JP6948747B2 - 検査システム - Google Patents
検査システム Download PDFInfo
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- JP6948747B2 JP6948747B2 JP2021520807A JP2021520807A JP6948747B2 JP 6948747 B2 JP6948747 B2 JP 6948747B2 JP 2021520807 A JP2021520807 A JP 2021520807A JP 2021520807 A JP2021520807 A JP 2021520807A JP 6948747 B2 JP6948747 B2 JP 6948747B2
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- Prior art keywords
- probe
- inspection
- central axis
- inner cylinder
- cylinder portion
- Prior art date
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- 238000007689 inspection Methods 0.000 title claims description 107
- 239000000523 sample Substances 0.000 claims description 80
- 230000003287 optical effect Effects 0.000 claims description 38
- 239000013307 optical fiber Substances 0.000 claims description 26
- 239000007789 gas Substances 0.000 description 16
- 238000010926 purge Methods 0.000 description 11
- 230000012447 hatching Effects 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
- G02B23/2407—Optical details
- G02B23/2423—Optical details of the distal end
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
- G02B23/2407—Optical details
- G02B23/2461—Illumination
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
- G02B23/2476—Non-optical details, e.g. housings, mountings, supports
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
- G01N2021/151—Gas blown
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
- G01N2021/9542—Inspecting the inner surface of hollow bodies, e.g. bores using a probe
- G01N2021/9544—Inspecting the inner surface of hollow bodies, e.g. bores using a probe with emitter and receiver on the probe
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
- G01N2021/9542—Inspecting the inner surface of hollow bodies, e.g. bores using a probe
- G01N2021/9546—Inspecting the inner surface of hollow bodies, e.g. bores using a probe with remote light transmitting, e.g. optical fibres
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Astronomy & Astrophysics (AREA)
- Optics & Photonics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Instruments For Viewing The Inside Of Hollow Bodies (AREA)
Description
Claims (5)
- 中心軸に沿って棒状に延び、前記中心軸の周りに回転する中空のプローブと、
前記プローブを通じて、前記中心軸に沿って検査用のレーザー光を供給し、前記中心軸に沿って戻された被検査物の表面からの反射光を受ける光学システムと、
前記プローブの先端の開口を介して前記中心軸に対して、前記検査用のレーザー光を前記被検査物に向けて出射するとともに前記反射光を前記中心軸方向に導く光学素子と、
前記プローブの内部を通じて前記レーザー光を出射するとともに前記反射光を導く前記開口から気体を放出するガス供給システムとを有する、検査システム。 - 請求項1において、
前記プローブを支持し、回転駆動されるホルダーと、
前記ホルダーの内部に同軸状に設けられた中空で、前記ホルダーとの間にベアリングユニットが配置された非回転の内筒部と、
前記内筒部を介して前記プローブに挿入された非回転の光ファイバーとをさらに有し、
前記ガス供給システムは、前記内筒部を介して前記プローブ内に前記気体を供給するガス供給路を含む、検査システム。 - 請求項2において、
前記光ファイバーを覆う円筒状の鞘管であって、スリーブを介して前記内筒部に接続された鞘管と、
前記鞘管の先端に取り付けられたレンズとをさらに有し、
前記ガス供給路は、前記スリーブの一部を切り欠いて前記内筒部の内部と、前記プローブの内側で前記鞘管の外側の領域とを接続する接続路を含む、検査システム。 - 請求項1ないし3のいずれかにおいて、
前記プローブを含む検査ヘッドを前記中心軸の周りに回転させる駆動ユニットをさらに有する、検査システム。 - 請求項1ないし4のいずれかにおいて、
前記被検査物は、前記プローブが挿入される中空部分を含み、
前記プローブと前記被検査物とを前記中心軸に沿って相対的に移動する移動ユニットをさらに有する、検査システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019097004 | 2019-05-23 | ||
JP2019097004 | 2019-05-23 | ||
PCT/JP2020/019857 WO2020235578A1 (ja) | 2019-05-23 | 2020-05-20 | 検査システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6948747B2 true JP6948747B2 (ja) | 2021-10-13 |
JPWO2020235578A1 JPWO2020235578A1 (ja) | 2021-10-21 |
Family
ID=73458278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021520807A Active JP6948747B2 (ja) | 2019-05-23 | 2020-05-20 | 検査システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US11971366B2 (ja) |
EP (1) | EP3974768A4 (ja) |
JP (1) | JP6948747B2 (ja) |
CN (1) | CN113785189A (ja) |
WO (1) | WO2020235578A1 (ja) |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007060873A1 (ja) | 2005-11-24 | 2007-05-31 | Kirin Techno-System Corporation | 表面検査装置 |
JP2007147324A (ja) * | 2005-11-24 | 2007-06-14 | Kirin Techno-System Corp | 表面検査装置 |
JP4997367B2 (ja) * | 2006-05-23 | 2012-08-08 | キリンテクノシステム株式会社 | 表面検査装置 |
KR101013005B1 (ko) | 2006-05-23 | 2011-02-10 | 가부시끼가이샤 케이티에스 옵틱스 | 표면 검사 장치에 있어서의 검사 헤드의 지지 구조 및 표면검사 장치 |
JP4923208B2 (ja) * | 2006-05-23 | 2012-04-25 | キリンテクノシステム株式会社 | 表面検査装置における検査ヘッドの支持構造 |
JP2007315805A (ja) * | 2006-05-23 | 2007-12-06 | Kirin Techno-System Co Ltd | 表面検査装置 |
US20110080588A1 (en) | 2009-10-02 | 2011-04-07 | Industrial Optical Measurement Systems | Non-contact laser inspection system |
JP5702257B2 (ja) * | 2011-10-13 | 2015-04-15 | 本田技研工業株式会社 | 穴検査方法及び装置 |
US9134232B1 (en) * | 2012-11-15 | 2015-09-15 | Industrial Optical Measurement Systems, LLC | Laser inspection system |
JP6007160B2 (ja) * | 2013-08-29 | 2016-10-12 | 本田技研工業株式会社 | 穴検査方法及び装置 |
US20180356288A1 (en) * | 2017-06-12 | 2018-12-13 | Industrial Optical Measurement Systems | Inspection system for estimating wall friction in combustion engines |
WO2019083009A1 (ja) * | 2017-10-26 | 2019-05-02 | 長野オートメーション株式会社 | 検査システムおよび検査方法 |
WO2019083010A1 (ja) * | 2017-10-26 | 2019-05-02 | 長野オートメーション株式会社 | 検査システムおよび検査方法 |
JP6783739B2 (ja) * | 2017-10-31 | 2020-11-11 | 株式会社東芝 | 検査システムおよび検査方法 |
-
2020
- 2020-05-20 WO PCT/JP2020/019857 patent/WO2020235578A1/ja active Search and Examination
- 2020-05-20 US US17/609,808 patent/US11971366B2/en active Active
- 2020-05-20 EP EP20810230.1A patent/EP3974768A4/en active Pending
- 2020-05-20 JP JP2021520807A patent/JP6948747B2/ja active Active
- 2020-05-20 CN CN202080033290.3A patent/CN113785189A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JPWO2020235578A1 (ja) | 2021-10-21 |
US20220252526A1 (en) | 2022-08-11 |
EP3974768A1 (en) | 2022-03-30 |
EP3974768A4 (en) | 2023-06-14 |
WO2020235578A1 (ja) | 2020-11-26 |
CN113785189A (zh) | 2021-12-10 |
US11971366B2 (en) | 2024-04-30 |
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