontal direction. A three-dimensional modeling device whose rotation axis of the first mirror is orthogonal to the direction of the laser beam.
(5) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. A state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibrations of the first mirror and the first mirror that vibrate with respect to the laser beam transmitted through the lens via the rotation axis in the direction orthogonal to the transmission direction. It employs multiple galvano scanners that are located in the lens and realize two-dimensional scanning based on the Cartesian coordinates of the laser beam by reflection from the second mirror that vibrates through the horizontal rotation axis. Moreover, by making the vibration range of each of the first mirror and each of the second mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be freely selected, and the focal length in the dynamic focus lens. by adjusting at the focal position or the vicinity thereof of the laser beam is irradiated sintered surface, with reference to the center position of the table surface, tertiary that each first mirror is disposed outside the respective second mirror Original modeling method,
(6) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. By connecting the laser beam transmitted through the lens to the rotation axis of the first mirror that vibrates via the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror via an arm, the periphery of the rotation axis, etc. A cylinder of a laser beam due to reflection from a second mirror that vibrates integrally at a distance position , is orthogonal to the direction of the rotation axis in the first mirror, and vibrates through the rotation axis in the horizontal direction. By adopting multiple galvano scanners that realize scanning in the two-dimensional direction based on the coordinates, and by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, each galvano The region of the sintered surface is freely selectable by irradiating the laser beam transmitted through the scanner, and the sintered surface is irradiated at or near the focal position of the laser beam by adjusting the focal length in the dynamic focus lens. 3D modeling methods based on the center position of the table surface, and the respective first mirror disposed outside the respective second mirror,
(7) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam is in a state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction. In addition, a plurality of galvano scanners that realize scanning in the two-dimensional direction based on the orthogonal coordinates of the laser beam by reflection from the second mirror vibrating via the horizontal rotation axis are adopted, and each first By providing a vibration drive device for one mirror and a control device for adjusting the vibration range of the vibration drive device for each second mirror, the region of the sintered surface due to the irradiation of the laser beam can be freely selected, and the dynamic focus is obtained. By adjusting the focal length in the lens, the sintered surface is irradiated at or near the focal position of the laser beam, and each first mirror is arranged outside each second mirror with reference to the center position of the table surface. to have three-dimensional modeling apparatus,
(8) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. By connecting the laser beam to the rotation axis of the first mirror that vibrates via the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror via the arm, the positions at equal distances around the rotation axis. The laser beam is based on the cylindrical coordinates by the reflection from the second mirror that vibrates as a unit and is orthogonal to the direction of the rotation axis in the first mirror and vibrates through the rotation axis in the horizontal direction. A control device that employs a plurality of galvano scanners that realize scanning in the two-dimensional direction and that can adjust the vibration range of the vibration drive device for each first mirror, and a vibration drive device for each second mirror. By providing a control device that can adjust the vibration range, the region of the sintered surface due to the irradiation of the laser beam can be freely selected, and by adjusting the focal length in the dynamic focus lens, the focal position of the laser beam or its vicinity can be adjusted. Te is irradiated sintered surface, with reference to the center position of the table surface, three-dimensional modeling apparatus is disposed outside the respective second mirror each first mirror,
(9) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiating a laser beam. In the irradiation, a dynamic focus lens is used. A state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate with respect to the laser beam transmitted through the lens via the rotation axis in the direction orthogonal to the transmission direction. It employs multiple galvano scanners that are located in the lens and realize two-dimensional scanning based on the orthogonal coordinates of the laser beam by reflection from the second mirror that vibrates through the horizontal rotation axis. and by freely adjust the oscillation range of the first mirror and the second mirror, adjustably selected area is matched as a sintering surface by irradiation with a laser beam transmitted through the galvano scanner, moreover A three-dimensional modeling method in which a sintered surface is irradiated at or near the focal position of a laser beam by adjusting the focal length of the dynamic focus lens.
(10) A three-dimensional modeling method in which powders are laminated on a table through running of a squeegee, and the laminated powder layers are sintered by irradiation with a laser beam. In the irradiation, a dynamic focus lens is used. By connecting the laser beam transmitted through the lens to the rotation axis of the first mirror that vibrates via the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror via an arm, the periphery of the rotation axis, etc. A cylinder of a laser beam due to reflection from a second mirror that vibrates integrally at a distance position , is orthogonal to the direction of the rotation axis in the first mirror, and vibrates through the rotation axis in the horizontal direction. By adopting multiple galvano scanners that realize scanning in the two-dimensional direction based on the coordinates, and by making the vibration range of each first mirror and the vibration range of each second mirror adjustable, each galvano adjustably selected region as a sintering surface by irradiation with a laser beam transmitted through the scanner and is matched, yet by adjusting the focal length in the dynamic focus lens, sintered at the focal position or near the laser beam Three-dimensional modeling method that illuminates the surface,
(11) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. The laser beam is in a state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction. In addition, a plurality of galvano scanners that realize scanning in the two-dimensional direction based on the orthogonal coordinates of the laser beam by reflection from the second mirror vibrating via the horizontal rotation axis are adopted, and each first by providing a control unit for freely adjusting the oscillation range of the oscillating drive for oscillating the drive apparatus and the second mirror with respect to first mirror respectively, adjustably selected region as a sintering surface by laser beam irradiation match A three-dimensional modeling device that irradiates a sintered surface at or near the focal position of a laser beam by adjusting the focal length of the dynamic focus lens.
(12) A three-dimensional modeling apparatus provided with a squeegee for laminating powder on a table via traveling and a sintering apparatus for irradiating the powder layer with a laser beam, and transmitted through a dynamic focus lens in the irradiation. By connecting the laser beam to the rotation axis of the first mirror that vibrates via the rotation axis in the direction orthogonal to the transmission direction and the rotation axis of the first mirror via an arm, the positions at equal distances around the rotation axis. vibrate together at the located perpendicular to each to the direction of the rotation axis of the first mirror, and the reflection from the second mirror to vibrate through the rotation axis in the horizontal direction, relative to the cylindrical coordinates of the laser beam A control device that employs a plurality of galvano scanners that realize scanning in the two-dimensional direction and that can adjust the vibration range of the vibration drive device for each first mirror, and a vibration drive device for each second mirror. by providing a control unit for freely adjusting the oscillation range, and adjustably selected region as a sintering surface by laser beam irradiation is matched, yet by adjusting the focal length in the dynamic focus lens, the laser beam A three-dimensional modeling device that irradiates the sintered surface at or near the focal length of
(13) Any of the above (5), (6), (9), and (10), wherein the first mirror in each galvano scanner vibrates via a rotation axis in the vertical direction orthogonal to the table surface. The three-dimensional modeling method described in item 1,
(14) Any of the above (7), (8), (11), and (12), wherein the first mirror in each galvano scanner vibrates via a rotation axis in the vertical direction orthogonal to the table surface. The three-dimensional modeling device described in item 1,
Consists of.
Further, in the basic configurations (1), (2), (3) and (4),
(15) The technical premise is the configuration of a reference example in which the first mirror in each galvano scanner vibrates via a rotation axis in a direction obliquely intersecting with the table surface.

Based on each of the above basic assumptions, the methods of the basic configurations (2), (6) and (10) and the devices of the basic configurations (4), (8) and (12) are shown in FIG. 2 or FIG. As shown in any of the above, in the irradiation of the laser beam 7, the rotation axis 30 oscillated by the laser beam oscillation source 1 and transmitted through the dynamic focus lens 2 has a rotation axis 30 orthogonal to the transmission direction. By connecting the rotating shaft 30 of the first mirror 31 and the first mirror 31 vibrating through the arm 34 via the arm 34, the first mirror 31 vibrates integrally at equal distance positions around the rotating shaft 30, and the first mirror 31 vibrates. Galvano realizes two-dimensional scanning based on the cylindrical coordinates of the laser beam 7 by reflection from the second mirror 32 that vibrates through the rotation axis 30 in the direction orthogonal to the rotation axis 30 of the mirror 31. A plurality of scanners 3 are adopted, and such adoption is different from the prior inventions 1 and 2 based on the scanning of the laser beam 7 in the two-dimensional direction with reference to the orthogonal coordinates.

In the basic configurations (9), (10), (11), and (12), a plurality of galvano scanners 3 are provided by making the vibration range of the first mirror 31 and the vibration range of the second mirror 32 adjustable. As the sintered surface 6 due to the irradiation of the transmitted laser beam 7, the regions selected in an adjustable manner are the same. However, in each of the basic configurations, as shown in FIG. 6A, each galvano scanner 3 is further formed. 6 (b) shows an embodiment in which the irradiation positions of the reflected light reflected at the stage of forming the center position of the vibration due to the vibration on the sintered surface 6 of the second mirror 32 are the same. As described above, when the second mirror 32 of each galvano scanner 3 vibrates, the irradiation positions of the reflected light reflected from the position not corresponding to the center position of the vibration due to the vibration on the sintered surface 6 are the same. Any of them can be adopted.

Basic structure (5), (6), (7), as a reference example against the (8), as shown in FIGS. 3 and 4, with reference to the center position P of the surface of the table 4, the first mirror 31 It is also possible to adopt a configuration in which one of the first mirrors 31 is arranged outside the one of the second mirrors 32 and the other of the first mirrors 31 is arranged inside the other of the second mirrors 32.

Even in the case of such a reference example , the harmful effect of arranging each of the first mirrors 31 inside each of the second mirrors 32 can be avoided.

Claims (9)

It is a three-dimensional modeling method that goes through each process of stacking powder on a table through running of a squeegee and sintering by irradiating the laminated powder layer with a laser beam. In the irradiation, the dynamic focus lens is transmitted. The laser beam is in a state orthogonal to the direction of the rotation axis of the first mirror in a state independent of the vibration of the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction. In addition, multiple galvano scanners that realize two-dimensional scanning based on the orthogonal coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each first By making the vibration range of the 1st mirror and each 2nd mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be selected, and the focal length of the dynamic focus lens can be adjusted. , A three-dimensional modeling method in which a sintered surface is irradiated at or near the focal length of a laser beam. It is a three-dimensional modeling method that goes through each process of stacking powder on a table through running of a squeegee and sintering by irradiating the laminated powder layer with a laser beam. In the irradiation, the dynamic focus lens is transmitted. The laser beam vibrates integrally with the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, and is in a state orthogonal to the direction of the rotation axis in the first mirror. In addition, multiple galvano scanners that realize two-dimensional scanning based on the cylindrical coordinates of the laser beam by reflection from the second mirror that vibrates via the horizontal rotation axis are adopted, and each By making the vibration range of the first mirror and the vibration range of each second mirror adjustable, the region of the sintered surface due to the irradiation of the laser beam transmitted through each galvano scanner can be freely selected, and the focal length in the dynamic focus lens can be selected. A three-dimensional modeling method in which a sintered surface is irradiated at or near the focal length of a laser beam by adjusting the distance. A three-dimensional modeling device equipped with a squeegee that stacks powder on a table via traveling and a sintering device that irradiates the powder layer with a laser beam. On the other hand, in a state independent of the vibrations of the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction, the state is orthogonal to the direction of the rotation axis in the first mirror, and the horizontal direction. A plurality of galvano scanners that realize scanning in a two-dimensional direction based on the orthogonal coordinates of the laser beam by reflection from the second mirror vibrating along the rotation axis of the lens are adopted, and for each first mirror. By providing a vibration drive device and a control device that can adjust the vibration range of the vibration drive device for each second mirror, the region of the sintered surface due to the irradiation of the laser beam can be freely selected, and the focal length in the dynamic focus lens can be selected. A three-dimensional modeling device that irradiates a sintered surface at or near the focal length of a laser beam by adjusting the distance. A three-dimensional modeling device equipped with a squeegee that stacks powder on a table via traveling and a sintering device that irradiates the powder layer with a laser beam. On the other hand, the first mirror and the first mirror that vibrate via the rotation axis in the direction orthogonal to the transmission direction vibrate integrally, and are in a state orthogonal to the direction of the rotation axis in the first mirror and are horizontal. A plurality of galvano scanners that realize scanning in the two-dimensional direction based on the cylindrical coordinates of the laser beam by reflection from the second mirror that vibrates along the rotation axis of the direction are adopted, and each first mirror. By providing a control device that can adjust the vibration range of the vibration drive device for each second mirror and a control device that can adjust the vibration range of the vibration drive device for each second mirror, the region of the sintered surface due to the irradiation of the laser beam can be selected. A three-dimensional modeling device that is flexible and irradiates a sintered surface at or near the focal position of a laser beam by adjusting the focal length of the dynamic focus lens. The three-dimensional modeling method and claim 3 according to any one of claims 1 and 2, wherein the first mirror in each galvano scanner vibrates via a rotation axis in a direction obliquely intersecting with the table surface. The three-dimensional modeling apparatus according to any one of 4. The three-dimensional modeling method and three-dimensional modeling apparatus according to claim 5, wherein the laser beam transmitted through the dynamic focus lens is in the horizontal direction, and the rotation axis of the first mirror is orthogonal to the horizontal direction. The three-dimensional modeling method and claim 3 according to any one of claims 1 and 2, wherein the first mirror in each galvano scanner vibrates via a rotation axis in the vertical direction orthogonal to the table surface. The three-dimensional modeling apparatus according to any one of 4. Claims 1 and 2 are characterized in that, when the second mirror of each galvano scanner vibrates, the reflected light reflected at the stage of forming the center position of the amplitude due to the vibration forms an oblique direction with respect to the table surface. The three-dimensional modeling method according to any one of 5, 6, and 7, and the three-dimensional modeling apparatus according to any one of claims 3, 4, 5, 6, and 7. With reference to the center position of the table surface, each first mirror is arranged outside each second mirror, or one of each first mirror is arranged outside one of each second mirror, and each second mirror is arranged. The three-dimensional modeling method according to any one of claims 1, 2, 5, 6, 7, and 8, wherein the other side of the one mirror is arranged inside the other side of each second mirror. The three-dimensional modeling apparatus according to any one of claims 3, 4, 5, 6, 7, and 8.

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