JP6940297B2 - Hub type blade mounting structure and board cutting device - Google Patents

Description

The present invention relates to a hub-type blade mounting structure and a substrate cutting device for mounting a hub-type blade used for cutting a substrate such as a semiconductor material into chips into pieces on a rotating shaft.

As is well known, a hub-type blade in which a blade body is arranged on a blade mounting surface of a hub is widely used when cutting a substrate such as a semiconductor material and fragmenting it into chips (for example, patent documents). See 1.).

The hub type blade includes, for example, a hub made of an aluminum alloy and an electroplated blade body formed by nickel plating on one surface of the hub, and the electrocast blade body is integrally connected to the hub. Is common.

The electroformed blade body formed in this way has a thick outer peripheral side when it is formed by plating on the base metal constituting the aluminum hub, so the outer diameter of the aluminum base metal is processed using a cylindrical grinding machine or the like. Make the thickness of the electroformed blade body uniform. Next, the outer diameter-processed aluminum base metal is masked and alkaline-etched to dissolve the outer peripheral portion of the aluminum base metal and expose the blade body having a predetermined size to the outer circumference.

After that, nickel is melted from the surface of the blade body with an electrolytic dress to expose the diamond superabrasive grains, and the diamond superabrasive grains on the outer circumference of the blade body are exposed by about 2 μm with a dicer dress. The blade is completed.

As shown in FIG. 4, such a hub-type blade is a hub that is supported by inserting a washer 502 into the base end side R when the hub-type blade 501 is mounted on the rotary drive shaft 540, and is mounted by a mounting nut 503. It is common to use the mold blade mounting structure 500. Further, when the blade main body 501A has conductivity, the blade main body 501A may be provided with a function as a touch sensor.

However, in the hub type blade 501 mounted in this way, the blade body 501A may be misaligned when the substrate is cut by the hub type blade, and it is difficult to accurately cut the substrate when the misalignment occurs. It becomes.
Therefore, a technique for suppressing run-out is disclosed (see, for example, Patent Document 2).

Japanese Unexamined Patent Publication No. 5-345281 Japanese Unexamined Patent Publication No. 2000-301483

However, the hub type blade described in Patent Document 2 has a problem that it has many components and is heavy, and also has a large appearance and an increase in manufacturing cost.
Therefore, it is possible to easily attach the hub type blade to the rotary drive shaft by a simple structure, and a technique for cutting the substrate with high accuracy and stability while suppressing the runout of the blade body is desired.

The present invention has been made in consideration of such circumstances, and it is possible to easily attach the hub type blade to the rotary drive shaft by a simple structure, and it is highly accurate while suppressing the runout of the blade body. An object of the present invention is to provide a hub-type blade mounting structure and a substrate cutting device capable of stably cutting a substrate.

In order to solve the above problems, the present invention proposes the following means.
The invention according to claim 1 is a hub-type blade mounting structure, wherein a rotary drive shaft formed of a blade mounting shaft that is rotated around an axis and a hub-type blade is mounted on the tip side, and the rotary drive shaft. A blade pressing plate arranged on the base end side of the blade mounting shaft on which the hub type blade is mounted, and a blade mounting member for fixing the hub type blade mounted on the rotary drive shaft on the tip end side of the blade mounting shaft. The blade pressing plate includes a blade pressing portion that presses a region including a circumference corresponding to the outer peripheral edge portion of the hub of the hub type blade in the radial direction around the axis, and the blade pressing portion provides the above-mentioned blade pressing portion. It is characterized in that it is configured to press the blade body of the hub type blade.

According to the hub type blade mounting structure according to the present invention, a blade pressing plate having a blade pressing portion is arranged on the base end side of the blade mounting shaft of the rotary drive shaft, and the hub type blade is mounted on the rotary drive shaft by the blade mounting member. Will be done. Then, the blade pressing portion of the blade pressing plate presses the circumference corresponding to the outer peripheral edge portion of the hub in the radial direction of the blade body constituting the hub type blade.
As a result, the hub type blade can be easily attached to the rotary drive shaft by a simple structure, and the substrate can be cut with high accuracy and stability while suppressing the misalignment of the blade body.

In this specification, the hub type blade in which the blade body is arranged on the mounting surface of the hub is a hub type blade or a blade body in which the blade body is formed by plating on the mounting surface of the hub (including the base metal constituting the hub). It shall include a hub type blade in which the blade body is connected by a connecting portion to the blade mounting surface of the hub created separately from the above.

Examples of the connecting portion for connecting the blade body to the blade mounting surface of the hub include a double-sided adhesive tape (including double-sided adhesive tape), an adhesive resin portion (adhesive layer) formed by curing the adhesive, and ultrasonic waves. The blade body can be attached to the connection part by various diffusion joining including joining, the nugget by spot welding, the connection part by welding such as brazing, the connection part composed of the fastening member that fastens the hub and the blade body. Various connections are included.

The invention according to claim 2 is the hub type blade mounting structure according to claim 1, wherein the rotary drive shaft has a mounting seat formed on the base end side of the blade mounting shaft and the blade pressing plate. Is detachable from the rotary drive shaft, and the blade pressing plate is characterized in that a mounting hole for inserting the blade mounting shaft is formed and the base end side can be supported by the mounting seat.

According to the hub type blade mounting structure according to the present invention, the rotary drive shaft has a mounting seat formed on the base end side of the blade mounting shaft, and the blade pressing plate has the blade mounting shaft inserted into the mounting hole to form a mounting seat. It is seated on the rotary drive shaft and attached to the rotary drive shaft, and the blade pressing plate is removable from the rotary drive shaft.
As a result, when the outer diameter of the hub constituting the hub type blade is changed, the radial position of the blade pressing portion can be easily and efficiently adjusted to the hub type blade.
Moreover, since the blade pressing plate can be easily replaced, maintenance can be performed efficiently.

The invention according to claim 3 is the hub type blade mounting structure according to claim 1 or 2, wherein the blade pressing plate has a gap between the blade pressing portion and the blade main body on the inner peripheral side. It is characterized in that a relief portion to be formed is formed.

According to the hub-type blade mounting structure according to the present invention, the blade pressing plate has a relief portion formed on the inner peripheral side of the blade pressing portion to form a gap between the blade pressing portion and the blade main body. When pressing, the surface pressure of the blade pressing portion on the blade body can be increased.
As a result, the hub type blade can be attached to the rotary drive shaft with high accuracy and more stably.

The invention according to claim 4 is the hub type blade mounting structure according to any one of claims 1 to 3, wherein the blade pressing plate is at least between the blade pressing portion and the rotation drive shaft. It is characterized in that a conductivity-imparting portion for ensuring the conductivity of the above is formed.

According to the hub type blade mounting structure according to the present invention, the blade pressing plate is formed with a conductivity imparting portion for ensuring at least conductivity between the blade pressing portion and the rotation drive shaft, and thus is a hub type. When the blade body has conductivity even when the connection part (for example, double-sided adhesive tape, adhesive resin part, etc.) connecting the hub and the blade body in the blade does not have conductivity. The blade pressing plate enables the blade body to function as a touch sensor, enabling efficient cutting.

According to a fifth aspect of the present invention, the hub-type blade according to any one of claims 1 to 4 includes a double-sided adhesive tape as a connecting portion for connecting the hub and the blade body. It is a feature.

According to the hub type blade mounting structure according to the present invention, the hub type blade is provided with double-sided adhesive tape as a connecting portion for connecting the hub and the blade body, and each is individually formed and the outer diameter dimension and the like pass the inspection. Since the hub and the blade body can be connected with double-sided adhesive tape to form a hub type blade, the outer diameter of the hub can be formed to the set dimensions with high accuracy, and the hub peripheral portion of the blade body can be formed. The radial position corresponding to the above can be accurately pressed by the blade pressing portion.
Further, by connecting the hub and the blade body via the double-sided adhesive tape, the blade body is prevented from being suddenly bent at the outer peripheral edge of the hub, and when the blade body hits the object to be processed, the blade is used. The main body is suppressed from cracking.
As a result, by using one blade pressing plate, it is possible to accurately press the radial position corresponding to the peripheral edge of the hub of the blade body.

Here, as the double-sided adhesive tape, a double-sided adhesive tape having adhesiveness on both sides, an adhesive having one side having adhesiveness and the other side being cured and adhered is arranged, and a base material. Includes adhesives that cure and adhere on both sides. Further, the adhesive (adhesive) constituting the double-sided adhesive tape may be composed of a plurality of substances such that a mixture of conductive substances and the like is dispersed.

The invention according to claim 6 is characterized in that the hub type blade according to any one of claims 1 to 4 includes an adhesive resin portion as a connecting portion for connecting the hub and the blade main body. And.

According to the hub-type blade mounting structure according to the present invention, the hub-type blade includes an adhesive resin portion (adhesive) formed by curing the adhesive as a connection portion for connecting the hub and the blade body. Since the hub type blade can be formed by connecting the hub, which is individually formed and has passed the inspection of the outer diameter dimension, and the blade body by the adhesive resin part, the outer diameter of the hub is formed to the set dimension with high accuracy. It is possible to accurately press the radial position corresponding to the hub peripheral portion of the blade body by the blade pressing portion.
Further, by connecting the hub and the blade body via the adhesive resin portion, it is possible to alleviate the sudden bending of the blade body at the outer peripheral edge of the hub, and when the blade body hits the object to be processed, the blade is used. The main body is suppressed from cracking.
As a result, by using one blade pressing plate, it is possible to accurately press the radial position corresponding to the peripheral edge of the hub of the blade body.

Here, the adhesive resin portion is a connection in which the adhesive applied or placed between the hub and the blade body is hardened by aging, drying, a chemical reaction, etc. to connect (adhere) the hub and the blade body. It refers to something that forms a part.
Further, as the adhesive, a fluid adhesive resin, a sheet-like adhesive resin formed in a sheet shape, and a sheet-like adhesive resin which is not fluid at room temperature and has fluidity depending on physical conditions such as temperature and functions as an adhesive by being cured. It includes UV-curable resins that are cured by UV rays, anaerobic adhesives, and the like. Further, the adhesive resin portion (adhesive) may be composed of a plurality of substances such that a mixture of conductive substances and the like is dispersed.

The invention according to claim 7 is a substrate cutting apparatus, characterized in that it includes the hub type blade mounting structure according to any one of claims 1 to 6.

According to the hub-type blade mounting structure and the substrate cutting device according to the present invention, the hub-type blade can be mounted on the rotary drive shaft with high accuracy and stability.

According to the hub-type blade mounting structure and the substrate cutting device according to the present invention, it is possible to easily mount the hub-type blade on the rotary drive shaft by a simple structure, and it is highly accurate while suppressing the runout of the blade body. The substrate can be cut stably.

It is a conceptual diagram explaining an outline example of the hub type blade mounting structure which concerns on 1st Embodiment of this invention, and (A) is the schematic diagram which shows the schematic structure of the state which separated the hub type blade from a rotation shaft. (B) is a schematic diagram showing a schematic configuration in a state where a hub type blade is attached to a rotating shaft. It is a figure explaining an example of the hub type blade mounting structure which concerns on 1st Embodiment of this invention, (A) is the figure which shows the schematic structure of the blade pressing plate, (B) is the figure which shows the schematic structure of a hub type blade. It is a figure which shows. It is a conceptual diagram explaining the hub type blade mounting structure which concerns on 2nd Embodiment of this invention, (A) is the figure which shows the schematic structure of the blade pressing plate, (B) is the drawing which separates the hub type blade from the rotation axis. It is the schematic which shows the schematic structure of the state which was done, and (C) is the schematic diagram which shows the schematic structure of the state which the hub type blade is attached to the rotating shaft. It is a conceptual diagram explaining an outline example of the conventional hub type blade mounting structure.

<First Embodiment>
Hereinafter, the hub type blade mounting structure according to the first embodiment of the present invention will be described with reference to FIGS. 1 and 2.
FIG. 1 is a conceptual diagram illustrating a schematic example of a hub-type blade mounting structure according to a first embodiment of the present invention, and FIG. 1 (A) shows a schematic configuration of a hub-type blade separated from a rotation shaft. FIG. 1B is a schematic view showing a schematic configuration in a state where a hub type blade is attached to a rotating shaft. 2A and 2B are views for explaining an example of the hub type blade mounting structure according to the first embodiment, FIG. 2A is a diagram showing a schematic configuration of a blade pressing plate, and FIG. 2B is a diagram showing a schematic configuration of a blade pressing plate. It is a figure which shows the schematic structure of the hub type blade.
In the figure, reference numeral 100 is a hub type blade mounting structure, reference numeral 1 is a hub type blade, reference numeral 10 is an aluminum hub, reference numeral 20 is a double-sided adhesive tape, reference numeral 30 is a blade body, and reference numeral 40 is a rotation drive shaft. Reference numeral 50 indicates a blade pressing plate.

As shown in FIG. 1, the hub type blade mounting structure 100 includes, for example, a rotary drive shaft 40, a blade pressing plate 50, and a blade mounting nut (blade mounting member) 45, and the rotary drive shaft 40 has a base. The blade pressing plate 50, the hub type blade 1, and the blade mounting nut 45 are mounted in this order from the end side.
Further, the hub type blade mounting structure 100 is applied to, for example, a substrate cutting device (not shown) for manufacturing an IC chip or the like by individualizing a wafer.

The rotary drive shaft 40 is connected to a drive means such as a motor in, for example, a substrate cutting device (not shown), and is rotated around the axis O.
In this embodiment, the rotary drive shaft 40 is coaxial with the rotary drive shaft main body 41 and is formed on the tip end side of the rotary drive shaft main body 41 in the axis O direction, and the blade mounting shaft 42 and the blade mounting. A mounting seat 43 formed on the base end side of the shaft 42 and having a step reduced in diameter from the rotary drive shaft main body 41 to the blade mounting shaft 42, and a blade mounting nut 45 formed on the tip of the blade mounting shaft 42 are screwed together. It is provided with a screw portion 44.

The mounting seat 43 is composed of a plane orthogonal to the axis O. The mounting seat 43 can be arbitrarily set. For example, it is possible to apply various forms in which the tip side in the axis O direction is reduced in diameter and the blade pressing plate 50 can be seated orthogonally to the axis O. It is possible.

As shown in FIGS. 1 and 2, the hub type blade 1 includes, for example, an aluminum hub 10, a double-sided adhesive tape (double-sided adhesive tape) 20, and a blade body 30. Then, the aluminum hub 10 and the blade main body 30 are attached and connected by the double-sided adhesive tape 20.

The aluminum hub 10 is formed, for example, with a maximum outer diameter of 55.4 mm, a blade mounting surface 10F is formed on one side in the axis O direction (base end side R in the axis O direction), and the blade mounting surface 10F is formed on the other side of the axis O. The diameter is once reduced toward, and the diameter of the other side (tip side F in the axis O direction) is expanded, and the mounting hole 10H which is coaxial with the axis O and allows the blade mounting hole 42 to be inserted is provided on the inner circumference. It is formed.

Further, the hub 10 is made of, for example, aluminum or an aluminum alloy. The material of the aluminum alloy can be arbitrarily set based on the usage conditions, and for example, A2017, A5083, A7075 (JIS standard) and the like are suitable.

Further, the blade mounting surface 10F has a smooth finish surface roughness Rmax0 to 20 μm (JIS B0601-1982), for example, by polishing or the like in order to ensure effective adhesion of the double-sided adhesive tape 20. Is preferable.

The double-sided adhesive tape 20 is, for example, a donut-shaped form of a sheet-like resin having adhesiveness, and is a surface 21A located on the blade body 30 side and a surface 21B located on the hub 10 side of the tape body 21. It is said to be an adhesive transfer tape with adhesiveness.

Further, the outer diameter, thickness, elastic modulus, holding force (adhesive force), etc. of the double-sided adhesive tape 20 can maintain, for example, the flatness (squareness with respect to the axis O) of the blade body 30. It is preferable that the hub type blade 1 is set so that the torsional deformation caused by the cutting torque when cutting the object does not cause damage to the blade main body 30.
The thickness of the double-sided adhesive tape 20 is preferably, for example, 100 μm or less, and more preferably 30 μm or more and 50 μm or less.

It is preferable that the aluminum hub 10 and the blade body 30 have enough conductivity to function as a touch sensor, but whether or not the double-sided adhesive tape 20 has conductivity can be arbitrarily set. be. Examples of conductive tapes include conductive adhesive transfer tape 9707 (trade name: manufactured by 3M Japan Ltd.), 9709S (trade name: manufactured by 3M Japan Ltd.), and T4420W (trade name: manufactured by Dexerials Ltd.). ) Can be applied.

Instead of the double-sided adhesive tape 20, for example, a double-sided adhesive tape in which an adhesive adhesive is applied to one side and the other side of the tape base material may be used. In such a case, for example, the adhesive adhesive having a thickness of 25 μm and having adhesiveness is made of an acrylic resin mixed with conductive particles and has a thickness of 85 μm and is conductive (for example, an aluminum hub 10). It is preferable to have an electric resistance (about 4.5Ω) between the blade body 30 and the blade body 30.

Examples of the double-sided adhesive tape having a tape base material include AL-25DC (trade name: manufactured by 3M Japan Co., Ltd.), T7620 (trade name: manufactured by Dexerials Co., Ltd.) and 7848YCWB (trade name: manufactured by Sekisui Chemical Industry Co., Ltd.). Etc. are applicable, such as X-7001 (trade name: manufactured by 3M Japan Co., Ltd.) and those based on a curved conductive cloth, and 9720S (trade name: manufactured by 3M Japan Co., Ltd.). A non-woven fabric-based material may be applied to the material.

The blade body 30 has, for example, a disk shape having an outer diameter of 55.05 mm and a blade thickness of 0.015 to 0.04 μm (for example, 20 μm), and a circular shape having a diameter of 42.00 mm coaxial with the axis O on the inner peripheral side. The hole 30H is formed.
In this embodiment, the blade body 30 is formed by, for example, electroplating a base metal made of stainless steel (SUS) with a nickel (Ni) plating solution in which diamond abrasive grains are dispersed.

Further, the blade main body 30 includes, for example, a metal base material 31 made of an alloy containing nickel (Ni) or a nickel alloy as a main component, and diamond superabrasive grains (abrasive grains) 32 dispersed in the metal base material 31. ing.
As the nickel-based alloy constituting the metal base material, for example, nickel-phosphorus (Ni-P), nickel-cobalt (Ni-Co), and nickel-boron (Ni-B) are preferably applied. Is.

Further, the diamond superabrasive grain 32 is composed of, for example, diamond having a concentration of 3 to 10 μm (average particle size of 5 μm) and a concentration ratio of 50 to 125.
Further, the diamond superabrasive grain 32 is exposed from the surface of the metal base material 31 by about 2 μm, for example.

Further, on the connection surface 30T located on the aluminum hub 10 side of the blade body 30 and connected to the hub 10 via the double-sided adhesive tape 20, for example, the diamond superabrasive grains 32 project from the surface of the metal base material 31. It is preferable that the surface is formed on a flat surface.

Further, in the blade main body 30, the exposed surface 30F located on the opposite side of the aluminum hub 10 and the protruding portion located on the outer periphery of the blade main body 30 are exposed from the metal base material 31 made of nickel plating to expose the diamond superabrasive grains 32. There is.

Further, in the protruding portion of the blade main body 30, for example, chamfer-shaped conspicuous portions 30C are formed on one side and the other side in the axis O direction. The conspicuous portion 30C shown in FIG. 2 is an example, and the form of the conspicuous portion 30C is appropriately set depending on the object to be cut.

In this embodiment, the blade body 30 has an outer diameter coaxial with the aluminum hub 10 after the double-sided adhesive tape 20 is attached to the aluminum hub 10 and the original plate of the blade body 30 having an inner diameter processed is attached to the attached double-sided adhesive tape 20. Formed by processing. In the inner diameter processing and outer diameter processing of the original plate of the blade body 30, for example, a jet liquid water column (jet water column) is formed at the processed portion, and the laser beam is guided to the processed portion while being reflected in the jet water column. It is preferable to irradiate the processed part, and it is more preferable to make the jet water column (jet liquid column) a laminar flow with as few irregularities as possible, for example, to totally reflect a laser beam of 200 to 700 nm in the jet water column. .. Further, the conspicuous portion 30C is formed by dicer dressing after processing the outer diameter.

As shown in FIG. 2A, the blade pressing plate 50 is formed of, for example, a cemented carbide having a circular outer shape, and the outer diameter is formed to be substantially the same as the outer diameter of the hub 10 of the hub type blade 1. The surface 50A on one side can be seated on the mounting seat 43, and the surface 50B on the other side has a blade pressing portion 51 formed on the outer peripheral edge portion.
Instead of the cemented carbide, a titanium alloy, SUS (stainless steel) or the like may be applied, and the material having the highest strength can be arbitrarily set.

The blade pressing portion 51 is formed including a circumference centered on the axis O, and is based on a position corresponding to the outer peripheral edge of the aluminum hub 10 of the blade body 30 of the hub type blade 1 mounted on the blade mounting shaft 42. It is configured to press from the end side R toward the tip side F.

Here, the outer peripheral edge portion of the aluminum hub 10 is a region located on the inner peripheral side from the outer peripheral portion of the aluminum hub 10, and the misalignment that occurs in the blade body 30 due to the bending moment based on the load at the time of cutting is set in advance. A radial position that can be suppressed to a value (for example, 10 μm or less), and is preferably set to 0 mm to 3 mm from the outer diameter of the aluminum hub 10 to the inner peripheral side, and 0 mm from the outer diameter to the inner peripheral side. It is more preferable to set it to ~ 1 mm.

Further, a circular hole 50H is formed on the inner circumference of the blade pressing plate 50 coaxially with the axis O, and the blade pressing plate 50 can be attached to the rotary drive shaft 40 by inserting the blade mounting shaft 42. ..

Further, the blade pressing plate 50 has an axis O direction with respect to the radial length of the mounting seat 43 and the blade pressing portion 51 generated by a bending moment based on the axial force in the axis O direction when the hub type blade 1 is attached to the rotary drive shaft 40. Has sufficient strength and rigidity so that the bending deformation of the above can be set to the set dimension (for example, 10 μm or less).

The blade mounting nut 45 is screwed to the threaded portion 44 of the rotary drive shaft 40 so that the blade pressing plate 50 and the hub type blade 1 can be mounted on the rotary drive shaft 40.
Instead of the blade mounting nut 45, a blade mounting member provided with an actuator or the like may be used.

According to the hub type blade mounting structure 100 according to the first embodiment, the hub type blade 1 can be easily mounted on the rotary drive shaft 40 by a simple structure, and the height is high while suppressing the runout of the blade body 30. The substrate can be cut accurately and stably.

Further, according to the hub type blade mounting structure 100 according to the first embodiment, since the hub is made of aluminum or an aluminum alloy, it is lightweight and can easily cope with high-speed rotation (for example, 30,000 rpm or more).

Further, according to the hub type blade mounting structure 100 according to the first embodiment, the rotary drive shaft 40 has a mounting seat 43 formed on the base end side R of the blade mounting shaft 42, and the blade pressing plate 50 is attached to and detached from the mounting seat 43. Since the blade pressing plate 50 can be easily arranged and attached to the rotary drive shaft 40, the blade pressing plate 50 can be easily attached to and detached from the rotary drive shaft 40.
As a result, when the outer diameter of the hub 10 of the hub type blade 1 is changed, the blade pressing plate 50 can be replaced to easily and efficiently adjust the outer diameter to the hub outer diameter of the hub type blade 1.
Moreover, since the blade pressing plate 50 can be easily replaced, maintenance can be performed efficiently.

According to the hub type blade mounting structure 100 according to the first embodiment, since the blade pressing plate 50 is formed of cemented carbide and has conductivity, even if the double-sided adhesive tape 20 does not have conductivity. , The blade body 30 can be provided with a function as a touch sensor.

Further, according to the hub type blade mounting structure 100 according to the first embodiment, the hub type blade 1 is formed individually, and the hub 10 having passed the inspection in terms of outer diameter and the like and the blade body 30 are attached to the double-sided adhesive tape 20. Since it is configured by connecting with, it is possible to form the outer diameter of the hub 10 to the set dimension with high accuracy, and the blade pressing portion 51 accurately determines the radial position corresponding to the hub peripheral portion of the blade main body 30. Can be pressed to.

Further, according to the hub type blade mounting structure 100 according to the first embodiment, since the blade main body 30 is connected to the hub 10 via the double-sided adhesive tape 20, the blade main body 30 is caused by the elasticity of the double-sided adhesive tape 20. Sudden bending at the outer edge of the hub 10 is alleviated, and cracking of the blade body 30 when the blade body 30 hits an object to be machined can be suppressed.

<Second Embodiment>
Hereinafter, the hub type blade mounting structure according to the second embodiment of the present invention will be described with reference to FIG.
FIG. 3 is a conceptual diagram illustrating a schematic example of a hub-type blade mounting structure according to a second embodiment of the present invention, and FIG. 3 (A) is a diagram showing a schematic configuration of a blade pressing plate. FIG. 3A is a diagram showing a schematic configuration of a blade pressing plate. (B) is a schematic view showing a schematic configuration in a state where the hub type blade is separated from the rotating shaft, and FIG. 3 (C) is a schematic diagram showing a schematic configuration in a state where the hub type blade is attached to the rotating shaft.
In FIG. 3, reference numeral 200 is a hub type blade mounting structure, reference numeral 1A is a hub type blade, reference numeral 10A is an aluminum hub, reference numeral 20A is an adhesive resin portion, reference numeral 30A is a blade body, and reference numeral 60 is a blade pressing plate. Shown.

As shown in FIG. 3, the hub type blade mounting structure 200 includes, for example, a rotary drive shaft 40, a blade pressing plate 60, and a blade mounting nut (blade mounting member) 45, and the rotary drive shaft 40 has a base. The blade pressing plate 60, the hub type blade 1A, and the blade mounting nut 45 are mounted in this order from the end side. Others are the same as those in the first embodiment, so the same reference numerals are given and the description thereof will be omitted.

As shown in FIG. 3B, the hub type blade 1A includes, for example, an aluminum hub 10A, an adhesive resin portion 20A, and a blade main body 30A. Then, the aluminum hub 10A and the blade main body 30A are connected by the adhesive resin portion 20A.

The aluminum hub 10A is formed, for example, with a maximum outer diameter of 55.4 mm, a blade mounting surface 10B is formed on one side in the axis O direction (base end side R in the axis O direction), and the blade mounting surface 10B has an adhesive resin portion 20A. In order to ensure effective fixing, it is preferable that the surface roughness is Rmax5 to 50 μm (JIS B0601 1982), for example, by sandblasting or shotblasting. Others are the same as those of the aluminum hub 10 of the first embodiment, so the same reference numerals are given and the description thereof will be omitted.

The adhesive resin portion 20A is formed by applying, for example, an adhesive containing an epoxy resin or a cyanoacrylate resin as a main component in a donut shape corresponding to the outer diameter of the aluminum hub 10A and the inner diameter of the blade body (inner diameter of the blade material). Is formed by hardening.
Instead of the epoxy resin or the cyanoacrylate resin, the adhesive resin portion 20A may be formed by an acrylic resin-based adhesive or the like, and the configuration of the adhesive resin portion 20A can be arbitrarily set.
Further, the outer diameter, thickness (for example, 40 μm to 100 μm), elastic modulus, holding force (adhesive force), etc. of the adhesive resin portion 20A maintain the flatness (squareness with respect to the axis O) of the blade body 30A, for example. It is preferable that the hub-type blade 1 is set so that the torsional deformation caused by the cutting torque when cutting the object does not cause damage to the blade body 30A.

Further, it is preferable that the adhesive resin portion 20A has a conductivity sufficient to function as a touch sensor between the aluminum hub 10A and the blade main body 30A, but whether the adhesive resin portion 20A has conductivity or not. Can be set arbitrarily.

As the conductive adhesive, for example, ThreeBond 3380 (trade name: manufactured by ThreeBond Co., Ltd.) in which a silver (Ag) -based filler is mixed with an epoxy resin can be diluted with a solvent (for example, ethyl acetate) and applied. Is.

For example, cyanoacrylate-based instant adhesives (for example, ALTECO CN2 (trade name: manufactured by Alteco Co., Ltd.), ALTECO CN4 (trade name: manufactured by Alteco Co., Ltd.), Cemedine 3000DXF (trade name: manufactured by Cemedine Co., Ltd.), Cemedine 3000 DXLL (trade name: manufactured by Cemedine Co., Ltd.), Cemedine 3000 DXL (trade name: manufactured by Cemedine Co., Ltd.), Aron Alpha EXTRA Impact (trade name: manufactured by Toa Synthetic Co., Ltd.), Aron Alpha EXTRA 4000 (trade name: manufactured by Toa Synthetic Co., Ltd.) The adhesive resin portion 20A may be formed by applying an adhesive having no conductivity such as.

Further, when an adhesive having no conductivity is applied, for example, metals such as gold (Au) and silver (Ag) such as Micropearl AU-201 (trade name: manufactured by Sekisui Chemical Industry Co., Ltd.) are applied. The aluminum hub 10A and the blade body 30A are made of conductive particles by mixing conductive particles (for example, particle size 10 μm) formed by coating the particles with an epoxy adhesive or an acrylic adhesive, applying and curing the particles. It may be possible to energize through.

The blade main body 30A is formed in a disk shape, for example, chamfered corners 30C are formed on one side and the other side in the axial direction O direction of the outer circumference, and the inner peripheral side of the blade main body 30A is formed, for example, the axis O. A circular hole 30H coaxial with the above is formed.

Further, the exposed surface 30F located on the opposite side of the aluminum hub 10A and the connecting surface 30D to which the adhesive is applied have the diamond superabrasive grains 32 exposed from the metal base material 31 made of nickel plating over the entire surface. Others are the same as those of the aluminum hub 10 of the first embodiment, so the same reference numerals are given and the description thereof will be omitted.

In this embodiment, the blade main body 30A is formed by adhering the original plate of the blade main body 30A having the inner diameter processed to the adhesive applied to the aluminum hub 10A and then processing the outer diameter coaxially with the aluminum hub 10A. Since the inner diameter processing and the outer diameter processing of the original plate of the blade main body 30A are the same as those in the first embodiment, the description thereof will be omitted.

As shown in FIG. 3A, the blade pressing plate 60 is formed of, for example, ceramics having a circular outer shape (for example, zirconia, alumina-titanium carbide type, silicon carbide type, etc.) and has a hub type outer diameter. The blade 1A is formed to have substantially the same outer diameter as the hub 10A, and one side surface 60A can be seated on the mounting seat 43, and the other side surface 60B has a blade pressing portion 61 formed on the outer peripheral edge portion. ..
Further, in order to provide conductivity between the blade main body 30A and the rotation drive shaft 40, for example, the blade pressing plate 60 has a conductive layer (conductivity imparting portion) formed by nickel (Ni) plating over the entire surface 60B on the other side. ) (Not shown) is formed. The nickel (Ni) plating may be formed in a part in the circumferential direction along the radial direction.

The blade pressing portion 61 is formed including a circumference centered on the axis O, and is in the radial direction corresponding to the outer peripheral edge portion of the aluminum hub 10A of the blade body 30A of the hub type blade 1A mounted on the blade mounting shaft 42. The position is configured to be pressed from the base end side R toward the tip end side F.
Further, on the inner peripheral side of the blade pressing portion 61, a relief portion 62 for securing a gap in the axis O direction is formed between the blade pressing plate 60 and the blade main body 30A.
Here, the outer peripheral edge portion of the aluminum hub 10A is preferably set to 0 mm to 3 mm from the outer diameter of the aluminum hub 10A to the inner peripheral side, and more preferably set to 0 mm to 1 mm from the outer diameter to the inner peripheral side. Suitable.

Further, a circular hole 60H is formed on the inner circumference of the blade pressing plate 60 coaxially with the axis O, and the blade pressing plate 60 can be attached to the rotary drive shaft 40 by inserting the blade mounting shaft 42. ..

Further, the blade pressing plate 60 has an axis O direction with respect to the radial length of the mounting seat 43 and the blade pressing portion 61 generated by a bending moment based on the axial force in the axis O direction when the hub type blade 1 is attached to the rotary drive shaft 40. Has sufficient strength and rigidity so that the bending deformation of the above can be set to the set dimension (for example, 10 μm or less).

According to the hub type blade mounting structure 200 according to the second embodiment, the hub type blade 1A can be easily mounted on the rotary drive shaft 40 by a simple structure, and the height is high while suppressing the runout of the blade body 30A. The substrate can be cut accurately and stably.

Further, according to the hub type blade mounting structure 200 according to the second embodiment, the blade mounting shaft 42 is inserted into the blade pressing plate 60, seated on the mounting seat 43, and mounted on the rotary drive shaft 40. Therefore, the blade pressing plate 60 can be easily attached to and detached from the rotary drive shaft 40, and even if the outer diameter of the hub 10A of the hub type blade 1 is changed, the blade pressing plate 60 can be replaced easily and efficiently outside the hub of the hub type blade 1A. It can be adjusted to the diameter.

According to the hub type blade mounting structure 200 according to the second embodiment, since the blade pressing plate 60 has conductivity, even if the adhesive resin portion 20A does not have conductivity, the blade body 30 can be touched. It can have a function as a sensor.

Further, according to the hub type blade mounting structure 200 according to the second embodiment, the hub type blades 1A are individually formed, and the hub 10A having passed the inspection for the outer diameter dimension and the like and the blade body 30A are bonded to the adhesive resin portion 20A. Since it is configured by connecting with, it is possible to form the outer diameter of the hub 10A to the set dimension with high accuracy, and the blade pressing portion 61 accurately determines the radial position corresponding to the hub peripheral portion of the blade body 30A. Can be pressed to.

Further, according to the hub type blade mounting structure 200 according to the second embodiment, since the blade main body 30 is connected to the hub 10A via the adhesive resin portion 20A, the blade main body 30A is caused by the elasticity of the adhesive resin portion 20A. Sudden bending at the outer edge of the hub 10A is alleviated, and cracking of the blade body 30A when the blade body 30A hits an object to be machined can be suppressed.

According to the hub type blade mounting structure 200 according to the second embodiment, since the relief portion 62 is formed on the inner peripheral side of the blade pressing portion 61, the blade pressing portion 61 is used when pressing the hub type blade 1A. The surface pressure on the blade body 30A can be increased.
As a result, the hub type blade 1A can be attached to the rotary drive shaft 40 with high accuracy and more stably.

It should be noted that various changes can be made to the technical matters described in the above-described embodiment without departing from the spirit of the invention.
In the above embodiment, the case where the blade pressing plates 50 and 60 are formed separately from the rotary drive shaft 40 has been described. For example, the blade pressing plate is used as the base end of the blade mounting shaft 42 of the rotary drive shaft 40. It may be formed integrally with the rotation drive shaft 40 on the side R. Further, in that case, it is possible to arbitrarily set whether the surface on the side that presses the hub type blades 1 and 1A is flat or the relief portion is formed on the inner peripheral side.

In the above embodiment, the case where the blade pressing plate 50 is applied to the hub type blade 1 and the blade pressing plate 60 is applied to the hub type blade 1A has been described, but the correspondence between the blade pressing plate and the hub type blade is arbitrarily described. Can be set.

In the above embodiment, the case where the blade pressing plate 50 and the blade pressing plate 60 have conductivity has been described, but whether or not the blade pressing plate has conductivity can be arbitrarily set.

In the above embodiment, the blade pressing plate 50 is made of cemented carbide and is formed into a donut-shaped disc having flat both sides, and the blade pressing plate 60 is formed of ceramics and the relief portion 62 is formed on the inner peripheral side of the blade pressing portion 61. Although the case where the above is formed has been described, various metals such as stainless steel (SUS) can be applied to the material of the blade pressing plate, and the material and the form can be arbitrarily set. be able to. Further, ceramics having conductivity may be applied.

Further, in the above embodiment, the hub type blade 1 is connected to the hub 10 and the blade body 30 by a double-sided adhesive tape (connection portion) 20, the hub type blade 1A is connected to the hub 10A and the blade body 30A is bonded to the adhesive resin portion 20A. Although the case of being connected by is described, instead of the double-sided adhesive tape 20 and the adhesive resin part (adhesive) 20A, the connection part by various diffusion bonding including ultrasonic bonding, the nugget by spot welding, and brazing It may be connected by a connecting part by equal welding, a connecting part composed of a fastening member for fastening the hub and the blade body, or a hub in which the blade body is directly formed as a hub by plating, vapor deposition, or the like. Mold blades may be applied.

Further, in the above embodiment, the case where the hubs 10 and 10A constituting the hub type blade 1 are formed of an aluminum alloy or aluminum has been described, but instead of the aluminum alloy or aluminum, pure titanium (Ti) ( Formed from various metal materials such as JIS 1 type), titanium alloys, magnesium alloys, engineering plastics such as polycarbonate, fiber reinforced plastics, general-purpose plastics such as acrylic resin, and various practical resin materials. You may.

Further, in the above embodiment, the case where the diamond superabrasive grains 32 are dispersed in the metal base material 31 whose blade body 30 is made of nickel plating has been described. For example, Ni-P plating, Ni-Co plating or Ni -B plating, metal blades in which abrasive grains are dispersed in various applicable metal base materials such as copper (Cu) and copper alloys (for example, Cu-Sn), resin blades made of phenolic resin, and abrasive grains. Various blade bodies may be used, such as a bit blade formed by firing a glass powder (inorganic material) containing a mixed ceramic powder, a blade formed of a superhard alloy, and the like.

According to the hub-type blade mounting structure and the substrate cutting device according to the present invention, the hub-type blade can be easily mounted on the rotary drive shaft by a simple structure, and high accuracy is achieved while suppressing the runout of the blade body. Moreover, since the substrate can be cut stably, it can be used industrially.

O Rotation axis (axis)
1,1A hub type blade 10, 10A aluminum hub (hub)
10F Blade mounting surface 10H Hub type blade mounting hole 20 Double-sided adhesive tape 20A Adhesive resin part 30, 30A Blade body 30T, 30D Connection surface 30H Circular hole 31 Metal base material (nickel plating)
32 Diamond superabrasive grains (abrasive grains)
40 Rotation drive shaft 41 Mounting shaft 43 Mounting seat 44 Threaded part 45 Mounting nut (mounting member)
50, 60 Blade pressing plate 51, 61 Blade pressing part 62 Relief part 100, 200 Hub type blade mounting structure 500 Hub type blade mounting structure

Claims (7)

A rotary drive shaft that is rotated around the axis and has a blade mounting shaft on which a hub-type blade is mounted on the tip side.
A blade pressing plate arranged on the base end side of the blade mounting shaft on which the hub type blade is mounted on the rotary drive shaft, and
A blade mounting member that fixes the hub type blade mounted on the rotary drive shaft on the tip end side of the blade mounting shaft, and
With
The blade pressing plate is
A blade pressing portion for pressing a region including a circumference corresponding to the outer peripheral edge portion of the hub of the hub type blade in the radial direction around the axis is provided.
A hub-type blade mounting structure characterized in that the blade pressing portion is configured to press the blade body of the hub-type blade. The hub-type blade mounting structure according to claim 1.
A mounting seat is formed on the base end side of the blade mounting shaft of the rotary drive shaft, and the blade pressing plate is detachable from the rotary drive shaft.
The blade pressing plate is
A hub-type blade mounting structure characterized in that a mounting hole for inserting the blade mounting shaft is formed and the base end side can be supported by the mounting seat. The hub-type blade mounting structure according to claim 1 or 2.
The blade pressing plate is
A hub-type blade mounting structure characterized in that a relief portion forming a gap between the blade pressing portion and the blade main body is formed on the inner peripheral side of the blade pressing portion. The hub-type blade mounting structure according to any one of claims 1 to 3.
The blade pressing plate has a hub-type blade mounting structure, characterized in that at least a conductivity-imparting portion for ensuring conductivity between the blade pressing portion and the rotation drive shaft is formed. A hub-type blade mounting structure according to any one of claims 1 to 4, wherein the hub-type blade includes a double-sided adhesive tape as a connecting portion for connecting the hub and the blade main body. A hub-type blade mounting structure according to any one of claims 1 to 4, wherein the hub-type blade includes an adhesive resin portion as a connecting portion for connecting the hub and the blade main body. A substrate cutting apparatus comprising the hub type blade mounting structure according to any one of claims 1 to 6.

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