JP7471173B2 - SCHEDULE CREATION METHOD AND SCHEDULE CREATION DEVICE - Google Patents

Description

This application relates to a schedule creation method and a schedule creation device.

Substrate processing apparatuses for processing substrates have been proposed in the past. These substrate processing apparatuses include multiple processing units for processing substrates, a transport robot for transporting the substrates, and a control unit. The transport robot transports unprocessed substrates into each processing unit and transports processed substrates out of each processing unit. The control unit controls the transport robot and the processing units.

The control unit creates a schedule that specifies the operation of the transport robot and the processing units, and controls the transport robot and the processing units according to this schedule (see, for example, Patent Document 1). In Patent Document 1, the control unit first creates a provisional timetable for each processing unit by combining blocks that specify the processing content for each substrate in chronological order. These blocks indicate the processing of the substrate by each processing unit and the transport processing by the transport robot, and the length of the block indicates the required processing time for each process.

Next, the control unit obtains blocks from this temporary timetable and arranges them in chronological order to create a schedule that specifies the processing time periods for each part of the entire substrate processing apparatus.

The control unit can process the substrates in each processing unit sequentially by having the transport robot and processing units perform operations according to the created schedule.

JP 2013-77796 A

The required processing time in each processing unit may differ, for example, depending on the individual differences of the processing units. Furthermore, the required processing time may vary due to deterioration of the processing unit over time. Furthermore, the required processing time may vary due to individual differences of the substrates. Therefore, it is desirable to dynamically correct the required processing time in each processing unit.

However, in Patent Document 1, an overall schedule is used that is created by determining in advance the required processing time of each processing unit, and so such fluctuations in processing time cannot be accommodated.

Therefore, the present application aims to provide technology that can create a schedule that responds to fluctuations in required processing time.

The first aspect of the schedule creation method is a schedule creation method for creating a schedule that chronologically specifies the operation of a substrate processing apparatus having a plurality of units, including a plurality of processing units that perform processing on substrates, and includes a step of virtually arranging blocks indicating the contents of processing and the required time of processing in a chronological order to create a provisional timetable, a scheduling step of acquiring the blocks from the provisional timetable, virtually arranging the blocks in a chronological order to create an overall schedule for the plurality of units, a detection step of detecting first unit sensing information with a first sensor in a first unit included in the plurality of units, an estimation step of estimating the processing end time of the first unit based on relationship information indicating the relationship between the processing progress in the first unit and the first unit sensing information, and obtaining an estimated first unit end time, a provisional timetable update step of updating the contents of the block corresponding to the first unit in the provisional timetable to reflect the estimated first unit end time, and an overall schedule update step of recreating the overall schedule based on the updated provisional timetable, and the provisional timetable update step and the overall schedule update step are completed by the estimated first unit end time.

A second aspect of the schedule creation method is a schedule creation method according to the first aspect, in which, in the scheduling step, an input plan is created as the overall schedule, specifying the substrate loading and processing start times for the multiple units, and before creating an unloading plan that specifies the processing end time and substrate unloading time for at least the first unit, the substrate processing apparatus is caused to perform operations in accordance with the overall schedule, and, in the overall schedule update step, the unloading plan for the first unit is created based on the estimated end time of the first unit, and the overall schedule is recreated.

A third aspect of the schedule creation method is a schedule creation method according to the second aspect, in which, when a transfer process in which a substrate is continuously processed in the first unit and a second unit included in the plurality of units is included in the processing content data 40 that defines the processing procedure for the substrate, before creating a transfer plan that defines the transport from the first unit to the second unit, the substrate processing apparatus is caused to perform an operation in accordance with the overall schedule, and when the first unit estimated end time of the first unit that processes the first substrate is obtained, the transfer plan for the first substrate is created in the overall schedule update step to recreate the overall schedule.

A fourth aspect of the schedule creation method is a schedule creation method according to the third aspect, in which, in the overall schedule update step, if the second unit is processing a second substrate when the first unit estimated end time of the first unit processing the first substrate is obtained and the transport of the second substrate from the second unit has not yet been planned, the creation of the transfer plan for the first substrate is interrupted, and the transfer plan for the first substrate is created after the transport from the second unit is planned, and the overall schedule is recreated.

The fifth aspect of the schedule creation method is the schedule creation method according to the first aspect, in which in the overall schedule update step, a plan is created as the overall schedule that specifies the loading, processing, and unloading of substrates for the multiple units.

A sixth aspect of the schedule creation method is a schedule creation method according to the fifth aspect, further comprising a step of determining whether the time difference between the scheduled end time of the block in the overall schedule and the first unit estimated end time obtained in the estimation step exceeds a predetermined reference value, and if it is determined that the time difference is greater than the reference value, the overall schedule update step is executed, and if it is determined that the time difference is less than the reference value, the overall schedule update step is not executed.

A seventh aspect of the schedule creation method is a schedule creation method according to the fifth or sixth aspect, in which the plan created in the overall schedule update step includes a transfer plan that specifies transportation from the first unit to a second unit included in the plurality of units.

The eighth aspect of the schedule creation method is a schedule creation method according to any one of the first to seventh aspects, further comprising a block update step of updating the processing time indicated by the block based on the first unit estimated end time and storing the updated processing time in a storage medium.

The schedule creation device includes a substrate processing apparatus having a plurality of units including a plurality of processing units that perform processing on substrates, and a control unit that creates a schedule that specifies the operation of the substrate processing apparatus in a chronological order, and the control unit virtually arranges blocks indicating the content of processing and the required time for processing in a chronological order to create a provisional timetable, obtains the blocks from the provisional timetable, virtually arranges the blocks in a chronological order to create an overall schedule for the plurality of units, estimates the processing end time of the first unit based on first unit sensing information detected by a first sensor in a first unit included in the plurality of units and relationship information indicating the processing progress in the first unit, obtains the first unit estimated end time, updates the content of the block corresponding to the first unit in the provisional timetable to reflect the first unit estimated end time, and recreates the overall schedule based on the updated provisional timetable by the first unit estimated end time.

According to the first and fifth aspects of the schedule creation method and the aspect of the schedule creation device, even if the required processing time of a processing unit changes, the substrate processing apparatus can operate according to an overall schedule that corresponds to the required processing time after the change without interrupting operation.

According to a second aspect of the schedule creation method, the substrate processing apparatus executes an operation before creating a take-out plan. If a take-out plan for the first unit is created before this execution, the take-out plan may be changed in the overall schedule update step. In this case, the take-out plan created before the execution step is executed becomes useless. In the second aspect, it is possible to prevent the creation of such useless take-out plans. In other words, it is possible to prevent unnecessary operation of the control unit.

According to the third aspect of the schedule creation method, an overall schedule including a transfer plan can be created. Moreover, the substrate processing apparatus executes an operation before creating a transfer plan for the first substrate. If a transfer plan for the first substrate is created before this execution, the transfer plan may be changed in the overall schedule update step. In this case, the transfer plan created before the execution step is executed becomes useless. In the third aspect, the creation of such a useless transfer plan can be suppressed. In other words, unnecessary operation of the control unit can be suppressed.

According to the fourth aspect of the schedule creation method, a transfer plan for the first board can be created appropriately.

The sixth aspect of the schedule creation method makes it possible to avoid unnecessary recreation of the entire schedule.

According to the seventh aspect of the schedule creation method, an overall schedule including a migration plan can be created.

According to the eighth aspect of the schedule creation method, the processing time for a block can be updated to a value closer to the actual processing time.

1 is a plan view illustrating an example of a configuration of a substrate processing apparatus. 1 is a side view illustrating an example of a configuration of a substrate processing apparatus. 2 is a functional block diagram illustrating an example of an electrical configuration of the substrate processing apparatus; FIG. FIG. 2 is a diagram illustrating an example of an overall schedule. 10 is a flowchart showing an example of an operation of the substrate processing apparatus. FIG. 10 is a diagram illustrating an example of a provisional timetable. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 10 is a diagram illustrating an example of an updated provisional timetable. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. 10 is a flowchart showing an example of an operation of the substrate processing apparatus. 10 is a flowchart showing an example of an operation of the substrate processing apparatus. FIG. 2 is a diagram illustrating an example of an overall schedule. 10 is a flowchart showing an example of an operation of the substrate processing apparatus. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule. FIG. 2 is a diagram illustrating an example of an overall schedule.

Below, the embodiments will be described with reference to the attached drawings. Note that the drawings are schematic, and for the sake of convenience, configurations are omitted or simplified as appropriate. Furthermore, the sizes and positional relationships of the configurations shown in the drawings are not necessarily described accurately, and may be changed as appropriate.

In addition, in the following description, similar components are illustrated with the same reference symbols, and their names and functions are also similar. Therefore, detailed descriptions of them may be omitted to avoid duplication.

First Embodiment
FIG. 1 is a plan view showing an example of the configuration of the substrate processing apparatus 100, and FIG. 2 is a side view showing an example of the configuration of the substrate processing apparatus 100. The substrate processing apparatus 100 includes an indexer section 1 and a processing section 2. The processing section 2 includes a transfer unit PASS. The indexer section 1 transfers an unprocessed substrate W to the transfer unit PASS and receives a processed substrate W from the transfer unit PASS. The processing section 2 receives the unprocessed substrate W from the transfer unit PASS and performs various processes on the substrate W, such as a process using a processing agent (a processing liquid or a processing gas), a process using electromagnetic waves such as ultraviolet light, and a physical cleaning process (brush cleaning, spray nozzle cleaning, etc.). The processing section 2 then transfers the processed substrate W to the transfer unit PASS.

The indexer section 1 includes multiple stages ST1 to ST4 and an indexer robot IR, which is an example of a substrate transport unit. Each of the stages ST1 to ST4 is a substrate container holder capable of holding a substrate container C that contains multiple substrates W (e.g., semiconductor wafers) in a stacked state. The substrate container C may be a front opening unified pod (FOUP) that stores the substrates W in a sealed state, or a standard mechanical interface (SMIF) pod or an open cassette (OC). For example, when the substrate container C is placed on the stages ST1 to ST4, the substrate container C contains multiple substrates W in a horizontal position that are stacked vertically with a gap between them. The horizontal position here refers to a state in which the thickness direction of the substrates W is aligned vertically.

The indexer robot IR includes, for example, a base unit 6, a multi-joint arm 7, and a pair of hands 8A and 8B. The base unit 6 is fixed to, for example, the frame of the substrate processing apparatus 100. The multi-joint arm 7 is configured by connecting a plurality of arms that can rotate along a horizontal plane to each other in a rotatable manner, and is configured to bend and extend by changing the angle between the arm units at the joints that are the connecting points of the arm units. The base end of the multi-joint arm 7 is connected to the base unit 6 so as to be rotatable around a vertical axis. Furthermore, the multi-joint arm 7 is connected to the base unit 6 so as to be able to rise and fall. In other words, the base unit 6 includes a lifting drive mechanism for raising and lowering the multi-joint arm 7, and a rotation drive mechanism for rotating the multi-joint arm 7 around the vertical axis. In addition, the multi-joint arm 7 is provided with an individual rotation drive mechanism for independently rotating each arm unit. The hands 8A and 8B are connected to the tip of the articulated arm 7 so that they can rotate individually around a vertical axis and advance and retreat individually in the horizontal direction. The articulated arm 7 is provided with a hand rotation drive mechanism for rotating the hands 8A and 8B individually around the vertical axis, and a hand advance and retreat mechanism for advancing and retreating the hands 8A and 8B individually in the horizontal direction. The hands 8A and 8B are configured to be able to hold, for example, one substrate W each. The hands 8A and 8B may be arranged in a vertically overlapping state, but in FIG. 1, the hands 8A and 8B are drawn shifted in a direction parallel to the paper surface (horizontal direction) for clarity.

With this configuration, the indexer robot IR operates to remove one unprocessed substrate W from a substrate container C held on any of the stages ST1 to ST4 with the hand 8A and transfer it to the transfer unit PASS. Furthermore, the indexer robot IR operates to receive one processed substrate W from the transfer unit PASS with the hand 8B and transfer it to a substrate container C held on any of the stages ST1 to ST4.

The processing section 2 includes a plurality of (12 in this embodiment) processing units SPIN1 to SPIN12, a main transport robot CR which is an example of a substrate transport unit, and the aforementioned delivery unit PASS. In this embodiment, the processing units SPIN1 to SPIN12 are arranged three-dimensionally. More specifically, the processing units SPIN1 to SPIN12 are arranged to form a three-story structure, with four processing units arranged on each floor. That is, four processing units SPIN1, SPIN4, SPIN7, and SPIN10 are arranged on the first floor, another four processing units SPIN2, SPIN5, SPIN8, and SPIN11 are arranged on the second floor, and further processing units SPIN3, SPIN6, SPIN9, and SPIN12 are arranged on the third floor. More specifically, the main transport robot CR is disposed in the center of the processing section 2 in a plan view, and the transfer unit PASS is disposed between the main transport robot CR and the indexer robot IR. A first processing unit group G1, which is made up of three stacked processing units SPIN1 to SPIN3, and a second processing unit group G2, which is made up of another three stacked processing units SPIN4 to SPIN6, are disposed so as to face each other across the transfer unit PASS. A third processing unit group G3, which is made up of three stacked processing units SPIN7 to SPIN9, is disposed adjacent to the first processing unit group G1 on the side farther from the indexer robot IR. Similarly, a fourth processing unit group G4, which is made up of three stacked processing units SPIN10 to SPIN12, is disposed adjacent to the second processing unit group G2 on the side farther from the indexer robot IR. The first to fourth processing unit groups G1 to G4 surround the main transport robot CR.

The main transport robot CR includes, for example, a base unit 11, a multi-joint arm 12, and a pair of hands 13A and 13B. The base unit 11 is fixed to, for example, a frame of the substrate processing apparatus 100. The multi-joint arm 12 is configured by connecting a plurality of arms extending along a horizontal plane to each other so as to be rotatable, and is configured to bend and extend by changing the angle between the arm units at the joints where the arm units are connected. The base end of the multi-joint arm 12 is connected to the base unit 11 so as to be rotatable around a vertical axis. Furthermore, the multi-joint arm 12 is connected to the base unit 11 so as to be able to rise and fall. In other words, the base unit 11 includes a lifting drive mechanism for raising and lowering the multi-joint arm 12 and a rotation drive mechanism for rotating the multi-joint arm 12 around a vertical axis. In addition, the multi-joint arm 12 is provided with an individual rotation drive mechanism for independently rotating each arm unit. The hands 13A and 13B are connected to the tip of the articulated arm 12 so that they can rotate about a vertical axis and advance and retreat individually in the horizontal direction. The articulated arm 12 is provided with a hand rotation drive mechanism for rotating the hands 13A and 13B about a vertical axis and a hand advance and retreat mechanism for advancing and retreating the hands 13A and 13B in the horizontal direction individually. The hands 13A and 13B are configured to be able to hold, for example, one substrate W each. The hands 13A and 13B may be arranged in a vertically overlapping state, but in FIG. 1, the hands 13A and 13B are drawn shifted in a direction parallel to the paper surface (horizontal direction) for clarity.

With this configuration, the main transport robot CR receives one unprocessed substrate W from the delivery unit PASS with the hand 13A, and transports the unprocessed substrate W into one of the processing units SPIN1 to SPIN12. The main transport robot CR also receives a processed substrate W that has been processed in the processing units SPIN1 to SPIN12 with the hand 13B, and delivers the substrate W to the delivery unit PASS.

The processing units SPIN1 to SPIN12 are single-wafer processing units that process substrates W one by one. The processing units SPIN1 to SPIN12 may be, for example, rotating liquid processing units that include, in a processing chamber 17 (chamber), a spin chuck 15 that holds and rotates a single substrate W in a horizontal position, and a processing liquid nozzle 16 that supplies a processing liquid (chemical liquid or rinsing liquid) to the spin chuck 15. In FIG. 2, the internal structure of only the processing units SPIN3 and SPIN6 is shown, and the internal structure of the other processing units is not shown.

Figure 3 is a functional block diagram showing an example of the electrical configuration of the substrate processing apparatus 100. The substrate processing apparatus 100 includes a computer 20 that controls the processing units SPIN1 to SPIN12, the main transport robot CR, and the indexer robot IR. The computer 20 may have the form of a personal computer (FA personal computer) and includes a control unit (control circuit) 21, an input/output unit 22, and a storage medium 23. The control unit 21 includes a processor such as a CPU. The input/output unit 22 includes an output device such as a display unit, and an input device such as a keyboard, a pointing device, and a touch panel. Furthermore, the input/output unit 22 includes a communication module for communication with a host computer. The storage medium 23 includes a storage device such as a solid-state memory device and a hard disk drive.

The control unit 21 includes a scheduling function unit (scheduler) 25 and a processing execution instruction unit 26. The scheduling function unit 25 creates a plan (overall schedule) for operating the resources of the substrate processing apparatus 100 in chronological order so that the substrate W is removed from the substrate container C, processed in the processing units SPIN1 to SPIN12, and then stored in the substrate container C. The overall schedule is a plan that specifies the operation of the substrate processing apparatus 100. The processing execution instruction unit 26 operates the resources of the substrate processing apparatus 100 in accordance with the overall schedule created by the scheduling function unit 25.

The storage medium 23 is configured to store various data including the program executed by the control unit 21, processing content data 40, and schedule data (overall schedule) created by the scheduling function unit 25. The processing content data 40 indicates the content of processing for the substrate W and the time required for the processing (hereinafter referred to as required processing time). Specific examples of the processing content data 40 will be described later. This processing content data 40 may be input to the input/output unit 22 from a host computer, for example, or may be input to the input/output unit 22 by a user operating an input device.

The programs stored in the storage medium 23 include a schedule creation program for causing the control unit 21 to operate as a scheduling function unit 25, and a process execution program for causing the control unit 21 to operate as a process execution instruction unit 26. Note that the control unit 21 does not necessarily need to operate based on a program, and may be configured, for example, by a dedicated hardware circuit such as a logic circuit.

The processing content data 40 includes a process job (PJ) code assigned to each substrate W and a recipe associated with the process job code. The recipe is data that defines the substrate processing content, and includes substrate processing conditions and substrate processing procedures. More specifically, the recipe includes parallel processing unit information, processing liquid information, and processing time (required processing time) information. The parallel processing unit information is information that specifies available processing units, and indicates that parallel processing is possible using the specified processing units. In other words, it indicates that when one of the specified processing units is unavailable, it is possible to use the other specified processing units instead. "When unavailable" refers to when the processing unit is being used to process another substrate W, when the processing unit is out of order, or when the operator does not want the processing unit to process the substrate W. A process job refers to one or more substrates W that are subjected to a common process. A process job code is identification information (substrate group identification information) for identifying a process job. That is, multiple substrates W that have been assigned a common process job code are subjected to a common process according to a recipe that corresponds to that process job code. However, there may be cases where the substrate processing content (recipe) that corresponds to different process job codes is the same. For example, when a common process is performed on multiple substrates W that are in a consecutive processing order (the order of removal from the substrate container C), a common process job code is assigned to those multiple substrates W.

The control unit 21 acquires processing content data 40 for each substrate W and stores it in the storage medium 23. The acquisition and storage of processing content data 40 may be performed before scheduling for each substrate W (i.e., creation of an overall schedule). For example, immediately after a substrate container C is held on a stage ST1 to ST4, processing content data 40 corresponding to a substrate W contained in the substrate container C may be provided from the host computer to the control unit 21.

The scheduling function unit 25 creates an overall schedule based on the processing content data 40. FIG. 4 is a diagram that shows a schematic example of an overall schedule created by the scheduling function unit 25. In the example of FIG. 4, the overall schedule is represented diagrammatically by blocks and arrows. Note that, for ease of explanation, FIG. 4 shows an overall schedule that representatively uses four processing units SPIN1 to SPIN4. Also, for ease of explanation, processing of eight substrates W will be described. In reality, more substrates W are processed.

Each block shown in FIG. 4 indicates the processing content in each unit (indexer robot IR, main transport robot CR, and processing units SPIN1 to SPIN4). Specifically, the block indicated with the symbol G indicates the unloading processing of the substrate W by each substrate transport unit (indexer robot IR and main transport robot CR), the block indicated with the symbol P indicates the loading processing of the substrate W by each substrate transport unit, and the blank blocks indicate the processing in each processing unit SPIN1 to SPIN4. The length of each block indicates the required processing time for the corresponding process. These blocks are defined by the processing content data 40.

The position of each block shown in FIG. 4 indicates the time period of the processing corresponding to that block. In other words, the positions of both ends of the block indicate the start and end times of the processing, respectively. In addition, the arrows connecting the blocks indicate the destination of the substrate W.

Here, the overall schedule will be described focusing on a substrate W processed by processing unit SPIN1 as a representative example. In the example of FIG. 4, the blocks corresponding to the substrate W processed by processing unit SPIN1 are indicated by thick lines. Here, substrates W1 and W2 are used as an example of two substrates W sequentially processed by processing unit SPIN1. According to FIG. 4, the unprocessed substrate W1 is taken out of the substrate container C by the indexer robot IR (block A1) and transferred to the transfer unit PASS (block A2). Then, this substrate W1 is taken out of the transfer unit PASS by the main transport robot CR (block A3) and transferred to the processing unit SPIN1 (block A4). The substrate W1 is subjected to processing in this processing unit SPIN1 (block A5).

In the example of FIG. 4, before the processing in the processing unit SPIN1 is completed, the next unprocessed substrate W2 is removed from the substrate container C by the indexer robot IR (block B1) and transferred to the transfer unit PASS (block B2). Then, the substrate W2 is removed from the transfer unit PASS by the main transport robot CR (block B3).

After the processing in the processing unit SPIN1 is completed, the processed substrate W1 is removed from the processing unit SPIN1 by the main transport robot CR (block A6), and the next unprocessed substrate W2 is then transferred to the processing unit SPIN1 by the main transport robot CR (block B4). In this embodiment, the main transport robot CR includes two hands 13A and 13B, so that the processed substrate W1 can be removed from the processing unit SPIN1 by the hand 13A (block A6), and the unprocessed substrate W2 can be transferred to the processing unit SPIN1 by the hand 13B (block B4). The processed substrate W1 is transferred from the main transport robot CR to the transfer unit PASS (block A7). The substrate W1 is removed from the transfer unit PASS by the indexer robot IR (block A8) and transferred to the substrate container C (block A9).

Meanwhile, unprocessed substrate W2 is processed by processing unit SPIN1 (block B5). Then, when processing of substrate W2 by processing unit SPIN1 is completed, it is removed from processing unit SPIN1 by main transport robot CR (block B6) and transferred to transfer unit PASS (block B7). Next, processed substrate W2 is removed from transfer unit PASS by indexer robot IR (block B8) and transferred to substrate container C (block B9).

If the scheduling function unit 25 of the control unit 21 creates an overall schedule as shown in FIG. 4 and the processing execution instruction unit 26 controls each part of the substrate processing apparatus 100 according to this overall schedule, the substrate processing apparatus 100 can be made to operate according to the overall schedule. According to the overall schedule in FIG. 4, eight substrates W are processed by each of the processing units SPIN1 to SPIN4 performing two processes.

However, the required processing time in the processing units SPIN1 to SPIN4 may differ from the predetermined time due to various factors. For example, the processing time may differ due to individual differences between the processing units SPIN1 to SPIN4, and may also differ due to changes over time in the processing units SPIN1 to SPIN4. The required processing time may also differ due to individual differences between substrates W.

In this embodiment, as shown in FIG. 3, each of the processing units SPIN1 to SPIN12 includes a sensor SR. This sensor SR monitors the processing progress status of each of the processing units SPIN1 to SPIN12 while the processing is being executed. Specifically, each sensor SR detects unit sensing information indicating the processing progress status of each of the processing units SPIN1 to SPIN12. The unit sensing information is information related to the remaining time of the processing of each of the processing units SPIN1 to SPIN12, that is, the end time of the processing. In response to detection by the sensor SR, the processing units SPIN1 to SPIN12 notify the control unit 21 of notification information.

For example, when processing units SPIN1 to SPIN12 perform etching processing on a specified film on the surface of substrate W, the film thickness of the specified film can be used as the unit sensing information. In this case, sensor SR detects the film thickness of the specified film on substrate W. For example, a camera that captures an image of the surface of substrate W can be used as sensor SR. Since the surface of substrate W changes depending on the progress of etching, i.e., the film thickness of the specified film, the image captured by the camera also changes depending on the film thickness of the specified film. Therefore, this image is information related to the progress of etching, in other words, information related to the end time of processing.

As etching progresses, the color of the area to be etched may change depending on the progress of the process (i.e., the degree of etching progress). In this case, the relationship between the degree of etching progress and the color of the area to be etched may be determined in advance. Furthermore, since the degree of etching progress depends on the time elapsed since the start of processing, the correspondence between the color of the area to be etched and the remaining time of processing can be determined in advance from this relationship. Such a correspondence can be determined, for example, by experiment or simulation. Relationship information indicating this correspondence may be stored in the storage medium 23, for example, as a numerical table or lookup table, or may be stored in the storage medium 23 as an arithmetic expression (function expression).

Then, by performing image processing on the image acquired by the sensor SR to determine the color of the area to be etched, the remaining processing time can be found (estimated) according to the determined color and a predetermined correspondence relationship (relationship information in the storage medium 23).

Each of the processing units SPIN1 to SPIN12 notifies the control unit 21 of notification information during processing in response to unit sensing information detected by the sensor SR during the processing. The notification information may be unit sensing information (an image in the above example) acquired by the sensor SR. In this case, the scheduling function unit 25 of the control unit 21 estimates the remaining time of the processing unit that sent the notification based on the notification information and the above correspondence relationship, and estimates the unit estimated end time (estimation step).

The functions of the control unit 21 may be divided. For example, a control unit may be provided in each of the processing units SPIN1 to SPIN12, and the control units of the processing units SPIN1 to SPIN12 may be connected to the control unit 21 via a communication line. In this case, the control unit of each of the processing units SPIN1 to SPIN12 may estimate the remaining processing time based on unit sensing information detected by the sensor SR. Then, the control unit of each of the processing units SPIN1 to SPIN12 may notify the control unit 21 of notification information including this estimated remaining time.

As described above, the scheduling function unit 25 of the control unit 21 can recognize the unit estimated end time of a processing unit while the processing unit is in the middle of executing the processing. In other words, the scheduling function unit 25 can recognize the unit estimated end time of the processing unit before the processing unit ends. Therefore, the scheduling function unit 25 recreates the overall schedule based on the unit estimated end time before the processing unit ends. Specifically, the scheduling function unit 25 determines the end time of the processing unit based on the unit estimated end time, and accordingly determines the processing time zones of other units as appropriate. An example of a specific operation is described in detail below.

Note that here, the determination of the processing time period for each unit is explained by arranging the blocks corresponding to that processing. In other words, the blocks are virtually arranged on the time axis to determine the processing time period corresponding to that block.

<Specific Operation Example of the Substrate Processing Apparatus 100>
In the first embodiment, the overall schedule is divided into an input plan and an unloading plan for consideration. The input plan is a plan regarding the transport of substrates W from the substrate container C to each of the processing units SPIN1 to SPIN12. In other words, this input plan is a plan that specifies the start time of loading and processing of substrates W, and more specifically, the time period of transport processing by each substrate transport unit to each processing unit (e.g., blocks A1 to A4, B1 to B4) and the start time of processing in each processing unit SPIN1 to SPIN12 (e.g., start time of blocks A5, B5). The unloading plan is a plan regarding the transport of substrates W from each processing unit SPIN1 to SPIN12 to the substrate container C. In other words, this unloading plan is a plan that specifies the end time of processing and the removal of substrates W, and more specifically, is a plan that specifies the end time of processing for each processing unit SPIN1 to SPIN12 (e.g., the end time of blocks A5, B5) and the time period for transport processing of each substrate transport unit to substrate container C (e.g., blocks A6 to A9, B6 to B9).

Figure 5 is a flow chart showing an example of a specific operation of the substrate processing apparatus 100 (schedule creation apparatus). This series of processes is executed repeatedly. First, the scheduling function unit 25 judges whether or not a substrate processing start instruction has been received (step S1). For example, the start instruction is input to the input/output unit 22 from a host computer or a user. In response to this input, the control unit 21 transitions, for example, the start instruction flag from L to H. Here, "L" and "H" indicate two values of information, and a start instruction flag of H indicates that a substrate processing start instruction has been input. This start instruction flag remains H until processing for all substrates W is completed.

The substrate processing start instruction may be issued for all substrates W accommodated in a common substrate container C as a single unit. The substrate processing start instruction may also be an instruction to start processing one or more substrates W that are less than the total number accommodated in the common substrate container C, or an instruction to start processing multiple substrates W accommodated in separate substrate containers C.

When there is no substrate processing start instruction, that is, when the start instruction flag is L, the scheduling function unit 25 executes step S1 again. When there is a substrate processing start instruction, the scheduling function unit 25 determines the planning range (step S2). That is, the scheduling function unit 25 determines whether to create an input plan or an output plan from the overall schedule. Initially, the scheduling function unit 25 determines the input plan as the planning range. Below, each step will be explained, focusing first on the creation of the input plan. Also, for simplicity of explanation, the following explanation will be given using four processing units SPIN1 to SPIN4.

For example, suppose that a recipe associated with a certain process job code in the processing content data 40 specifies parallel processing of processing units SPIN1 to SPIN4. That is, consider a case where substrate processing according to that recipe can be performed in any of the four processing units SPIN1 to SPIN4. In this case, there are four possible routes that a substrate W assigned that process job code can take when undergoing processing. That is, the routes that can be selected for processing that substrate W are the four routes that pass through any of the processing units SPIN1 to SPIN4. The scheduling function unit 25 then creates a tentative timetable corresponding to the four routes (step S3).

Figure 6 is a diagram showing an example of a provisional timetable corresponding to a route that passes through processing unit SPIN1. Here, an input plan for the entire schedule is created, so the provisional timetable also includes blocks used in the input plan. In the example of Figure 6, the provisional timetable includes block A1 representing the unloading process of the substrate W from the substrate container C by the indexer robot IR, block A2 representing the loading process of the substrate W into the transfer unit PASS by the indexer robot IR, block A3 representing the unloading process of the substrate W from the transfer unit PASS by the main transport robot CR, block A4 representing the loading process of the substrate W into processing unit SPIN1 by the main transport robot CR, and block A51 representing the start of processing of the substrate W by processing unit SPIN1.

In the following, the unloading and loading processes performed by the indexer robot IR and the main transport robot CR are collectively referred to as the transport process. The blocks that represent this transport process are a pair of adjacent blocks marked with the symbols G and P (for example, a pair of blocks A1, A2 and a pair of blocks A3, A4).

The scheduling function unit 25 creates a provisional timetable by arranging multiple blocks in order on the time axis without overlapping, as shown in FIG. 6. For the same substrate W, the scheduling function unit 25 creates four similar provisional timetables (provisional timetables in which blocks are arranged in the processing units SPIN1 to SPIN4, respectively) corresponding to the four routes that pass through the four processing units SPIN1 to SPIN4, respectively. In this way, provisional timetables for a total of four routes are created for one substrate W.

A similar provisional timetable is created for substrates W that have been assigned the same process job code (here, the four substrates W that are first processed in processing units SPIN1 to SPIN4). The provisional timetable created in this way is stored in storage medium 23 as part of the schedule data. At the stage of creating the provisional timetable, interference between blocks relating to multiple substrates W (overlap on the time axis) is not taken into consideration.

When a scheduling instruction is issued (step S4: YES), blocks are arranged for the substrates W of the process job (steps S4 to S13). In response to the issuance of a scheduling instruction, the control unit 21 transitions the scheduling instruction flag from L to H. The scheduling instruction flag being H indicates that a scheduling instruction has been issued. This scheduling instruction flag remains H until processing for all substrates W is completed.

When a scheduling instruction is issued, the scheduling function unit 25 judges whether the substrate W for which the schedule is to be created is the first substrate W of the process job (step S5). If the substrate W is the first substrate W of the process job, the scheduling function unit 25 judges whether pre-preparation processing is required (step S6). As an example of pre-preparation processing, a pre-dispense process in which a certain amount of processing liquid is discharged from a processing liquid nozzle can be mentioned. For example, when a temperature-adjusted processing liquid is supplied to a substrate to process the substrate, the pre-dispense process can be executed to discharge the processing liquid that has accumulated in the processing liquid nozzle and the processing liquid piping and has become outside the target temperature range, and the temperature-adjusted processing liquid can be guided to the discharge port of the processing liquid nozzle. Then, by executing a processing liquid supply process in which the processing liquid is discharged onto the substrate W after the pre-dispense process, the substrate W can be processed with the processing liquid that has been temperature-adjusted from the beginning. This allows precise substrate processing to be realized. Another example of pre-preparation processing is a cleaning process (chamber cleaning) in a processing chamber (chamber) provided in a processing unit. By cleaning the inside of the processing chamber, it is possible to prevent the next substrate W loaded into the processing chamber from being affected by the processing of the previous substrate W. This allows for precise substrate processing. Chamber cleaning includes, for example, cleaning of the spin chuck that holds and spins the substrate W, cleaning of the processing cup that houses the spin chuck, and cleaning of the guard (anti-splash member) that catches processing liquid splashed from the spin chuck. Further examples of preparatory processing include cleaning of the chuck pins that hold the substrate W and cleaning of other parts in the processing chamber.

Whether or not preparatory processing is required is specified in the recipe associated with the process job code. When preparatory processing is required, a block (preparatory block) representing the execution of preparatory processing is placed for processing units SPIN1 to SPIN4 (all processing units in the above example) that may process the substrate W (step S7). FIG. 7 is a diagram showing an example of a plan in which preparatory blocks are placed for all processing units SPIN1 to SPIN4. When scheduling a substrate W other than the first substrate W of the process job (step S5: NO), steps S6 and S7 are omitted. Even when scheduling the first substrate W of the process job, if the recipe corresponding to the process job does not specify preparatory processing (step S6: NO), step S7 is omitted. Here, as an example, a case in which a preparatory block is not placed is described.

Next, the scheduling function unit 25 refers to the temporary timetable corresponding to the substrate W, and acquires one of the blocks that constitutes the temporary timetable (step S8). The block acquired at this time is the block that is placed at the earliest position on the time axis of the temporary timetable among the blocks that have not been placed. Furthermore, the scheduling function unit 25 searches for a position where the acquired block can be placed (step S9), and places the block in the searched position (step S10). Each block is placed at the earliest position on the time axis while preventing the same resources from being used at the same time in duplicate. Note that placing the blocks here does not mean actually placing the blocks, but rather means provisionally determining the time period for each process.

Next, the scheduling function unit 25 judges whether all blocks in the provisional timetable have been arranged (step S11), and if they have not been arranged (step S11: NO), repeats the same operations (steps S8 to S10). Then, when all blocks in the provisional timetable have been arranged (step S11: YES), the scheduling function unit 25 judges whether the creation of plans using all provisional timetables has been completed (step S12). That is, it judges whether the input plans of all patterns using the four processing units SPIN1 to SPIN4 have been created (step S12). If all patterns have not yet been created (step S11: NO), the scheduling function unit 25 executes step S4 again. If all patterns have been created (step S12: YES), the scheduling function unit 25 judges to select one of the created plans as the overall schedule (step S13). For example, the scheduling function unit 25 identifies the plan with the highest throughput and selects that plan. If there are multiple plans with the highest throughput, the scheduling function unit 25 selects, for example, the plan with the widest interval (use interval) between blocks among the plans. Also, if the usage intervals are also the same, the scheduling function unit 25 selects, for example, a plan that operates the processing units in ascending order of identification numbers from among the plans.

Figure 8 is a schematic diagram showing an example of an overall schedule initially created by the above-mentioned operations. In the example of Figure 8, the start times of processing in the processing units SPIN1 to SPIN4 become later in that order. The loading plan is represented by a block showing unloading processing ("G") and load processing ("P") by the indexer robot IR, a block showing unloading processing ("G") and load processing ("P") by the main transport robot CR, and a block showing the start times of processing in each of the processing units SPIN1 to SPIN4. As shown in the example of Figure 8, at this point, the overall schedule only includes loading plans for the first four substrates W.

Steps S4 to S13 correspond to the scheduling step in which an overall schedule is created based on the tentative timetable.

The process execution instruction unit 26 of the control unit 21 causes the substrate processing apparatus 100 to perform operations according to the overall schedule of FIG. 8. Thus, the processing units SPIN1 to SPIN4 start processing the substrate W according to the overall schedule of FIG. 8. Then, when each of the processing units SPIN1 to SPIN4 starts processing, during that processing, each sensor SR detects unit sensing information (detection step) and notifies the control unit 21 of notification information in response to the detection.

In response to the notification of the notification information, the scheduling function unit 25 of the control unit 21 creates a payout plan and the next input plan for the processing unit that sent the notification. This can also be done according to the flowchart in Figure 5.

Note that while the substrate processing apparatus 100 is operating according to the overall schedule, the flag for the substrate processing start instruction is always set to H, so a positive judgment (YES judgment) is made in the processing of step S1.

In response to the notification of the notification information, the scheduling function unit 25 determines the plan range to be created as a delivery plan (step S2). Next, the scheduling function unit 25 updates the provisional timetable based on the notification information (step S3). Specifically, the scheduling function unit 25 arranges blocks related to transport from the processing unit that sent the notification to the substrate container C in the provisional timetable based on the notification information.

Here, it is assumed that notification information has been notified from processing unit SPIN1 to the scheduling function unit 25. The scheduling function unit 25 can recognize the estimated remaining time of processing unit SPIN1 based on the notification information. The scheduling function unit 25 calculates the required processing time based on the estimated remaining time of processing unit SPIN1, and updates the provisional timetable based on this required processing time (step S3: provisional timetable update step). The required processing time is calculated based on the sum of the time from the start time of processing of processing unit SPIN1 to the current time and the estimated remaining time. The scheduling function unit 25 updates the contents of the block in the provisional timetable that corresponds to the processing unit SPIN1 that sent the notification based on the required processing time. Figure 9 shows the provisional timetable after update for processing unit SPIN1. In the example of FIG. 9, the following blocks have been newly placed in the provisional timetable: block A52, which specifies the end of processing in processing unit SPIN1; blocks A6 and A7, which specify the transport processing by the main transport robot CR from processing unit SPIN1 to the delivery unit PASS; and blocks A8 and A9, which specify the transport processing by the indexer robot IR from the delivery unit PASS to the substrate container C. In the example of FIG. 9, the newly placed blocks are indicated by diagonal hatching.

In step S4, since the scheduling instruction flag is H, a positive judgment (YES judgment) is made, and in step S5, a negative judgment (NO judgment) is made.

Next, the scheduling function unit 25 refers to the provisional timetable for the processing unit SPIN1 that sent the notification, and acquires one of the unplaced blocks that constitute the provisional timetable (step S8). An unplaced block here is a block that has not yet been placed in the overall schedule. For example, the scheduling function unit 25 acquires block A52, which is placed in the earliest position among the unplaced blocks.

The scheduling function unit 25 searches for a position where the acquired block A52 can be placed (step S9), and places the block A52 at the searched position (step S10). The other blocks A6 to A9 are also placed sequentially by a similar process (step S11: NO, steps S9 to S10). This allows the scheduling function unit 25 to create an overall schedule that includes a payout plan for the processing unit SPIN1.

Figure 10 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. The example in Figure 10 also shows the notification time t2 (SPIN1) at which notification information is notified from the processing unit SPIN1, and the unit estimated end time t3 (SPIN1) of that processing unit SPIN1.

As shown in FIG. 10, based on the notification information, the scheduling function unit 25 newly places a block indicating the end time of the processing unit SPIN1 and a block of the main transport robot CR and the indexer robot IR related to the transport process from the processing unit SPIN1 to the substrate container C. In the example of FIG. 10, the newly placed blocks are also indicated by diagonal hatching.

Note that here, since there are still substrates W to be processed in the substrate container C, the next input plan for the processing unit SPIN1 that sent the notification is also created. In other words, if there is a next unprocessed substrate W in the substrate container C that can be transported to the processing unit SPIN1, the scheduling function unit 25 also creates a next input plan for the processing unit SPIN1 in order to transport that substrate W to the processing unit SPIN1. In other words, in step S2, if there is an unprocessed substrate W, the scheduling function unit 25 determines in the planning range not only the unloading plan for the processing unit that sent the notification information, but also the next input plan for that processing unit.

In this case, in step S3, the scheduling function unit 25 creates not only a tentative timetable (Figure 8) for the current substrate W, but also a tentative timetable for the processing unit SPIN1 for the next substrate W. However, in the tentative timetable for the next substrate W, only blocks related to the loading plan are arranged, as in Figure 6. Then, after creating the unloading plan for the current substrate W, the scheduling function unit 25 repeats steps S8 to S10 for the blocks related to the loading plan for the next substrate W to create a loading plan for the next substrate W.

Figure 11 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 11, a block of the indexer robot IR and the main transport robot CR for transport processing of the next substrate W from the substrate container C to the processing unit SPIN1, and a block indicating the start time of the next processing of the processing unit SPIN1 are newly placed. In the example of Figure 11, the newly placed block is also shown with diagonal hatching. In the example of Figure 11, a predetermined preparation period is provided between the end time of the processing of the processing unit SPIN1 and the start time of the next processing of the processing unit SPIN1.

In the above operation, one overall schedule is created that includes the payout plan and the next input plan for processing unit SPIN1. Therefore, in step S12, a positive judgment (YES judgment) is made. Since one overall schedule has been created, the judgment process in step S13 is essentially omitted.

The scheduling function unit 25 completes the creation of the take-out plan and the next input plan for the processing unit SPIN1, i.e., the recreation of the overall schedule, before the unit estimated end time t3 (SPIN1) of the processing unit SPIN1. For example, the sensor SR may acquire notification information when a predetermined time has elapsed since the start of processing of the processing unit SPIN1, and notify the notification information. The predetermined time may be set in advance so that the remaining processing time from the notification time t2 (SPIN1) of the notification information is equal to or greater than the required creation time Tref required to recreate the overall schedule. The required creation time Tref is also set in advance, for example.

Accordingly, at notification time t2 (SPIN1) when the scheduling function unit 25 of the control unit 21 receives the notification information, the estimated remaining processing time of the notifying processing unit SPIN1 is longer than the required creation time Tref required to create the notifying processing unit's take-out plan and next input plan. Therefore, the scheduling function unit 25 can create the take-out plan and next input plan of the notifying processing unit SPIN1 before the unit estimated end time t3 (SPIN1) of the notifying processing unit SPIN1. Therefore, the processing execution instruction unit 26 can cause the substrate processing apparatus 100 to continue operating according to the overall schedule without interrupting the operation of the substrate processing apparatus 100.

Step S3, which is executed in response to the notification information, corresponds to a tentative timetable update step for updating the tentative timetable, and steps S4 to S13, which are executed in response to the notification information, correspond to an overall schedule update step for recreating the overall schedule. The tentative timetable update step and the overall schedule update step are completed by the unit estimated end time t3 of the processing unit that sent the notification.

The calculation accuracy of the unit estimated end time t3 (SPIN1) is higher the closer the timing of detection of the unit sensing information by the sensor SR is to the end time of the processing. In other words, the shorter the estimated remaining time estimated based on the unit sensing information, the higher the estimation accuracy. Therefore, the scheduling function unit 25 may start recreating the entire schedule when the estimated remaining time becomes close to the required creation time Tref required to re-create the entire schedule. As an example of a specific operation, the control unit of the processing unit SPIN1 estimates the remaining time of the processing each time the sensor SR detects, and judges whether the estimated remaining time has approached the required creation time Tref. For example, the control unit judges whether the difference between the estimated remaining time and the required creation time Tref is less than a reference value. The reference value is, for example, set in advance. Then, when the difference becomes less than the reference value, the control unit notifies the control unit 21 of the notification information (estimated remaining time).

As a result, the scheduling function unit 25 can create a take-out plan and a next put-in plan for the processing unit SPIN1 based on the estimated remaining time (i.e., the unit estimated end time t3 (SPIN1)) that is estimated with higher accuracy. In other words, a more accurate overall schedule can be recreated.

In the following, processing units SPIN2 to SPIN4 also notify the control unit 21 of notification information when the difference between the estimated remaining time and the required creation time Tref falls below a reference value. Therefore, after the notification from processing unit SPIN1, notification information is notified from the sensor SR of processing unit SPIN2. Based on the notification of the notification information, the scheduling function unit 25 creates a take-out plan for the processing unit SPIN2 that sent the notification, and also creates the next input plan as necessary, recreating the overall schedule.

Figure 12 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 12, at notification time t2 (SPIN2), notification information is notified from processing unit SPIN2 to the scheduling function unit 25. Based on the notification information, the scheduling function unit 25 creates a take-out plan and a next input plan for processing unit SPIN2, and recreates the overall schedule. In the example of Figure 12, the newly placed blocks are also shown with diagonal hatching.

Then, by repeating the same process, new plans are sequentially incorporated into the overall schedule in parallel with the operation of the substrate processing apparatus 100. This results in the overall schedule shown in FIG. 4.

In the above example, the case where the required processing time of the processing units SPIN1 to SPIN4 is approximately equal to the normal required processing time has been described. Next, an example where the required processing time of the processing units SPIN1 to SPIN4 varies will be described. First, a case where the required processing time of the processing units SPIN2 and SPIN4 is shorter than normal will be described. An example of the operation of the substrate processing apparatus 100 is the same as that shown in FIG. 5.

First, as described above, the scheduling function unit 25 creates an initial loading plan for each processing unit SPIN1 to SPIN4 as part of the overall schedule before starting operation of the substrate processing apparatus 100 (step S2: loading plan, steps S3 to S13). This creates the overall schedule shown in FIG. 8.

The control unit of each processing unit SPIN1 to SPIN4 notifies the control unit 21 of notification information when the estimated remaining processing time approaches the required creation time Tref required to re-create the overall schedule. Therefore, the notification time t2 will be earlier the shorter the actual required processing time of the processing unit. In other words, the longer the actual required processing time of the processing unit, the later the notification time t2 will be.

Here, because the actual required processing time of processing unit SPIN2 is shorter than usual, it is assumed that the notification information is notified from processing unit SPIN2 before processing unit SPIN1. As described above, the scheduling function unit 25 updates the tentative timetable of processing unit SPIN2 that notified based on this notification information (and creates a tentative timetable for the next substrate W as necessary), and creates a take-out plan (and next input plan as necessary) for processing unit SPIN2 (step S2: take-out plan (and next input plan as necessary), steps S3 to S13). The scheduling function unit 25 completes the re-creation of the overall schedule before the estimated unit end time t3 (SPIN2) of processing unit SPIN2.

Figure 13 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 13, blocks for the take-out plan and the next put-in plan of processing unit SPIN1 have not yet been placed, and blocks for the take-out plan and the next put-in plan of processing unit SPIN2 have been newly placed. In the example of Figure 13, the newly placed blocks are also shown with diagonal hatching.

As processing in the substrate processing apparatus 100 progresses, notification information from processing unit SPIN1 is notified to the control unit 21. As described above, the scheduling function unit 25 updates the tentative timetable of the notifying processing unit SPIN1 based on this notification information (and creates a tentative timetable for the next substrate W as necessary), and creates an unloading plan (and next loading plan as necessary) for processing unit SPIN1 (step S2: Unloading plan (and next loading plan as necessary), steps S3 to S13). The scheduling function unit 25 completes re-creation of the overall schedule before the estimated unit end time t3 (SPIN1) of processing unit SPIN1.

Figure 14 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operation. In the example of Figure 14, blocks for the take-out plan of processing unit SPIN1 and the next take-in plan are newly placed. In the example of Figure 14, the newly placed blocks are also shown with diagonal hatching. In the example of Figure 14, the unit estimated end time t3 (SPIN1) of processing unit SPIN1 is later than the unit estimated end time t3 (SPIN2) of processing unit SPIN2. Therefore, a pair of blocks A6, A7 indicating the transport processing of the main transport robot CR for the substrate W in processing unit SPIN1 is placed immediately after the pair of blocks C6, C7 indicating the unloading processing of the main transport robot CR for the substrate W in processing unit SPIN2 so as not to interfere with the pair of blocks C6, C7. Similarly, a pair of blocks A8 and A9, which show the transport process of the indexer robot IR for substrates W from processing unit SPIN1, are also positioned immediately after a pair of blocks C8 and C9, which show the unloading process of the indexer robot IR for substrates W from processing unit SPIN2.

In addition, blocks B1 and B2 showing the transport process of the indexer robot IR for the substrate W to be next loaded into processing unit SPIN1 are also placed immediately after blocks D1 and D2 showing the transport process of the indexer robot IR for the substrate W to be next loaded into processing unit SPIN2, and blocks B3 and B4 showing the transport process of the main transport robot CR for the substrate W to be next loaded into processing unit SPIN1 are also placed immediately after blocks D3 and D4 showing the transport process of the main transport robot CR for the substrate W to be next loaded into processing unit SPIN2. Therefore, block B51 showing the start time of the next process of processing unit SPIN1 is placed after block D51 showing the start time of the next process of processing unit SPIN2. In other words, the start order of the processes of processing units SPIN1 and SPIN2 is reversed.

As the operation of the substrate processing apparatus 100 progresses further, the processing units SPIN3 and SPIN4 are also notified of notification information in sequence. Here, the actual required processing time of the processing unit SPIN4 is shorter than usual, and the processing unit SPIN4 notifies the notification information before the processing unit SPIN3. As described above, each time a notification is received, the scheduling function unit 25 creates a take-out plan and a next input plan for the processing unit that sent the notification, and recreates the overall schedule. Thereafter, the processing units SPIN1 to SPIN4 notify the control unit 21 of notification information in sequence, and the scheduling function unit 25 recreates the overall schedule each time. The scheduling function unit 25 completes the recreation of the overall schedule before the unit estimated end time t3 of the processing unit that sent the notification.

Figure 15 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 15, eight substrates W are processed by each of the processing units SPIN1 to SPIN4 performing two processes. However, in Figure 15, the start order of the second processes of the processing units SPIN1 and SPIN2 is opposite to the start order of the first processes, and the start order of the second processes of the processing units SPIN3 and SPIN4 is also opposite to the start order of the first processes.

As described above, even if the actual required processing time of processing units SPIN2 and SPIN4 becomes shorter than normal, the substrate processing apparatus 100 can continue to operate according to the overall schedule that reflects the shortened required processing time without interrupting operation.

In the example of FIG. 15, the substrate W is removed from processing unit SPIN2, which requires a shorter processing time, before the substrate W is removed from processing unit SPIN1, which requires a longer processing time. Similarly, the substrate W is removed from processing unit SPIN4 before the substrate W is removed from processing unit SPIN3. In other words, the processing unit requiring a shorter processing time is preferentially terminated, while the processing unit requiring a shorter processing time is preferentially started for the next processing. In this way, for example, when processing a larger number of substrates W, the processing unit requiring a shorter processing time can perform processing more times. Therefore, the overall throughput of the substrate processing apparatus 100 can be improved.

Next, a case will be described in which the actual required processing time of the processing units SPIN2 and SPIN4 is longer than usual. An example of the operation of the substrate processing apparatus 100 is the same as that shown in FIG. 5.

The overall schedule initially created before the start of operation of the substrate processing apparatus 100 is similar to that shown in FIG. 8, and the overall schedule recreated based on the notification information from processing unit SPIN1 is similar to that shown in FIG. 11. Here, it is assumed that the actual required processing time for processing unit SPIN2 is longer than usual, and therefore the notification information is notified from processing unit SPIN3 before processing unit SPIN2. As described above, the scheduling function unit 25 completes the recreation of the overall schedule based on the notification information before the unit estimated end time t3 (SPIN3) of processing unit SPIN3 that is the source of the notification.

Figure 16 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 16, blocks for the take-out plan and the next put-in plan of processing unit SPIN3 have been newly placed. In the example of Figure 16, the newly placed blocks are also shown with diagonal hatching. In the example of Figure 16, blocks for the take-out plan and the next put-in plan of processing unit SPIN2 have not yet been placed, and blocks for the take-out plan and the next put-in plan of each of processing units SPIN1 and SPIN3 have been placed.

As the operation of the substrate processing apparatus 100 progresses further, notification information is notified from processing unit SPIN2. As described above, the scheduling function unit 25 completes re-creation of the overall schedule based on the unit sensing information before the unit estimated end time t3 (SPIN2) of the processing unit SPIN2 that sent the notification.

Figure 17 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operation. In the example of Figure 17, blocks for the take-out plan of processing unit SPIN2 and the next input plan are newly placed. In the example of Figure 17, the newly placed blocks are also indicated by diagonal hatching. In the example of Figure 17, the unit estimated end time t3 (SPIN3) of processing unit SPIN3 is earlier than the unit estimated end time t3 (SPIN2) of processing unit SPIN2, and the unloading process of the substrate W from processing unit SPIN3 is performed before the unloading process of the substrate W from processing unit SPIN2. Therefore, the next process of processing unit SPIN3 also starts before the start of the next process of processing unit SPIN2. In other words, the start order of the processes of processing units SPIN2 and SPIN3 is reversed.

As the operation of the substrate processing apparatus 100 progresses further, notification information is also sent from processing unit SPIN4, and then notification information is sent sequentially from processing units SPIN1 to SPIN4. Each time notification is received, the scheduling function unit 25 recreates the overall schedule as described above.

Figure 18 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 18, eight substrates W are processed by each of the processing units SPIN1 to SPIN4 performing two processes. In the example of Figure 18, the start order of the second process of the processing units SPIN2 and SPIN3 is opposite to the start order of the first process.

As described above, even if the actual required processing time of processing units SPIN2 and SPIN4 becomes longer than normal, the substrate processing apparatus 100 can continue to operate according to the overall schedule that reflects the longer required processing time without interrupting operation.

In the example of FIG. 18, the substrate W is removed from the processing unit SPIN3, which requires a shorter processing time, before the substrate W is removed from the processing unit SPIN2, which requires a longer processing time. As a result, when a larger number of substrates W are to be processed, for example, the processing unit requiring a shorter processing time can perform processing more times. Therefore, the overall throughput of the substrate processing apparatus 100 can be improved.

As described above, according to the first embodiment, even if the required processing time of each processing unit SPIN1 to SPIN4 varies, the re-creation of the overall schedule that reflects the variation is completed before the processing of that processing unit is completed. Therefore, the operation of the substrate processing apparatus 100 can be continued according to the overall schedule that reflects the variation in the required processing time without interrupting the operation of the substrate processing apparatus 100.

Moreover, according to the first embodiment, before each of the processing units SPIN1 to SPIN4 starts processing, a take-out plan for that processing of that processing unit SPIN1 to SPIN4 is not created. In other words, before creating a take-out plan for each of the processing units SPIN1 to SPIN4, the processing execution instruction unit 26 causes the substrate processing apparatus 100 to execute operations according to the overall schedule. Then, based on the unit sensing information of the sensor SR detected during the execution of the processing of each of the processing units SPIN1 to SPIN4, the remaining processing time of each of the processing units SPIN1 to SPIN4 is estimated, and a take-out plan for each of the processing units SPIN1 to SPIN4 is created based on the estimated remaining time.

If a pay-out plan is created before the start of operation of the substrate processing apparatus 100, the pay-out plan may be modified according to the unit sensing information of the sensor SR. If the pay-out plan is modified, the modified portion of the pay-out plan created before the start of operation is wasted.

In contrast, in the first embodiment, the processing execution instruction unit 26 starts the operation of the substrate processing apparatus 100 before creating a delivery plan. This makes it possible to avoid creating such unnecessary delivery plans. This makes it possible to reduce the processing load on the scheduling function unit 25.

<Block Interference>
In the above-mentioned specific example, the scheduling function unit 25 recreated the overall schedule by arranging the blocks for the processing unit that sent the notification. In other words, the blocks for the processing unit that sent the notification were not rearranged for the other processing units that were already arranged in the overall schedule, and a block for the processing unit that sent the notification was newly arranged. However, there are cases where it is better to rearrange not only the processing unit that sent the notification, but also the blocks for the other processing units. This will be explained in detail below.

Figure 19 is a diagram that shows a schematic example of an overall schedule. The overall schedule shown in Figure 19 includes blocks of the initial input plan for processing units SPIN1 to SPIN4, and blocks of the withdrawal plan and next input plan for processing unit SPIN1. The example in Figure 19 also shows the notification time t2 (SPIN2) of processing unit SPIN2 and the unit estimated end time t3 (SPIN3) of processing unit SPIN2.

In the example of FIG. 19, the actual required processing time of processing unit SPIN2 is shorter than the actual required processing time of processing unit SPIN1, and the unit estimated end time t3 (SPIN2) is relatively close to the unit estimated end time t3 (SPIN1). In this case, if an attempt is made to place a block for unloading processing of substrates W from processing unit SPIN2 based on the unit estimated end time t3 (SPIN2), it will interfere with block A6, which has already been placed, on the time axis.

In this way, when a block for the processing unit SPIN2 that sent the notification interferes with a block for another processing unit SPIN1 on the time axis, the scheduling function unit 25 may compare the required processing time of the processing unit SPIN2 that sent the notification with the required processing time of the other processing unit SPIN1, and adjust the positions of the blocks of both processing units SPIN1 and SPIN2 so that the block for processing unit SPIN2, which has the shorter required processing time, is placed before the block for processing unit SPIN1, which has the longer required processing time, to recreate the overall schedule.

Figure 20 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 20, new blocks for the unloading plan and the next loading plan for processing units SPIN1 and SPIN2 are placed based on the unit sensing information from processing unit SPIN2. In the example of Figure 20, the placed blocks are also shown with diagonal hatching. In other words, the unloading plan and the next loading plan for processing unit SPIN1 are also re-created. In the example of Figure 20, the block indicating the unloading process of substrates W from processing unit SPIN2, which requires a short processing time, is placed before the block indicating the unloading process of substrates W from processing unit SPIN1, which requires a long processing time.

In addition, the block indicating the loading process of the next substrate W into processing unit SPIN2 is placed before the block indicating the loading process of the next substrate W into processing unit SPIN1, and the block indicating the start time of the next process in processing unit SPIN2 is placed before the block indicating the start time of the next process in processing unit SPIN1.

This allows the processing unit SPIN2, which requires a shorter processing time, to be given priority for processing the substrate W. This contributes to improving the overall processing throughput.

When recreating the overall schedule by newly arranging only the blocks for the processing unit that sent the notification, there is no need to compare the required processing time of the processing units. Therefore, in this case, the processing load on the scheduling function unit 25 can be reduced.

Figure 21 is a diagram showing a schematic example of an overall schedule when only the blocks for the notification source processing unit are placed. In the example of Figure 21, the newly placed blocks are also shown with diagonal hatching. In the example of Figure 21, the blocks for the processing unit SPIN1 that have already been placed are not changed, and the blocks for the notification source processing unit SPIN2 are placed after the blocks for the processing unit SPIN1.

Second Embodiment
The configuration of the substrate processing apparatus 100 according to the second embodiment is the same as that of the first embodiment. In the first embodiment, the processing execution instruction unit 26 starts the operation of the substrate processing apparatus 100 before creating the unloading plan of the processing units. However, this is not necessarily limited to this. In the second embodiment, the scheduling function unit 25 once creates an overall schedule including the input plan and unloading plan of the processing units before starting the operation of the substrate processing apparatus 100.

Figures 22 and 23 are flow charts showing an example of the operation of the substrate processing apparatus 100. Steps S21 to S32 are similar to steps S1 and S3 to S13, respectively. However, in steps S21 to S32, the planning scope is the overall schedule (Figure 4) including both the input plan and the output plan. That is, in step S22, the scheduling function unit 25 creates a tentative timetable including the input plan and the output plan. As a result, in step S32, the overall schedule shown in Figure 4, for example, is created.

When the overall schedule is created, the process execution instruction unit 26 causes the substrate processing apparatus 100 to perform operations according to the overall schedule (step S33). Next, the scheduling function unit 25 judges whether or not notification information has been notified from each of the processing units SPIN1 to SPIN4 (step S34). When it is judged that notification information has not been notified (step S34: NO), the scheduling function unit 25 executes step S34 again. When notification information has been notified (step S34: YES), the scheduling function unit 25 acquires the unit estimated end time t3 of the processing unit that notified based on the notification information (step S35). Next, the scheduling function unit 25 judges whether or not the time difference between the scheduled processing end time of the processing unit in the overall schedule and the unit estimated end time t3 is equal to or greater than a time difference reference value (step S36). The time difference reference value is, for example, set in advance.

When the time difference is equal to or greater than the time difference reference value (step S36: YES), the scheduling function unit 25 recreates the overall schedule (step S37). Specifically, the scheduling function unit 25 updates the length of the block of processing of the processing unit so that the end time of the processing unit becomes the unit estimated end time t3, for example, and then recreates the provisional timetable, and recreates the overall schedule based on the recreated provisional timetable. In other words, if it is determined that the time difference is equal to or greater than the time difference reference value, a provisional timetable update step is executed, and if it is determined that the time difference is smaller than the time difference reference value, a provisional timetable update step is not executed.

This re-creation of the overall schedule can also be performed, for example, according to the flowchart in FIG. 22. That is, the scheduling function unit 25 updates the length of the processing block of the processing unit so that the end time of the processing unit coincides with the unit estimated end time t3, for example, and then executes steps S22 to S31 in FIG. 22. However, in step S22, the scheduling function unit 25 adopts the required processing time estimated based on the unit sensing information as the required processing time of the processing unit, and updates the tentative time schedule.

Processing time information regarding the required processing time of each processing unit SPIN1 to SPIN4 is stored in the storage medium 23 as processing content data 40 (recipe). Therefore, the control unit 21 may store the required processing time of each processing unit SPIN1 to SPIN4 estimated based on the unit sensing information in the storage medium 23 as processing content data 40 (step S38: block update process). In other words, the processing content data 40 may be updated with the estimated required processing time. In this way, when starting substrate processing from the next time onwards, an overall schedule can be created using processing content data 40 that is more in line with reality.

When the time difference is less than the time difference reference value (step S36: NO), the scheduling function unit 25 does not recreate the overall schedule (step S37) or update the processing content data 40 (step S38). In this way, if the overall schedule is recreated only when the time difference is equal to or greater than the time difference reference value, unnecessary recreation of the overall schedule can be avoided.

Next, the control unit 21 determines whether processing has been completed for all substrates W (step S39). If processing has not been completed for all substrates W, the control unit 21 executes step S34 again. If processing has been completed for all substrates W (step S39: YES), the control unit 21 ends processing. For example, the control unit 21 sets the substrate processing start instruction flag to L and the schedule instruction flag to L. If processing has not yet been completed for the substrates W (step S39: NO), the scheduling function unit 25 executes step S34 again.

Third Embodiment
The configuration of the substrate processing apparatus 100 according to the third embodiment is the same as that of the first embodiment. However, in the third embodiment, the substrate W is successively processed by two or more of the processing units SPIN1 to SPIN12. For example, after the substrate W is processed in the processing unit SPIN1, it is transported from the processing unit SPIN1 to the processing unit SPIN3 and is processed in the processing unit SPIN3. Such successive processing of the substrate W by two or more processing units is also referred to as transfer processing hereinafter.

The processing procedure for the substrate W is specified by a recipe in the processing content data 40, so the processing content data 40 may include transfer processing. In the third embodiment, a case where the processing content data 40 includes transfer processing will be described.

For simplicity, the following description will be given using four processing units SPIN1 to SPIN4. Here, processing units SPIN1 and SPIN2 perform a first processing on the substrate W, and processing units SPIN3 and SPIN4 perform a second processing on the substrate W that is different from the first processing. For example, the first processing and second processing have different processing conditions, such as the concentration of the processing liquid and the type of processing liquid supplied to the substrate W. Each substrate W is transported from a processing unit that performs the first processing to a processing unit that performs the second processing. As a result, the substrate W is successively subjected to the first processing and the second processing by each processing unit.

Figure 24 is a diagram showing a schematic example of an overall schedule created by the scheduling function unit 25. In the example of Figure 24, the overall schedule is also represented diagrammatically by blocks and arrows. For ease of explanation, the following describes the processing of four substrates W (substrates W1 to W4). In reality, more substrates W are processed.

The overall schedule will now be described, focusing on substrate W1 as a representative example. In the example of Figure 24, the block corresponding to substrate W1 is indicated by a thick line. According to Figure 24, unprocessed substrate W1 is removed from the substrate container C by the indexer robot IR (block D1) and transferred to the transfer unit PASS (block D2). This substrate W1 is then removed from the transfer unit PASS by the main transport robot CR (block D3) and transferred to the processing unit SPIN1 (block D4). The first processing is performed on substrate W1 by the processing unit SPIN1 (block D5).

After processing in processing unit SPIN1 is completed, the substrate W1 is removed from processing unit SPIN1 by the main transport robot CR (block D6) and transferred to another processing unit SPIN3 (block D7). The substrate W1 is subjected to a second process by processing unit SPIN3 (block D8). The content of the second process in processing unit SPIN3 differs from the content of the first process in processing unit SPIN1.

After processing in the processing unit SPIN3 is completed, the processed substrate W1 is removed from the processing unit SPIN3 by the main transport robot CR (block D9) and transferred to the transfer unit PASS (block D10). The processed substrate W1 is then removed from the transfer unit PASS by the indexer robot IR (block D11) and transferred to the substrate container C (block D12).

The scheduling function unit 25 of the control unit 21 creates an overall schedule as exemplified in FIG. 24, and the processing execution instruction unit 26 controls each part of the substrate processing apparatus 100 in accordance with this overall schedule. As a result, the substrate W1 is processed continuously in this order by the processing units SPIN1 and SPIN3, the substrate W2 is processed continuously in this order by the processing units SPIN2 and SPIN4, the substrate W3 is processed continuously in this order by the processing units SPIN1 and SPIN3, and the substrate W4 is processed continuously in this order by the processing units SPIN2 and SPIN4.

In this way, in the third embodiment, each substrate W is transported between multiple processing units and successively subjected to different processing.

In the third embodiment, this overall schedule is divided into an input plan, a transfer plan, and an unloading plan for consideration. The transfer plan is a plan regarding the transport of substrates W between processing units. More specifically, the transfer plan is a plan that specifies the end of processing in the source processing unit, the time period during which substrates W are transported from the source processing unit to the destination processing unit, and the start of processing in the next destination processing unit.

Figure 25 is a flow chart showing an example of a specific operation of the substrate processing apparatus 100 (schedule creation device). This series of processes is executed repeatedly. In the flow of Figure 25, step S2A is executed instead of step S2, as compared to the flow of Figure 5.

Referring to FIG. 25, first, the scheduling function unit 25 determines whether or not a substrate processing start instruction has been issued, as in the first embodiment (step S1). For example, the start instruction is input to the input/output unit 22 from a host computer or a user. In response to the input, the control unit 21 transitions the start instruction flag from L to H, for example.

When there is no instruction to start substrate processing, that is, when the start instruction flag is L, the scheduling function unit 25 executes step S1 again. When there is an instruction to start substrate processing, the scheduling function unit 25 determines the planning range (step S2A). The scheduling function unit 25 determines the planning range to be created by selecting from among the input plan, transfer plan, and withdrawal plan. In other words, the scheduling function unit 25 determines whether to create an input plan, a transfer plan, or a withdrawal plan of the overall schedule. Initially, the scheduling function unit 25 determines the input plan as the planning range.

For example, in the first step S2A, the scheduling function unit 25 determines the planning range to be created as an input plan, similar to the first embodiment. The scheduling function unit 25 executes steps S3 to S13, similar to the first embodiment.

The processing content data 40, which specifies the processing procedure for the substrate, includes a continuous transfer process of the first and second processes for the substrate W. Therefore, the processing unit to which the substrate W is first transported is either processing unit SPIN1 or SPIN2. Therefore, in step S3, the scheduling function unit 25 creates two provisional timetables corresponding to two routes that pass through either processing unit SPIN1 or processing unit SPIN2.

Then, in response to the scheduling instruction, the scheduling function unit 25 arranges blocks of preparatory processes as necessary (steps S4 to S7) and creates a plan for each tentative timetable by sequentially arranging unarranged blocks of the tentative timetable (steps S8 to S12). Next, the scheduling function unit 25 makes a decision to select one of the plans that has already been created as the overall schedule (step S13).

Figure 26 is a diagram showing an example of an overall schedule initially created by the above-mentioned operations. In the example of Figure 26, the loading plan for substrate W1 includes blocks for the main transport robot CR and indexer robot IR related to the transport process for substrate W1 from the substrate container C to the processing unit SPIN1, and a block specifying the start time of the processing in the processing unit SPIN1. The loading plan for substrate W2 includes blocks for the main transport robot CR and indexer robot IR related to the transport process for substrate W2 from the substrate container C to the processing unit SPIN3, and a block specifying the start time of the processing in the processing unit SPIN2. As shown in Figure 26, at this point, the overall schedule only includes loading plans for the first two substrates W1 and W2.

In this loading plan, substrates W1 and W2 are loaded sequentially into each of the processing units SPIN1 and SPIN2, respectively. Processing unit SPIN1 performs a first process on substrate W1, and processing unit SPIN2 performs a first process on substrate W2. Since it is not desirable to transport a new substrate W while a substrate W is being processed, the scheduling function unit 25 does not create a plan to load a new substrate W into processing unit SPIN1 unless the first process on substrate W1 is completed and substrate W1 is unloaded from processing unit SPIN1. The same applies to processing unit SPIN2.

The process execution instruction unit 26 of the control unit 21 causes the substrate processing apparatus 100 to perform operations according to the overall schedule in FIG. 26. Thus, the processing units SPIN1 and SPIN2 start processing the substrate W according to the overall schedule in FIG. 26. In other words, the process execution instruction unit 26 causes the substrate processing apparatus 100 to perform operations according to the overall schedule before creating the transfer plan and removal plan described below.

When each processing unit SPIN1, SPIN2 starts processing, during that processing, each sensor SR detects unit sensing information (detection step) and notifies the control unit 21 of notification information in response to that detection. Again, the control units of each processing unit SPIN1, SPIN2 notify the control unit 21 of notification information when the estimated remaining processing time approaches the required creation time Tref required to re-create the overall schedule. Here, it is first assumed that processing unit SPIN1, which is processing substrate W1, notifies notification information at notification time t12 (SPIN1) (see also FIG. 27).

In response to this notification information, the scheduling function unit 25 of the control unit 21 creates either a transfer plan or a withdrawal plan for the processing unit that sent the notification, and, if necessary, the next input plan. This creation can also be done according to the flowchart in Figure 25.

First, in response to the notification of the notification information, the scheduling function unit 25 determines the next planned range to be created (step S2A). Specifically, the scheduling function unit 25 checks the processing content data 40 and determines whether the processing on the substrate W being performed by the processing unit that sent the notification is the final processing in the processing procedure. In this case, the processing content data 40 specifies a transfer processing in which the first processing and the second processing are performed in this order, so the final processing in the processing procedure is the second processing.

Since the first process by the processing unit SPIN1 that sent the notification is not the last process in the processing procedure, the scheduling function unit 25 determines the next planning range to be the transfer plan for the substrate W1 being processed by the processing unit SPIN1.

In addition, since unprocessed substrates W3 and W4 are present in substrate container C, the scheduling function unit 25 determines not only the transfer plan for substrate W1 but also the input plan for substrate W3 in the planning range.

Next, the scheduling function unit 25 updates the provisional timetable based on the notification information and the processing content data 40 (step S3). Specifically, the scheduling function unit 25 first arranges a block that specifies the end time of the processing of the notification source processing unit SPIN1 based on the notification information (estimated remaining time) as in the first embodiment. Then, the scheduling function unit 25 creates a provisional timetable that specifies the transport to the next candidate destination processing unit for each candidate destination. Here, a provisional timetable that specifies the transport from processing unit SPIN1 to processing unit SPIN3 and a provisional timetable that specifies the transport from processing unit SPIN1 to processing unit SPIN4 are created.

In step S4, since the scheduling instruction flag is H, a positive judgment (YES judgment) is made, and in step S5, a negative judgment (NO judgment) is made.

Next, the scheduling function unit 25 refers to the provisional timetable for the processing unit SPIN1 that sent the notification, acquires one unplaced block that constitutes the provisional timetable (step S8), searches for a position where the acquired block can be placed (step S9), and places the block in the searched position (step S10).

Then, the scheduling function unit 25 repeats the processes of steps S8 to S10 for all unplaced blocks in the tentative timetable (step S11). This creates a plan using one tentative timetable. For example, a plan is created that includes a transfer plan for transporting substrate W1 from processing unit SPIN1 to processing unit SPIN3.

Next, the scheduling function unit 25 executes the processes of steps S8 to S12 for all tentative timetables. As a result, plans corresponding to all tentative timetables are created. Here, a plan is also created that includes a transfer plan for transporting substrate W1 from processing unit SPIN1 to processing unit SPIN4.

Next, the scheduling function unit 25 makes a determination as to whether to select one of the plans that has already been created as the overall schedule (step S13). Here, the scheduling function unit 25 selects the plan for transporting to the processing unit SPIN3 with the smallest identification number as the overall schedule.

Figure 27 is a schematic diagram showing an example of an overall schedule created by the above-mentioned operations. In the example of Figure 27, a block indicating the end time of processing of substrate W1 in processing unit SPIN1, a block of the main transport robot CR for transport processing of substrate W1 from processing unit SPIN1 to processing unit SPIN3, and a block indicating the start time of processing in processing unit SPIN3 are newly placed as a transfer plan for substrate W1. In the example of Figure 27, the newly placed blocks are also shown with diagonal hatching.

Since a block indicating the end time of processing of processing unit SPIN1 is placed, the scheduling function unit 25 also creates a plan for inputting substrate W3 into processing unit SPIN1, similar to the first embodiment.

Figure 28 is a schematic diagram showing an example of an overall schedule. In the example of Figure 28, as a loading plan for substrate W3, a block of the indexer robot IR and the main transport robot CR for the transport process of substrate W3 from the substrate container C to the processing unit SPIN1, as well as a block indicating the start time of the next process of processing unit SPIN1 have been newly placed. In the example of Figure 28, the newly placed blocks are also indicated by diagonal hatching.

As the operation of the substrate processing apparatus 100 progresses further, notification information from processing unit SPIN2 is notified to the control unit 21 at notification time t12 (SPIN2) (see also FIG. 29). In response to this notification information, the scheduling function unit 25 determines the planning scope to be a transfer plan for substrate W2 based on the processing content data 40 (step S2A), and executes steps S3 to S13 to create a transfer plan for substrate W2. The scheduling function unit 25 also creates an input plan for the next substrate W4, and recreates the overall schedule.

Figures 29 and 30 are schematic diagrams showing an example of an overall schedule created by the above-mentioned operations. In the example of Figure 29, a transfer plan for substrate W2 has been newly created. Specifically, the transfer plan for substrate W2 includes a block indicating the end time of processing in processing unit SPIN2, a block for the main transport robot CR related to the transport processing of substrate W2 from processing unit SPIN2 to processing unit SPIN4, and a block indicating the start time of processing in processing unit SPIN4. In the example of Figure 29, the newly placed blocks are also indicated by diagonal hatching.

In the example of FIG. 30, a new loading plan for substrate W4 into processing unit SPIN2 has been created. Specifically, the loading plan for substrate W4 includes a block for the indexer robot IR and the main transport robot CR related to the transport process for substrate W4 from the substrate container C to processing unit SPIN2, as well as a block indicating the start time of the next process in processing unit SPIN2. In the example of FIG. 30, the newly placed block is also shown with diagonal hatching. Note that in the example of FIG. 30, in order to illustrate the notification time t1 (SPIN1), a dashed block is shown following the block that specifies the start time of the process in processing unit SPIN1.

As the operation of the substrate processing apparatus 100 progresses further, at notification time t14 (SPIN1), notification information from processing unit SPIN1 is notified to the control unit 21. In response to this notification information, the scheduling function unit 25 determines the planning scope to be the transfer plan for substrate W3 based on the processing content data 40 (step S2A), and executes steps S3 to S13 to create a transfer plan for substrate W3.

However, as can be seen from FIG. 30, at notification time t14 (SPIN1), the latest block corresponding to processing units SPIN3 and SPIN4 is a block that specifies the start time of processing, not a block that specifies the end time of processing. In other words, at notification time t14 (SPIN1), the end times of processing for processing units SPIN3 and SPIN4, which are the next transport destination candidates, have not yet been determined. In short, at notification time t14 (SPIN1), the transport of substrates W1 and W2 from processing units SPIN3 and SPIN4 has not yet been planned. Therefore, the scheduling function unit 25 cannot determine the processing unit to which substrate W3 is to be transported. In other words, the scheduling function unit 25 cannot create a transfer plan for substrate W3.

Therefore, when the scheduling function unit 25 receives notification information from the processing unit SPIN1, if all of the destination candidate processing units SPIN3 and SPIN4 are processing the substrate W and transport from the destination candidate processing units SPIN3 and SPIN4 has not yet been planned, the scheduling function unit 25 suspends the creation of the transfer plan for substrate W3. In other words, when the estimated unit end time of the processing unit SPIN1 is obtained, if all of the destination candidate processing units are processing the substrate W and transport from all of the destination candidate processing units has not yet been planned, the transfer plan for substrate W3 is suspended. For example, when the scheduling function unit 25 is unable to create a transfer plan for substrate W3 by steps S2A to S12, it may set an interruption flag for the transfer plan for substrate W3. This interruption flag is lowered when the transfer plan is created.

When the operation of the substrate processing apparatus 100 further progresses, at notification time t12 (SPIN3), notification information from the processing unit SPIN3 is notified to the control unit 21 (see also FIG. 31). In response to this notification information, the scheduling function unit 25 determines the plan range to be a take-out plan for the substrate W1 based on the processing content data 40 (step S2A). Specifically, the scheduling function unit 25 determines, based on the processing content data 40, that the second process in the processing unit SPIN3 that sent the notification is the last process in the processing procedure. In response to this determination, the scheduling function unit 25 determines the plan range to be a take-out plan for the substrate W1 being processed by the processing unit SPIN3 that sent the notification. Then, the scheduling function unit 25 executes steps S3 to S13 in the same manner as in the first embodiment to create a take-out plan for the substrate W1 from the processing unit SPIN3.

This unloading plan determines the end time of processing at processing unit SPIN3, which is one of the next candidate destinations for substrate W3, so the scheduling function unit 25 resumes creating a transfer plan for substrate W3. In short, the scheduling function unit 25 creates a transfer plan for substrate W3 after the transport of substrate W from the next candidate destination is planned. More specifically, when the interruption flag for substrate W3 is set and the removal of substrate W from the candidate destination processing unit is planned, the scheduling function unit 25 re-determines the plan scope to be the transfer plan for substrate W3 (step S2A). Then, the scheduling function unit 25 executes steps S3 to S13 to create a transfer plan for substrate W3.

Figure 31 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operation. In the example of Figure 31, a block indicating the end time of processing in processing unit SPIN3, and a block of the main transport robot CR and the indexer robot IR related to the transport processing of substrate W1 from processing unit SPIN3 to the substrate container C are newly placed as the removal plan for substrate W1. Also, in the example of Figure 31, a block indicating the end time of processing in processing unit SPIN1, a block of the main transport robot CR related to the transport processing of substrate W3 from processing unit SPIN1 to processing unit SPIN3, and a block indicating the start time of processing in processing unit SPIN3 are newly placed as the transfer plan for substrate W3. In the example of Figure 31, the newly placed blocks are also shown with diagonal hatching.

As described above, the scheduling function unit 25 can create a more appropriate transfer plan by creating a removal plan from the potential transport destination (here, processing unit SPIN3) and then creating a transfer plan for substrate W3.

As the operation of the substrate processing apparatus 100 progresses further, at notification time t14 (SPIN2), notification information from processing unit SPIN2 is notified to the control unit 21 (see also FIG. 32), and then, at notification time t12 (SPIN4), notification information from processing unit SPIN4 is notified to the control unit 21.

In response to notification of the notification information from processing unit SPIN2, the scheduling function unit 25 executes steps S2A to S13 to create a transfer plan for substrate W4. However, at notification time t14 (SPIN2), the transport of substrate W from processing units SPIN3 and SPIN4, which are the next potential destinations for substrate W4, has not yet been planned, so the creation of the transfer plan is interrupted.

Next, in response to notification of notification information from processing unit SPIN4, the scheduling function unit 25 executes steps S2A to S13 to create a pick-up plan for substrate W2. When the creation of this pick-up plan is completed, the scheduling function unit 25 re-determines the plan scope to be the transfer plan for substrate W4 (step S2A), and executes steps S3 to S13 to create a transfer plan for substrate W4.

Figure 32 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operation. In the example of Figure 32, a block indicating the end time of processing in processing unit SPIN4, and a block of the main transport robot CR and the indexer robot IR related to the transport processing of substrate W2 from processing unit SPIN4 to the substrate container C are newly placed as the removal plan for substrate W2. In addition, in the example of Figure 32, a block indicating the end time of processing in processing unit SPIN2, a block of the main transport robot CR related to the transport processing of substrate W4 from processing unit SPIN2 to processing unit SPIN4, and a block indicating the start time of the next processing in processing unit SPIN4 are newly placed as the transfer plan for substrate W4. In the example of Figure 32, the newly placed blocks are also shown with diagonal hatching.

As the operation of the substrate processing apparatus 100 progresses further, at notification time t14 (SPIN3), notification information from processing unit SPIN3 is notified to the control unit 21 (see also FIG. 33). In response to this notification information, the scheduling function unit 25 executes steps S2A to S13 to create a removal plan for substrate W3.

As the operation of the substrate processing apparatus 100 progresses further, at notification time t14 (SPIN4), notification information from processing unit SPIN4 is notified to the control unit 21 (see also FIG. 33). In response to this notification information, the scheduling function unit 25 executes steps S2A to S13 to create a removal plan for substrate W4.

Figure 33 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 33, a block that specifies the end time of processing in processing unit SPIN3, and a block of the main transport robot CR and indexer robot IR related to the transport processing of substrate W3 from processing unit SPIN3 to substrate container C are newly placed as an unloading plan for substrate W3. Also, in the example of Figure 33, a block that specifies the end time of processing in processing unit SPIN4, and a block of the main transport robot CR and indexer robot IR related to the transport processing of substrate W4 from processing unit SPIN4 to substrate container C are newly placed as an unloading plan for substrate W4. In the example of Figure 33, the newly placed blocks are also shown with diagonal hatching.

As described above, in the third embodiment, new plans are sequentially incorporated into the overall schedule in parallel with the operation of the substrate processing apparatus 100.

In the above example, the required processing time of the processing units SPIN1 to SPIN4 is approximately equal to the normal required processing time. Next, an example will be described in which the required processing time of the processing units SPIN1 to SPIN4 varies. Here, a case will be described in which the required processing time of the processing units SPIN2 and SPIN4 is shorter than normal. An example of the operation of the substrate processing apparatus 100 is the same as that shown in FIG. 25.

First, as described above, the scheduling function unit 25 creates an initial loading plan for each processing unit SPIN1, SPIN2 as part of the overall schedule before starting operation of the substrate processing apparatus 100 (step S2A: loading plan, steps S3 to S13). This creates the overall schedule shown in FIG. 26.

The control unit of each processing unit SPIN1 to SPIN4 notifies the control unit 21 of notification information when the estimated remaining processing time approaches the required creation time Tref required to recreate the overall schedule. Therefore, the notification time will be earlier the shorter the actual required processing time of the processing unit. In other words, the longer the actual required processing time of the processing unit, the later the notification time will be.

Here, because the actual required processing time of processing unit SPIN2 is shorter than usual, it is assumed that processing unit SPIN2 notifies the notification information before processing unit SPIN1. Specifically, processing unit SPIN2 notifies the control unit 21 of the notification information at notification time t12 (SPIN2) (see also FIG. 34). In response to this notification information, the scheduling function unit 25 executes steps S2A to S13 to create a transfer plan for substrate W2. The scheduling function unit 25 also creates a loading plan for the next substrate W3.

Figure 34 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 34, notification information has not yet been notified from processing unit SPIN1, so the transfer plan block for substrate W1 and the next input plan block for processing unit SPIN1 have not yet been placed. Meanwhile, in response to notification of notification information from processing unit SPIN2, the transfer plan block for substrate W2 and the next input plan block for processing unit SPIN2 have been newly placed. In the example of Figure 34, the newly placed blocks are also shown with diagonal hatching.

More specifically, in the example of FIG. 34, the transfer plan for substrate W2 includes a block indicating the end time of processing in processing unit SPIN2, a block for the main transport robot CR related to the transport processing of substrate W2 from processing unit SPIN2 to processing unit SPIN3, and a block indicating the start time of processing in processing unit SPIN3. Here, since processing unit SPIN2 finishes processing before processing unit SPIN1, a transfer plan is created in which substrate W2 is transported to processing unit SPIN3 instead of substrate W1.

In the example of Figure 34, the loading plan for substrate W3 includes new blocks for the indexer robot IR and main transport robot CR related to the transport process of substrate W3 from substrate container C to processing unit SPIN2, as well as a block indicating the start time of the next process of processing unit SPIN2. Here, since processing unit SPIN2 finishes processing before processing unit SPIN1, a loading plan is created in which substrate W3 is transported to processing unit SPIN2.

As the operation of the substrate processing apparatus 100 progresses further, notification information from processing unit SPIN1 is notified to the control unit 21 at notification time t12 (SPIN1) (see also FIG. 35). In response to this notification information, the scheduling function unit 25 executes steps S2A to S13 to create a transfer plan for substrate W1. The scheduling function unit 25 also creates a loading plan for the next substrate W4.

Figure 35 is a schematic diagram showing an example of an overall schedule created by the above-mentioned operations. In the example of Figure 35, a block specifying the end time of processing in processing unit SPIN1, a block of the main transport robot CR related to the transport processing of substrate W1 from processing unit SPIN1 to processing unit SPIN4, and a block specifying the start time of processing in processing unit SPIN4 are newly placed as a transfer plan for substrate W1. Here, since processing unit SPIN1 finishes processing after processing unit SPIN2, a transfer plan is created in which substrate W1 is transported to processing unit SPIN4. In the example of Figure 35, the newly placed blocks are also indicated by diagonal hatching.

In the example of Figure 35, a loading plan for substrate W4 is newly placed, which includes a block for the indexer robot IR and the main transport robot CR for transporting substrate W4 from the substrate container C to processing unit SPIN1, as well as a block that specifies the start time of processing in processing unit SPIN1. Here, since processing unit SPIN1 finishes processing after processing unit SPIN2, a loading plan is created in which substrate W4 is transported to processing unit SPIN1.

As the operation of the substrate processing apparatus 100 progresses further, notification information from processing unit SPIN2 is notified to the control unit 21 at notification time t14 (SPIN2) (see also FIG. 36). In response to this notification information, the scheduling function unit 25 attempts to create a transfer plan for substrate W3 based on the processing content data 40. However, at this notification time t14 (SPIN2), as illustrated in FIG. 36, the transport of substrate W from processing units SPIN3 and SPIN4, which are potential next transport destinations for substrate W3, has not yet been planned. In other words, the end times of processing at processing units SPIN3 and SPIN4 have not yet been determined. Therefore, the scheduling function unit 25 suspends the creation of the transfer plan for substrate W3.

As the operation of the substrate processing apparatus 100 progresses further, notification information from processing unit SPIN4 is notified to the control unit 21 at notification time t12 (SPIN4) (see also FIG. 37). In response to this notification information, the scheduling function unit 25 executes steps S2A to S13 to create a removal plan for substrate W1. Here, since processing unit SPIN4 finishes processing before processing unit SPIN3, a removal plan for substrate W1 from processing unit SPIN4 is created first.

This removal plan plans the transport of substrate W1 from processing unit SPIN4, which is one of the next possible transport destinations for substrate W3, so the scheduling function unit 25 resumes creating a transfer plan for substrate W3. The scheduling function unit 25 executes steps S2A to S13 to create a transfer plan for substrate W3.

Figure 37 is a diagram showing a schematic example of an overall schedule created by the above-mentioned operations. In the example of Figure 37, a block indicating the end time of processing in processing unit SPIN4, and blocks for the main transport robot CR and indexer robot IR related to the transport processing of substrate W1 from processing unit SPIN4 to the substrate container C are newly placed as the removal plan for substrate W1. Also, in the example of Figure 37, a block indicating the end time of processing in processing unit SPIN2, a block indicating the main transport robot CR related to the transport processing of substrate W3 from processing unit SPIN2 to processing unit SPIN4, and a block indicating the start time of the next processing in processing unit SPIN4 are newly placed as the transfer plan for substrate W3.

In the example of FIG. 37, the notification time t12 (SPIN4) is later than the unit estimated end time t13 (SPIN2) of processing unit SPIN2 for substrate W3. Therefore, a transfer plan is created so that substrate W3 waits in processing unit SPIN2 until substrate W1 is transported from processing unit SPIN4 and permitted to be loaded into processing unit SPIN4.

As the operation of the substrate processing apparatus 100 progresses further, at notification time t12 (SPIN3), notification information from processing unit SPIN3 is notified to the control unit 21 (see also FIG. 38). In response to this notification information, the scheduling function unit 25 executes steps S2A to S13 to create a removal plan for substrate W2.

As the operation of the substrate processing apparatus 100 progresses further, at notification time t14 (SPIN1), notification information from the processing unit SPIN1 is notified to the control unit 21. In response to this notification information, the scheduling function unit 25 executes steps S2A to S13 to create a transfer plan for substrate W4.

Figure 38 is a diagram showing an example of an overall schedule created by the above-mentioned operations. In the example of Figure 38, a block specifying the end time of processing in processing unit SPIN3, and a block of the main transport robot CR and indexer robot IR related to the transport processing of substrate W2 from processing unit SPIN3 to substrate container C are newly placed as an unloading plan for substrate W2. In the example of Figure 38, the newly placed blocks are also indicated by diagonal hatching.

Here, at notification time t14 (SPIN1), the end time of processing of processing unit SPIN4, which is one of the candidate transport destinations for substrate W4, has already been determined. Therefore, in response to notification of notification information from processing unit SPIN1 at notification time t14 (SPIN1), the scheduling function unit 25 executes steps S2A to S13 to create a transfer plan for substrate W4.

In the example of Figure 38, the transfer plan for substrate W4 includes a block that specifies the end time of processing in processing unit SPIN1, a block for the main transport robot CR related to the transport processing of substrate W4 from processing unit SPIN1 to processing unit SPIN3, and a block that specifies the start time of processing in processing unit SPIN3.

As the operation of the substrate processing apparatus 100 progresses further, notification information from processing unit SPIN3 and processing unit SPIN1 is notified to the control unit 21 in that order. Figure 39 is a diagram that shows a schematic example of an overall schedule created in response to this notification information.

The scheduling function unit 25 first executes steps S2A to S13 in response to notification of notification information from processing unit SPIN4 at notification time t14 (SPIN4) to create an unloading plan for substrate W3. Here, since processing unit SPIN4 finishes processing before processing unit SPIN3, an unloading plan for substrate W3 from processing unit SPIN4 is created first. In the example of Figure 39, a block that specifies the end time of processing in processing unit SPIN4, and blocks for the main transport robot CR and indexer robot IR related to the transport process of substrate W3 from processing unit SPIN4 to the substrate container C are newly placed as the unloading plan for substrate W3. In the example of Figure 39, the newly placed blocks are also indicated by diagonal hatching.

The scheduling function unit 25 also executes steps S2A to S13 in response to notification of notification information from the processing unit SPIN3 at notification time t14 (SPIN3) to create an unloading plan for substrate W4. In the example of FIG. 39, a block that specifies the end time of processing by the processing unit SPIN3, and blocks for the main transport robot CR and indexer robot IR related to the transport process of substrate W4 from the processing unit SPIN3 to the substrate container C are newly placed as the unloading plan for substrate W4.

As described above, even if the actual required processing time of processing units SPIN2 and SPIN4 becomes shorter than normal, the substrate processing apparatus 100 can continue to operate according to the overall schedule that reflects the shortened required processing time without interrupting operation.

In other words, according to the third embodiment, even if the required processing time of each processing unit SPIN1 to SPIN4 changes, it is possible to recreate the overall schedule to reflect the change.

Moreover, according to the third embodiment, a transfer plan and a removal plan for each substrate W are not created before the start of processing in each processing unit SPIN1 to SPIN4. In other words, before creating a transfer plan and a removal plan for each substrate, the processing execution instruction unit 26 causes the substrate processing apparatus 100 to execute operations according to the overall schedule. Then, based on the unit sensing information of the sensor SR detected during processing in each processing unit SPIN1 to SPIN4, the remaining processing time for each processing unit SPIN1 to SPIN4 is estimated, and a transfer plan and a removal plan for each substrate W are created based on the estimated remaining time.

If a transfer plan and a pay-out plan are created before the start of operation of the substrate processing apparatus 100, the transfer plan and the pay-out plan may be modified according to the unit sensing information of the sensor SR. If the transfer plan and the pay-out plan are modified, the modified parts of the transfer plan and the pay-out plan created before the start of operation are wasted.

In contrast, in the third embodiment, the processing execution instruction unit 26 starts the operation of the substrate processing apparatus 100 before creating the transfer plan and the delivery plan. This makes it possible to avoid creating such unnecessary transfer plans and delivery plans. This makes it possible to suppress unnecessary operations of the scheduling function unit 25 and reduce the processing load.

In the third embodiment, as in the first embodiment, the scheduling function unit 25 may not only newly place blocks related to the processing unit that sent the notification, but may also rearrange blocks of other processing units as necessary.

Also, in the third embodiment, as in the second embodiment, the scheduling function unit 25 may first create an overall schedule including an input plan, a transfer plan, and a withdrawal plan, and then recreate the overall schedule as necessary.

The above describes the embodiment, but various modifications to this substrate processing apparatus 100 other than those described above can be made without departing from the spirit of the invention. This embodiment allows for free combinations of the various embodiments, modifications to any of the components of each embodiment, or the omission of any of the components of each embodiment, within the scope of the disclosure.

The program may be provided in a state where it is incorporated into the computer 20, or may be provided in a state where it is recorded on a storage medium (such as a computer-readable storage medium, such as a CD-ROM or DVD-ROM) separate from the computer 20.

In addition, various design changes may be made within the scope of the claims.

For example, one of the units belonging to the substrate processing apparatus 100 is a unit that controls the atmosphere within the unit. For example, the atmosphere within the unit may contain gas that is undesirable for leaking to the outside air. In this case, the gas must be sufficiently exhausted to a designated exhaust section before the substrate W is removed from the unit. In this case, the sensor SR may detect the concentration of the gas within the unit as unit sensing information.

Alternatively, processing of the substrate W may be performed with the air pressure inside the unit sufficiently reduced. In this case, after processing is completed, the air pressure is returned to atmospheric pressure and the substrate W is then discharged. In this case, the sensor SR may detect the air pressure inside the unit as unit sensing information.

In addition, a port (unit) for adjusting air pressure may be placed adjacent to the processing unit for transporting the substrate W into a chamber with a lower air pressure. Although no processing is performed on the substrate W at this port, the air pressure within the port may be sufficiently lowered, a shutter separating the port from the processing unit may be opened, and the substrate W may be transported from the port to the processing unit. In this case, the substrate W processed in the processing unit is transported to the low-pressure port, the shutter is closed, and the air pressure within the port is restored before the substrate W is discharged from the port. In this case, a sensor SR may be provided within the port. The sensor SR may detect the air pressure within the port as unit sensing information.

There are also processing units that adjust the temperature of the substrate W. For example, after the temperature of the substrate W is increased and processing is performed, the temperature of the substrate W may be decreased before the substrate W is removed from the processing unit. In this case, the sensor SR may detect the temperature of the substrate W as the unit sensing information. Alternatively, the sensor SR may detect the temperature inside the processing unit (the temperature of the processing chamber).

In the above example, the notification time t2 was set at least the required creation time Tref before the unit estimated end time t3. However, this is not necessarily limited to this. If a take-out plan cannot be created for the processing unit that sent the notification before the processing of that processing unit ends, the substrate W may be made to wait in that processing unit until the creation of the take-out plan is completed.

In the above example, the sensor SR was provided in all of the processing units SPIN1 to SPIN12. However, it is sufficient that the sensor SR is provided in at least one of the processing units SPIN1 to SPIN12. The dispensing plan for a processing unit that is not provided with a sensor SR may be created based on the predetermined required processing time of that processing unit.

21 Control unit C Substrate container CR Unit (main transport robot)
IR unit (indexer robot)
SPIN1 to SPIN4 Processing unit SR Sensor W Board

Claims (9)

1. A schedule creation method for creating a schedule that chronologically defines operations of a substrate processing apparatus having a plurality of units, including a plurality of processing units that perform processing on a substrate, the method comprising:
creating a provisional timetable by virtually arranging blocks indicating the contents of processing and the time required for the processing in a chronological order;
a scheduling step of acquiring the blocks from the provisional timetable, virtually arranging the blocks in chronological order, and creating an overall schedule for the plurality of units;
a detection step of detecting first unit sensing information by a first sensor in a first unit included in the plurality of units;
an estimation step of estimating a processing end time of the first unit based on relationship information indicating a relationship between a processing progress status in the first unit and the first unit sensing information, and obtaining a first unit estimated end time;
a provisional timetable updating step of updating the contents of the block corresponding to the first unit in the provisional timetable to reflect the estimated end time of the first unit;
and an overall schedule updating step of recreating the overall schedule based on the updated tentative timetable,
The schedule creating method, wherein the tentative timetable updating step and the overall schedule updating step are completed by the first unit estimated end time. 2. The schedule creation method according to claim 1,
In the scheduling step, an input plan is created as the overall schedule, the input plan defining the start times of substrate loading and processing for the plurality of units;
causing the substrate processing apparatus to perform operations according to the overall schedule before creating an unloading plan that defines an end time of processing and an unloading of the substrate for at least the first unit;
A schedule creation method, in which in the overall schedule updating step, the payment plan for the first unit is created based on the estimated end time of the first unit, and the overall schedule is recreated. The schedule creation method according to claim 2, further comprising the steps of:
when a transfer process in which a substrate is successively subjected to a process in the first unit and a process in a second unit included in the plurality of units is included in the process content data defining a process procedure for the substrate, before creating a transfer plan defining a transport from the first unit to the second unit, having the substrate processing apparatus execute an operation according to the overall schedule;
a transfer plan for the first substrate and a transfer schedule for the first substrate being processed by the first unit; 4. The schedule creation method according to claim 3, further comprising:
In the overall schedule updating step,
a schedule creation method, in which, when a first unit estimated end time of the first unit processing the first substrate is obtained, if the second unit is processing a second substrate and transportation of the second substrate from the second unit has not yet been planned, creation of the transfer plan for the first substrate is interrupted, and after the transportation from the second unit is planned, the transfer plan for the first substrate is created and the overall schedule is re-created. 2. The schedule creation method according to claim 1, further comprising:
a schedule creating method in which, in the overall schedule updating step, a plan defining the loading, processing, and unloading of substrates for the plurality of units is created as the overall schedule; The schedule creation method according to claim 5, further comprising the steps of:
The method further includes a step of determining whether or not a time difference between a scheduled end time of the block in the overall schedule and a first unit estimated end time obtained in the estimation step exceeds a predetermined reference value;
If it is determined that the time difference is greater than the reference value, the overall schedule updating step is executed;
When it is determined that the time difference is smaller than the reference value, the entire schedule updating step is not executed. The schedule creation method according to claim 5 or 6, further comprising the steps of:
A schedule creation method, wherein the plan created in the overall schedule update step includes a transfer plan that specifies transportation from the first unit to a second unit included in the plurality of units. A schedule creation method according to any one of claims 1 to 7, comprising:
The schedule creating method further comprises a block updating step of updating a time of the process indicated by the block based on the first unit estimated end time and storing the updated time in a storage medium. a substrate processing apparatus including a plurality of units including a plurality of processing units for performing processing on a substrate;
a control unit that creates a schedule that defines an operation of the substrate processing apparatus in a chronological order;
The control unit is
A provisional timetable is created by virtually arranging blocks showing the content of processing and the time required for processing in a chronological order.
obtaining the blocks from the provisional timetable, virtually arranging the blocks in chronological order, and creating an overall schedule for the plurality of units;
estimating a processing end time of the first unit based on first unit sensing information detected by a first sensor in a first unit included in the plurality of units and relationship information indicating a processing progress status in the first unit, and acquiring a first unit estimated end time;
updating the content of the block corresponding to the first unit in the provisional timetable to reflect the estimated end time of the first unit;
The schedule creation device recreates the overall schedule based on the updated tentative timetable until the first unit estimated end time.

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