JP7030331B2 - Ａｅセンサ素子及びａｅセンサ - Google Patents

Ａｅセンサ素子及びａｅセンサ Download PDF

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JP7030331B2
JP7030331B2 JP2018062008A JP2018062008A JP7030331B2 JP 7030331 B2 JP7030331 B2 JP 7030331B2 JP 2018062008 A JP2018062008 A JP 2018062008A JP 2018062008 A JP2018062008 A JP 2018062008A JP 7030331 B2 JP7030331 B2 JP 7030331B2
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sensor element
sensor
resonator
groove
case
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JP2019174254A (ja
JP2019174254A5 (enExample
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一夫 武藤
秀和 大西
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River Eletec Corp
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River Eletec Corp
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  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP2018062008A 2018-03-28 2018-03-28 Ａｅセンサ素子及びａｅセンサ Active JP7030331B2 (ja)

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JP2018062008A JP7030331B2 (ja) 2018-03-28 2018-03-28 Ａｅセンサ素子及びａｅセンサ

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JP2018062008A JP7030331B2 (ja) 2018-03-28 2018-03-28 Ａｅセンサ素子及びａｅセンサ

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JP2019174254A JP2019174254A (ja) 2019-10-10
JP2019174254A5 JP2019174254A5 (enExample) 2021-04-30
JP7030331B2 true JP7030331B2 (ja) 2022-03-07

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110793620B (zh) * 2019-11-28 2024-01-26 长安大学 一种噪声检测装置及检测方法
JP7508060B2 (ja) * 2020-02-07 2024-07-01 多摩川精機株式会社 Ａｅセンサ用音片アレイ配列構造、その配列構成方法、およびａｅセンサ
JP7557743B2 (ja) * 2021-04-09 2024-09-30 多摩川精機株式会社 Ａｅセンサ素子構造、ａｅセンサ用音片アレイ、およびａｅセンサ
JP7476149B2 (ja) 2021-09-14 2024-04-30 株式会社東芝 カンチレバーアレイ

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000046639A (ja) 1998-05-22 2000-02-18 Sumitomo Metal Ind Ltd 振動波検出方法及び装置
JP2004085419A (ja) 2002-08-28 2004-03-18 Matsushita Electric Ind Co Ltd 共振子、共振子アレイおよび音響センサ
JP2007303995A (ja) 2006-05-12 2007-11-22 Univ Of Tokyo 振動波検出方法及び装置
JP2008008683A (ja) 2006-06-27 2008-01-17 Univ Of Tokyo 振動波検出方法及び装置
JP2009165164A (ja) 1999-01-20 2009-07-23 Seiko Epson Corp 振動子及び振動子を搭載した電子機器
JP2011232264A (ja) 2010-04-29 2011-11-17 Seiko Epson Corp 圧電センサー、圧電センサー素子及び圧電振動片
JP2014240789A (ja) 2013-06-12 2014-12-25 ソニー株式会社 圧電デバイス及び電子機器
JP2017200014A (ja) 2016-04-26 2017-11-02 セイコーエプソン株式会社 振動片基板、振動片の製造方法、振動子、発振器、電子機器および移動体

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000046639A (ja) 1998-05-22 2000-02-18 Sumitomo Metal Ind Ltd 振動波検出方法及び装置
JP2009165164A (ja) 1999-01-20 2009-07-23 Seiko Epson Corp 振動子及び振動子を搭載した電子機器
JP2004085419A (ja) 2002-08-28 2004-03-18 Matsushita Electric Ind Co Ltd 共振子、共振子アレイおよび音響センサ
JP2007303995A (ja) 2006-05-12 2007-11-22 Univ Of Tokyo 振動波検出方法及び装置
JP2008008683A (ja) 2006-06-27 2008-01-17 Univ Of Tokyo 振動波検出方法及び装置
JP2011232264A (ja) 2010-04-29 2011-11-17 Seiko Epson Corp 圧電センサー、圧電センサー素子及び圧電振動片
JP2014240789A (ja) 2013-06-12 2014-12-25 ソニー株式会社 圧電デバイス及び電子機器
JP2017200014A (ja) 2016-04-26 2017-11-02 セイコーエプソン株式会社 振動片基板、振動片の製造方法、振動子、発振器、電子機器および移動体

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JP2019174254A (ja) 2019-10-10

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