JP7026822B2 - レーザ装置 - Google Patents
レーザ装置 Download PDFInfo
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- JP7026822B2 JP7026822B2 JP2020558078A JP2020558078A JP7026822B2 JP 7026822 B2 JP7026822 B2 JP 7026822B2 JP 2020558078 A JP2020558078 A JP 2020558078A JP 2020558078 A JP2020558078 A JP 2020558078A JP 7026822 B2 JP7026822 B2 JP 7026822B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
- H01S5/4037—Edge-emitting structures with active layers in more than one orientation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/035—Aligning the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/50—Amplifier structures not provided for in groups H01S5/02 - H01S5/30
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3598—Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
- H01S5/18394—Apertures, e.g. defined by the shape of the upper electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Semiconductor Lasers (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
Description
Claims (8)
- 対向して設けられた2の反射鏡を有し、前記2の反射鏡の間に1つの導波路が形成された光学素子と、
前記光学素子にレーザを照射するレーザ照射器と、
を備え、
前記光学素子は、前記レーザの少なくとも一部が前記2の反射鏡に順番に反射されて前記1つの導波路を進むように構成され、
前記光学素子は、前記レーザの一部を放射する出力面を有し、
前記レーザ照射器は、第1レーザを照射する第1照射部と、第2レーザを照射する第2照射部とを含む複数の照射部を有し、
前記第1照射部が前記光学素子の前記1つの導波路に前記第1レーザを照射する方向は、前記出力面の法線方向から見たときに、前記第2照射部が前記光学素子の前記1つの導波路に前記第2レーザを照射する方向と平行でなく、
前記出力面の前記法線方向から見たときに、前記1つの導波路において、前記第1レーザの進行方向は、前記第2レーザの進行方向と平行でなく、
前記出力面の前記法線方向から見たときに、前記第1レーザが前記出力面から放射される方向は、前記第2レーザが前記出力面から放射される方向と平行でない
レーザ装置。 - 前記出力面の法線方向から見たときに、前記第1レーザの光路は、前記第2レーザの光路と、前記1つの導波路において交差する
請求項1に記載のレーザ装置。 - 前記レーザ照射器は、
種光を生成するレーザ発振器と、
前記種光が入力され、前記複数の照射部のうち、前記種光を前記レーザとして前記光学素子に照射する照射部に前記種光を選択的に出力する光スイッチと
を備える
請求項1または2に記載のレーザ装置。 - 前記レーザ照射器は、
種光を生成する複数のレーザ発振器を備え、
前記複数のレーザ発振器の中から前記種光を生成するレーザ発振器を選択することで、前記光学素子に照射する前記レーザを選択する制御装置をさらに備える
請求項1または2に記載のレーザ装置。 - 前記光学素子は、前記2の反射鏡の間に、前記レーザを増幅する活性層を備える
請求項1から4のいずれか1項に記載のレーザ装置。 - 前記光学素子は、前記活性層を励起するための電極を備え、
前記出力面は、前記電極により複数に分割されている
請求項5に記載のレーザ装置。 - 前記光学素子は、前記レーザが照射される入力面を有し、
前記入力面は、前記出力面に平行な平面である
請求項1から6のいずれか1項に記載のレーザ装置。 - 前記出力面の法線方向から見たときに、入力面において、前記第1レーザの屈折する角度が、前記第2レーザの屈折する角度と異なる
請求項1から6のいずれか1項に記載のレーザ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018216796 | 2018-11-19 | ||
JP2018216796 | 2018-11-19 | ||
PCT/JP2019/026860 WO2020105216A1 (ja) | 2018-11-19 | 2019-07-05 | レーザ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020105216A1 JPWO2020105216A1 (ja) | 2021-09-27 |
JP7026822B2 true JP7026822B2 (ja) | 2022-02-28 |
Family
ID=70774185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020558078A Active JP7026822B2 (ja) | 2018-11-19 | 2019-07-05 | レーザ装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US12005518B2 (ja) |
EP (1) | EP3820005B1 (ja) |
JP (1) | JP7026822B2 (ja) |
WO (1) | WO2020105216A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005227324A (ja) | 2004-02-10 | 2005-08-25 | Matsushita Electric Ind Co Ltd | 表示素子および表示装置 |
JP2008004644A (ja) | 2006-06-20 | 2008-01-10 | Harison Toshiba Lighting Corp | 高輝度発光デバイス |
CN102545056A (zh) | 2012-02-02 | 2012-07-04 | 中国科学院上海微系统与信息技术研究所 | 一种表面发射太赫兹量子级联激光器及其制作方法 |
JP2013016591A (ja) | 2011-07-01 | 2013-01-24 | Denso Corp | 光偏向素子および光偏向モジュール |
JP2014145935A (ja) | 2013-01-29 | 2014-08-14 | Nippon Telegr & Teleph Corp <Ntt> | 波長選択スイッチ |
US8995038B1 (en) | 2010-07-06 | 2015-03-31 | Vescent Photonics, Inc. | Optical time delay control device |
JP2017157609A (ja) | 2016-02-29 | 2017-09-07 | 国立大学法人東京工業大学 | ビーム偏向デバイス |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4348075A (en) * | 1979-10-09 | 1982-09-07 | Westinghouse Electric Corp. | Bulk acoustic wave integrated optical deflector and monolithic A/D converter using such deflector |
-
2019
- 2019-07-05 EP EP19886598.2A patent/EP3820005B1/en active Active
- 2019-07-05 US US17/269,572 patent/US12005518B2/en active Active
- 2019-07-05 JP JP2020558078A patent/JP7026822B2/ja active Active
- 2019-07-05 WO PCT/JP2019/026860 patent/WO2020105216A1/ja unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005227324A (ja) | 2004-02-10 | 2005-08-25 | Matsushita Electric Ind Co Ltd | 表示素子および表示装置 |
JP2008004644A (ja) | 2006-06-20 | 2008-01-10 | Harison Toshiba Lighting Corp | 高輝度発光デバイス |
US8995038B1 (en) | 2010-07-06 | 2015-03-31 | Vescent Photonics, Inc. | Optical time delay control device |
JP2013016591A (ja) | 2011-07-01 | 2013-01-24 | Denso Corp | 光偏向素子および光偏向モジュール |
CN102545056A (zh) | 2012-02-02 | 2012-07-04 | 中国科学院上海微系统与信息技术研究所 | 一种表面发射太赫兹量子级联激光器及其制作方法 |
JP2014145935A (ja) | 2013-01-29 | 2014-08-14 | Nippon Telegr & Teleph Corp <Ntt> | 波長選択スイッチ |
JP2017157609A (ja) | 2016-02-29 | 2017-09-07 | 国立大学法人東京工業大学 | ビーム偏向デバイス |
Also Published As
Publication number | Publication date |
---|---|
WO2020105216A1 (ja) | 2020-05-28 |
US12005518B2 (en) | 2024-06-11 |
JPWO2020105216A1 (ja) | 2021-09-27 |
EP3820005B1 (en) | 2022-11-09 |
EP3820005A4 (en) | 2021-12-01 |
EP3820005A1 (en) | 2021-05-12 |
US20210308786A1 (en) | 2021-10-07 |
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