JP7018433B2 - モジュラー式紫外線パルスレーザ源 - Google Patents

モジュラー式紫外線パルスレーザ源 Download PDF

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JP7018433B2
JP7018433B2 JP2019511593A JP2019511593A JP7018433B2 JP 7018433 B2 JP7018433 B2 JP 7018433B2 JP 2019511593 A JP2019511593 A JP 2019511593A JP 2019511593 A JP2019511593 A JP 2019511593A JP 7018433 B2 JP7018433 B2 JP 7018433B2
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pulsed laser
laser emission
pulse
optical fiber
frequency conversion
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JP2019529973A5 (enExample
JP2019529973A (ja
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ラルフ クナッペ，
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コヒーレント カイザースラウテルン ゲーエムベーハー
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/355—Non-linear optics characterised by the materials used
    • G02F1/3551—Crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • G02F1/3505—Coatings; Housings; Supports

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
JP2019511593A 2016-08-25 2017-08-04 モジュラー式紫外線パルスレーザ源 Active JP7018433B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201662379639P 2016-08-25 2016-08-25
US62/379,639 2016-08-25
US15/664,176 US10520789B2 (en) 2016-08-25 2017-07-31 Modular ultraviolet pulsed laser-source
US15/664,176 2017-07-31
PCT/EP2017/069855 WO2018036792A1 (en) 2016-08-25 2017-08-04 Modular ultraviolet pulsed laser-source

Publications (3)

Publication Number Publication Date
JP2019529973A JP2019529973A (ja) 2019-10-17
JP2019529973A5 JP2019529973A5 (enExample) 2020-07-09
JP7018433B2 true JP7018433B2 (ja) 2022-02-10

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JP2019511593A Active JP7018433B2 (ja) 2016-08-25 2017-08-04 モジュラー式紫外線パルスレーザ源

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US (1) US10520789B2 (enExample)
EP (1) EP3504589B1 (enExample)
JP (1) JP7018433B2 (enExample)
KR (1) KR102332770B1 (enExample)
CN (1) CN109997075B (enExample)
WO (1) WO2018036792A1 (enExample)

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Publication number Priority date Publication date Assignee Title
WO2021052801A1 (en) * 2019-09-18 2021-03-25 Asml Netherlands B.V. Improved broadband radiation generation in hollow-core fibres
DE102019127422A1 (de) 2019-10-11 2021-04-15 Trumpf Laser Gmbh Vorrichtung und Verfahren zum Transport von gepulster Laserstrahlung mit einer Hohlkernlichtleitfaser
WO2022014039A1 (ja) * 2020-07-17 2022-01-20 日本電信電話株式会社 光照射システム
JPWO2024089777A1 (enExample) * 2022-10-25 2024-05-02
CN116598877B (zh) * 2023-07-14 2023-10-31 北京大学 真空紫外光源生成设备及应用系统
CN119726334B (zh) * 2025-02-26 2025-11-28 北京卓镭激光技术有限公司 一种大光斑紫外高功率皮秒激光器
CN120647134B (zh) * 2025-08-19 2025-10-21 长飞光纤光缆股份有限公司 空芯光纤内部气体调压装置及方法

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JP2011522288A (ja) 2008-05-30 2011-07-28 コーニング インコーポレイテッド フォトニックバンドギャップ光ファイバを用いるファイバ集合体
JP2011203321A (ja) 2010-03-24 2011-10-13 Olympus Corp 非線形光学装置、多光子顕微鏡および内視鏡
JP2014521219A (ja) 2011-07-11 2014-08-25 エコール ポリテクニク 増幅及び／又はスペクトル拡幅された２つの光学ビームのコヒーレント合成のためのデバイス及び受動的方法
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JP2001042369A (ja) 1999-07-27 2001-02-16 Ushio Sogo Gijutsu Kenkyusho:Kk 波長変換ユニット
JP2001242495A (ja) 2000-02-28 2001-09-07 Inst Of Physical & Chemical Res 短パルス・レーザー光のパルス幅圧縮方法
JP2002263877A (ja) 2001-03-09 2002-09-17 Toshiba Corp レーザ加工装置
JP2003042967A (ja) 2001-07-27 2003-02-13 Hitachi Ltd パターン欠陥検査装置
JP2007504499A (ja) 2003-09-05 2007-03-01 ライカ マイクロシステムス ツェーエムエス ゲーエムベーハー 複数の微細構造光学要素を有する光源
US20060209908A1 (en) 2003-10-24 2006-09-21 Nkt Research & Innovation A/S An Optical System For Providing Short Laser-Pulses
JP2006073970A (ja) 2004-09-06 2006-03-16 Cyber Laser Kk Ｃｗ深紫外線光源
JP2007256388A (ja) 2006-03-20 2007-10-04 Institute Of Physical & Chemical Research 短パルスレーザー光のパルス幅圧縮方法およびその装置ならびに中空導波路
JP2008096493A (ja) 2006-10-06 2008-04-24 Osaka Univ 光アナログ−ディジタル変換装置および方法
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JP2011522288A (ja) 2008-05-30 2011-07-28 コーニング インコーポレイテッド フォトニックバンドギャップ光ファイバを用いるファイバ集合体
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JP2014521219A (ja) 2011-07-11 2014-08-25 エコール ポリテクニク 増幅及び／又はスペクトル拡幅された２つの光学ビームのコヒーレント合成のためのデバイス及び受動的方法
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Publication number Publication date
US20180059508A1 (en) 2018-03-01
WO2018036792A1 (en) 2018-03-01
EP3504589A1 (en) 2019-07-03
EP3504589B1 (en) 2021-09-22
JP2019529973A (ja) 2019-10-17
KR102332770B1 (ko) 2021-11-30
CN109997075B (zh) 2023-03-14
KR20190039806A (ko) 2019-04-15
US10520789B2 (en) 2019-12-31
CN109997075A (zh) 2019-07-09

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