JP7066302B2 - 高光電変換率を有する薄膜太陽電池及びその製造プロセス - Google Patents
高光電変換率を有する薄膜太陽電池及びその製造プロセス Download PDFInfo
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Description
透明基板を提供し、表示モジュールに向かう透明基板の一方側に、表示領域と非表示領域の透明前面電極を成膜するステップS1と、
前記透明前面電極上に、表示領域と非表示領域の光吸収層を化学気相堆積で成膜するステップS2と、
前記光吸収層上に表示領域と非表示領域の透明裏面電極を成膜するステップS3と、
洗浄後、透明裏面電極、光吸収層、透明前面電極を順次パターニングしてエッチングするステップS4と、
透明絶縁層にフォトレジストを塗布して、露光して、パターンを現像するステップS5と、
前記透明裏面電極上に、非表示領域の金属層を成膜してエッチングし、金属裏面電極を形成するステップS6と、を含むことを特徴とする。
1、表示モジュールの表示領域に対応する前面電極と裏面電極の両方を透明にすることによって、表示モジュールに向かう一方側と表示モジュールとは反対側で同時にさまざまな光源(即ち、表示モジュールに向かう一方側では、表示モジュールからの光を吸収し、表示モジュールとは反対側では、自然光又はほかの光源を吸収する)を両方向に吸収することができ、特に弱光条件では、薄膜太陽電池の変換効率を高める。
2、前面電極及び裏面電極がともに透明であるため、表示領域の薄膜太陽電池の配線も透明になり、それによって、表示領域の透過率を高め、ある程度で干渉縞による画面への影響を低減させ、表示モジュールの画質を向上させることもできる。
図1-図5に示されるように、本発明の実施例1は、高光電変換率を有する薄膜太陽電池を提供し、表示モジュールの表示面側に設置され、最終製品として提供するか、又は電池として有効な電源を提供する。表示モジュールは、中央表示領域と、表示領域を取り囲んで設置される非表示領域と、を備え、前記薄膜太陽電池は、表示モジュールの表示領域に形成されてもよく、表示モジュールの非表示領域に形成されてもよく、表示モジュールの表示領域と非表示領域の両方に形成されてもよい。前記薄膜太陽電池が表示モジュールの表示領域に形成される場合、前記薄膜太陽電池は、間隔を空けて設置される幅50um未満の複数のものを線状にすることで、肉眼で視認不能にすることができ(図1には、表示領域におけるラインが明瞭さのために過ぎず、視認可能な電池の幅ではない)、それによって、人眼による表示モジュールの表示領域の画像の観察に影響を与えない。
図6に示されるように、本発明の実施例2は、高光変換効率を有する薄膜太陽電池の製造プロセスを提供し、ステップS1~ステップS6を含む。
-3000オングストロームである。好ましくは、235℃以上の温度を用いてアニーリングしてITO抵抗を低減させる。AZOの場合は、低濃度HCl又はアルカリ性物質でテクスチャリングして凹凸のある平面を形成することができる。それによって、太陽エネルギーの反射光の吸収を高める。
Claims (7)
- 0%より高い光電変換率を有する薄膜太陽電池であって、表示モジュールの表示面側に設置されて、前記表示モジュールは、中央表示領域と、表示領域を取り囲んで設置される非表示領域と、を備え、
前記薄膜太陽電池は、透明基板と、前記透明基板に設けられ、前記表示モジュールに向かって配置される太陽光ユニットを備え、グリッド線のように設置されており
前記表示領域に設置される前記太陽光ユニットは、前記透明基板上に設けられ、自然光を吸収するように配置される透明前面電極、前記透明前面電極上に設けられる光吸収層及び前記光吸収層上に設けられ、表示モジュールからの光を吸収するように配置される透明裏面電極を備え、
前記非表示領域に設けられる太陽光ユニットは、前記透明基板上に設けられる透明前面電極、前記透明前面電極上に設けられる光吸収層及び前記光吸収層上に設けられる金属裏面電極と、透明絶縁層を備え、
前記金属裏面電極は、透明裏面電極と、前記透明裏面電極上に設置される金属層とを備え、
前記透明絶縁層は、少なくとも前記透明裏面電極のエッジと前記金属層のエッジとの間に形成される
ことを特徴とする0%より高い光電変換率を有する薄膜太陽電池。 - 前記透明裏面電極の厚さは50nm-1000nmである、
ことを特徴とする請求項1に記載の0%より高い高光電変換率を有する薄膜太陽電池。 - 前記太陽光ユニットには、金属補助電極がさらに設けられ、前記金属補助電極は前記透明前面電極に接触して接続され、且つ、前記金属補助電極は、透明絶縁層を介して金属裏面電極と離間して設置される、
ことを特徴とする請求項1に記載の0%より高い高光電変換率を有する薄膜太陽電池。 - 透明基板を提供し、表示モジュールに向かう前記透明基板の一方側に、表示領域と非表示領域の透明前面電極を成膜するステップS1と、
前記透明前面電極上に、前記表示領域と前記非表示領域の光吸収層を化学気相堆積で成膜するステップS2と、
前記光吸収層上に前記表示領域と前記非表示領域の透明裏面電極を成膜するステップS3と、
洗浄後、前記透明裏面電極、前記光吸収層、及び前記透明前面電極を順次パターニングしてエッチングするステップS4と、
前記透明絶縁層にフォトレジストを塗布して、露光して、パターンを現像するステップS5と、
前記透明裏面電極上に、前記非表示領域の前記金属層を成膜してエッチングし、前記金属裏面電極を形成するステップS6と、
を含むことを特徴とする請求項3に記載の0%より高い高光電変換率を有する薄膜太陽電池の製造プロセス。 - ステップS5では、前記透明絶縁層は、少なくとも部分的に前記非表示領域の前記透明裏面電極の上面に形成され、前記金属層のエッジ部分を前記透明絶縁層を介して前記透明裏面電極のエッジ部分と隔離する、
ことを特徴とする請求項4に記載の0%より高い高光電変換率を有する薄膜太陽電池の製造プロセス。 - ステップS1の前に、前記透明基板上に前記金属補助電極を成膜してエッチングするステップをさらに含むか、又は、ステップS1とステップS2との間に、前記透明前面電極と前記透明基板上に前記金属補助電極を成膜してエッチングするステップをさらに含む、
ことを特徴とする請求項4に記載の0%より高い高光電変換率を有する薄膜太陽電池の製造プロセス。 - 前記非表示領域の前記金属裏面電極上に保護層を成膜してエッチングするステップS7をさらに含む、
ことを特徴とする請求項4に記載の0%より高い高光電変換率を有する薄膜太陽電池の製造プロセス。
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Application Number | Priority Date | Filing Date | Title |
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CN201910931288.7A CN110518079B (zh) | 2019-09-29 | 2019-09-29 | 一种光电转换率高的薄膜光伏电池及其制备工艺 |
CN201910931288.7 | 2019-09-29 | ||
PCT/CN2020/077010 WO2021056962A1 (zh) | 2019-09-29 | 2020-02-27 | 一种光电转换率高的薄膜光伏电池及其制备工艺 |
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JP7066302B2 true JP7066302B2 (ja) | 2022-05-13 |
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CN111081152A (zh) * | 2020-01-08 | 2020-04-28 | 信利半导体有限公司 | 一种集成薄膜太阳能电池的显示模组及其制备方法 |
WO2022054150A1 (ja) * | 2020-09-09 | 2022-03-17 | 株式会社 東芝 | 透明電極、透明電極の製造方法、および電子デバイス |
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