JP2019529973A5 - - Google Patents

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JP2019529973A5
JP2019529973A5 JP2019511593A JP2019511593A JP2019529973A5 JP 2019529973 A5 JP2019529973 A5 JP 2019529973A5 JP 2019511593 A JP2019511593 A JP 2019511593A JP 2019511593 A JP2019511593 A JP 2019511593A JP 2019529973 A5 JP2019529973 A5 JP 2019529973A5
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JP
Japan
Prior art keywords
laser radiation
pulsed laser
frequency conversion
conversion module
optical fiber
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JP2019511593A
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English (en)
Japanese (ja)
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JP7018433B2 (ja
JP2019529973A (ja
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Priority claimed from US15/664,176 external-priority patent/US10520789B2/en
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Publication of JP2019529973A5 publication Critical patent/JP2019529973A5/ja
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JP2019511593A 2016-08-25 2017-08-04 モジュラー式紫外線パルスレーザ源 Active JP7018433B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201662379639P 2016-08-25 2016-08-25
US62/379,639 2016-08-25
US15/664,176 US10520789B2 (en) 2016-08-25 2017-07-31 Modular ultraviolet pulsed laser-source
US15/664,176 2017-07-31
PCT/EP2017/069855 WO2018036792A1 (en) 2016-08-25 2017-08-04 Modular ultraviolet pulsed laser-source

Publications (3)

Publication Number Publication Date
JP2019529973A JP2019529973A (ja) 2019-10-17
JP2019529973A5 true JP2019529973A5 (enExample) 2020-07-09
JP7018433B2 JP7018433B2 (ja) 2022-02-10

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JP2019511593A Active JP7018433B2 (ja) 2016-08-25 2017-08-04 モジュラー式紫外線パルスレーザ源

Country Status (6)

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US (1) US10520789B2 (enExample)
EP (1) EP3504589B1 (enExample)
JP (1) JP7018433B2 (enExample)
KR (1) KR102332770B1 (enExample)
CN (1) CN109997075B (enExample)
WO (1) WO2018036792A1 (enExample)

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WO2021052801A1 (en) 2019-09-18 2021-03-25 Asml Netherlands B.V. Improved broadband radiation generation in hollow-core fibres
DE102019127422A1 (de) 2019-10-11 2021-04-15 Trumpf Laser Gmbh Vorrichtung und Verfahren zum Transport von gepulster Laserstrahlung mit einer Hohlkernlichtleitfaser
WO2022014039A1 (ja) * 2020-07-17 2022-01-20 日本電信電話株式会社 光照射システム
JP2024502022A (ja) * 2020-12-30 2024-01-17 アイピージー フォトニクス コーポレーション 深紫外線レーザ源
CN119836596A (zh) * 2022-10-25 2025-04-15 极光先进雷射株式会社 波长转换系统、固体激光系统以及电子器件的制造方法
CN116598877B (zh) * 2023-07-14 2023-10-31 北京大学 真空紫外光源生成设备及应用系统
CN119726334B (zh) * 2025-02-26 2025-11-28 北京卓镭激光技术有限公司 一种大光斑紫外高功率皮秒激光器
CN120647134B (zh) * 2025-08-19 2025-10-21 长飞光纤光缆股份有限公司 空芯光纤内部气体调压装置及方法

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