JP7030696B2 - 中性種に対する反応性イオンの比を増大させる方法 - Google Patents
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Description
Claims (15)
- 中性種に対する反応性イオンの比を増大させる方法であって、該方法が、
第1のガスを供給する第1のガス入口を有するプラズマ源室と、このプラズマ源室に結合された堆積室であって、この堆積室内に配置された基板に近接する領域にポイントオブユース(POU)ガスを供給する第2のガス入口及び第3のガス入口を有する当該堆積室とを具える処理装置を設けるステップであって、前記プラズマ源室は前記堆積室内の前記基板に対向する位置に設けられ、前記POUガスは前記第1のガスと異なり、前記POUガスは、前記第2のガス入口から及び前記第3のガス入口から、前記プラズマ源室を基準として、前記第1のガス入口の反対側に供給され、前記POUガスは、前記第2のガス入口から及び前記第3のガス入口から、前記基板に対して直交する同じ方向に、供給される、ステップと、
前記基板に供給するためのイオンビームを発生させるステップと、
前記堆積室内で前記基板に近接する領域における圧力を調整して、前記イオンビームを前記基板に供給する際に前記基板に衝突させるために存在する反応性イオンの量を増大させるようにするステップであって、前記圧力は、前記堆積室と流体連結する堆積室ポンプ及び前記プラズマ源室と流体連結するプラズマ源室ポンプの各々により、調整することができる、ステップと
を具えている方法。 - 請求項1に記載の方法において、この方法が更に、前記堆積室と前記プラズマ源室との間の圧力勾配を高めるステップを具えている方法。
- 請求項1に記載の方法において、この方法が更に、前記堆積室内で前記基板に近接する前記領域における前記圧力を、前記第1のガス入口のガス流量と、前記第2のガス入口のガス流量と、前記第3のガス入口のガス流量と、前記基板及び前記プラズマ源室間の距離とのうちの少なくとも1つを調整することにより増大させるステップを具えている方法。
- 請求項3に記載の方法において、この方法が更に、前記堆積室内で前記基板に近接する前記領域における前記圧力を、前記基板及び前記プラズマ源室間の距離を減少させることにより増大させるステップを具えている方法。
- 請求項3に記載の方法において、この方法が更に、制御装置を用いて、前記第1のガス入口のガス流量と、前記第2のガス入口のガス流量と、前記第3のガス入口のガス流量とを独立して制御するステップを具えている方法。
- 請求項3に記載の方法において、この方法が更に、前記第2のガス入口及び前記第3のガス入口を介して前記堆積室に反応ガスを供給するステップを具えている方法。
- 請求項1に記載の方法において、この方法が更に、前記堆積室内で前記基板に近接する前記領域における前記圧力を、前記堆積室ポンプのポンプ速度又は前記プラズマ源室ポンプのポンプ速度を調整することにより増大させるステップを具えている方法。
- 請求項1に記載の方法において、この方法が更に、前記第1のガス入口を介して、前記プラズマ源室に不活性ガスを導入するステップを具えている方法。
- 請求項1に記載の方法において、この方法が更に、前記堆積室内で前記基板に近接する前記領域における前記圧力を増大させることにより前記イオンビームの中性種を減少させるステップを具えている方法。
- 請求項9に記載の方法において、この方法が更に、前記中性種に対する反応性イオンの量の比を増大させるステップを具えている方法。
- 請求項1に記載の方法において、この方法が更に、前記イオンビームを用いて前記基板上にフィルム層を形成するステップを具えている方法。
- 中性種に対する反応性イオンの比を増大させる方法であって、該方法が、
第1のガスを供給する第1のガス入口を有するプラズマ源室と、このプラズマ源室に結合された堆積室であって、この堆積室内に配置された基板に近接する領域にポイントオブユース(POU)ガスを供給する第2のガス入口及び第3のガス入口を有する当該堆積室とを具える処理装置を設けるステップであって、前記プラズマ源室は前記堆積室内の前記基板に対向する位置に設けられ、前記POUガスは前記第1のガスと異なり、前記POUガスは、前記第2のガス入口から及び前記第3のガス入口から、前記プラズマ源室を基準として、前記第1のガス入口の反対側に供給され、前記POUガスは、前記第2のガス入口から及び前記第3のガス入口から、前記基板に対して直交する同じ方向に、供給される、ステップと、
前記堆積室内で前記基板に近接する領域における圧力を増大させて、イオンビームを前記基板に供給する際に前記基板に衝突させるために存在する反応性イオンの量を増大させ、この場合、前記圧力は、前記堆積室と流体連結する堆積室ポンプのポンプ速度と、前記プラズマ源室と流体連結するプラズマ源室ポンプのポンプ速度と、前記基板及び前記プラズマ源室間の距離との各々により増大することができるステップと、
前記基板に供給するための前記イオンビームを発生させるステップと
を具えている方法。 - 請求項12に記載の方法において、この方法が更に、前記堆積室と前記プラズマ源室との間の圧力勾配を増大させることにより、前記イオンビームを前記基板に供給する際に存在する中性種の量を減少させるステップを具えている方法。
- 請求項12に記載の方法において、この方法が更に、前記基板と前記プラズマ源室との間の前記距離を減少させることにより、前記堆積室内で前記基板に近接する前記領域における前記圧力を増大させるステップを具えている方法。
- 請求項12に記載の方法において、この方法が更に、前記プラズマ源室の第1のガス入口のガス流量又は前記堆積室の少なくとも1つのガス入口のガス流量を調整することにより、前記堆積室内で前記基板に近接する前記領域における前記圧力を増大させるステップを具えている方法。
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US14/976,675 US10113229B2 (en) | 2015-12-21 | 2015-12-21 | Techniques for controlling ion/neutral ratio of a plasma source |
PCT/US2016/063840 WO2017112352A1 (en) | 2015-12-21 | 2016-11-28 | Techniques for controlling ion/neutral ratio of a plasma source |
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US20140038393A1 (en) | 2012-07-31 | 2014-02-06 | Varian Semiconductor Equipment Associates, Inc. | Method and system for ion-assisted processing |
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