JP7012439B2 - Hub type blade and hub type blade manufacturing method - Google Patents

Description

The present invention relates to a hub-type blade and a method for manufacturing a hub-type blade used for cutting a substrate such as a semiconductor material into pieces into chips.

As is well known, when a substrate such as a semiconductor material is cut into pieces into chips, a blade formed in a circular shape is used, and the blade body is used as a form for stably rotating the blade. A hub-type blade in which the blade is held by a holding member is widely used (see, for example, Patent Document 1).

As shown in FIG. 13, the hub type blade 100 includes, for example, a hub 101 made of an aluminum alloy and an electroplated blade main body 102 formed by nickel plating on one surface of the hub 101, and the holding member 101. And the electroplating blade main body 102 are integrally connected.

For the above-mentioned conventional hub type blade, for example, as shown in FIG. 14, an aluminum base metal having a diameter larger than that of the hub is prepared (S101), and the blade forming surface of the aluminum base metal can be pretreated for nickel plating. (S102). Then, for example, a masked aluminum base metal is immersed in a nickel plating solution in which diamond superabrasive grains of about 5 μm are dispersed, and the blade forming surface is nickel-plated to form the original plate of the electroplated blade body (. S103).

Since the original plate of the electroformed blade main body is thick on the outer peripheral side, the outer diameter of the aluminum base metal is processed by using a cylindrical grinding machine or the like to make the original plate of the electroformed blade main body uniform in thickness (S104). Next, the outer diameter-processed aluminum base metal is masked and subjected to alkaline etching to melt the outer peripheral portion of the aluminum base metal and expose the blade body having a predetermined dimension to the outer peripheral portion (S105).

After that, nickel is melted from the surface of the blade body by an electrolytic dress (S106) to expose the diamond superabrasive grains, and the diamond superabrasive grains on the outer periphery of the blade body are exposed by about 2 μm (S107) by the dicer dress to perform dicer precut (S107). After passing through S108) and inspection (S109), the hub type blade is completed (S110).

Japanese Unexamined Patent Publication No. 5-345281

However, the above-mentioned conventional hub type blade and hub type blade manufacturing method have the following problems.
(1) Since aluminum has a larger coefficient of thermal expansion than nickel, the electrocast blade body formed on the aluminum base in the temperature range of about 40 ° C to 50 ° C in the nickel plating solution is cooled to room temperature. Therefore, it is not possible to follow the shrinkage of the aluminum base metal, compressive stress remains on the electrocast blade body, and if the blade body is exposed by alkaline etching, distortion or warpage may occur. Distortion and warpage of the blade body greatly affect the cutting quality of the hub type blade, and since it may cause bending of the cutting line and chipping of the product, it cannot be shipped and is discarded as a defect. , The scrap cost has increased, which has led to an increase in manufacturing cost.

(2) Since the electroformed blade body formed by dispersion plating has a thick outer peripheral side, it is necessary to remove the thick portion by outer peripheral processing to obtain a uniform thickness. Further, when machining the outer diameter, a long time is required after reducing the machining load in order to suppress the occurrence of distortion in the blade body. As a result, it causes an increase in cost.

(3) Since the aluminum base metal is alkaline-etched to expose the diamond superabrasive grains from the blade body, it is not easy to stably finish the blade body to a desired thickness and protrusion amount.

(4) When the aluminum base metal is alkaline-etched, it is necessary to immerse it in an alkaline liquid at about 80 ° C., which may cause a further expansion difference and cause peeling of the aluminum base metal and the blade body. Also, a very long time is spent on alkaline etching.

The present invention has been made in consideration of such circumstances, and provides a hub type blade and a hub type blade manufacturing method capable of efficiently and stably manufacturing a highly accurate hub type blade. It is an object.

Therefore, as a result of diligent research on technology for efficiently and stably manufacturing high-precision hub-type blades, the inventors have developed an epoch-making hub-type blade and hub-type blade manufacturing method that is not bound by conventional technology. developed.

In order to solve the above problems, the present invention proposes the following means.
The invention according to claim 1 is a hub type blade, which is a hub formed so as to be rotatable around an axis and having a blade mounting surface formed on one side in the axial direction, and a blade arranged on the blade mounting surface. A main body and an adhesive resin portion arranged between the hub and the blade main body and connecting the hub and the blade main body are provided , and the blade mounting surface is formed to have a surface roughness Rmax of 5 to 50 μm, and the blade is formed. The connection surface located on the blade mounting surface side of the main body is characterized in that abrasive grains protrude from the surface of the metal base material .

According to the hub type blade according to the present invention, the hub, the blade main body, and the adhesive resin portion are provided, and the separately formed hub and the blade main body are connected by the adhesive resin portion. A hub-type blade can be manufactured using only the hub and the blade body that satisfy the quality characteristics (for example, the content of abrasive grains, the thickness, the warp, the appearance, etc.) by individually inspecting the blade body.
Further, since the abrasive grains protrude from the surface of the metal base material on the connection surface of the blade body, the blade is formed when an adhesive is applied or a sheet-like adhesive resin is placed and cured to form an adhesive resin portion. Since the adhesive resin portion is stably fixed to the main body, the blade main body can be stably attached to the hub.
Further, since the blade mounting surface of the hub is formed to have a surface roughness Rmax of 5 to 50 μm, a fluid adhesive is applied or a sheet-like adhesive resin (which can be plastically deformed) is placed and then cured. When the adhesive resin portion is formed, the adhesive resin portion is stably fixed to the blade mounting surface, so that the blade main body can be stably adhered to the hub.

Further, by connecting the hub and the blade body via the adhesive resin portion, the blade body is prevented from being suddenly bent at the outer edge of the hub, and when the blade body hits the object to be processed, the blade body is prevented from being suddenly bent. Is suppressed from cracking.

Further, by mounting the blade body on the hub at room temperature, the blade body is not distorted or warped based on the temperature history, and the quality of the hub type blade can be improved.
As a result, a highly accurate hub-type blade can be manufactured efficiently and stably.
In addition, it is possible to reduce the manufacturing cost by eliminating the disposal of the base metal (hub) due to the quality defect of the blade body.

Further, according to the hub type blade according to the present invention, when the blade main body is projected, it is not necessary to remove the base metal by processing or etching, so that the reduction in yield due to material loss is suppressed and the processing time is suppressed. Can be shortened.
As a result, the lead time associated with manufacturing can be significantly shortened, and a highly accurate prototype can be manufactured at low cost and with a short lead time.

Further, it is possible to construct a hub-type blade having a hub made of a material that cannot be formed by plating or a blade body that cannot be formed by plating.

Further, by removing the adhesive resin portion from the used hub type blade, removing the blade main body, and reusing the hub, it is possible to realize resource saving and reduce the manufacturing cost.

In this specification, the adhesive resin portion connects (adhesively) the hub and the blade body by curing the adhesive applied or placed between the hub and the blade body due to aging, drying, a chemical reaction, or the like. The part to be used.
Further, as the adhesive, an adhesive resin having fluidity, a sheet-like adhesive resin formed in a sheet shape, and a sheet-like adhesive resin which is not fluid at room temperature and has fluidity depending on physical conditions such as temperature and functions as an adhesive by being cured. It includes UV-curable resins that are cured by UV rays, anaerobic adhesives, and the like.
Further, the adhesive resin portion (adhesive) may be composed of a plurality of substances such that a mixture such as a conductive substance is dispersed.
Further, a base material for holding the adhesive resin portion may be provided.

Attaching the blade body to the hub means connecting the separately formed hub and the blade body in a state where they can be used as a hub type blade. For example, the blade body is attached to the hub by plating or vapor deposition. The purpose is not to include direct formation.

The invention according to claim 2 is the hub type blade according to claim 1, wherein the adhesive resin portion is formed by curing an anaerobic adhesive .

The invention according to claim 3 is the hub type blade according to claim 1 or 2, wherein the hub is formed of aluminum or an aluminum alloy, and the blade main body is a metal base material and the metal base material. It is characterized by having abrasive grains dispersed in the aluminum.
According to the hub type blade according to the present invention, the hub is formed of aluminum or an aluminum alloy, and the blade body includes a metal base material and abrasive grains dispersed in the metal base material, so that the blade rotates at high speed. Is possible and can be cut efficiently.

The invention according to claim 4 is the hub type blade according to claim 1 or 2 , wherein the hub is formed of magnesium or a magnesium alloy, and the blade main body is a metal base material and the metal base material. It is characterized by having abrasive grains dispersed in the.

According to the hub type blade according to the present invention, the hub is formed of magnesium or a magnesium alloy and has a high specific strength, and the blade body includes a metal base material and abrasive grains dispersed in the metal base material. Therefore, high-speed rotation is possible and cutting can be done efficiently.
In addition, since it has excellent damping ability, it is possible to suppress the generation of vibration and perform stable cutting.

The invention according to claim 5 is the hub type blade according to any one of claims 1 to 4 , wherein the metal base material is nickel or a nickel alloy, and the abrasive grains are diamond superabrasives. It is characterized by being made into grains.

According to the hub type blade according to the present invention, since the metal base material is nickel or nickel alloy, rigidity suitable for cutting is secured even if the thickness of the blade body is as thin as about 30 μm, for example. Moreover, since the abrasive grains are diamond super-abrasive grains, they can be efficiently cut at high speed rotation.

The invention according to claim 6 is a hub-type blade manufacturing method for manufacturing a hub-type blade having a hub and a blade main body connected to the hub and capable of rotating around an axis, and preparing a blade material. The blade material preparation process, the hub preparation process for preparing the hub, the blade mounting process for mounting the blade material on the blade mounting surface of the hub with an adhesive, and the blade material mounted on the blade mounting surface are referred to as the hub. An outer diameter processing step of forming a coaxial circular shape is provided, and in the outer diameter processing step, the blade material mounted on the blade mounting surface and the processed portion irradiated with the laser beam are formed on the axis of the hub. It is characterized in that the outer diameter of the blade material is processed into a circular shape by supplying a cooling liquid to the processed portion and irradiating a laser beam while moving the blade material relative to each other in a circular orbit around the center .

According to the hub type blade manufacturing method according to the present invention, the blade material preparation step, the hub preparation step, the blade mounting step of mounting the blade material on the blade mounting surface of the hub with an adhesive, and the blade mounting surface are mounted. Since it has an outer diameter processing process to form the blade material into a circular shape coaxial with the hub, the hub and blade body are individually inspected for quality characteristics (eg, abrasive grain content, thickness, warpage, appearance). Etc.) can be manufactured using only a hub and a blade body that satisfy the requirements.
Further, by mounting the blade body on the hub at room temperature, the blade body is not distorted or warped based on the temperature history, and the quality of the hub type blade can be improved.
As a result, a highly accurate hub-type blade can be manufactured efficiently and stably.
In addition, there is no need to dispose of the base metal (hub) due to quality defects in the blade body, and the manufacturing cost can be reduced.

Further, according to the hub type blade manufacturing method according to the present invention, when the blade body is projected, it is not necessary to remove the base metal by processing or etching, so that the yield decrease due to the material loss is suppressed. The processing time can be shortened.
As a result, the lead time associated with manufacturing can be significantly shortened, and a highly accurate prototype can be manufactured at low cost and with a short lead time.

Further, it is possible to manufacture a hub made of a material whose blade body cannot be formed by plating or a hub type blade provided with a blade body which cannot be formed by plating.
Further, in the outer diameter processing step, since the cooling liquid is supplied to the processed portion and the outer diameter of the blade material is processed into a circular shape by irradiating the laser beam, the blade material can be cut in a short time. As a result, a highly accurate blade body coaxial with the hub can be stably formed in a short time.

Further, by removing the adhesive resin portion from the used hub type blade, removing the blade main body, and reusing the hub, it is possible to realize resource saving and reduce the manufacturing cost.

The invention according to claim 7 is a hub-type blade manufacturing method for manufacturing a hub-type blade having a hub and a blade main body connected to the hub and capable of rotating around an axis, and preparing a blade material. The blade material preparation process, the hub preparation process for preparing the hub, the blade mounting process for mounting the blade material on the blade mounting surface of the hub with a sheet-like adhesive resin, and the blade material mounted on the blade mounting surface are described above. An outer diameter processing step of forming a circular shape coaxial with the hub is provided , and in the outer diameter processing step, the blade material mounted on the blade mounting surface and the processed portion irradiated with the laser beam are aligned with the axis of the hub. The blade material is characterized in that the outer diameter of the blade material is processed into a circular shape by supplying a coolant to the processed portion and irradiating the laser beam while relatively moving in a circular orbit centered on the blade material .

According to the hub type blade manufacturing method according to the present invention, a blade material preparation step, a hub preparation step, a blade mounting step of mounting the blade material on the blade mounting surface of the hub with a sheet-like adhesive resin, and mounting on the blade mounting surface. Since it is equipped with an outer diameter processing process that forms the formed blade material into a circular shape coaxial with the hub, the hub and blade body are individually inspected for quality characteristics (eg, abrasive grain content, thickness, warpage). , Appearance, etc.) can be manufactured using only a hub and a blade body that satisfy the condition.
Further, by mounting the blade body on the hub at room temperature, distortion and warpage based on the temperature history of the blade body can be suppressed, and the quality of the hub type blade can be improved.
As a result, a highly accurate hub-type blade can be manufactured efficiently and stably.
Further, in the outer diameter processing step, since the cooling liquid is supplied to the processed portion and the outer diameter of the blade material is processed into a circular shape by irradiating the laser beam, the blade material can be cut in a short time. As a result, a highly accurate blade body coaxial with the hub can be stably formed in a short time.

In this specification, the sheet-shaped adhesive resin is an adhesive resin fat developed in a plane along the blade mounting surface of the hub and the connection surface of the blade body, and may have adhesiveness on both sides at the same time. However, the conditions (for example, temperature) at which one surface and the other surface have adhesiveness may be different.

The invention according to claim 8 is the hub type blade manufacturing method according to claim 6 or 7 , wherein in the outer diameter processing step, a jet liquid column is formed at a processing portion where the outer diameter is processed, and a laser beam is generated. It is characterized in that it is guided by the jet liquid column and irradiates the processed portion.

According to the hub-type blade manufacturing method according to the present invention, a jet liquid column is formed in a processed portion to be machined with an outer diameter, and a laser beam is guided by the jet liquid column to irradiate the machined portion to remove the blade body. Since the diameter is machined, the outer diameter of the blade body can be formed with high accuracy and efficiency.
As a result, a highly accurate blade body coaxial with the hub can be stably formed in a short time.

According to the hub type blade and the hub type blade manufacturing method according to the present invention, a highly accurate hub type blade can be manufactured efficiently and stably.

It is a perspective view explaining an example of the schematic structure of the hub type blade which concerns on 1st Embodiment of this invention. It is a figure explaining the schematic structure of the hub type blade which concerns on 1st Embodiment of this invention, and is the sectional view which shows the arrow | view II-II in FIG. It is an enlarged partial sectional view explaining the schematic structure of the hub type blade which concerns on 1st Embodiment of this invention. It is a flowchart explaining the outline of the hub type blade manufacturing process which concerns on 1st Embodiment of this invention. It is a figure explaining the outline of the hub type blade manufacturing process which concerns on 1st Embodiment of this invention, and is the flowchart which shows the outline of the procedure of manufacturing a blade material. It is a figure explaining the hub type blade manufacturing process which concerns on 1st Embodiment of this invention, and is a conceptual diagram which shows the outline of the SUS base metal preparation at the time of manufacturing the original plate of a blade material. It is a figure explaining the hub type blade manufacturing process which concerns on 1st Embodiment of this invention, and is a conceptual diagram which shows the schematic structure of the state which the original plate of a blade material was formed by the dispersion plating. It is a figure explaining the hub type blade manufacturing process which concerns on 1st Embodiment of this invention, and is a conceptual diagram explaining the outline of the original plate of the blade material in the state separated from the SUS base metal. It is a figure explaining the hub type blade manufacturing process which concerns on 1st Embodiment of this invention, and is a conceptual diagram explaining the outline of the original plate of the blade material after etching treatment. It is a figure explaining the hub type blade manufacturing process which concerns on 1st Embodiment of this invention, and is a conceptual diagram explaining the outline of the inner diameter processing with respect to the original plate of a blade material. It is a conceptual diagram explaining an example of the schematic structure of the aluminum hub after the pretreatment process in the hub type blade manufacturing process which concerns on 1st Embodiment of this invention, and is the figure which emphasized the unevenness of the blade mounting surface. It is a conceptual diagram explaining the schematic structure of the intermediate product which the adhesive was applied to the aluminum hub in the hub type blade manufacturing process which concerns on 1st Embodiment of this invention. It is a conceptual diagram explaining the schematic structure of the intermediate product in the state where the blade material is adhered to the aluminum hub in the hub type blade manufacturing process which concerns on 1st Embodiment of this invention. It is a conceptual diagram explaining the outline of the outer shape processing in the hub type blade manufacturing process which concerns on 1st Embodiment of this invention. It is sectional drawing explaining the schematic structure of the intermediate product after the outer diameter processing process in the hub type blade manufacturing process which concerns on 1st Embodiment of this invention. It is sectional drawing explaining the schematic structure of the hub type blade after sharpening in the hub type blade manufacturing process which concerns on 1st Embodiment of this invention. It is a flowchart explaining the outline of the hub type blade manufacturing process which concerns on 2nd Embodiment of this invention. It is a conceptual diagram explaining the schematic structure of the intermediate product formed by arranging the sheet-like resin on the aluminum hub in the hub type blade manufacturing process which concerns on 2nd Embodiment of this invention. It is sectional drawing which includes the axis which explains an example of the schematic structure of the hub type blade which concerns on 3rd Embodiment of this invention. It is sectional drawing including the axis which explains an example of the schematic structure of the conventional hub type blade. It is a flowchart explaining an outline example of the conventional hub type blade manufacturing process.

<First Embodiment>
Hereinafter, the hub type blade according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 3.
FIG. 1 is a perspective view illustrating an example of a schematic configuration of a hub type blade according to the first embodiment, FIG. 2 is a cross-sectional view taken along the line II-II in FIG. 1, and FIG. 3 is an enlarged view. It is a partial sectional view.
In FIGS. 1 to 3, reference numeral 1 indicates a hub type blade, reference numeral 10 indicates an aluminum hub, reference numeral 20 indicates an adhesive resin portion (adhesive), and reference numeral 30 indicates a blade body.

As shown in FIG. 1, the hub type blade 1 includes, for example, an aluminum hub 10, an adhesive resin portion 20, and a blade main body 30, and a wafer (a substrate such as a semiconductor material) is cut into individual pieces into an IC chip or the like. It is possible to make it.

As shown in FIGS. 1 to 3, the aluminum hub 10 is formed, for example, with an outer diameter of 55.4 mm, a blade mounting surface 11A is formed on one side in the axis O1 direction, and the diameter is reduced toward the other side of the axis O1. A blade mounting portion 11 and a drive source connecting portion 12 connected to the other side of the blade mounting portion 11 in the axis O1 direction are provided. Further, a cylindrical mounting hole 10H is formed on the inner circumference of the aluminum hub 10 along the axis O1.

Further, the hub 10 is made of, for example, aluminum or an aluminum alloy. The material of the aluminum alloy can be arbitrarily set based on the usage conditions, and for example, A2017, A5083, A7075 (JIS standard) and the like are suitable.

Further, the blade mounting surface 11A is finished with a surface roughness Rmax of 5 to 50 μm (JIS B0601 1982) by, for example, sandblasting or shotblasting so that the adhesive constituting the adhesive resin portion 20 is effectively fixed. Is preferable.

The adhesive resin portion 20 is formed by applying, for example, an adhesive containing an epoxy resin or a cyanoacrylate resin as a main component in a donut shape corresponding to the outer diameter of the aluminum hub 10 and the inner diameter of the blade body (inner diameter of the blade material). Is formed by hardening.
Instead of the epoxy resin or the cyanoacrylate resin, the adhesive resin portion 20 may be formed with an acrylic resin-based adhesive or the like, and the configuration of the adhesive resin portion 20 can be arbitrarily set.
Further, the outer diameter, thickness (for example, 40 μm to 100 μm), elastic modulus, holding force (adhesive force), etc. of the adhesive resin portion 20 hold, for example, the flatness (squareness with respect to the axis O1) of the blade body 30. It is preferable that the hub type blade 1 is set so that the torsional deformation caused by the cutting torque when cutting the object does not cause damage to the blade main body 30.

Further, it is preferable that the adhesive resin portion 20 has a conductivity sufficient to function as a touch sensor between the aluminum hub 10 and the blade main body 30, but whether the adhesive resin portion 20 has conductivity or not. Can be set arbitrarily.

As the conductive adhesive, for example, ThreeBond 3380 (trade name: manufactured by ThreeBond Co., Ltd.) in which a silver (Ag) -based filler is mixed with an epoxy resin can be diluted with a solvent (for example, ethyl acetate) and applied. Is.

For example, a cyanoacrylate-based instant adhesive (for example, ALTECO CN2 (trade name: manufactured by Alteco Co., Ltd.), ALTECO CN4 (trade name: manufactured by Alteco Co., Ltd.), Cemedine 3000DXF (trade name: manufactured by Cemedine Co., Ltd.), Cemedine 3000 DXLL (trade name: manufactured by Cemedine Co., Ltd.), Cemedine 3000DXL (trade name: manufactured by Cemedine Co., Ltd.), Aron Alpha EXTRA Impact (trade name: manufactured by Toa Synthetic Co., Ltd.), Aron Alpha EXTRA 4000 (trade name manufactured by Toa Synthetic Co., Ltd.) The adhesive resin portion 20 may be formed by applying a non-conductive adhesive such as.

Further, when an adhesive having no conductivity is applied, for example, metals such as gold (Au) and silver (Ag) such as Micropearl AU-201 (trade name: manufactured by Sekisui Chemical Industry Co., Ltd.) are applied. The aluminum hub 10 and the blade body 30 are made of conductive particles by mixing conductive particles (for example, particle size of 10 μm) formed by coating the particles with an epoxy adhesive or an acrylic adhesive, applying the mixture, and curing the particles. It may be possible to energize via.

The blade body 30 is formed in a disk shape having an outer diameter of 55.05 mm and a blade thickness of 0.015 to 0.04 μm (for example, 20 μm), and is chamfered on one side and the other side in the O1 direction of the outer peripheral axis. Corner 30C is formed.
Further, on the inner peripheral side of the blade main body 30, for example, a circular hole 30H having a diameter of 42.00 mm is formed coaxially with the axis O1.

Further, the blade main body 30 includes, for example, a metal base material 31 made of an alloy containing nickel (Ni) or a nickel alloy as a main component, and diamond superabrasive grains (abrasive grains) 32 dispersed in the metal base material 31. ing.
As the nickel-based alloy constituting the metal base material, for example, nickel-phosphorus (Ni-P), nickel-cobalt (Ni-Co), and nickel-boron (Ni-B) are preferably applied. Is.

Further, the diamond superabrasive grain 32 is composed of, for example, diamond having a concentration of 3 to 10 μm (average particle size of 5 μm) and a concentration ratio of 50 to 125.
Further, the diamond superabrasive grain 32 is exposed, for example, about 2 μm from the surface of the metal base material 31.

Next, with reference to FIGS. 4 to 9, the outline of the hub type blade manufacturing process according to the first embodiment of the present invention will be described.
FIG. 4 is a flowchart illustrating an outline of the hub type blade manufacturing process according to the first embodiment. FIG. 5 is a flowchart showing an outline of a procedure for manufacturing a blade material in the hub type blade manufacturing process according to the first embodiment.
As shown in FIG. 4, the hub-type blade manufacturing process includes, for example, a blade material manufacturing process (S1) and a process from aluminum hub preparation (S2) to completion of the hub-type blade (S9).

Hereinafter, the outline of the blade material manufacturing procedure in the hub type blade manufacturing process according to the first embodiment will be described with reference to FIGS. 5 and 6A to 6E.
6A to 6E are diagrams illustrating a hub type blade manufacturing process according to the first embodiment. In FIGS. 6A to 6E, reference numeral SUS indicates a SUS base metal (stainless steel base metal), reference numeral W30 indicates a blade material, and reference numerals W301 and W302 indicate original plates of the blade material.

As shown in FIG. 5, the blade material manufacturing process includes, for example, a SUS base metal preparation process (S11), a dispersion plating process (S12), an etching process (S13), and an inner diameter processing process (S14). The blade material is completed by going through these series of steps (S15).

(1) SUS base metal preparation process First, a SUS base metal (stainless steel base metal) suitable for forming a blade material having an outer diameter corresponding to the aluminum hub is prepared (S11).
FIG. 6A is a conceptual diagram showing an outline of the SUS base metal preparation when manufacturing the original plate of the blade material according to the first embodiment.
The SUS base metal SUS is composed of, for example, a disk made of stainless steel, and it is preferable that the nickel plating forming surface S10 forming the original plate of the blade material by dispersion plating is mirror-treated.
Further, as shown in FIG. 6A, it is preferable to apply masking M1 to the portion of the nickel plating forming surface S10 where nickel plating is not required for the SUS base metal SUS.
Further, the outer diameter of the SUS base metal SUS is, for example, even if the outer peripheral side of the original plate of the blade material formed on the nickel-plated forming surface S10 of the SUS base metal is formed thicker, the blade material is attached to the aluminum hub to the outside. After diameter processing and dicer dressing, it is preferable that the blade thickness, strain, etc. of the blade body are set so as to be within the dimensional tolerance of the hub type blade.

(2) Dispersion plating step Next, the SUS base metal is subjected to dispersion plating containing superabrasive grains of diamond to form a master plate of a blade material (S12).
FIG. 6B is a conceptual diagram showing a schematic configuration of a state in which a master plate of a blade material is formed by dispersion plating on a nickel plating forming surface S10 of a SUS base metal SUS.
In the dispersion plating step, a nickel plating solution containing superabrasive grains of diamond is stored in a dispersion plating apparatus (not shown), and a SUS base metal SUS is placed in the nickel plating solution. Then, nickel plating is grown on the plating forming surface S10 of the SUS base metal SUS by the electrolytic plating method while stirring the nickel plating solution with nickel as the anode.
As a result, as shown in FIG. 6B, the dispersed nickel plating layer (nickel layer in which diamond superabrasive grains are dispersed) forming the original plate W301 of the donut-shaped blade material excluding the masking M1 portion is formed on the nickel plating forming surface S10. Is formed.
The original plate W301 made of a blade material is inspected for diamond content, blade thickness, warpage, appearance, etc. after being peeled from the SUS base metal SUS.
As shown in FIG. 6C, the original plate W301 of the blade material separated from the SUS base metal SUS has a flat surface where the diamond superabrasive grains 32 do not protrude from the metal base material 31 at the portion in contact with the nickel plating forming surface S10. Has been done.
Instead of the nickel plating solution, a Ni-P or Ni-B plating solution containing diamond superabrasive grains may be used to form the original plate of the blade material. Further, heat treatment is not required when the original plate of the blade material is formed by the dispersed nickel plating layer, but heat treatment (for example, 250 ° C.) is required when the original plate of the blade material is formed by the Ni-P or Ni-B plating layer. × 1hr) is effective.
An electroless plating method may be applied to form a dispersed nickel plating layer.

(3) Etching Step Next, the original plate of the blade material is etched to expose and sharpen the diamond superabrasive grains from the metal base material made of nickel plating (S13).
FIG. 6D is a conceptual diagram illustrating an outline of the original plate W302 of the blade material after the etching process.
In the etching process, the original plate W301 of the blade material shown in FIG. 6C is back-electrolyzed by an etching apparatus to dissolve nickel from the metal base material 31 made of nickel plating and expose the diamond superabrasive grains 32 to expose the original plate of the blade material. Form W302.
As shown in FIG. 6D, the original plate W302 of the blade material is a metal made of nickel plating over the entire surface including the exposed surface W30F located on the opposite side of the aluminum hub 10 in the hub type blade and the connection surface W30B to which the adhesive is applied. The diamond superabrasive grain 32 is exposed from the base metal 31.

(4) Inner Diameter Processing Step Next, the original plate of the blade material sharpened in the etching process is subjected to inner diameter processing to form the blade material (S14).
FIG. 6E is a conceptual diagram illustrating an outline of inner diameter processing for the original plate of the blade material.
As shown in FIG. 6E, the inner diameter of the original plate W302 of the blade material is processed by supplying a liquid (for example, water) to the portion to be processed and irradiating the laser beam while cooling to process a circular hole 30H in the blade material W302. Then, the blade material 303 is formed.
When supplying a liquid to the inner diameter machined portion, for example, a jet liquid water column (jet water column) C is formed in the inner diameter machined portion, and the laser beam L is reflected in the jet water column C to be processed. Therefore, it is more preferable to make the jet water column (jet liquid column) C a laminar flow with as few irregularities as possible and to completely reflect the laser beam L in the jet water column C. Further, the wavelength of the laser beam L is preferably 200 to 700 nm, for example.
The laser beam may be irradiated without supplying water, or the inner diameter may be machined by electric discharge machining or other well-known machining method instead of laser beam machining.

(5) Completion of blade material If the quality inspection is satisfied, the blade material W303 is completed.
The steps S11 to S15 are shown as an example and can be changed or omitted as appropriate.

Next, with reference to FIGS. 4, 7A to 7D, 8 and 9, the details of the aluminum hub preparation to the hub type blade completion (S2 to S9) in the hub type blade manufacturing process will be described.

(1) Aluminum hub preparation process First, an aluminum hub is prepared (S2).
FIG. 7A is a conceptual diagram illustrating an example of a schematic configuration of an aluminum hub after a pretreatment step in the hub type blade manufacturing process according to the first embodiment, and is a diagram emphasizing the unevenness of the blade mounting surface.
The aluminum hub 10 is formed, for example, by cutting a round bar made of an aluminum alloy while rotating it around an axis and cutting it into individual aluminum hubs.
It is preferable that the aluminum hub 10 has irregularities on the blade mounting surface 11A in the pretreatment step in order to stably fix the adhesive.

(2) Pretreatment Step of Blade Mounting Surface Next, the blade mounting surface is pretreated to form irregularities with a surface roughness suitable for fixing the adhesive (S3).
The pretreatment for the blade mounting surface 11A is preferably performed by, for example, sandblasting or shotblasting with # 120 (about 90 to 108 μm) alumina (Al ₂ O ₃ ).
As a result, an aluminum hub 10 having irregularities on the blade mounting surface 11A as shown in FIG. 7A and to which the applied adhesive can be stably fixed is formed.
For the blade mounting surface 11A, for example, a surface roughness Rmax of 5 to 50 μm is suitable. By setting the surface roughness Rmax5 to 50 μm of the blade mounting surface 11A, the adhesive resin portion 20 is stably fixed to the blade mounting surface 11A, and sufficient holding force (adhesive force) for mounting the blade body is secured. At the same time, it is possible to prevent fine particles and the like generated during cutting from entering between the aluminum hub 10 and the blade main body 30.
Whether or not to set the pretreatment process and the range of surface roughness due to the pretreatment can be arbitrarily set.

(3) Adhesive application step Next, an adhesive is applied to the blade mounting surface of the aluminum hub 10 (S4).
FIG. 7B is a conceptual diagram illustrating a schematic configuration of an intermediate product in which an adhesive is applied to an aluminum hub in the hub type blade manufacturing process according to the first embodiment.
When applying the adhesive forming the adhesive resin portion 20 to the blade mounting surface 11A of the aluminum hub 10, it is preferable to apply the adhesive to a uniform thickness by, for example, a doctor blade or spin coating.
The application of the adhesive is not limited to the doctor blade or spin coating, and various well-known application means (for example, spray nozzle or the like) are applied according to the physical characteristics (for example, viscosity) of the adhesive. It is possible.
As a result, the intermediate product W101 as shown in FIG. 7B is formed.

(4) Blade body mounting process Next, the blade material is bonded to the aluminum hub (S5).
FIG. 7C is a conceptual diagram illustrating a schematic configuration of an intermediate product in a state where a blade material is adhered to an aluminum hub in the hub type blade manufacturing process according to the first embodiment.
When attaching (adhering) the blade material W30 to the aluminum hub 10, for example, the blade material W30 is placed on a flat surface plate, and the axis O1 of the aluminum hub 10 and the central axis of the circular hole 30H of the blade material 30 are used by a jig. The aluminum hub 10 is placed on the blade material 30 while aligning O2, and pressed to adhere. After that, the adhesive is cured to form the adhesive resin portion 20.
As a result, the intermediate product W102 in which the blade material W30 is adhered to the aluminum hub 10 as shown in FIG. 7C is formed.

(5) Outer diameter processing step Next, the outer diameter of the blade material adhered to the aluminum hub is processed (S6).
FIG. 7D is a conceptual diagram illustrating an outline of external shape processing in the hub type blade manufacturing process according to the first embodiment, and FIG. 8 is a diagram after the outer diameter processing step in the hub type blade manufacturing process according to the first embodiment. It is sectional drawing explaining the schematic structure of an intermediate product. Further, FIG. 8 is a cross-sectional view illustrating a schematic configuration of an intermediate product after the outer diameter processing step in the hub type blade manufacturing process according to the first embodiment. In FIGS. 7D and 8, reference numeral W102 indicates an intermediate product before the outer diameter processing, and reference numeral W103 indicates an intermediate product after the outer diameter processing.
In the outer diameter processing, for example, the intermediate product W102 is rotated around the axis O1, and for example, a liquid (for example, water) is supplied to the outer diameter processing portion of the blade material W30 to irradiate the laser beam while cooling. The outer diameter of the blade material W30 is processed.
When supplying a liquid to the processed portion, for example, a jet liquid water column (jet liquid column) C is formed in the portion to be machined on the outer diameter, and the laser beam L is reflected in the jet water column C to be processed at the processed portion. Therefore, it is more preferable to make the jet water column (jet liquid column) C a laminar flow with as few irregularities as possible and to completely reflect the laser beam L in the jet water column C. Further, the wavelength of the laser beam L is preferably 200 to 700 nm, for example. By processing the outer diameter of the intermediate product W102, the outer periphery of the blade material W30 is cut to form the intermediate product W103 as shown in FIG.
The laser beam may be irradiated without supplying water, or the outer diameter may be machined by electric discharge machining or other well-known machining method instead of laser beam machining.

(6) Dicer dressing process Next, the blade body whose outer diameter has been processed is dicer dressed and sharpened (S7).
FIG. 9 is a cross-sectional view illustrating a schematic configuration of a hub-type blade after sharpening in the hub-type blade manufacturing process according to the first embodiment.
The sharpening of the blade main body 30 in the dicing dressing process is performed, for example, by setting the intermediate product W103 in a dicing machine and cutting the dress board.
By dicer dressing the intermediate product W103, the blade main body 30 of the intermediate product W103 is sharpened, and the sharpening portion 30C as shown in FIG. 9 is formed.

(7) Inspection step After that, the hub type blade is inspected (S8).
The inspection of the hub type blade 1 measures, for example, dicing a silicon wafer to measure the calf width. In addition, it is inspected whether or not the specified quality and quality characteristics are satisfied.
In the inspection step, the protrusion length of the blade body 30 from the outer circumference of the hub 10 may be omitted.

(8) Completion of the hub type blade The hub type blade 1 is completed by passing a predetermined quality characteristic in the inspection (S9).
The steps S1 to S9 are shown as an example and can be changed or omitted as appropriate.

According to the hub type blade 1 and the hub type blade manufacturing method according to the first embodiment, the separately formed aluminum hub 10 and the blade main body 30 are connected by the adhesive resin portion 20, and the aluminum hub 10 and the blade main body 30 are connected. Can be individually inspected, so that it can be manufactured using only the hub and the blade body 30 that satisfy the quality characteristics.

Further, according to the hub type blade 1 according to the first embodiment, the blade body 30 is suddenly bent at the outer edge of the hub 10 by connecting the hub 10 and the blade body 30 via the adhesive resin portion 20. It is possible to prevent the blade body 30 from cracking when the blade body 30 hits the object to be machined.

Further, according to the hub type blade 1 and the hub type blade manufacturing method according to the first embodiment, by mounting the blade body 30 on the hub at room temperature, the blade body 30 is free from distortion and warpage based on the temperature history, and the hub. The quality of the mold blade 1 can be improved.
As a result, the highly accurate hub type blade 1 can be efficiently and stably manufactured.

Further, according to the hub type blade 1 according to the first embodiment, since the hub is made of aluminum or an aluminum alloy, it is lightweight and can cope with high-speed rotation (for example, 30,000 rpm or more), and the object can be efficiently targeted. Can be cut into.

Further, according to the hub type blade 1 and the hub type blade manufacturing method according to the first embodiment, the adhesive resin portion 20 is removed from the hub type blade 1 after use, the blade body 30 is removed, and the aluminum hub 10 is reused. As a result, resource saving can be realized and manufacturing cost can be reduced.

Further, according to the hub type blade 1 and the hub type blade manufacturing method according to the first embodiment, it is not necessary to remove the outer periphery of the aluminum hub by etching to protrude the blade main body 30, so that the yield is lowered due to the material loss. Can be suppressed and the processing time can be shortened. Further, the manufacturing time can be shortened by eliminating the processing time associated with the protrusion of the blade body 30.
As a result, the lead time associated with manufacturing can be significantly shortened, and a highly accurate prototype can be manufactured at low cost and with a short lead time.

Further, according to the hub type blade 1 and the hub type blade manufacturing method according to the first embodiment, the diamond superabrasive grain 32 is exposed from the surface of the metal base material 31 on the connection surface 30B located on the blade mounting surface 11A side. Therefore, the adhesive resin portion (adhesive) 20 is stably fixed to the connection surface 30B.
As a result, the blade body 30 can be stably mounted on the aluminum hub 10.

Further, according to the hub type blade 1 and the hub type blade manufacturing method according to the first embodiment, the blade mounting surface 11A of the aluminum hub 10 is formed to have a surface roughness Rmax of 5 to 50 μm, so that the applied adhesive is a blade. The blade body 30 can be stably adhered (connected) to the aluminum hub 10 by stably fixing the adhesive resin portion 20 to the mounting surface 11A.

Further, according to the hub type blade manufacturing method according to the first embodiment, since the aluminum hub 10 and the blade material W30 are co-processed to have an outer diameter, the aluminum hub 10 and the blade body 30 can be efficiently coaxially configured. ..

According to the hub type blade manufacturing method according to the first embodiment, when the circular hole 30H is machined in the original plate W301 of the blade material, a jet water column C is formed at the machined portion, and the laser beam L is generated by the jet water column C. Since it is guided to irradiate the processed portion, the circular hole 30H of the blade material W30 can be formed with high accuracy and efficiency.

According to the hub type blade manufacturing method according to the first embodiment, when the blade material 30 is machined with an outer diameter, a jet water column C is formed at the machined portion, and the laser beam L is guided by the jet water column C to guide the machined portion. Since it is irradiated to the outer diameter, it can be formed to process the outer diameter with high accuracy and efficiency.

<Second Embodiment>
Hereinafter, the hub type blade according to the second embodiment of the present invention will be described with reference to FIGS. 1, 10, and 11. In the figure, reference numeral 1A indicates a hub type blade according to the second embodiment, and reference numeral 20A indicates an adhesive resin portion (sheet-like adhesive resin).

As shown in FIG. 1, the hub type blade 1A includes an aluminum hub 10, a sheet-shaped adhesive resin (adhesive resin portion) 20A, and a blade main body 30. The hub type blade 1A according to the second embodiment includes a sheet-shaped adhesive resin (adhesive resin portion) 20A instead of the adhesive resin portion 20 according to the first embodiment.

The sheet-shaped adhesive resin (adhesive resin portion) 20A is formed in the form of a sheet in a state where a plurality of resins such as epoxy resin are mixed or kneaded, and is complementary to the object to be bonded by an external force (including gravity). It is composed of an adhesive resin having fluidity or plastic deformability to the extent that it can be filled in. Further, even if it does not have fluidity at room temperature, it may flow by heating and have adhesiveness. Further, it may be provided with a base material that holds the adhesive resin.

Further, the sheet-shaped adhesive resin 20A has, for example, a donut shape whose outer circumference corresponds to the outer diameter of the aluminum hub 10 and whose inner circumference corresponds to the inner diameter of the blade main body 30A (inner diameter of the blade material).

Further, the outer diameter of the sheet-shaped adhesive resin (adhesive resin portion) 20A, the thickness after curing (for example, 40 μm to 100 μm), the elastic modulus, the holding force (adhesive force), etc. are, for example, the flatness (axis line) of the blade body 30. It is possible to maintain the squareness with respect to O1), and it is set so that the torsional deformation caused by the cutting torque when the hub type blade 1A cuts the object does not cause damage to the blade body 30. Suitable. Others are the same as those in the first embodiment, and thus the description thereof will be omitted.

Next, the outline of the hub type blade manufacturing process according to the second embodiment will be described with reference to FIGS. 10 and 11.
FIG. 10 is a flowchart illustrating an outline of the hub type blade manufacturing process according to the second embodiment. FIG. 11 is a conceptual diagram illustrating a schematic configuration of an intermediate product formed by arranging a sheet-shaped resin on an aluminum hub in the hub type blade manufacturing process according to the second embodiment.
As shown in FIG. 10, the hub type blade manufacturing process includes, for example, a blade material manufacturing process (S1A) and a process of preparing an aluminum hub and mounting the blade body on the aluminum hub to manufacture a hub type blade (S2A to S9A). And have.
Since the blade material preparation step (S1A) is the same as that of the first embodiment (S11 to S15) shown in FIG. 5, the description thereof will be omitted.

Next, the details from the preparation of the aluminum hub to the completion of the hub type blade (S2A to S9A) in the hub type blade manufacturing process will be described. Since S2A, S3A, and S6A to S9A are the same as those in the first embodiment, detailed description thereof will be omitted.

(1) Aluminum hub preparation process First, the aluminum hub 10 is prepared (S2A).
(2) Pretreatment Step of Blade Mounting Surface Next, pretreatment for arranging the sheet-like adhesive resin (adhesive resin portion) on the blade mounting surface of the aluminum hub is performed to obtain a predetermined surface roughness (S3A).

(3) Sheet-shaped adhesive resin (adhesive resin portion) placement step Next, the sheet-shaped adhesive resin (adhesive resin portion) 20A is placed on the blade mounting surface of the aluminum hub 10A (S4A).
FIG. 11 is a conceptual diagram illustrating a schematic configuration of an intermediate product formed by arranging a sheet-shaped resin on an aluminum hub in the hub type blade manufacturing process according to the second embodiment.
When arranging the sheet-like adhesive resin (adhesive resin portion) 20A on the blade mounting surface 11B of the aluminum hub 10A, a sheet formed in advance in a donut shape corresponding to the outer diameter of the aluminum hub 10A and the circular hole 30H of the blade material W30. Adhesive resin (adhesive resin part) 20A is used. Then, for example, the center of the sheet-shaped adhesive resin (adhesive resin portion) 20A is arranged by a jig so as to be aligned with the rotation axis O1 of the aluminum hub 10.
As a result, as shown in FIG. 11, an intermediate product W101A in which the axis O1 of the aluminum hub 10 and the sheet-shaped adhesive resin (adhesive resin portion) 20A are coaxial is formed.

(4) Blade body mounting process Next, the blade material is placed on the aluminum hub (S5A).
When attaching (adhering) the blade material to the aluminum hub, for example, the blade material W30 is placed on a flat surface plate as in the first embodiment, and the axis O1 of the aluminum hub 10 and the circular shape of the blade material are used by a jig. The aluminum hub 10A is placed on the blade material 30 while aligning the central axis O2 of the hole 30H, pressed, and bonded and fixed by the sheet-shaped adhesive resin (adhesive resin portion) 20A.
(5) Outer diameter processing step Next, the outer diameter of the blade material adhered to the aluminum hub is processed (S6A).
(6) Dicer dressing process Next, the blade body whose outer diameter has been processed is dicer dressed and sharpened (S7A).
(7) Inspection step After that, the hub type blade is inspected (S8A).
(8) Completion of hub type blade The hub type blade 1 is completed by passing a predetermined quality characteristic in the inspection (S9A).
The steps S1A to S9A are shown as an example and can be changed or omitted as appropriate.

According to the hub type blade 1A according to the second embodiment, the separately formed aluminum hub 10 and the blade main body 30 are connected by the sheet-shaped adhesive resin 20A, and the aluminum hub 10 and the blade main body 30 satisfying the quality characteristics. Since it can be manufactured using only the hub type blade 1, a highly accurate hub type blade 1 can be manufactured efficiently and stably.

Further, according to the hub type blade 1A according to the second embodiment, the hub 10 and the blade main body 30 are connected via the sheet-shaped adhesive resin 20A, so that the blade main body 30 is suddenly bent at the outer edge of the hub 10. It is possible to prevent the blade body 30 from cracking when the blade body 30 hits the object to be machined.

According to the hub type blade 1A according to the second embodiment, since the adhesive resin portion is composed of the sheet-shaped adhesive resin 20A, the blade mounting surface of the hub 10 can be controlled by controlling the thickness of the sheet-shaped adhesive resin 20A. The parallelism (perpendicularity with respect to the axis O1) between the 11A and the blade main body 30 can be ensured with high accuracy.

<Third Embodiment>
Hereinafter, the hub type blade 1B according to the third embodiment of the present invention will be described with reference to FIG. 12.
FIG. 12 is a cross-sectional view illustrating an example of a schematic configuration of the hub-type blade 1 according to the third embodiment. Reference numeral 1B is a hub-type blade, reference numeral 20 (20A) is an adhesive resin portion, and reference numeral 50 is conductive. The member is shown.

As shown in FIG. 12, the hub type blade 1B includes, for example, an aluminum hub 10, an adhesive resin portion 20 (20A), a blade body 30, and a conductive member 50, and the space between the hub 10 and the blade body 30 is conductive. It is configured to be possible.

The conductive member 50 is formed of, for example, a metal such as copper (Cu) or various conductive materials, is arranged on the inner peripheral side of the adhesive resin portion 20 (20A), and has a hub 10 and a blade body 30. It is electrically connected.
Further, the conductive member 50 can be formed by brazing or printing, and it is preferable that the conductive member 50 is formed symmetrically with the axis O1 so that the hub type blade 1B can be stably rotated. A through hole (not shown) may be formed in the surface of the adhesive resin portion 20 (20A) to form a conductive member through the through hole. Others are the same as those of the first embodiment and the second embodiment, so the same reference numerals are given and the description thereof will be omitted.

According to the hub type blade 1B according to the third embodiment, since the conductive member 50 is provided, the blade main body 30 is a substrate (even if the adhesive resin portion 20 (20A) does not have conductivity. When it comes into contact with (not shown), the hub 10 is energized from the blade body 30, and it can be reliably detected that the hub type blade 1B has come into contact with the substrate.

It should be noted that various changes can be made to the technical matters described in the above-described embodiment without departing from the spirit of the invention.

For example, in the above embodiment, the case where the hub 10 constituting the hub type blades 1, 1A and 1B is formed of an aluminum alloy has been described, but the hub 10 may be formed of pure aluminum instead of the aluminum alloy.

Further, instead of aluminum or an aluminum alloy, the hub 10 may be formed of various metal materials such as pure titanium (Ti) (JIS type 1 and the like), titanium alloys, magnesium alloys, and the titanium alloy may be used. For example, αβ alloy (Ti-6Al-6V-2Sn, Ti-6Al-4V, etc.), β alloy (Ti-3Al-8V-6Cr-4Zr-4Mo, Ti-10V-2Fe-3Al, Ti-15V-3Cr- 3Sn-3Al etc.) is suitable.
Examples of the magnesium alloy include MB3 (Mg-8.4% Al-0.6% Zn-0.25% Mn), MB5 (Mg-3.3% Zn-0.6% Zr), and MB6. (Mg-5.5% Zn-0.6% Zr) or the like is suitable. By forming the hub 10 with magnesium or a magnesium alloy, the damping ability of the hub 10 is improved and vibration generated at the time of cutting is suppressed. Hardening can be expected to suppress and stably cut the object.
Further, as the other metal material, it is preferable that the specific strength is pure aluminum ((JIS standard A1060-O) specific strength 25.9) or more.
Further, it may be formed of various practical resin materials such as engineering plastics such as polycarbonate, fiber reinforced plastics, and general-purpose plastics such as acrylic resin, and can be arbitrarily set within an applicable range. Is. Further, the hub may be formed of other materials that are difficult to plate.

Further, in the above embodiment, the case where the adhesive resin portion 20 is formed by curing an adhesive containing an epoxy resin or a cyanoacrylate resin as a main component has been described, but the type of the adhesive may be arbitrarily set. Can be done.

Further, in the above embodiment, the case where the sheet-shaped resin 20A is made of a sheet-shaped adhesive resin containing an epoxy resin as a main component has been described, but the configuration of the sheet-shaped adhesive resin 20A can be arbitrarily set.

Further, in the above embodiment, the case where the diamond superabrasive grains 32 are dispersed in the metal base material 31 whose blade main body 30 is made of nickel plating has been described. For example, Ni-P plating, Ni-Co plating or Ni. -B plating, metal blades in which abrasive grains are dispersed in various applicable metal base materials such as copper (Cu) and copper alloys (for example, Cu-Sn), resin blades made of phenolic resin, and abrasive grains. Various blade bodies may be used, such as a bito blade formed by firing a glass powder (inorganic material) containing a mixed ceramic powder, a blade formed of a superhard alloy, and the like.

Further, in the above embodiment, the case where the original plate W301 of the blade material is formed by forming the dispersion plating layer on the SUS base metal by the electrolytic plating method has been described, but the dispersion plating layer is made of other than SUS (stainless steel). The original plate of the blade material may be formed by growing on a base metal (for example, aluminum or titanium that easily forms an oxide film on the surface).
Further, instead of electrolytic plating, an electroless plating method may be applied to form a dispersed plating layer.

Further, in the above embodiment, the case where the blade mounting surface 11A of the aluminum hub 10 is pretreated to have a surface roughness Rmax of 5 to 50 μm has been described, but whether or not the blade mounting surface 11A is pretreated has a surface roughness. It can be arbitrarily set whether or not the Rmax is in the range of 5 to 50 μm.
Further, instead of sandblasting or shotblasting, pretreatment may be performed by mechanical processing such as knurling or chemical processing.

Further, in the above embodiment, the case where the connection surface 30B of the blade main body 30 is formed such that the diamond superabrasive grains (abrasive grains) 32 protrude from the surface of the metal base material (nickel plating) 31 has been described. However, the connection surface 30B of the blade main body 30 can be arbitrarily set to a surface form within a range in which the adhesive resin portion 20 (20A) can be fixed.

Further, the flowcharts shown in FIGS. 4, 5, 12, and 13 show an example, and may be changed (omitted or added) as appropriate.

According to the hub type blade and the hub type blade manufacturing method according to the present invention, a highly accurate hub type blade can be manufactured efficiently and stably, so that it can be industrially used.

1, 1A hub type blade 10 Aluminum hub (hub)
11A Blade mounting surface 20 Adhesive resin part (adhesive)
20A Adhesive resin part (sheet-like adhesive resin)
30 Blade body 30B Connection surface 31 Metal base material (nickel plating)
32 Diamond super-abrasive grain (abrasive grain)
SUS SUS base metal (stainless steel base metal)
S10 Nickel plating formed surface W101, W102, W103 Intermediate product W30 Blade material W301, W302 Original plate of blade material

Claims (8)

A hub that is rotatably formed around the axis and has a blade mounting surface formed on one side in the direction of the axis.
The blade body arranged on the blade mounting surface and
An adhesive resin portion arranged between the hub and the blade body and connecting the hub and the blade body,
Equipped with
The blade mounting surface is formed with a surface roughness Rmax of 5 to 50 μm.
Abrasive grains protrude from the surface of the metal base material on the connection surface of the blade body located on the blade mounting surface side.
A hub type blade that features that. The hub type blade according to claim 1.
The adhesive resin part is
Anaerobic adhesives are hardened and formed
A hub type blade that features that. The hub type blade according to claim 1 or 2 .
The hub is made of aluminum or an aluminum alloy.
The blade main body is a hub-type blade including a metal base material and abrasive grains dispersed in the metal base material. The hub type blade according to claim 1 or 2 .
The hub is made of magnesium or a magnesium alloy.
The blade main body is a hub-type blade including a metal base material and abrasive grains dispersed in the metal base material. The hub type blade according to any one of claims 1 to 4 .
The metal base material is made of nickel or a nickel alloy.
The abrasive grain is a hub type blade characterized in that it is a diamond superabrasive grain. It is a hub type blade manufacturing method for manufacturing a hub type blade having a hub and a blade body connected to the hub and being rotatable around an axis.
The blade material preparation process for preparing the blade material and
Hub preparation process to prepare the hub and
The blade mounting process of mounting the blade material on the blade mounting surface of the hub with an adhesive,
An outer diameter processing step of forming the blade material mounted on the blade mounting surface into a circular shape coaxial with the hub.
Equipped with
In the outer diameter processing process
While the blade material mounted on the blade mounting surface and the machined portion irradiated with the laser beam are relatively moved in a circular orbit about the axis of the hub, the cooling liquid is supplied to the machined portion and the laser beam is applied. Irradiate and process the outer diameter of the blade material into a circular shape.
A hub-type blade manufacturing method characterized by this. It is a hub type blade manufacturing method for manufacturing a hub type blade having a hub and a blade body connected to the hub and being rotatable around an axis.
The blade material preparation process for preparing the blade material and
Hub preparation process to prepare the hub and
The blade mounting process of mounting the blade material on the blade mounting surface of the hub with a sheet-like adhesive resin,
An outer diameter processing step of forming the blade material mounted on the blade mounting surface into a circular shape coaxial with the hub.
Equipped with
In the outer diameter processing process
While the blade material mounted on the blade mounting surface and the machined portion irradiated with the laser beam are relatively moved in a circular orbit about the axis of the hub, the cooling liquid is supplied to the machined portion and the laser beam is applied. Irradiate and process the outer diameter of the blade material into a circular shape.
A hub-type blade manufacturing method characterized by this. The hub type blade manufacturing method according to claim 6 or 7 .
In the outer diameter processing process
A hub-type blade manufacturing method characterized in that a jet liquid column is formed in a processed portion to be machined with an outer diameter, and a laser beam is guided by the jet liquid column to irradiate the processed portion.

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