JP2019529973A5 - - Google Patents
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- Publication number
- JP2019529973A5 JP2019529973A5 JP2019511593A JP2019511593A JP2019529973A5 JP 2019529973 A5 JP2019529973 A5 JP 2019529973A5 JP 2019511593 A JP2019511593 A JP 2019511593A JP 2019511593 A JP2019511593 A JP 2019511593A JP 2019529973 A5 JP2019529973 A5 JP 2019529973A5
- Authority
- JP
- Japan
- Prior art keywords
- laser radiation
- pulsed laser
- frequency conversion
- conversion module
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000005855 radiation Effects 0.000 claims description 66
- 238000006243 chemical reaction Methods 0.000 claims description 30
- 239000013307 optical fiber Substances 0.000 claims description 23
- 239000013078 crystal Substances 0.000 claims description 19
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 claims description 7
- 230000006835 compression Effects 0.000 claims 6
- 238000007906 compression Methods 0.000 claims 6
- 239000000835 fiber Substances 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662379639P | 2016-08-25 | 2016-08-25 | |
| US62/379,639 | 2016-08-25 | ||
| US15/664,176 US10520789B2 (en) | 2016-08-25 | 2017-07-31 | Modular ultraviolet pulsed laser-source |
| US15/664,176 | 2017-07-31 | ||
| PCT/EP2017/069855 WO2018036792A1 (en) | 2016-08-25 | 2017-08-04 | Modular ultraviolet pulsed laser-source |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019529973A JP2019529973A (ja) | 2019-10-17 |
| JP2019529973A5 true JP2019529973A5 (enExample) | 2020-07-09 |
| JP7018433B2 JP7018433B2 (ja) | 2022-02-10 |
Family
ID=61242398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019511593A Active JP7018433B2 (ja) | 2016-08-25 | 2017-08-04 | モジュラー式紫外線パルスレーザ源 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10520789B2 (enExample) |
| EP (1) | EP3504589B1 (enExample) |
| JP (1) | JP7018433B2 (enExample) |
| KR (1) | KR102332770B1 (enExample) |
| CN (1) | CN109997075B (enExample) |
| WO (1) | WO2018036792A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021052801A1 (en) * | 2019-09-18 | 2021-03-25 | Asml Netherlands B.V. | Improved broadband radiation generation in hollow-core fibres |
| DE102019127422A1 (de) | 2019-10-11 | 2021-04-15 | Trumpf Laser Gmbh | Vorrichtung und Verfahren zum Transport von gepulster Laserstrahlung mit einer Hohlkernlichtleitfaser |
| WO2022014039A1 (ja) * | 2020-07-17 | 2022-01-20 | 日本電信電話株式会社 | 光照射システム |
| JPWO2024089777A1 (enExample) * | 2022-10-25 | 2024-05-02 | ||
| CN116598877B (zh) * | 2023-07-14 | 2023-10-31 | 北京大学 | 真空紫外光源生成设备及应用系统 |
| CN119726334B (zh) * | 2025-02-26 | 2025-11-28 | 北京卓镭激光技术有限公司 | 一种大光斑紫外高功率皮秒激光器 |
| CN120647134B (zh) * | 2025-08-19 | 2025-10-21 | 长飞光纤光缆股份有限公司 | 空芯光纤内部气体调压装置及方法 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1315027A3 (en) | 1995-09-20 | 2004-01-02 | Mitsubishi Materials Corporation | Optical converting method using a single-crystal lithium tetraborate |
| US5956173A (en) * | 1997-05-07 | 1999-09-21 | Consiglio Nazionale Delle Ricerche | Capillary compressor |
| JP2001042369A (ja) * | 1999-07-27 | 2001-02-16 | Ushio Sogo Gijutsu Kenkyusho:Kk | 波長変換ユニット |
| JP3536058B2 (ja) * | 2000-02-28 | 2004-06-07 | 独立行政法人理化学研究所 | 短パルス・レーザー光のパルス幅圧縮方法 |
| US6904073B2 (en) | 2001-01-29 | 2005-06-07 | Cymer, Inc. | High power deep ultraviolet laser with long life optics |
| JP4127601B2 (ja) * | 2001-03-09 | 2008-07-30 | 株式会社東芝 | レーザ加工装置 |
| JP2003042967A (ja) | 2001-07-27 | 2003-02-13 | Hitachi Ltd | パターン欠陥検査装置 |
| DE10340964A1 (de) * | 2003-09-05 | 2005-03-31 | Leica Microsystems Heidelberg Gmbh | Lichtquelle mit einem mikrostrukturierten optischen Element |
| WO2005041367A1 (en) * | 2003-10-24 | 2005-05-06 | Nkt Research & Innovation A/S | An optical system for providing short laser-pulses |
| JP2006073970A (ja) * | 2004-09-06 | 2006-03-16 | Cyber Laser Kk | Ｃｗ深紫外線光源 |
| CN100591458C (zh) * | 2004-09-29 | 2010-02-24 | 三菱麻铁里亚尔株式会社 | 激光加工方法以及激光加工装置 |
| US7471705B2 (en) | 2005-11-09 | 2008-12-30 | Lockheed Martin Corporation | Ultraviolet laser system and method having wavelength in the 200-nm range |
| JP4870457B2 (ja) * | 2006-03-20 | 2012-02-08 | 独立行政法人理化学研究所 | 短パルスレーザー光のパルス幅圧縮方法およびその装置ならびに中空導波路 |
| US7469081B2 (en) * | 2006-09-01 | 2008-12-23 | Mobius Photonics, Inc. | Reducing thermal load on optical head |
| JP5283052B2 (ja) * | 2006-10-06 | 2013-09-04 | 国立大学法人大阪大学 | 光アナログ−ディジタル変換装置および方法 |
| JP2008155223A (ja) * | 2006-12-21 | 2008-07-10 | Mitsubishi Materials Corp | 立方晶窒化ホウ素焼結体の加工方法 |
| US20110103413A1 (en) | 2007-01-19 | 2011-05-05 | Newport Corporation | Quasi-continuous wave ultraviolet light source with optimized output characteristics |
| CN100470347C (zh) * | 2007-02-12 | 2009-03-18 | 清华大学 | 一种窄脉冲光纤放大器 |
| JP2010535361A (ja) * | 2007-08-01 | 2010-11-18 | ディープ フォトニクス コーポレーション | パルス状高調波紫外レーザのための方法および装置 |
| GB0719376D0 (en) | 2007-10-03 | 2007-11-14 | Univ Bath | Hollow-core photonic crystal fibre |
| CN102047163A (zh) * | 2008-05-30 | 2011-05-04 | 康宁股份有限公司 | 使用光子带隙光纤的光纤组件 |
| EP2377209B8 (en) | 2008-12-22 | 2017-04-12 | Boston Scientific Scimed, Inc. | Laser resonator |
| US8460279B2 (en) * | 2009-03-17 | 2013-06-11 | Wavelight Ag | Ophthalmic laser apparatus |
| JP4960467B2 (ja) * | 2010-03-24 | 2012-06-27 | オリンパス株式会社 | 非線形光学装置、多光子顕微鏡および内視鏡 |
| FR2977988B1 (fr) * | 2011-07-11 | 2014-03-07 | Ecole Polytech | Dispositif et procede passif de combinaison coherente de deux faisceaux optiques amplifies et/ou elargis spectralement. |
| DE102011052738A1 (de) * | 2011-08-16 | 2013-02-21 | Leica Microsystems Cms Gmbh | Detektorvorrichtung |
| JPWO2015029141A1 (ja) * | 2013-08-27 | 2017-03-02 | 三菱電機株式会社 | レーザ発振器 |
| FR3023423B1 (fr) * | 2014-07-03 | 2016-07-08 | Amplitude Systemes | Systeme laser uv-visible a impulsions ultra-courtes de forte puissance et/ou de forte energie |
| CN105490144A (zh) * | 2016-01-07 | 2016-04-13 | 华东师范大学 | 一种基于自相似放大器的可调谐紫外光的产生方法 |
-
2017
- 2017-07-31 US US15/664,176 patent/US10520789B2/en active Active
- 2017-08-04 CN CN201780052222.XA patent/CN109997075B/zh active Active
- 2017-08-04 KR KR1020197008342A patent/KR102332770B1/ko active Active
- 2017-08-04 EP EP17748777.4A patent/EP3504589B1/en active Active
- 2017-08-04 JP JP2019511593A patent/JP7018433B2/ja active Active
- 2017-08-04 WO PCT/EP2017/069855 patent/WO2018036792A1/en not_active Ceased
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