JP7052024B2 - 非対称構造の検出及び寸法計測 - Google Patents

非対称構造の検出及び寸法計測 Download PDF

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JP7052024B2
JP7052024B2 JP2020517572A JP2020517572A JP7052024B2 JP 7052024 B2 JP7052024 B2 JP 7052024B2 JP 2020517572 A JP2020517572 A JP 2020517572A JP 2020517572 A JP2020517572 A JP 2020517572A JP 7052024 B2 JP7052024 B2 JP 7052024B2
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spectral response
value
parameters
spectrum
measurement
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JP2020535658A5 (OSRAM
JP2020535658A (ja
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フィリップ アール アトキンス
チー ダイ
ライ－クワン リッチ リー
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KLA Corp
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KLA Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/70625—Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2020517572A 2017-09-27 2018-09-25 非対称構造の検出及び寸法計測 Active JP7052024B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762564119P 2017-09-27 2017-09-27
US62/564,119 2017-09-27
US16/138,813 US10732515B2 (en) 2017-09-27 2018-09-21 Detection and measurement of dimensions of asymmetric structures
US16/138,813 2018-09-21
PCT/US2018/052507 WO2019067375A1 (en) 2017-09-27 2018-09-25 DETECTION AND MEASUREMENT OF DIMENSIONS OF ASYMMETRIC STRUCTURES

Publications (3)

Publication Number Publication Date
JP2020535658A JP2020535658A (ja) 2020-12-03
JP2020535658A5 JP2020535658A5 (OSRAM) 2021-11-04
JP7052024B2 true JP7052024B2 (ja) 2022-04-11

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US (1) US10732515B2 (OSRAM)
JP (1) JP7052024B2 (OSRAM)
KR (1) KR102431942B1 (OSRAM)
CN (1) CN111095510B (OSRAM)
DE (1) DE112018005533T5 (OSRAM)
TW (1) TWI771499B (OSRAM)
WO (1) WO2019067375A1 (OSRAM)

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US11356851B2 (en) * 2019-12-03 2022-06-07 Harris Global Communications, Inc. Communications system having multiple carriers with selectively transmitted real information and fake information and associated methods
CN111667111B (zh) * 2020-06-02 2023-04-07 上海哥瑞利软件股份有限公司 一种集成电路晶圆制造中的良率预测方法
US11530913B2 (en) * 2020-09-24 2022-12-20 Kla Corporation Methods and systems for determining quality of semiconductor measurements
WO2022146543A2 (en) * 2020-10-30 2022-07-07 The Board Of Trustees Of The Leland Stanford Junior University. Metasurface polarization filtering for characterization of samples
WO2022125215A2 (en) * 2020-10-30 2022-06-16 The Board Of Trustees Of The Leland Stanford Junior University Matrix-based characterization and measurements for semiconductor thin-film material
US12013355B2 (en) * 2020-12-17 2024-06-18 Kla Corporation Methods and systems for compact, small spot size soft x-ray scatterometry
CN113029024B (zh) * 2021-03-01 2021-11-16 长鑫存储技术有限公司 半导体结构的测量方法及设备
CN113035735B (zh) * 2021-03-01 2022-05-27 长鑫存储技术有限公司 半导体结构的测量方法、系统、介质和电子设备
US12062583B2 (en) * 2021-03-11 2024-08-13 Applied Materials Israel Ltd. Optical metrology models for in-line film thickness measurements
CN113219792B (zh) * 2021-04-29 2022-07-19 华中科技大学 一种快照式套刻误差测量装置及其测量方法
CN113834515B (zh) * 2021-08-18 2024-04-16 之江实验室 一种高时空分辨双光子激光直写原位红外探测装置与方法
US20240159656A1 (en) * 2022-11-11 2024-05-16 Onto Innovation Inc. Combined modeling and machine learning in optical metrology
KR20250112148A (ko) 2024-01-16 2025-07-23 연세대학교 산학협력단 광학 측정 시스템에서 시료의 파라미터를 예측하는 방법 및 컴퓨터 프로그램, 그리고 이를 구현하기 위한 컴퓨터 프로그램이 저장된 기록 매체

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Also Published As

Publication number Publication date
KR20200047749A (ko) 2020-05-07
TWI771499B (zh) 2022-07-21
CN111095510B (zh) 2021-03-12
KR102431942B1 (ko) 2022-08-11
US10732515B2 (en) 2020-08-04
US20190094711A1 (en) 2019-03-28
DE112018005533T5 (de) 2020-08-20
JP2020535658A (ja) 2020-12-03
TW201920947A (zh) 2019-06-01
CN111095510A (zh) 2020-05-01
WO2019067375A1 (en) 2019-04-04

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