JP6983713B2 - 光学式センサ、およびその光学式センサを備えた装置 - Google Patents

光学式センサ、およびその光学式センサを備えた装置 Download PDF

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Publication number
JP6983713B2
JP6983713B2 JP2018072602A JP2018072602A JP6983713B2 JP 6983713 B2 JP6983713 B2 JP 6983713B2 JP 2018072602 A JP2018072602 A JP 2018072602A JP 2018072602 A JP2018072602 A JP 2018072602A JP 6983713 B2 JP6983713 B2 JP 6983713B2
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Japan
Prior art keywords
light
optical sensor
resin
sensor according
sensor
Prior art date
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Active
Application number
JP2018072602A
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English (en)
Japanese (ja)
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JP2019184315A (ja
JP2019184315A5 (enExample
Inventor
千裕 名倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2018072602A priority Critical patent/JP6983713B2/ja
Priority to US16/372,208 priority patent/US10969284B2/en
Publication of JP2019184315A publication Critical patent/JP2019184315A/ja
Publication of JP2019184315A5 publication Critical patent/JP2019184315A5/ja
Application granted granted Critical
Publication of JP6983713B2 publication Critical patent/JP6983713B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/085—Force or torque sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/166—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using photoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)
JP2018072602A 2018-04-04 2018-04-04 光学式センサ、およびその光学式センサを備えた装置 Active JP6983713B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2018072602A JP6983713B2 (ja) 2018-04-04 2018-04-04 光学式センサ、およびその光学式センサを備えた装置
US16/372,208 US10969284B2 (en) 2018-04-04 2019-04-01 Optical sensor and apparatus including optical sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018072602A JP6983713B2 (ja) 2018-04-04 2018-04-04 光学式センサ、およびその光学式センサを備えた装置

Publications (3)

Publication Number Publication Date
JP2019184315A JP2019184315A (ja) 2019-10-24
JP2019184315A5 JP2019184315A5 (enExample) 2021-04-08
JP6983713B2 true JP6983713B2 (ja) 2021-12-17

Family

ID=68095973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018072602A Active JP6983713B2 (ja) 2018-04-04 2018-04-04 光学式センサ、およびその光学式センサを備えた装置

Country Status (2)

Country Link
US (1) US10969284B2 (enExample)
JP (1) JP6983713B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114585893A (zh) 2019-10-24 2022-06-03 株式会社安川电机 扭矩传感器、机器人以及扭矩计算方法
JP7706931B2 (ja) * 2021-05-11 2025-07-14 キヤノン株式会社 力覚センサおよびそれを有するロボット
EP4174465A1 (en) 2021-10-27 2023-05-03 Canon Kabushiki Kaisha Sensor, device, system, and manufacturing method for product
KR102677450B1 (ko) * 2022-03-25 2024-06-20 삼성전자주식회사 광학 기반 힘 추정 장치 및 방법

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60209128A (ja) * 1984-04-02 1985-10-21 Oki Electric Ind Co Ltd 感圧センサ
JPS6141938A (ja) * 1984-08-03 1986-02-28 Oki Electric Ind Co Ltd 二次元感圧センサ
JPS61228681A (ja) * 1985-04-01 1986-10-11 Sharp Corp 光結合半導体装置
US20090159799A1 (en) * 2007-12-19 2009-06-25 Spectral Instruments, Inc. Color infrared light sensor, camera, and method for capturing images
US8404967B2 (en) * 2008-01-08 2013-03-26 Certainteed Corporation Photovoltaic module
JP5489538B2 (ja) * 2009-06-03 2014-05-14 キヤノン株式会社 力覚センサ
JP5948025B2 (ja) * 2010-08-06 2016-07-06 株式会社半導体エネルギー研究所 液晶表示装置
JP5602582B2 (ja) * 2010-10-27 2014-10-08 キヤノン株式会社 力覚センサ
US9377900B1 (en) * 2012-06-18 2016-06-28 Amazon Technologies, Inc. Optical touch sensor
JP2015197357A (ja) * 2014-04-01 2015-11-09 キヤノン株式会社 光学式力角センサおよびこれを用いた装置
US10444866B2 (en) * 2016-11-14 2019-10-15 Microsoft Technology Licensing, Llc Force sensor for a stylus

Also Published As

Publication number Publication date
US20190310151A1 (en) 2019-10-10
US10969284B2 (en) 2021-04-06
JP2019184315A (ja) 2019-10-24

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