JP6971330B2 - レーザスクライビング装置 - Google Patents
レーザスクライビング装置 Download PDFInfo
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- JP6971330B2 JP6971330B2 JP2019563997A JP2019563997A JP6971330B2 JP 6971330 B2 JP6971330 B2 JP 6971330B2 JP 2019563997 A JP2019563997 A JP 2019563997A JP 2019563997 A JP2019563997 A JP 2019563997A JP 6971330 B2 JP6971330 B2 JP 6971330B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10061—Polarization control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0626—Energy control of the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/141—Beam splitting or combining systems operating by reflection only using dichroic mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
Description
例示的に、レーザスクライビング装置10はレーザ光源100から出射されたレーザビームを集光レンズ600を介した1番目の焦点(F1)は加工対象物の表面または内部にフォーカシングして、2番目の焦点(F2)は加工対象物の表面または内部にフォーカシングする。ここで第1レーザビームと第2レーザビームの発散角を異にして1番目の焦点と2番目の焦点の位置は異なるように形成される。また、加工対象物としては一般的にレーザ波長に対して透過率が高い材質の基板が使用され、例えばサファイア基板またはガラス基板などが使用され得るが、これに限定されるものではない。
図1ないし図3を参照すると、レーザスクライビング装置10はレーザビームを出力するレーザ光源100と、レーザを第1レーザビーム(L1)及び第2レーザビーム(L2)に分割するスプリッタ200と、スプリッタ200によって分割された第1レーザビーム(L2)の偏光方向を90度回転する波長板320と、第1レーザビーム(L1)または第2レーザビーム(L2)の発散角を調節するビームエキスパンダテレスコープ(BEAM EXPANDER TELESCOPE、400)と、第1レーザビーム(L1)及び第2レーザビーム(L2)を結合するビームコンバイナ500、及びビームコンバイナ500によって結合された第1レーザビーム(L1)及び第2レーザビーム(L2)を集光する集光レンズ600を含む。この時、第1レーザビーム(L1)及び第2レーザビーム(L2)の焦点距離が異なることを特徴とする。
は光軸に垂直なS偏光(S−polaized light)を意味し、
は光軸に水平なP偏光(P−polaized light)を意味する。
100 レーザ光源
200 スプリッタ
320 第1波長板
330 第2波長板
400 ビームエキスパンダテレスコープ
500 ビームコンバイナ
600 集光レンズ
700 減衰器
L1 第1レーザビーム
L2 第2レーザビーム
M1、M2 ミラー部
Claims (9)
- レーザスクライビング装置において、
P偏光又はS偏光のレーザビームを出力するレーザ光源と、
前記レーザビームを、その偏光状態を変更せずに第1レーザビーム及び第2レーザビームに分割するスプリッタと、
前記スプリッタによって分割された第1レーザビームまたは第2レーザビームの経路上に位置して、前記第1レーザビームまたは第2レーザビームの偏光方向を90度回転する第1波長板と、
前記第1レーザビーム及び/または第2レーザビーム経路上で発散角を調節するビームエキスパンダテレスコープと、
前記第1レーザビーム及び第2レーザビームを結合するビームコンバイナ、及び
前記ビームコンバイナによって結合された第1レーザビーム及び第2レーザビームを集光する集光レンズを含み、
前記第1レーザビーム及び第2レーザビームの焦点距離が異なり、前記ビームコンバイナに入射する前記第1レーザビーム及び第2レーザビームの一方はS偏光であり、他方はP偏光であるレーザスクライビング装置。 - 前記第2レーザビームの経路上に位置して、前記第2レーザビームのエネルギーを調節する減衰器をさらに含む請求項1に記載のレーザスクライビング装置。
- 前記第1波長板の出力端に結合して、前記第1レーザビームのエネルギーを調節する減衰器をさらに含む請求項1に記載のレーザスクライビング装置。
- 前記ビームコンバイナの出力端に結合して、前記第1レーザビームと第2レーザビームの偏光状態を円偏光状態に調節する第2波長板をさらに含む請求項2に記載のレーザスクライビング装置。
- 前記ビームコンバイナの出力端に結合して、前記第1レーザビームと第2レーザビームの偏光状態を円偏光状態に調節する第2波長板をさらに含む請求項3に記載のレーザスクライビング装置。
- 前記減衰器は前記第2レーザビームの偏光状態を調節する波長板及び前記波長板の出力端に結合して第2レーザビームのエネルギーを調節する偏光子またはアッテネータを含む請求項2に記載のレーザスクライビング装置。
- 前記第1波長板の出力端に結合して、前記第1レーザビームのエネルギーを調節する偏光子をさらに含む請求項1に記載のレーザスクライビング装置。
- 前記ビームコンバイナの出力端に結合して、前記第1レーザビームと第2レーザビームの偏光状態を円偏光状態に調節する第2波長板をさらに含む請求項7に記載のレーザスクライビング装置。
- 前記ビームコンバイナの出力端に結合して、前記第1レーザビームと第2レーザビームの偏光状態を円偏光状態に調節する第2波長板をさらに含む請求項1に記載のレーザスクライビング装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2017-0022268 | 2017-02-20 | ||
KR1020170022268A KR101902991B1 (ko) | 2017-02-20 | 2017-02-20 | 레이저 스크라이빙 장치 |
PCT/KR2018/002082 WO2018151581A1 (ko) | 2017-02-20 | 2018-02-20 | 레이저 스크라이빙 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020506067A JP2020506067A (ja) | 2020-02-27 |
JP6971330B2 true JP6971330B2 (ja) | 2021-11-24 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019563997A Active JP6971330B2 (ja) | 2017-02-20 | 2018-02-20 | レーザスクライビング装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20190351511A1 (ja) |
JP (1) | JP6971330B2 (ja) |
KR (1) | KR101902991B1 (ja) |
WO (1) | WO2018151581A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102584252B1 (ko) * | 2019-06-10 | 2023-10-05 | 삼성디스플레이 주식회사 | 레이저 어닐 장치 |
KR102295280B1 (ko) * | 2020-02-21 | 2021-08-30 | 광주과학기술원 | Libs 측정이 가능한 고분해능 레이저 가공장치 |
US20210283719A1 (en) * | 2020-03-12 | 2021-09-16 | Rohr, Inc. | Substrate perforation system & method using beamlets |
KR102513576B1 (ko) * | 2021-09-02 | 2023-03-29 | 주식회사 루트로닉 | 레이저 장치 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5105944B2 (ja) * | 2007-04-16 | 2012-12-26 | パナソニック株式会社 | レーザ装置 |
JP4651731B2 (ja) * | 2009-07-29 | 2011-03-16 | 西進商事株式会社 | レーザースクライブ加工方法 |
KR20110062884A (ko) * | 2009-12-04 | 2011-06-10 | 티에스씨멤시스(주) | 레이저 가공장치 및 가공방법 |
KR101161731B1 (ko) * | 2011-06-29 | 2012-07-09 | (주)큐엠씨 | 레이저 가공장치 및 가공방법 |
JP5293791B2 (ja) * | 2011-09-27 | 2013-09-18 | 三星ダイヤモンド工業株式会社 | レーザー加工装置およびレーザー加工装置を用いた被加工物の加工方法 |
JP5965239B2 (ja) * | 2012-07-31 | 2016-08-03 | 三星ダイヤモンド工業株式会社 | 貼り合わせ基板の加工方法並びに加工装置 |
KR101485062B1 (ko) * | 2013-10-29 | 2015-01-22 | 주식회사 에이에스티젯텍 | 레이저 가공장치의 착탈식 석션 노즐 장치 |
JP5902281B2 (ja) * | 2014-11-19 | 2016-04-13 | 三星ダイヤモンド工業株式会社 | レーザー加工装置 |
JP2016129203A (ja) * | 2015-01-09 | 2016-07-14 | 株式会社ディスコ | ウエーハの加工方法 |
-
2017
- 2017-02-20 KR KR1020170022268A patent/KR101902991B1/ko active IP Right Grant
-
2018
- 2018-02-20 JP JP2019563997A patent/JP6971330B2/ja active Active
- 2018-02-20 WO PCT/KR2018/002082 patent/WO2018151581A1/ko active Application Filing
-
2019
- 2019-07-30 US US16/525,614 patent/US20190351511A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
KR20180096070A (ko) | 2018-08-29 |
JP2020506067A (ja) | 2020-02-27 |
US20190351511A1 (en) | 2019-11-21 |
KR101902991B1 (ko) | 2018-10-02 |
WO2018151581A1 (ko) | 2018-08-23 |
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