JP7069822B2 - Polishing equipment - Google Patents

Description

The present invention relates to a polishing device.

Conventionally, Japanese Patent Application Laid-Open No. 2003-048156 is available as a technique in such a field. In the polishing apparatus described in this publication, a rotary motor is arranged above the spindle to which the polishing tool is attached, and the polishing tool is brought into contact with the object to be polished while rotating the polishing tool by the power supplied from the rotary motor. .. As a result, the polishing apparatus can perform polishing of the object to be polished.

Japanese Patent Application Laid-Open No. 2003-048156

However, when the rotary motor 52 is arranged above the spindle 51 as in the related polishing device shown in FIG. 3, the spindle 51 tends to be tilted due to the weight of the rotary motor 52, which is a heavy object. Specifically, in FIG. 3, the weight applied to the spindle 51 by arranging the rotary motor 52 above the spindle 51 and the moment applied to the guide portion 53 by this weight are indicated by arrows, and the moment is used to indicate the spindle 51. May be tilted.

Further, as in the related polishing device shown in FIG. 4, the rotary motor 62 is arranged so as to be displaced in the XY direction instead of the upward direction of the spindle 61, and the drive pulley 63 connected to the rotary motor 62 and the spindle. It is conceivable to connect the driven pulley 64 connected to the 61 with a belt 65 to rotate the spindle 61. In this way, when the rotary motor 62 is brought into contact with the spindle 61 via the belt 65, as shown by the arrow in FIG. 4, a moment is applied to the guide portion 66 due to the weight of the rotary motor 62, and a dotted arrow indicates. As shown, the tension of the belt 65 may generate a force on the bearing 67, which may cause the spindle 61 to tilt.

Therefore, even when the polishing apparatus as shown in FIGS. 3 and 4 is used, when the object to be polished is polished flat, the polishing tool is tilted due to the tilt of the spindle, so that the polishing is performed. There was a risk that the object could not be ground accurately and flatly.
The present invention provides a polishing apparatus capable of accurately and flatly polishing an object to be polished.

The polishing apparatus according to the present invention has a spindle to which a polishing tool is connected at a lower portion, an outer peripheral surface of the spindle, and an inner peripheral surface of a pulley arranged so as to surround a part of the spindle on the inner diameter side. A magnet coupling provided and a rotary motor arranged apart from the spindle so as to be non-contact with the spindle are provided, and the rotary motor transmits a driving force to the pulley. Thereby, a driving force is transmitted to the spindle via the magnet coupling to rotate the spindle.
This makes it possible to suppress the occurrence of spindle tilt due to the weight of the rotary motor.

As a result, the object to be polished can be polished accurately and flatly.

It is a figure which shows the structure of a polishing apparatus. It is a figure which shows the polishing apparatus in the state which the polishing part moved downward. FIG. 3 is a diagram of a polishing device in which the associated rotary motor is placed so as to abut on the top of the spindle. It is a figure of a polishing apparatus arranged so that a related rotary motor contacts a spindle through a belt.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. As shown in FIG. 1, the polishing apparatus 1 includes a base portion 11, a polishing portion 12, a rotary motor 13, a first pulley (driven pulley) 14, a second pulley (drive pulley) 15, and a feed motor. A 16 and a ball screw portion 17 are provided. In the following, the spindle 31 provided in the polishing portion 12 will be described as being arranged so as to rotate around a rotation center axis extending in the vertical direction (Z direction).

The base portion 11 has a top plate 21 extending in the XY direction and a leg portion 22 that supports the top plate 21 from below. The top plate 21 is provided with a hole 23 penetrating in the Z direction. A first pulley 14 is connected to the wall surface forming the hole 23 via a bearing 24. The spindle 31 of the polishing portion 12, which will be described later, penetrates the inner diameter side of the first pulley 14 connected to the hole 23.

Further, a linear motion guide 25 is provided on the leg portion 22 extending in the vertical direction. For example, the linear motion guide 25 provided on the leg portion 22 is long in the Z direction and has a concave shape when viewed from above. The linear motion guide 25 is arranged so that a concave recess is directed with respect to the direction in which the housing 32 of the polishing portion 12 described later is arranged, and the guide portion 32d provided in the housing 32 is in a meshed state. As a result, the linear motion guide 25 guides the housing 32 so that it can move only in the Z direction.

The polishing portion 12 includes a spindle 31 which is a rotating body, a feed housing 32 that holds the spindle 31 via bearings 32b and 32c, and an inner side 33a of a magnet coupling 33 provided on the outer peripheral surface of the spindle 31. A cutting fluid supply unit 34 connected to the upper part of the spindle 31 and a polishing tool 35 connected to the lower part of the spindle 31 are provided.

The spindle 31 is composed of a large-diameter portion 31a having a large-diameter columnar arrangement arranged on the lower side and a small-diameter portion 31b having a small-diameter columnar arrangement arranged on the upper side. The lower surface of the small diameter portion 31b is connected to the upper surface of the large diameter portion 31a in a state where the central axes of the large diameter portion 31a and the small diameter portion 31b coincide with each other.

The outer peripheral surface of the large diameter portion 31a is held by the housing 32 via the bearings 32b and 32c. More specifically, the bearing 32b is arranged so as to abut on the outer peripheral surface near the lower portion of the large diameter portion 31a, and the bearing 32c is arranged so as to abut on the outer peripheral surface near the upper portion of the large diameter portion 31a. Has been done. As a result, the spindle 31 can be rotated about the Z axis while being connected to the housing 32.

The inner side 33a of the magnet coupling 33 is arranged on the outer peripheral surface of the small diameter portion 31b. The outer peripheral surface of the inner side 33a faces the outer side 33b of the magnet coupling 33 described later. Here, the inner side 33a is provided long in the Z direction on the outer peripheral surface of the small diameter portion 31b. As a result, even when the polishing portion 12 moves up and down, a part of the inner side 33a can always be maintained in a state of facing the outer side 33b.

A spindle 31 is held inside the housing body 32a of the housing 32 via bearings 32b and 32c. Further, on the outside of the housing main body 32a, a concave guide portion 32d used in combination with the linear motion guide 25 provided on the base portion 11 and a protrusion portion 32e to which the nut 17b of the ball screw portion 17 is connected are provided. ..

The guide portion 32d is provided so as to project from the outside of the housing main body 32a toward the linear motion guide 25. Since the concave guide portion 32d and the convex linear guide 25 are in mesh with each other, the housing 32 is guided so as not to shift in the XY direction when the housing 32 moves in the Z direction. do.

The protrusion 32e is provided so as to project from the outside of the housing body 32a toward the ball screw 17a of the ball screw portion 17. When the ball screw 17a penetrates the nut 17b connected to the tip of the protrusion 32e and the ball screw 17a is rotated by the feed motor 16, the housing 32 is given a force to move in the Z direction via the nut 17b. Be done.

The cutting fluid supply unit 34 is connected to the upper end portion of the small diameter portion 31b of the spindle 31. When the polishing is executed, the cutting fluid is supplied to the cutting fluid supply unit 34, so that the cutting fluid is supplied to the polishing tool 35 via a path (not shown) provided in the housing 32.

The polishing tool 35 is a disk connected to the lower end portion of the large diameter portion 31a of the spindle 31, and has a flat surface on the lower surface. The polishing tool 35 rotates about the Z axis by rotating the spindle 31 by the power of the rotary motor 13. Further, the height of the polishing tool 35 is adjusted by the vertical movement of the spindle 31 due to the vertical movement of the housing 32 by the power of the feed motor 16.

The rotary motor 13 is located at a position distant from the polishing portion 12 and is arranged so as to be non-contact. In other words, the rotary motor 13 is arranged so as to be separated from the spindle 31 in the radial direction of the spindle 31 and not to come into contact with the spindle 31. For example, the rotary motor 13 is arranged outside the base 11 in the XY direction when the polishing portion 12 is arranged inside surrounded by the base 11. Further, a second pulley 15 is connected to the rotating shaft of the rotary motor 13. By driving the rotary motor 13, the second pulley 15 rotates.

The first pulley 14 has a hole through which the small diameter portion 31b of the spindle 31 penetrates. The first pulley 14 has a pulley tooth tip circle 14a on which the belt 41 is hung on the outer diameter side, and a wall surface on the inner diameter side forming a hole and protruding in the rotation axis direction. Here, the outer peripheral surface of the protruding portion 14b is connected to the top plate 21 of the base 11 via the bearing 24. Further, the outer side 33b of the magnet coupling 33 is arranged on the inner peripheral surface of the protruding portion 14b.

Here, the first pulley 14 receives a force from the belt 41 operated by the rotation of the second pulley 15 to rotate around the Z axis. At this time, the outer side 33b of the magnet coupling 33 arranged on the first pulley 14 rotates with the rotation of the first pulley 14, so that the outer side 33a facing the outer side 33b also rotates. The power to do is transmitted.

The second pulley 15 is connected to the rotation shaft of the rotary motor 13 and is arranged at substantially the same height as the height of the first pulley. The second pulley 15 is driven by a rotary motor 13 to rotate around the Z axis. A belt 41 is hung on the pulley tooth tip circle of the second pulley 15, and the belt 41 operates by rotating the second pulley 15. Since the belt 41 rests on the first pulley 14 and the second pulley 15, when the belt 41 is operated by the rotational operation of the second pulley 15, the first pulley 14 is rotated.

The feed motor 16 generates power to rotate the ball screw 17a of the ball screw portion 17. The feed motor 16 is arranged on the top plate 21. Here, the upper part of the ball screw 17a is connected to the lower part of the feed motor 16.

The ball screw portion 17 has a ball screw 17a and a nut 17b. The ball screw 17a is arranged so as to extend in the Z-axis direction so as to penetrate the top plate 21. The ball screw 17a is arranged so as to extend downward longer than the top plate 21, and is positioned so that the protrusion 32e of the housing 32 can be connected to the nut 17b penetrated by the ball screw 17a. Have been placed. Further, the upper portion of the ball screw 17a is connected to the feed motor 16 and rotates around the Z axis by the power from the feed motor 16. A force that operates in the Z direction is generated in the nut 17b due to the rotational operation of the ball screw 17a.

Here, the operation of the polishing apparatus 1 will be described with reference to FIG. Note that FIG. 2 shows a state in which the polishing portion 12 of the polishing apparatus 1 shown in FIG. 1 is moved downward. First, the operation of moving the polishing portion 12 up and down will be described.

By driving the feed motor 16, the ball screw 17a rotates. As a result, a force that moves up and down is generated in the nut 17b through which the ball screw 17a penetrates.

The housing body 32a is connected to the nut 17b via the protrusion 32e. Therefore, when a force that moves up and down is applied to the nut 17b, a force that moves up and down is applied to the housing 32.

Here, since the guide portion 32d of the housing 32 and the linear motion guide 25 are engaged with each other, the housing 32 operates in the Z-axis direction without shifting in the XY direction. Further, since the spindle 31 is held with respect to the housing 32 via the bearings 32b and 32c, the spindle 31 moves up and down in accordance with the vertical movement of the housing 32. That is, the entire polishing portion 12 moves up and down.

Next, a procedure for rotating the polishing tool 35 by rotating the spindle 31 will be described.

By driving the rotary motor 13, the second pulley 15 rotates. As a result, the first pulley 14 rotates via the belt 41 on the second pulley 15.

At this time, tension is generated in the first pulley 14 by the belt 41. That is, a force is generated on the first pulley 14 toward the second pulley 15. Here, the first pulley 14 is connected to the base 11 via the bearing 24, and the force pulled by the belt 41 is offset.

Due to the rotation of the first pulley 14, the outer side 33b of the magnet coupling 33 arranged on the inner wall surface of the protruding portion 14b of the first pulley 14 also rotates at the same time.

The inner side 33a of the magnet coupling 33 arranged on the outer peripheral surface of the small diameter portion 31b of the spindle 31 receives a force to rotate due to the rotational operation of the outer side 33b. Therefore, a rotating force is generated in the small diameter portion 31b of the spindle 31 to which the inner side 33a is connected, and the spindle 31 rotates around the Z axis. As a result, the polishing tool 35 connected to the lower part of the spindle 31 rotates.

Even when the polishing portion 12 is stroked up and down by the drive of the feed motor 16, the inner side 33a of the magnet coupling 33 is provided long on the outer peripheral surface of the small diameter portion 31b in the Z direction. The state in which the side 33a and the outer side 33b face each other is maintained. Therefore, the polishing tool 35 can be rotated regardless of the feed amount when the polishing portion 12 is moved downward. Since it is offset transmission, it is possible to arrange a rotary joint or the like.

As a result, by suppressing the tilt of the spindle 31, the tilt of the polishing tool 35 can be suppressed, and the object to be polished can be polished flat with high accuracy.

Specifically, the rotary motor 13, which is a heavy object, can be arranged at a position away from the polishing portion 12. As a result, the weight of the rotary motor 13 does not generate a force that tilts the polishing portion 12 in the XY direction, so that no moment is applied to the guide portion 32d and the linear motion guide 25, and energy loss is reduced. Further, since it is not necessary to use a cable for the rotation of the spindle 31, the risk of cable disconnection is reduced.

Further, the tension by the belt 41 is received by the bearing 24, and the rotational force is transmitted from the rotary motor 13 to the spindle 31 by the magnet coupling 33 in a non-contact manner. Therefore, no tension is applied to the bearings 32b and 32c that connect the spindle 31 to the housing 32, and the bearings 32b and 32c are in a moment-free state.

As a result, the rotary motor 13 transmits the driving force to the pulleys 14 and 15 in a state where the rotary motor 13 is arranged apart from the spindle 31 so as to be non-contact, and the rotary motor 13 is transmitted to the spindle 31 via the magnet coupling 33. A driving force can be applied to rotate the spindle 31.

The present invention is not limited to the above embodiment, and can be appropriately modified without departing from the spirit. For example, in order to guide the movement of the housing 32 in the Z direction, the concave guide portion 32d and the convex linear motion guide 25 have been described, but these guides guide the movement in the Z direction. The shape does not matter as long as it is a thing.

Further, although the outer side 33b of the magnet coupling 33 has been described as being arranged on the inner peripheral surface of the protruding portion 14b of the first pulley, not only the protruding portion 14b of the first pulley but also the holes are formed. It may be provided at any position on the wall surface including the formed protruding portion 14b.

1 Polishing device 11 Base 12 Polishing part 13 Rotating motor 14 First pulley 14a Pulley tooth tip circle 14b Protruding part 15 Second pulley 16 Feed motor 17 Ball screw part 17a Ball screw 17b Nut 21 Top plate 22 Leg 23 Hole 24 Bearing 25 Linear guide 31 Spindle 31a Large diameter part 31b Small diameter part 32 Housing 32a Housing body 32b, 32c Bearing 32d Guide part 32e Protrusion part 33 Magnet coupling 33a Inner side 33b Outer side 34 Cutting liquid supply part 35 Polishing tool 41 Belt

Claims (1)

A spindle having a columnar small-diameter portion and a columnar large-diameter portion provided below the small-diameter portion, and a polishing tool connected to the lower portion of the large-diameter portion .
A pulley arranged so as to surround the small diameter portion of the spindle on the inner peripheral side,
A magnet coupling having an inner side provided long in the axial direction on the outer peripheral surface of the small diameter portion of the spindle and an outer side provided on the inner peripheral surface of the pulley.
A rotary motor, which is arranged away from the spindle so as to be non-contact with the spindle, is provided.
The magnet coupling can maintain a state in which the inner side and the outer side face each other even when the spindle provided with the inner side operates in the axial direction.
A polishing device in which the rotary motor transmits a driving force to the pulley to rotate the outer side of the magnet coupling, so that the inner side facing the outer side receives the rotational force to rotate the spindle.

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