EP3462021A1 - Fluid system - Google Patents

Fluid system Download PDF

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Publication number
EP3462021A1
EP3462021A1 EP18190437.6A EP18190437A EP3462021A1 EP 3462021 A1 EP3462021 A1 EP 3462021A1 EP 18190437 A EP18190437 A EP 18190437A EP 3462021 A1 EP3462021 A1 EP 3462021A1
Authority
EP
European Patent Office
Prior art keywords
fluid
outlet
branch channels
active region
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP18190437.6A
Other languages
German (de)
English (en)
French (fr)
Inventor
Hao-Jan Mou
Chi-Feng Huang
Yung-Lung Han
Chang-Yen Tsai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microjet Technology Co Ltd
Original Assignee
Microjet Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microjet Technology Co Ltd filed Critical Microjet Technology Co Ltd
Publication of EP3462021A1 publication Critical patent/EP3462021A1/en
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/08—Actuation of distribution members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves

Definitions

  • the present disclosure relates to a fluid system, and more particularly to a miniature integrated fluid system.
  • the fluid transportation devices are important components that are used in, for example micro pumps, micro atomizers, print heads or industrial printers. Therefore, how to utilize an innovative structure to break through the bottleneck of the prior art has become an important part of development.
  • fluid transportation devices are gradually popular in industrial applications, biomedical applications, medical care applications, electronic cooling applications and so on, or even the most popular wearable devices. It is obvious that the fluid transportation devices gradually tend to miniaturize the structure and maximize the flow rate thereof.
  • the miniature fluid transportation device is capable of transferring gas continuously, it is difficult to improve the miniature gas transportation device to increase the amount of the transportation when it comes to its miniature chambers or flow channels with limited volume which have more design requirements.
  • the fluid system includes a fluid active region, a fluid channel, a convergence chamber, a sensor and a plurality of valves.
  • the valves may be active valves or passive valves.
  • the fluid active region includes one or a plurality of fluid-guiding units. Each fluid-guiding unit has an outlet aperture.
  • the fluid channel is in communication with the outlet apertures of the flow-guiding units of the fluid active region.
  • the fluid channel includes a plurality of branch channels.
  • the fluid discharged from the fluid active region is split by the branch channels.
  • the convergence chamber is in communication with the fluid channel for allowing the fluid discharged from the fluid channel to be accumulated therein.
  • the sensor is disposed in the fluid channel for measuring the fluid within the fluid channel.
  • the valves are disposed in the corresponding branch channels. The fluid is discharged out through the branch channels by controlling open/closed states of the valves.
  • the valves are active valves.
  • the fluid system further includes a controller electrically connected to the valves to control the open/closed states of the valves.
  • the controller and the fluid-guiding units are packaged in a system-in-package manner as an integrated structure.
  • the fluid active region includes the fluid-guiding units.
  • the fluid-guiding units are connected to each other in a serial arrangement, in a parallel arrangement or in a serial-and-parallel arrangement.
  • the lengths and widths of the branch channels are preset according to the required amount or the flow rate of the fluid to be transported.
  • the branch channels are connected to each other in a serial arrangement, in a parallel arrangement or in a serial-and-parallel arrangement.
  • the fluid system of the present disclosure has miniature volume and is capable of acquiring required flow rate, pressure and amount of the fluid to be transported.
  • the present discourse provides a fluid system 100 including at least one fluid active region 10, at least one fluid-guiding unit 10a, at least one outlet aperture 160, at least one fluid channel 20, a plurality of branch channels 20a, 20b, 21a, 21b, 22a, 22b, at least one convergence chamber 30, at least one sensor 40, a plurality of valves 50, 50a, 50b, 50c and 50d, at least one base 51, at least one first passage 511, at least one second passage 512, at least one cavity 513, at least one first outlet 514, at least one second outlet 515, at least one piezoelectric actuator 52, at least one carrier plate 521, at least one piezoelectric ceramic plate 522, at least one linking bar 53 and at least one stopping part 531.
  • the number of the fluid active region 10, the fluid channel 20, the convergence chamber 30, the sensor 40, the base 51, the first passage 511, the second passage 512, the cavity 513, the first outlet 514, the second outlet 515, the piezoelectric actuator 52, the carrier plate 521, the piezoelectric ceramic plate 522, the linking bar 53 and the stopping part 531 is exemplified by one for each in the following embodiments but not limited thereto. It is noted that each of the fluid active region 10, the fluid channel 20, the convergence chamber 30, the sensor 40, the base 51, and the linking bar 53 can also be provided in plural numbers.
  • FIG. 1 schematically illustrates a fluid system according to an embodiment of the present disclosure.
  • the fluid system 100 includes a fluid active region 10, a fluid channel 20, a convergence chamber 30, a sensor 40, a plurality of valves 50a, 50b, 50c and 50d, and a controller 60.
  • the above components are packaged in a system-in-package manner on a substrate 11.
  • the fluid system 100 is produced by an integrated method.
  • the fluid active region 10 includes one or more fluid-guiding units 10a.
  • the fluid-guiding units 10a may be connected to each other in a serial arrangement, in a parallel arrangement or in a serial-and-parallel arrangement.
  • each fluid-guiding unit 10a When each fluid-guiding unit 10a is enabled, a pressure difference within the fluid-guiding unit 10a is formed, by which fluid (e.g., gas) is inhaled into the fluid-guiding unit 10a and pressurized to be discharged out through an outlet aperture 160 of the fluid-guiding unit 10a (see FIG. 3C ). Consequently, the fluid is transported through the fluid-guiding unit 10a.
  • fluid e.g., gas
  • the fluid active region 10 includes four fluid-guiding units 10a.
  • the four fluid-guiding units 10a are connected to each other in a serial-and-parallel arrangement.
  • the fluid channel 20 is in communication with the outlet apertures 160 of the fluid-guiding units 10a (see FIG. 3C ) to receive the fluid discharged from the fluid-guiding units 10a.
  • the structures, actions and dispositions of the fluid-guiding unit 10a and the fluid channel 20 will be described as follows.
  • the fluid channel 20 includes a plurality of branch channels 20a and 20b for splitting the fluid discharged from the fluid active region 10. Consequently, the required amount of the fluid to be transported is determined.
  • the branch channels 20a and 20b are exemplified in the above embodiment, but the number of the branch channels is not restricted.
  • the convergence chamber 30 is in communication with the branch channels 20a and 20b, and thus the convergence chamber 30 is in communication with the fluid channel 20.
  • the fluid may be transferred to and accumulated and stored in the convergence chamber 30.
  • the fluid accumulated and stored in the convergence chamber 30 is available for the fluid channel 20 so as to increase the amount of the fluid to be transported.
  • the sensor 40 is disposed in the fluid channel 20 for measuring the fluid within the fluid channel 20.
  • the fluid channel 20 includes a plurality of branch channels 20a and 20b. As shown in FIG. 1 , the branch channels 20a and 20b are connected to each other in a parallel arrangement, but not limited thereto. In some other embodiments, the branch channels 20a and 20b are connected to each other in a serial arrangement or in a serial-and-parallel arrangement.
  • the lengths and widths of the branch channels 20a and 20b are preset according to the required amount of the fluid to be transported. In other words, the flow rate and amount of the fluid to be transported are influenced by the lengths and widths of the branch channels 20a and 20b. That is, the lengths and widths of the branch channels 20a and 20b may be calculated in advance according to the required amount of the fluid to be transported.
  • the branch channel 20a further includes two sub-branch channels 21a and 22a (also referred as branch channels), and the branch channel 20b further includes two sub-branch channels 21b and 22b (also referred as branch channels).
  • the sub-branch channels 21a and 22a of the branch channel 20a are connected to each other in a serial arrangement, and so are the sub-branch channels 21b and 22b.
  • the sub-branch channels 21a and 22a of the branch channel 20a may also be connected to each other in a parallel arrangement or in a serial-and-parallel arrangement, and so are the sub-branch channels 21b and 22b.
  • the valves 50a, 50c, 50b and 50d may be active valves or passive valves.
  • the valves 50a, 50c, 50b and 50d are active valves, and the valves 50a, 50c, 50b and 50d are disposed in the sub-branch channels 21a, 22a, 21b and 22b, respectively.
  • the valves 50a, 50c, 50b and 50d are selectively in an open state or a closed state, so as to control the communication state of the sub-branch channels 21a, 22a, 21b and 22b.
  • the valve 50a is in the open state, the sub-branch channel 21a is opened to discharge the fluid to an output region A.
  • the controller 60 includes two conductive wires 610 and 620.
  • the conductive wire 610 is electrically connected to the control terminals of the valves 50a and 50d
  • the conductive wire 620 is electrically connected to the control terminals of the valves 50b and 50c.
  • the open/closed states of the valves 50a, 50c, 50b and 50d can be controlled by the controller 60, so that the communication states of the sub-branch channels 21a, 22a, 21b and 22b corresponding to the valves 50a, 50c, 50b and 50d are controlled by the controller 60 for allowing the fluid to be selectively transported to the output region A.
  • FIG. 2A is a schematic cross-sectional view illustrating a fluid-guiding unit of the fluid system according to the embodiment of the present disclosure.
  • the fluid-guiding unit 10a is a piezoelectric pump.
  • each fluid-guiding unit 10a includes an inlet plate 17, the substrate 11, a resonance plate 13, an actuating plate 14, a piezoelectric element 15 and an outlet plate 16, which are stacked on each other sequentially.
  • the inlet plate 17 has at least one inlet aperture 170.
  • the resonance plate 13 has a central aperture 130 and a movable part 131.
  • the movable part 131 is a flexible structure of the resonance plate 13 that is not attached and fixed on the substrate 11.
  • the central aperture 130 is formed in a middle region adjacent to the movable part 131.
  • a first chamber 12 is formed between the resonance plate 13 and the inlet plate 17.
  • the actuating plate 14 is a suspended structure having a suspension part 141, an outer frame part 142 and a plurality of vacant spaces 143.
  • the suspension part 141 of the actuating plate 14 is connected to the outer frame part 142 through a plurality of connecting parts (not shown), so that the suspension part 141 is suspended and elastically supported by the outer frame part 142.
  • the vacant spaces 143 are defined between the suspension part 141 and the outer frame part 142 and are disposed for allowing the fluid to flow therethrough.
  • the disposition, the types and the numbers of the suspension part 141, the outer frame part 142 and the vacant spaces 143 may be varied according to the practical requirements, but not limited thereto.
  • the actuating plate 14 may be made of a metallic film or a polysilicon film.
  • a gap g0 formed between the actuating plate 14 and the resonance plate 13 is defined as a second chamber 18.
  • the outlet plate 16 has an outlet aperture 160.
  • a third chamber 19 is formed between the actuating plate 14 and the outlet plate 16.
  • the substrate 11 of the fluid-guiding unit 10a further includes a driving circuit (not shown) electrically connected to the positive electrode and the negative electrode of the piezoelectric element 15 so as to provide a driving power to the piezoelectric element 15, but not limited thereto.
  • the driving circuit may be disposed at any position within the fluid-guiding unit 10a. The disposed position of the driving circuit may be varied according to practical requirements.
  • FIGS. 2B , 2C and 2D schematically illustrate the actions of the fluid-guiding unit of the fluid system as in FIG. 2A .
  • the fluid-guiding unit 10a is in a non-enabled state (i.e. in an initial state).
  • the piezoelectric element 15 is driven in response to an applied voltage, the piezoelectric element 15 undergoes a bending deformation to drive the actuating plate 14 to vibrate along a vertical direction in a reciprocating manner.
  • FIG. 2B As the suspension part 141 of the actuating plate 14 vibrates upwardly (i.e. away from the inlet plate 17), the volume of the second chamber 18 is enlarged and the pressure in the second chamber 18 is reduced.
  • the fluid is inhaled into the fluid-guiding unit 10a through the inlet aperture 170 of the inlet plate 17 in accordance with the external pressure, and is then converged into the first chamber 12. Then, the fluid is transported upwardly to flow into the second chamber 18 through the central aperture 130 of the resonance plate 13, which is spatially corresponding to the first chamber 12.
  • the movable part 131 of the resonance plate 13 is driven to vibrate upwardly (i.e. away from the inlet plate 17) in resonance with the vibration of the suspension part 141 of the actuating plate 14, and the suspension part 141 of the actuating plate 14 also vibrates downwardly (i.e. toward the inlet plate 17) at the same time.
  • the movable part 131 of the resonance plate 13 is attached to and abuts against the suspension part 141 of the actuating plate 14.
  • the communication space between the central aperture 130 of the resonance plate 13 and the second chamber 18 is closed.
  • the second chamber 18 is compressed to reduce the volume thereof and increase the pressure therein, and the volume of the third chamber 19 is enlarged and the pressure in the third chamber 19 is reduced.
  • the pressure gradient occurs to push the fluid in the second chamber 18 to move toward a peripheral portion of the second chamber 18, and to flow into the third chamber 19 through the vacant spaces 143 of the actuating plate 14.
  • the suspension part 141 of the actuating plate 14 vibrates downwardly (i.e. toward the inlet plate 17) and drives the movable part 131 of the resonance plate 13 to vibrate downwardly (i.e. toward the inlet plate 17), so as to further compress the first chamber 18.
  • most of the fluid is transported into the third chamber 19 and is temporarily stored in the third chamber 19.
  • the suspension part 141 of the actuating plate 14 vibrates upwardly (i.e. away from the inlet plate 17) to compress the volume of the third chamber 19, thereby reducing the volume of the third chamber 19 and increasing the pressure in the third chamber 19.
  • the fluid stored in the third chamber 19 is discharged out to an environment outside the fluid-guiding unit 10a through the outlet aperture 160 of the outlet plate 16 so as to accomplish a fluid transportation process.
  • FIGS. 2B , 2C and 2D demonstrate a complete cycle of the reciprocating vibration of the actuating plate 14.
  • the suspension part 141 of the actuating plate 14 and the movable part 131 of the resonance plate 13 perform the above actions repeatedly.
  • the vibration frequency of the resonance plate 13 along the vertical direction in the reciprocating manner may be identical to the vibration frequency of the actuating plate 14. That is, the resonance plate 13 and the actuating plate 14 can synchronously vibrate along the same direction. It is noted that numerous modifications and alterations of the actions of the fluid-guiding unit 10a may be made while retaining the teachings of the disclosure.
  • a pressure gradient is formed in the fluid channels of the fluid-guiding unit 10a to facilitate the fluid to flow at a high speed.
  • the fluid can be transported from an inhale end to a discharge end of the fluid-guiding unit 10a.
  • the fluid-guiding unit 10a still has the capability to discharge out the fluid while achieving the silent efficacy.
  • FIG. 3A schematically illustrates the fluid active region of the fluid system as shown in FIG. 1 .
  • the fluid active region 10 includes a plurality of fluid-guiding units 10a. The amount of the fluid to be discharged from the fluid active region 10 is adjusted according to the arrangement of the fluid-guiding units 10a.
  • the fluid-guiding units 10a are disposed on the substrate 11 and connected to each other in a serial-and-parallel arrangement.
  • FIG. 3B schematically illustrates a portion of the fluid active region of the fluid system, in which the fluid-guiding units are connected to each other in a serial arrangement.
  • FIG. 3C schematically illustrates a portion of the fluid active region of the fluid system, in which the fluid-guiding units are connected to each other in a parallel arrangement.
  • FIG. 3D schematically illustrates a portion of the fluid active region of the fluid system, in which the fluid-guiding units are connected to each other in a serial-and-parallel arrangement.
  • the fluid-guiding units 10a of the fluid active region 10 are connected to each other in a serial arrangement.
  • the fluid-guiding units 10a are connected to each other in series, the pressure of the fluid at the outlet apertures 160 of the fluid active region 10 is increased.
  • the fluid-guiding units 10a of the fluid active region 10 are connected to each other in a parallel arrangement. Since the fluid-guiding units 10a are connected to each other in parallel, the amount of the fluid to be discharged out from the outlet apertures 160 of the fluid active region 10 is increased.
  • the fluid-guiding units 10a of the fluid active region 10 are connected to each other in a serial-and-parallel arrangement. Consequently, the pressure of the fluid and the amount of the fluid to be discharged out from the fluid active region 10 are both increased.
  • FIG. 4 schematically illustrates a variant example of the fluid active region of the fluid system.
  • FIG. 5 schematically illustrates another variant example of the fluid active region of the fluid system.
  • the fluid-guiding units 10a of the fluid active region 10 are connected to each other in a ring-shaped arrangement so as to transport the fluid.
  • the fluid-guiding units 10a of the fluid active region 10 are connected to each other in a honeycomb arrangement.
  • the connections between the fluid-guiding units 10a of the fluid system 100 and the driving circuit may be varied, so that the application flexibility is enhanced.
  • the fluid system 100 can be applied to various electronic components, and the fluid-guiding units 10a of fluid system 100 may be enabled to transport gas simultaneously so as to meet the requirement of transporting the gas at a great amount.
  • two fluid-guiding units 10a may be independently controlled to be enabled or disabled. For example, one fluid-guiding unit 10a is enabled, and the other fluid-guiding unit 10a is disabled.
  • the two fluid-guiding units 10a are alternately enabled, but not limited thereto. Consequently, the purpose of transporting various amount of the fluid and the purpose of reducing the power consumption can be achieved.
  • FIGS. 6A and 6B are schematic cross-sectional views illustrating the actions of a valve of the fluid system according to a first aspect of the present disclosure.
  • the valve 50 includes a base 51, a piezoelectric actuator 52 and a linking bar 53.
  • the valve 50 is disposed in the sub-branch channel 21a.
  • the structures and actions of the valves 50 disposed in the sub-branch channels 22a, 21b and 22b are similar to the structure and the actions of the valve 50 disposed in the sub-branch channel 21a, and are not redundantly described herein.
  • the base 51 includes a first passage 511 and a second passage 512, which are in communication with the sub-branch channel 21a and are separated from each other by a partial structure of the base 51.
  • a cavity 513 is concavely formed on the top surface of the base 51.
  • the cavity 513 has a first outlet 514 and a second outlet 515.
  • the first outlet 514 is in communication with the first passage 511, and the second outlet 515 is in communication with the second passage 512.
  • the piezoelectric actuator 52 includes a carrier plate 521 and a piezoelectric ceramic plate 522.
  • the carrier plate 521 may be made of a flexible material.
  • the piezoelectric ceramic plate 522 is attached on a first surface of the carrier plate 521 and electrically connected to the controller 60.
  • the piezoelectric actuator 52 is located over and capped on the cavity 513.
  • a first end of the linking bar 53 is connected to a second surface of the carrier plate 521, and the linking bar 53 is inserted into the second outlet 515 and is movable within the second outlet 515 along a vertical direction.
  • a second end of the linking bar 53 is formed as a stopping part 531 to be used to close the second outlet 515. More specifically, a cross section of the stopping part 531 has a diameter larger than that of the second outlet 515, by which the communication between the second outlet 515 and the second passage 512 may be cut off.
  • the stopping part 531 may be a flat plate structure or a mushroom-shaped structure.
  • the linking bar 53 is in an initial position and in a normally open state that the stopping part 531a is separated from the second outlet 515. Meanwhile, a communication space is formed between the stopping part 531 and the second outlet 515 for allowing the second passage 512, the cavity 513 and the first passage 511 to be in fluid communication with each other and in fluid communication with the sub-branch channel 21a and allowing the fluid to flow therethrough.
  • the valve 50 is selectively enabled or disabled. When the valve 50 is disabled, the sub-branch channel 21a is maintained in the open state. When the valve 50 is enabled, the sub-branch channel 21a is in the closed state. In other words, by controlling a communication state of the second passage 512 of valve 50, the discharge of the fluid from the sub-branch channel 21a can be regulated.
  • FIGS. 7A and 7B are schematic cross-sectional views illustrating the actions of a valve used in the fluid system of according to a second aspect of the present disclosure.
  • the structure of the valve 50 is similar to that of FIGS. 6A and 6B .
  • the valve 50 is in a normally closed state when the valve 50 is not enabled.
  • FIG. 7A When the piezoelectric actuator 52 of the valve 50 is not enabled, the linking bar 53 is in an initial position and in a normally closed state. Meanwhile, the second outlet 515 is in contact with and entirely covered by the stopping part 531, thereby closing the second outlet 515. Since the second outlet 515 is closed by the stopping part 531, the fluid cannot be transported through the second outlet 515. Please refer to FIG. 7B .
  • the piezoelectric actuator 52 is enabled, the carrier plate 521 is driven to undergo downward bending deformation by the piezoelectric ceramic plate 522, so that the linking bar 53 is driven by the carrier plate 521 to move downwardly.
  • a communication space is formed between the stopping part 531 and the second outlet 515 for allowing the second passage 512, the cavity 513 and the first passage 511 to be in fluid communication with each other and in fluid communication with the sub-branch channel 21a and allowing the fluid to flow therethrough.
  • the valve 50 is selectively enabled or disabled. When the valve 50 is disabled, the sub-branch channel 21a is maintained in the closed state. When the valve 50 is enabled, the sub-branch channel 21a is in the open state. In other words, by controlling a communication state of the second passage 512 of the valve 50, the discharge of the fluid from the sub-branch channel 21a can be regulated.
  • the present disclosure provides the fluid system.
  • the at least one fluid-guiding unit is used for transporting the fluid to the convergence chamber.
  • the valves disposed in the branch channels are used to control and adjust the amount, flow rate and pressure of the fluid to be discharged from the fluid system.
  • the numbers, arrangements and driving methods of the at least one fluid-guiding unit and the branch channels may be flexibly varied according to the practical requirements.
  • the fluid system of the present disclosure can provide the efficacy of transporting a great amount of fluid in a high performance and high flexible manner according to various applied devices and required amount of fluid to be transported.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Micromachines (AREA)
EP18190437.6A 2017-09-29 2018-08-23 Fluid system Withdrawn EP3462021A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW106133652A TWI654375B (zh) 2017-09-29 2017-09-29 流體系統

Publications (1)

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EP3462021A1 true EP3462021A1 (en) 2019-04-03

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EP18190437.6A Withdrawn EP3462021A1 (en) 2017-09-29 2018-08-23 Fluid system

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EP (1) EP3462021A1 (zh)
JP (1) JP7030655B2 (zh)
TW (1) TWI654375B (zh)

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