JP6981918B2 - Board processing methods, board processing equipment, and computer programs - Google Patents

Description

The present invention relates to a substrate processing method and a substrate processing apparatus for processing a substrate, and a computer program executed by a control device provided in the substrate processing apparatus. The substrate to be processed includes, for example, a semiconductor wafer, a substrate for an optical disk, a substrate for a magnetic disk, a substrate for a magneto-optical disk, a substrate for a photomask, a ceramic substrate, a substrate for a solar cell, a liquid crystal display device, and an organic EL (electroluminescence) display. An FPD (Flat Panel Display) substrate for an apparatus or the like is included.

In the manufacturing process of a semiconductor device, a liquid crystal display device, or the like, a substrate processing device for processing a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display device is used. Patent Document 1 discloses scheduling for a substrate processing apparatus including a plurality of processing units.
In the scheduling described in Patent Document 1, a plurality of processing units are classified into a plurality of processing sections based on a transport path length or a transport time. When creating a schedule for processing a substrate, one processing section is selected from a plurality of processing sections. After that, one processing unit is selected from the plurality of processing units belonging to the selected processing partition. The schedule is created so that the substrate is processed by the selected processing unit. By executing this schedule, the substrate is actually transported and processed.

Further, in the scheduling described in Patent Document 1, a processing partition is selected based on the magnitude relation of the partition usage rate, and when there are a plurality of processing partitions having the same partition usage rate, the processing partition is based on the final use time of the partition. It is disclosed to select. The partition utilization is a value obtained by dividing the time required for processing the substrate by the number of effective (available) processing units in the processing partition for processing the substrate.

In paragraph 0059 of Patent Document 1, there is a description that "the latest unit final use time of the processing unit MPC belonging to the processing section PZ is registered in the storage unit 63 as the section last use time." Paragraph 0999 of Patent Document 1 states that "the first priority is given to the division utilization rate, the second priority is given to the last use time of the division, and the third priority is given to the division number (transport distance or transportation time). The order is given. However, the priority of the last use time of the lot and the use rate of the lot may be reversed. "

Japanese Unexamined Patent Publication No. 2017-183545

In the scheduling described in Patent Document 1, a plurality of processing partitions are evenly selected by selecting processing partitions based on the magnitude relation of the partition utilization rate, and all the processing units provided in the substrate processing apparatus are used evenly. I am creating a schedule so that.
However, according to the research of the present inventor, the scheduling described in Patent Document 1 cannot determine the input status of the substrate in each processing section, and therefore, an empty processing unit exists in another processing section. Nevertheless, it was found that the processing compartment in use by all processing units may be selected.

Specifically, it has been found that such a processing section is selected when the processing time of the substrate is reduced. For example, as shown in FIG. 17, the sixth substrate W6 is a process belonging to the third processing section PZ3 even though there are processing unit MPCs available in the first processing section PZ1 and the second processing section PZ1. It is processed by the unit MPC17. In this case, it is necessary to delay the transfer of the substrate W6 until the processing unit MPC 17 becomes empty, which lowers the operating rate of the substrate processing apparatus. Therefore, there is room for improvement in the invention described in Patent Document 1.

Therefore, one of the objects of the present invention is a substrate processing method, a substrate processing apparatus, and a computer program capable of evenly using all the processing units provided in the substrate processing apparatus and increasing the operating rate of the substrate processing apparatus. Is to provide.

The invention according to claim 1 for achieving the above object is a substrate processing method executed by a substrate processing apparatus that transfers the substrate to a substrate transfer system from a carrier on a load port to a plurality of processing units that process the substrate. Therefore, each of the plurality of processing units represents the transportation time required to transfer the substrate from the carrier on the load port to the processing unit, or the distance from the load port to the processing unit. The affiliation confirmation step for confirming which of the plurality of processing sections classified based on the distance belongs to, and the unit last use time representing the time when the processing unit is last used for processing the substrate are described above. Based on the unit last use time acquisition step acquired for each of the plurality of processing units, the plurality of unit last use times acquired in the unit final use time acquisition step, and the transfer time for the plurality of processing units. , The correction unit final use time calculation step for calculating the correction unit final use time representing the time obtained by subtracting the transfer time from the unit last use time in the same processing unit for each of the plurality of processing units, and the correction unit. Based on the last use times of the plurality of modification units obtained in the last use time calculation step, the partition final use representing the oldest time among the modification unit last use times of the plurality of the processing units belonging to the same processing partition. The partition final use time is the most based on the partition final use time specifying step that specifies the time for each of the plurality of processing partitions and the plurality of the partition final use times specified in the partition final use time identification step. One of the processing units is selected from the partition selection step of selecting the old one processing section from the plurality of processing sections and the plurality of the processing units belonging to the processing section selected in the section selection step. This is a substrate processing method including a unit selection step for transferring the substrate from the carrier on the load port to the processing unit selected in the unit selection step to the substrate transfer system.

According to this configuration, one processing partition is selected from a plurality of processing partitions based on the last usage time of the partition, instead of selecting the processing partition based on the magnitude relation of the partition usage rate. Then, one processing unit is selected from the plurality of processing units belonging to the selected processing section. The substrate is then transported by the substrate transfer system from the carrier on the load port to the selected processing unit. Therefore, not only when the processing time of the board does not change, but also when the processing time of the board decreases, a plurality of processing sections can be selected evenly, and all the processing units provided in the board processing device should be used evenly. Can be done. This makes it possible to increase the operating rate of the substrate processing apparatus.

Moreover, the partition last use time is specified based on the oldest modified unit last use time, not the oldest unit last use time. The modification unit last use time is the unit last use time, which represents the time when the processing unit was last used to process the board, minus the transfer time required to transfer the board from the carrier on the load port to the processing unit. It is the time. Therefore, it is possible to reduce the difference in transport time among a plurality of processing sections, and it is possible to avoid selecting only the processing section closer to the load port. As a result, a plurality of processing sections can be selected more evenly.

The invention according to claim 2 is a substrate processing method executed by a substrate processing apparatus that transfers the substrate to a substrate transfer system from a carrier on a load port to a plurality of processing units that process the substrate. Each of the processing units is classified based on the transfer time required to transfer the substrate from the carrier on the load port to the processing unit, or the transfer distance representing the distance from the load port to the processing unit. Each of the plurality of processing units has an affiliation confirmation step for confirming which of the plurality of processing units the processing unit belongs to, and a unit last use time indicating the time when the processing unit is last used for processing the substrate. Based on the unit last use time acquisition step acquired in the unit last use time acquisition step and the unit last use time acquired in the unit last use time acquisition step, the unit last use time of the plurality of the processing units belonging to the same processing partition. The partition final use time specifying step for specifying the partition last use time representing the oldest time for each of the plurality of processing partitions, and the plurality of the partition final use times specified in the partition final use time specifying step. A partition selection step for selecting one of the processing partitions having the oldest last use time of the partition from the plurality of processing partitions, and a plurality of the processes belonging to the processing partition selected in the partition selection step. A unit selection step for selecting one of the processing units from the units, and a substrate transfer step for causing the substrate transfer system to transfer the substrate from the carrier on the load port to the processing unit selected in the unit selection step. , A substrate processing method.

According to this configuration, one processing partition is selected from a plurality of processing partitions based on the last usage time of the partition, instead of selecting the processing partition based on the magnitude relation of the partition usage rate. Then, one processing unit is selected from the plurality of processing units belonging to the selected processing section. The substrate is then transported by the substrate transfer system from the carrier on the load port to the selected processing unit. Therefore, not only when the processing time of the board does not change, but also when the processing time of the board decreases, a plurality of processing sections can be selected evenly, and all the processing units provided in the board processing device should be used evenly. Can be done. This makes it possible to increase the operating rate of the substrate processing apparatus.

The start time of the substrate processing may be the time when the substrate is carried into the processing unit, the time when the rotation of the substrate is started, or other than these. The end time of the board processing, that is, the last use time of the unit may be the time when the board is carried out from the processing unit, the time when the rotation of the board is stopped, or other than these. good. The time when the substrate is carried into the processing unit and the time when it is carried out from the processing unit are, for example, the movement of the shutter for opening and closing the opening provided in the processing chamber of the processing unit to the open position (the position where the opening is opened). It may be the time to start.

The invention according to claim 3 further includes a transport time registration step for registering the same value as the transport time for a plurality of the processing units belonging to the same processing section before the modification unit final use time calculation step. The substrate processing method according to claim 1, which includes.
According to this configuration, the same value is registered as the transport time for a plurality of processing units belonging to the same processing section. Even if a plurality of processing units belong to the same processing section, the transport distance is strictly different, so that the transport time is also strictly different. However, if the processing compartments to which they belong are the same, the difference in transport time is small and the transport times are approximately equal among these processing units. Therefore, if the same value is registered as the transfer time for a plurality of processing units belonging to the same processing section, it is possible to simplify the setting of the transfer time while reducing the difference in the transfer time between these processing sections.

According to the fourth aspect of the present invention, the section selection step includes a first search step for searching the processing section having the oldest last use time of the section among the plurality of processing sections, and a plurality of the first search steps. When the processing partition of the above is found as a candidate partition, the processing partition having the largest number of the processing units having the oldest last use time of the unit is searched among the plurality of the processing partitions included in the candidate partition. 2. The item according to any one of claims 1 to 3, comprising a search step and a selection step of selecting one of the processing sections from at least one of the processing sections found in the second search step. This is a substrate processing method.

According to this configuration, if there are multiple processing partitions with the oldest partition last use time, the processing partition with the largest number of processing units with the oldest unit last use time is selected from those processing partitions. To. If an abnormality occurs in the processing unit before the substrate is transferred to the selected processing unit or while the substrate is being transferred to the selected processing unit, it is necessary to reselect another processing unit. In such a case, if there is another processing unit with the oldest last use time in the same processing partition, that processing unit can be selected as a new processing unit. Therefore, a new transfer path of the substrate can be set with a relatively simple change.

In the partition selection step, when a plurality of the processing sections are found in the second search step, the processing section having the minimum transport time or transport distance is selected as the plurality of the processing sections found in the second search step. It may further include a third search step to search within. In this case, the selection step may be a step of selecting one of the processing sections from at least one of the processing sections found in the third search step.

The substrate processing method further includes a final use time initialization step that changes the unit final use time of all the processing units to the same value (for example, 0) before the unit final use time acquisition step. May be good.
The invention according to claim 5 has a processing time shorter than the processing time of the nearest substrate transferred to any of the plurality of processing units, and the substrate transfer step is performed on the processing unit selected in the unit selection step. The substrate processing method according to any one of claims 1 to 4, further comprising a substrate processing step for processing the substrate later.

According to this configuration, the processing time of the substrate is shorter than that of the latest substrate. Even in such a case, since one processing partition is selected from a plurality of processing partitions based on the last use time of the partition, a plurality of processes are performed as compared with the case of selecting a processing partition based on the magnitude relation of the partition usage rate. The parcels can be selected evenly. Therefore, even if the transfer path and processing time of the substrate are different, all the processing units can be used evenly, and the operating rate of the substrate processing apparatus can be further increased.

The invention according to claim 6 has a load port on which a carrier accommodating a substrate is placed, a plurality of processing units for processing the substrate conveyed from the carrier on the load port, and a load port. It is a substrate processing apparatus including a substrate transport system for transporting the substrate between the carrier and the plurality of processing units, and a control device for controlling the substrate transport system.

The control device determines the transport time required for each of the plurality of processing units to transport the substrate from the carrier on the load port to the processing unit, or the distance from the load port to the processing unit. A affiliation confirmation step to confirm which of the plurality of processing sections classified based on the represented transport distance belongs to, and a unit last use time representing the time when the processing unit is last used for processing the substrate. , The unit last use time acquisition step acquired for each of the plurality of processing units, the plurality of the unit final use times acquired in the unit final use time acquisition step, and the transfer time for the plurality of processing units. Based on the correction unit final use time calculation step for calculating the correction unit final use time representing the time obtained by subtracting the transfer time from the unit last use time in the same processing unit for each of the plurality of processing units, and the above. Modification unit last use time A partition representing the oldest time among the modification unit last usage times of the plurality of processing units belonging to the same processing partition based on the modification unit last usage time obtained in the calculation step. The partition final use time based on the partition final use time specifying step for specifying the final use time for each of the plurality of processing partitions and the plurality of the partition final use times specified in the partition final use time specifying step. Is one of the processing units selected from the partition selection step of selecting the oldest processing partition from the plurality of processing partitions and the plurality of processing units belonging to the processing partition selected in the partition selection step. A unit selection step for selecting a unit, and a substrate transfer step for causing the substrate transfer system to transfer the substrate from the carrier on the load port to the processing unit selected in the unit selection step. According to this configuration, the same effect as the above-mentioned effect can be obtained.

The invention according to claim 7 has a load port on which a carrier accommodating a substrate is placed, a plurality of processing units for processing the substrate conveyed from the carrier on the load port, and a load port. It is a substrate processing apparatus including a substrate transport system for transporting the substrate between the carrier and the plurality of processing units, and a control device for controlling the substrate transport system.

The control device determines the transport time required for each of the plurality of processing units to transport the substrate from the carrier on the load port to the processing unit, or the distance from the load port to the processing unit. A affiliation confirmation step to confirm which of the plurality of processing sections classified based on the represented transport distance belongs to, and a unit last use time representing the time when the processing unit is last used for processing the substrate. , A plurality of the above belonging to the same processing section based on the unit last use time acquisition step acquired for each of the plurality of processing units and the plurality of the unit last use times acquired in the unit final use time acquisition step. The partition final use time representing the oldest time among the unit final use times of the processing unit is specified in the partition final use time specifying step for specifying each of the plurality of processing partitions and the partition final use time specifying step. The partition selection step of selecting one of the processing partitions having the oldest final use time of the partition from the plurality of processing partitions and the partition selection step of selecting the processing partition based on the final use time of the plurality of partitions. The unit selection step of selecting one of the processing units from a plurality of the processing units belonging to the processing section, and the processing of selecting the substrate from the carrier on the load port in the unit selection step in the substrate transfer system. Perform the board transfer step of transporting to the unit. According to this configuration, the same effect as the above-mentioned effect can be obtained.

According to a eighth aspect of the present invention, the control device registers the same value as the transfer time for a plurality of the processing units belonging to the same processing section before the modification unit final use time calculation step. The substrate processing apparatus according to claim 6, further performing a time registration step. According to this configuration, the same effect as the above-mentioned effect can be obtained.
According to a ninth aspect of the present invention, the section selection step includes a first search step for searching the processing section having the oldest last use time of the section among the plurality of processing sections, and a plurality of the first search steps. When the processing partition of the above is found as a candidate partition, the processing partition having the largest number of the processing units having the oldest last use time of the unit is searched among the plurality of the processing partitions included in the candidate partition. 2. The item according to any one of claims 6 to 8, comprising a search step and a selection step of selecting one of the processing sections from at least one of the processing sections found in the second search step. It is a board processing device. According to this configuration, the same effect as the above-mentioned effect can be obtained.

According to a tenth aspect of the present invention, the control device applies to the processing unit selected in the unit selection step with a processing time shorter than the processing time of the nearest substrate conveyed to any of the plurality of processing units. The substrate processing apparatus according to any one of claims 6 to 9, further performing a substrate processing step for processing the substrate after the substrate transfer step. According to this configuration, the same effect as the above-mentioned effect can be obtained.

The invention according to claim 11 is a computer program executed by a control device provided in a board processing device that transfers the board to a board transfer system from a carrier on a load port to a plurality of processing units that process the board. It is a computer program in which a group of steps is incorporated so as to cause a computer as a control device to execute the substrate processing method according to any one of claims 1 to 5. The computer program may be recorded on a computer-readable recording medium. The recording medium may be an optical disk such as a compact disc or a semiconductor memory such as a memory card.

It is a schematic plan view of the substrate processing apparatus which concerns on one Embodiment of this invention. FIG. 3 is a schematic cross-sectional view of a substrate processing apparatus showing a vertical cross section along the cutting line II-II shown in FIG. 1. It is a schematic sectional drawing for demonstrating the structural example of a processing unit. It is a schematic sectional drawing for demonstrating another configuration example of a processing unit. It is a block diagram for demonstrating the electric structure of a substrate processing apparatus. It is a flowchart for demonstrating the processing example executed by the computer provided in the board processing apparatus. It is a time chart showing a provisional timetable created at the time of scheduling. It is a time chart showing a provisional timetable created at the time of scheduling. It is a time chart showing a provisional timetable created at the time of scheduling. It is a flowchart for demonstrating an example of a process section selection process (step S3 of FIG. 6). It is a table which shows an example of the processing partition data stored in the storage part of a computer. It is a table which shows other example of the processing partition data stored in the storage part of a computer. It is a table which shows an example of the input possibility rate, the partition last use time, the oldest chamber number, and the effective chamber number when making the schedule of the 1st board. It is a table which shows an example of the input possibility rate, the partition last use time, the oldest chamber number, and the effective chamber number when making the schedule of the 2nd board. It is a table which shows an example of the input possibility rate, the partition last use time, the oldest chamber number, and the effective chamber number when making the schedule of the 3rd board. It is a table which shows an example of the input possibility rate, the partition last use time, the oldest chamber number, and the effective chamber number when making the schedule of the 4th board. It is a table which shows an example of the input possibility rate, the partition last use time, the oldest chamber number, and the effective chamber number when making the schedule of the 5th board. An example of the input possibility rate, the last use time of the partition, the number of oldest chambers, and the number of effective chambers when creating the schedule of the first board in the state where the four processing units belonging to the first processing section are invalid is shown. It is a table. An example of the input availability rate, the last use time of the partition, the number of oldest chambers, and the number of effective chambers when the schedule of the second board is created in the state where the four processing units belonging to the first processing section are invalid is shown. It is a table. An example of the input availability rate, the last use time of the partition, the number of oldest chambers, and the number of effective chambers when the schedule of the third board is created in the state where the four processing units belonging to the first processing section are invalid is shown. It is a table. An example of the input availability rate, the last use time of the partition, the number of oldest chambers, and the number of effective chambers when the schedule of the fourth board is created in the state where the four processing units belonging to the first processing section are invalid is shown. It is a table. An example of the input availability rate, the last use time of the partition, the number of oldest chambers, and the number of effective chambers when the schedule of the fifth board is created in the state where the four processing units belonging to the first processing section are invalid is shown. It is a table. An example of the input availability rate, the last use time of the partition, the number of oldest chambers, and the number of effective chambers when the schedule of the sixth board is created in the state where the four processing units belonging to the first processing section are invalid is shown. It is a table. It is a table which shows an example of the unit last use time, the transport time, and the modification unit last use time after the schedule which uses all the processing units is made. In the table showing an example of the input ready rate, the partition last use time, the number of oldest chambers, and the number of effective chambers when creating the schedule for the first board after the schedule for using all the processing units is created. be. In the table showing an example of the input ready rate, the partition last use time, the number of oldest chambers, and the number of effective chambers when creating the schedule for the second board after the schedule for using all the processing units is created. be. In the table showing an example of the input ready rate, the last use time of the partition, the number of oldest chambers, and the number of effective chambers when the schedule for the third board is created after the schedule for using all the processing units is created. be. In the table showing an example of the input ready rate, the last use time of the partition, the number of oldest chambers, and the number of effective chambers when the schedule for the fourth board is created after the schedule for using all the processing units is created. be. In the table showing an example of the input ready rate, the last use time of the partition, the number of oldest chambers, and the number of effective chambers when the schedule for the fifth board is created after the schedule for using all the processing units is created. be. It is a table showing an example of the input possibility rate, the section last use time, the number of oldest chambers, and the number of effective chambers according to the first embodiment, and shows the state before creating the schedule of the first board. It is a table showing an example of the input possibility rate, the partition last use time, the number of oldest chambers, and the number of effective chambers according to the first embodiment, and shows the state before creating the schedule of the second substrate. It is a table showing an example of the input possibility rate, the section last use time, the number of oldest chambers, and the number of effective chambers according to the first embodiment, and shows the state before creating the schedule of the third substrate. It is a table showing an example of the input possibility rate, the section last use time, the number of oldest chambers, and the number of effective chambers according to the first embodiment, and shows the state before creating the schedule of the fourth substrate. It is a table showing an example of the input possibility rate, the partition last use time, the number of oldest chambers, and the number of effective chambers according to the first embodiment, and shows the state before creating the schedule of the fifth substrate. It is a table which shows an example of the input possibility rate, the partition last use time, the oldest chamber number, and the effective chamber number which concerns on 1st Example, and shows the state before making the schedule of the 6th board. It is a time chart which shows the schedule which concerns on 1st Example, and shows an example of the schedule after scheduling of the 1st and 2nd boards to which the 1st recipe which performs 1st processing time processing of a board is applied. .. It is a time chart which shows the schedule which concerns on the 1st Example, and shows an example of the schedule after scheduling of the 3rd to 6th boards to which the 2nd recipe which performs the 2nd processing time of a board is applied. .. It is a table which shows an example of the section utilization rate, the section last use time, and the number of effective chambers which concerns on the 1st comparative example, and shows the state before making the schedule of the 1st board. It is a table which shows an example of the section utilization rate, the section last use time, and the number of effective chambers which concerns on the 1st comparative example, and shows the state before making the schedule of the 2nd board. It is a table showing an example of the partition usage rate, the partition final use time, and the number of effective chambers according to the first comparative example, and shows the state before creating the schedule of the third substrate. It is a table showing an example of the partition usage rate, the partition final use time, and the number of effective chambers according to the first comparative example, and shows the state before creating the schedule of the fourth substrate. It is a table showing an example of the partition usage rate, the partition final use time, and the number of effective chambers according to the first comparative example, and shows the state before creating the schedule of the fifth substrate. It is a table which shows an example of the section utilization rate, the section last use time, and the number of effective chambers which concerns on the 1st comparative example, and shows the state before making the schedule of the 6th board. It is a time chart which shows the schedule which concerns on the 1st comparative example, and shows an example of the schedule after the partition utilization rate is given priority first, the processing section is selected, and the scheduling of the 3rd to 6th boards is performed. .. It is a table which shows an example of the unit last use time, the transport time, and the correction unit last use time which concerns on 2nd Embodiment. It is a time chart which shows the schedule which concerns on 2nd Embodiment, and shows an example of the schedule after scheduling of the 1st to 11th boards to which the 1st recipe which performs 1st processing time of a board is applied. .. It is a time chart which shows the schedule which concerns on 2nd Example, and shows the continuation of FIG. 19A. It is a time chart which shows the schedule which concerns on 2nd Embodiment, and shows an example of the schedule after scheduling of the twelfth board to which the 2nd recipe which performs the 2nd processing time of a substrate is applied. It is a time chart which shows the schedule which concerns on the 2nd Example, and shows an example of the schedule after scheduling of the 13th to 15th boards to which the 2nd recipe which performs the 2nd processing time of a board is applied. .. It is a time chart which shows the schedule which concerns on the 2nd comparative example, and shows an example of the schedule after the partition utilization rate is given priority first, the processing section is selected, and the 12th to 15th boards are scheduled. ..

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic plan view of a substrate processing apparatus 1 according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of the substrate processing apparatus 1 showing a vertical cross section along the cutting line II-II shown in FIG.
The substrate processing device 1 is a single-wafer processing device that processes disk-shaped substrates W such as semiconductor wafers one by one. The substrate processing device 1 includes a carrier holding unit 2, an indexer unit 3, and a processing unit 4.

The carrier holding unit 2 includes a plurality of load port LPs each holding a carrier C, which is a board container capable of accommodating a plurality of boards W. The load port LP is a carrier holding unit that holds the carrier C. The load port LP is a position where the carrier C is charged into the substrate processing device 1. The carrier C is opened and closed by the load port LP.
The indexer unit 3 includes an indexer robot IR. The indexer robot IR takes out the unprocessed substrate W from the carrier C mounted on the carrier holding unit 2 and passes it to the processing unit 4, and receives the processed substrate W from the processing unit 4 and receives the processed substrate W from the carrier holding unit 2. The storage operation of storing in the carrier C held in 2 is executed.

The processing unit 4 includes a plurality of processing units MPC1 to MPC24 (hereinafter collectively referred to as “processing unit MPC”), a first main transfer robot CR1, a second main transfer robot CR2, and a first delivery unit PASS1. Includes the second delivery unit PASS2. The indexer robot IR, the first main transfer robot CR1 and the second main transfer robot CR2 constitute a substrate transfer system that transfers the substrate W between the carrier holding unit 2 and the processing unit MPC.

In the processing section 4, a transport path 5 extending linearly from the indexer section 3 is formed in a plan view. In the transport path 5, the first transfer unit PASS1, the first main transfer robot CR1, the second transfer unit PASS2, and the second main transfer robot CR2 are arranged in order from the indexer unit 3 side. The first delivery unit PASS1 is a unit that mediates the delivery of the substrate W between the indexer robot IR and the first main transfer robot CR1. The second delivery unit PASS2 is a unit that mediates the delivery of the substrate W between the first main transfer robot CR1 and the second main transfer robot CR2. The first and second transfer units PASS1 and PASS2 include a plurality of board mounting bases 15 that temporarily hold the board W.

The plurality of processing units MPC form a plurality of towers TW1 to TW6 (hereinafter collectively referred to as "tower TW"). Each tower TW includes a plurality of processing unit MPCs (for example, four processing unit MPCs) stacked one above the other. The plurality of tower TWs are arranged along the transport path 5. The three towers TW1, TW3, and TW5 are arranged on one side of the transport path 5. The remaining three towers TW2, TW4, and TW6 are arranged on the other side of the transport path 5.

The plurality of processing units MPC form three pairs of tower TWs facing each other across the transport path 5. Specifically, the tower TW1 and the tower TW2 face each other with the transport path 5 interposed therebetween. Similarly, the tower TW3 and the tower TW4 face each other across the transport path 5, and the tower TW5 and the tower TW6 face each other across the transport path 5.
The distance from the indexer section 3 to the tower TW1 is equal to or approximately equal to the distance from the indexer section 3 to the tower TW2. Therefore, the transport time required to transport the substrate W from the indexer unit 3 to the tower TW1 is equal to or substantially equal to the transfer time required to transfer the substrate W from the indexer unit 3 to the tower TW2. That is, each pair of towers (TW1 and TW2, TW3 and TW4, TW5 and TW6) are arranged at positions where the distances from the indexer unit 3 are equal to or substantially equal to each other, and the substrates are arranged from the indexer unit 3 to the tower TW of each pair. The transport time required to transport W is equal or approximately equal.

The three pairs of towers (TW1 and TW2, TW3 and TW4, TW5 and TW6) form three processing compartments PZ1, PZ2, PZ3 (hereinafter collectively referred to as "treatment compartment PZ"). That is, the pair of towers TW1 and TW2 facing each other across the transport path 5 at the position closest to the indexer portion 3 form the first processing section PZ1. Next, the pair of towers TW3 and TW4 facing each other across the transport path 5 at a position close to the indexer portion 3 form a second processing section PZ2. Next, the pair of towers TW5 and TW6 facing each other across the transport path 5 at a position close to the indexer portion 3 form a third processing section PZ3.

The first delivery unit PASS1 is arranged between the first processing section PZ1 and the indexer section 3. The first main transfer robot CR1 is arranged on the side opposite to the indexer unit 3 with respect to the first delivery unit PASS1. The first main transfer robot CR1 is arranged between the pair of towers TW1 and TW2 in a plan view. The second delivery unit PASS2 is arranged on the side opposite to the first delivery unit PASS1 with respect to the first main transfer robot CR1. The first main transfer robot CR1 is arranged so as to face the first delivery unit PASS1, the towers TW1 and TW2 of the first processing section PZ1, and the second delivery unit PASS2.

The second main transfer robot CR2 is arranged on the side opposite to the first main transfer robot CR1 with respect to the second transfer unit PASS2. The second main transfer robot CR2 is arranged between the pair of towers TW3 and TW4 in a plan view, and is arranged between the pair of towers TW5 and TW6 in a plan view. The second main transfer robot CR2 is arranged so as to face the second delivery unit PASS2 and the towers TW3 to TW6.

The indexer robot IR is a horizontal articulated arm type robot in this embodiment. The indexer robot IR includes a hand 11 that holds the substrate W, an articulated arm 12 that is coupled to the hand 11, and an arm rotation mechanism (not shown) that rotates the articulated arm 12 around a vertical rotation axis 13. It includes an arm elevating mechanism (not shown) that moves the articulated arm 12 up and down. With such a configuration, the indexer robot IR makes the carrier C and the first delivery unit PASS1 held in the arbitrary load port LP access the hand 11, and carries in / out the board W to the access destination. As a result, the indexer robot IR conveys the substrate W between the processing unit 4 (more accurately, the first delivery unit PASS1) and the arbitrary carrier C.

As the first main transfer robot CR1 and the second main transfer robot CR2, a substrate transfer robot having substantially the same configuration can be used. Such a board transfer robot preferably includes a pair of hands 21 and 22 for holding the board W, a pair of hand advancing and retreating mechanisms 23 and 24 for advancing and retreating the pair of hands 21 and 22 in the horizontal direction, and a pair of hands. It includes a hand rotation mechanism (not shown) that rotates the advance / retreat mechanisms 23 and 24 around the vertical rotation axis 25, and a hand elevating mechanism (not shown) that moves the hand advance / retreat mechanisms 23 and 24 up and down.

With such a configuration, the first main transfer robot CR1 and the second main transfer robot CR2 take out the board W from the access destination with one hand 21 and 22, and the board W with respect to the access destination with the other hands 21 and 22. Can be brought in. By applying the substrate transfer robot having such a configuration to the first main transfer robot CR1, the first main transfer robot CR1 has the first transfer unit PASS1, the tower TW, the plurality of processing units MPC forming the tower TW2, and the first. 2 Hands 21 and 22 can be directly accessed by the delivery unit PASS2, and the board W can be carried in / out to the access destination. Further, by applying the substrate transfer robot having the above configuration to the second main transfer robot CR2, the second main transfer robot CR2 has the second transfer unit PASS2 and a plurality of processing units forming the towers TW3 to TW6. The hands 21 and 22 can be directly accessed by the MPC, and the board W can be carried in / out to the access destination.

Although FIG. 2 shows an example in which the indexer robot IR includes one hand 11, the indexer robot IR may include two hands 11. In this case, the first main transfer robot CR1 may include four hands 21 and 22. Similarly, the second main transfer robot CR2 may include four hands 21 and 22. When the indexer robot IR includes two hands 11, the indexer robot IR can hold two boards W at the same time by using the two hands 11. Therefore, the indexer robot IR performs the simultaneous unloading operation of simultaneously unloading the two boards W and the simultaneous unloading operation of simultaneously loading the two boards W to the carrier C on the load port LP and the first delivery unit PASS1. It can be carried out.

FIG. 3 is a schematic cross-sectional view for explaining a configuration example of the processing unit MPC. The processing unit MPC shown in FIG. 3 is a surface cleaning unit that cleans the surface of the substrate with a chemical solution. The processing unit MPC includes a processing chamber 31 provided with an opening 31a through which the substrate W passes, a processing cup 32 arranged in the processing chamber 31, and a spin chuck 33 arranged in the processing cup 32. The processing chamber 31 includes a partition wall 31b provided with an opening 31a and a shutter 31c for opening and closing the opening 31a.

The processing unit MPC further includes a chemical liquid nozzle 34 that supplies the chemical liquid to the substrate W, and a rinse liquid nozzle 35 that supplies the rinse liquid (pure water or the like) to the substrate W. The spin chuck 33 rotates around the vertical rotation axis 36 passing through the central portion of the substrate W while holding one substrate W horizontally. The chemical liquid nozzle 34 and the rinse liquid nozzle 35 are arranged in the processing chamber 31, and discharge the chemical liquid and the rinse liquid toward the upper surface of the substrate W held by the spin chuck 33, respectively. With such a configuration, a chemical solution treatment (board processing step) in which a chemical solution is supplied to the upper surface of the substrate W and the upper surface of the substrate W is treated with the chemical solution, and a rinsing treatment (substrate) in which the chemical solution on the upper surface of the substrate W is washed away with a rinsing solution. The treatment step) and the spin drying treatment (board treatment step) in which the droplets on the substrate W are shaken off by centrifugal force can be executed.

FIG. 4 is a schematic cross-sectional view for explaining another configuration example of the processing unit MPC. The processing unit MPC shown in FIG. 4 is an end face cleaning unit that scrubs and cleans the peripheral end surface of the substrate W. The processing unit MPC includes a processing chamber 31, a spin chuck 33 arranged in the processing chamber 31, a chemical solution nozzle 34, and a scrub member 37 that scrubs and cleans the end surface of the substrate W.

The spin chuck 33 rotates around the vertical rotation axis 36 passing through the central portion of the substrate W while holding one substrate W horizontally. The chemical solution nozzle 34 supplies the chemical solution to the surface of the substrate W held by the spin chuck 33. When the scrub member 37 is pressed against the peripheral end surface of the substrate W while the spin chuck 33 is rotating the substrate W, the scrub member 37 is rubbed against the entire peripheral edge of the peripheral end surface of the substrate W. As a result, the entire circumference of the peripheral end surface of the substrate W is scrubbed (substrate processing step).

FIG. 5 is a block diagram for explaining the electrical configuration of the substrate processing device 1. The board processing device 1 includes a computer 60 as a control device. The computer 60 controls the processing units MPC1 to MPC24, the main transfer robots CR1 and CR2, and the indexer robot IR. The computer 60 may be a personal computer (FA personal computer).

The computer 60 includes a control unit 61, an input / output unit 62, and a storage unit 63. The control unit 61 includes a calculation unit such as a CPU. The input / output unit 62 includes an output device such as a display unit and an input device such as a keyboard, a pointing device, and a touch panel. Further, the input / output unit 62 includes a communication module for communication with the host computer 64 which is an external computer. The storage unit 63 includes a storage device such as a solid-state memory device and a hard disk drive.

The control unit 61 includes a scheduling function unit 65 and a processing execution instruction unit 66. The scheduling function unit 65 carries out the substrate W from the carrier C, processes the substrate W by one or more of the processing units MPC1 to MPC24, and then accommodates the processed substrate W in the carrier C. Create a plan (schedule) for operating the resources of the board processing device 1 in chronological order. The processing execution instruction unit 66 operates the resources of the board processing apparatus 1 according to the schedule created by the scheduling function unit 65. The resource is various units provided in the substrate processing apparatus 1 and used for processing the substrate. Specifically, the processing units MPC1 to MPC24, the indexer robot IR, the main transfer robots CR1 and CR2, and their components are included in the resources of the substrate processing apparatus 1.

The storage unit 63 stores various data and the like. The data stored in the storage unit 63 includes the program 70 executed by the control unit 61, the process job data (process job information) 80 received from the host computer 64, and the schedule data 81 created by the scheduling function unit 65. , Usage history data 82 of each processing unit MPC and each processing compartment PZ, and transport time data 83 of each processing compartment PZ are included.

The program 70 stored in the storage unit 63 includes a schedule creation program 71 for operating the control unit 61 as the scheduling function unit 65, and a processing execution program 72 for operating the control unit 61 as the processing execution instruction unit 66. include. The program 70 may be pre-installed in the computer 60, may be sent from the recording medium M to the storage unit 63, or may be sent to the storage unit 63 through the communication module of the input / output unit 62. It may have been sent. The recording medium M is, for example, an optical disk such as a compact disk or a semiconductor memory such as a memory card. The recording medium M is an example of a non-temporary tangible medium.

The process job data 80 includes a process job (PJ) code assigned to each board W and a recipe associated with the process job code. The recipe is data that defines the board processing content, and includes the board processing conditions and the board processing procedure. More specifically, it includes substrate type information, parallel processing unit information, used processing liquid information, processing time information, and the like. The substrate type information is information indicating the type of the substrate W to be processed. Specific examples of the type of the substrate W are a product substrate used for manufacturing a product, a non-product substrate used for maintenance of a processing unit MPC, and the like, and not used for manufacturing a product. The parallel processing unit information is processing unit designation information that specifies available processing unit MPCs, and indicates that parallel processing by the designated processing unit MPCs is possible. That is, the substrate W may be processed by any of the designated processing units. The used treatment liquid information is information that specifies the type of treatment liquid used for substrate treatment. Specific examples are information that specifies the type of chemical solution and the temperature of the chemical solution. The processing time information is the duration for supplying the processing liquid and the like. The processing liquid information used and the processing time information are examples of processing condition information.

The process job means a process performed on one or a plurality of boards W to be subjected to a common process. The process job code is identification information (board group identification information) for identifying a process job. That is, a plurality of boards W to which a common process job code is assigned are subjected to common processing according to the recipe associated with the process job code. For example, when a common process is applied to a plurality of boards W having a continuous processing order (payout order from the carrier C), a common process job code is applied to the plurality of boards W. Granted. However, the board processing contents (recipe) corresponding to different process job codes may be the same.

The control unit 61 acquires the process job data for each board W from the host computer 64 via the input / output unit 62 and stores it in the storage unit 63. The process job data may be acquired and stored before the scheduling for each board W is executed. For example, immediately after the carrier C is held in the load ports LP1 to LP4, the process job data corresponding to the substrate W accommodated in the carrier C may be given to the control unit 61 from the host computer 64.

The scheduling function unit 65 plans each process job based on the process job data 80 stored in the storage unit 63, and stores the schedule data 81 representing the plan in the storage unit 63. The process execution instruction unit 66 controls the indexer robot IR, the main transfer robots CR1 and CR2, and the processing units MPC1 to MPC24 based on the schedule data 81 stored in the storage unit 63 to process the board processing apparatus 1. Run the job.

FIG. 6 is a flowchart for explaining a processing example executed by the scheduling function unit 65. More specifically, the control unit 61 of the computer 60 executes the schedule creation program 71 to represent a process that is repeatedly performed in a predetermined control cycle. In other words, the schedule creation program 71 incorporates a step group so as to cause the computer 60 to execute the process shown in FIG.

The host computer 64 gives the process job data to the control unit 61, and instructs the control unit 61 to start the process job defined by the process job data, that is, to start the board processing (step S1). The control unit 61 receives the process job data and stores it in the storage unit 63. Using the process job data, the scheduling function unit 65 performs scheduling for executing the process job. The operator can also instruct the start of the process job by operating the operation unit of the input / output unit 62.

The scheduling function unit 65 executes scheduling one by one for one or more boards W to which the process job (PJ) code included in the process job data is assigned. First, the scheduling function unit 65 refers to the recipe corresponding to the process job data, and identifies one or more processing unit MPCs that can be used for processing the substrate W based on the parallel processing unit information of the recipe. (Step S2). Next, the scheduling function unit 65 executes a processing partition selection process for selecting one processing partition PZ to be used for substrate processing (step S3). The details of the processing partition selection process will be described later.

Next, the scheduling function unit 65 creates a temporary timetable for processing one board W (step S4). For example, it is assumed that the first processing partition PZ1 is selected in the processing partition selection process, and all the processing units MPC1 to MPC8 of the first processing partition PZ1 are included in the parallel processing unit information of the recipe corresponding to the process job data. That is, consider a case where the substrate processing according to the recipe can be executed in any of the eight processing units MPC1 to MPC8. In this case, there are eight routes through which the substrate W passes. That is, the routes that can be selected for processing the substrate W are eight routes that pass through any of the processing units MPC1 to MPC8. Therefore, the scheduling function unit 65 creates a temporary timetable corresponding to the eight routes for the one board W.

FIG. 7A shows a temporary timetable corresponding to the route passing through the processing unit MPC1. This temporary timetable includes a block representing the carry-out (Get) of the substrate W from the carrier C by the indexer robot IR, and a block representing the carry-in (Put) of the board W to the first delivery unit PASS1 by the indexer robot IR. A block representing the carry-out (Get) of the board W from the first delivery unit PASS1 by the first main transfer robot CR1 and a block representing the carry-in (Put) of the board W to the processing unit MPC1 by the first main transfer robot CR1. A processing block representing the processing of the substrate W by the processing unit MPC1, a block representing the removal (Get) of the processed substrate W from the processing unit MPC1 by the first main transfer robot CR1, and the first main transfer robot CR1. A block representing the carry-in (Put) of the board W to the first delivery unit PASS1 by the indexer robot IR, a block representing the carry-out (Get) of the board W from the first delivery unit PASS1 by the indexer robot IR, and the indexer robot IR. It includes a block representing carrying (Put) of the substrate W into the carrier C. The scheduling function unit 65 creates a temporary timetable by arranging these blocks in order so as not to overlap on the time axis.

When a temporary timetable using the processing unit MPC1 is created, the scheduling function unit 65 has seven similar temporary timetables corresponding to the seven routes passing through the processing units MPC2 to MPC8 for the same board W. A temporary timetable in which the processing blocks are arranged in the processing units MPC2 to MPC8) is created. In this way, a total of eight temporary timetables are created for one substrate W. Then, the created temporary timetable is stored in the storage unit 63 as a part of the schedule data 81. At the stage of creating the temporary timetable, the interference (overlap on the time axis) with the block related to another substrate W is not taken into consideration.

When the scheduling function unit 65 finishes creating all the temporary timetables corresponding to one board W (step S5), the scheduling function unit 65 executes the main scheduling (steps S6 to S9). This scheduling is to arrange the created temporary timetable block on the time axis so as not to overlap with other blocks of each resource. The schedule data created by this scheduling is stored in the storage unit 63.

More specifically, the scheduling function unit 65 selects one of the plurality of created temporary timetables and acquires one block constituting the temporary timetable (step S6). The block acquired at this time is the block that is arranged at the earliest position on the time axis of the temporary timetable among the unarranged blocks. Further, the scheduling function unit 65 searches for a position where the acquired block can be placed (step S7), and places the block at the searched position (step S8). Each block is placed at the earliest position on the time axis while preventing the same resource from being used more than once at the same time. The same operation is repeatedly executed for all the blocks constituting the selected temporary timetable (step S9). In this way, by arranging all the blocks constituting the selected temporary timetable, the present scheduling corresponding to the temporary timetable is completed. This scheduling is executed for all the created temporary timetables (step S10). That is, when there is a possibility that the substrate W is processed by any of the eight processing units MPC1 to MPC8, eight kinds of main scheduling are executed.

When the eight main schedulings are completed, the unit selection process is performed (step S11). In the unit selection process, one main scheduling, that is, the main scheduling passing through one processing unit MPC is selected, and thereby the processing unit MPC that processes one substrate W is selected. In the unit selection process, one main scheduling with the earliest time to process the substrate W and return it to the carrier C is selected (step S11; unit selection step).

If there are a plurality of main schedulings in the carrier C having the same return time (step S12: YES), the processing unit MPC having the longest elapsed time since the previous use, that is, the processing having the oldest unit last use time. This scheduling using the unit MPC is selected (step S13; unit selection step). Thereby, the processing unit MPC can be selected so that the processing unit MPC in one processing partition PZ is used evenly.

When there are multiple schedulings that use the processing unit MPC with the oldest unit last use time (step S14: YES), this scheduling that uses the processing unit MPC with the smaller number (that is, the higher priority given in advance) is selected. (Step S15. Unit selection step). For example, if the main scheduling using the processing unit MPC1 and the main scheduling using the processing unit MPC2 remain as candidates, the final number of the processing unit MPC1 is smaller than that of the processing unit MPC2, so that the main scheduling using the processing unit MPC1 is used. Is selected.

In this way, when one main scheduling corresponding to one temporary timetable is selected, the scheduling for the one board W is completed (step S16). Then, the scheduling data representing the selected main scheduling is stored in the storage unit 63. The process execution instruction unit 66 actually starts the process for the substrate W at an arbitrary timing thereafter (step S17, the substrate transfer step and the substrate processing step). That is, the substrate transfer operation in which the substrate W is carried out from the carrier C by the indexer robot IR and the board W is transferred to the processing unit MPC by the main transfer robots CR1 and CR2 is started.

When the scheduling for one board W is completed, the scheduling function unit 65 registers the unit last use time of the processing unit MPC that processes the board W in the storage unit 63 (step S18). Further, the scheduling function unit 65 obtains the input possibility rate of the processing section PZ to which the processing unit MPC belongs and registers it in the storage unit 63 (step S19). The details of the input possibility rate will be described later. The unit last use time and input possibility rate are examples of usage history data 82 (see FIG. 5). Then, a series of operations from step S3 to step S20 are executed in order for all the boards W constituting the process job (step S20).

When the second processing partition PZ2 is selected in the processing partition selection process (step S3), the scheduling function unit 65 corresponds to eight routes passing through the processing units MPC9 to MPC16 for one substrate W, respectively. Eight temporary timetables (temporary timetables in which processing blocks are arranged in the processing units MPC9 to MPC16) are created. As a result, a total of eight temporary timetables are created for one substrate W.

FIG. 7B shows a temporary timetable corresponding to the route passing through the processing unit MPC9. This temporary timetable includes a block representing the unloading (Get) of the substrate W from the carrier C by the indexer robot IR, and a block representing the loading (Put) of the substrate W into the first delivery unit PASS1 by the indexer robot IR. A block representing the carry-out (Get) of the substrate W from the first delivery unit PASS1 by the first main transfer robot CR1 and a block representing the carry-in (Put) to the second delivery unit PASS2 by the first main transfer robot CR1. A block representing the carry-out (Get) of the board W from the second delivery unit PASS2 by the second main transfer robot CR2 and a block representing the carry-in (Put) of the board W to the processing unit MPC9 by the second main transfer robot CR2. A processing block representing the processing of the substrate W by the processing unit MPC9, a block representing the removal (Get) of the processed substrate W from the processing unit MPC9 by the second main transfer robot CR2, and the second main transfer robot CR2. A block representing the carry-in (Put) of the board W to the second delivery unit PASS2, a block representing the carry-out (Get) of the board from the second delivery unit PASS2 by the first main transfer robot CR1, and the first main. A block representing the loading (Put) of the board W into the first delivery unit PASS1 by the transfer robot CR1, a block representing the unloading (Get) of the board W from the first delivery unit PASS1 by the indexer robot IR, and an indexer robot. It includes a block representing carrying (Put) of the substrate W into the carrier C by IR. The scheduling function unit 65 creates a temporary timetable by arranging these blocks in order so as not to overlap on the time axis.

When the third processing partition PZ3 is selected in the processing partition selection process (step S3), the scheduling function unit 65 corresponds to eight routes passing through the processing units MPC17 to MPC24 for one substrate W, respectively. Eight temporary timetables (temporary timetables in which processing blocks are arranged in the processing units MPC17 to MPC24) are created. As a result, a total of eight temporary timetables are created for one substrate W. FIG. 7C shows a temporary timetable corresponding to the route passing through the processing unit MPC17. This provisional timetable is almost the same as the provisional timetable of FIG. 7B.

FIG. 8 is a flowchart for explaining an example of the processing section selection process (step S3 in FIG. 6). 9A and 9B show an example of processing partition data stored in the storage unit 63 (see FIG. 5). 10A to 10E show an example of the input possibility rate, the section last use time, the number of oldest chambers, and the number of effective chambers stored in the storage unit 63.
The number of effective chambers is the number of processing unit MPCs that can be used (effectively) among a plurality of processing unit MPCs belonging to the same processing compartment PZ. The oldest number of chambers is the number of effective processing unit MPCs having the oldest unit last use time among the plurality of processing unit MPCs belonging to the same processing section PZ. The chargeability rate is a percentage indicating the ratio of the number of oldest chambers to the number of effective chambers in the same processing section PZ ((number of oldest chambers / number of effective chambers) × 100). The processing partition data, the input availability rate, the partition last use time, the number of oldest chambers, and the number of effective chambers are stored as usage history data 82 for each processing partition.

As shown in FIG. 9A, the storage unit 63 registers processing partition data representing the setting of the processing partition PZ for all the processing unit MPCs. In this example, for the processing units MPC1 to MPC8, the processing partition data “1” indicating that the processing units belong to the first processing partition PZ1 is registered. Further, for the processing units MPC9 to MPC16, the processing partition data "2" indicating that the processing units belong to the second processing partition PZ2 is registered. Further, for the processing units MPC17 to MPC24, the processing partition data “3” indicating that the processing units belong to the third processing partition PZ3 is registered.

When any of the processing unit MPCs cannot be used for board processing due to maintenance or the like, as shown in FIG. 9B, instead of the data (number) that identifies the processing section PZ, data indicating that it is invalid (for example,). Data indicating "under maintenance" etc.) is registered. Maintenance is, for example, cleaning of the processing unit MPC, which is scheduled regularly.
When the scheduling function unit 65 selects the processing area PZ to be processed by each board W, each processing unit MPC performs any processing based on the processing area data stored in the storage unit 63 (see FIG. 5). It is determined whether it belongs to the partition PZ and whether an invalid processing unit MPC exists (step S31 in FIG. 8, affiliation confirmation step). Then, the scheduling function unit 65 reads out the unit final use time of all the processing units MPC1 to MPC24 from the storage unit 63 (step S32 in FIG. 8; unit final use time acquisition step).

Further, the scheduling function unit 65 reads the transfer time required for transporting the substrate W from the carrier C on the load port LP to the processing unit MPC from the storage unit 63 for all the processing units MPC1 to MPC24. After that, the scheduling function unit 65 subtracts the transport time from the unit last use time for each processing unit MPC, and registers the obtained value (time) in the storage unit 63 as the correction unit last use time (step of FIG. 8). S33. Correction unit last use time calculation step). The last use time of the correction unit is included in the use history data 82. The details of the last use time of the correction unit will be described later.

10A to 10E show the inside of the storage unit 63 when scheduling of a plurality of boards W to which the same recipe is applied while all the processing units MPC1 to MPC24 are usable (valid) and initialized. An example of the transition of the usage history data 82 of the above is shown.
As shown in FIG. 10A, before scheduling the first substrate W, the input possibility rate (the number of oldest chambers / the number of effective chambers × 100) of each processing section PZ is 100%, and each processing section PZ has an input possibility rate of 100%. The partition last use time is an initial value (0 in FIG. 10), and the number of oldest chambers in each processing partition PZ is 8. The number of effective chambers in each processing compartment PZ is eight. In the recipe applied to the plurality of boards W, all the processing units MPC1 to MPC24 are designated as parallel processing units.

When the substrate processing apparatus 1 is initialized, the last use times of all the units are also initialized, and the initial values (for example, 0) are registered as the unit last use times of all the processing units MPC1 to MPC24. If the unit last use time is a value other than the initial value, the unit last use time is corrected using the transport time, but if the unit last use time is the initial value, the initial value is the correction unit last use time. Registered as. In the example shown in FIG. 10A, since the correction unit final use time of all the processing units MPC1 to MPC24 is the initial value, the final use time of all the sections is the initial value (0 in FIG. 10A).

When selecting the processing section PZ for processing the first board W, the scheduling function unit 65 searches for the processing section PZ having the oldest last use time of the section among all the processing sections PZ1 to PZ3, and performs a plurality of processes. It is confirmed whether the partition PZ is included in the candidate partition (step S34 in FIG. 8, first search step). When there is only one candidate partition, that is, when only one processing partition PZ having the oldest partition last use time is found (step S34: NO in FIG. 8), the processing partition PZ is used as the first substrate. Select for W (step S35 in FIG. 8, section selection step). In the example shown in FIG. 10A, since the last use time of all the sections is the initial value, all the processing sections PZ1 to PZ3 correspond to the processing sections PZ having the oldest last use time of the section.

When a plurality of processing partitions PZ having the oldest partition last use time are found (step S34: YES in FIG. 8), the scheduling function unit 65 has the maximum input possibility rate ((the number of oldest chambers / number of effective chambers) × 100). The processing partition PZ of the above is searched among the plurality of processing partitions PZ included in the candidate partition, and it is confirmed whether or not the plurality of processing partitions PZ corresponding to this search condition are included in the candidate partition (step S36 in FIG. 8). Second search step). When there is one processing partition PZ found, that is, when there is one processing partition PZ having the maximum input possibility rate (step S36: NO in FIG. 8), the processing partition PZ is used as the first substrate W. (Step S37 in FIG. 8, compartment selection step and selection step). In the example shown in FIG. 10A, since the last use time of all the units is the initial value, all the processing sections PZ1 to PZ3 correspond to the processing sections PZ having the maximum input possibility rate.

When a plurality of processing partitions PZ having the maximum input possibility rate are found (step S36: YES in FIG. 8), the scheduling function unit 65 has the smallest partition number among the plurality of processing partitions PZ included in the candidate partition (that is,). The pre-assigned processing partition PZ (which has the highest priority) is selected for the first substrate W (step S38 in FIG. 8, partition selection step, third search step, and selection step). In the example shown in FIG. 10A, the first processing section PZ1 having the smallest section number is selected as the processing section PZ for processing the first substrate W. Therefore, as shown in FIG. 10B, the number of the oldest chambers in the first treatment compartment PZ1 is reduced from 8 to 7, and the input possibility rate of the first treatment compartment PZ1 is 87.5% ((7/8) × 100). Decreases to.

When the scheduling for the first board W is completed, the scheduling function unit 65 estimates the time when the first board W ends, and the estimated time is the processing unit MPC that processes the first board W. It is registered in the storage unit 63 as the unit last use time. After that, the scheduling function unit 65 subtracts the transport time from the unit last use time of the processing unit MPC that processes the first board W to the processing unit MPC, and corrects the obtained value (time) to the correction unit last use time. Is registered in the storage unit 63. That is, for the processing unit MPC that processes the first board W, the new unit last use time and the correction unit last use time are registered in the storage unit 63. When scheduling is completed for the second and subsequent boards W, the new unit last use time and the correction unit last use time are registered in the storage unit 63 for the processing unit MPC selected for processing the board W. ..

When the scheduling for the first board W is completed, the unit last use time and the correction unit last use time of the processing unit MPC that processes the first board W are changed to values other than the initial values. The partition last use time is the oldest time among the modification unit last use times of all the processing unit MPCs belonging to the same processing partition PZ. Even if the final use time of the modification unit of the processing unit MPC that processes the first board W is changed, the modification unit last use time of the other processing unit MPC belonging to the same processing partition PZ as this processing unit MPC is the initial value. It remains. Therefore, the final use time of the processing partition PZ to which the processing unit MPC that processes the first substrate W belongs remains unchanged at the initial value.

When selecting the processing section PZ for processing the second substrate W, any one of the three processing sections PZ is selected in the same manner as described above. In the example shown in FIG. 10B, although the partition last use time of each processing partition PZ is the initial value, the second processing partition PZ2 and the third processing partition PZ3 correspond to the processing partition PZ having the maximum input possibility rate. The second processing compartment PZ2 with the lowest number is selected for the second substrate W. Therefore, as shown in FIG. 10C, the number of the oldest chambers in the second treatment compartment PZ2 is reduced from 8 to 7, and the input possibility rate of the second treatment compartment PZ2 is 87.5% ((7/8) × 100). Decreases to.

When selecting the processing section PZ for processing the third substrate W, any one of the three processing sections PZ is selected in the same manner as described above. In the example shown in FIG. 10C, although the partition final use time of each processing partition PZ is the initial value, the input possibility rate of the third processing partition PZ3 is the highest, so that the third processing partition PZ3 is the third substrate W. Is selected for. Therefore, as shown in FIG. 10D, the number of the oldest chambers in the third treatment compartment PZ3 is reduced from 8 to 7, and the input possibility rate of the third treatment compartment PZ3 is 87.5% ((7/8) × 100). Decreases to.

When selecting the processing section PZ for processing the fourth substrate W, any one of the three processing sections PZ is selected in the same manner as described above. In the example shown in FIG. 10D, since the partition last use time of each processing partition PZ is the initial value and the input possibility rate is the same among the three processing partitions PZ, the first processing partition PZ1 having the smallest partition number is four. Selected for eye substrate W. Therefore, as shown in FIG. 10E, the number of the oldest chambers in the first treatment compartment PZ1 is reduced from 7 to 6, and the input possibility rate of the first treatment compartment PZ1 is reduced to 75% ((6/8) × 100). do.

As for the processing section PZ for processing the fifth and subsequent substrates W, any one of the three processing sections PZ is selected in the same manner as described above. When a schedule is created to use all the processing unit MPCs belonging to the same processing partition PZ, the unit last use time and the modification unit last use time are values other than the initial values for each processing unit MPC belonging to the processing partition PZ. Will be changed to. In this case, the scheduling function unit 65 registers the oldest time among the correction unit final use times of all the processing unit MPCs belonging to the processing unit PZ in the storage unit 63 as the partition final use time. As a result, the partition last use time is changed to a value other than the initial value.

In FIGS. 11A to 11E, as shown in FIG. 9B, the four processing units MPC5 to MPC8 belonging to the first processing section PZ1 are disabled (unusable) for maintenance, and all the other processing units MPC1 to are disabled. An example of the transition of the usage history data 82 in the storage unit 63 when scheduling of a plurality of boards W to which the same recipe is applied while the MPC4 and the MPC9 to the MPC24 are available (valid) and initialized. Is shown.

As shown in FIG. 11A, before scheduling the first substrate W, the input possibility rate of each processing section PZ is 100%, and the section final use time of each processing section PZ is an initial value (in FIG. 11). , 0), the number of oldest chambers in the first processing section PZ1 is 4, and the number of oldest chambers in the second processing section PZ2 and the third processing section PZ3 is 8. The number of effective chambers of the first processing section PZ1 is 4, and the number of effective chambers of the second processing section PZ2 and the third processing section PZ3 is 8. In the recipe applied to the plurality of boards W, all the processing units MPC1 to MPC24 are designated as parallel processing units.

When the processing section PZ for processing the first substrate W is selected, as shown in FIG. 11A, the last use time of the section is the initial value for any of the processing sections PZ, and the input possibility rate is the three processing sections PZ. Since they are equal to each other, the scheduling function unit 65 selects the first processing section PZ1 having the smallest partition number as the processing section PZ for processing the first substrate W, and the first substrate W in the first processing section PZ1. Schedule to process. Therefore, as shown in FIG. 11B, the number of the oldest chambers in the first treatment compartment PZ1 is reduced from 4 to 3, and the input possibility rate of the first treatment compartment PZ1 is reduced to 75% ((3/4) × 100). do.

When the processing section PZ for processing the second substrate W is selected, as shown in FIG. 11B, the last use time of the section is the initial value for any of the processing sections PZ, and the second processing section PZ2 and the third processing section Since the input possibility rate of PZ3 is the highest, the scheduling function unit 65 selects the second processing section PZ2 having the smallest section number for the second substrate W. Therefore, as shown in FIG. 11C, the number of the oldest chambers in the second treatment compartment PZ2 is reduced from 8 to 7, and the input possibility rate of the second treatment compartment PZ2 is 87.5% ((7/8) × 100). Decreases to.

When the processing section PZ for processing the third substrate W is selected, as shown in FIG. 11C, the final use time of the section is the initial value for any of the processing sections PZ, and the input possibility rate of the third processing section PZ3 is high. Since it is the highest, the scheduling function unit 65 selects the third processing section PZ3 for the third substrate W. Therefore, as shown in FIG. 11D, the number of the oldest chambers in the third treatment compartment PZ3 is reduced from 8 to 7, and the input possibility rate of the third treatment compartment PZ3 is 87.5% ((7/8) × 100). Decreases to.

When the processing section PZ for processing the fourth substrate W is selected, as shown in FIG. 11D, the last use time of the section is the initial value for any of the processing sections PZ, and the second processing section PZ2 and the third processing section Since the input possibility rate of PZ3 is the highest, the scheduling function unit 65 selects the second processing section PZ2 having the smallest section number for the fourth substrate W. Therefore, as shown in FIG. 11E, the number of the oldest chambers in the second treatment compartment PZ2 is reduced from 7 to 6, and the input possibility rate of the second treatment compartment PZ2 is reduced to 75% ((6/8) × 100). do.

When the processing section PZ for processing the fifth substrate W is selected, as shown in FIG. 11E, the final use time of the section is the initial value for any of the processing sections PZ, and the input possibility rate of the third processing section PZ3 is high. Since it is the highest, the scheduling function unit 65 selects the third processing section PZ3 for the fourth substrate W. Therefore, as shown in FIG. 11F, the number of the oldest chambers in the third treatment compartment PZ3 is reduced from 7 to 6, and the input possibility rate of the third treatment compartment PZ3 is reduced to 75% ((6/8) × 100). do.

FIG. 12 shows an example of the unit final use time, the transport time, and the modified unit final use time after all the unit final use times have been changed to values other than the initial values.
FIG. 12 shows an example in which the first to third boards W are carried into the processing units MPC1, MPC9, and MPC17 in the order of the processing unit MPC1, the processing unit MPC9, and the processing unit MPC17. In the example shown in FIG. 12, the unit last use time of the processing unit MPC1 is 12:00:00, the unit last use time of the processing unit MPC9 is 12:00:15, and the unit of the processing unit MPC17. The last use time is 12:00:30.

Further, FIG. 12 shows an example in which the transport time of the first processing section PZ1 is 10 seconds, the transport time of the second processing section PZ2 is 15 seconds, and the transport time of the third processing section PZ3 is 15 seconds. ing. The transport time of each processing section PZ is registered in the transport time data 83 (see FIG. 5) (transport time registration step). Although the processing unit MPC1 and the processing unit MPC2 belong to the first processing section PZ1, the distance from the load port LP to the processing unit MPC1 is strictly different from the distance from the load port LP to the processing unit MPC2. Therefore, strictly speaking, the transport time of the substrate W to the processing unit MPC1 is different from the transport time of the substrate W to the processing unit MPC2. However, in the example shown in FIG. 12, if the processing unit MPCs belong to the same processing compartment PZ, the transport times are considered to be substantially the same, and one transport time is registered in all the processing unit MPCs belonging to the same processing compartment PZ. There is.

The scheduling function unit 65 subtracts the transport time of the first processing section PZ1 from the unit last use time of the processing unit MPC1, and registers the obtained value (time) as the modification unit last use time of the processing unit MPC1. Specifically, the scheduling function unit 65 registers 11:59:50 (12:00:00-10 seconds) as the final use time of the correction unit of the processing unit MPC1. Similarly, the scheduling function unit 65 registers 12:00:00 (12:00:15-15 seconds) as the final use time of the modification unit of the processing unit MPC9, and sets it as the last use time of the modification unit of the processing unit MPC17. Register 12:00:15 (12:00:30-15 seconds).

Next, the scheduling function unit 65 stores the oldest time among the modification unit final usage times of all the valid processing unit MPCs belonging to the same processing partition PZ as the partition final usage time of the processing partition PZ. Register (step to specify the last use time of the section). In the case of the example shown in FIG. 12, the correction unit last use time of the processing unit MPC1 is the oldest among the correction unit last use times of the processing units MPC1 to MPC8. Further, in the case of the example shown in FIG. 12, the correction unit last use time of the processing unit MPC9 is the oldest among the correction unit last use times of the processing units MPC9 to MPC16, and the correction unit last use time of the processing unit MPC17 is the processing. Modification of units MPC17 to MPC24 The oldest in the last use time of the unit. Therefore, the scheduling function unit 65 registers the modification unit last use time of the processing unit MPC1 as the partition final use time of the first processing partition PZ1, and the modification unit final use time of the processing unit MPC9 is the partition final of the second processing partition PZ2. It is registered as the usage time, and the modification unit last usage time of the processing unit MPC17 is registered as the partition final usage time of the first processing partition PZ1.

13A to 13E show the usage history in the storage unit 63 when scheduling of a plurality of boards W to which the same recipe is applied after the last use times of all the units have been changed to values other than the initial values. An example of the transition of the data 82 is shown.
As shown in FIG. 13A, before scheduling the first substrate W, the input possibility rate of each processing section PZ is 12.5% ((1/8) × 100), and the section of each processing section PZ. The final use time is a different value other than the initial value, and the number of the oldest chambers in each processing section PZ is 1. The number of effective chambers in each processing compartment PZ is eight. In the recipe applied to the plurality of boards W, all the processing units MPC1 to MPC24 are designated as parallel processing units.

In FIG. 13A, the section last use time of the first processing section PZ1 is 12:00:00, the section last use time of the second processing section PZ2 is 12:00:30, and the third processing section PZ3. An example is shown in which the last use time of the section is 12:11:00. When the processing section PZ for processing the first substrate W is selected, as shown in FIG. 13A, the partition last use time of the first processing section PZ1 is the oldest, so that the scheduling function unit 65 has the first processing section PZ1. Is selected as the processing section PZ for processing the first substrate W.

FIG. 13B shows an example in which the processing unit MPC having the oldest modification unit last use time among all the processing units MPC1 to MPC8 belonging to the first processing section PZ1 processes the first substrate W. Therefore, the section final use time of the first processing section PZ1 is changed to a time different from the time before scheduling the first substrate W. FIG. 13B shows an example in which the section last use time of the first processing section PZ1 is updated from 12:00:00 to 12:01:30.

When the processing section PZ for processing the second substrate W is selected, as shown in FIG. 13B, the partition last use time (12:00:30) of the second processing section PZ2 is the oldest, so that the scheduling function unit In 65, the second processing section PZ2 is selected as the processing section PZ for processing the second substrate W, and the modification unit last use time is the oldest among all the processing units MPC9 to MPC16 belonging to the second processing section PZ2. Create a schedule for the processing unit MPC to process the substrate W. Therefore, as shown in FIG. 13C, the section final use time of the second processing section PZ2 is updated from 12:00:30 to 12:02:00.

When the processing section PZ for processing the third substrate W is selected, as shown in FIG. 13C, the partition last use time (12:010:00) of the third processing section PZ3 is the oldest, so that the scheduling function unit In 65, the third processing section PZ3 is selected as the processing section PZ for processing the third substrate W, and the modification unit last use time is the oldest among all the processing units MPC17 to MPC24 belonging to the third processing section PZ3. Create a schedule for the processing unit MPC to process the substrate W. Therefore, as shown in FIG. 13D, the section final use time of the third processing section PZ3 is updated from 12:11:00 to 12:02:30.

When the processing section PZ for processing the fourth substrate W is selected, as shown in FIG. 13D, the partition last use time (12:01:30) of the first processing section PZ1 is the oldest, so that the scheduling function unit In 65, the first processing section PZ1 is selected as the processing section PZ for processing the fourth substrate W, and the modification unit last use time is the oldest among all the processing units MPC1 to MPC8 belonging to the first processing section PZ1. Create a schedule for the processing unit MPC to process the substrate W. Therefore, as shown in FIG. 13E, the section final use time of the first processing section PZ1 is updated from 12:01:30 to 12:03:00.

As for the processing section PZ for processing the fifth and subsequent boards W, the processing section PZ having the oldest last use time of the section is selected from the three processing sections PZ, as described above. If there are a plurality of processing partitions PZ having the oldest last use time of the partition, the processing partition PZ having the maximum input possibility rate is selected from among them. Even so, if a plurality of processing compartments PZ remain, the processing compartment PZ having the smallest partition number among the remaining plurality of processing compartments PZ is selected.

Next, scheduling when the processing time of the substrate W is reduced will be described.
First, the scheduling according to the first embodiment will be described with reference to FIGS. 14A to 14F and FIGS. 15A to 15B, and then the scheduling according to the first comparative example will be described with reference to FIGS. 16A to 16F and FIG. Will be explained.
14A to 14F are tables showing an example of the chargeability rate, the last use time of the section, the number of oldest chambers, and the number of effective chambers according to the first embodiment. In FIGS. 14A to 14F, after scheduling a plurality of substrates W to which the first recipe for processing the substrate W for the first processing time is applied, the substrate W is subjected to the second processing time shorter than the first processing time. An example of the transition of the usage history data 82 in the storage unit 63 when scheduling the plurality of boards W to which the second recipe is applied is shown.

As shown in FIG. 14A, before scheduling the first substrate W, the input possibility rate of each processing section PZ is 100% ((8/8) × 100), and the section final use of each processing section PZ is performed. The time is an initial value (0 in FIG. 14A), and the number of oldest chambers in each processing section PZ is 8. The number of effective chambers in each processing compartment PZ is eight. The last use time of each unit is an initial value. In the first recipe and the second recipe, all the processing units MPC1 to MPC24 are designated as parallel processing units. The first processing time specified in the first recipe is, for example, 240 seconds, and the second processing time specified in the second recipe is, for example, 60 seconds.

When the processing section PZ for processing the first substrate W to which the first recipe is applied is selected, as shown in FIG. 14A, the last use time of the section is the initial value for any of the processing sections PZ, and the input possibility rate. Is equal among the three processing partitions PZ, so the scheduling function unit 65 selects the first processing partition PZ1 having the smallest partition number as the processing partition PZ for processing the first substrate W. Therefore, as shown in FIG. 14B, the number of the oldest chambers in the first treatment compartment PZ1 is reduced from 8 to 7, and the input possibility rate of the first treatment compartment PZ1 is 87.5% ((7/8) × 100). Decreases to.

When the processing section PZ for processing the second substrate W to which the first recipe is applied is selected, as shown in FIG. 14B, the last use time of the section is the initial value for any of the processing sections PZ, and the second process is performed. Since the partition PZ2 and the third processing section PZ3 have the highest input possibility rate, the scheduling function unit 65 selects the second processing section PZ2 having the smallest section number for the second substrate W. Therefore, as shown in FIG. 14C, the number of the oldest chambers in the second treatment compartment PZ2 is reduced from 8 to 7, and the input possibility rate of the second treatment compartment PZ2 is 87.5% ((7/8) × 100). Decreases to.

When selecting the processing section PZ for processing the third substrate W to which the second recipe having a different processing time from the first recipe is applied, as shown in FIG. 14C, which processing section PZ has the final use time of the section. Is also an initial value, and the input possibility rate of the third processing section PZ3 is the highest. Therefore, the scheduling function unit 65 selects the third processing section PZ3 for the third substrate W. Therefore, as shown in FIG. 14D, the number of the oldest chambers in the third treatment compartment PZ3 is reduced from 8 to 7, and the input possibility rate of the third treatment compartment PZ3 is 87.5% ((7/8) × 100). Decreases to.

When the processing section PZ for processing the fourth substrate W to which the second recipe is applied is selected, as shown in FIG. 14D, the last use time of the section is the initial value for any of the processing sections PZ, and the input possibility rate. Is equal among the three processing partitions PZ, so the scheduling function unit 65 selects the first processing partition PZ1 having the smallest partition number as the processing partition PZ for processing the fourth substrate W. Therefore, as shown in FIG. 14E, the number of the oldest chambers in the first treatment compartment PZ1 is reduced from 6 to 7, and the input possibility rate of the first treatment compartment PZ1 is reduced to 75% ((6/8) × 100). do.

When the processing section PZ for processing the fifth substrate W to which the second recipe is applied is selected, as shown in FIG. 14E, the last use time of the section is the initial value for any of the processing sections PZ, and the second process is performed. Since the input possibility rate of the partition PZ2 and the third processing partition PZ3 is the highest, the scheduling function unit 65 selects the second processing partition PZ2 having the smallest partition number for the fifth substrate W. Therefore, as shown in FIG. 14F, the number of the oldest chambers in the second treatment compartment PZ2 is reduced from 7 to 6, and the input possibility rate of the second treatment compartment PZ2 is reduced to 75% ((6/8) × 100). do.

15A and 15B are time charts showing the schedule according to the first embodiment. FIG. 15A shows an example of the schedule after scheduling the first and second substrates W1 to W2 to which the first recipe for processing the substrate W for the first processing time is applied. In the example shown in FIG. 15A, the first board W1 is processed by the processing unit MPC1 of the first processing section PZ1 and the second board W2 is processed by the processing unit MPC9 of the second processing section PZ2. A schedule has been created.

FIG. 15B shows an example of the schedule after scheduling the 3rd to 6th substrates W3 to W6 to which the second recipe for processing the substrate W for the second processing time is applied. In the example shown in FIG. 15B, the third board W3 is processed by the processing unit MPC17 of the third processing section PZ3, and the fourth board W4 is processed by the processing unit MPC2 of the first processing section PZ1. A schedule has been created. Further, in the example shown in FIG. 15B, the fifth board W5 is processed by the processing unit MPC10 of the second processing section PZ2, and the sixth board W6 is processed by the processing unit MPC18 of the third processing section PZ3. A schedule has been created.

As shown in FIG. 15B, if the processing partition PZ is selected by giving priority to the partition last usage time representing the oldest time among the modification unit last usage times of all the processing unit MPCs belonging to the same processing partition PZ. Not only when the processing time of the substrate W does not change, but also when the processing time of the substrate W decreases, all the processing sections PZ1 to PZ3 can be uniformly selected, and the vacant processing unit MPC can be efficiently selected. Therefore, the operating rate of the substrate processing apparatus 1 can be increased as compared with the case where the processing partition PZ is selected by giving priority to the partition utilization rate as described later.

Next, scheduling according to the first comparative example will be described with reference to FIGS. 16A to 16F and FIG.
Hereinafter, an example in which the processing partition PZ for processing the substrate W is selected based on the partition usage rate, not the partition final use time, will be described. The partition utilization is a value obtained by dividing the time required for processing the substrate W by the number of effective (available) processing units MPC in the processing partition PZ for processing the substrate W. If the time required for processing the substrate W is 240 seconds and the number of effective processing unit MPCs belonging to the processing partition PZ for processing the substrate W is 3, the partition utilization rate is 80 (= 240/3). ).

The partition final use time shown in FIGS. 16A to 16F is not the oldest time among the modification unit final use times of all the processing unit MPCs belonging to a certain processing partition PZ, but all the processing unit MPCs belonging to a certain processing partition PZ. It means the latest time of the unit last use time. Therefore, when a schedule for processing the substrate W by one processing unit MPC belonging to a certain processing partition PZ is created, even if the unit last use time of another processing unit MPC belonging to the processing partition PZ is the initial value, The partition final use time of the processing partition PZ is changed to the unit final use time of the processing unit MPC that processes the substrate W.

16A to 16F are tables showing an example of the partition usage rate, the partition final use time, and the number of effective chambers according to the first comparative example. In FIGS. 16A to 16F, after scheduling a plurality of substrates W to which the first recipe for processing the substrate W for the first processing time is applied, the substrate W is subjected to the second processing time shorter than the first processing time. An example of the transition of the usage history data 82 in the storage unit 63 when scheduling the plurality of boards W to which the second recipe is applied is shown.

As shown in FIG. 16A, before scheduling the first substrate W, the partition usage rate of each processing partition PZ is 0, and the partition final use time is an initial value (0 in FIG. 16A). , The number of effective chambers in each processing compartment PZ is 3. In the first recipe and the second recipe, all the processing units MPC1 to MPC24 are designated as parallel processing units. The first processing time specified in the first recipe is, for example, 240 seconds, and the second processing time specified in the second recipe is, for example, 60 seconds.

When the processing section PZ for processing the first substrate W to which the first recipe is applied is selected, as shown in FIG. 16A, the section usage rate is 0 for any of the processing sections PZ, and the section final use time is set. Since any of the processing compartments PZ is an initial value, the scheduling function unit 65 selects the first processing compartment PZ1 having the smallest partition number as the processing compartment PZ for processing the first substrate W. Therefore, as shown in FIG. 16B, the compartment usage rate of the first treatment compartment PZ1 increases. FIG. 16B shows an example in which the first processing time is 240 seconds and the partition usage rate of the first processing partition PZ1 has increased from 0 to 80 (= 240/3).

When the processing section PZ for processing the second substrate W to which the first recipe is applied is selected, as shown in FIG. 16B, the section usage rate of the second processing section PZ2 and the third processing section PZ3 is 0. Since the last use time of the second processing section PZ2 and the third processing section PZ3 is the initial value, the scheduling function unit 65 processes the second processing section PZ2 having the smallest section number on the second board W. Select as the processing partition PZ. Therefore, as shown in FIG. 16C, the compartment usage rate of the second treatment compartment PZ2 increases. FIG. 16C shows an example in which the first processing time is 240 seconds and the partition usage rate of the second processing partition PZ2 has increased from 0 to 80 (= 240/3).

When selecting the processing section PZ for processing the third substrate W to which the second recipe having a different processing time from the first recipe is applied, as shown in FIG. 16C, the section usage rate of the third processing section PZ3 is Since it is the smallest, the scheduling function unit 65 selects the third processing section PZ3 as the processing section PZ for processing the third substrate W. Therefore, as shown in FIG. 16D, the compartment usage rate of the third treatment compartment PZ3 increases. FIG. 16D shows an example in which the second processing time is 60 seconds and the partition usage rate of the second processing partition PZ2 has increased from 0 to 20 (= 60/3).

When the processing section PZ for processing the fourth substrate W to which the second recipe is applied is selected, as shown in FIG. 16D, the partition usage rate of the third processing section PZ3 is still the smallest, so that the scheduling function unit 65 Selects the third processing section PZ3 as the processing section PZ for processing the fourth substrate W. Therefore, as shown in FIG. 16E, the compartment usage rate of the third treatment compartment PZ3 increases. FIG. 16E shows an example in which the compartment usage rate of the second treatment compartment PZ2 has increased to 40 (= 120/3).

When the processing section PZ for processing the fifth substrate W to which the second recipe is applied is selected, as shown in FIG. 16E, the partition usage rate of the third processing section PZ3 is still the smallest, so that the scheduling function unit 65 Selects the third processing section PZ3 as the processing section PZ for processing the fifth substrate W. Therefore, as shown in FIG. 16F, the compartment usage rate of the third treatment compartment PZ3 increases. FIG. 16F shows an example in which the compartment usage rate of the second treatment compartment PZ2 has increased to 60 (= 180/3).

When the processing section PZ for processing the sixth substrate W to which the second recipe is applied is selected, as shown in FIG. 16F, the partition usage rate of the third processing section PZ3 is still the smallest, so that the scheduling function unit 65 Selects the third processing section PZ3 as the processing section PZ for processing the sixth substrate W. Therefore, the compartment usage rate of the third treatment compartment PZ3 increases. Specifically, the compartment usage rate of the second treatment compartment PZ2 increases to 80 (= 240/3). As a result, the compartment usage rate of the third treatment compartment PZ3 becomes equal to the compartment usage rate of the first treatment compartment PZ1 and the second treatment compartment PZ2.

FIG. 17 is a time chart showing a schedule after the processing partition PZ is selected with priority given to the partition utilization rate first and the 3rd to 6th boards W3 to W6 are scheduled.
As described above, when the processing partition PZ is selected based on the partition utilization rate, the third processing partition PZ3 is selected for the sixth substrate W6. Therefore, as shown in FIG. 17, the sixth substrate W6 is a processing unit belonging to the third processing section PZ3 even though there are vacant processing units MPCs in the first processing section PZ1 and the second processing section PZ2. A schedule is created to be processed by MPC17. Therefore, when the sixth substrate W6 is processed in the first processing section PZ1 or the second processing section PZ2, the transfer of the sixth substrate W6 can be started immediately, but the sixth substrate W6 is used as the third substrate W6. When processing in the processing section PZ3, it is necessary to delay the start of transportation until the processing unit MPC17 finishes processing the third substrate W3.

As can be seen by comparing FIGS. 17 and 15B, in each case, the third substrate W3 is scheduled to be processed by the processing unit MPC17, but in the example shown in FIG. 15B, the fourth substrate W3 is processed. A schedule is created so that the substrate W4 of the above is processed by the processing unit MPC2 and the fifth substrate W5 is processed by the processing unit MPC10. Further, in the example shown in FIG. 15B, a schedule is created so that the sixth substrate W6 is processed by the processing unit MPC17. Therefore, in the example shown in FIG. 15B, since the vacant processing unit MPC is efficiently selected, the delay in transportation as shown in FIG. 17 can be prevented, and the operating rate of the substrate processing apparatus 1 can be increased.

Next, scheduling when the processing time of the substrate W is reduced after the processing of the substrate W is scheduled in all the effective processing unit MPCs will be described.
First, the scheduling according to the second embodiment will be described, and then the scheduling according to the second comparative example will be described.
FIG. 18 is a table showing an example of the unit final use time, the transport time, and the modified unit final use time according to the second embodiment. 19A to 19D are time charts showing the schedule according to the second embodiment.

19A to 19B show an example of the schedule after scheduling the 1st to 11th substrates W1 to W11 to which the first recipe for processing the substrate W for the first processing time is applied. FIG. 19A shows the schedule until the time when the processing of the first substrate W1 is completed, and FIG. 19B shows the continuation of FIG. 19A.
FIG. 19C shows an example of the schedule after scheduling the twelfth substrate W12 to which the second recipe for processing the substrate W for the second processing time is applied. FIG. 19D shows an example of the schedule after scheduling the 13th to 15th substrates W13 to W15 to which the second recipe for processing the substrate W for the second processing time is applied.

19A-19D show examples where the processing units MPC1, MPC2, MPC3, MPC9, MPC10, MPC11, MPC17, MPC18, and MPC19 are valid processing units MPC. Therefore, the number of effective chambers in each processing compartment PZ is 3. In the first recipe and the second recipe, all the processing units MPC1 to MPC24 are designated as parallel processing units. The first processing time specified in the first recipe is, for example, 240 seconds, and the second processing time specified in the second recipe is, for example, 60 seconds.

Before scheduling the first board W, the input possibility rate of each processing section PZ is 100% ((3/3) × 100), and the section final use time of each processing section PZ is an initial value. , The oldest number of chambers in each processing compartment PZ is 3. The situation before scheduling the first substrate W is substantially the same as the example described with reference to FIGS. 10A to 10E. Therefore, the scheduling of the first to eleventh substrates W1 to W11 is performed in the same manner as the example described with reference to FIGS. 10A to 10E.

Specifically, as shown in FIG. 19A, the first substrate W1 is processed by the processing unit MPC1, the second substrate W2 is processed by the processing unit MPC9, and the third substrate W3 is processed by the processing unit MPC17. A schedule is created to be processed by. Further, a schedule is created so that the fourth substrate W4 is processed by the processing unit MPC2, the fifth substrate W5 is processed by the processing unit MPC10, and the sixth substrate W6 is processed by the processing unit MPC18. Will be done. Further, a schedule is created so that the 7th substrate W7 is processed by the processing unit MPC1, the 8th substrate W8 is processed by the processing unit MPC9, and the 9th substrate W9 is processed by the processing unit MPC17. Will be done.

Further, as shown in FIG. 19B, a schedule is created so that the 10th substrate W10 is processed by the processing unit MPC1 and the 11th substrate W11 is processed by the processing unit MPC9. That is, the tenth substrate W10 is processed by the processing unit MPC1 after the first substrate W1 is processed by the processing unit MPC1. The eleventh substrate W11 is processed by the processing unit MPC9 after the second substrate W2 is processed by the processing unit MPC9. In this way, a schedule for processing the 1st to 11th substrates W1 to W11 is created.

At the bottom of FIG. 19B, the unit last use time (time T1 to T7) of each processing unit MPC after the schedule for processing the eleventh substrate W11 is created is shown. The unit last use time of the processing unit MPC1 at the time when the schedule for processing the eleventh board W11 is created is time T6, and the unit last use time of the processing unit MPC2 at this time is time T1. The unit last use time of the processing unit MPC3 is time T3. The earliest time among these is time T1.

FIG. 18 shows the unit final use time, transport time, and correction unit final use time of all valid processing unit MPCs at the time when the schedule for processing the eleventh substrate W11 is created. The transport time of the first processing section PZ1 to which the processing units MPC1, MPC2, and MPC3 belong is the transport time t1. Therefore, the correction unit final use time of the processing unit MPC1 is time T6-transport time t1, the correction unit final use time of the processing unit MPC2 is time T1-transport time t1, and the correction unit final use time of the processing unit MPC3 is. Time T3-Transport time t1. The earliest time among these is time T1-transportation time t1.

The unit last use time of the processing unit MPC9 is time T7, the unit last use time of the processing unit MPC10 is time T2, and the unit last use time of the processing unit MPC11 is time T4. As shown in FIG. 19B, the earliest time among these is time T2. The transport time of the second processing section PZ2 to which the processing unit MPC9, the processing unit MPC10, and the processing unit MPC11 belong is the transport time t2. Therefore, the correction unit final use time of the processing unit MPC9 is time T7-transport time t2, the correction unit final use time of the processing unit MPC10 is time T2-transport time t2, and the correction unit final use time of the processing unit MPC11 is. Time T4-Transport time t2. The earliest time among these is time T2-carrying time t2.

The unit last use time of the processing unit MPC17 is time T1, the unit last use time of the processing unit MPC18 is time T3, and the unit last use time of the processing unit MPC19 is time T5. As shown in FIG. 19B, the earliest time among these is time T2. The transport time of the second processing section PZ2 to which the processing unit MPC17, the processing unit MPC18, and the processing unit MPC19 belong is the transport time t2. Therefore, the correction unit final use time of the processing unit MPC17 is the time T1-transport time t2, the correction unit final use time of the processing unit MPC18 is the time T3-transport time t2, and the correction unit final use time of the processing unit MPC19 is. Time T5-Transport time t2. The earliest time among these is time T1-transportation time t2.

As shown in FIG. 18, the section final use time of the first processing section PZ1 at the time when the schedule for processing the eleventh substrate W11 is created is the time T1-transport time t1. The section final use time of the second processing section PZ2 at this time is time T2-transport time t2. The section final use time of the third processing section PZ3 at this time is time T1-transportation time t2. As shown near the left end of FIG. 19A, the transport time t1 is shorter than the transport time t2. Therefore, the partition final use time (T1-S2) of the third processing partition PZ3 is the oldest among the partition final use times of the three processing partitions PZ.

Since the partition final use time of the third processing partition PZ3 is the oldest among the partition final use times of the three processing partitions PZ, the scheduling function unit 65 sets the third processing partition PZ3 for the twelfth board W. select. FIG. 19C shows an example in which the twelfth substrate W12 is scheduled to be processed by the processing unit MPC17 belonging to the third processing section PZ3. In the case of this example, when the schedule for processing the twelfth board W12 is created, the unit last use time and the modification unit last use time of the processing unit MPC17 are updated, and the section last use time of the third processing section PZ3 is set. Will be updated.

As can be seen from FIG. 19C, the processing time (second processing time) of the twelfth substrate W12 is shorter than the processing time (first processing time) of the first to eleventh substrates W1 to W11. That is, a second recipe is applied to the twelfth substrate W12, in which the substrate W has a second processing time shorter than the first processing time. Similarly, the second recipe is applied to the 13th to 15th substrates W13 to W15. FIG. 19D shows a schedule such that the 13th substrate W13 is processed by the processing unit MPC2, the 14th substrate W14 is processed by the processing unit MPC10, and the 15th substrate W15 is processed by the processing unit MPC18. The example is shown.

Next, with reference to FIG. 20, the scheduling according to the second comparative example will be described.
FIG. 20 is a time chart showing a schedule according to the second comparative example, in which the processing partition PZ is selected with priority given to the partition usage rate first, and the 12th to 15th boards W12 to W15 are scheduled. An example of the schedule of is shown.
In the second comparative example, the number of effective chambers and the parallel processing unit of each processing section PZ are the same as those of the second embodiment. The first recipe is applied to the 1st to 11th substrates W1 to W11, and the second recipe is applied to the 12th to 15th substrates W12 to W15. The schedule up to the eleventh substrate W11 is the same as that of the second embodiment.

As shown in FIG. 20, when the processing partition PZ to be selected based on the partition usage rate instead of the partition final use time is selected, the twelfth substrate W12 becomes the third processing partition PZ3 as in the second embodiment. The schedule is created to be processed by. FIG. 20 shows an example in which the twelfth substrate W12 is scheduled to be processed by the processing unit MPC17.
On the other hand, the processing unit MPCs (for example, the processing unit MPC2 and the processing unit MPC10) that are vacant at the time of starting the selection of the processing compartment PZ for the 13th substrate W13 are the first processing compartment PZ1 and the second processing. Although present in the compartment PZ2, the thirteenth substrate W13 is scheduled to be processed by the processing unit MPC18 belonging to the third processing compartment PZ3. Similarly, the 14th substrate W14 is scheduled to be processed by the processing unit MPC19 belonging to the third processing compartment PZ3, and the 15th substrate W15 is scheduled to be processed by the processing unit MPC17 belonging to the third processing compartment PZ3. ..

In FIG. 20, the indexer robot IR (see FIG. 1) simultaneously carries out the 14th to 15th boards W14 to W15 from the carrier C on the load port LP, and the 14th to 15th boards W14 to W15 are loaded port LP. An example of carrying in the carrier C at the same time is shown. The same applies to FIGS. 19A to 19D. In the example shown in FIG. 19D, the 14th to 15th substrates W14 to W15 are carried out from the carrier C at the carry-out time X1 and carried into the carrier C at the carry-in time Y1. In the example shown in FIG. 20, the 14th to 15th substrates W14 to W15 are carried out from the carrier C at the carry-out time X2 and carried into the carrier C at the carry-in time Y2.

In the second embodiment and the second comparative example, although the 12th to 15th substrates W12 to W15 are processed by a plurality of processing units MPC under the same conditions, as shown in FIG. 19D, the second embodiment is used. The carry-out time X1 is earlier than the carry-out time X2 according to the second comparative example by time Z1, and the carry-in time Y1 according to the second embodiment is earlier than the carry-in time Y2 according to the second comparative example. Therefore, in the second embodiment, the three processing compartments PZ can be evenly selected, and not only the operating rate of the substrate processing apparatus 1 can be increased, but also the number of substrates W processed per unit time as compared with the second comparative example. Can be increased. As a result, the throughput of the substrate processing apparatus 1 can be increased.

As described above, in the present embodiment, the processing partition PZ is not selected based on the magnitude relation of the partition usage rate, but one processing partition PZ is selected from the plurality of processing partitions PZ based on the final usage time of the partition. do. Then, one processing unit MPC is selected from the plurality of processing unit MPCs belonging to the selected processing partition PZ. After that, the substrate W is transferred from the carrier C on the load port LP to the selected processing unit MPC by the indexer robot IR, the first main transfer robot CR1 and the second main transfer robot CR2 included in the substrate transfer system. .. Therefore, not only when the processing time of the substrate W does not change, but also when the processing time of the substrate W decreases, a plurality of processing compartments PZ can be evenly selected, and all the processing units MPC1 provided in the substrate processing apparatus 1 can be selected. ~ MPC24 can be used evenly. Thereby, the operating rate of the substrate processing apparatus 1 can be increased.

Moreover, the partition last use time is specified based on the oldest modified unit last use time, not the oldest unit last use time. The correction unit last use time is the time when the processing unit MPC is last used for processing the board W. The board W is transferred from the carrier C on the load port LP to the processing unit MPC from the unit last use time. It is the time obtained by subtracting the transportation time required for. Therefore, it is possible to reduce the difference in transport time between the plurality of processing compartments PZ, and it is possible to avoid selecting only the processing compartment PZ closer to the load port LP. Thereby, a plurality of processing sections PZ can be selected more evenly.

In the present embodiment, the same value is registered as the transport time for a plurality of processing unit MPCs belonging to the same processing section PZ. Even if a plurality of processing units MPCs belong to the same processing section PZ, the transport distances are strictly different, so that the transport times are also strictly different. However, if the processing compartments PZ to which they belong are the same, the difference in transport time is small, and the transport time is approximately the same among these processing unit MPCs. Therefore, if the same value is registered as the transport time for a plurality of processing unit MPCs belonging to the same processing section PZ, it is possible to simplify the setting of the transport time while reducing the difference in the transport time between these processing sections PZ.

In the present embodiment, when there are a plurality of processing partitions PZ having the oldest last use time of the partition, the processing partition PZ having the maximum input possibility rate is selected from those processing partitions PZ. This means that in many cases, the processing partition PZ having the largest number of processing unit MPCs with the oldest unit last use time is selected. If an error occurs in the processing unit MPC before the board W is transported to the selected processing unit MPC or while the board W is being transported to the selected processing unit MPC, another processing unit MPC is selected. Need to be redone. In such a case, if there is another processing unit MPC having the oldest unit last use time in the same processing partition PZ, that processing unit MPC can be selected as the new processing unit MPC. Therefore, a new transport path for the substrate W can be set with a relatively simple change.

In the present embodiment, all the processing unit MPCs can be used evenly, so that the device or the like provided in the processing unit MPC such as the spin chuck 33 or the scrub member 37, or the processing unit MPC such as the pump that sends the chemical liquid to the chemical liquid nozzle 34 can be used. Related devices can be used evenly. Therefore, the degree of consumption of these consumables can be leveled, and the frequency of maintenance can be reduced. Thereby, the operating rate of the substrate processing apparatus 1 can be further increased.

In the first and second embodiments, an example in which the processing time of the substrate W is reduced from the first processing time to the second processing time has been described. Even in such a case, since one processing partition PZ is selected from a plurality of processing partitions PZ based on the last use time of the partition, compared with the case where the processing partition PZ is selected based on the magnitude relation of the partition usage rate. Multiple processing compartments PZ can be selected evenly. Therefore, even if the transport path and the processing time of the substrate W are different, all the processing unit MPCs can be used evenly, and the operating rate of the substrate processing apparatus 1 can be further increased.

Other Embodiments The present invention is not limited to the contents of the above-described embodiments, and various modifications can be made.
For example, the processing compartment PZ may be classified based on the transport distance rather than the transport time.
The number of processing unit MPCs belonging to the same processing partition PZ may differ among the three processing partitions PZ.

The number of processing compartments PZ provided in the substrate processing apparatus 1 may be two or five or more. For example, the second processing section PZ2 and the third processing section PZ3 may be treated as one processing section PZ. Alternatively, the third processing section PZ3 may be omitted.
When the third processing section PZ3 is omitted, the first main transfer robot CR1 may carry in and out the substrate W to all the processing unit MPCs belonging to the first processing section PZ1 and the second processing section PZ2. .. In this case, the second main transfer robot CR2 and the second delivery unit PASS2 are unnecessary.

The transfer time of the second processing section PZ2 may be different from the transfer time of the third processing section PZ3, or may be equal to the transfer time of the first processing section PZ1.
Instead of registering the same value as the transport time for a plurality of processing unit MPCs belonging to the same processing section PZ, the transport time may be registered for each processing unit MPC. That is, the transport times registered for a plurality of processing units MPCs belonging to the same processing section PZ may be different from each other.

When a plurality of processing partitions having the oldest last use time of the partition are found (step S34: YES in FIG. 8), the scheduling function unit is not the processing partition PZ having the maximum input rate but the processing partition having the largest number of oldest chambers. The PZ may be searched among a plurality of processing partitions included in the candidate partition.
When a plurality of processing partitions having the oldest partition last use time are found (step S34: YES in FIG. 8), the processing partition PZ is selected based on the partition number instead of selecting the processing partition PZ based on the input availability rate. You may. Alternatively, any processing partition PZ may be selected from the plurality of processing partitions PZ having the oldest last use time of the partition.

The unit last use time may be used instead of the modified unit last use time. Alternatively, the modified unit last use time may be used instead of the unit last use time. For example, the partition last use time may be specified based on the oldest unit last use time instead of the oldest modified unit last use time. When selecting the processing unit MPC that processes the substrate W, the oldest modification unit last use time may be given first priority instead of giving priority to the oldest partition last use time.

The processing unit MPC is not limited to the surface cleaning unit shown in FIG. 3 and the end surface cleaning unit shown in FIG. 4, but the surface scrub cleaning unit for cleaning the surface of the substrate W with a scrub member, the back surface cleaning unit for cleaning the back surface of the substrate W, and the like. It may be another type of processing unit. A plurality of types of processing units may be provided in one substrate processing device 1.
Two or more of all the above configurations may be combined. Two or more of all the steps described above may be combined.

In addition, various design changes can be made within the scope of the matters described in the claims.

1: Board processing device 60: Computer (control device)
71: Schedule creation program 72: Processing execution program C: Carrier CR1: First main transfer robot (board transfer system)
CR2: Second main transfer robot (board transfer system)
IR: Indexer robot (board transfer system)
LP: Load port MPC: Processing unit W: Board

Claims (11)

A substrate processing method executed by a substrate processing apparatus that transfers a substrate to a substrate transfer system from a carrier on a load port to a plurality of processing units that process the substrate.
Based on the transport time required for each of the plurality of processing units to transport the substrate from the carrier on the load port to the processing unit, or the transport distance representing the distance from the load port to the processing unit. Affiliation confirmation step to confirm which of the multiple processing partitions classified by
A unit final use time acquisition step for acquiring the unit final use time representing the time when the processing unit is last used for processing the substrate for each of the plurality of processing units.
The transport time is subtracted from the unit final use time in the same processing unit based on the unit final use time acquired in the unit final use time acquisition step and the transport time for the plurality of processing units. The correction unit last use time calculation step for calculating the last use time of the correction unit representing the time obtained for each of the plurality of processing units, and the correction unit last use time calculation step.
Represents the oldest of the modified unit last used times of the plurality of processing units belonging to the same processing partition based on the plurality of modified unit last used times obtained in the modified unit last used time calculation step. A partition final use time specifying step for specifying the partition final use time for each of the plurality of processing partitions, and a partition final use time specifying step.
A partition selection step in which one processing partition having the oldest final usage time of the partition is selected from among the plurality of processing partitions based on the plurality of final usage times of the partition specified in the partition last use time specifying step. When,
A unit selection step of selecting one processing unit from a plurality of the processing units belonging to the processing unit selected in the partition selection step, and a unit selection step.
A substrate processing method comprising transporting the substrate from the carrier on the load port to the processing unit selected in the unit selection step to the substrate transfer system. A substrate processing method executed by a substrate processing apparatus that transfers a substrate to a substrate transfer system from a carrier on a load port to a plurality of processing units that process the substrate.
Based on the transport time required for each of the plurality of processing units to transport the substrate from the carrier on the load port to the processing unit, or the transport distance representing the distance from the load port to the processing unit. Affiliation confirmation step to confirm which of the multiple processing partitions classified by
A unit final use time acquisition step for acquiring the unit final use time representing the time when the processing unit is last used for processing the substrate for each of the plurality of processing units.
Based on the last use times of the units acquired in the unit last use time acquisition step, the last use of the units representing the oldest time among the last use times of the units of the plurality of processing units belonging to the same processing unit. A section last use time specifying step for specifying the time for each of the plurality of processing sections, and
A partition selection step in which one processing partition having the oldest final usage time of the partition is selected from among the plurality of processing partitions based on the plurality of final usage times of the partition specified in the partition last use time specifying step. When,
A unit selection step of selecting one processing unit from a plurality of the processing units belonging to the processing unit selected in the partition selection step, and a unit selection step.
A substrate processing method comprising transporting the substrate from the carrier on the load port to the processing unit selected in the unit selection step to the substrate transfer system. The substrate according to claim 1, further comprising a transport time registration step of registering the same value as the transport time for a plurality of the processing units belonging to the same processing section before the modification unit final use time calculation step. Processing method. In the partition selection step, a first search step for searching the processing partition having the oldest last use time of the partition among the plurality of processing partitions, and a plurality of the processing partitions are found as candidate partitions in the first search step. If this is the case, a second search step for searching the processing partition having the oldest last use time of the unit and the largest number of the processing units among the plurality of the processing partitions included in the candidate partition, and the second search. The substrate processing method according to any one of claims 1 to 3, comprising a selection step of selecting one of the processing compartments from at least one of the treatment compartments found in the step. A substrate processing step in which the processing unit selected in the unit selection step processes the substrate after the substrate transfer step with a processing time shorter than the processing time of the latest substrate transported to any of the plurality of processing units. The substrate processing method according to any one of claims 1 to 4, further comprising. A load port on which the carrier that houses the board is placed, and
A plurality of processing units for processing the substrate conveyed from the carrier on the load port, and
A substrate transfer system that transfers the board between the carrier on the load port and the plurality of processing units.
A control device for controlling the substrate transfer system is provided.
The control device is
Based on the transport time required for each of the plurality of processing units to transport the substrate from the carrier on the load port to the processing unit, or the transport distance representing the distance from the load port to the processing unit. Affiliation confirmation step to confirm which of the multiple processing partitions classified by
A unit final use time acquisition step for acquiring the unit final use time representing the time when the processing unit is last used for processing the substrate for each of the plurality of processing units.
The transport time is subtracted from the unit final use time in the same processing unit based on the unit final use time acquired in the unit final use time acquisition step and the transport time for the plurality of processing units. The correction unit last use time calculation step for calculating the last use time of the correction unit representing the time obtained for each of the plurality of processing units, and the correction unit last use time calculation step.
Represents the oldest of the modified unit last used times of the plurality of processing units belonging to the same processing partition based on the plurality of modified unit last used times obtained in the modified unit last used time calculation step. A partition final use time specifying step for specifying the partition final use time for each of the plurality of processing partitions, and a partition final use time specifying step.
A partition selection step in which one processing partition having the oldest final usage time of the partition is selected from among the plurality of processing partitions based on the plurality of final usage times of the partition specified in the partition last use time specifying step. When,
A unit selection step of selecting one processing unit from a plurality of the processing units belonging to the processing unit selected in the partition selection step, and a unit selection step.
A substrate processing apparatus that executes a substrate transfer step of transporting the substrate from the carrier on the load port to the processing unit selected in the unit selection step to the substrate transfer system. A load port on which the carrier that houses the board is placed, and
A plurality of processing units for processing the substrate conveyed from the carrier on the load port, and
A substrate transfer system that transfers the board between the carrier on the load port and the plurality of processing units.
A control device for controlling the substrate transfer system is provided.
The control device is
Based on the transport time required for each of the plurality of processing units to transport the substrate from the carrier on the load port to the processing unit, or the transport distance representing the distance from the load port to the processing unit. Affiliation confirmation step to confirm which of the multiple processing partitions classified by
A unit final use time acquisition step for acquiring the unit final use time representing the time when the processing unit is last used for processing the substrate for each of the plurality of processing units.
Based on the last use times of the units acquired in the unit last use time acquisition step, the last use of the units representing the oldest time among the last use times of the units of the plurality of processing units belonging to the same processing unit. A section last use time specifying step for specifying the time for each of the plurality of processing sections, and
A partition selection step in which one processing partition having the oldest final usage time of the partition is selected from among the plurality of processing partitions based on the plurality of final usage times of the partition specified in the partition last use time specifying step. When,
A unit selection step of selecting one processing unit from a plurality of the processing units belonging to the processing unit selected in the partition selection step, and a unit selection step.
A substrate processing apparatus that executes a substrate transfer step of transporting the substrate from the carrier on the load port to the processing unit selected in the unit selection step to the substrate transfer system. The control device further executes a transport time registration step of registering the same value as the transport time for a plurality of the processing units belonging to the same processing section before the modification unit final use time calculation step. Item 6. The substrate processing apparatus according to Item 6. In the partition selection step, a first search step for searching the processing partition having the oldest last use time of the partition among the plurality of processing partitions, and a plurality of the processing partitions are found as candidate partitions in the first search step. If this is the case, a second search step for searching the processing partition having the oldest last use time of the unit and the largest number of the processing units among the plurality of the processing partitions included in the candidate partition, and the second search. The substrate processing apparatus according to any one of claims 6 to 8, comprising a selection step of selecting one of the processing compartments from at least one of the processing compartments found in the step. The control device transfers the substrate to the processing unit selected in the unit selection step after the substrate transfer step with a processing time shorter than the processing time of the latest substrate transported to any of the plurality of processing units. The substrate processing apparatus according to any one of claims 6 to 9, further performing a substrate processing step to be processed. A computer program executed by a control device provided in a board processing device that transfers the board to a board transfer system from a carrier on the load port to a plurality of processing units that process the board.
A computer program in which a group of steps is incorporated so that a computer as a control device executes the substrate processing method according to any one of claims 1 to 5.

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