JP2022018462A - Cutting blade and cutting blade manufacturing method - Google Patents

Abstract

To provide a cutting blade which suppresses strain generated in a blade body, and can perform cutting work with high accuracy, and a cutting blade manufacturing method.SOLUTION: A cutting blade 100 includes: a blade body 10 which is annularly formed and has a cutting edge 11A formed on an outer peripheral surface 11; a first hub member 110 which has a first blade mounting surface 112 that is annularly formed around an axial line O and is arranged on one side A of the blade body 10; a second hub member 120 which has a second blade mounting surface 122 that is annularly formed around the axial line O and is arranged on the other side B of the blade body 10; a first adhesive resin part 118 for connecting the first hub member 110 and the blade body 10; and a second adhesive resin part 128 for connecting the second hub member 120 and the blade body 10.SELECTED DRAWING: Figure 3

Description

The present invention relates to a cutting blade and a cutting blade manufacturing method used for cutting a substrate such as a semiconductor material into pieces into chips.

As is well known, when a substrate such as a semiconductor material is cut into pieces into chips, a cutting blade formed in a circular shape is used.
As a cutting blade for individualizing such a substrate, for example, a resin blade (cutting blade) in which abrasive grains are dispersed and arranged in a bond phase made of a resin material (resin) or a metal containing Cu-Sn as a main component. Metal blades in which abrasive grains are dispersed and arranged in a bond phase are widely used (see, for example, Patent Documents 1 and 2).

On the other hand, as one form for stably rotating the cutting blade, a hub-type cutting blade in which a blade body is integrally formed and held on a hub member is disclosed (see, for example, Patent Document 3). ..
Further, in order to efficiently manufacture such a hub-type cutting blade, a technique for efficiently manufacturing the hub member and the blade body by connecting them with an adhesive is disclosed (for example, a patent). See Document 4).

Japanese Unexamined Patent Publication No. 2006-062009 Japanese Unexamined Patent Publication No. 2018-187736 Japanese Unexamined Patent Publication No. 5-345281 Japanese Unexamined Patent Publication No. 2018-130777

However, the hub-type cutting blade (cutting blade) described in Patent Document 4 shrinks when it hardens between the hub member and the blade body due to the material of the adhesive or the like, causing distortion in the blade body. In some cases.
The strain generated in such a blade body may cause a large runout on the tip end side (outer peripheral edge) of the blade body, for example, when cutting with a large load applied to the blade body.

Further, for example, a QFN (Quad Flat Non lead package) in which a large number of elements are collectively mounted on a lead frame and molded together, or an inner peripheral surface of a through hole formed on a substrate made of a glass epoxy resin. When cutting electronic material parts such as IrDA (Infrared Data Association) standard optical transmission module (hereinafter referred to as IrDA) having a substrate plated with Ni, Au, Cu, etc., the above blade It is desirable that the distortion generated in the main body is as small as possible.

The present invention has been made in consideration of such circumstances, and provides a cutting blade and a cutting blade manufacturing method capable of suppressing distortion generated in a blade body and cutting with high accuracy. It is an object.

In order to solve the above problems, the present invention proposes the following means.
(1) The first aspect of the present invention is a cutting blade that rotates around an axis to cut a work piece, is formed in an annular shape centered on the axis, and has the axis as the center on the inner peripheral side. Abrasive grains are dispersed and arranged in a bond phase in which a circular hole is formed, and a blade body having a cutting edge formed on the outer peripheral surface of the bond phase and an annular shape centered on the axis are formed on the inner peripheral side. A first hub member having a first blade mounting surface formed with a circular hole centered on the axis, and arranged on one side of the blade body in the axis direction, the blade body, and the first blade. It has a first adhesive resin portion arranged between the mounting surfaces and a second blade mounting surface formed in an annular shape centered on the axis and a circular hole centered on the axis on the inner peripheral side. A second hub member arranged on the other side of the blade body in the axial direction and a second adhesive resin portion arranged between the blade body and the second blade mounting surface are provided. 1 The hub member is connected to the blade main body by the first adhesive resin portion, and the second hub member is connected to the blade main body by the second adhesive resin portion.

According to the cutting blade according to the present invention, the blade main body, the first hub member having the first blade mounting surface formed in an annular shape and arranged on one side in the axial direction of the blade main body, and the blade main body. A first adhesive resin portion arranged between the first blade mounting surfaces, a second hub member having a second blade mounting surface formed in an annular shape and arranged on the other side of the blade body, and a blade body. A second adhesive resin portion arranged between the second blade mounting surfaces is provided, the first hub member is connected to the blade body by the first adhesive resin portion, and the second hub member is connected to the blade body and the second adhesive resin. It is connected by a part. That is, since one side of the blade body in the axial direction is connected to the first hub member via the first adhesive resin portion and the other side is connected to the second hub member via the second adhesive resin portion, the blade body is connected to the second hub member. Shrinkage occurs due to the first adhesive resin portion and the second adhesive resin portion.
Therefore, even if the adhesive is cured and shrinkage occurs, the shrinkage on the first blade mounting surface side and the second blade mounting surface side cancel each other out (cancel), so that the strain generated in the blade body due to the shrinkage is generated. It can be made smaller.
As a result, distortion generated in the blade body can be suppressed and cutting can be performed with high accuracy.
Further, even when cutting at high speed or with a high load, the workpiece can be cut with high accuracy.

Further, since the blade body is connected to the hub member via the adhesive resin portion, it is alleviated that the blade body is suddenly bent at the outer peripheral edge of the hub member, and when the blade body comes into contact with the material to be processed. , The blade body is suppressed from cracking.

Here, the adhesive resin portion means that the adhesive applied or placed between the hub member and the blade body is cured by aging, drying, a chemical reaction, etc. to bond (connect) the hub member and the blade body. The part to be used.
Further, the adhesive includes an anaerobic adhesive, an ultraviolet curable resin that is cured by ultraviolet rays, and the like. Further, it includes an adhesive resin having fluidity, a sheet-like adhesive resin formed in the form of a sheet, and an adhesive having no fluidity at room temperature and having fluidity depending on physical conditions such as temperature and functioning as an adhesive by being cured.
Further, the adhesive resin portion (adhesive) may be composed of a plurality of substances such that a mixture such as a conductive substance is dispersed.
Further, for example, the anaerobic adhesive may have a property of reacting with ultraviolet rays to be cured, and when it has a plurality of properties, it is within the range recognized by those skilled in the art based on the main properties. It may be classified into any of anaerobic, anaerobic, and ultraviolet curable adhesives.

(2) In the cutting blade according to (1) above, the first hub member has a boss portion extending along the axial direction toward the second hub member, and the second hub member has a boss portion. A hole into which the boss portion is inserted may be formed along the axis.

According to the cutting blade according to the present invention, the first hub member has a boss portion extending along the axis direction toward the second hub member, and the second hub member has a boss portion along the axis line. Since the hole to be inserted is formed, the first hub member and the second hub member are brought close to each other toward the axis line, and the boss portion is inserted into the hole, whereby the first hub member and the second hub member are formed. Can be easily and efficiently arranged coaxially.

(3) In the cutting blade according to (1) or (2) above, at least one of the first blade mounting surface and the second blade mounting surface has a surface roughness of Rmax 5 to 50 μm. May be.

According to the cutting blade according to the present invention, at least one of the first blade mounting surface and the second blade mounting surface is formed to have a surface roughness Rmax of 5 to 50 μm, so that a fluid adhesive is applied. When the adhesive resin portion is formed by curing after the process, the adhesive resin portion can be stably fixed to the blade mounting surface. Further, even when an adhesive resin having low fluidity (possible plastic deformation) is arranged and cured to form an adhesive resin portion, the adhesive resin portion is stably fixed to the blade mounting surface.
As a result, the blade body and the hub member can be stably bonded and connected.

(4) In the second aspect of the present invention, in the cutting blade according to any one of (1) to (3) above, at least one side surface of the blade body in the axial direction is the bond. Abrasive grains may protrude from the surface of the phase.

According to the cutting blade according to the present invention, since the abrasive grains protrude from the surface of the bond phase on at least one side surface in the axial direction of the blade body, an adhesive is applied and cured to form an adhesive resin portion. In this case, the adhesive resin portion can be stably fixed to the blade body.
As a result, the blade body and the hub member can be stably bonded and connected.

(5) A second aspect of the present invention is a cutting blade manufacturing method for manufacturing the cutting blade according to any one of (1) to (4) above, wherein the first hub member and the second hub are used. The hub preparation process for preparing the members, the blade body preparation process for preparing the blade body, and the adhesive applied to the first hub member and the second blade mounting surface to which the adhesive is applied to the first blade mounting surface. The second hub member is provided with a hub mounting step of approaching and abutting the blade body along the axis to connect the blade body to the first hub member and the second hub member. It is characterized by being.

According to the cutting blade manufacturing method according to the present invention, the first hub member and the second hub member are prepared in the hub preparation process, the blade body is prepared in the blade body preparation process, and the first blade mounting is performed in the hub mounting process. The first hub member coated with the adhesive on the surface and the second hub member coated with the adhesive on the second blade mounting surface are brought into contact with the blade body along the axis and brought into contact with the blade body. Since the 1 hub member and the 2nd hub member are connected, the blade main body and the 1st hub member and the 2nd hub member can be efficiently connected.
As a result, it is possible to efficiently manufacture a cutting blade capable of suppressing distortion generated in the blade body and cutting with high accuracy.

(6) In the cutting blade manufacturing method according to (5) above, an anaerobic adhesive may be applied to the first blade mounting surface and the second blade mounting surface.

According to the cutting blade manufacturing method according to the present invention, the anaerobic adhesive is applied (arranged) to the first blade mounting surface and the second blade mounting surface, so that the blade main body, the first blade mounting surface, and the second blade mounting surface are applied (arranged). The anaerobic adhesive cures by bringing the surfaces into close contact.
As a result, the blade main body can be efficiently connected to the first hub member and the second hub member.

According to the cutting blade according to the present invention, distortion generated in the blade body can be suppressed and cutting can be performed with high accuracy.
According to the cutting blade manufacturing method according to the present invention, it is possible to efficiently manufacture a cutting blade capable of suppressing strain generated in the blade body and cutting with high accuracy.

It is a perspective view explaining the schematic structure of the cutting blade which concerns on 1st Embodiment of this invention. It is a perspective view which shows the disassembled state excluding the adhesive resin part explaining the schematic structure of the cutting blade which concerns on 1st Embodiment. It is a vertical cross-sectional view including the axis which explains the schematic structure of the cutting blade which concerns on 1st Embodiment. It is a schematic block diagram seen along the axis explaining the schematic structure of the blade body which concerns on 1st Embodiment. It is a figure explaining the schematic structure of the blade main body which concerns on 1st Embodiment, and is the cross-sectional view shown by the arrow view VV in FIG. It is a flowchart explaining the outline of the cutting blade manufacturing method which concerns on 1st Embodiment of this invention. It is a perspective view which shows the disassembled state excluding the adhesive resin part which explains the schematic structure of the cutting blade which concerns on 2nd Embodiment of this invention. It is a vertical cross-sectional view including the axis which explains the schematic structure of the cutting blade which concerns on 2nd Embodiment. It is a perspective view which shows the disassembled state excluding the adhesive resin part which explains the schematic structure of the cutting blade which concerns on 3rd Embodiment of this invention. It is a vertical cross-sectional view including the axis which explains the schematic structure of the cutting blade which concerns on 3rd Embodiment.

<First Embodiment>
Hereinafter, the cutting blade according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 5.
FIG. 1 is a perspective view illustrating a schematic configuration of a cutting blade according to a first embodiment of the present invention, FIG. 2 is a perspective view showing a disassembled state excluding an adhesive resin portion, and FIG. 3 is a perspective view. , It is a vertical sectional view including an axis. Further, FIG. 4 is a view taken along an axis for explaining the schematic configuration of the blade main body, and FIG. 5 is a cross-sectional view taken along the arrow VV in FIG.

In FIGS. 1 to 5, reference numeral 100 is a cutting blade, reference numeral 10 is a blade body, reference numeral 110 is a first hub member, reference numeral 112 is a first blade mounting surface, and reference numeral 118 is a first adhesive resin portion. Reference numeral 120 indicates a second hub member, reference numeral 122 indicates a second blade mounting surface, and reference numeral 128 indicates a second adhesive resin portion.

As shown in FIGS. 1 to 3, the cutting blade 100 is, for example, a first adhesive resin portion arranged between a blade main body 10, a first hub member 110, and a blade main body 10 and a first hub member 110. It includes 118, a second hub member 120, and a second adhesive resin portion 128 arranged between the blade main body 10 and the second hub member 120.
Further, the blade main body 10 and the first hub member 110 are connected by the first adhesive resin portion 118, and the blade main body 10 and the second hub member 120 are connected by the second adhesive resin portion 128.

The cutting blade 100 can cut a wafer (a substrate such as a semiconductor material) and individualize it into an IC chip or the like.
Specifically, the cutting blade 100 is used for precision cutting (cutting) of a work material such as a brittle material (hard and brittle material) such as glass, ceramics, and quartz used for a semiconductor device (electronic material component). ) Is used.

Further, although not particularly shown, the cutting blade 100 is attached to the main shaft of the cutting device via the first hub member 110, and the blade main body 10 is rotated around the axis (central axis) O. , Move in a direction perpendicular to the axis O (for example, in the vertical direction) to cut the work piece (not shown).

Here, in the present specification, the direction along the axis O direction of the blade main body 10 is referred to as a width direction, the direction orthogonal to the axis O is referred to as a radial direction, and the direction orbiting around the axis O is referred to as a circumferential direction. There is.
Further, in FIGS. 1 to 5, for convenience of explanation, the thickness of the blade main body 10 is shown to be thicker than the actual thickness.

Further, a circular mounting hole 13 is formed in the radial center portion (axis line O) of the blade body 10 so as to be centered on the axis line O and penetrate the blade body 10 in the width direction. That is, the blade body 10 specifically has an annular plate shape.
Here, it is intended that the "blade body 10 having a circular plate shape" referred to in the present specification also includes a ring plate shape. In addition, the numerical range indicated by "-" in the specification includes the lower limit value and the upper limit value (that is, indicating the above and below).

As shown in FIGS. 2 to 5, the blade main body 10 is formed in a disk shape (annular shape).
Further, on the inner peripheral side of the blade main body 10, for example, a circular hole 13 having a diameter of 42.00 mm is formed coaxially with the axis O1.
The dimensions of the cutting blade 100 can be arbitrarily set, but in this embodiment, for example, the outer diameter is set to φ55.05 mm, the inner diameter (diameter of the mounting hole) is set to φ40 mm, and the thickness is set to t20 μm (10 to 40 μm). Has been done.

Further, the blade body 10 includes, for example, an electrocast nickel (Ni) bond phase (for example, a dispersed nickel (Ni) plating layer, (nickel (Ni) bond phase), an electrocast metal layer) 15 and an electrocast nickel (Ni). ) A diamond superabrasive grain (abrasive grain) 16 dispersed and arranged in the bond phase 15 is provided. Further, the blade body 10 has a cutting edge 11A formed on the outer peripheral surface (outer peripheral portion) 11. Further, a filler may be provided if necessary.

The electroplated nickel (Ni) bond phase 15 is formed by plating nickel (Ni) or an alloy containing nickel (Ni) as a main component.
Examples of the nickel-based alloy constituting the electrocast nickel (Ni) bond phase 15 include nickel-phosphorus (Ni-P), nickel-cobalt (Ni-Co), and nickel-boron (Ni-B). It is preferable to apply.

Further, the diamond superabrasive grain 16 is composed of, for example, diamond having a concentration of 3 to 10 μm (average particle size of 5 μm) and a concentration ratio of 50 to 125.
Further, the diamond superabrasive grain 16 is exposed from the surface of the electroformed nickel (Ni) bond phase 15 by about 2 μm on the side surfaces 12A and 12B (12) on both sides of the blade body 10 in the axis O direction, for example.

As shown in FIGS. 1 to 3, the first hub member 110 is arranged, for example, on one side A of the blade main body 10 in the axis O direction.
The material forming the first hub member 110 can be arbitrarily set, but in this embodiment, it is formed of, for example, an aluminum (Al) alloy.

The first hub member 110 includes a first blade mounting surface 112 facing the blade main body 10, a cylindrical boss portion (boss portion) 113 extending from the first blade mounting surface 112 toward the other side B, and a first blade mounting. An inclined portion 114 that extends from the surface 112 toward one side A and is reduced in diameter toward one side A, and a drive source mounting that is connected to one side A of the inclined portion 114 and is increased in diameter toward one side A. It is provided with a unit 115.

The first blade mounting surface 112 has a circular outer shape when viewed along the axis O direction, and a cylindrical boss portion (boss portion) 113 centered on the axis O is arranged on the inner peripheral side. Has been done. That is, the first blade mounting surface 112 is formed in an annular shape.

Further, the outer diameter of the first blade mounting surface 112 is formed to be smaller than that of the blade main body 10. Specifically, the outer peripheral edge portion of the blade main body 10 is formed so as to project as a cutting edge 11A from the outer peripheral portion of the first blade mounting surface 112 toward the outside.

The surface roughness of the first blade mounting surface 112 can be arbitrarily set, but in this embodiment, the surface roughness is formed to, for example, Rmax 5 to 50 μm (JIS B0601 1982).
In order to form the surface roughness of the first blade mounting surface 112 to have a surface roughness Rmax of 5 to 50 μm, for example, sandblasting or shotblasting is performed.

The cylindrical boss portion (boss portion) 113 is, for example, arranged on the inner peripheral side of the first blade mounting surface 112 with the axis O as the center, and is formed in a cylindrical shape coaxial with the axis O.
Further, the cylindrical boss portion (boss portion) 113 has a circular hole 110H centered on the axis O formed on the inner peripheral side when viewed along the axis O.
The circular hole 110H is formed so as to penetrate from one side A to the other side B of the first hub member 110 along the axis O, for example.
The outer diameter of the cylindrical boss portion (boss portion) 113 can be arbitrarily set, but in this embodiment, the circular hole 13 of the blade body 10 and the circular hole 120H of the second hub member 120 described later will be formed. It is formed so that it can be inserted.

As shown in FIGS. 1 to 3, the inclined portion 114 extends from the first blade mounting surface 112 along the axis O toward the other side B, and is reduced in diameter toward the one side A. It is formed in a conical shape.

As shown in FIGS. 1 to 3, the drive source mounting portion 115 is connected to, for example, one side A of the inclined portion 114 and has a substantially prefix opposite to that of the inclined portion 114 whose diameter is increased toward the one side A. It is formed in a conical shape.
Then, by inserting and attaching the spindle of the cutting device to the circular hole 110H, the rotation is transmitted from the cutting device to the cutting blade 100.

As shown in FIG. 3, the first adhesive resin portion 118 is arranged between the blade main body 10 and the first blade mounting surface 112, and connects the blade main body 10 and the first hub member 110.
The first adhesive resin portion 118 can be arbitrarily set, but for example, it is preferable that the shrinkage rate at the time of curing is small.

In this embodiment, the first adhesive resin portion 118 is formed by, for example, curing an anaerobic adhesive.
Instead of the anaerobic adhesive, it may be formed by curing an ultraviolet curable adhesive or an adhesive containing an epoxy resin or a cyanoacrylate resin as a main component.
Instead of the epoxy resin or the cyanoacrylate resin, the first adhesive resin portion 118 may be formed with an acrylic resin-based adhesive or the like.

The outer diameter, thickness (for example, 40 μm to 100 μm), elastic modulus, holding force (adhesive force), etc. of the first adhesive resin portion 118 are, for example, the flatness of the blade body 10 (squareness with respect to the axis O1). It is preferable that the cutting blade 100 is set so that the blade body 10 is not damaged by torsional deformation due to the cutting torque when cutting the work material.
Further, for example, it is preferable that the first hub member 110 and the blade main body 10 have enough conductivity to function as a touch sensor, but whether or not the adhesive resin portion 118 has conductivity is determined. It can be set arbitrarily.

As shown in FIGS. 2 and 3, the second hub member 120 has, for example, a circular outer shape, and a circular hole 120H centered on the axis O is formed on the inner peripheral side.
That is, the second hub member 120 is, for example, a ring-shaped flat plate formed in an annular shape when viewed along the axis O direction.
The material forming the second hub member 120 can be arbitrarily set, but in this embodiment, it is formed of, for example, an aluminum (Al) alloy.

The second blade mounting surface 122 is formed on the surface A on one side of the second hub member 120.
Further, the second blade mounting surface 122 is formed in an annular shape in which a circular hole 120H centered on the axis O is formed on the inner peripheral side when viewed along the axis O.

Further, the outer diameter of the second blade mounting surface 122 is formed to be smaller than that of the blade main body 10. Specifically, the outer peripheral edge portion of the blade main body 10 is formed so as to project as a cutting edge 11A from the outer peripheral portion of the second blade mounting surface 122 toward the outside.

The surface roughness of the second blade mounting surface 122 can be arbitrarily set, but in this embodiment, the surface roughness is formed to, for example, Rmax 5 to 50 μm (JIS B0601 1982).
In order to form the surface roughness of the second blade mounting surface 122 to a surface roughness Rmax of 5 to 50 μm, for example, sandblasting or shotblasting is performed.

The circular hole 120H is formed coaxially and substantially the same diameter as the circular hole 13 of the blade body 10 when viewed along the axis O, for example, and the second hub member 120 is formed from one side A to the other in the thickness direction. It penetrates the side B.
Further, as shown in FIG. 3, the cylindrical boss portion (boss portion) 113 of the first hub member 110 can be fitted into the circular hole 120H.

As shown in FIG. 3, the second adhesive resin portion 128 is arranged between the blade main body 10 and the second blade mounting surface 122, and connects the blade main body 10 and the second hub member 120.
In this embodiment, the second adhesive resin portion 128 is formed by, for example, curing an anaerobic adhesive.
The second adhesive resin portion 128 can be arbitrarily set, but for example, it is preferable that the shrinkage rate at the time of curing is small.
Further, it is preferable that the material is the same as that of the first adhesive resin portion 118.
Others are the same as those of the first adhesive resin portion 118, so the description thereof will be omitted.

Next, with reference to FIG. 6, the outline of the cutting blade manufacturing process according to the first embodiment of the present invention will be described.
FIG. 6 is a flowchart illustrating an outline of the cutting blade manufacturing process according to the first embodiment. As shown in FIG. 6, the cutting blade manufacturing process includes, for example, a hub member preparation process (S101), a blade body preparation process (S102), a blade body mounting process (S103), and a dicer dressing process (S104). , Is equipped.
Then, the cutting blade 100 is completed by going through the hub member preparation step (S101), the blade main body preparation step (S102), the blade main body mounting step (S103), and the dicer dressing step (S104).

(1) Hub member preparation process (S101)
First, the first hub member 110 and the second hub member 120 are prepared.
The hub member preparation step is performed, for example, intoxicating with (1-1) to (1-2) shown below.

(1-1) The first hub member 110 and the second hub member 120 are machined by, for example, using a well-known machining apparatus while rotating a round bar made of an aluminum alloy around an axis, and individual hubs. It is formed by cutting into a member.

(1-2) The blade mounting surfaces 112 and 122 are surface-treated by sandblasting or shotblasting to form irregularities.
When the surface is treated by sandblasting or shotblasting, for example, # 120 (about 90 to 108 μm) alumina (Al ₂ O ₃ ) is used.
When surface treatment is applied to the blade mounting surface 11 and the blade mounting surface 122 to form irregularities, for example, the surface roughness Rmax 5 to 50 μm may be used to adhere to the first hub member 110 and the second hub member 120. It is suitable for stably fixing the agent. Whether or not the blade mounting surface 11 and the blade mounting surface 122 are formed can be arbitrarily set.

The processing method for forming irregularities on the blade mounting surfaces 112 and 122 can be arbitrarily set.
Further, the range of surface roughness in the case of processing can be arbitrarily set.

(2) Blade body forming step (electroformed nickel (Ni) blade body forming step) (S102)
For the blade main body (electroformed nickel (Ni) blade main body), perform (2-1) to (2-5) shown below.

(2-1) Preparing a SUS base metal (stainless steel base metal) First, for example, prepare a SUS base metal (stainless steel base metal).
It is preferable that the SUS base metal is mirror-treated. Further, in the SUS base metal, it is preferable to mask the portion where nickel plating is not required according to the shape of the blade main body 10.

(2-2) Dispersion Plating Next, a nickel plating solution in which diamond superabrasive grains 16 are dispersed is stored in a dispersion plating apparatus (not shown), and a SUS base metal is immersed in the nickel plating solution.
Nickel plating is grown on the SUS base metal by the electrolytic plating method while stirring the nickel plating solution with nickel as the anode. As a result, a blade main body original plate (dispersed nickel plating layer (nickel layer in which diamond superabrasive grains 16 are dispersed)) constituting the blade main body is formed.
When the filler is dispersed in the bond phase 15, it is dispersed in this plating solution.
Instead of the electrolytic plating method, the plating layer may be formed by an electroless plating method.

(2-3) Etching treatment of the blade main body original plate Then, by etching the blade main body original plate, diamond superabrasive from the side surfaces 12A and 12B (12) on both sides of the electroformed nickel (Ni) (bond phase) 15. The grains 16 are exposed and sharpened.
Whether or not the diamond superabrasive grains 16 are exposed from the surfaces of the side surfaces 12A and 12B (12) on both sides of the electroformed nickel (Ni) (bond phase) 15 can be arbitrarily set.

(2-4) Inner diameter processing (2-5) Outer diameter processing (2-4) Inner diameter processing and (2-5) Outer diameter processing are carried out using well-known machining.
Further, (2-5) outer diameter processing may be performed after the blade main body mounting process.
By carrying out the above (2-1) to (2-5), the blade main body is completed.
The above (2-1) to (2-5) show an example and can be changed or omitted as appropriate.

(3) Blade body mounting process (S103)
The blade body 10 is attached to the hub members 110 and 120.
The blade body 10 is attached to the hub members 110 and 120 according to, for example, (3-1) to (3-2) below.

(3-1) Adhesive application Next, the first adhesive resin portion 118 and the second adhesive are adhered to the first blade mounting surface 112 of the first and second hub members 110 and the second blade mounting surface 122 of the second hub member 120. An adhesive that forms the resin portion 128 is applied.
When applying the adhesive forming the first adhesive resin portion 118 to the blade mounting surfaces 112 and 122 of the hub members 110 and 120, it is preferable to apply the adhesive to a uniform thickness by, for example, a doctor blade or spin coating. ..
The application of the adhesive is not limited to the doctor blade or spin coating, and various well-known application means (for example, spray nozzle or the like) are applied according to the physical characteristics (for example, viscosity) of the adhesive. It is possible.
Further, the adhesive forming the first adhesive resin portion 118 and the second adhesive resin portion 128 can be arbitrarily set, but it is preferable to use anaerobic adhesive of the same material.

(3-2) Adhesion of the blade body and the hub member Next, the blade body and the first hub member and the second hub member are bonded.
When mounting (adhering) the blade body 10 to the first hub member 110 and the second hub member 120, for example, the first hub member 110 is mounted with the first blade mounting surface 112 and the columnar boss portion 113 facing upward. Place it on a flat surface plate.
Then, while aligning the axis O1 of the first hub member 110 with the axis O of the blade body 10, specifically, the columnar boss 113 of the first hub member 110 is inserted into the circular hole 13 of the blade body 10 to insert the blade body. 10 is placed on the first blade mounting surface 112 and pressed to adhere.
After that, the second hub member 120 with the second mounting surface 122 facing downward is placed on the blade main body 10 bonded to the first hub member 110 along the axis O, pressed, and bonded.
After that, the adhesive is cured to form the first adhesive resin portion 118 and the second adhesive portion 128.

(4) Dicer dress process (S104)
Next, the blade body is dressed with a dicer and sharpened.
The sharpening of the blade body 10 in the dicing dressing process is performed, for example, by setting the blade body 10 in a dicing machine and cutting the dress board.
By dicer dressing, the outer peripheral portion 11 of the blade main body 10 is sharpened to form the cutting edge 11A.

According to the cutting blade 100 according to the first embodiment, one side of the blade body in the axial direction is connected to the first hub member via the first adhesive resin portion, and the other side is connected to the first hub member via the second adhesive resin portion. Since it is connected to the 2 hub member, the blade body shrinks due to the first adhesive resin portion and the second adhesive resin portion.
Therefore, even if the adhesive is cured and shrinkage occurs, the shrinkage on the first blade mounting surface side and the second blade mounting surface side cancel each other out, so that the strain generated on the blade body due to the shrinkage can be reduced. ..
As a result, the cutting blade can be manufactured with high accuracy and efficiency by suppressing the occurrence of distortion in the blade body.
Further, even when cutting at high speed or with a high load, the workpiece can be cut with high accuracy.

Further, according to the cutting blade 100 according to the first embodiment, the first hub member has a boss portion extending along the axial direction toward the second hub member, and the second hub member has an axial line. Since a hole into which the boss portion is inserted is formed along the hole, the first hub member and the second hub member are brought close to each other toward the axis line, and the boss portion is inserted into the hole to form the first hub member. And the second hub member can be easily and efficiently coaxially arranged.

Further, according to the cutting blade 100 according to the first embodiment, at least one of the first blade mounting surface and the second blade mounting surface is formed to have a surface roughness Rmax of 5 to 50 μm, so that the fluidity is increased. When a certain adhesive is applied and then cured to form an adhesive resin portion, the adhesive resin portion can be stably fixed to the blade mounting surface. Further, even when an adhesive resin having low fluidity (possible plastic deformation) is arranged and cured to form an adhesive resin portion, the adhesive resin portion is stably fixed to the blade mounting surface.
As a result, the blade body and the hub member can be stably bonded and connected.

Further, according to the cutting blade 100 according to the first embodiment, the side surfaces 12A and 12B (12) on both sides of the blade main body 10 are formed from the surface of the electroformed nickel (Ni) phase (bond phase) 15 to the diamond superabrasive grains 16. Is protruding, so that the adhesive resin portions 118 and 128 can be stably fixed to the blade body 10.
As a result, the blade main body 10 and the first and second hub members 110 and 120 can be stably bonded and connected.

Further, according to the cutting blade 100 according to the first embodiment, since the hub members 110 and 120 are made of an aluminum alloy, it is lightweight and can cope with high-speed rotation (for example, 30,000 rpm or more), and is a work material. Can be cut efficiently.

<Second Embodiment>
Hereinafter, the cutting blade according to the second embodiment of the present invention will be described with reference to FIGS. 7 and 8.
FIG. 7 is a perspective view showing a disassembled state excluding the adhesive resin portion for explaining the schematic configuration of the cutting blade according to the second embodiment, and FIG. 8 is a vertical sectional view including an axis.
In FIGS. 7 and 8, reference numeral 200 is a cutting blade, reference numeral 10 is a blade body, reference numeral 210 is a first hub member, reference numeral 212 is a first blade mounting surface, and reference numeral 218 is a first adhesive resin portion. , Reference numeral 220 indicates a second hub member, reference numeral 222 indicates a second blade mounting surface, and reference numeral 228 indicates a second adhesive resin portion.

As shown in FIGS. 7 and 8, the cutting blade 200 is, for example, a first adhesive resin portion arranged between the blade main body 10, the first hub member 210, and the blade main body 10 and the first hub member 210. It includes a 218, a second hub member 220, and a second adhesive resin portion 228 arranged between the blade main body 10 and the second hub member 220.
Further, the blade main body 10 and the first hub member 210 are connected by the first adhesive resin portion 228, and the blade main body 10 and the second hub member 220 are connected by the second adhesive resin portion 218.

As shown in FIGS. 7 and 8, the first hub member 210 is arranged, for example, on one side A of the blade body 10 in the axis O direction.
The material forming the first hub member 210 can be arbitrarily set, but in this embodiment, it is formed of, for example, an aluminum (Al) alloy.

As shown in FIGS. 7 and 8, the first hub member 210 has, for example, a first blade mounting surface 212 having a circular outer shape and facing the blade main body 10, and the other side B from the first blade mounting surface 212. It is provided with a cylindrical boss portion (boss portion) 213 extending toward. That is, the first hub member 210 is formed in a multi-stage cylindrical shape centered on the axis O.

The first blade mounting surface 212 is formed on one surface of the first hub member 210.
Further, the first blade mounting surface 212 has a circular outer shape when viewed along the axis O direction, and a cylindrical boss portion (boss portion) 213 centered on the axis O is formed on the inner peripheral side. Is placed. That is, the first blade mounting surface 212 is formed in an annular shape.

Further, the outer diameter of the first blade mounting surface 212 is formed to be smaller than that of the blade main body 10. Specifically, the outer peripheral edge portion of the blade main body 10 is formed so as to project as a cutting edge 11A from the outer peripheral portion of the first blade mounting surface 212 toward the outside.

The cylindrical boss portion (boss portion) 213 is arranged, for example, on the inner peripheral side of the first blade mounting surface 212 with the axis O as the center, and is formed in a cylindrical shape coaxial with the axis O.
Further, the cylindrical boss portion (boss portion) 213 is formed with a circular hole 210H centered on the axis O on the inner peripheral side when viewed along the axis O.
The circular hole 210H is formed so as to penetrate from one side A to the other side B of the first hub member 210 along the axis O, for example.
The outer diameter of the cylindrical boss portion (boss portion) 213 can be arbitrarily set, but in this embodiment, the circular hole 13 of the blade body 10 and the circular hole 220H of the second hub member 220 described later will be formed. It is formed so that it can be inserted.
Then, by inserting and attaching the spindle of the cutting device to the circular hole 210H, the rotation is transmitted from the cutting device to the cutting blade 300.

As shown in FIG. 8, the first adhesive resin portion 218 is arranged between the blade main body 10 and the first blade mounting surface 212, and connects the blade main body 10 and the first hub member 210.
The first adhesive resin portion 218 can be arbitrarily set, but for example, it is preferable that the shrinkage rate at the time of curing is small.
Further, in this embodiment, the first adhesive resin portion 218 is formed by, for example, curing an anaerobic adhesive.
Since the first adhesive resin portion 218 is the same as the first adhesive resin portion 118 of the first embodiment, the description thereof will be omitted.

The second hub member 220 includes a second blade mounting surface 222 facing the blade main body 10 and an inclined portion 224 extending from the second blade mounting surface 222 toward the other side B and being reduced in diameter toward the other side B. It is provided with a drive source mounting portion 225 which is connected to the other side B of the inclined portion 224 and whose diameter is increased toward the other side B.

The material forming the second hub member 220 can be arbitrarily set, but in this embodiment, it is formed of, for example, an aluminum (Al) alloy.

The second blade mounting surface 222 is formed on the surface of the other side B of the second hub member 220.
Further, the second blade mounting surface 222 has a circular outer shape when viewed along the axis O direction, and a circular hole 220H centered on the axis O is formed on the inner peripheral side. That is, the second blade mounting surface 222 is formed in an annular shape.

Further, the outer diameter of the second blade mounting surface 222 is formed to be smaller than that of the blade main body 10. Specifically, the outer peripheral edge portion of the blade main body 10 is formed so as to project as a cutting edge 11A from the outer peripheral portion of the second blade mounting surface 222 toward the outside.

The surface roughness of the second blade mounting surface 222 can be arbitrarily set, but in this embodiment, the surface roughness is formed to, for example, Rmax 5 to 50 μm (JIS B0601 1982).
In order to form the surface roughness of the second blade mounting surface 222 to a surface roughness Rmax of 5 to 50 μm, for example, sandblasting or shotblasting is performed.

As shown in FIG. 8, the second adhesive resin portion 228 is arranged between the blade main body 10 and the second blade mounting surface 222, and connects the blade main body 10 and the second hub member 220.
In this embodiment, the second adhesive resin portion 128 is formed by, for example, curing an anaerobic adhesive.
Since the second adhesive resin portion 228 is the same as the second adhesive resin portion 12 of the first embodiment, the description thereof will be omitted.

<Third Embodiment>
Hereinafter, the cutting blade according to the third embodiment of the present invention will be described with reference to FIGS. 9 and 10.
FIG. 9 is a perspective view showing a disassembled state excluding the adhesive resin portion for explaining the schematic configuration of the cutting blade according to the third embodiment, and FIG. 10 is a vertical sectional view including an axis.
In FIGS. 9 and 10, reference numeral 300 is a cutting blade, reference numeral 10 is a blade body, reference numeral 310 is a first hub member, reference numeral 312 is a first blade mounting surface, and reference numeral 318 is a first adhesive resin portion. , Reference numeral 320 indicates a second hub member, reference numeral 322 indicates a second blade mounting surface, and reference numeral 328 indicates a second adhesive resin portion.

As shown in FIGS. 9 and 10, the cutting blade 300 includes, for example, a blade main body 10, a first hub member 310, a first adhesive resin portion 318, a second hub member 320, and a second adhesive resin portion. 328 and.
Further, the blade main body 10 and the first hub member 310 are connected by the first adhesive resin portion 318, and the blade main body 10 and the second hub member 320 are connected by the second adhesive resin portion 328.

As shown in FIGS. 9 and 10, the first hub member 310 is arranged, for example, on one side A of the blade body 10 in the axis O direction.
The material forming the first hub member 310 can be arbitrarily set, but in this embodiment, it is formed of, for example, an aluminum (Al) alloy.

The first hub member 310 includes a first blade mounting surface 312 facing the blade main body 10 and an inclined portion 314 extending from the first blade mounting surface 312 toward one side A and being reduced in diameter toward one side A. It is provided with a drive source mounting portion 315 which is connected to one side A of the inclined portion 314 and whose diameter is increased toward the one side A.

The first blade mounting surface 312 has a circular outer shape when viewed along the axis O direction, and is centered on the axis O on the inner peripheral side from one side A to the other side of the first hub member 310. A circular hole 310 penetrating to B is formed. That is, the first blade mounting surface 112 is formed in an annular shape.
Further, the outer diameter of the first blade mounting surface 312 is formed to be smaller than that of the blade main body 10.

As shown in FIG. 10, the first adhesive resin portion 318 is arranged between the blade main body 10 and the first blade mounting surface 312, and connects the blade main body 10 and the first hub member 310.
Since the first adhesive resin portion 318 is the same as the first adhesive resin portion 118, the description thereof will be omitted.

As shown in FIGS. 9 and 10, the second hub member 320 has, for example, a circular outer shape, and a circular hole 320H centered on the axis O is formed on the inner peripheral side.
That is, the second hub member 320 is, for example, a ring-shaped flat plate formed in an annular shape when viewed along the axis O direction.
The material forming the second hub member 320 can be arbitrarily set, but in this embodiment, it is formed of, for example, an aluminum (Al) alloy.

The second blade mounting surface 322 is formed on the surface A on one side of the second hub member 320.
Further, the second blade mounting surface 322 is formed in an annular shape in which a circular hole 320H centered on the axis O is formed on the inner peripheral side when viewed along the axis O.
Further, the outer diameter of the second blade mounting surface 322 is formed to be smaller than that of the blade main body 10.
The circular hole 320H is formed coaxially and substantially the same diameter as the circular hole 13 of the blade body 10 when viewed along the axis O, for example, and the second hub member 320 is formed from one side A to the other in the thickness direction. It penetrates the side B.

As shown in FIG. 3, the second adhesive resin portion 228 is arranged between the blade main body 10 and the second blade mounting surface 322, and connects the blade main body 10 and the second hub member 320.
Since the second adhesive resin portion 328 is the same as the second adhesive resin portion 128, the description thereof will be omitted.

In this embodiment, since the first hub member 310 and the second hub member 320 do not have a boss portion, the first boss portion 310 and the second boss portion 320 are referred to as the axis O of the blade main body 10. It is preferable to use a jig or the like when mounting coaxially.

According to the cutting blade 300 according to the third embodiment, since the first hub member 310 and the second hub member 320 are formed to be lightweight without having a boss portion, the blade body 10 can be easily rotated at high speed. be able to.
Moreover, since the structure is simple, the manufacturing cost can be reduced.

It should be noted that various changes can be made to the technical matters described in the above-described embodiment without departing from the spirit of the invention.

For example, in the above embodiment, the case where the cutting blades 100, 200, and 300 include the first hub member and the second hub member has been described, but the first hub member and the second hub member It may be configured to include either one or another hub member used together with the first hub member and the second hub member.

Further, in the above embodiment, the case where the first hub member 110, 210, 310 and the second hub member 120, 220, 320 are made of an aluminum alloy has been described, but the first hub member 110, 210, The material forming the 310, the second hub member 120, 220, 320 may be arbitrarily set. For example, instead of the aluminum alloy, it may be formed of other metal materials such as pure aluminum, titanium alloy, pure titanium (Ti), and magnesium alloy.
Further, the first hub member 110, 210, 310 and the second hub member 120, 220, 320 are made of various practical resin materials such as engineering plastics such as polycarbonate, fiber reinforced plastics, and general-purpose plastics such as acrylic resin. May be formed by.

Further, in the above embodiment, the case where the first adhesive resin portion and the second adhesive resin portion are formed of the anaerobic adhesive has been described, but the type of the adhesive can be arbitrarily set. For example, an adhesive resin formed by curing an adhesive containing an ultraviolet curable resin, an epoxy resin, or a cyanoacrylate resin as a main component may be used.

Further, in the above embodiment, the case where the first blade mounting surface and the second blade mounting surface are formed to have a surface roughness Rmax5 or more and 50 μm or less has been described, but the first blade mounting surface and the second blade mounting surface have been described. The surface roughness of the above can be arbitrarily set. For example, either one or both of the first hub member and the second hub member may be formed with a surface roughness Rmax of less than Rmax5 and greater than 50 μm.

Further, in the above embodiment, for example, the case where the diamond superabrasive grain (abrasive grain) 16 protrudes from the bond phase 15 on the side surfaces 12A and 12B (12) on both sides of the blade main body 10 has been described. Whether or not the abrasive grains (abrasive grains) 16 are projected from the bond phase 15 and the amount of protrusion when the abrasive grains (abrasive grains) 16 are projected can be arbitrarily set. For example, only one side surface 12 of the blade main body 10 may be projected, or the side surfaces 12A and 12B (12) on both sides may not be projected.

Further, in the above embodiment, the case where the blade body 10 is an electrocast blade in which diamond superabrasive grains 16 are dispersed and arranged in a bond phase 15 made of nickel plating has been described. For example, Ni-P plating and Ni. Formed by electrocast blades or super hard alloys in which abrasive grains are dispersed in various applicable metal compounds such as -Co plating, Ni-B plating, copper (Cu) and copper alloys (for example, Cu-Sn). Various blade bodies may be used, such as an electrocast blade, a resin blade made of a phenol resin, or a porous vitrified blade formed by firing a vitreous (inorganic material).

For example, when the bond phase 15 is formed of resin (resin) instead of electroformed nickel (Ni), it is formed by the procedure as shown below, for example.
(1) First, for example, a mixed powder of powder as a material is cold-pressed to form a resin blade original plate.
The mixed powder of the powder as a material is prepared by mixing the powder as a raw material of the resin bond phase and the diamond superabrasive grains (abrasive grains) 16 in a predetermined ratio and mixing them until they become uniform. For example, a ball mill is used for mixing the material powder. A well-known applicable mixing device may be used instead of the ball mill.
Then, this mixed powder is filled in a mold (not shown) and cold pressed in the mold to form a disk-shaped resin blade original plate. Further, the filler may be mixed if necessary.

(2) Next, the resin blade original plate is hot-pressed and sintered.
The hot press of the resin blade original plate is, for example, a hot plate at 200 ° C., a heating time of 30 minutes, and a pressure of 10 MPa. Here, the hot press means, for example, pressurizing at a temperature at which the resin material powder can flow.

(3) After that, the blade main body (resin blade) is formed (manufactured) by grinding the inner peripheral portion and the outer peripheral portion of the resin blade original plate after hot pressing to predetermined diameter dimensions.

When the bond phase 15 is formed by a metal bond phase instead of electroformed nickel (Ni), the bond phase 15 is formed by, for example, the procedure shown below.
(1) First, the material powder constituting the metal bond phase and the abrasive grains are mixed in a predetermined ratio and mixed until uniform. Further, the filler may be mixed if necessary.
For example, a ball mill is used for mixing the material powder. A well-known applicable mixing device may be used instead of the ball mill.
(2) Then, this mixed powder is filled in a mold (not shown) to form a compacted product.
(3) Next, this powder compact is put into a sintering furnace and held at 800 ° C. for about 1 hour in an atmosphere of an inert gas such as nitrogen or argon to form a metal blade original plate.

When the bond phase is formed by a vitrified bond phase instead of electroformed nickel (Ni), for example, it is formed by the procedure as shown below.
(1) First, the material powder forming the vitrified bond phase and the abrasive grains are mixed to form the material powder. Further, the filler may be mixed if necessary. For example, a ball mill is used for mixing the material powder. A well-known applicable mixing device may be used instead of the ball mill.
(2) Next, this material powder is set in a mold to form a vitrified blade original plate.
(3) Next, the vitrified blade original plate is sintered (for example, placed in a sintering furnace and heated) to form a porous vitrified blade original plate (cutting blade original plate) having a three-dimensional crosslinked structure.

Further, the flowchart shown in FIG. 6 shows an example, and may be changed (omitted or added) as appropriate.

According to the cutting blade and the cutting blade manufacturing method according to the present invention, a high-precision cutting blade with small strain can be efficiently manufactured, so that it can be industrially used.

10 Blade body 15 Electroformed nickel bond phase (bond phase)
16 Diamond super-abrasive grain (abrasive grain)
100, 200, 300 Cutting blades 110, 220, 310 First hub member 112, 222, 312 First blade mounting surface 113, 223 Cylindrical boss portion (boss portion)
118, 228, 318 First adhesive resin part (adhesive)
120, 210, 320 Second hub member 122, 212, 322 Second blade mounting surface 128, 218, 328 Second adhesive resin part (adhesive)

Claims (6)

A cutting blade that rotates around the axis to cut the work piece.
Abrasive grains are dispersed and arranged in a bond phase formed in an annular shape centered on the axis and a circular hole centered on the axis is formed on the inner peripheral side, and a cutting edge is formed on the outer peripheral surface of the bond phase. With the blade body
It has a first blade mounting surface formed in an annular shape centered on the axis and a circular hole centered on the axis on the inner peripheral side, and is arranged on one side of the blade body in the axis direction. 1st hub member and
A first adhesive resin portion arranged between the blade body and the first blade mounting surface,
It has a second blade mounting surface formed in an annular shape centered on the axis and a circular hole centered on the axis on the inner peripheral side, and is arranged on the other side of the blade body in the axis direction. 2nd hub member and
A second adhesive resin portion arranged between the blade body and the second blade mounting surface,
Equipped with
A cutting blade characterized in that the first hub member is connected to the blade main body by the first adhesive resin portion, and the second hub member is connected to the blade main body by the second adhesive resin portion. The cutting blade according to claim 1.
The first hub member has a boss portion extending along the axis direction toward the second hub member, and the second hub member has a hole into which the boss portion is inserted along the axis. A cutting blade characterized by being formed. The cutting blade according to claim 1 or 2.
A cutting blade characterized in that at least one of the first blade mounting surface and the second blade mounting surface is formed with a surface roughness Rmax of 5 to 50 μm. The cutting blade according to any one of claims 1 to 3.
A cutting blade characterized in that abrasive grains protrude from the surface of the bond phase on at least one side surface of the blade body in the axial direction. A cutting blade manufacturing method for manufacturing the cutting blade according to any one of claims 1 to 4.
The hub preparation process for preparing the first hub member and the second hub member,
The blade body preparation process to prepare the blade body and
The first hub member coated with the adhesive on the first blade mounting surface and the second hub member coated with the adhesive on the second blade mounting surface approach and contact the blade body along the axis. A hub mounting process for connecting the blade body to the first hub member and the second hub member,
A method for manufacturing a cutting blade, which comprises. The cutting blade manufacturing method according to claim 5.
A method for manufacturing a cutting blade, which comprises applying an anaerobic adhesive to the first blade mounting surface and the second blade mounting surface.

Images