JP5847515B2 - Schedule creation method and schedule creation program for substrate processing apparatus - Google Patents

Description

  The present invention relates to a method and a program for creating a schedule for defining operations of a substrate processing apparatus according to a time series. Examples of substrates to be processed by the substrate processing apparatus include semiconductor wafers, liquid crystal display substrates, plasma display substrates, FED (Field Emission Display) substrates, optical disk substrates, magnetic disk substrates, and magneto-optical disks. Substrates, photomask substrates, ceramic substrates, solar cell substrates and the like are included.

  Patent Documents 1 and 2 disclose creation of a schedule for determining the use timing of resources provided in the substrate processing apparatus. Specifically, in batch-type substrate processing apparatuses that batch process a lot consisting of a plurality of substrates, the use timing of resources such as a transport mechanism, a chemical processing unit, a pure water cleaning processing unit, and a drying processing unit A technique for creating a schedule that prescribes the above is disclosed. A control unit provided in the substrate processing apparatus operates each resource according to the created schedule. Thereby, the process with respect to the board | substrate for every lot is performed efficiently, and the productivity of a substrate processing apparatus increases.

JP 2008-218449 A JP 2008-210956 A International Publication No. 2010/103876

In order to perform processing (for example, cleaning processing) on a substrate more precisely, single-wafer type substrate processing apparatuses that process substrates one by one have been used. However, the prior arts disclosed in Patent Documents 1 and 2 are both suitable for batch-type substrate processing apparatuses, and even when applied directly to a single-wafer type substrate processing apparatus, efficient substrate processing is not necessarily realized. It is not always possible.
SUMMARY OF THE INVENTION An object of the present invention is to provide a schedule creation method and a schedule creation program suitable for a single wafer type substrate processing apparatus.

In order to achieve the above object, according to the first aspect of the present invention, the substrate processing apparatus has a schedule for defining the operation of the substrate processing apparatus having a plurality of single-wafer processing units for processing the substrates one by one in time series. A method for creating a control unit provided, wherein the control unit is a first substrate group to be subjected to a common process and is processed in a first processing unit group of the plurality of processing units. A first usage right setting step for setting a usage right of a processing unit belonging to the first processing unit group for a possible first substrate group; and a process in which the control unit belongs to the first processing unit group. when the right of use of the unit is set for the first substrate group, the first processing block showing the processing by the processing units belonging to the first processing unit group of the substrate of the first substrate group While allowing placement, a first processing block arrangement step that prohibits the placement of processing blocks that represent processing by the processing units belonging to the first processing unit group of a substrate other board group, the control section, the a step of deleting the right to use the processing units belonging to the first processing unit group with respect to the first substrate group, the control section, the processing of the plurality and a second substrate group to be subjected to processing in common When planning a process for a second substrate group that can be processed in a second processing unit group including at least one processing unit belonging to the first processing unit group among the units, any of the units belonging to the second processing unit group on condition that also use right to the processing unit is not set, used processing units belonging to the second processing unit group with respect to the second substrate group A second usage right setting step of setting a right, when the control unit, the right of use of the processing units belonging to the second processing unit group is set for the second substrate group, the first while allowing the arrangement of the second processing block showing the processing by the belonging processing unit to the of the second substrate group board second processing unit group, belonging to the second processing unit group of a substrate other substrate group And a second processing block placement step for prohibiting the placement of processing blocks representing processing by the processing unit.

According to this method, the right to use a processing unit belonging to the first processing unit group is set for the first substrate group to be subjected to common processing. When this right of use is set, only the first processing block representing processing for a substrate belonging to the first substrate group can be arranged as a processing block representing processing by the processing unit, and belongs to another substrate group. Arrangement of processing blocks representing processing on a substrate is prohibited. Therefore, in the processing unit, it can be ensured that the processing of the other substrate group is not interrupted during the processing of the first substrate group. Moreover, the right of use of the processing units belonging to the first processing unit group with respect to the first substrate group is removed, that Do ready to be used right in any of the processing units belonging to the second processing unit group is not set Then, the right to use the processing unit is set for the second substrate group which is another substrate group. Therefore, as a processing block representing processing by the processing unit, only a second processing block representing processing for a substrate belonging to the second substrate group can be arranged, and a processing block representing processing for a substrate belonging to another substrate group. Placement is prohibited. Therefore, in the processing unit, it can be guaranteed that the processing of the other substrate group is not interrupted during the processing of the second substrate group. Thus, by setting and deleting the usage right, it is possible to avoid that a substrate to be subjected to another processing is interrupted between a group of substrates having a common processing, so that a processing unit as a resource of the substrate processing apparatus can be efficiently used. Can be operated. As a result, it is possible to efficiently arrange processing blocks for individual substrates on the time axis and increase the operating rate of resources such as a single wafer processing unit, thereby improving the productivity of the single substrate processing apparatus. .

According to a second aspect of the present invention, the step of deleting the right to use the processing unit for the first substrate group is executed immediately after completion of scheduling for all the substrates belonging to the first substrate group. 1. A schedule creation method according to 1.
In this method, since the deletion of the right to use the processing unit for the first substrate group is executed immediately after the completion of scheduling for all the substrates belonging to the first substrate group, it relates to the substrates belonging to the first substrate group. The right to use the processing unit can be set for the second substrate group without waiting for the start of processing. As a result, the processing blocks for the substrates belonging to the second substrate group can be quickly arranged, so that efficient processing block arrangement is possible, and the operating rate of the single wafer processing unit can be further increased. Specifically, the time immediately after the completion of scheduling may be before the last substrate of the first substrate group is transferred (for example, unloaded from the substrate container) for processing.

According to a third aspect of the present invention, the control unit includes a third substrate group to be subjected to a common process and does not include a processing unit belonging to the first processing unit group among the plurality of processing units. In the processing plan for the third substrate group that can be processed in the processing unit group, the right to use is not set for any processing unit belonging to the third processing unit group. A third usage right setting step for setting a usage right of the processing unit belonging to the third processing unit group for the substrate group; and the control unit has a usage right of the processing unit belonging to the third processing unit group. When set for the third substrate group, the arrangement of the third processing block representing the processing by the processing unit belonging to the third processing unit group of the substrate of the third substrate group is permitted. On the other hand, the method further comprises a third processing block disposing step for prohibiting disposition of processing blocks representing processing by processing units belonging to the third processing unit group of substrates of another substrate group. It is a schedule creation method described .

According to a fourth aspect of the present invention, the substrate processing apparatus includes a substrate transport unit having a plurality of substrate holding hands capable of simultaneously holding and transporting a plurality of substrates, and the controller is simultaneously controlled by the substrate transport unit. further comprising the step of disposing so as to overlap a plurality of transport blocks respectively representing the transfer of a plurality of substrates that are transported on the time axis, a scheduling method according to any one of claims 1-3.

  In this method, the substrate transport unit can transport a plurality of substrates simultaneously. Therefore, simultaneous transportation of a plurality of substrates can be planned by arranging a plurality of transportation blocks representing transportation of a plurality of substrates so as to overlap on the time axis. Thus, since the substrate transfer efficiency in the single wafer processing apparatus can be increased, the productivity of the substrate processing apparatus can be increased.

The invention according to claim 5 is a computer program for creating a schedule for defining the operation of a substrate processing apparatus having a single wafer processing unit for processing substrates one by one in time series. 5. A computer program in which steps are incorporated so as to cause a computer as the control unit to execute the method according to claim 4 .
According to the present invention, the above-described effects described with respect to the schedule creation method can be obtained.

FIG. 1 is a schematic plan view showing a layout of a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a schematic side view of the substrate processing apparatus. FIG. 3 is a block diagram for explaining an electrical configuration of the substrate processing apparatus. FIG. 4 is a flowchart for explaining the first embodiment of the present invention, and shows an example of processing by the scheduling function unit. FIG. 5 is a flowchart for explaining the first embodiment, and shows a processing example (deletion of usage right) by the scheduling function unit. FIG. 6 shows an example of a temporary time table. FIG. 7 shows a first example of scheduling (block arrangement result for the substrate PJ1-1). FIG. 8 shows a first example of scheduling (block arrangement result for the substrate PJ1-2). FIG. 9 shows a first example of scheduling (block arrangement result for the substrates PJ1-3). FIG. 10 shows a first example of scheduling (block arrangement result for the substrates PJ1-4). FIG. 11 shows a second example (temporary time table) of scheduling. FIG. 12 shows a second example of scheduling (block arrangement result for the substrate PJ1-1). FIG. 13 shows a second example of scheduling (block arrangement result for the substrate PJ2-1). FIG. 14 shows a second example of scheduling (block arrangement result for the substrate PJ2-2). FIG. 15 shows a second example of scheduling (block arrangement result for the substrates PJ2-3). FIG. 16 shows a second example of scheduling (block arrangement result for the substrate PJ3-1). FIG. 17 shows a third example of scheduling (block arrangement result for the substrate PJ1-1). FIG. 18 shows a third example of scheduling (block arrangement result for the substrate PJ1-2). FIG. 19 shows a third example of scheduling (block arrangement result for the substrate PJ3-1). FIG. 20 shows a third example of scheduling (block arrangement result for the substrate PJ3-2). FIG. 21 shows a third example of scheduling (block arrangement result for the substrates PJ1-3). FIG. 22 shows a third example of scheduling (block arrangement result for substrates PJ1-4). FIG. 23 shows a third example of scheduling (block arrangement result for substrates PJ1-5). FIG. 24 shows a third example of scheduling (block arrangement result for substrates PJ1-6). FIG. 25 shows a third example of scheduling (block arrangement result for substrates PJ1-7). FIG. 26 shows a third example of scheduling (block arrangement result for substrates PJ1-8). FIG. 27 shows a third example of scheduling (block arrangement result for the substrate PJ2-1). FIG. 28 shows a third example of scheduling (block arrangement result for substrate PJ2-2). FIG. 29 is an illustrative plan view showing a layout of a substrate processing apparatus according to another embodiment of the present invention. 30 is a schematic side view of the substrate processing apparatus of FIG. FIG. 31 is a flowchart for explaining the second embodiment of the present invention, and shows a processing example by the scheduling function unit. FIG. 32 is a flowchart for explaining the second embodiment, and shows a processing example (deletion of usage right) by the scheduling function unit. FIG. 33 shows a fourth example of scheduling (block arrangement result for the substrate PJ1-1). FIG. 34 shows a fourth example of scheduling (block arrangement result for the substrate PJ1-2). FIG. 35 shows a fourth example of scheduling (block arrangement result for substrate PJ3-1). FIG. 36 shows a fourth example of scheduling (block arrangement result for the substrate PJ3-2). FIG. 37 shows a fourth example of scheduling (block arrangement result for the substrates PJ1-3). FIG. 38 shows a fourth example of scheduling (block arrangement result for substrates PJ1-4). FIG. 39 shows a fourth example of scheduling (block arrangement result for substrates PJ1-5). FIG. 40 shows a fourth example of scheduling (block arrangement result for substrates PJ1-6). FIG. 41 shows a fourth example of scheduling (block arrangement result for substrates PJ1-7). FIG. 42 shows a fourth example of scheduling (block arrangement result for substrates PJ1-8). FIG. 43 shows a fourth example of scheduling (block arrangement result for the substrate PJ2-1). FIG. 44 shows a fourth example of scheduling (block arrangement result for the substrate PJ2-2). FIG. 45 is a flowchart for explaining the third embodiment of the present invention, and shows an example of processing executed by the scheduling function unit. FIG. 46 shows a fifth example of scheduling (block arrangement result for the substrate PJ1-1). FIG. 47 shows a fifth example of scheduling (block arrangement result for the substrate PJ1-2). FIG. 48 shows a fifth example of scheduling (block arrangement result for substrates PJ1-3). FIG. 49 shows a fifth example of scheduling (block arrangement result for substrates PJ1-4). FIG. 50 shows a sixth example (temporary time table) of scheduling. FIG. 51 shows a sixth example of scheduling (block arrangement result for substrate PJ1-1). FIG. 52 shows a sixth example of scheduling (block arrangement result for substrate PJ2-1). FIG. 53 shows a sixth example of scheduling (block arrangement result for the substrate PJ2-2). FIG. 54 shows a sixth example of scheduling (block arrangement result for substrate PJ3-1). FIG. 55 shows a sixth example of scheduling (block arrangement result for the substrates PJ2-3). FIG. 56 shows a seventh example of scheduling (block arrangement result for the substrate PJ1-1). FIG. 57 shows a seventh example of scheduling (block arrangement result for the substrates PJ1-2). FIG. 58 shows a seventh example of scheduling (block arrangement result for substrate PJ2-1). FIG. 59 shows a seventh example of scheduling (block arrangement result for substrate PJ2-2). FIG. 60 shows a seventh example of scheduling (block arrangement result for the substrates PJ1-3). FIG. 61 shows a seventh example of scheduling (block arrangement result for substrates PJ1-4). FIG. 62 shows a seventh example of scheduling (block arrangement result for substrate PJ3-1). FIG. 63 shows a seventh example of scheduling (block arrangement result for substrate PJ3-2). FIG. 64 shows a seventh example of scheduling (block arrangement result for substrates PJ1-5). FIG. 65 shows a seventh example of scheduling (block arrangement result for substrates PJ1-6). FIG. 66 shows a seventh example of scheduling (block arrangement result for substrates PJ1-7). FIG. 67 shows a seventh example of scheduling (block arrangement result for substrates PJ1-8). FIG. 68 shows an eighth example of scheduling (fourth embodiment, block arrangement result for the substrate PJ1-1). FIG. 69 shows an eighth example of scheduling (block arrangement result for the substrate PJ1-2). FIG. 70 shows an eighth example of scheduling (block arrangement result for substrate PJ2-1). FIG. 71 shows an eighth example of scheduling (block arrangement result for substrate PJ2-2). FIG. 72 shows an eighth example of scheduling (block arrangement result for substrates PJ1-3). FIG. 73 shows an eighth example of scheduling (block arrangement result for substrates PJ1-4). FIG. 74 shows an eighth example of scheduling (block arrangement result for substrate PJ3-1). FIG. 75 shows an eighth example of scheduling (block arrangement result for substrate PJ3-2). FIG. 76 shows an eighth example of scheduling (block arrangement result for substrates PJ1-5). FIG. 77 shows an eighth example of scheduling (block arrangement result for substrates PJ1-6). FIG. 78 shows an eighth example of scheduling (block arrangement result for substrates PJ1-7). FIG. 79 shows an eighth example of scheduling (block arrangement result for substrates PJ1-8).

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic plan view showing a layout of a substrate processing apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic side view thereof. The substrate processing apparatus includes an indexer section 1 and a processing section 2. The processing section 2 includes a delivery unit PASS for delivering the substrate W to and from the indexer section 1. The indexer section 1 delivers the unprocessed substrate W to the delivery unit PASS and receives the processed substrate W from the delivery unit PASS. The processing section 2 receives an unprocessed substrate W from the delivery unit PASS, and processes the substrate W using a processing agent (processing liquid or processing gas), processing using electromagnetic waves such as ultraviolet rays, and physical cleaning. Various processing such as processing (brush cleaning, spray nozzle cleaning, etc.) is performed. Then, the processing section 2 delivers the processed substrate W to the delivery unit PASS.

The indexer section 1 includes a plurality of stages ST1 to ST4 and an indexer robot IR.
Stages ST <b> 1 to ST <b> 4 are substrate container holders that can respectively hold a substrate container C that houses a plurality of substrates W (for example, semiconductor wafers) in a stacked state. The substrate container C may be a FOUP (Front Opening Unified Pod) that stores the substrate W in a sealed state, a SMIF (Standard Mechanical Inter Face) pod, an OC (Open Cassette), or the like. For example, when the substrate container C is placed on the stages ST <b> 1 to ST <b> 4, the substrate container C is in a state where a plurality of horizontal substrates W are stacked in the vertical direction with a space between each other.

  The indexer robot IR includes, for example, a base unit 6, a multi-joint arm 7, and a pair of hands 8A and 8B. The base unit 6 is fixed to the frame of the substrate processing apparatus, for example. The multi-joint arm 7 is configured by mutually connecting a plurality of arm portions that can rotate along a horizontal plane, and the angle between the arm portions is changed at a joint portion where the arm portions are connected. By doing so, it is configured to bend and stretch. The base end portion of the articulated arm 7 is coupled to the base portion 6 so as to be able to rotate around the vertical axis. Further, the articulated arm 7 is coupled to the base portion 6 so as to be movable up and down. In other words, the base unit 6 incorporates an elevating drive mechanism for elevating the articulated arm 7 and a rotation drive mechanism for rotating the articulated arm 7 about the vertical axis. The articulated arm 7 is provided with an individual rotation drive mechanism for independently rotating each arm portion. Hands 8A and 8B are coupled to the tip of the articulated arm 7 so that individual rotation about the vertical axis and individual advance and retreat in the horizontal direction are possible. The articulated arm 7 includes a hand rotation drive mechanism for individually rotating the hands 8A and 8B around the vertical axis, and a hand advancing and retracting mechanism for individually moving the hands 8A and 8B in the horizontal direction. It has been. The hands 8A and 8B are configured to hold, for example, one substrate W, respectively. The hands 8A and 8B may be arranged so as to overlap each other. However, for the sake of clarity, the hands 8A and 8B are drawn in a direction parallel to the paper surface (horizontal direction) in FIG. is there.

  With this configuration, the indexer robot IR operates to unload a single unprocessed substrate W from the substrate container C held on any of the stages ST1 to ST4 by the hand 8A and pass it to the delivery unit PASS. Further, the indexer robot IR operates to receive one processed substrate W from the delivery unit PASS with the hand 8B and store it in the substrate container C held in any of the stages ST1 to ST4.

The processing section 2 includes a plurality (12 in this embodiment) of processing units SPIN1 to SPIN12, the main transfer robot CR, and the above-described delivery unit PASS.
The processing units SPIN1 to SPIN12 are three-dimensionally arranged in this embodiment. More specifically, a plurality of processing units SPIN1 to SPIN12 are arranged so as to form a three-story structure, and four processing units are arranged on each floor portion. That is, four processing units SPIN1, SPIN4, SPIN7, and SPIN10 are arranged on the first floor portion, another four processing units SPIN2, SPIN5, SPIN8, and SPIN11 are arranged on the second floor portion, and another processing unit is arranged on the third floor portion. SPIN3, SPIN6, SPIN9, and SPIN12 are arranged. More specifically, the main transfer robot CR is arranged at the center of the processing section 2 in plan view, and the transfer unit PASS is arranged between the main transfer robot CR and the indexer robot IR. A first processing unit group G1 in which three processing units SPIN1 to SPIN3 are stacked and a second processing unit group G2 in which other three processing units SPIN4 to SPIN6 are stacked are arranged so as to face each other across the delivery unit PASS. Has been. A third processing unit group G3 in which three processing units SPIN7 to SPIN9 are stacked is arranged so as to be adjacent to the first processing unit group G1 on the side far from the indexer robot IR. Similarly, a fourth processing unit group G4 in which three processing units SPIN10 to SPIN12 are stacked is arranged so as to be adjacent to the second processing unit group G2 on the side far from the indexer robot IR. The main transfer robot CR is surrounded by the first to fourth processing unit groups G1 to G4.

  The main transfer robot CR includes, for example, a base part 11, an articulated arm 12, and a pair of hands 13A and 13B. The base unit 11 is fixed to the frame of the substrate processing apparatus, for example. The multi-joint arm 12 is configured such that a plurality of arm portions extending along a horizontal plane are rotatably coupled to each other, and an angle between the arm portions is changed at a joint portion which is a joint portion of the arm portions. Is configured to bend and stretch. The base end portion of the articulated arm 12 is coupled to the base portion 11 so as to be able to rotate around the vertical axis. Further, the articulated arm 12 is coupled to the base 11 so as to be movable up and down. In other words, the base 11 includes a lift drive mechanism for lifting the articulated arm 12 and a rotation drive mechanism for rotating the articulated arm 12 about the vertical axis. Further, the multi-joint arm 12 is provided with an individual rotation drive mechanism for independently rotating each arm portion. Hands 13 </ b> A and 13 </ b> B are coupled to the distal end portion of the articulated arm 12 so that individual rotation about the vertical axis and individual advance and retreat in the horizontal direction are possible. The articulated arm 12 includes a hand rotation drive mechanism for individually rotating the hands 13A and 13B around the vertical axis, and a hand advance / retreat mechanism for individually moving the hands 13A and 13B in the horizontal direction. It has been. The hands 13A and 13B are configured to hold, for example, one substrate W, respectively. The hands 13A and 13B may be arranged so as to overlap each other. However, in FIG. 1, the hands 13A and 13B are drawn while being shifted in a direction parallel to the paper surface (horizontal direction) for the sake of clarity. is there.

  With this configuration, the main transport robot CR receives an unprocessed substrate W from the delivery unit PASS with the hand 13A, and carries the unprocessed substrate W into any of the processing units SPIN1 to SPIN12. Further, the main transport robot CR receives the processed substrate W processed by the processing units SPIN1 to SPIN12 by the hand 13B and transfers the substrate W to the transfer unit PASS.

  The processing units SPIN1 to SPIN12 are single wafer processing units that process the substrates W one by one. The processing units SPIN1 to SPIN12 include, for example, a spin chuck 15 that holds and rotates a single substrate W in a horizontal posture, and a processing liquid nozzle 16 that supplies a processing liquid (chemical liquid or rinsing liquid) to the spin chuck 15. May be a rotating liquid processing unit provided in the processing chamber 17 (chamber). In FIG. 2, only the processing unit SPIN3 is shown as its internal configuration, and the internal configuration of other processing units is not shown.

  FIG. 3 is a block diagram for explaining an electrical configuration of the substrate processing apparatus. The substrate processing apparatus includes a computer 20 that controls the processing units SPIN1 to SPIN12, the main transfer robot CR, and the indexer robot. The computer 20 may have a form of a personal computer (FA personal computer), and includes a control unit 21, an input / output unit 22, and a storage unit 23. The control unit 21 includes an arithmetic unit such as a CPU. The input / output unit 22 includes output devices such as a display unit and input devices such as a keyboard, a pointing device, and a touch panel. Further, the input / output unit 22 includes a communication module for communication with the host computer 24. The storage unit 23 includes a storage device such as a solid-state memory device or a hard disk drive.

  The control unit 21 includes a scheduling function unit 25 and a process execution instruction unit 26. The scheduling function unit 25 carries out the resources of the substrate processing apparatus according to time series so that the substrate W is unloaded from the substrate container C, processed by the processing units SPIN1 to SPIN12, and then stored in the substrate container C. Create a plan (schedule). The process execution instruction unit 26 operates the resources of the substrate processing apparatus in accordance with the schedule created by the scheduling function unit 25.

The storage unit 23 is configured to store various data including a program 30 executed by the control unit 21, processing content data 40 received from the host computer 24, and schedule data 50 created by the scheduling function unit 25. Has been.
The program 30 stored in the storage unit 23 includes a schedule creation program 31 for operating the control unit 21 as the scheduling function unit 25 and a process execution program 32 for operating the control unit 21 as the process execution instruction unit 26. Including.

  The processing content data 40 includes a process job number assigned to each substrate W and a recipe associated with the process job number. The recipe is data defining the contents of substrate processing, and includes substrate processing conditions and substrate processing procedures. More specifically, it includes parallel processing unit information, used processing liquid information, processing time information, and the like. The parallel processing unit information is information for designating usable processing units, and indicates that parallel processing by the designated processing units is possible. In other words, when one of the designated processing units cannot be used, it indicates that replacement by other designated processing units is possible. “Unusable” means that when the processing unit is in use for processing another substrate W, or when the processing unit is in failure, the operator wants the processing unit to process the substrate W. When you think it is not. The process job number is identification information (substrate group identification information) for identifying one or a plurality of substrates W on which common processing is performed. That is, a plurality of substrates W to which a common process job number is assigned are subjected to a common process using a recipe associated with the process job number. However, the substrate processing contents (recipe) corresponding to different process job numbers may be the same. For example, when a common process is performed on a plurality of substrates W in which the processing order (the order of dispensing from the substrate container C) is continuous, a common process job is performed on the plurality of substrates W. A number is given.

  The control unit 21 acquires processing content data for each substrate W and stores the processing content data in the storage unit 23. The acquisition and storage of the processing content data may be performed before the scheduling for each substrate W is executed. For example, immediately after the substrate container C is held on the stages ST1 to ST4, processing content data corresponding to the substrate W accommodated in the substrate container C may be given from the host computer 24 to the control unit 21.

  4 and 5 are flowcharts for explaining a processing example (first embodiment) by the scheduling function unit 25. More specifically, a process performed by the control unit 21 (computer 20) executing the schedule creation program 31 is shown. In other words, the schedule creation program 31 includes a group of steps so as to cause the computer to execute the processes shown in FIGS.

  When an instruction for starting the substrate processing is given from the host computer 24 or the input / output unit 22 by the operator (step S1), the scheduling function unit 25 displays a temporary time table for all the substrates W to which the substrate processing start instruction is given. Create (step S2). The substrate processing start instruction may be issued for all the substrates W accommodated in the substrate container C as a unit. The substrate processing start instruction may be an instruction to start processing of the substrate W to which one or more process job numbers are assigned.

  For example, it is assumed that a recipe associated with a certain process job number in the processing content data specifies parallel processing of the processing units SPIN1 to SPIN4. That is, consider a case where the substrate processing according to the recipe can be executed in any of the four processing units SPIN1 to SPIN4. In this case, there are four paths through which the substrate W to which the process job number is assigned undergoes processing. That is, the paths that can be selected for processing the substrate W are four paths that pass through any one of the processing units SPIN1 to SPIN4. Therefore, the scheduling function unit 25 creates a temporary time table corresponding to the four routes.

  FIG. 6 shows a temporary time table corresponding to the route passing through the processing unit SPIN1. This temporary time table includes a block (an example of a transport block) representing the unloading (Get) of the substrate W from the substrate container C by the indexer robot IR, and the loading (PASS) of the substrate W to the delivery unit PASS by the indexer robot IR. ) Representing a block (an example of a transport block), a block representing an unloading (Get) of the substrate W from the transfer unit PASS by the main transport robot CR (an example of a transport block), and a block representing the substrate W by the main transport robot CR A block (an example of a transport block) representing loading (Put) into the processing unit SPIN1, a processing block representing processing on the substrate W by the processing unit SPIN1, and a substrate W processed from the processing unit SPIN1 by the main transport robot CR Block (Transport) representing unloading (Get) An example of a lock), a block (an example of a transfer block) representing the transfer (Put) of the substrate W to the transfer unit PASS by the main transfer robot CR, and the transfer of the substrate W from the transfer unit PASS by the indexer robot IR ( A block (an example of a transport block) representing Get) and a block (an example of a transport block) representing loading (Put) of the substrate W into the substrate container C by the indexer robot IR. The scheduling function unit 25 creates a temporary time table by arranging these blocks in order so as not to overlap on the time axis. The scheduling function unit 25 creates the same temporary time table (temporary time table in which processing blocks are arranged in the processing units SPIN2 to SPIN4, respectively) corresponding to the paths passing through the processing units SPIN2 to SPIN4, for the same substrate W. . In this way, a temporary time table for a total of four paths is created for one substrate W.

  A similar temporary time table is created corresponding to all the substrates W to which the same process job number is assigned. For example, if there are four substrates W to which the same process job number is assigned, a temporary time table for a total of 16 paths (4 paths × 4 sheets) is created. Further, when there are a plurality of process jobs instructed to start at the same time, the same processing is performed for all process job numbers, and a temporary time table is created. The temporary time table created in this way is stored in the storage unit 23 as part of the schedule data 50. In the stage of creating the temporary timetable, interference with the block relating to another substrate W (overlap on the time axis) is not considered.

  When a scheduling instruction is generated (step S3), blocks relating to the substrate W of the process job number are arranged (overall scheduling, steps S4 to S16). Specifically, the scheduling function unit 25 reads the temporary time table of the substrate W from the storage unit 23 and arranges the blocks constituting the temporary time table on the time axis.

  More specifically, the scheduling function unit 25 receives processing instruction data (process job numbers) for all the substrates W that manage the substrate processing procedure in the scheduling function unit 25 when an instruction to start the substrate processing is given. And a recipe) are acquired from the memory | storage part 23 (step S4). Furthermore, the scheduling function unit 25 determines whether there is a substrate W that has been unloaded from the substrate container C and has started processing (step S5). If the processing of any substrate W has not been started (step S5: NO), the scheduling function unit 25 is waiting at the stage ST among the substrates W corresponding to the processing content data acquired from the storage unit 23, It is then determined whether there is a substrate W that has not been scheduled (step S7). If this determination is affirmative, the scheduling function unit 25 sets the substrate W having the youngest processing order among the substrates W that have not been scheduled as the scheduling target substrate W, and data related to the scheduling target substrate W (processing content data and Schedule data) is acquired from the storage unit 23 (step S8). Usually, the processing order is younger as the substrate W is located on the upper side of the substrate container C.

  Next, the scheduling function unit 25 determines whether or not scheduling has already been performed for another substrate W to which a process job number common to the scheduling target substrate W from which data has been acquired has been assigned (step S9). When the first substrate of a certain process job number is the scheduling target substrate W, this determination is denied. Then, the scheduling function unit 25 refers to the recipe corresponding to the scheduling target substrate W, and all the parallel processing units specified in the recipe can be used. That is, the usage right is set for any of the parallel processing units. It is judged whether it is not (step S10). Immediately after starting the scheduling, since no usage right is set, the determination in step S10 is affirmed. In this case, the scheduling function unit 25 sets a usage right for all the parallel processing units specified in the recipe corresponding to the process job number of the scheduling target substrate W (step S11).

  For example, if parallel processing in the processing units SPIN1 to SPIN4 is specified in the recipe, as shown in FIG. 7, the processing unit is assigned to the substrate group sharing the process job number PJ1 assigned to the scheduling target substrate W. The right to use SPIN1 to SPIN4 is set. While this usage right is set, the processing blocks of the substrate group having other process job numbers cannot be placed in the processing units SPIN1 to SPIN4. In the drawing showing the scheduling process or result of FIG. 7 and the like, one hand 8A of the indexer robot IR is represented as “IR1”, and the other hand 8B is represented as “IR2”. Similarly, one hand 13A of the main transfer robot CR is denoted as “CR1”, and the other hand 13B is denoted as “CR2”. Also, the m-th (m is a natural number) substrate W of the process job number PJn (n is a natural number) will be expressed as “substrate PJn-m” as necessary.

  Next, the scheduling function unit 25 executes scheduling for the scheduling target substrate W. Specifically, the scheduling function unit 25 refers to the temporary time table corresponding to the scheduling target substrate W, and acquires one block constituting the temporary time table (step S12). The block acquired at this time is the block arranged at the earliest position on the time axis of the temporary time table among the unallocated blocks. Further, the scheduling function unit 25 searches for a position where the acquired block can be arranged (step S13), and arranges the block at the searched position (step S14). Each block is arranged at the earliest position on the time axis while preventing the same resource from being used repeatedly at the same time. A similar operation is repeatedly executed for all blocks constituting the temporary time table (step S15). When all blocks constituting the temporary time table have been arranged (step S15: YES), the scheduling function unit 25 calculates the last use time of each processing unit and stores the calculation result in the storage unit 23. (Step S16). The initial value of the last use time is “0”. Thereafter, the processing from step S7 is repeated. When scheduling for all substrates W of all process job numbers instructed to start processing is completed (step S7: NO), overall scheduling is completed (step S17).

  The recipe corresponding to the scheduling target substrate W designates the parallel processing of the four processing units SPIN1 to SPIN4, and therefore represents four paths that respectively pass through the four processing units SPIN1 to SPIN4 for the scheduling target substrate W. Four temporary time tables have been created (step S2). When planning a process for the first substrate W, the scheduling function unit 25 selects a temporary time table having the earliest last use time from among the four temporary time tables, and blocks from the selected temporary time table. To get. When the last use times are equal in a plurality of temporary time tables, for example, a route with a smaller processing unit number may be selected. Since the plurality of processing units SPIN1 to SPIN4 are arranged at different positions in the substrate processing apparatus, there is a difference in the time required for transporting the substrate W. Accordingly, the last use time in the temporary timetable is generally Are not equal. FIG. 7 shows an example in which all the blocks constituting the temporary time table corresponding to the first substrate PJ1-1 of the process job number PJ1 are arranged. The scheduling function unit 25 arranges the blocks so that the blocks do not overlap in the same resource space.

  At the timing when the first substrate PJ1-1 of the process job number PJ1 is paid out from the substrate container C by the indexer robot IR, a scheduling instruction is generated (step S3: YES), and the scheduling function unit 25 executes the process. Scheduling of the second board PJ1-2 of job number PJ1 is started. In this case, the determination in step S5 is affirmed, and the scheduling function unit 25 executes scheduling for the first substrate W that has already started processing (step S6). The result is the same as FIG. Further, since there is an unscheduled substrate W in the process job number PJ1, the determination in step S7 is affirmed. The scheduling function unit 25 sets the second substrate PJ1-2 of the process job number PJ1 as a scheduling target substrate, and acquires data related to the scheduling target substrate from the storage unit 23 (step S8). Since the scheduling of the first substrate PJ1-1 of the process job number PJ1 has been completed, the determination in step S9 is affirmed, and the two process job numbers PJ1 are processed without going through the processing of steps S10 and S11. Scheduling for the eye substrate PJ1-2 is executed (steps S12 to S15). In this case, since the processing unit SPIN1 is in use for processing the first substrate W, it is finally used from the three temporary time tables representing the three paths passing through the remaining parallel processing units SPIN2 to SPIN4. The temporary time table with the earliest time is selected. When the last use times are equal, a temporary time table corresponding to a route passing through a processing unit with a smaller number is selected. FIG. 8 shows an example in which scheduling is performed for the second substrate PJ1-2 having the process job number PJ1 in this way.

Similarly, the scheduling result shown in FIG. 9 is obtained by performing scheduling for the third substrate PJ1-3 having the process job number PJ1.
Further, similarly, scheduling is performed for the fourth substrate PJ1-4 having the process job number PJ1, thereby obtaining the scheduling result shown in FIG.
When searching for a block arrangement position (step S13), the scheduling function unit 25 searches for an earlier position on the time axis as much as possible without overlapping blocks on the time axis for the same resource.

  FIG. 5 is a flowchart for explaining another process performed by the scheduling function unit 25 in parallel with the process of FIG. When the substrate W is dispensed from the substrate container C by the indexer robot IR (step S21), the scheduling function unit 25 determines whether the substrate W is the last substrate in the substrate group to which a common process job number is given. Judgment is made (step S22). If it is the last substrate (step S22: YES), the scheduling function unit 25 deletes the usage right set for the substrate group of the process job number (step S23). If it is not the last substrate (step S22: NO), the usage right is not deleted.

  Therefore, in the above-described example, when the fourth substrate PJ1-4 having the process job number PJ1 is discharged from the substrate container C, the processing units SPIN1 to SPIN4 set for the substrate group having the process job number PJ1. The right to use is deleted. Thereafter, the setting of the right to use the processing units SPIN1 to SPIN4 is permitted for a group of substrates having different process job numbers.

When the substrate W is dispensed from the substrate container C by the indexer robot IR, a scheduling instruction is generated, and the determination in step S3 in FIG. 4 becomes affirmative.
FIGS. 11 to 16 show an example of scheduling for three substrate groups (process jobs) assigned process job numbers PJ1, PJ2, and PJ3. The substrate group of process job number PJ1 is composed of one substrate PJ-1, and four processing units SPIN1 to SPIN4 are designated as parallel processing units by the recipe in the processing content data. The substrate group of process job number PJ2 is composed of three substrates PJ2-1, PJ2-2, and PJ2-3, and two processing units SPIN2 to SPIN3 are designated as parallel processing units by the recipe in the processing content data. It shall be. Furthermore, it is assumed that the substrate group of process job number PJ3 is composed of one substrate PJ3-1, and three processing units SPIN2 to SPIN4 are designated as parallel processing units by the recipe in the processing content data. A case is assumed in which processing is started for the substrate groups of process job numbers PJ1, PJ2, and PJ3 in the order of the numbers, and a scheduling instruction is generated.

  FIG. 11 shows an example of a temporary time table. When a substrate processing start instruction is given (step S1 in FIG. 4), the scheduling function unit 25 creates a temporary time table (step S2). That is, the scheduling function unit 25 creates a temporary time table for four paths that pass through the processing units SPIN1 to SPIN4 for one substrate PJ1-1 having the process job number PJ1. In addition, the scheduling function unit 25 generates temporary time tables for two paths respectively passing through the processing units SPIN2 to SPIN3 for the three substrates PJ2-1, PJ2-2, and PJ2-3 having the process job number PJ2. create. That is, a temporary time table for a total of six paths is created for the process job number PJ2. Further, the scheduling function unit 25 creates a temporary time table for three paths that pass through the processing units SPIN2 to SPIN4 for one substrate PJ3-1 of the process job number PJ3. The created temporary time table is stored in the storage unit 23.

  When the process start for process job numbers PJ1, PJ2, and PJ3 is instructed in order and a scheduling instruction is generated in response thereto (step S3 in FIG. 4), the scheduling function unit 25 stores all temporary times stored in the storage unit 23. The table, that is, the temporary time table of all the substrates W corresponding to the process job numbers PJ1 to PJ3 is read, and the entire scheduling is started. Since there is no other substrate W that has already started processing (step S5: NO), the scheduling function unit 25 searches for the processing unit with the earliest last use time. Initially, since the last use time of any of the processing units is “0”, the process job number PJ1 that is instructed to start processing first among the process jobs that use the processing unit SPIN1 with the smallest number is evaluated. . In this case, since the scheduling for the substrate W of the process job number PJ1 has not been completed (step S7: YES), the temporary time table of the first substrate PJ1-1 of the process job number PJ1 is acquired from the storage unit 23. (Step S8). Scheduling for the other substrate W of the process job number PJ1 is not performed (step S9: NO), and the right to use is not set for any of the processing units (step S10: YES). Sets the usage rights for the parallel processing units SPIN1 to SPIN4 specified in the recipe of the process job number PJ1 for the substrate group of the process job number PJ1 (step S11). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ1-1 having the process job number PJ1 (steps S12 to S15).

  FIG. 12 shows an example in which blocks relating to the first substrate PJ1-1 of the process job number PJ1 are arranged. Since none of the processing units is in use, for example, a provisional time table representing a route passing through the processing unit SPIN1 is selected, and the blocks constituting the provisional time table are arranged on the time axis in front-alignment. The Thus, when the scheduling of the substrate PJ1-1 is completed, the conveyance of the substrate PJ1-1 is started.

  When the substrate PJ1-1 is discharged from the substrate container C (step S21 in FIG. 5), since the substrate PJ1-1 is the last substrate of the process job number PJ1 (step S22: YES), the process job number PJ1 is related. The usage right is deleted (step S23). Then, a scheduling instruction relating to the process job number PJ2 is generated (step S3: YES).

  In response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. Since there is a substrate PJ1-1 that has already started processing (step S5: YES), scheduling for the substrate PJ1-1 is performed (step S6). The result is the same as FIG. Since the scheduling for the substrate W of the process job number PJ2 has not been completed (step S7: YES), the temporary time table of the first substrate PJ2-1 of the process job number PJ2 is acquired from the storage unit 23 (step S7). S8). Scheduling for the other substrate W of the process job number PJ2 is not performed (step S9: NO), and the right to use is not set for any processing unit (step S10: YES). Sets the usage rights for the parallel processing units SPIN2 to SPIN3 specified in the recipe of the process job number PJ2 for the substrate group of the process job number PJ2 (step S11). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ2-1 having the process job number PJ2 (steps S12 to S15).

  FIG. 13 shows an example in which blocks relating to the first substrate PJ2-1 of the process job number PJ2 are arranged. Since none of the parallel processing units SPIN2 to SPIN3 is in use, for example, a temporary time table representing a route passing through the processing unit SPIN2 is selected, and the blocks constituting the temporary time table have already been arranged. It is arranged on the time axis so as not to interfere with the block. Thus, when the scheduling of the substrate PJ2-1 is completed, the conveyance of the substrate PJ2-1 is started.

  When the substrate PJ2-1 is paid out from the substrate container C (step S21 in FIG. 5), since the substrate PJ2-1 is not the last substrate of the process job number PJ2 (step S22: NO), the process job number PJ2 is related. The right to use is maintained as it is. Then, a scheduling instruction for the second substrate PJ2-2 of the process job number PJ2 is generated (step S3: YES). At this time, scheduling for the substrate of the process job number PJ3 is also started, but the right to use the process job number PJ2 is set for the processing units SPIN2 to SPIN3 among the parallel processing units of the process job number PJ3. The determination in step S10 of No. 4 is negative, and it is determined that “not scheduled”.

  In response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. Since there are substrates PJ1-1 and PJ2-1 that have already started processing (step S5: YES), scheduling for these substrates PJ1-1 and PJ2-1 is performed (step S6). The result is the same as FIG. Since the scheduling for the substrate W of the process job number PJ2 has not been completed (step S7: YES), the temporary time table of the second substrate PJ2-2 of the process job number PJ2 is acquired from the storage unit 23 (step S7). S8). Since the scheduling for the other substrate PJ2-1 of the process job number PJ2 is performed (step S9: YES), the scheduling function unit 25 configures a temporary time table for the second substrate PJ2-2 of the process job number PJ2. The blocks to be processed are arranged (steps S12 to S15).

  FIG. 14 shows an example in which blocks relating to the second substrate PJ2-2 having the process job number PJ2 are arranged. Since a processing block for the first substrate PJ2-1 is arranged for the parallel processing unit SPIN2, a temporary time table indicating a route passing through the processing unit SPIN3 is selected, and blocks constituting the temporary time table Are arranged on the time axis so as not to interfere with the already arranged blocks. Thus, when the scheduling of the substrate PJ2-2 is completed, the conveyance of the substrate PJ2-2 is started.

  When the substrate PJ2-2 is dispensed from the substrate container C (step S21 in FIG. 5), since the substrate PJ2-2 is not the last substrate of the process job number PJ2 (step S22: NO), the process job number PJ2 is related. The right to use is maintained as it is. Then, a scheduling instruction for the third substrate PJ2-3 having the process job number PJ2 is generated (step S3: YES). Thereafter, the scheduling function unit 25 performs scheduling for the third substrate PJ2-3 in the same manner as the second substrate PJ2-2. That is, the scheduling function unit 25 arranges blocks constituting the temporary time table of the third substrate PJ2-3 having the process job number PJ2 (steps S12 to S15). When the substrate PJ2-2 is dispensed from the substrate container C, scheduling for the substrate of the process job number PJ3 is started, but the process jobs SPIN2 to SPIN3 among the parallel processing units of the process job number PJ3 are processed. Since the right to use the number PJ2 is set, the determination in step S10 in FIG. 4 is negative, and it is determined that “not scheduled”.

  FIG. 15 shows an example in which blocks relating to the third substrate PJ2-3 of process job number PJ2 are arranged. Since the processing blocks for the first and second substrates PJ2-1 and PJ2-2 are arranged for the parallel processing units SPIN2 and SPIN3, respectively, the scheduling function unit 25 is connected to the processing units SPIN2 and SPIN3. The last use times are compared, and a temporary time table representing a route passing through the processing unit SPIN2, which is the earlier one of them, is selected. And the scheduling function part 25 arrange | positions the block which comprises the temporary time table to the front on a time axis so that it may not interfere with the block already arrange | positioned. That is, the processing block of the third substrate PJ2-3 is arranged at the earliest time after the processing block of the first substrate PJ2-1 with respect to the processing unit SPIN2, and the third substrate PJ2-3 is arranged accordingly. Another block for the substrate PJ2-3 is arranged. Thus, when the scheduling of the substrate PJ2-3 is completed, the conveyance of the substrate PJ2-3 is started.

  When the substrate PJ2-3 is paid out from the substrate container C (step S21 in FIG. 5), since the substrate PJ2-3 is the last substrate of the process job number PJ2 (step S22: YES), the process job number PJ2 is related. The usage right is deleted (step S23). Then, a scheduling instruction relating to the process job number PJ3 is generated (step S3: YES).

  In response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. Since there are substrates PJ1-1, PJ2-1, PJ2-2, and PJ2-3 that have already started processing (step S5: YES), these substrates PJ1-1, PJ2-1, PJ2-2, and PJ2-3. Is scheduled (step S6). The result is the same as FIG. Since the scheduling for the substrate W of the process job number PJ3 has not been completed (step S7: YES), the temporary time table of the first substrate PJ3-1 of the process job number PJ3 is acquired from the storage unit 23 (step S7). S8). Scheduling for the other substrate W of the process job number PJ3 is not performed (step S9: NO), and the right to use is not set for any processing unit (step S10: YES). Sets the usage rights for the parallel processing units SPIN2 to SPIN4 specified in the recipe of the process job number PJ3 for the substrate group of the process job number PJ3 (step S11). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ3-1 having the process job number PJ3 (steps S12 to S15).

  FIG. 16 shows an example in which blocks relating to the first substrate PJ3-1 of the process job number PJ3 are arranged. Since processing blocks have already been arranged for the parallel processing units SPIN2 and SPIN3, a temporary time table representing a route passing through the processing unit SPIN4 having the earliest last use time is selected, and the blocks constituting the temporary time table are: In order not to interfere with the already arranged blocks, the blocks are arranged on the front side on the time axis. Thus, when the scheduling of the substrate PJ3-1 is completed, the conveyance of the substrate PJ3-1 is started. Since the right to use the process job number PJ2 for the processing units SPIN2 to SPIN3 is not deleted until the conveyance of the last substrate PJ2-3 of the process job number PJ2 is started, the block relating to the substrate PJ3-1 is configured to transfer the substrate PJ2-3 to the substrate container It is arranged later on the time axis than the block that specifies the operation of paying out from C. Accordingly, there is no plan that the process for the substrate PJ3-1 overtakes the process for the substrate PJ2-3.

In this way, scheduling for all the substrates W of all process job numbers PJ1 to PJ3 is completed (step S7: NO).
FIGS. 17 to 28 show examples of scheduling for three substrate groups (process jobs) assigned process job numbers PJ1, PJ2, and PJ3. It is assumed that the substrate group of process job number PJ1 is composed of eight substrates PJ1-1 to PJ1-1 and two processing units SPIN1 and SPIN2 are designated as parallel processing units by the recipe in the processing content data. Further, it is assumed that the substrate group of the process job number PJ2 includes two substrates PJ2-1 and PJ2-1 and four processing units SPIN1 to SPIN4 are designated as parallel processing units by the recipe in the processing content data. Further, it is assumed that the substrate group of the process job number PJ3 includes two substrates PJ3-1 and PJ3-1 and two processing units SPIN3 to SPIN4 are designated as parallel processing units by a recipe in the processing content data. . A case is assumed in which processing is started for the substrate groups of process job numbers PJ1, PJ2, and PJ3 in the order of the numbers, and a scheduling instruction is generated.

  When a substrate processing start instruction is given (step S1 in FIG. 4), the scheduling function unit 25 creates a temporary time table (step S2). That is, the scheduling function unit 25 creates temporary time tables for two paths that pass through the processing units SPIN1 and SPIN2, respectively, for the eight substrates PJ1-1 to PJ1 to process job number PJ1. That is, a temporary time table for 16 routes in total is created for the process job number PJ1. In addition, the scheduling function unit 25 creates temporary time tables for four paths respectively passing through the processing units SPIN1 to SPIN4 for the two substrates PJ2-1 and PJ2-1 having the process job number PJ2. That is, a temporary time table for eight routes in total is created for the process job number PJ2. Furthermore, the scheduling function unit 25 creates temporary time tables for two paths that pass through the processing units SPIN3 to SPIN4, respectively, for the two substrates PJ3-1 and PJ3 of process job number PJ3. That is, a temporary time table for a total of four paths is created for the process job number PJ3. The created temporary time table is stored in the storage unit 23.

  When the process start for process job numbers PJ1, PJ2, and PJ3 is instructed in order and a scheduling instruction is generated in response thereto (step S3 in FIG. 4), the scheduling function unit 25 stores all temporary times stored in the storage unit 23. The table, that is, the temporary time table of all the substrates W corresponding to the process job numbers PJ1 to PJ3 is read, and the entire scheduling is started. Since there is no other substrate W that has already started processing (step S5: NO), the scheduling function unit 25 searches for the processing unit with the earliest last use time. Initially, since the last use time of any of the processing units is “0”, the process job number PJ1 that is instructed to start processing first among the process jobs that use the processing unit SPIN1 with the smallest number is evaluated. . In this case, since the scheduling for the substrate W of the process job number PJ1 has not been completed (step S7: YES), the scheduling function unit 25 creates a temporary time table for the first substrate PJ1-1 of the process job number PJ1. Obtained from the storage unit 23 (step S8). Scheduling for the other substrate W of the process job number PJ1 is not performed (step S9: NO), and the right to use is not set for any of the processing units (step S10: YES). Sets the usage rights for the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1 for the substrate group of the process job number PJ1 (step S11). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ1-1 having the process job number PJ1 (steps S12 to S15). Then, the last use time of each processing unit is calculated and stored in the storage unit 23 (step S16).

  FIG. 17 shows an example in which blocks relating to the first substrate PJ1-1 of the process job number PJ1 are arranged. Since none of the processing units is in use, for example, a provisional time table representing a route passing through the processing unit SPIN1 is selected, and the blocks constituting the provisional time table are arranged on the time axis in front-alignment. The Thus, when the scheduling of the substrate PJ1-1 is completed, the conveyance of the substrate PJ1-1 is started.

  When the substrate PJ1-1 is paid out from the substrate container C (step S21 in FIG. 5), since the substrate PJ1-1 is not the last substrate of the process job number PJ1 (step S22: NO), it relates to the process job number PJ1. The right to use is maintained as it is. Then, a scheduling instruction for the second substrate PJ1-2 of the process job number PJ1 and the process job numbers PJ2 and PJ3 is generated (step S3), and the operations from step S4 are performed. That is, in response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. . Since there is a substrate PJ1-1 that has already started processing (step S5: YES), scheduling for the substrate PJ1-1 is performed (step S6). The result is the same as FIG.

  In step S7, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing units SPIN2 to SPIN4 is “0”, among the process job numbers PJ1 and PJ2 that use the processing unit SPIN2 with the smallest number, the process job number PJ1 that is instructed to start processing the earliest. Is evaluated.

  Since the scheduling for the substrate W of the process job number PJ1 has not been completed (step S7: YES), the temporary time table of the second substrate PJ1-2 of the process job number PJ1 is acquired from the storage unit 23 (step S7). S8). Since the scheduling for the other substrate PJ1-1 of the process job number PJ1 is performed (step S9: YES), the scheduling function unit 25 configures a temporary time table for the second substrate PJ1-2 of the process job number PJ1. The blocks to be processed are arranged (step S12).

  FIG. 18 shows an example in which blocks related to the second substrate PJ2-2 having the process job number PJ2 are arranged. A temporary time table representing a route passing through the processing unit SPIN2 having the earliest last use time is selected, and the blocks constituting the temporary time table are arranged on the time axis so as not to interfere with the already arranged blocks. Is done. Thus, when the scheduling of the substrate PJ1-2 is completed, the conveyance of the substrate PJ1-2 is started.

  When the substrate PJ1-2 is paid out from the substrate container C (step S21 in FIG. 5), since the substrate PJ1-2 is not the last substrate of the process job number PJ1 (step S22: NO), the process job number PJ1 is related. The right to use is maintained as it is. Then, a scheduling instruction for the third substrate PJ1-3 of the process job number PJ1 and the process job numbers PJ2 and PJ3 is generated (step S3), and the operation from step S4 is performed. That is, in response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. . Since there are substrates PJ1-1 and PJ1-2 that have already started processing (step S5: YES), scheduling for these substrates PJ1-1 and PJ1-2 is performed (step S6). The result is the same as FIG.

  In step S7, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing units SPIN3 to SPIN4 is “0”, among the process job numbers PJ2 and PJ3 that use the processing unit SPIN3 with the smallest number, the process job number PJ2 that is instructed to start processing the earliest. Is evaluated. However, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2 among the parallel processing units of the process job number PJ2, the determination at step S10 in FIG. 4 is made regarding the process job number PJ2. The result is negative, and it is determined as “not scheduled”. As a result, the process job number PJ3 becomes a scheduling target.

  Since the scheduling for the substrate W of the process job number PJ3 has not been completed (step S7: YES), the temporary time table of the first substrate PJ3-1 of the process job number PJ3 is acquired from the storage unit 23 (step S7). S8). Since the process job number PJ3 is not scheduled for another substrate W (step S9: NO), the right to use the parallel processing units SPIN3 to SPIN4 specified in the recipe of the process job number PJ3 is not set (step S9). (S10: YES), the scheduling function unit 25 sets the usage rights regarding these parallel processing units SPIN3 to SPIN4 to the substrate group of the process job number PJ3 (step S11). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ3-1 having the process job number PJ3 (steps S12 to S15). FIG. 19 shows an example in which blocks related to the first substrate PJ3-1 having the process job number PJ3 are arranged.

Thus, when the scheduling of the substrate PJ3-1 is completed, the conveyance of the substrate PJ3-1 is started.
By performing the same processing, scheduling for the second substrate PJ3-2 of the process job number PJ3 that uses the processing unit SPIN4 having the earliest final use time is performed. FIG. 20 shows an example in which blocks related to the second substrate PJ3-2 having the process job number PJ3 are arranged.

  When the substrate PJ3-2 is dispensed from the substrate container C (step S21 in FIG. 5), since the substrate PJ3-2 is the last substrate of the process job number PJ3 (step S22: YES), the process job number PJ3 is related. The usage right is deleted (step S23). Then, a scheduling instruction regarding the process job numbers PJ1 to PJ3 is generated (step S3), and the operation from step S4 is performed. That is, in response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. . Since there are substrates PJ1-1, PJ1-2, PJ3-1, and PJ3-2 that have already started processing (step S5: YES), these substrates PJ1-1, PJ1-2, PJ3-1, and PJ3-2. Is scheduled (step S6). The result is the same as FIG.

  In step S7, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing unit SPIN1 is the earliest among the processing units SPIN1 to SPIN4 used in any of the target process job numbers PJ1 to PJ3 (see FIG. 20), the process using the processing unit SPIN1 Of the job numbers PJ1 and PJ2, the process job number PJ1 instructed to start processing earliest is evaluated.

  Since the scheduling for the third and subsequent substrates of process job number PJ1 has not been completed (step S7: YES), the temporary time table of the third substrate PJ1-3 of process job number PJ1 is acquired from the storage unit 23. (Step S8). Since scheduling is performed for the other substrates PJ1-1 and PJ1-2 of the process job number PJ1 (step S9: YES), the scheduling function unit 25 temporarily sets the third substrate PJ1-3 of the process job number PJ1. Blocks constituting the time table are arranged (steps S12 to S15).

FIG. 21 shows an example in which blocks relating to the third substrate PJ1-3 having the process job number PJ1 are arranged. Since processing blocks have already been arranged for the processing unit SPIN1, the blocks constituting the temporary time table representing the route passing through the processing unit SPIN1 are left-justified on the time axis so as not to interfere with the already arranged blocks. Placed in.
Thus, when the scheduling of the substrate PJ1-3 is completed, the conveyance of the substrate PJ1-3 is started.

By performing the same processing, scheduling for the fourth substrate PJ1-4 of the process job number PJ1 using the processing unit SPIN2 with the earliest last use time is performed. FIG. 22 shows an example in which blocks relating to the fourth substrate PJ1-4 of process job number PJ1 are arranged.
Thus, when the scheduling of the substrate PJ1-4 is completed, the conveyance of the substrate PJ1-4 is started.

  When the substrate PJ1-4 is paid out from the substrate container C (step S21 in FIG. 5), since the substrate PJ1-4 is not the last substrate of the process job number PJ1 (step S22: YES), the process job number PJ1 is related. Use rights are maintained. Then, a scheduling instruction regarding the process job numbers PJ1 to PJ3 is generated (step S3), and the operation from step S4 is performed. That is, in response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. . Since there are the substrates PJ1-1 to PJ3-1 and PJ3-1 and 2 that have already started processing (step S5: YES), scheduling is performed for these substrates PJ1-1 to 4 and PJ3-1 and 2 (step S6). ). The result is the same as FIG.

  In step S7, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing unit SPIN3 is the earliest among the processing units SPIN1 to SPIN4 used in any of the target process job numbers PJ1 to PJ3 (see FIG. 22), the process using the processing unit SPIN3. Of the job numbers PJ2 and PJ3, the process job number PJ2 that is instructed to start processing the earliest is evaluated. However, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2 among the parallel processing units of the process job number PJ2, the determination at step S10 in FIG. 4 is made regarding the process job number PJ2. The result is negative, and it is determined as “not scheduled”. As a result, the process job number PJ1 is a scheduling target.

  Since the scheduling for the fifth and subsequent substrates of process job number PJ1 has not been completed (step S7: YES), a temporary time table for the fifth substrate PJ1-5 of process job number PJ1 is acquired from storage unit 23. (Step S8). Since the scheduling for the other substrate of the process job number PJ1 is performed (step S9: NO), the scheduling function unit 25 stores the blocks constituting the temporary time table of the fifth substrate PJ1-5 of the process job number PJ1. They are arranged (steps S12 to S15).

  FIG. 23 shows an example in which blocks related to the fifth substrate PJ1-5 of process job number PJ1 are arranged. Of the parallel processing units SPIN1 and SPIN2 of the process job number PJ1, the processing unit SPIN1 has the earliest last use time (see FIG. 22). Therefore, the blocks constituting the temporary time table representing the route passing through the processing unit SPIN1 are arranged on the time axis so as not to interfere with the already arranged blocks.

  By performing the same processing, it is planned that the sixth substrate PJ1-6 of process job number PJ1 is processed by the processing unit SPIN2 (see FIG. 24), and the seventh substrate PJ1-7 of process job number PJ1 is processed. Are planned to be processed by the processing unit SPIN1 (see FIG. 25), and the eighth substrate PJ1-8 of the process job number PJ1 is planned to be processed by the processing unit SPIN2 (see FIG. 26).

  When the substrate PJ1-8 is dispensed from the substrate container C (step S21 in FIG. 5: YES), since the substrate PJ1-8 is the last substrate of the process job number PJ1 (step S22: YES), the process job number The usage right for PJ1 is deleted (step S23). Then, a scheduling instruction regarding the process job numbers PJ1 to PJ3 is generated (step S3: YES). At this time, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing unit SPIN3 is the earliest among the processing units SPIN1 to SPIN4 used in any of the target process job numbers PJ1 to PJ3, the process job numbers PJ2 and PJ3 using the processing unit SPIN3 are used. Among these, the process job number PJ2 instructed to start processing the earliest is evaluated.

  In response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. Since there are substrates PJ1-1 through PJ3-1 and PJ3-1 and 2 that have already started processing (step S5: YES), scheduling is performed for these substrates PJ1-1 through 8 and PJ3-1 and 2 (step S6). ). The result is the same as FIG.

  Since the scheduling for the substrate of the process job number PJ2 has not been completed (step S7: YES), the temporary time table (passing through the processing unit SPIN3) of the first substrate PJ2-1 of the process job number PJ2 is stored in the storage unit. 23 (step S8). Scheduling for other substrates of process job number PJ2 has not been completed (step S9: NO), and the usage rights for the parallel processing units SPIN1 to SPIN4 designated in the recipe of process job number PJ2 have not been set (step S10). : YES), the scheduling function unit 25 sets the usage rights related to the parallel processing units SPIN1 to SPIN4 to the substrate group of the process job number PJ2 (step S11). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ2-1 having the process job number PJ2 (steps S12 to S15).

  FIG. 27 shows an example in which blocks relating to the first substrate PJ2-1 having the process job number PJ2 are arranged. Since the right to use the process job number PJ1 for the processing units SPIN1 to SPIN2 is not deleted until the conveyance of the last substrate PJ1-8 of the process job number PJ1 is started, the block relating to the substrate PJ2-1 uses the substrate PJ1-8 as a substrate container. It is arranged later on the time axis than the block that specifies the operation of paying out from C. Therefore, there is no plan that the process for the substrate PJ2-1 overtakes the process for the substrate PJ1-8.

By performing the same processing, the second substrate PJ2-2 of the process job number PJ2 is planned to be processed by the processing unit SPIN4 (see FIG. 28).
When the substrate PJ2-2 is paid out from the substrate container C (step S21 in FIG. 5: YES), since the substrate PJ2-2 is the last substrate of the process job number PJ2 (step S22: YES), the process job number The usage right relating to PJ2 is deleted (step S23). Thus, the scheduling for all target substrates is completed (step S17).

  As described above, according to this embodiment, the right to use a processing unit (parallel processing unit) designated by a recipe corresponding to a process job number is assigned to a group of substrates assigned a common process job number. Is set. When this usage right is set, only processing blocks representing processing for the substrate of the process job number for which the usage right is set can be placed as processing blocks representing processing by the processing unit. Arrangement of the processing blocks representing the processing for the numbered substrates is prohibited. Therefore, when a substrate with a certain process job number is processed in one processing unit, it can be guaranteed that processing for a substrate with another process job number is not interrupted. If the right to use a processing unit for a certain process job number is deleted, setting of the right to use the processing unit for another process job number is allowed. Thus, by setting and deleting the usage right, in one processing unit, it is possible to avoid interrupting processing of a substrate of another process job number during processing of a substrate of a certain process job number. The processing unit as the resource of the apparatus can be operated efficiently. As a result, it is possible to efficiently arrange processing blocks for individual substrates on the time axis and increase the operating rate of resources such as a single wafer processing unit, thereby improving the productivity of the single substrate processing apparatus. .

  Even when the usage right is set for a certain process job number, if there is another process job number that designates only a processing unit for which no usage right is set as a parallel processing unit, the other process Usage rights can be set for job numbers. Thereby, the operation efficiency of resources, such as a processing unit, can be improved further. If the last usage time of a processing unit for which usage rights have not been set is earlier than the last usage time for a processing unit for which usage rights have been set, the usage rights are set for the process job number that uses the processing unit for which usage rights have not been set. Thus, the substrate processing of the process job number can be started. Thereby, the operation rate of a processing unit can further be raised.

FIG. 29 is a schematic plan view showing a layout of a substrate processing apparatus according to another embodiment of the present invention, and FIG. 30 is a schematic side view thereof. 29 and FIG. 30, the same reference numerals are assigned to the corresponding portions of the respective parts shown in FIG. 1 and FIG.
In this embodiment, each of the hands 8A and 8B of the indexer robot IR has two substrate holders, and these substrate holders can be switched and used. More specifically, each hand 8A, 8B has a first substrate holding unit and a second substrate holding unit, and a first state in which the substrate W is held by the first substrate holding unit, and a second substrate holding It is configured to be switchable between a second state where the substrate W is held by the portion. For example, when the unprocessed substrate W is held, the first state is controlled, and when the processed substrate W is held, the second state is controlled. With this configuration, the indexer robot IR holds and transports two unprocessed substrates W simultaneously with the two hands 8A and 8B, both of which are in the first state, or two hands 8A of which both are in the second state. And 8B, the two processed substrates W can be simultaneously held and transported. A specific configuration example of an example of such a substrate transport robot is described in Patent Document 3, for example.

  Further, in this embodiment, the main transport robot CR has four hands 13A, 13B, 13C, and 13D. These four hands 13A, 13B, 13C, and 13D are coupled to the articulated arm 12. The multi-joint arm 12 includes a rotation driving mechanism that independently rotates the four hands 13A, 13B, 13C, and 13D around the vertical axis, and the four hands 13A, 13B, 13C, and 13D independently. An advance / retreat drive mechanism for advancing / retreating in the horizontal direction is provided. For example, the operation of the main transport robot CR so that the two hands 13A and 13B are used for transporting the unprocessed substrate W and the two hands 13C and 13D are used for transport of the processed substrate W. Is controlled.

Other configurations are the same as those shown in FIGS. 1 and 2 and the like, and the configuration for controlling the substrate processing apparatus is the same as the configuration shown in FIG.
FIGS. 31 and 32 are flowcharts for explaining a processing example (second embodiment) by the scheduling function unit 25. More specifically, a process performed by the control unit 21 (computer 20) executing the schedule creation program 31 is shown. In other words, the schedule creation program 31 includes a group of steps so as to cause the computer to execute the processes shown in FIGS. 31 and 32, the same reference numerals are assigned to steps in which the same processing as the steps shown in FIGS. 4 and 5 is performed.

  When an instruction for starting the substrate processing is given from the host computer 24 or the input / output unit 22 by the operator (step S1), the scheduling function unit 25 displays a temporary time table for all the substrates W to which the substrate processing start instruction is given. Create (step S2). The substrate processing start instruction may be issued for all the substrates W accommodated in the substrate container C as a unit. The substrate processing start instruction may be an instruction to start processing of the substrate W to which one or more process job numbers are assigned.

  For example, it is assumed that a recipe associated with a certain process job number in the processing content data specifies parallel processing of the processing units SPIN1 to SPIN4. That is, consider a case where the substrate processing according to the recipe can be executed in any of the four processing units SPIN1 to SPIN4. In this case, there are four paths through which the substrate W to which the process job number is assigned undergoes processing. That is, the paths that can be selected for processing the substrate W are four paths that pass through any one of the processing units SPIN1 to SPIN4. Therefore, the scheduling function unit 25 creates a temporary time table corresponding to the four routes. The temporary time table created in this way is a temporary time table similar to the temporary time table of FIG.

  A similar temporary time table is created corresponding to all the substrates W to which the same process job number is assigned. For example, if there are four substrates W to which the same process job number is assigned, a temporary time table for a total of 16 paths (4 paths × 4 sheets) is created. Furthermore, when there are a plurality of process job numbers that are instructed to start at the same time, the same processing is performed for all the process job numbers to create a temporary time table. The temporary time table created in this way is stored in the storage unit 23 as part of the schedule data 50. In the stage of creating the temporary timetable, interference with the block relating to another substrate W (overlap on the time axis) is not considered.

  When a scheduling instruction is generated (step S3), blocks relating to the substrate W of the process job number are arranged (overall scheduling, steps S4 to S18). Specifically, the scheduling function unit 25 reads the temporary time table of the substrate W from the storage unit 23 and arranges the blocks constituting the temporary time table on the time axis.

  More specifically, the scheduling function unit 25 receives processing instruction data (process job numbers) for all the substrates W that manage the substrate processing procedure in the scheduling function unit 25 when an instruction to start the substrate processing is given. And a recipe) are acquired from the memory | storage part 23 (step S4). Furthermore, the scheduling function unit 25 determines whether there is a substrate W that has been unloaded from the substrate container C and has started processing (step S5). If the processing of any substrate W has not been started (step S5: NO), the scheduling function unit 25 is waiting at the stage ST among the substrates W corresponding to the processing content data acquired from the storage unit 23, It is then determined whether there is a substrate W that has not been scheduled (step S7).

If this determination is affirmed, the scheduling function unit 25 further determines whether or not the indexer robot IR has performed scheduling for the unprocessed substrates W for the number of sheets that can be transferred at one time (two in this embodiment) ( Step S18). If this determination is affirmed, the scheduling is temporarily ended (step S17).
When scheduling of the unprocessed substrates W for the number of sheets that can be transported at one time has not been completed (step S18: NO), the scheduling function unit 25 has the youngest substrate W in the processing order among the substrates W that have not been scheduled. Is a scheduling target substrate W, and data (processing content data and schedule data) relating to the scheduling target substrate W is acquired from the storage unit 23 (step S8). Usually, the processing order is younger as the substrate W is located on the upper side of the substrate container C.

  Next, the scheduling function unit 25 determines whether or not scheduling has already been performed for another substrate W to which a process job number common to the scheduling target substrate W from which data has been acquired has been assigned (step S9). When the first substrate of a certain process job number is the scheduling target substrate W, this determination is denied. Then, the scheduling function unit 25 refers to the recipe corresponding to the scheduling target substrate W, and all the parallel processing units specified in the recipe can be used. That is, the usage right is set for any of the parallel processing units. It is judged whether it is not (step S10).

  Immediately after starting the scheduling, since no usage right is set, the determination in step S10 is affirmed. In this case, the scheduling function unit 25 sets a usage right for all the parallel processing units specified in the recipe corresponding to the process job number of the scheduling target substrate W (step S11). For example, if parallel processing in the processing units SPIN1 to SPIN4 is specified in the recipe, the right to use the processing units SPIN1 to SPIN4 is set for the substrate group of the process job number PJ1 to which the scheduling target substrate W belongs. While this usage right is set, the processing blocks of the substrate group having other process job numbers cannot be placed in the processing units SPIN1 to SPIN4. That is, regarding the substrate W of another process job that designates the processing unit for which the right to use the process job number PJ1 is set as the parallel processing unit, the determination in step S10 is denied and the substrate is not scheduled Scheduling is prohibited. When another substrate W of the process job number for which the usage right is set becomes the scheduling target substrate W, the determination in step S9 is affirmed, and the processing in steps S10 and S11 is omitted.

  Next, the scheduling function unit 25 executes scheduling for the scheduling target substrate W. Specifically, the scheduling function unit 25 refers to the temporary time table corresponding to the scheduling target substrate W, and acquires one block constituting the temporary time table (step S12). The block acquired at this time is the block arranged at the earliest position on the time axis of the temporary time table among the unallocated blocks. Further, the scheduling function unit 25 searches for a position where the acquired block can be arranged (step S13), and arranges the block at the searched position (step S14). Each block is arranged at the earliest position on the time axis while preventing the same resource from being used repeatedly at the same time. A similar operation is repeatedly executed for all blocks constituting the temporary time table (step S15). When all blocks constituting the temporary time table have been arranged (step S15: YES), the scheduling function unit 25 calculates the last use time of each processing unit and stores the calculation result in the storage unit 23. (Step S16). The initial value of the last use time is “0”. Thereafter, the processing from step S7 is repeated. When scheduling for all substrates W of all process job numbers instructed to start processing is completed (step S7: NO), overall scheduling is completed.

  FIG. 32 is a flowchart for explaining another process performed by the scheduling function unit 25 in parallel with the process of FIG. When the substrate W is dispensed from the substrate container C by the indexer robot IR (step S21), the scheduling function unit 25 determines whether the substrate W is the last substrate in the substrate group to which a common process job number is given. Judgment is made (step S22). If it is the last substrate (step S22: YES), the scheduling function unit 25 deletes the usage right set for the substrate group of the process job number (step S23). If it is not the last substrate (step S22: NO), the usage right is not deleted.

  FIGS. 33 to 44 show an example of scheduling for three substrate groups (process jobs) assigned process job numbers PJ1, PJ2, and PJ3. It is assumed that the substrate group of process job number PJ1 is composed of eight substrates W, and two processing units SPIN1 and SPIN2 are designated as parallel processing units by the recipe in the processing content data. Further, it is assumed that the substrate group of the process job number PJ2 includes two substrates W, and four processing units SPIN1 to SPIN4 are designated as parallel processing units by a recipe in the processing content data. Further, it is assumed that the substrate group of the process job number PJ3 includes two substrates W, and two processing units SPIN3 to SPIN4 are designated as parallel processing units by the recipe in the processing content data. A case is assumed in which processing is started for the substrate groups of process job numbers PJ1, PJ2, and PJ3 in the order of the numbers, and a scheduling instruction is generated. In the drawing showing the scheduling progress or result such as FIG. 33, the hands 13A, 13B, 13C and 13D of the main transfer robot CR are expressed as “CR1”, “CR2”, “CR3” and “CR4”, respectively. is there.

  When a substrate processing start instruction is given (step S1 in FIG. 31), the scheduling function unit 25 creates a temporary time table. In other words, the scheduling function unit 25 creates a temporary time table that represents a route passing through the processing unit SPIN1 or SPIN2 for the eight substrates W having the process job number PJ1. In addition, the scheduling function unit 25 creates a temporary time table representing a route passing through any one of the processing units SPIN1 to SPIN4 for the two substrates W having the process job number PJ2. Further, the scheduling function unit 25 creates a provisional time table that represents a route passing through the processing unit SPIN3 or SPIN4 for the two substrates W having the process job number PJ3. The created temporary time table is stored in the storage unit 23.

  When the start of processing for the process job numbers PJ1, PJ2, and PJ3 is instructed in order and a scheduling instruction is generated in response thereto (step S3 in FIG. 31), the scheduling function unit 25 stores all the temporary times stored in the storage unit 23. The table, that is, the temporary time table of all the substrates W corresponding to the process job numbers PJ1 to PJ3 is read, and the entire scheduling is started. Since there is no other substrate W that has already started processing (step S5: NO), the scheduling function unit 25 searches for the processing unit with the earliest last use time. Initially, since the last use time of any of the processing units is “0”, the process job number PJ1 that is instructed to start processing first among the process jobs that use the processing unit SPIN1 with the smallest number is evaluated. . In this case, the scheduling for the substrate W of the process job number PJ1 has not been completed (step S7: YES), and the scheduling of the unprocessed substrate W that is equal to or greater than the number of simultaneous transfer of the indexer robot IR (2 in this embodiment) has not been completed. Therefore (step S18: NO), the scheduling function unit 25 acquires the temporary time table of the first substrate PJ1-1 having the process job number PJ1 from the storage unit 23 (step S8).

  Scheduling for the other substrate W of the process job number PJ1 is not performed (step S9: NO), and the right to use is not set for any of the processing units (step S10: YES). Sets the usage rights for the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1 for the substrate group of the process job number PJ1 (step S11).

Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ1-1 having the process job number PJ1 (steps S12 to S15). Then, the last use time of each processing unit is calculated and stored in the storage unit 23 (step S16).
FIG. 33 shows an example in which blocks relating to the first substrate PJ1-1 of the process job number PJ1 are arranged. Since none of the processing units is in use, a temporary time table representing a route passing through the processing unit SPIN1 is selected, and blocks constituting the temporary time table are arranged on the time axis in front-alignment.

The scheduling function unit 25 performs the processing from step S7 after the processing in step S16 of FIG.
In step S7, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing units SPIN2 to SPIN4 is “0”, among the process job numbers PJ1 and PJ2 that use the processing unit SPIN2 with the smallest number, the process job number PJ1 that is instructed to start processing the earliest. Is evaluated.

  Scheduling for the substrate W of the process job number PJ1 has not been completed (step S7: YES), and the number of scheduled substrates W is less than the number of simultaneous transfer of the indexer robot IR (2 in this embodiment) (step S18). : NO), the scheduling function unit 25 acquires the temporary time table of the second substrate PJ1-2 of the process job number PJ1 from the storage unit 23 (step S8). Since the scheduling for the other substrate PJ1-1 of the process job number PJ1 is performed (step S9: YES), the scheduling function unit 25 configures a temporary time table for the second substrate PJ1-2 of the process job number PJ1. The blocks to be processed are arranged (steps S12 to S15).

  FIG. 34 shows an example in which blocks relating to the second substrate PJ1-2 having the process job number PJ1 are arranged. Since a processing block for the first substrate PJ1-1 is arranged for the parallel processing unit SPIN1, a temporary time table representing a route passing through the processing unit SPIN2 is selected. The blocks constituting the temporary time table are arranged on the time axis so as not to interfere with the already arranged blocks. Since the hands 8A and 8B of the indexer robot IR can simultaneously transport the substrate W, the blocks representing the substrate transport by these hands 8A and 8B are arranged so as to overlap on the time axis.

Thus, when the scheduling of the two substrates PJ1-1 and PJ1-2 is completed, the conveyance of the substrates PJ1-1 and PJ1-2 is started.
When the substrates PJ1-1 and PJ1-2 are paid out from the substrate container C (step S21 in FIG. 32), since the substrate PJ1-2 is not the last substrate of the process job number PJ1 (step S22: NO), the process job The right to use the number PJ1 is maintained as it is. Then, a scheduling instruction regarding the third substrate PJ1-3 of the process job number PJ1 and the process job numbers PJ2 and PJ3 is generated (step S3: YES), and the operation from step S4 is performed. That is, in response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. . Since there are substrates PJ1-1 and PJ1-2 that have already started processing (step S5: YES), scheduling for these substrates PJ1-1 and PJ1-2 is performed (step S6). The result is the same as FIG.

On the other hand, before this scheduling instruction is generated, the scheduling function unit 25 performs the processing from step S7 after the processing in step S16 of FIG.
In step S7, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing units SPIN3 to SPIN4 is “0”, among the process job numbers PJ2 and PJ3 that use the processing unit SPIN3 with the smallest number, the process job number PJ2 instructed to start processing the earliest Is evaluated. However, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2 among the parallel processing units of the process job number PJ2, the process job number PJ2 is determined in step S10 in FIG. The result is negative, and it is determined as “not scheduled”. As a result, the process job number PJ3 becomes a scheduling target.

  Since the scheduling for the substrate W of the process job number PJ3 has not been completed, the determination in step S7 is affirmed. On the other hand, if the delivery of the substrates PJ1-1 and PJ1-2 that are simultaneously transported by the hands 8A and 8B of the indexer robot IR is not completed, the number of scheduled substrates W is the number of simultaneous transports of the indexer robot IR (this embodiment). Then, 2) is reached, the determination in step S18 is affirmed, and the scheduling ends (step S17).

  When the scheduling instruction is issued after the dispensing of the substrates PJ1-1 and PJ1-2 is completed by the hands 8A and 8B of the indexer robot IR, the scheduled number of substrates is reset and the determination in step S18 is denied. Thereby, the scheduling function unit 25 acquires the temporary time table of the first substrate PJ3-1 having the process job number PJ3 from the storage unit 23 (step S8). Since the process job number PJ3 is not scheduled for another substrate W (step S9: NO), the right to use the parallel processing units SPIN3 to SPIN4 specified in the recipe of the process job number PJ3 is not set (step S9). (S10: YES), the scheduling function unit 25 sets the usage rights regarding these parallel processing units SPIN3 to SPIN4 to the substrate group of the process job number PJ3 (step S11).

Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ3-1 having the process job number PJ3 (steps S12 to S15).
FIG. 35 shows an example in which blocks relating to the first substrate PJ3-1 of process job number PJ3 are arranged. Since none of the processing units SPIN3 and SPIN4 is in use, a temporary time table representing a route passing through the processing unit SPIN3 is selected, and blocks of the temporary time table are arranged.

  By performing the same processing, scheduling for the second substrate PJ3-2 of the process job number PJ3 that uses the processing unit SPIN4 having the earliest final use time is performed. FIG. 36 shows an example in which blocks relating to the second substrate PJ3-2 having the process job number PJ3 are arranged. Since a processing block for the first substrate PJ3-1 is arranged for the parallel processing unit SPIN3, a temporary time table indicating a route passing through the processing unit SPIN4 is selected, and the block of the temporary time table is displayed. Has been placed.

Thus, when the scheduling of the two substrates PJ3-1 and PJ3-2 is completed, the conveyance of the substrates PJ3-1 and PJ3-2 is started.
When the substrates PJ3-1 and PJ3-2 are paid out from the substrate container C (step S21 in FIG. 32), since the substrate PJ3-2 is the last substrate of the process job number PJ3 (step S22: YES), the process job The usage right for the number PJ3 is deleted (step S23). Then, a scheduling instruction regarding the process job numbers PJ1 to PJ3 is generated (step S3), and the operation from step S4 is performed.

  That is, in response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. . Since there are substrates PJ1-1, PJ1-2, PJ3-1, and PJ3-2 that have already started processing (step S5: YES), these substrates PJ1-1, PJ1-2, PJ3-1, and PJ3-2. Is scheduled (step S6). The result is the same as FIG.

On the other hand, before this scheduling instruction is generated, the scheduling function unit 25 performs the processing from step S7 after the processing in step S16 of FIG.
In step S7, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing unit SPIN1 is the earliest among the processing units SPIN1 to SPIN4 used in any of the target process job numbers PJ1 to PJ3, the process job numbers PJ1 and PJ2 that use the processing unit SPIN1 Among these, the process job number PJ1 that is instructed to start processing the earliest is evaluated.

  Since the scheduling for the third and subsequent substrates of process job number PJ1 has not been completed (step S7: YES), the determination in step S7 is affirmed. On the other hand, if the payout of the substrates PJ3-1 and PJ3-2 that are simultaneously transported by the hands 8A and 8B of the indexer robot IR has not been completed, the number of scheduled substrates W is equal to the number of simultaneous transports of the indexer robot IR (this embodiment). Then, 2) is reached, the determination in step S18 is affirmed, and the scheduling ends (step S17).

  When the scheduling instruction is generated after the dispensing of the substrates PJ3-1 and PJ3-2 is completed by the hands 8A and 8B of the indexer robot IR, the scheduled number of substrates is reset and the determination in step S18 is denied. Thereby, the scheduling function unit 25 acquires the temporary time table of the third substrate PJ1-3 having the process job number PJ1 from the storage unit 23 (step S8). Since scheduling is performed for the other substrates PJ1-1 and PJ1-2 of the process job number PJ1 (step S9: YES), the scheduling function unit 25 temporarily sets the third substrate PJ1-3 of the process job number PJ1. Blocks constituting the time table are arranged (steps S12 to S15).

FIG. 37 shows an example in which blocks relating to the third substrate PJ1-3 having the process job number PJ1 are arranged. Since processing blocks have already been arranged for the processing unit SPIN1, the blocks constituting the temporary time table representing the route passing through the processing unit SPIN1 are left-justified on the time axis so as not to interfere with the already arranged blocks. Placed in.
By performing the same processing, scheduling for the fourth substrate PJ1-4 of the process job number PJ1 using the processing unit SPIN2 with the earliest last use time is performed. FIG. 38 shows an example in which blocks relating to the fourth substrate PJ1-4 of process job number PJ1 are arranged. A temporary time table representing a route passing through the processing unit SPIN2 is selected, and a block of the temporary time table is arranged.

Thus, when the scheduling of the two substrates PJ1-3 and PJ1-4 is completed, the conveyance of the substrates PJ1-3 and PJ1-4 is started.
When the substrates PJ1-3 and PJ1-4 are paid out from the substrate container C (step S21 in FIG. 32), the substrate PJ1-4 is not the last substrate of the process job number PJ1 (step S22: YES). The usage rights for the number PJ1 are maintained. Then, a scheduling instruction regarding the process job numbers PJ1 to PJ3 is generated (step S3), and the operation from step S4 is performed.

  That is, in response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. . Since there are the substrates PJ1-1 to PJ3-1 and PJ3-1 and 2 that have already started processing (step S5: YES), scheduling is performed for these substrates PJ1-1 to 4 and PJ3-1 and 2 (step S6). ). The result is the same as FIG.

On the other hand, before this scheduling instruction is generated, the scheduling function unit 25 performs the processing from step S7 after the processing in step S16 of FIG.
In step S7, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing unit SPIN3 is the earliest among the processing units SPIN1 to SPIN4 used in any of the target process job numbers PJ1 to PJ3 (see FIG. 38), the process using the processing unit SPIN3. Of the job numbers PJ2 and PJ3, the process job number PJ2 that is instructed to start processing the earliest is evaluated. However, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2 among the parallel processing units of the process job number PJ2, the process job number PJ2 is determined in step S10 in FIG. The result is negative, and it is determined as “not scheduled”. As a result, the process job number PJ1 is a scheduling target. Then, among the parallel processing units SPIN1 and SPIN2 designated by the recipe of the process job number PJ1, the evaluation is performed for the processing unit SPIN1 having the earliest last use time.

  Since the scheduling for the fifth and subsequent substrates of process job number PJ1 has not been completed (step S7: YES), the determination in step S7 is affirmed. On the other hand, if the payout of the substrates PJ3-1 and PJ3-2 that are simultaneously transported by the hands 8A and 8B of the indexer robot IR has not been completed, the number of scheduled substrates W is equal to the number of simultaneous transports of the indexer robot IR (this embodiment). Then, 2) is reached, the determination in step S18 is affirmed, and the scheduling ends (step S17).

  When the scheduling instruction is issued after the dispensing of the substrates PJ1-3 and PJ1-4 is completed by the hands 8A and 8B of the indexer robot IR, the scheduled number of substrates is reset and the determination in step S18 is denied. Thereby, the scheduling function unit 25 acquires the temporary time table of the fifth substrate PJ1-5 of the process job number PJ1 from the storage unit 23 (step S8). Since the scheduling for other substrates of the process job number PJ1 has been performed (step S9: YES), the scheduling function unit 25 selects blocks constituting the temporary time table of the fifth substrate PJ1-5 of the process job number PJ1. They are arranged (step S12). In this case, a temporary time table is used that represents a path that passes through the processing unit SPIN1 whose last use time is the earliest among the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process jeb number PJ1.

FIG. 39 shows an example in which blocks relating to the fifth substrate PJ1-5 of process job number PJ1 are arranged. Since processing blocks have already been arranged for the processing unit SPIN1, the blocks constituting the temporary time table representing the route passing through the processing unit SPIN1 are left-justified on the time axis so as not to interfere with the already arranged blocks. Placed in.
By performing the same processing, it is planned that the sixth substrate PJ1-6 of the process job number PJ1 is processed by the processing unit SPIN2 (see FIG. 40), and the seventh substrate PJ1-7 of the process job number PJ1 is processed. Are planned to be processed by the processing unit SPIN1 (see FIG. 41), and the eighth substrate PJ1-8 of the process job number PJ1 is planned to be processed by the processing unit SPIN2 (see FIG. 42).

  When the substrates PJ1-7 and PJ1-8 are paid out from the substrate container C (step S21 in FIG. 32), since the substrate PJ1-8 is the last substrate of the process job number PJ1 (step S22: YES), the process The usage right relating to the job number PJ1 is deleted (step S23). Then, a scheduling instruction regarding the process job numbers PJ1 to PJ3 is generated (step S3: YES). At this time, the scheduling function unit 25 searches for the processing unit with the earliest last use time. In this case, since the last use time of the processing unit SPIN3 is the earliest among the processing units SPIN1 to SPIN4 used in any of the target process job numbers PJ1 to PJ3, the process job numbers PJ2 and PJ3 using the processing unit SPIN3 are used. Among these, the process job number PJ2 instructed to start processing the earliest is evaluated.

  In response to the generation of the scheduling instruction, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3. Since there are substrates PJ1-1 through PJ3-1 and PJ3-1 and 2 that have already started processing (step S5: YES), scheduling is performed for these substrates PJ1-1 through 8 and PJ3-1 and 2 (step S6). ). The result is the same as FIG.

  Since the scheduling for the substrate of the process job number PJ2 has not been completed (step S7: YES), the determination in step S7 is affirmed. On the other hand, when the scheduling instruction is generated after the dispensing of the substrates PJ1-7 and PJ1-8 is completed by the hands 8A and 8B of the indexer robot IR, the scheduled number of substrates is reset, and the determination in step S18 is denied. As a result, the scheduling function unit 25 obtains a temporary time table (passing through the processing unit SPIN3) of the first substrate PJ2-1 having the process job number PJ2 from the storage unit 23 (step S8). Scheduling for other substrates of process job number PJ2 has not been completed (step S9: NO), and the usage rights for the parallel processing units SPIN1 to SPIN4 designated in the recipe of process job number PJ2 have not been set (step S10). : YES), the scheduling function unit 25 sets the usage rights related to the parallel processing units SPIN1 to SPIN4 to the substrate group of the process job number PJ2 (step S11). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ2-1 having the process job number PJ2 (steps S12 to S15).

  FIG. 43 shows an example in which blocks relating to the first substrate PJ2-1 having the process job number PJ2 are arranged. The right to use the process job number PJ1 for the processing units SPIN1 and SPIN2 is not deleted until the last substrate PJ1-8 of the process job number PJ1 is transported. It is arranged later on the time axis than the block that specifies the operation of paying out from C. Therefore, there is no plan that the process for the substrate PJ2-1 overtakes the process for the substrate PJ1-8.

By performing the same processing, the second substrate PJ2-2 of the process job number PJ2 is planned to be processed by the processing unit SPIN4 (see FIG. 44).
When the two substrates PJ2-1 and PJ2-2 are paid out from the substrate container C (step S21 in FIG. 32), the substrate PJ2-2 is the last substrate of the process job number PJ2 (step S22: YES). The usage right for the process job number PJ2 is deleted (step S23). Thus, scheduling for all target substrates is completed (step S7: NO, step S17).

  As described above, according to this embodiment, in addition to the same effects as those of the first embodiment, the following effects can be obtained. That is, since the indexer robot IR and the two substrates W can be simultaneously transferred, the transfer blocks representing the transfer of the two substrates are arranged on the time axis so as to overlap each other with respect to the indexer robot IR. Thereby, since the simultaneous conveyance of two substrates can be planned, the substrate conveyance efficiency can be increased, and thereby the productivity of the substrate processing apparatus can be increased.

  FIG. 45 is a diagram for explaining still another embodiment of the present invention, and is a flowchart for explaining a processing example (third embodiment) by the scheduling function unit 25. The configuration of the substrate processing apparatus in this embodiment is as shown in FIGS. 29 and 30, and the electrical configuration is the same as that shown in FIG. FIG. 45 illustrates processing performed by the control unit 21 (computer 20) executing the schedule creation program 31. In other words, the schedule creation program 31 includes a group of steps so as to cause the computer to execute the processing shown in FIG.

  When an instruction to start substrate processing is given from the host computer 24 or the input / output unit 22 by the operator (step S31), the scheduling function unit 25 displays temporary timetables for all the substrates W to which the substrate processing start instruction is given. Create (step S32). The substrate processing start instruction may be issued for all the substrates W accommodated in the substrate container C as a unit. The substrate processing start instruction may be an instruction to start processing of the substrate W to which one or more process job numbers are assigned.

  For example, it is assumed that a recipe associated with a certain process job number in the processing content data specifies parallel processing of the processing units SPIN1 to SPIN4. That is, consider a case where the substrate processing according to the recipe can be executed in any of the four processing units SPIN1 to SPIN4. In this case, there are four paths through which the substrate W to which the process job number is assigned undergoes processing. That is, the paths that can be selected for processing the substrate W are four paths that pass through any one of the processing units SPIN1 to SPIN4. Therefore, the scheduling function unit 25 creates a temporary time table corresponding to the four routes. The temporary time table created in this way is a table similar to the temporary time table of FIG.

  A similar temporary time table is created corresponding to all the substrates W to which the same process job number is assigned. For example, if there are four substrates W to which the same process job number is assigned, a temporary time table for a total of 16 paths (4 paths × 4 sheets) is created. Furthermore, when there are a plurality of process job numbers that are instructed to start at the same time, the same processing is performed for all the process job numbers to create a temporary time table. The temporary time table created in this way is stored in the storage unit 23 as part of the schedule data 50. In the stage of creating the temporary timetable, interference with the block relating to another substrate W (overlap on the time axis) is not considered.

  When a scheduling instruction is generated (step S33: YES), blocks relating to the processing of the substrate W are arranged (overall scheduling; steps S34 to S52). Specifically, the scheduling function unit 25 reads the temporary time table of the substrate W from the storage unit 23 and arranges the blocks constituting the temporary time table on the time axis.

  More specifically, the scheduling function unit 25 receives processing instruction data (process job numbers) for all the substrates W that manage the substrate processing procedure in the scheduling function unit 25 when an instruction to start the substrate processing is given. And a recipe) are acquired from the memory | storage part 23 (step S34). Furthermore, the scheduling function unit 25 determines whether there is a substrate W that has been unloaded from the substrate container C and has started processing (step S35). If the processing of any substrate W has not been started (step S35: NO), the scheduling function unit 25 is waiting at the stage ST among the substrates W corresponding to the processing content data acquired from the storage unit 23, It is then determined whether there is a substrate W that has not been scheduled (step S37). If this determination is affirmed, the scheduling function unit 25 further determines whether or not the indexer robot IR has performed scheduling for the unprocessed substrates W for the number of sheets that can be transferred at one time (two in this embodiment) ( Step S38). If this determination is affirmed, the scheduling is temporarily finished.

  When scheduling of unprocessed substrates W for the number of sheets that can be transferred at one time has not been completed (step S38: NO), the scheduling function unit 25 has the youngest substrate W in the processing order among the substrates W that have not been scheduled. Is a scheduling target substrate W, and data (processing content data and schedule data) relating to the scheduling target substrate W is acquired from the storage unit 23 (step S39). Usually, the processing order is younger as the substrate W is located on the upper side of the substrate container C.

  Next, the scheduling function unit 25 determines whether or not at least one of the parallel processing units specified in the recipe data corresponding to the process job number of the scheduling target substrate W is usable, that is, the right to use another process job number. Whether or not is set is determined (step S40). When scheduling is performed for the first substrate W, the right to use is not set for any processing unit. Therefore, the scheduling function unit 25 identifies the processing unit with the smallest last use time among the available processing units (step S41). The initial value of the last use time of each processing unit is “0”. When there are a plurality of processing units having the minimum last use time, for example, a processing unit having a smaller number may be selected.

  Next, the scheduling function unit 25 has another unscheduled process job (a board group to which a common process job number is assigned) to which a scheduling instruction is given after the scheduling target board W, and the process job It is determined whether at least one of the parallel processing units specified in the recipe is usable, that is, whether the usage right is not set (step S42). If there is no scheduling instruction for another process job, this determination is denied, and the scheduling function unit 25 applies to the parallel processing unit (but usable) designated for the process job number of the scheduling target substrate W. Then, the right to use the process job is set (step S43).

  For example, if parallel processing in the processing units SPIN1 to SPIN4 is specified in the recipe, as shown in FIG. 46, the processing units SPIN1 to SPIN4 are assigned to the substrate group of the process job number PJ1 to which the scheduling target substrate W belongs. Usage rights are set. While this usage right is set, the processing blocks of the substrate group having other process job numbers cannot be placed in the processing units SPIN1 to SPIN4.

  Next, the scheduling function unit 25 executes scheduling for the scheduling target substrate W. Specifically, the scheduling function unit 25 refers to the temporary time table corresponding to the scheduling target substrate W, and acquires one block constituting the temporary time table (step S44). The block acquired at this time is the block arranged at the earliest position on the time axis of the temporary time table among the unallocated blocks. Further, the scheduling function unit 25 searches for a position where the acquired block can be arranged (step S45), and arranges the block at the searched position (step S46). Each block is arranged at the earliest position on the time axis while preventing the same resource from being used repeatedly at the same time. A similar operation is repeatedly executed for all blocks constituting the temporary time table (step S47). When all the blocks constituting the temporary time table have been arranged (step S47: YES), the scheduling function unit 25 calculates the last use time of each processing unit after the execution of the scheduled processing block, The calculation result is stored in the storage unit 23 (step S48). The initial value of the last use time is “0”.

  Next, the scheduling function unit 25 determines whether the scheduling target substrate W is the last substrate in the substrate group to which the common process job number is given (step S49). If it is the last substrate (step S49: YES), the scheduling function unit 25 deletes the usage right set for the substrate group of the process job number (step S50). If it is not the last substrate (step S49: NO), the usage right is not deleted. Thereafter, the processing from step S37 is repeated. When scheduling for all substrates W of all process job numbers instructed to start processing is completed (step S37: NO), overall scheduling is completed (step S53).

  FIG. 46 shows an example in which all the blocks constituting the temporary time table corresponding to the first substrate PJ1-1 of the process job number PJ1 are arranged. The scheduling function unit 25 arranges the blocks so that the blocks do not overlap in the same resource space. Since it is the first board scheduling, no processing unit is in use, so a temporary time table representing a route passing through the processing unit SPIN1 is selected, and the blocks constituting the temporary time table are time axes. Arranged on the top justified above.

  After scheduling the first substrate W of process job number PJ1, the scheduling function unit 25 performs the processing from step S37 and starts scheduling the second substrate W of process job number PJ1. In this case, the scheduling for the substrate W of the process job number PJ1 has not been completed (step S37: YES), and the number of scheduled substrates W is less than the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). (Step S38: NO), the scheduling function unit 25 determines that the substrate W having the earliest processing order of the process job number with the earliest scheduling instruction among the unscheduled process jobs, that is, the second substrate with the process job number PJ1. PJ1-2 is used as a scheduling target board, and data relating to the scheduling target board is acquired from the storage unit 23 (step S39).

  Since the right to use the process job number PJ1 is set, the determination in step S40 is affirmative, and the scheduling function unit 25 determines that among the available processing units (in this case, the processing units to which the right to use is set) The processing unit (for example, processing unit SPIN2) having the smallest last use time is specified (step S41). If there is no other process job for which scheduling is instructed after the scheduling target substrate W (step S42: NO), the processing from step S43 is performed, and the second substrate PJ1-2 having the process job number PJ1 is processed. Scheduling is performed (steps S44 to S47). In this case, a temporary time table representing a route passing through the processing unit SPIN2 is selected, and blocks extracted from the temporary time table are arranged.

  In step S41, since processing blocks for processing the first substrate PJ1-1 have already been arranged for the processing unit SPIN1, 3 representing the three paths respectively passing through the remaining parallel processing units SPIN2 to SPIN4. The temporary time table with the earliest last use time of the processing unit is selected from the two temporary time tables. When the last use times are equal, a temporary time table corresponding to a route passing through a processing unit with a smaller number is selected. Specifically, the processing unit SPIN2 is selected. Therefore, scheduling is performed for the second substrate PJ1-2 of the process job number PJ1 using the temporary time table passing through the processing unit SPIN2.

  A specific scheduling example is shown in FIG. Since the hands 8A and 8B of the indexer robot IR can transfer two unprocessed substrates W or processed substrates W at the same time, the block representing the transfer of the substrates PJ1-1 and PJ1-2 by the indexer robot IR is timed. It is arranged to overlap on the axis. Further, between the main transfer robot CR and the indexer robot IR, two unprocessed substrates W can be transferred simultaneously, and two processed substrates W can be transferred simultaneously. The blocks representing the delivery of the substrate W are overlapped on the time axis.

Similarly, the scheduling result shown in FIG. 48 is obtained by scheduling the third substrate PJ1-3 having the process job number PJ1.
Similarly, scheduling is performed on the fourth substrate PJ1-4 having the process job number PJ1, thereby obtaining the scheduling result shown in FIG. As is clear from comparison with FIG. 10, since the transfer blocks representing the substrate transfer by the indexer robot IR can be arranged on the time axis, the entire processing time can be shortened.

When searching for a block arrangement position (step S45), the scheduling function unit 25 searches for an earlier position on the time axis as much as possible without overlapping blocks on the time axis for the same resource.
When the scheduling is completed for all the substrates W of the process job number PJ1 (step S49: YES), the scheduling function unit 25 starts the transfer of the substrate W scheduled immediately thereafter, that is, finally (payout from the substrate container C). The use right of the process job number PJ1 is deleted without waiting for (step S50). The subsequent processing returns to step S37. That is, the scheduling for another process job number is subsequently executed.

In step S40, if the right to use another process job number is set for all of the parallel processing units specified by the recipe corresponding to the process job number assigned to the scheduling target substrate W, the corresponding processing target substrate W is supported. The process job number is excluded from the scheduling target, and the processing from step S37 is executed.
In step S42, when it is determined that there is another process job for which scheduling is instructed after the scheduling target substrate W, the scheduling function unit 25 determines that the last use time of the processing unit that can be used in the subsequent process job is the scheduling. It is determined whether it is earlier than the last use time of a processing unit that can be used for processing the target substrate W (step S51). If this determination is affirmed, the substrate W of the subsequent process job is set as the scheduling target substrate (step S52), and the processing from step S42 is performed. If the determination is negative, the process from step S43 is executed without changing the scheduling target substrate W.

  50 to 55 show an example of scheduling for three substrate groups (process jobs) assigned with process job numbers PJ1, PJ2, and PJ3. The substrate group of process job number PJ1 is composed of one substrate PJ1-1, and four processing units SPIN1 to SPIN4 are designated as parallel processing units by the recipe in the processing content data. The substrate group of process job number PJ2 is composed of three substrates PJ2-1, PJ2-2, and PJ2-3, and two processing units SPIN2 to SPIN3 are designated as parallel processing units by the recipe in the processing content data. It shall be. Furthermore, it is assumed that the substrate group of process job number PJ3 is composed of one substrate PJ3-1, and three processing units SPIN2 to SPIN4 are designated as parallel processing units by the recipe in the processing content data. A case is assumed in which processing is started for the substrate groups of process job numbers PJ1, PJ2, and PJ3 in the order of the numbers, and a scheduling instruction is generated.

  When a substrate processing start instruction is given (step S31 in FIG. 45), the scheduling function unit 25 creates a temporary time table (step S32). That is, the scheduling function unit 25 creates a temporary time table representing four routes processed by one of the processing units SPIN1 to SPIN4 for one substrate PJ1-1 having the process job number PJ1. In addition, the scheduling function unit 25 processes the two substrates PJ2-1, PJ2-2, and PJ2-3 with the process job number PJ2 in one of the processing units SPIN2 to SPIN3, respectively. Create a temporary time table that represents the route. That is, a temporary time table for a total of 6 (2 × 3) paths is created for the process job number PJ2. Further, the scheduling function unit 25 creates a temporary time table representing three routes processed by one of the processing units SPIN2 to SPIN4 for one substrate PJ3-1 of the process job number PJ3. The created temporary time table is stored in the storage unit 23. FIG. 50 shows an example of a temporary time table.

  When the process start is sequentially instructed for the process job numbers PJ1, PJ2, and PJ3, and a scheduling instruction is generated in response thereto (step S33 in FIG. 45), the scheduling function unit 25 stores all the temporary times stored in the storage unit 23. The table, that is, the temporary time table of all the substrates W corresponding to the process job numbers PJ1 to PJ3 is read, and the entire scheduling is started. There is no other substrate W that has already started processing (step S35: NO), there is an unscheduled substrate W (step S37: YES), and the number of unprocessed substrates that can be transferred at one time by the indexer robot IR. Since the scheduling of W has not been completed (step S38: NO), the temporary time table of the first substrate PJ1-1 having the process job number PJ1 is acquired from the storage unit 23 (step S39).

  Further, the scheduling function unit 25 determines whether there are usable parallel processing units SPIN1 to SPIN4 designated by the recipe of the process job number PJ1, that is, the usage rights of other process job numbers are not set. A check is made (step S40). Since the right to use is not set when scheduling the first substrate W, this determination is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN1 to SPIN4 that can be used with the process job number PJ1 (step S41). Initially, since the last use time of any processing unit is “0”, the processing unit SPIN1 with the smallest number corresponds.

  Since the process job numbers PJ2 and PJ3 have started after the process job number PJ1 and neither usage right has been set, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 obtains the last use time of the parallel processing units SPIN2 to SPIN3 used by the process job number PJ2 from the storage unit 23, and further, the last of the parallel processing units SPIN2 to SPIN4 used by the process job number PJ3. The use time is acquired from the storage unit 23. And the scheduling function part 25 compares those last use time with the last use time of the processing unit specified by step S41 (step S51). Since the last use time of each processing unit at the beginning of scheduling is the initial value “0”, the determination in step S51 is negative.

  Therefore, the scheduling function unit 25 sets the right to use the process job number PJ1 for the processing units SPIN1 to SPIN4 designated as the parallel processing units in the recipe of the process job number PJ1 (step S43). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ1-1 having the process job number PJ1 (steps S44 to S47).

  FIG. 51 shows an example in which blocks relating to the first substrate PJ1-1 of the process job number PJ1 are arranged. At this time, the provisional time table indicating the route passing through the processing unit SPIN1, which is the processing unit with the earliest last use time, specified in steps S41 and S42 is selected. Specifically, a temporary time table representing a route passing through the processing unit SPIN1 is selected, and the blocks constituting the temporary time table are arranged on the time axis in a left-justified manner.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN1 finishes the processing of the substrate PJ1-1 as the last use time of the processing unit SPIN1, and writes it in the storage unit 23 (step S48). Since the substrate group of the process job number PJ1 is composed of only one substrate PJ1-1, the determination in step S49 is affirmative, and the scheduling function unit 25 deletes the right to use the process job number PJ1. . This state is shown in FIG.

  After scheduling the first substrate PJ1-1 having the process job number PJ1, the scheduling function unit 25 performs the processing from step S37. In this case, scheduling for the substrates W of process job numbers PJ2 and PJ3 has not been completed (step S37: YES), and the number of scheduled substrates W is less than the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Since there is no process (step S38: NO), the scheduling function unit 25 selects the first board of the process job number PJ2 that is the earliest process order of the process job number with the earliest scheduling instruction among the unscheduled process jobs. The board PJ2-1 is set as a scheduling target board, and data relating to the scheduling target board is acquired from the storage unit 23 (step S39).

  Since the right to use process job number PJ1 has already been deleted and no right to use has been set, the determination in step S40 is affirmative, and the scheduling function unit 25 performs the parallel processing specified by the recipe of process job number PJ2. Among the processing units SPIN2 and SPIN3, the processing unit with the smallest last use time is specified (step S41). In this case, since the last use time of the processing units SPIN2 to SPIN4 is the initial value “0”, the processing unit SPIN2 is applicable.

  Since there is another process job PJ3 for which scheduling is instructed after the scheduling target substrate PJ2-1, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 acquires the last use times of the parallel processing units SPIN <b> 2 to SPIN <b> 4 used by the process job number PJ <b> 3 from the storage unit 23. And the scheduling function part 25 compares those last use time with the last use time of the processing unit specified by step S41 (step S51). In this case, since the last use time of the processing units SPIN2 to SPIN4 is the initial value “0”, the determination in step S51 is negative. Therefore, the scheduling function unit 25 sets the right to use the process job number PJ2 for the processing units SPIN2 to SPIN3 designated as parallel processing units in the recipe of the process job number PJ2 (step S43). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ2-1 having the process job number PJ2 (steps S44 to S47).

FIG. 52 shows an example in which blocks relating to the first substrate PJ2-1 of the process job number PJ2 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN2, which is the processing unit with the earliest last use time, identified in steps S41 and S42 is selected, and blocks constituting the temporary time table are displayed on the time axis. It is arranged in front.
Since the hands 8A and 8B of the indexer robot IR can simultaneously transport two unprocessed substrates W or processed substrates W, the block representing the transport of the substrates PJ1-1 and PJ2-1 by the indexer robot IR is timed. It is arranged to overlap on the axis. In addition, between the main transfer robot CR and the indexer robot IR, two unprocessed substrates PJ1-1 and PJ2-1 can be simultaneously transferred, and two processed substrates PJ1-1 and PJ2-1 can be transferred. Since the delivery can be executed simultaneously, the blocks representing the delivery of these two substrates PJ1-1 and PJ2-1 are arranged so as to overlap on the time axis.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN2 finishes the processing of the substrate PJ2-1 as the last use time of the processing unit SPIN2, and writes it in the storage unit 23 (step S48). Since the substrate PJ2-1 is not the last substrate of the process job number PJ2, the determination in step S49 is denied, and the scheduling function unit 25 maintains the right to use the process job number PJ2. This state is shown in FIG.

  After scheduling the first substrate PJ2-1 having the process job number PJ2, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of process job numbers PJ2 and PJ3 has not been completed (step S37: YES), but the number of scheduled substrates W is equal to the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Since it has reached (step S38: YES), the scheduling is temporarily terminated.

When two scheduled substrates PJ1-1 and PJ2-1 are paid out from the substrate container C, a scheduling instruction is generated (step S33: YES). At this time, the scheduling function unit 25 resets the scheduled number of substrates to “0”. The scheduled number of substrates is used in the determination in step S38.
When the scheduling instruction is generated, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3, and performs scheduling. Start. In this case, since there is another substrate W that has already started processing (step S35: YES), scheduling is performed only by the substrates PJ1-1 and PJ2-1 that have started processing. The result is the same as FIG.

  Further, there is an unscheduled substrate (step S37: YES), and scheduling of unprocessed substrates W for the number of sheets that can be transferred at one time has not been completed (step S38: NO). The temporary time table of the substrate PJ2-1 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN2 to SPIN3 designated by the recipe of the process job number PJ2 can be used (step S40). In this case, since the right to use the process job number PJ2 is set for the processing units SPIN2 to SPIN3, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN2 to SPIN3 that can be used with the process job number PJ2 (step S41). Since the processing block for the substrate PJ2-1 is arranged in the processing unit SPIN2 (see FIG. 52), the processing unit SPIN3 corresponds to the processing unit with the earliest last use time.

  Since the process job number PJ3 has started after the process job number PJ2, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 acquires from the storage unit 23 the last use time of the parallel processing units SPIN2 to SPIN4 that can be used by the process job number PJ3 (the processing unit SPIN4 is applicable). And the scheduling function part 25 compares those last use time with the last use time of the processing unit specified by step S41 (step S51). In the assumed situation, the final use times of the processing units SPIN3 and SPIN4 are all the initial value “0”, so the determination in step S51 is negative. Therefore, the scheduling function unit 25 maintains the right to use the process job number PJ2 (step S43), and arranges blocks constituting the temporary time table of the second substrate PJ2-2 of the process job number PJ2 ( Steps S44 to S47).

FIG. 53 shows an example in which blocks relating to the second substrate PJ2-2 having the process job number PJ2 are arranged. At this time, a temporary time table that represents the route passing through the processing unit SPIN3 that is the processing unit with the earliest final use time specified in steps S41 and S42 is selected, and the blocks constituting the temporary time table are displayed on the time axis. It is arranged in front.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN3 finishes the processing of the substrate PJ2-2 as the last use time of the processing unit SPIN3, and writes it in the storage unit 23 (step S48). Since the substrate PJ2-2 is not the last substrate of the process job number PJ2, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ2. This state is shown in FIG.

  After scheduling the second substrate PJ2-2 having the process job number PJ2, the scheduling function unit 25 performs the processing from step S37. In this case, scheduling for the substrates W of process job numbers PJ2 and PJ3 has not been completed (step S37: YES), and the number of scheduled substrates W is less than the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Since there is no process (step S38: NO), the scheduling function unit 25 selects the third board of the process job number PJ2 that is the process order of the process job number with the earliest scheduling instruction among the unscheduled process jobs, that is, the process job number PJ2. The board PJ2-3 is set as a scheduling target board, and data relating to the scheduling target board is acquired from the storage unit 23 (step S39). Since the right to use the process job number PJ2 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN2 and SPIN3 specified in the recipe of the process job number PJ2. The processing unit with the smallest time is specified (step S41). In this case, the processing unit SPIN2 is applicable (see FIG. 53).

  Since there is another process job PJ3 for which scheduling has been instructed after the scheduling target substrate PJ2-3, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 stores the last use time of the processing unit SPIN4 which is a usable processing unit (no usage right is set) among the parallel processing units SPIN2 to SPIN4 used by the process job number PJ3. 23. Then, the scheduling function unit 25 compares the last use time with the last use time of the processing unit specified in Step S41 (Step S51). In this case, since the last use time of the processing unit SPIN4 is the initial value “0”, the determination in step S51 is affirmative. Therefore, the scheduling function unit 25 schedules the first substrate PJ3-1 that is the substrate with the earliest processing order among the unscheduled substrates of the process job number PJ3 that can use the processing unit SPIN4 with the earliest final use time. As the target substrate (step S52), the processing from step S42 is performed.

  In this case, since there is no process job started after the process job number PJ3 (step S42: NO), the scheduling function unit 25, among the parallel processing units SPIN2 to SPIN4 designated by the recipe of the process job number PJ3, The usage right of the process job number PJ3 is set for the processing unit SPIN4 for which the usage right is not set (step S43). That is, the right to use another process job number is set in a part of the parallel processing unit specified in the recipe of the process job number PJ3, but the process job is applied only to a part of the parallel processing units in which the usage right is not set. The right to use the number PJ3 is set. Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ3-1 having the process job number PJ3 (steps S44 to S47).

FIG. 54 shows an example in which blocks relating to the first substrate PJ3-1 of the process job number PJ3 are arranged. At this time, a provisional time table representing a route passing through the processing unit SPIN4, which is the processing unit with the earliest last use time, is selected, and blocks constituting the provisional time table are arranged on the time axis in front-alignment.
Since the hands 8A and 8B of the indexer robot IR can simultaneously transport two unprocessed substrates W or processed substrates W, the block representing the transport of the substrates PJ2-2 and PJ3-1 by the indexer robot IR is timed. It is arranged to overlap on the axis. In addition, two unprocessed substrates PJ2-2 and PJ3-1 can be simultaneously transferred between the main transfer robot CR and the indexer robot IR, and two processed substrates PJ2-2 and PJ3-1 can be transferred. Since the delivery can be executed simultaneously, the blocks representing the delivery of these two substrates PJ2-2 and PJ3-1 are arranged so as to overlap on the time axis.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN4 finishes the processing of the substrate PJ3-1 as the last use time of the processing unit SPIN4, and writes it in the storage unit 23 (step S48). Since the substrate PJ3-1 is the last substrate of the process job number PJ3, the determination in step S49 is affirmed, and the scheduling function unit 25 deletes the right to use the process job number PJ3. This state is shown in FIG.

  After scheduling the first substrate PJ3-1 having the process job number PJ3, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrate W of the process job number PJ2 has not been completed (step S37: YES), but the number of scheduled substrates W has reached the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Therefore (step S38: YES), the scheduling is temporarily ended.

When the two scheduled substrates PJ2-2 and PJ3-1 are paid out from the substrate container C, a scheduling instruction is generated (step S33: YES). At this time, the scheduling function unit 25 resets the scheduled number of substrates to “0”. The scheduled number of substrates is used in the determination in step S38.
When the scheduling instruction is generated, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3, and performs scheduling. Start. In this case, since there is another substrate W that has already started processing (step S35: YES), scheduling is performed only by the substrates PJ1-1, PJ2-1, PJ2-2, and PJ3-1 that have started processing. Is called. The result is the same as FIG.

  Further, there is an unscheduled substrate (step S37: YES), and scheduling of unprocessed substrates W for the number of sheets that can be transported at one time has not been completed (step S38: NO). The temporary time table of the substrate PJ2-3 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN2 to SPIN3 designated by the recipe of the process job number PJ2 can be used (step S40). In this case, since the right to use the process job number PJ2 is set for the processing units SPIN2 to SPIN3, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN2 to SPIN3 that can be used with the process job number PJ2 (step S41). In this case, the processing unit SPIN2 corresponds to the processing unit with the earliest last use time (see FIG. 54).

  Since the scheduling of the subsequent process job number PJ3 has been completed, the determination in step S42 is negative. Therefore, the scheduling function unit 25 maintains the right to use the parallel processing units SPIN2 to SPIN3 of the process job number PJ2 (step S43), and configures a temporary time table for the third substrate PJ2-3 of the process job number PJ2. Blocks are arranged (steps S44 to S47).

  FIG. 55 shows an example in which blocks relating to the third substrate PJ2-3 of process job number PJ2 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN2, which is the processing unit with the earliest last use time, identified in step S41 is selected, and the blocks constituting the temporary time table are displayed on the time axis. Arranged to stuff. In this case, each block is arranged so as to minimize the gap between the blocks in accordance with the processing block arranged in the processing unit SPIN2.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN2 finishes the processing of the substrate PJ2-3 as the last use time of the processing unit SPIN2, and writes it in the storage unit 23 (step S48). Since the substrate PJ2-3 is the last substrate of the process job number PJ2, the determination in step S49 is affirmative, and the scheduling function unit 25 deletes the right to use the process job number PJ2 (step S50). This state is shown in FIG.

After scheduling the third substrate PJ2-3 with the process job number PJ2, the scheduling function unit 25 performs the processing from step S37. In this case, since all the scheduling of the process job numbers PJ1, PJ2, and PJ3 instructed to start has been completed (step S37: YES), the scheduling ends (step S53).
As is clear from the comparison between FIG. 55 and FIG. 16, the entire processing time is shortened by performing the processing according to the scheduling shown in FIG. In particular, the processing time can be shortened because the transfer blocks representing the transfer of two substrates by the indexer robot IR can be arranged on the time axis. In addition, among the parallel processing units SPIN2 to SPIN4 specified in the recipe of the process job number PJ3, even if the right to use the processing units SPIN2 to SPIN3 is set to the process job number PJ2, the remaining processing units When the last use time of SPIN4 is early, the use right for the processing unit SPIN4 is set for the process job number PJ3. As a result, a plan has been formulated in which the processing of the substrate PJ3-1 overtakes the processing for the substrate PJ2-3, thereby significantly reducing the overall substrate processing time.

  56 to 67 show other examples of scheduling for three substrate groups (process jobs) assigned process job numbers PJ1, PJ2, and PJ3. It is assumed that the substrate group of process job number PJ1 is composed of eight substrates PJ1-1 to PJ1-1 and two processing units SPIN1 and SPIN2 are designated as parallel processing units by the recipe in the processing content data. Further, it is assumed that the substrate group of the process job number PJ2 includes two substrates PJ2-1 and PJ2-1 and four processing units SPIN1 to SPIN4 are designated as parallel processing units by the recipe in the processing content data. Further, it is assumed that the substrate group of the process job number PJ3 includes two substrates PJ3-1 and PJ3-1 and two processing units SPIN3 to SPIN4 are designated as parallel processing units by a recipe in the processing content data. . A case is assumed in which processing is started for the substrate groups of process job numbers PJ1, PJ2, and PJ3 in the order of the numbers, and a scheduling instruction is generated.

  When a substrate processing start instruction is given (step S31 in FIG. 45), the scheduling function unit 25 creates a temporary time table (step S32). That is, the scheduling function unit 25 creates a temporary time table that represents the route passing through the processing unit SPIN1 or SPIN2 for the eight substrates PJ1-1 to PJ1-8 having the process job number PJ1. In addition, the scheduling function unit 25 creates a temporary time table representing a route passing through any one of the processing units SPIN1 to SPIN4 for the two substrates PJ2-1 to 2 having the process job number PJ2. Further, the scheduling function unit 25 creates a temporary time table that represents a route passing through the processing unit SPIN3 or SPIN4 for each of the two substrates PJ3-1 and PJ3 having the process job number PJ3. The created temporary time table is stored in the storage unit 23.

  When the start of processing for the process job numbers PJ1, PJ2, and PJ3 is instructed in order and a scheduling instruction is generated in response thereto (step S33 in FIG. 45: YES), the scheduling function unit 25 stores all of the stored in the storage unit 23. The temporary time table, that is, the temporary time table of all the substrates W corresponding to the process job numbers PJ1 to PJ3 is read, and the entire scheduling is started. There is no other substrate W that has already started processing (step S35: NO), there is an unscheduled substrate W (step S37: YES), and scheduling of the unprocessed substrates W for the number of sheets that can be transferred at one time is performed. Since it has not been completed (step S38: NO), the temporary time table of the first substrate PJ1-1 of the process job number PJ1 is acquired from the storage unit 23 (step S39).

  Further, the scheduling function unit 25 determines whether there is a usable one among the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1, that is, the right to use another process job number is not set. A check is made (step S40). Since this determination is affirmed when scheduling the first substrate W, the scheduling function unit 25 further processes the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1. Is specified (step S41). Initially, since the last use time of any processing unit is “0”, the processing unit SPIN1 with the smallest number corresponds.

  Since process job numbers PJ2 and PJ3 are started after process job number PJ1, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 obtains the last use time of the parallel processing units SPIN1 to SPIN4 used by the process job number PJ2 from the storage unit 23, and further the final processing unit SPIN3 to SPIN4 used by the process job number PJ3. The use time is acquired from the storage unit 23. And the scheduling function part 25 compares those last use time with the last use time of the processing unit specified by step S41 (step S51). Since the last use time of each processing unit at the beginning of scheduling is the initial value “0”, the determination in step S51 is negative. Therefore, the scheduling function unit 25 sets the right to use the process job number PJ1 for the processing units SPIN1 and SPIN2 designated as parallel processing units in the recipe of the process job number PJ1 (step S43). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ1-1 having the process job number PJ1 (steps S44 to S47).

FIG. 56 shows an example in which blocks relating to the first substrate PJ1-1 of the process job number PJ1 are arranged. At this time, a temporary time table that represents the route passing through the processing unit SPIN1, which is the processing unit with the earliest last use time, identified in steps S41 and S42 is selected, and the blocks constituting the temporary time table are displayed on the time axis. It is arranged in front.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN1 finishes the processing of the substrate PJ1-1 as the last use time of the processing unit SPIN1, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-1 is not the last substrate of the process job number PJ1, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After scheduling the first substrate PJ1-1 having the process job number PJ1, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of the process job numbers PJ1, PJ2, and PJ3 has not been completed (step S37: YES), and the number of scheduled substrates W is the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). (Step S38: NO), the scheduling function unit 25 sets the two substrates of the process job number PJ1, that is, the substrate with the earliest processing order of the process job number having the earliest scheduling instruction among the unscheduled process jobs. The board PJ1-2 of the eye is set as a scheduling target board, and data relating to the scheduling target board is acquired from the storage unit 23 (step S39). Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). Since the processing block for the substrate PJ1-1 is arranged in the processing unit SPIN1, the processing unit SPIN2 is applicable.

  There are other process jobs PJ2 and PJ3 for which scheduling is instructed after the board to be scheduled PJ1-2, and among the parallel processing units designated by those recipes, any usage rights are set for the processing units SPIN3 and SPIN4. Since the determination has not been made, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. Then, the scheduling function unit 25 compares the last use time with the last use time of the processing unit SPIN2 specified in Step S41 (Step S51). In this case, the final use time of the processing unit SPIN2 is the initial value “0”, and the final use times of the processing units SPIN3 to SPIN4 are also the initial value “0”, so the determination in step S51 is negative. Therefore, the scheduling function unit 25 maintains the right to use the process job number PJ1 (step S43). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the second substrate PJ1-2 having the process job number PJ1 (steps S44 to S47).

  FIG. 57 shows an example in which blocks relating to the second substrate PJ1-2 having the process job number PJ1 are arranged. At this time, a temporary time table indicating a route passing through the processing unit SPIN2, which is the processing unit with the earliest last use time, identified in steps S41, S42, and S52 is selected, and the blocks constituting the temporary time table are time Arranged on the axis to the front. Since the hands 8A and 8B of the indexer robot IR can transfer two unprocessed substrates W or processed substrates W at the same time, the block representing the transfer of the substrates PJ1-1 and PJ1-2 by the indexer robot IR is timed. It is arranged to overlap on the axis. Although not shown in detail, two unprocessed substrates PJ1-1 and PJ1-2 can be simultaneously transferred between the main transfer robot CR and the indexer robot IR, and two processed substrates can be simultaneously processed. Since the transfer of PJ1-1 and PJ1-2 can be executed simultaneously, the blocks representing the transfer of these two substrates PJ1-1 and PJ1-2 are arranged overlapping on the time axis.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN2 finishes the processing of the substrate PJ1-2 as the last use time of the processing unit SPIN2, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-2 is not the last substrate of the process job number PJ1, the determination in step S49 is denied, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After scheduling the second substrate PJ1-2 having the process job number PJ1, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of process job numbers PJ1, PJ2, and PJ3 has not been completed (step S37: YES), but the number of scheduled substrates W is the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). ) (Step S38: YES), the scheduling is temporarily ended (step S53).

When the two scheduled substrates PJ1-1 and PJ1-2 are paid out from the substrate container C, a scheduling instruction is generated (step S33: YES). At this time, the scheduling function unit 25 resets the scheduled number of substrates to “0”. The scheduled number of substrates is used in the determination in step S38.
When the scheduling instruction is generated, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3, and performs scheduling. Start. In this case, since there are other substrates PJ1-1 and PJ1-2 that have already started processing (step S35: YES), scheduling is performed only by the substrates PJ1-1 and PJ1-2 that have started processing. The result is the same as FIG. Furthermore, there is an unscheduled substrate (step S37: YES), and scheduling of unprocessed substrates W for the number of sheets that can be transported at one time has not been completed (step S38: NO), so the third sheet of process job number PJ1 The temporary time table of the substrate PJ1-3 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN1 and SPIN2 designated in the recipe of the process job number PJ1 can be used (step S40). In this case, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1 (step S41). FIG. 57 shows that the processing unit SPIN1 is applicable.

  Process job numbers PJ2 and PJ3 have started after process job number PJ1, and among the parallel processing units specified in those recipes, no usage rights have been set for processing units SPIN3 and SPIN4. The determination in S42 is affirmed. Therefore, the scheduling function unit 25 can be used among the parallel processing units SPIN1 to SPIN4 used by the process job number PJ2 and the parallel processing units SPIN3 to SPIN4 used by the process job number PJ3 (processing units for which usage rights are not set). The last use time of SPIN3 and SPIN4 is acquired from the storage unit 23. And the scheduling function part 25 compares those last use time with the last use time of the processing unit specified by step S41 (step S51). In the assumed situation, the final use times of the processing units SPIN3 and SPIN4 are both the initial value “0”, so the determination in step S51 is affirmative.

  Therefore, the scheduling function unit 25 is the board having the earliest processing order among the unscheduled boards having the process job number PJ2 that can use the processing unit SPIN3 having the smallest number among the processing units SPIN3 and SPIN4 having the earliest last use time. The first substrate PJ2-1 is used as a scheduling target substrate (step S52), and the processing from step S42 is performed. In this case, there is a process job PJ3 started after the process job number PJ2, and the right to use is not set for any of the processing units SPIN3 and SPIN4 specified in the recipe (step S42: YES). Therefore, the last use time of the processing units SPIN4 other than the processing unit SPIN3 to be used for processing the process job number PJ2 among the processing units SPIN3 and SPIN4 that can be used with the process job number PJ3 is checked (step S51). . In this case, since the last use times of the processing units SPIN3 and SPIN4 are both the initial value “0”, the determination in step S51 is negative.

  Therefore, the scheduling function unit 25 grants the right to use the process job number PJ2 to the processing units SPIN3 and SPIN4 for which the right to use is not set among the parallel processing units SPIN1 to SPIN4 specified in the recipe for the process job number PJ2. Set (step S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ2-1 having the process job number PJ2 (Steps S44 to S47).

FIG. 58 shows an example in which blocks relating to the first substrate PJ2-1 of the process job number PJ2 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN3, which is the processing unit with the earliest last use time, is selected, and blocks constituting the temporary time table are arranged on the time axis so as to be left-justified.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN3 finishes the processing of the substrate PJ2-1 as the last use time of the processing unit SPIN3, and writes it in the storage unit 23 (step S48). Since the substrate PJ2-1 is not the last substrate of the process job number PJ2, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ2. This state is shown in FIG.

  After scheduling the first substrate PJ2-1 having the process job number PJ2, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of the process job numbers PJ1, PJ2, and PJ3 has not been completed (step S37: YES), and the number of scheduled substrates W is the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). (Step S38: NO), the scheduling function unit 25 determines that the process job number for which the scheduling instruction is the earliest among the unscheduled process jobs is the substrate with the earliest processing order, that is, the process job number PJ1. The board PJ1-3 of the eye is set as a scheduling target board, and data relating to the scheduling target board is acquired from the storage unit 23 (step S39).

  Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). In this case, the processing unit SPIN1 corresponds (see FIG. 58). Since there are other process job numbers PJ2 and PJ3 for which scheduling is instructed after the scheduling target substrate PJ1-3 and the processing units SPIN3 and SPIN4 have the right to use the process job number PJ2 set, the determination in step S42 Is affirmed. That is, among the parallel processing units SPIN1 to SPIN4 used by the process job number PJ2, the process job number PJ2 can be used (whether the use right is not set for another process job number or the process job number The processing units whose usage rights are set for PJ2 are processing units SPIN3 and SPIN4. Further, the parallel processing units SPIN3 to SPIN4 used by the process job number PJ3 can be used (the use right is not set for another process job number or the use right is set for the process job number PJ3. There is no processing unit. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. Then, the scheduling function unit 25 compares these last use times with the last use time of the processing unit SPIN1 specified in Step S41 (Step S51). In this case, since the last use time of the processing unit SPIN4 is the initial value “0”, the determination in step S51 is affirmative.

  Therefore, the scheduling function unit 25 schedules the second substrate PJ2-2, which is the substrate with the earliest processing order among the unscheduled substrates with the process job number PJ2 that can use the processing unit SPIN4 with the earliest last use time. As the target substrate (step S52), the processing from step S42 is performed. In this case, there is a process job PJ3 started after the process job number PJ2, but the last use time of the processing unit that can be used with the process job number PJ3 is checked, but the processing that can be used with the process job number PJ3 Since no unit exists, the determination in step S42 is negative.

Therefore, the scheduling function unit 25 maintains the right to use the processing units SPIN3 and SPIN4 of the process job number PJ2 (step S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the second substrate PJ2-2 having the process job number PJ2 (Steps S44 to S47).
FIG. 59 shows an example in which blocks relating to the second substrate PJ2-2 having the process job number PJ2 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN4, which is the processing unit with the earliest last use time, is selected, and the blocks constituting the temporary time table are arranged on the time axis in front-alignment. Since the hands 8A and 8B of the indexer robot IR can transfer two unprocessed substrates W or processed substrates W at the same time, a block representing transfer of the substrates PJ2-1 and PJ2-2 by the indexer robot IR is timed. It is arranged to overlap on the axis. Although not shown in detail, two unprocessed substrates PJ2-1 and PJ2-2 can be simultaneously transferred between the main transfer robot CR and the indexer robot IR, and two processed substrates can be simultaneously processed. Since the transfer of PJ2-1 and PJ2-2 can be executed simultaneously, the blocks representing the transfer of these two substrates PJ2-1 and PJ2-2 are arranged overlapping on the time axis.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN4 finishes the processing of the substrate PJ2-2 as the last use time of the processing unit SPIN4, and writes it in the storage unit 23 (step S48). Since the substrate PJ2-2 is the last substrate of the process job number PJ2, the determination in step S49 is affirmed, and the scheduling function unit 25 deletes the right to use the process job number PJ2 (step S50). This state is shown in FIG.

  After scheduling the second substrate PJ2-2 having the process job number PJ2, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of process job numbers PJ1 and PJ3 has not been completed (step S37: YES), but the number of scheduled substrates W is equal to the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Since it has reached (step S38: YES), the scheduling is temporarily ended (step S53).

When two scheduled substrates PJ2-1 and PJ2-2 are paid out from the substrate container C, a scheduling instruction is generated (step S33: YES). At this time, the scheduling function unit 25 resets the scheduled number of substrates to “0”. The scheduled number of substrates is used in the determination in step S38.
When the scheduling instruction is generated, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3, and performs scheduling. Start. In this case, since there are other substrates PJ1-1, PJ1-2, PJ2-1, and PJ2-2 that have already started processing (step S35: YES), the substrates PJ1-1 and PJ1- that have started processing are present. 2, PJ2-1 and PJ2-2 are only used for scheduling. The result is the same as FIG. Furthermore, there is an unscheduled substrate (step S37: YES), and scheduling of unprocessed substrates W for the number of sheets that can be transported at one time has not been completed (step S38: NO), so the third sheet of process job number PJ1 The temporary time table of the substrate PJ1-3 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN1 and SPIN2 designated in the recipe of the process job number PJ1 can be used (step S40). In this case, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1 (step S41). FIG. 59 shows that the processing unit SPIN1 is applicable.

  Since the process job numbers PJ2 and PJ3 have started after the process job number PJ1, the scheduling for the process job number PJ3 has not been completed, and no usage rights have been set for the processing units SPIN3 and SPIN4. The determination is affirmed. Therefore, the scheduling function unit 25 stores the last use time of the parallel processing units SPIN3 to SPIN4 used by the process job number PJ3 (corresponding to the processing units SPIN3 and SPIN4 for which usage rights are not set). Get from. And the scheduling function part 25 compares those last use time with the last use time of the processing unit specified by step S41 (step S51). In the assumed situation, since the last use time of the processing unit SPIN1 is earlier than the last use time of the processing units SPIN3 and SPIN4 (see FIG. 59), the determination in step S51 is negative. Therefore, the scheduling function unit 25 maintains the right to use the process job number PJ1 (step S43), and arranges blocks constituting the temporary time table of the third substrate PJ1-3 having the process job number PJ1 ( Steps S44 to S47).

  FIG. 60 shows an example in which blocks relating to the third substrate PJ1-3 of process job number PJ1 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN1, which is the processing unit with the earliest last use time, is selected, and blocks constituting the temporary time table are arranged on the time axis in front-alignment. More specifically, the processing block of the substrate PJ1-3 is arranged after the processing block of the substrate PJ1-1 corresponding to the processing unit SPIN1, and the interval between the blocks is made as small as possible in accordance with the processing block. Thus, each block is arranged.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN1 finishes the processing of the substrate PJ1-3 as the last use time of the processing unit SPIN1, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-3 is not the last substrate of the process job number PJ1, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After scheduling the third substrate PJ1-3 having the process job number PJ1, the scheduling function unit 25 performs the processing from step S37. In this case, scheduling for the substrates W of process job numbers PJ1 and PJ3 has not been completed (step S37: YES), and the number of scheduled substrates W is less than the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Since there is no process (step S38: NO), the scheduling function unit 25 determines the fourth board of the process job number PJ1, that is, the process board having the earliest processing order of the process job number having the earliest scheduling instruction among the unscheduled process jobs. The board PJ1-4 is set as a scheduling target board, and data relating to the scheduling target board is acquired from the storage unit 23 (step S39).

  Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). In this case, the processing unit SPIN2 is applicable (see FIG. 60). Since the process job number PJ3 is unscheduled among the other process job numbers PJ2 and PJ3 for which scheduling is instructed after the scheduling target substrate PJ1-3, the usage right for the processing units SPIN3 and SPIN4 is not set. The determination in S42 is affirmed. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. Then, the scheduling function unit 25 compares the last use time with the last use time of the processing unit SPIN2 specified in Step S41 (Step S51). In this case, the final use time of the processing unit SPIN2 is the earliest (see FIG. 60), so the determination in step S51 is negative.

Therefore, the scheduling function unit 25 maintains the right to use the processing units SPIN1 and SPIN2 of the process job number PJ1. Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the fourth substrate PJ1-4 having the process job number PJ1 (Steps S44 to S47).
FIG. 61 shows an example in which blocks relating to the fourth substrate PJ1-4 of process job number PJ1 are arranged. At this time, a provisional time table representing a route passing through the processing unit SPIN2, which is the processing unit with the earliest last use time, is selected, and blocks constituting the provisional time table are arranged on the time axis in front-alignment. Since the hands 8A and 8B of the indexer robot IR can transfer two unprocessed substrates W or processed substrates W at the same time, the blocks representing the transfer of the substrates PJ1-3 and PJ1-4 by the indexer robot IR are timed. It is arranged to overlap on the axis. Although not shown in detail, two unprocessed substrates PJ1-3 and PJ1-4 can be simultaneously transferred between the main transfer robot CR and the indexer robot IR, and two processed substrates can be simultaneously processed. Since the transfer of PJ1-3 and PJ1-4 can be executed simultaneously, the blocks representing the transfer of these two substrates PJ1-3 and PJ1-4 are arranged overlapping on the time axis.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN2 finishes the processing of the substrate PJ1-4 as the last use time of the processing unit SPIN2, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-4 is not the last substrate of the process job number PJ1, the determination in step S49 is denied, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After scheduling the fourth substrate PJ1-4 with the process job number PJ1, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of process job numbers PJ1 and PJ3 has not been completed (step S37: YES), but the number of scheduled substrates W is equal to the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Since it has reached (step S38: YES), the scheduling is temporarily ended (step S53).

When the two scheduled substrates PJ1-3 and PJ1-4 are paid out from the substrate container C, a scheduling instruction is generated (step S33: YES). At this time, the scheduling function unit 25 resets the scheduled number of substrates to “0”. The scheduled number of substrates is used in the determination in step S38.
When the scheduling instruction is generated, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3, and performs scheduling. Start. In this case, since there are other substrates PJ1-1 to 4 and PJ2-1 and 2 that have already started processing (step S35: YES), the substrates PJ1-1 to 4 and PJ2-1 that have started processing are present. Scheduling is performed with only 2. The result is the same as FIG. Further, there is an unscheduled substrate (step S37: YES), and scheduling of unprocessed substrates W for the number of sheets that can be transported at one time has not been completed (step S38: NO), so the fifth sheet of process job number PJ1. The temporary time table of the substrate PJ1-5 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN1 and SPIN2 designated in the recipe of the process job number PJ1 can be used (step S40). In this case, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1 (step S41). FIG. 61 shows that the processing unit SPIN1 is applicable.

  Since the scheduling of the process job number PJ3 started after the process job number PJ1 has not been completed and the parallel processing units SPIN3 and SPIN4 used by the process job number PJ3 are both usable (usage right not set), step S42 The determination at is affirmed. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. And the scheduling function part 25 compares those last use time with the last use time of the processing unit specified by step S41 (step S51). In the assumed situation, the final use time of the processing unit SPIN3 is the earliest among the processing units SPIN1, SPIN3 and SPIN4 (see FIG. 61), so the determination in step S51 is affirmative.

  Therefore, the scheduling function unit 25 schedules the first substrate PJ3-1 that is the substrate with the earliest processing order among the unscheduled substrates with the process job number PJ3 that can use the processing unit SPIN3 with the earliest last use time. As the target substrate (step S52), the processing from step S42 is performed. In this case, since there is no process job started after the process job number PJ3 (step S42: NO), the scheduling function unit 25 selects the parallel processing units SPIN3 to SPIN4 designated by the recipe of the process job number PJ3. The right to use the process job number PJ3 is set for the processing units SPIN3 and SPIN4 for which the right to use has not been set (step S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ3-1 having the process job number PJ3 (steps S44 to S47).

FIG. 62 shows an example in which blocks related to the first substrate PJ3-1 of process job number PJ3 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN3, which is the processing unit with the earliest last use time, is selected, and blocks constituting the temporary time table are arranged on the time axis so as to be left-justified.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN3 finishes the processing of the substrate PJ3-1 as the last use time of the processing unit SPIN3, and writes it in the storage unit 23 (step S48). Since the substrate PJ3-1 is not the last substrate of the process job number PJ3, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ3. This state is shown in FIG.

  After scheduling the first substrate PJ3-1 having the process job number PJ3, the scheduling function unit 25 performs the processing from step S37. In this case, scheduling for the substrates W of process job numbers PJ1 and PJ3 has not been completed (step S37: YES), and the number of scheduled substrates W is less than the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Since there is no process (step S38: NO), the scheduling function unit 25 selects the fifth board of the process job number PJ1, that is, the board with the earliest processing order of the process job number with the earliest scheduling instruction among the unscheduled process jobs. The board PJ1-5 is set as a scheduling target board, and data relating to the scheduling target board is acquired from the storage unit 23 (step S39).

  Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). In this case, the processing unit SPIN1 corresponds (see FIG. 62). Since the scheduling of another process job number PJ3 instructed after the scheduling target substrate PJ1-5 has not been completed and the right to use the process job number PJ3 is set for the processing units SPIN3 and SPIN4, The determination in step S42 is affirmed. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. Then, the scheduling function unit 25 compares the last use time with the last use time of the processing unit SPIN1 specified in Step S41 (Step S51). In this case, the last use time of the processing unit SPIN4 is earlier than the last use time of the processing unit SPIN1.

  Therefore, the scheduling function unit 25 schedules the second substrate PJ3-2 that is the substrate with the earliest processing order among the unscheduled substrates of the process job number PJ3 that can use the processing unit SPIN4 with the earliest last use time. As the target substrate (step S52), the processing from step S42 is performed. In this case, since there is no process job started after the process job number PJ3 (step S42: NO), the scheduling function unit 25 maintains the right to use the processing units SPIN3 and SPIN4 of the process job number PJ3 (step S42). S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the second substrate PJ3-2 having the process job number PJ3 (Steps S44 to S47).

  FIG. 63 shows an example in which blocks relating to the second substrate PJ3-2 of the process job number PJ3 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN4, which is the processing unit with the earliest last use time, is selected, and the blocks constituting the temporary time table are arranged on the time axis in front-alignment. Since the hands 8A and 8B of the indexer robot IR can simultaneously transport two unprocessed substrates W or processed substrates W, the blocks representing the transport of the substrates PJ3-1 and PJ3-2 by the indexer robot IR are timed. It is arranged to overlap on the axis. Although not shown in detail, two unprocessed substrates PJ3-1 and PJ3-2 can be simultaneously transferred between the main transfer robot CR and the indexer robot IR, and two processed substrates can be simultaneously processed. Since the transfer of PJ3-1 and PJ3-2 can be executed simultaneously, the blocks representing the transfer of these two substrates PJ3-1 and PJ3-2 are arranged overlapping on the time axis.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN4 finishes the processing of the substrate PJ3-2 as the last use time of the processing unit SPIN4, and writes it in the storage unit 23 (step S48). Since the substrate PJ3-2 is the last substrate of the process job number PJ2, the determination in step S49 is affirmed, and the scheduling function unit 25 deletes the right to use the process job number PJ3 (step S50). This state is shown in FIG.

  After scheduling of the second substrate PJ3-2 having the process job number PJ3, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrate W of the process job number PJ1 has not been completed (step S37: YES), but the number of scheduled substrates W has reached the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Therefore (step S38: YES), the scheduling is temporarily ended (step S53).

When the two scheduled substrates PJ3-1 and PJ3-2 are paid out from the substrate container C, a scheduling instruction is generated (step S33: YES). At this time, the scheduling function unit 25 resets the scheduled number of substrates to “0”. The scheduled number of substrates is used in the determination in step S38.
When the scheduling instruction is generated, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3, and performs scheduling. Start. In this case, since there are other substrates PJ1-1 to 4, PJ2-1 to 2 and PJ3-1 to 2 that have already started processing (step S35: YES), the substrate PJ1-1 to which processing has been started is present. 4, PJ2-1 to 2 and PJ3-1 to 2 are only used for scheduling. The result is the same as FIG. Further, there is an unscheduled substrate (step S37: YES), and scheduling of unprocessed substrates W for the number of sheets that can be transported at one time has not been completed (step S38: NO), so the fifth sheet of process job number PJ1. The temporary time table of the substrate PJ1-5 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN1 and SPIN2 designated in the recipe of the process job number PJ1 can be used (step S40). In this case, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1 (step S41). FIG. 63 shows that the processing unit SPIN1 is applicable.

  Since the scheduling of the process job numbers PJ2 and PJ3 started after the process job number PJ1 is completed, the determination in step S42 is denied. Therefore, the scheduling function unit 25 maintains the right to use the process job number PJ1 (step S43), and arranges blocks constituting the temporary time table of the fifth substrate PJ1-5 of the process job number PJ1 ( Steps S44 to S47).

  FIG. 64 shows an example in which blocks relating to the fifth substrate PJ1-5 of process job number PJ1 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN1, which is the processing unit with the earliest last use time, is selected, and blocks constituting the temporary time table are arranged on the time axis in front-alignment. More specifically, the processing block of the substrate PJ1-5 is arranged after the processing block of the substrate PJ1-3 corresponding to the processing unit SPIN1, and the interval between the blocks is made as small as possible in accordance with the processing block. Each block is arranged.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN1 finishes the processing of the substrate PJ1-5 as the last use time of the processing unit SPIN1, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-5 is not the last substrate of the process job number PJ1, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After scheduling the fifth substrate PJ1-5 with the process job number PJ1, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrate W of the process job number PJ1 has not been completed (step S37: YES), and the number of scheduled substrates W is less than the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). (Step S38: NO) The scheduling function unit 25 determines that the process job number with the earliest scheduling instruction among the unscheduled process jobs has the earliest processing order, that is, the sixth board PJ1 with the process job number PJ1. -6 is set as a scheduling target board, and data relating to the scheduling target board is acquired from the storage unit 23 (step S39).

  Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). In this case, the processing unit SPIN2 is applicable (see FIG. 64). Since the scheduling of the other process job numbers PJ2 and PJ3 instructed after the scheduling target substrate PJ1-3 is completed, the determination in step S42 is negative. Accordingly, the scheduling function unit 25 maintains the right to use the process units SPIN1 and SPIN2 of the process job number PJ1 (step S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the sixth substrate PJ1-6 having the process job number PJ1 (steps S44 to S47).

  FIG. 65 shows an example in which blocks relating to the sixth substrate PJ1-6 of process job number PJ1 are arranged. At this time, a provisional time table representing a route passing through the processing unit SPIN2, which is the processing unit with the earliest last use time, is selected, and blocks constituting the provisional time table are arranged on the time axis in front-alignment. Since the hands 8A and 8B of the indexer robot IR can transfer two unprocessed substrates W or processed substrates W at the same time, the blocks representing the transfer of the substrates PJ1-5 and PJ1-6 by the indexer robot IR are timed. It is arranged to overlap on the axis. Although not shown in detail, two unprocessed substrates PJ1-5 and PJ1-6 can be simultaneously transferred between the main transfer robot CR and the indexer robot IR, and two processed substrates can be simultaneously processed. Since the transfer of PJ1-5 and PJ1-6 can be executed simultaneously, the blocks representing the transfer of these two substrates PJ1-5 and PJ1-6 are arranged so as to overlap on the time axis.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN2 finishes the processing of the substrate PJ1-6 as the last use time of the processing unit SPIN2, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-6 is not the last substrate of the process job number PJ1, the determination in step S49 is denied, and the scheduling function unit 25 maintains the right to use the process job number PJ1 (step S50). This state is shown in FIG.

  After scheduling the sixth substrate PJ1-6 having the process job number PJ1, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrate W of the process job number PJ1 has not been completed (step S37: YES), but the number of scheduled substrates W has reached the number of simultaneous conveyances of the indexer robot IR (2 in this embodiment). Therefore (step S38: YES), the scheduling is temporarily ended (step S53).

When the two scheduled substrates PJ1-5 and PJ1-6 are paid out from the substrate container C, a scheduling instruction is generated (step S33). At this time, the scheduling function unit 25 resets the scheduled number of substrates to “0”. The scheduled number of substrates is used in the determination in step S38.
Thereafter, by the same operation, a plan for processing the seventh substrate PJ1-7 having the process job number PJ1 by the processing unit SPIN1 is created (see FIG. 66), and then the eighth substrate PJ1 having the process job number PJ1 is prepared. A plan for processing -8 by the processing unit SPIN2 is created (see FIG. 67). Since the board PJ1-8 is the last board of the process job number PJ1, the determination in step S49 is affirmed, and the scheduling function unit 25 deletes the right to use the process job number PJ1 (step S50). Thereby, the overall scheduling shown in FIG. 67 is completed, and the scheduling ends (step S37: NO, step S53).

  As is clear from the comparison between FIG. 67 and FIG. 28, the entire processing time is shortened by performing the processing according to the scheduling shown in FIG. In particular, the processing time can be shortened because the transfer blocks representing the transfer of two substrates by the indexer robot IR can be arranged on the time axis. In addition, among the parallel processing units SPIN1 to SPIN4 specified in the recipe of the process job number PJ2, the remaining processing units are used even when the right to use the processing units SPIN1 to SPIN2 is set to the process job number PJ1. When the last use time of SPIN3 and SPIN4 is early, the right to use the processing units SPIN3 and SPIN4 is set for the process job number PJ2. As a result, a plan has been formulated in which the processing of the substrates PJ2-1 and PJ2-2 precedes the processing of the process job number PJ3, thereby significantly reducing the overall substrate processing time.

Also, the usage right is deleted not immediately after the last substrate of the process job is issued, but immediately after the last substrate is scheduled, so that the processing unit can be efficiently operated. .
68 to 79 are diagrams for explaining the fourth embodiment, and show still another example of scheduling for three substrate groups (process jobs) assigned process job numbers PJ1, PJ2, and PJ3. . This example is an example in which the scheduling shown in FIG. 45 is applied to the substrate processing apparatus having the configuration shown in FIGS. 1 and 2.

  It is assumed that the substrate group of process job number PJ1 is composed of eight substrates PJ1-1 to PJ1-1 and two processing units SPIN1 and SPIN2 are designated as parallel processing units by the recipe in the processing content data. Further, it is assumed that the substrate group of the process job number PJ2 includes two substrates PJ2-1 and PJ2-1 and four processing units SPIN1 to SPIN4 are designated as parallel processing units by the recipe in the processing content data. Further, it is assumed that the substrate group of the process job number PJ3 includes two substrates PJ3-1 and PJ3-1 and two processing units SPIN3 to SPIN4 are designated as parallel processing units by a recipe in the processing content data. . A case is assumed in which processing is started for the substrate groups of process job numbers PJ1, PJ2, and PJ3 in the order of the numbers, and a scheduling instruction is generated.

  When a substrate processing start instruction is given (step S31 in FIG. 45), the scheduling function unit 25 creates a temporary time table (step S32). In other words, the scheduling function unit 25 has provisional time tables representing two routes, a route passing through the processing unit SPIN1 and a route passing through the processing unit SPIN2, for the eight substrates PJ1-1 to 8 having the process job number PJ1, respectively. Created. Similarly, the scheduling function unit 25 generates a temporary time table representing four paths that pass through any one of the processing units SPIN1 to SPIN4 for the two substrates PJ2-1 to 2 of the process job number PJ2. create. Further, the scheduling function unit 25 creates a temporary time table representing two paths passing through the processing units SPIN3 and SPIN4 for the two substrates PJ3-1 and PJ3 of process job number PJ3. The created temporary time table is stored in the storage unit 23.

  When the process start is sequentially instructed for the process job numbers PJ1, PJ2, and PJ3, and a scheduling instruction is generated in response thereto (step S33 in FIG. 45), the scheduling function unit 25 stores all the temporary times stored in the storage unit 23. The table, that is, the temporary time table of all the substrates W corresponding to the process job numbers PJ1 to PJ3 is read, and the entire scheduling is started. There is no other substrate W that has already started processing (step S35: NO), there is an unscheduled substrate W (step S37: YES), and the number of substrates that can be transferred at one time (one in this embodiment). Since the unprocessed substrate W has not yet been scheduled (step S38: NO), the temporary time table of the first substrate PJ1-1 of the process job number PJ1 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 determines whether there is a usable one among the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1, that is, the right to use another process job number is not set. A check is made (step S40). Since this determination is affirmed when scheduling the first substrate W, the scheduling function unit 25 further processes the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1. Is specified (step S41). Initially, since the last use time of any processing unit is “0”, the processing unit SPIN1 with the smallest number corresponds.

  Since the process job numbers PJ2 and PJ3 have started after the process job number PJ1 and neither usage right has been set, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 obtains the last use time of the parallel processing units SPIN1 to SPIN4 used by the process job number PJ2 from the storage unit 23, and further the final processing unit SPIN3 to SPIN4 used by the process job number PJ3. The use time is acquired from the storage unit 23. And the scheduling function part 25 compares those last use time with the last use time of the processing unit specified by step S41 (step S51). Since the last use time of each processing unit at the beginning of scheduling is the initial value “0”, the determination in step S51 is negative. Therefore, the scheduling function unit 25 sets the right to use the process job number PJ1 for the processing units SPIN1 and SPIN2 designated as parallel processing units in the recipe of the process job number PJ1 (step S43). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ1-1 having the process job number PJ1 (steps S44 to S47).

  FIG. 68 shows an example in which blocks relating to the first substrate PJ1-1 of the process job number PJ1 are arranged. At this time, a temporary time table representing the route passing through the processing unit SPIN1, which is the processing unit with the earliest last use time specified in steps S41 and S42, is selected, and the blocks constituting the temporary time table are displayed on the time axis. Arranged at the top justified above.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN1 finishes the processing of the substrate PJ1-1 as the last use time of the processing unit SPIN1, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-1 is not the last substrate of the process job number PJ1, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After scheduling the first substrate PJ1-1 having the process job number PJ1, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of the process job numbers PJ1, PJ2, and PJ3 has not been completed (step S37: YES), but the number of the scheduled substrates W is the number of simultaneous conveyances of the indexer robot IR (1 in this embodiment). ) (Step S38: YES), the scheduling is temporarily ended (step S52).

When one scheduled substrate PJ1-1 is paid out from the substrate container C, a scheduling instruction is generated (step S33: YES). At this time, the scheduling function unit 25 resets the scheduled number of substrates to “0”. The scheduled number of substrates is used in the determination in step S38.
When the scheduling instruction is generated, the scheduling function unit 25 reads all the temporary time tables stored in the storage unit 23, that is, the temporary time tables of all the substrates W corresponding to the process job numbers PJ1 to PJ3, and performs scheduling. Start. In this case, since there is another substrate PJ1-1 that has already started processing (step S35: YES), scheduling is performed only by the substrate PJ1-1 that has started processing. The result is the same as FIG. Furthermore, there is an unscheduled substrate (step S37: YES), and scheduling of the unprocessed substrates W for the number of sheets that can be transported at one time has not been completed (step S38: NO). Among the completed process jobs, the board with the earliest processing order of the process job number with the earliest scheduling instruction, that is, the second board PJ1-2 of the process job number PJ1, is set as the scheduling target board, and data relating to the scheduling target board is obtained. Obtained from the storage unit 23 (step S39). Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). Since the processing block for the substrate PJ1-1 is arranged in the processing unit SPIN1, the processing unit SPIN2 is applicable.

  Since there are other process job numbers PJ2 and PJ3 for which scheduling has been instructed after the scheduling target substrate PJ1-2, and there are processing units SPIN3 and SPIN4 that can be used in those process jobs (no usage rights are set), step The determination in S42 is affirmed. Therefore, the scheduling function unit 25 acquires the last use times of the processing units SPIN <b> 3 to SPIN <b> 4 from the storage unit 23. Then, the scheduling function unit 25 compares the last use time with the last use time of the processing unit SPIN3 specified in Step S41 (Step S51). In this case, the final use time of the processing unit SPIN2 is the initial value “0”, and the final use times of the processing units SPIN3 to SPIN4 are also the initial value “0”, so the determination in step S51 is negative. Therefore, the scheduling function unit 25 maintains the right to use the process job number PJ1 (step S43). Thereafter, the scheduling function unit 25 arranges blocks constituting the temporary time table of the second substrate PJ1-2 having the process job number PJ1 (steps S44 to S47).

FIG. 69 shows an example in which blocks related to the second substrate PJ1-2 having the process job number PJ1 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN2, which is the processing unit with the earliest last use time, identified in steps S41 and S42 is selected, and blocks constituting the temporary time table are displayed on the time axis. It is arranged in front.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN2 finishes the processing of the substrate PJ1-2 as the last use time of the processing unit SPIN2, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-2 is not the last substrate of the process job number PJ1, the determination in step S49 is denied, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After the second substrate PJ1-2 having the process job number PJ1 is scheduled, when the substrate PJ1-2 is paid out from the substrate container C, a scheduling instruction is generated (step S33: YES), and steps S34 to S36 are performed. Through the processing, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrate W of the process job numbers PJ1, PJ2, and PJ3 has not been completed (step S37: YES), and the number of substrates that have been scheduled is reset to “0” when the scheduling instruction is generated (step S38). : NO), a temporary time table of the third substrate PJ1-3 of the process job number PJ1 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN1 and SPIN2 designated in the recipe of the process job number PJ1 can be used (step S40). In this case, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1 (step S41). It can be seen from FIG. 69 that the processing unit SPIN1 is applicable.

  Since the process job numbers PJ2 and PJ3 are started after the process job number PJ1 and the processing units SPIN3 and SPIN4 are usable, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 acquires from the storage unit 23 the last use times of the processing units SPIN3 to SPIN4 that can use the process job number PJ2 or PJ3. Then, the scheduling function unit 25 compares these last use times with the last use time of the processing unit SPIN1 specified in Step S41 (Step S51). In the assumed situation, the final use times of the processing units SPIN3 and SPIN4 are both the initial value “0”, so the determination in step S51 is affirmative.

  Therefore, the scheduling function unit 25 has the earliest processing order among the unscheduled substrates with the process job number PJ2 that can use the processing unit SPIN3 with the smallest number among the processing units SPIN3 and SPIN4 with the earliest last use time. The first substrate PJ2-1 is a substrate to be scheduled (step S52), and the processing from step S42 is performed. In this case, since there is a process job PJ3 started after the process job number PJ2 (step S42: YES), the last use time of the processing unit SPIN4 that can be used with the process job number PJ3 is checked. Judgment is negative.

  Therefore, the scheduling function unit 25 grants the right to use the process job number PJ2 to the processing units SPIN3 and SPIN4 for which the right to use is not set among the parallel processing units SPIN1 to SPIN4 specified in the recipe for the process job number PJ2. Set (step S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ2-1 having the process job number PJ2 (Steps S44 to S47).

FIG. 70 shows an example in which blocks relating to the first substrate PJ2-1 of the process job number PJ2 are arranged. At this time, a provisional time table representing a route passing through the processing unit SPIN3, which is the processing unit with the earliest last use time, is selected, and the blocks constituting the provisional time table are arranged on the time axis in front-alignment.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN3 finishes the processing of the substrate PJ2-1 as the last use time of the processing unit SPIN3, and writes it in the storage unit 23 (step S48). Since the substrate PJ2-1 is not the last substrate of the process job number PJ2, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ2. This state is shown in FIG.

  After the scheduling of the first substrate PJ2-1 having the process job number PJ2, when the substrate PJ2-1 is paid out from the substrate container C, a scheduling instruction is generated (step S33: YES), and steps S34 to S36 are performed. Through the processing, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrate W of the process job numbers PJ1, PJ2, and PJ3 has not been completed (step S37: YES), and the number of substrates that have been scheduled is reset to “0” when the scheduling instruction is generated (step S38). : NO), the scheduling function unit 25 selects the third board PJ1-3 having the process order with the earliest processing order of the process job number with the earliest scheduling instruction among the unscheduled process jobs, ie, the third board PJ1-3 with the process job number PJ1. A scheduling target board is obtained, and data relating to the scheduling target board is acquired from the storage unit 23 (step S39). Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). In this case, the processing unit SPIN1 corresponds (see FIG. 70).

  Since there are other process job numbers PJ2 and PJ3 for which scheduling is instructed after the scheduling target substrate PJ1-3 and the right to use the processing units SPIN3 and SPIN4 is set to the process job number PJ2, the determination in step S42 Is affirmed. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. Then, the scheduling function unit 25 compares the last use time with the last use time of the processing unit SPIN1 specified in Step S41 (Step S51). In this case, since the last use time of the processing unit SPIN4 is the initial value “0”, the determination in step S51 is affirmative. Therefore, the scheduling function unit 25 schedules the second substrate PJ2-2, which is the substrate with the earliest processing order among the unscheduled substrates with the process job number PJ2 that can use the processing unit SPIN4 with the earliest last use time. As the target substrate (step S52), the processing from step S42 is performed. In this case, there is a process job number PJ3 started after the process job number PJ2, but since the right to use the processing units SPIN3 and SPIN4 is set to the process job number PJ2, the determination in step S42 is negative. Become. Therefore, the scheduling function unit 25 maintains the right to use the process units SPIN3 and SPIN4 of the process job number PJ2 (step S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the second substrate PJ2-2 having the process job number PJ2 (Steps S44 to S47).

FIG. 71 shows an example in which blocks relating to the second substrate PJ2-2 of the process job number PJ2 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN4, which is the processing unit with the earliest last use time, is selected, and the blocks constituting the temporary time table are arranged on the time axis in front-alignment.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN4 finishes the processing of the substrate PJ2-2 as the last use time of the processing unit SPIN4, and writes it in the storage unit 23 (step S48). Since the substrate PJ2-2 is the last substrate of the process job number PJ2, the determination in step S49 is affirmed, and the scheduling function unit 25 deletes the right to use the process job number PJ2 (step S50). This state is shown in FIG.

  After the second substrate PJ2-2 having the process job number PJ2 is scheduled, when the substrate PJ2-2 is paid out from the substrate container C, a scheduling instruction is generated (step S33: YES), and steps S34 to S36 are performed. Through the processing, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of process job numbers PJ1 and PJ3 has not been completed (step S37: YES), and the number of substrates already scheduled is reset to “0” by the generation of the scheduling instruction (step S38: NO). ), The provisional time table of the third substrate PJ1-3 of the process job number PJ1 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN1 and SPIN2 designated in the recipe of the process job number PJ1 can be used (step S40). In this case, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1 (step S41). From FIG. 71, it can be seen that the processing unit SPIN1 is applicable.

  Since the process job numbers PJ2 and PJ3 have started after the process job number PJ1, the scheduling for the process job number PJ3 has not been completed, and no usage rights have been set for the processing units SPIN3 and SPIN4. The determination is affirmed. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. And the scheduling function part 25 compares those last use time with the last use time of the processing unit specified by step S41 (step S51). In the assumed situation, since the last use time of the processing unit SPIN1 is earlier than the last use time of the processing units SPIN3 and SPIN4, the determination in step S51 is negative. Therefore, the scheduling function unit 25 maintains the right to use the process job number PJ1 (step S43), and arranges blocks constituting the temporary time table of the third substrate PJ1-3 having the process job number PJ1 ( Steps S44 to S47).

  FIG. 72 shows an example in which blocks relating to the third substrate PJ1-3 of process job number PJ1 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN1, which is the processing unit with the earliest last use time, is selected, and blocks constituting the temporary time table are arranged on the time axis in front-alignment. More specifically, the processing block of the substrate PJ1-3 is arranged after the processing block of the substrate PJ1-1 corresponding to the processing unit SPIN1, and the interval between the blocks is made as small as possible in accordance with the processing block. Thus, each block is arranged.

  Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN1 finishes the processing of the substrate PJ1-3 as the last use time of the processing unit SPIN1, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-3 is not the last substrate of the process job number PJ1, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After the third substrate PJ1-3 having the process job number PJ1 is scheduled, when the substrate PJ1-3 is paid out from the substrate container C, a scheduling instruction is generated (step S33: YES), and steps S34 to S36 are performed. Through the processing, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of process job numbers PJ1 and PJ3 has not been completed (step S37: YES), and the number of substrates already scheduled is reset to “0” by the generation of the scheduling instruction (step S38: NO). ), The scheduling function unit 25 schedules the fourth board PJ1-4 of the process job number PJ1 that is the earliest processing order of the process job number with the earliest scheduling instruction among the unscheduled process jobs. A board is obtained, and data relating to the board to be scheduled is acquired from the storage unit 23 (step S39).

  Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). In this case, the processing unit SPIN2 is applicable (see FIG. 72).

  Of the other process job numbers PJ2 and PJ3 for which scheduling is instructed after the scheduling target substrate PJ1-3, the process job number PJ3 is unscheduled, and the processing units SPIN3 and SPIN4 are usable (use rights are not set). Therefore, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. Then, the scheduling function unit 25 compares the last use time with the last use time of the processing unit SPIN2 specified in Step S41 (Step S51). In this case, the final use time of the processing unit SPIN2 is the earliest (see FIG. 72), so the determination in step S51 is negative. Therefore, the scheduling function unit 25 maintains the right to use the processing units SPIN1, SPIN2 of the process job number PJ1 (step S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the fourth substrate PJ1-4 having the process job number PJ1 (Steps S44 to S47).

FIG. 73 shows an example in which blocks relating to the fourth substrate PJ1-4 of process job number PJ1 are arranged. At this time, a provisional time table representing a route passing through the processing unit SPIN2, which is the processing unit with the earliest last use time, is selected, and blocks constituting the provisional time table are arranged on the time axis in front-alignment.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN2 finishes the processing of the substrate PJ1-4 as the last use time of the processing unit SPIN2, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-4 is not the last substrate of the process job number PJ1, the determination in step S49 is denied, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After the fourth substrate PJ1-4 having the process job number PJ1 is scheduled, when the substrate PJ1-4 is paid out from the substrate container C, a scheduling instruction is generated (step S33: YES), and steps S34 to S36 are performed. Through the processing, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of process job numbers PJ1 and PJ3 has not been completed (step S37: YES), and the number of substrates already scheduled is reset to “0” by the generation of the scheduling instruction (step S38: NO). ), A provisional time table of the fifth substrate PJ1-5 of process job number PJ1 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN1 and SPIN2 designated in the recipe of the process job number PJ1 can be used (step S40). In this case, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1 (step S41). FIG. 73 shows that the processing unit SPIN1 is applicable.

  Since the scheduling of the process job number PJ3 started after the process job number PJ1 has not been completed and the processing units SPIN3 and SPIN4 can be used, the determination in step S42 is affirmed. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. Then, the scheduling function unit 25 compares these last use times with the last use time of the processing unit SPIN1 specified in Step S41 (Step S51). In the assumed situation, the final use time of the processing unit SPIN3 is the earliest among the processing units SPIN1, SPIN3 and SPIN4 (see FIG. 73), so the determination in step S51 is affirmative.

  Therefore, the scheduling function unit 25 schedules the first substrate PJ3-1 that is the substrate with the earliest processing order among the unscheduled substrates with the process job number PJ3 that can use the processing unit SPIN3 with the earliest last use time. As the target substrate (step S52), the processing from step S42 is performed. In this case, since there is no process job started after the process job number PJ3 (step S42: NO), the scheduling function unit 25 selects the parallel processing units SPIN3 to SPIN4 designated by the recipe of the process job number PJ3. The right to use the process job number PJ3 is set for the processing units SPIN3 and SPIN4 for which the right to use has not been set (step S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the first substrate PJ3-1 having the process job number PJ3 (steps S44 to S47).

FIG. 74 shows an example in which blocks relating to the first substrate PJ3-1 of the process job number PJ3 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN3, which is the processing unit with the earliest last use time, is selected, and blocks constituting the temporary time table are arranged on the time axis so as to be left-justified.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN3 finishes the processing of the substrate PJ3-1 as the last use time of the processing unit SPIN3, and writes it in the storage unit 23 (step S48). Since the substrate PJ3-1 is not the last substrate of the process job number PJ3, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ3. This state is shown in FIG.

  After the scheduling of the first substrate PJ3-1 having the process job number PJ3, when the substrate PJ3-1 is paid out from the substrate container C, a scheduling instruction is generated (step S33: YES), and steps S34 to S36 are performed. Through the processing, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrates W of process job numbers PJ1 and PJ3 has not been completed (step S37: YES), and the number of substrates already scheduled is reset to “0” by the generation of the scheduling instruction (step S38: NO). ), The scheduling function unit 25 schedules the board PJ1-5 having the earliest processing order of the process job number with the earliest scheduling instruction among the unscheduled process jobs, that is, the fifth board PJ1-5 having the process job number PJ1. A board is obtained, and data relating to the board to be scheduled is acquired from the storage unit 23 (step S39).

  Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). In this case, the processing unit SPIN1 corresponds (see FIG. 74).

  Since the scheduling of another process job number PJ3 instructed after the scheduling target substrate PJ1-5 has not been completed and the right to use the processing units SPIN3 and SPIN4 is set to the process job number PJ3, step S42 The determination at is affirmed. Therefore, the scheduling function unit 25 acquires the last use time of the processing units SPIN3 and SPIN4 from the storage unit 23. Then, the scheduling function unit 25 compares the last use time with the last use time of the processing unit SPIN1 specified in Step S41 (Step S51). In this case, the last use time of the processing unit SPIN4 is earlier than the last use time of the processing unit SPIN1.

  Therefore, the scheduling function unit 25 schedules the second substrate PJ3-2 that is the substrate with the earliest processing order among the unscheduled substrates of the process job number PJ3 that can use the processing unit SPIN4 with the earliest last use time. As the target substrate (step S52), the processing from step S42 is performed. In this case, since there is no process job started after the process job number PJ3 (step S42: NO), the scheduling function unit 25 maintains the right to use the processing units SPIN3 and SPIN4 of the process job number PJ3 (step S42). S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the second substrate PJ3-2 having the process job number PJ3 (Steps S44 to S47).

FIG. 75 shows an example in which blocks relating to the second substrate PJ3-2 of process job number PJ3 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN4, which is the processing unit with the earliest last use time, is selected, and the blocks constituting the temporary time table are arranged on the time axis in front-alignment.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN4 finishes the processing of the substrate PJ3-2 as the last use time of the processing unit SPIN4, and writes it in the storage unit 23 (step S48). Since the substrate PJ3-2 is the last substrate of the process job number PJ3, the determination in step S49 is affirmed, and the scheduling function unit 25 deletes the right to use the process job number PJ3 (step S50). This state is shown in FIG.

  After the second substrate PJ3-2 having the process job number PJ3 is scheduled, when the substrate PJ3-2 is paid out from the substrate container C, a scheduling instruction is generated (step S33: YES), and steps S34 to S36 are performed. Through the processing, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrate W of the process job number PJ1 has not been completed (step S37: YES), and the number of substrates already scheduled is reset to “0” when the scheduling instruction is generated (step S38: NO). A temporary time table of the fifth substrate PJ1-5 having the process job number PJ1 is acquired from the storage unit 23 (step S39). Further, the scheduling function unit 25 checks whether or not the parallel processing units SPIN1 and SPIN2 designated in the recipe of the process job number PJ1 can be used (step S40). In this case, since the right to use the process job number PJ1 is set for the processing units SPIN1 and SPIN2, the determination in step S40 is affirmed. Therefore, the scheduling function unit 25 further identifies the processing unit with the earliest last use time among the processing units SPIN1 and SPIN2 that can be used with the process job number PJ1 (step S41). From FIG. 75, it can be seen that the processing unit SPIN1 is applicable.

  Since the scheduling of the process job numbers PJ2 and PJ3 started after the process job number PJ1 is completed, the determination in step S42 is denied. Therefore, the scheduling function unit 25 maintains the right to use the process job number PJ1 (step S43), and arranges blocks constituting the temporary time table of the fifth substrate PJ1-5 of the process job number PJ1 ( Steps S44 to S47).

FIG. 76 shows an example in which blocks relating to the fifth substrate PJ1-5 of process job number PJ1 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN1, which is the processing unit with the earliest last use time, is selected, and blocks constituting the temporary time table are arranged on the time axis in front-alignment.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN1 finishes the processing of the substrate PJ1-5 as the last use time of the processing unit SPIN1, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-5 is not the last substrate of the process job number PJ1, the determination in step S49 is negative, and the scheduling function unit 25 maintains the right to use the process job number PJ1. This state is shown in FIG.

  After the fifth substrate PJ1-5 having the process job number PJ1 is scheduled, when the substrate PJ1-5 is paid out from the substrate container C, a scheduling instruction is generated (step S33: YES), and steps S34 to S36 are performed. Through the processing, the scheduling function unit 25 performs the processing from step S37. In this case, the scheduling for the substrate W of the process job number PJ1 has not been completed (step S37: YES), and the number of substrates already scheduled is reset to “0” when the scheduling instruction is generated (step S38: NO). The scheduling function unit 25 sets the board with the earliest processing order of the process job number with the earliest scheduling instruction among the unscheduled process jobs, that is, the sixth board PJ1-6 with the process job number PJ1 as the board to be scheduled. Then, data relating to the board to be scheduled is acquired from the storage unit 23 (step S39). Since the right to use the process job number PJ1 is maintained, the determination in step S40 is affirmative, and the scheduling function unit 25 uses the final use of the parallel processing units SPIN1 and SPIN2 specified in the recipe of the process job number PJ1. The processing unit with the smallest time is specified (step S41). In this case, the processing unit SPIN2 is applicable (see FIG. 76). Since the scheduling of the other process job numbers PJ2 and PJ3 instructed after the scheduling target substrate PJ1-6 has been completed, the determination in step S42 is negative. Accordingly, the scheduling function unit 25 maintains the right to use the process units SPIN1 and SPIN2 of the process job number PJ1 (step S43). Then, the scheduling function unit 25 arranges blocks constituting the temporary time table of the sixth substrate PJ1-6 having the process job number PJ1 (steps S44 to S47).

FIG. 77 shows an example in which blocks relating to the sixth substrate PJ1-6 of process job number PJ1 are arranged. At this time, a temporary time table representing a route passing through the processing unit SPIN2, which is the processing unit with the earliest last use time, is selected, and blocks constituting the temporary time table are arranged on the time axis in front-alignment.
Thereafter, the scheduling function unit 25 obtains the time when the processing unit SPIN2 finishes the processing of the substrate PJ1-6 as the last use time of the processing unit SPIN2, and writes it in the storage unit 23 (step S48). Since the substrate PJ1-6 is not the last substrate of the process job number PJ1, the determination in step S49 is denied, and the scheduling function unit 25 maintains the right to use the process job number PJ1 (step S50). This state is shown in FIG.

  Thereafter, by the same operation, a plan for processing the seventh substrate PJ1-7 having the process job number PJ1 by the processing unit SPIN1 is created (see FIG. 78), and then the eighth substrate PJ1 having the process job number PJ1 is prepared. A plan for processing -8 by the processing unit SPIN2 is created (see FIG. 79). Since the board PJ1-8 is the last board of the process job number PJ1, the determination in step S49 is affirmed, and the scheduling function unit 25 deletes the right to use the process job number PJ1 (step S50). Thereby, the overall scheduling shown in FIG. 79 is completed and the scheduling ends (step S37: NO).

  As described above, also in this embodiment, among the parallel processing units SPIN1 to SPIN4 specified in the recipe of the process job number PJ2, the right to use the processing units SPIN1 to SPIN2 is set to the process job number PJ1. However, when the last use time of the remaining processing units SPIN3 and SPIN4 is early, the right to use the processing units SPIN3 and SPIN4 is set for the process job number PJ2. As a result, it is possible to formulate a plan in which the processing of the substrates PJ2-1 and PJ2-2 precedes the processing of the process job number PJ3, thereby significantly reducing the overall substrate processing time. Also, the usage right is deleted not immediately after the last substrate of the process job is issued, but immediately after the last substrate is scheduled, so that the processing unit can be efficiently operated. .

As mentioned above, although four embodiment of this invention has been described, this invention can also be implemented with another form. For example, the configuration of the substrate processing apparatus and the substrate processing contents shown in the above-described embodiments are merely examples, and the substrate processing apparatus can take other configurations, and the present invention can be applied to other substrate processing contents. Applicable.
The program 30 may be provided in a state incorporated in the computer 20 or recorded on a storage medium (computer-readable storage medium such as a CD-ROM or DVD-ROM) different from the computer 20. May be provided in the state.

In addition, various design changes can be made within the scope of the matters described in the claims.
Features that can be extracted from this specification and the accompanying drawings are described below.
A1. A method for a controller provided in the substrate processing apparatus to create a schedule for defining the operation of a substrate processing apparatus having a single-wafer type processing unit for processing substrates one by one according to a time series,
A first usage right setting step in which the control unit sets a usage right of the processing unit for a first substrate group to be subjected to common processing;
Arrangement of the first processing block representing the processing by the processing unit of the substrate of the first substrate group when the control unit has the right to use the processing unit for the first substrate group. A first processing block disposition step for prohibiting disposition of processing blocks representing processing by the processing unit of substrates of other substrate groups,
The control unit deleting a right to use the processing unit for the first substrate group;
The controller grants the right to use the processing unit to the second substrate group to be subjected to a common process after the right to use the processing unit set for the first substrate group is deleted. A second usage right setting step to be set;
Arrangement of the second processing block representing the processing by the processing unit of the substrate of the second substrate group when the control unit has the right to use the processing unit for the second substrate group. A second processing block disposing step for prohibiting disposition of processing blocks representing processing by the processing unit of substrates of other substrate groups,
A schedule creation method including
According to this method, the right to use the single wafer processing unit is set for the first substrate group to be subjected to common processing. When this right of use is set, only the first processing block representing processing for a substrate belonging to the first substrate group can be arranged as a processing block representing processing by the processing unit, and belongs to another substrate group. Arrangement of processing blocks representing processing on a substrate is prohibited. Therefore, in the processing unit, it can be ensured that the processing of the other substrate group is not interrupted during the processing of the first substrate group. Further, when the right to use the processing unit for the first substrate group is deleted, the right to use the processing unit is set to the second substrate group which is another substrate group. Therefore, as a processing block representing processing by the processing unit, only a second processing block representing processing for a substrate belonging to the second substrate group can be arranged, and a processing block representing processing for a substrate belonging to another substrate group. Placement is prohibited. Therefore, in the processing unit, it can be guaranteed that the processing of the other substrate group is not interrupted during the processing of the second substrate group. Thus, by setting and deleting the usage right, it is possible to avoid that a substrate to be subjected to another processing is interrupted between a group of substrates having a common processing, so that a processing unit as a resource of the substrate processing apparatus can be efficiently used. Can be operated. As a result, it is possible to efficiently arrange processing blocks for individual substrates on the time axis and increase the operating rate of resources such as a single wafer processing unit, thereby improving the productivity of the single substrate processing apparatus. .
A2. The schedule creation method according to Item A1, wherein the step of deleting the right to use the processing unit for the first substrate group is executed immediately after completion of scheduling for all the substrates belonging to the first substrate group.
In this method, since the deletion of the right to use the processing unit for the first substrate group is executed immediately after the completion of scheduling for all the substrates belonging to the first substrate group, it relates to the substrates belonging to the first substrate group. The right to use the processing unit can be set for the second substrate group without waiting for the start of processing. As a result, the processing blocks for the substrates belonging to the second substrate group can be quickly arranged, so that efficient processing block arrangement is possible, and the operating rate of the single wafer processing unit can be further increased. Specifically, the time immediately after the completion of scheduling may be before the last substrate of the first substrate group is transferred (for example, unloaded from the substrate container) for processing.
A3. The substrate processing apparatus includes a plurality of processing units,
Substrate constituting the first substrate group can be processed in the first processing unit group of the plurality of processing units,
The substrates constituting the second substrate group can be processed in a second processing unit group including at least one processing unit belonging to the first processing unit group among the plurality of processing units,
The scheduling method according to Item A2, wherein the second processing block arranging step includes a step of arranging the second processing block so as not to interfere (duplicate on the time axis) with the first processing block.
In this method, the first processing unit group capable of processing the first substrate group and the second processing unit group capable of processing the second substrate group have at least one overlapping processing unit. In this case, when the right to use the first processing unit group is set for the first substrate group, the arrangement of the second processing block with respect to the overlapping processing unit is not permitted. When the right to use the first processing unit group for the first substrate group is deleted, the second processing block can be arranged for the overlapping processing unit. In this case, the second processing block is arranged so as not to interfere (duplicate on the time axis) with the first processing block. Specifically, the second processing block is arranged in a processing unit other than the overlapping processing unit in the second processing unit group, or the overlapping processing unit does not interfere with the first processing block. A second processing block can be arranged. Thus, the single wafer processing unit can be operated efficiently while avoiding interference between the first processing block and the second processing block.
A4. The substrate processing apparatus includes a plurality of processing units,
Substrate constituting the first substrate group can be processed in the first processing unit group of the plurality of processing units,
A second processing unit in which a substrate constituting the second substrate group includes a processing unit belonging to the first processing unit group and a processing unit not belonging to the first processing unit group among the plurality of processing units. Can be processed in groups,
When the right to use the first processing unit group is set for the first substrate group, the control unit includes the second processing unit group for the second substrate group. The schedule creation method according to any one of Items A1 to A3, further including a third usage right setting step of setting a usage right of a processing unit that does not belong to the first processing unit group.
According to this method, even when the right to use the first processing unit group is set for the first substrate group, the second processing unit group in the second processing unit group has the right to use the first processing unit group. The right to use a processing unit that does not overlap with one processing unit group is set. Thereby, the second processing block can be arranged without waiting for the deletion of the right to use the first processing unit group and without interfering with the first processing block. Therefore, the single wafer processing unit can be operated more efficiently.
A5. The last use time of a processing unit that does not belong to the first processing unit group in the second processing unit group is another processing unit (the processing unit that belongs to the first processing unit group in the second processing unit group). The schedule creation method according to Item A4, wherein the control unit executes the third usage right setting step when it is earlier than the last use time.
In this method, when the last use time of a processing unit that does not overlap with the first processing unit group in the second processing unit group is earlier than the last use time of the processing unit that overlaps with the first processing unit group, The right to use the non-overlapping processing unit is set for the substrate group. Therefore, the second processing block for the substrates belonging to the second substrate group can be arranged before the last use time of the overlapping processing unit. Thereby, the operation rate of a single wafer processing unit can be raised.
A6. The substrate processing apparatus includes a substrate transfer unit having a plurality of substrate holding hands that can hold and transfer a plurality of substrates simultaneously,
Any one of Items A1 to A5 further including a step in which the control unit arranges a plurality of transport blocks each representing transport of a plurality of substrates transported simultaneously by the substrate transport unit so as to overlap on a time axis. The schedule creation method described in the section.
In this method, the substrate transport unit can transport a plurality of substrates simultaneously. Therefore, simultaneous transportation of a plurality of substrates can be planned by arranging a plurality of transportation blocks representing transportation of a plurality of substrates so as to overlap on the time axis. Thus, since the substrate transfer efficiency in the single wafer processing apparatus can be increased, the productivity of the substrate processing apparatus can be increased.
A7. A computer program for creating a schedule for prescribing operations of a substrate processing apparatus having a single-wafer type processing unit for processing substrates one by one in time series, according to any one of Items A1 to A6 A computer program in which steps are incorporated so as to cause a computer as the control unit to execute a method.
With this computer program, it is possible to obtain the above-described effects described regarding the schedule creation method.

W substrate C substrate container ST1 to ST4 stage IR indexer robot PASS delivery unit CR main transfer robot SPIN1 to SPIN12 processing unit G1 to G4 processing unit group 1 indexer section 2 processing section 6 base 7 articulated arm 8A, 8B hand 11 Base unit 12 Articulated arm 13A, 13B, 13C, 13D Hand 15 Spin chuck 16 Processing liquid nozzle 17 Processing chamber 20 Computer 21 Control unit 22 Input / output unit 23 Storage unit 24 Host computer 25 Scheduling function unit 26 Processing execution instruction unit 30 Program 31 Schedule creation program 32 Process execution program 40 Process content data 50 Schedule data

Claims (5)

A method for creating a schedule for defining the operation of a substrate processing apparatus having a plurality of single-wafer processing units for processing substrates one by one according to a time series, the control unit provided in the substrate processing apparatus,
The first processing is performed on the first substrate group that can be processed in the first processing unit group of the plurality of processing units by the control unit, which is a first substrate group to perform common processing. A first usage right setting step for setting usage rights of processing units belonging to the unit group ;
Wherein the control unit is, the when the right of use of the first processing unit processing units belonging to the group is set to said first substrate group, the first processing of the substrate of the first substrate group while allowing the arrangement of the first processing block showing the processing by the processing units belonging to unit group, prohibits the arrangement of processing blocks that represent processing by the processing units belonging to the first processing unit group of a substrate other substrate group A first processing block placement step,
The control unit deleting a right to use a processing unit belonging to the first processing unit group for the first substrate group;
Wherein the control unit is, in the second process unit group that includes at least one processing units belonging to the first processing unit group among the plurality of processing units and a second substrate group to be subjected to processing in common When planning a process for a second substrate group that can be processed, the right to use is not set for any of the processing units belonging to the second processing unit group . A second usage right setting step for setting usage rights of processing units belonging to the second processing unit group ;
Wherein the control unit is, the when the right of use of the second processing unit processing units belonging to the group is set to said second substrate group, the second processing of the substrate of the second substrate group While the arrangement of the second processing block representing the processing by the processing unit belonging to the unit group is permitted, the arrangement of the processing block representing the processing by the processing unit belonging to the second processing unit group of the substrate of the other substrate group is prohibited. And a second processing block arranging step.   2. The schedule creation method according to claim 1, wherein the step of deleting the right to use the processing unit for the first substrate group is executed immediately after completion of scheduling for all the substrates belonging to the first substrate group.   The control unit can perform processing in a third processing unit group that is a third substrate group to be subjected to a common processing and does not include a processing unit belonging to the first processing unit group among the plurality of processing units. When planning the processing for the third substrate group, the third substrate group is subject to the third substrate on the condition that no right to use is set for any processing unit belonging to the third processing unit group. A third usage right setting step for setting usage rights of processing units belonging to the processing unit group;
  When the use right of the processing unit belonging to the third processing unit group is set for the third substrate group, the control unit performs the third processing of the substrate of the third substrate group. While the arrangement of the third processing block representing the processing by the processing unit belonging to the unit group is permitted, the arrangement of the processing block representing the processing by the processing unit belonging to the third processing unit group of the substrate of the other substrate group is prohibited. The schedule creation method according to claim 1, further comprising a third processing block arrangement step. The substrate processing apparatus includes a substrate transfer unit having a plurality of substrate holding hands that can hold and transfer a plurality of substrates simultaneously,
Wherein the control unit further comprises the step of placing so as to overlap a plurality of transport blocks respectively representing the transfer of a plurality of substrates which are transported simultaneously by the substrate transfer unit on the time axis, any of claims 1 to 3 The schedule creation method according to one item. A computer program for creating a schedule for defining the operation of a substrate processing apparatus having a single-wafer type processing unit for processing substrates one by one according to a time series,
The computer program in which the group of steps was incorporated so that the computer as the said control part might perform the method as described in any one of Claims 1-4 .