JP7030655B2 - 流体システム - Google Patents
流体システム Download PDFInfo
- Publication number
- JP7030655B2 JP7030655B2 JP2018158969A JP2018158969A JP7030655B2 JP 7030655 B2 JP7030655 B2 JP 7030655B2 JP 2018158969 A JP2018158969 A JP 2018158969A JP 2018158969 A JP2018158969 A JP 2018158969A JP 7030655 B2 JP7030655 B2 JP 7030655B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- hole
- outlet
- flow path
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012530 fluid Substances 0.000 title claims description 222
- 230000032258 transport Effects 0.000 claims description 39
- 230000006698 induction Effects 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 17
- 230000000903 blocking effect Effects 0.000 claims description 16
- 239000000919 ceramic Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 4
- 239000000969 carrier Substances 0.000 claims 1
- 230000010354 integration Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 18
- 238000007667 floating Methods 0.000 description 13
- 239000007789 gas Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000011017 operating method Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B7/00—Piston machines or pumps characterised by having positively-driven valving
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/08—Actuation of distribution members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW106133652 | 2017-09-29 | ||
TW106133652A TWI654375B (zh) | 2017-09-29 | 2017-09-29 | 流體系統 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019063981A JP2019063981A (ja) | 2019-04-25 |
JP7030655B2 true JP7030655B2 (ja) | 2022-03-07 |
Family
ID=63371552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018158969A Active JP7030655B2 (ja) | 2017-09-29 | 2018-08-28 | 流体システム |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP3462021A1 (zh) |
JP (1) | JP7030655B2 (zh) |
TW (1) | TWI654375B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI653395B (zh) * | 2017-09-29 | 2019-03-11 | 研能科技股份有限公司 | 流體系統 |
EP4183625A1 (en) * | 2021-11-22 | 2023-05-24 | Fico Cables Lda | Pump valve arrangement |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4159016B2 (ja) | 2000-08-04 | 2008-10-01 | 株式会社リコー | インクジェット記録ヘッド及びインクジェット記録装置 |
JP4403000B2 (ja) | 2004-03-30 | 2010-01-20 | Hoya株式会社 | マイクロチップ及びマイクロポンプ |
WO2013168551A1 (ja) | 2012-05-09 | 2013-11-14 | 株式会社村田製作所 | 冷却装置、加熱冷却装置 |
JP5770391B2 (ja) | 2012-12-21 | 2015-08-26 | フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー.ファオ | 安全弁装置を含むポンプ装置 |
WO2016178395A1 (ja) | 2015-05-01 | 2016-11-10 | 株式会社朝日Fr研究所 | チェックバルブ及びこれを用いたマイクロ化学チップ |
WO2018116820A1 (ja) | 2016-12-21 | 2018-06-28 | セイコーエプソン株式会社 | Memsデバイス、液体噴射ヘッド、液体噴射装置、memsデバイスの製造方法、液体噴射ヘッドの製造方法、及び、液体噴射装置の製造方法 |
JP6936195B2 (ja) | 2017-08-31 | 2021-09-15 | 研能科技股▲ふん▼有限公司 | 気体輸送装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5757400A (en) | 1996-02-01 | 1998-05-26 | Spectra, Inc. | High resolution matrix ink jet arrangement |
EP0961062B1 (en) | 1997-12-12 | 2010-11-03 | SMC Kabushiki Kaisha | Piezoelectric valve |
US20040003786A1 (en) | 2002-06-18 | 2004-01-08 | Gatecliff George W. | Piezoelectric valve actuation |
JP4034169B2 (ja) * | 2002-11-05 | 2008-01-16 | 株式会社エヌ・ティ・ティ・ドコモ | 移動通信システム、無線制御装置、基地局及び通信方法 |
JP4634085B2 (ja) | 2004-07-15 | 2011-02-16 | 日本電産サンキョー株式会社 | 多チャンネルポンプ、燃料電池及びそれらの制御方法 |
EP2542809A1 (en) * | 2010-03-05 | 2013-01-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Valve, layer structure comprising a first and a second valve, micropump and method of producing a valve |
JP5776793B2 (ja) * | 2011-12-09 | 2015-09-09 | 株式会社村田製作所 | 気体制御装置 |
TWI599309B (zh) * | 2016-11-24 | 2017-09-11 | 研能科技股份有限公司 | 氣冷散熱裝置 |
TWM547870U (zh) | 2017-07-03 | 2017-09-01 | Microjet Technology Co Ltd | 鞋用氣壓固定裝置 |
TWM556293U (zh) | 2017-09-29 | 2018-03-01 | Microjet Technology Co Ltd | 流體系統 |
-
2017
- 2017-09-29 TW TW106133652A patent/TWI654375B/zh active
-
2018
- 2018-08-23 EP EP18190437.6A patent/EP3462021A1/en not_active Withdrawn
- 2018-08-28 JP JP2018158969A patent/JP7030655B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4159016B2 (ja) | 2000-08-04 | 2008-10-01 | 株式会社リコー | インクジェット記録ヘッド及びインクジェット記録装置 |
JP4403000B2 (ja) | 2004-03-30 | 2010-01-20 | Hoya株式会社 | マイクロチップ及びマイクロポンプ |
WO2013168551A1 (ja) | 2012-05-09 | 2013-11-14 | 株式会社村田製作所 | 冷却装置、加熱冷却装置 |
JP5770391B2 (ja) | 2012-12-21 | 2015-08-26 | フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー.ファオ | 安全弁装置を含むポンプ装置 |
WO2016178395A1 (ja) | 2015-05-01 | 2016-11-10 | 株式会社朝日Fr研究所 | チェックバルブ及びこれを用いたマイクロ化学チップ |
WO2018116820A1 (ja) | 2016-12-21 | 2018-06-28 | セイコーエプソン株式会社 | Memsデバイス、液体噴射ヘッド、液体噴射装置、memsデバイスの製造方法、液体噴射ヘッドの製造方法、及び、液体噴射装置の製造方法 |
JP6936195B2 (ja) | 2017-08-31 | 2021-09-15 | 研能科技股▲ふん▼有限公司 | 気体輸送装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI654375B (zh) | 2019-03-21 |
EP3462021A1 (en) | 2019-04-03 |
TW201915332A (zh) | 2019-04-16 |
JP2019063981A (ja) | 2019-04-25 |
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Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210325 |
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