JP2018187729A - Hub type blade attaching structure and substrate cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hub type blade attaching structure which can easily attach a hub type blade to a rotary drive shaft by a simple structure and a substrate cutting device.SOLUTION: A hub type blade attaching structure 100 for attaching a hub type blade 1 to a rotary drive shaft 40 is equipped with a blade pressing plate 50 which has a blade pressing portion 51 disposed on an attaching seat 43 formed on a base end side R of a blade attaching shaft 41 of the rotary drive shaft 40 and formed while including a circumference around an axis O; and a blade attaching nut 45. The blade pressing plate 50 is configured to press a position corresponding to an outer peripheral edge portion of a hub 10 of the blade body 30 of the hub type blade 1 installed to the blade attaching shaft 41 by the blade pressing portion 51, from the base end side R toward a tip end side F.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a hub-type blade mounting structure and a substrate cutting apparatus for mounting a hub-type blade used for cutting a substrate of a semiconductor material or the like into individual chips into a rotary shaft.

  As is well known, a hub type blade in which a blade body is arranged on a blade mounting surface of a hub is widely used when a substrate made of a semiconductor material or the like is cut into chips and separated into chips (for example, patent documents). 1).

  The hub type blade includes, for example, a hub made of an aluminum alloy and an electroformed blade body formed by nickel plating on one surface of the hub, and the electroformed blade body is integrally connected to the hub. It is common.

  Since the electroformed blade body formed in this way is thick on the outer peripheral side when formed on the base metal constituting the aluminum hub by plating, the outer diameter of the aluminum base metal is processed using a cylindrical grinder or the like. The thickness of the electroformed blade body is made uniform. Next, the outer peripheral portion of the aluminum base metal is masked and subjected to alkali etching, thereby melting the outer peripheral portion of the aluminum base metal and exposing a blade body having a predetermined dimension on the outer periphery.

  Thereafter, nickel is dissolved from the surface of the blade body by an electrolytic dress to expose diamond superabrasive grains, and the diamond superabrasive grains on the outer periphery of the blade body are exposed by about 2 μm by a dicer dress. The blade is completed.

  As shown in FIG. 4, such a hub type blade is a hub that is supported by inserting a washer 502 on the base end side R when the hub type blade 501 is attached to the rotary drive shaft 540 and is attached by a mounting nut 503. It is common to use a mold blade mounting structure 500. When the blade body 501A has conductivity, the blade body 501A may have a function as a touch sensor.

However, the hub type blade 501 mounted in this way may cause a core runout in the blade body 501A when the board is cut with the hub type blade, and if the runout occurs, it is difficult to accurately cut the substrate. It becomes.
Therefore, a technique for suppressing the runout has been disclosed (for example, see Patent Document 2).

JP-A-5-345281 JP 2000-301383 A

However, the hub-type blade described in Patent Document 2 has a problem that it has many components and becomes heavy, and the appearance is increased and the manufacturing cost is increased.
Therefore, it is possible to easily attach the hub type blade to the rotary drive shaft with a simple structure, and a technique for cutting the substrate with high accuracy and stability while suppressing the runout of the blade body is desired.

  The present invention has been made in consideration of such circumstances, and it is possible to easily attach a hub-type blade to a rotary drive shaft with a simple structure, and with high accuracy while suppressing runout of the blade body. It is another object of the present invention to provide a hub type blade mounting structure and a substrate cutting apparatus capable of stably cutting a substrate.

In order to solve the above problems, the present invention proposes the following means.
The invention according to claim 1 is a hub type blade mounting structure, wherein the rotary drive shaft is formed with a blade mounting shaft that is rotated around an axis and on which the hub type blade is mounted on the tip side. A blade pressing plate disposed on a base end side of a blade mounting shaft on which the hub type blade is mounted; and a blade mounting member for fixing the hub type blade mounted on the rotary drive shaft on a distal end side of the blade mounting shaft; The blade pressing plate includes a blade pressing portion that presses a region including a circumference corresponding to the outer peripheral edge portion of the hub of the hub type blade in the radial direction with the axis as a center, and the blade pressing portion It is configured to press the blade body of the hub type blade.

According to the hub type blade mounting structure according to the present invention, the blade pressing plate having the blade pressing portion is arranged on the base end side of the blade mounting shaft of the rotary drive shaft, and the hub type blade is mounted on the rotary drive shaft by the blade mounting member. Is done. Then, the circumference corresponding to the outer peripheral edge portion of the hub is pressed in the radial direction of the blade body constituting the hub type blade by the blade pressing portion of the blade pressing plate.
As a result, the hub type blade can be easily attached to the rotary drive shaft with a simple structure, and the substrate can be cut with high accuracy and stability while suppressing the runout of the blade body.

  In this specification, the hub type blade in which the blade main body is arranged on the mounting surface of the hub is a hub type blade in which the blade main body is formed by plating on the mounting surface of the hub (including a base metal constituting the hub). And a hub type blade in which a blade main body is connected to a blade mounting surface of a hub separately formed by a connecting portion.

  Examples of the connection part for connecting the blade body to the blade mounting surface of the hub include, for example, a double-sided adhesive tape (including a double-sided adhesive tape), an adhesive resin part (adhesive layer) formed by curing the adhesive, and an ultrasonic wave. Various diffusion joints such as joints, nuggets by spot welding, joints by welding such as brazing, joints composed of fastening members that fasten the hub and blade body, and the blade body can be attached to the hub Various connections are included.

  The invention according to claim 2 is the hub type blade mounting structure according to claim 1, wherein the rotary drive shaft is formed with a mounting seat on a base end side of the blade mounting shaft, and the blade pressing plate The blade pressing plate is detachable from the rotary drive shaft, and the blade pressing plate is formed with a mounting hole for inserting the blade mounting shaft, and the base end side can be supported by the mounting seat.

According to the hub type blade mounting structure according to the present invention, the rotary drive shaft has the mounting seat formed on the base end side of the blade mounting shaft, and the blade pressing plate has the blade mounting shaft inserted into the mounting hole. The blade pressing plate is detachably attached to the rotary drive shaft.
As a result, when the outer diameter of the hub constituting the hub type blade is changed, the radial position of the blade pressing portion can be easily and efficiently adjusted to the hub type blade.
Further, since the blade pressing plate can be easily replaced, maintenance can be performed efficiently.

  The invention according to claim 3 is the hub type blade mounting structure according to claim 1 or 2, wherein the blade pressing plate has a gap between the blade pressing portion and the blade body on the inner peripheral side. An escape portion to be formed is formed.

According to the hub type blade mounting structure according to the present invention, since the blade pressing plate has the relief portion that forms a gap with the blade body on the inner peripheral side of the blade pressing portion. When pressing, the surface pressure on the blade body by the blade pressing portion can be increased.
As a result, the hub type blade can be attached to the rotary drive shaft with high accuracy and more stably.

  A fourth aspect of the present invention is the hub type blade mounting structure according to any one of the first to third aspects, wherein the blade pressing plate is at least between the blade pressing portion and the rotary drive shaft. The electroconductivity provision part for ensuring the electroconductivity of this is formed.

  According to the hub type blade mounting structure according to the present invention, the blade pressing plate has at least the conductivity imparting portion for ensuring the conductivity between the blade pressing portion and the rotation drive shaft. Even if the connection part (for example, double-sided adhesive tape, adhesive resin part, etc.) connecting the hub and the blade body in the blade does not have conductivity, the blade body has conductivity The blade pressing plate allows the blade body to function as a touch sensor, and enables efficient cutting.

  According to a fifth aspect of the present invention, the hub type blade according to any one of the first to fourth aspects is provided with a double-sided adhesive tape as a connecting portion for connecting the hub and the blade body. Features.

According to the hub type blade mounting structure according to the present invention, the hub type blade is provided with the double-sided adhesive tape as a connecting portion for connecting the hub and the blade body, and each of the hub type blades is individually formed, and the outer diameter size passes the inspection. The hub and blade body can be connected with a double-sided adhesive tape to form a hub-type blade, so that the outer diameter of the hub can be formed with a set dimension with high accuracy. The radial position corresponding to can be accurately pressed by the blade pressing portion.
Also, since the hub and blade body are connected via a double-sided adhesive tape, it is alleviated that the blade body is suddenly bent at the outer periphery of the hub, and when the blade body hits the workpiece, the blade The main body is prevented from cracking.
As a result, by using one blade pressing plate, the radial position corresponding to the peripheral edge of the hub of the blade body can be accurately pressed.

  Here, as a double-sided adhesive tape, a double-sided pressure-sensitive adhesive tape having adhesiveness on both sides, an adhesive in which one side is sticky and the other side is cured and bonded, This includes an adhesive that is cured and bonded on both sides. Moreover, the adhesive (pressure-sensitive adhesive) constituting the double-sided adhesive tape may be composed of a plurality of substances such as a mixture of a conductive substance or the like being dispersed.

  The invention according to claim 6 is characterized in that the hub type blade according to any one of claims 1 to 4 includes an adhesive resin portion as a connection portion for connecting the hub and the blade body. And

According to the hub type blade mounting structure according to the present invention, the hub type blade includes an adhesive resin portion (adhesive) formed by curing the adhesive as a connection portion for connecting the hub and the blade body, Hub type blades can be configured by connecting the hub and blade body, which are individually formed and passed the inspection, etc., by the adhesive resin part, so the outer diameter of the hub is precisely set to the set dimension. The radial position corresponding to the peripheral edge of the hub of the blade body can be accurately pressed by the blade pressing portion.
Also, since the hub and the blade body are connected via the adhesive resin part, it is alleviated that the blade body is suddenly bent at the outer peripheral edge of the hub, and when the blade body hits the workpiece, the blade The main body is prevented from cracking.
As a result, by using one blade pressing plate, the radial position corresponding to the peripheral edge of the hub of the blade body can be accurately pressed.

Here, the adhesive resin portion is a connection that connects (adheres) the hub and the blade body by the adhesive applied or disposed between the hub and the blade body being cured by aging, drying, chemical reaction, or the like. This is what makes a part.
In addition, as adhesives, fluid adhesive resins, sheet-like adhesive resins formed in sheet form, there is no fluidity at room temperature, and it functions as an adhesive by curing with fluidity depending on physical conditions such as temperature And an ultraviolet curable resin cured by ultraviolet rays, an anaerobic adhesive, and the like. Moreover, the adhesive resin part (adhesive) may be composed of a plurality of substances such as a mixture of a conductive substance or the like being dispersed.

  A seventh aspect of the present invention is a substrate cutting apparatus comprising the hub type blade mounting structure according to any one of the first to sixth aspects.

  According to the hub type blade attachment structure and the substrate cutting apparatus according to the present invention, the hub type blade can be attached to the rotary drive shaft with high accuracy and stability.

  According to the hub type blade mounting structure and the substrate cutting apparatus according to the present invention, it is possible to easily mount the hub type blade to the rotary drive shaft with a simple structure, and with high accuracy while suppressing the runout of the blade body. The substrate can be cut stably.

BRIEF DESCRIPTION OF THE DRAWINGS It is a conceptual diagram explaining an example of the outline of the hub type blade attachment structure which concerns on 1st Embodiment of this invention, (A) is the schematic which shows the schematic structure of the state which isolate | separated the hub type blade from the rotating shaft, (B) is the schematic which shows schematic structure of the state which attached the hub type braid | blade to the rotating shaft. It is a figure explaining an example of the hub type blade attachment structure concerning a 1st embodiment of the present invention, (A) is a figure showing the schematic structure of a blade press board, and (B) is the schematic structure of a hub type blade. FIG. It is a conceptual diagram explaining the hub type blade attachment structure which concerns on 2nd Embodiment of this invention, (A) is a figure which shows schematic structure of a blade press plate, (B) isolate | separates a hub type blade from a rotating shaft. It is the schematic which shows the schematic structure of the state which carried out, (C) is the schematic which shows the schematic structure of the state which attached the hub type braid | blade to the rotating shaft. It is a conceptual diagram explaining an example of the outline of the conventional hub type blade attachment structure.

<First Embodiment>
Hereinafter, a hub type blade mounting structure according to a first embodiment of the present invention will be described with reference to FIGS. 1 and 2.
FIG. 1 is a conceptual diagram for explaining an example of an outline of the hub type blade mounting structure according to the first embodiment of the present invention, and FIG. 1 (A) shows a schematic configuration in a state where the hub type blade is separated from the rotation shaft. FIG. 1B is a schematic diagram showing a schematic configuration in a state where a hub type blade is attached to a rotating shaft. FIG. 2 is a view for explaining an example of a hub type blade mounting structure according to the first embodiment, FIG. 2 (A) is a view showing a schematic configuration of a blade pressing plate, and FIG. It is a figure which shows schematic structure of a hub type blade.
In the figure, reference numeral 100 denotes a hub type blade mounting structure, reference numeral 1 denotes a hub type blade, reference numeral 10 denotes an aluminum hub, reference numeral 20 denotes a double-sided adhesive tape, reference numeral 30 denotes a blade body, reference numeral 40 denotes a rotary drive shaft, Reference numeral 50 denotes a blade pressing plate.

As shown in FIG. 1, the hub type blade mounting structure 100 includes, for example, a rotary drive shaft 40, a blade pressing plate 50, and a blade mounting nut (blade mounting member) 45. The blade pressing plate 50, the hub type blade 1, and the blade mounting nut 45 are mounted in this order from the end side.
The hub-type blade mounting structure 100 is applied to, for example, a substrate cutting apparatus (not shown) that divides a wafer into pieces and manufactures an IC chip or the like.

The rotation drive shaft 40 is connected to drive means such as a motor in a substrate cutting apparatus (not shown), for example, and is rotated around the axis O.
In this embodiment, the rotation drive shaft 40 is formed on the front end side of the rotation drive shaft main body 41 in the axis O direction and is coaxial with the rotation drive shaft main body 41, the blade drive shaft 42, and the blade attachment. A mounting seat 43 formed on the base end side of the shaft 42 and having a stepped diameter reduced from the rotary drive shaft main body 41 to the blade mounting shaft 42, and a blade mounting nut 45 formed at the tip of the blade mounting shaft 42 are screwed. Screw portion 44.

  The mounting seat 43 is configured by a surface orthogonal to the axis O. The mounting seat 43 can be arbitrarily set. For example, a taper in which the tip side in the direction of the axis O is reduced in diameter, or various forms in which the blade pressing plate 50 can be seated perpendicular to the axis O can be applied. Is possible.

  As shown in FIGS. 1 and 2, the hub type blade 1 includes, for example, an aluminum hub 10, a double-sided adhesive tape (double-sided adhesive tape) 20, and a blade body 30. The aluminum hub 10 and the blade body 30 are bonded and connected by the double-sided adhesive tape 20.

  The aluminum hub 10 has, for example, a maximum outer diameter of 55.4 mm, a blade mounting surface 10F formed on one side in the axis O direction (base end side R in the axis O direction), and the other side of the axis O from the blade mounting surface 10F. The mounting hole 10H that is once reduced in diameter toward the other side and expanded in the other side (the tip side F in the direction of the axis O) is coaxial with the axis O and into which the blade mounting hole 42 can be inserted. Is formed.

  The hub 10 is made of, for example, aluminum or an aluminum alloy. The material of the aluminum alloy can be arbitrarily set based on the use conditions, but for example, A2017, A5083, A7075 (JIS standard) and the like are suitable.

  Further, the blade mounting surface 10F has a smooth finish surface with a surface roughness Rmax of 0 to 20 μm (JIS B0601-1982), for example, by polishing or the like in order to ensure effective adhesion of the double-sided adhesive tape 20. It is suitable.

  The double-sided pressure-sensitive adhesive tape 20 is, for example, a sheet-like resin having adhesive properties formed in a donut shape, and a surface 21A located on the blade body 30 side of the tape body 21 and a surface 21B located on the hub 10 side. The adhesive transfer tape has adhesiveness.

The outer diameter, thickness, elastic modulus, holding force (adhesive force), etc. of the double-sided pressure-sensitive adhesive tape 20 can hold, for example, the flatness (perpendicularity with respect to the axis O) of the blade body 30; It is preferable that the torsional deformation caused by the cutting torque when the hub type blade 1 cuts the object does not cause the blade body 30 to be damaged.
Moreover, about the thickness of the double-sided pressure-sensitive adhesive tape 20, for example, a thickness of 100 μm or less is preferable, and a thickness of 30 μm or more and 50 μm or less is more preferable.

  It is preferable that the aluminum hub 10 and the blade body 30 have conductivity sufficient to function as a touch sensor, but whether the double-sided adhesive tape 20 has conductivity can be arbitrarily set. is there. As an example having conductivity, conductive adhesive transfer tape 9707 (trade name: manufactured by 3M Japan), 9709S (trade name: manufactured by 3M Japan), T4420W (trade name: manufactured by Dexerials Corporation) ) Can be applied.

  Instead of the double-sided pressure-sensitive adhesive tape 20, for example, a double-sided pressure-sensitive adhesive tape in which a pressure-sensitive adhesive is applied to one side and the other side of the tape base material may be used. In such a case, for example, the adhesive adhesive made of an aluminum foil having a thickness of 25 μm and having an adhesive property is made of an acrylic resin mixed with conductive particles, has a thickness of 85 μm, and is conductive (for example, the aluminum hub 10 Between the blade body 30 and the blade body 30).

  Examples of the double-sided pressure-sensitive adhesive tape having a tape substrate include AL-25DC (trade name: manufactured by 3M Japan Co., Ltd.), T7620 (trade name: manufactured by Dexerials Co., Ltd.) and 7848YCWB (trade name: manufactured by Sekisui Chemical Co., Ltd.). Can be applied, such as those based on a conductive cloth bent like X-7001 (trade name: manufactured by 3M Japan Ltd.) or 9720S (trade name: manufactured by 3M Japan Ltd.) You may apply what uses a nonwoven fabric as a base material.

The blade body 30 is, for example, a disk having an outer diameter of 55.05 mm and a blade thickness of 0.015 to 0.04 μm (for example, 20 μm), and a circular shape having a diameter of 42.00 mm coaxially with the axis O on the inner peripheral side. A hole 30H is formed.
In this embodiment, the blade body 30 is formed, for example, by electrolytic plating a nickel (Ni) plating solution in which diamond abrasive grains are dispersed on a base metal made of stainless steel (SUS).

The blade body 30 also includes, for example, a metal base material 31 made of nickel (Ni) or an alloy mainly composed of a nickel alloy, and diamond superabrasive grains (abrasive grains) 32 dispersed in the metal base material 31. ing.
For example, nickel-phosphorus (Ni-P), nickel-cobalt (Ni-Co), or nickel-boron (Ni-B) is preferably used as an alloy mainly composed of nickel constituting the metal base material. It is.

The diamond superabrasive grains 32 are made of, for example, diamond having 3 to 10 μm (average particle diameter of 5 μm) and a degree of concentration of 50 to 125.
Further, the diamond superabrasive grains 32 are exposed from the surface of the metal base material 31 by about 2 μm, for example.

  Further, the connection surface 30T located on the aluminum hub 10 side of the blade body 30 and connected to the hub 10 via the double-sided adhesive tape 20 has diamond superabrasive grains 32 protruding from the surface of the metal base material 31, for example. It is preferable to form on a flat surface.

  Further, in the blade body 30, the exposed surface 30F located on the opposite side of the aluminum hub 10 and the protrusions located on the outer periphery of the blade body 30 are such that the diamond superabrasive grains 32 are exposed from the metal base material 31 made of nickel plating. Yes.

  Further, the protruding portion of the blade body 30 is formed with, for example, a chamfered concavity 30C on one side and the other side in the axis O direction. Note that the conspicuous portion 30C shown in FIG. 2 is an example, and the form of the conspicuous portion 30C is appropriately set depending on the cutting object.

  In this embodiment, the blade body 30 has a double-sided adhesive tape 20 attached to the aluminum hub 10, and an outer diameter coaxially with the aluminum hub 10 after sticking a base plate of the blade body 30 having an inner diameter processed to the attached double-sided adhesive tape 20. Formed by processing. In addition, inner diameter processing and outer diameter processing of the original plate of the blade body 30 are, for example, forming a jet liquid water column (jet water column) in the processing site and guiding the laser beam to the processing site while reflecting in the jet water column, It is preferable to irradiate the processing site, and it is more preferable that the jet water column (jet liquid column) is made as a laminar flow with as little unevenness as possible, for example, a 200 to 700 nm laser beam is totally reflected in the jet water column. . The conspicuous portion 30C is formed by dicer dressing after the outer diameter processing.

As shown in FIG. 2A, the blade pressing plate 50 is formed of, for example, a cemented carbide having a circular outer shape, and has an outer diameter substantially the same as the outer diameter of the hub 10 of the hub type blade 1. Thus, the one side surface 50A can be seated on the mounting seat 43, and the other side surface 50B has a blade pressing portion 51 formed on the outer peripheral edge portion.
Note that a titanium alloy, SUS (stainless steel), or the like may be applied instead of the cemented carbide, and can be arbitrarily set from a material having a high strength.

  The blade pressing portion 51 is formed to include a circumference centered on the axis O, and is based on a position corresponding to the outer peripheral edge of the aluminum hub 10 of the blade body 30 of the hub type blade 1 mounted on the blade mounting shaft 42. It is configured to press from the end side R toward the front end side F.

  Here, the outer peripheral edge portion of the aluminum hub 10 is a region located on the inner peripheral side from the outer periphery of the aluminum hub 10, and is a setting in which core runout generated in the blade body 30 due to a bending moment based on a load at the time of cutting is set in advance. A radial position that can be suppressed to a value (for example, 10 μm or less), and is preferably set to 0 mm to 3 mm from the outer diameter of the aluminum hub 10 to 0 mm from the outer diameter to the inner peripheral side. It is more preferable to set it to ˜1 mm.

  A circular hole 50H is formed coaxially with the axis O on the inner periphery of the blade pressing plate 50, and the blade pressing plate 50 can be attached to the rotary drive shaft 40 by inserting the blade mounting shaft 42. .

  Further, the blade pressing plate 50 has an axis O direction relative to the radial length of the mounting seat 43 and the blade pressing portion 51 caused by a bending moment based on the axial force in the axis O direction when the hub type blade 1 is mounted on the rotary drive shaft 40. Has sufficient strength and rigidity to be a set dimension (for example, 10 μm or less).

The blade mounting nut 45 is screwed onto the threaded portion 44 of the rotary drive shaft 40 so that the blade pressing plate 50 and the hub type blade 1 can be attached to the rotary drive shaft 40.
Instead of the blade mounting nut 45, a blade mounting member having an actuator or the like may be used.

  According to the hub type blade attachment structure 100 according to the first embodiment, the hub type blade 1 can be easily attached to the rotary drive shaft 40 with a simple structure, and the blade body 30 can be prevented from running out of the core while being high. The substrate can be cut accurately and stably.

  Further, according to the hub type blade mounting structure 100 according to the first embodiment, since the hub is made of aluminum or aluminum alloy, it is lightweight and can easily cope with high-speed rotation (for example, 30000 rpm or more).

Further, according to the hub type blade mounting structure 100 according to the first embodiment, the rotational drive shaft 40 has the mounting seat 43 formed on the proximal end R of the blade mounting shaft 42 and the blade pressing plate 50 is attached to and detached from the mounting seat 43. The blade pressing plate 50 can be easily attached to and detached from the rotation drive shaft 40 because the blade pressing plate 50 is mounted on the rotation drive shaft 40 in a possible manner.
As a result, when the outer diameter of the hub 10 of the hub type blade 1 is changed, the blade pressing plate 50 can be replaced to easily and efficiently match the hub outer diameter of the hub type blade 1.
Further, since the blade pressing plate 50 can be easily replaced, maintenance can be performed efficiently.

  According to the hub type blade mounting structure 100 according to the first embodiment, since the blade pressing plate 50 is made of cemented carbide and has conductivity, the double-sided adhesive tape 20 does not have conductivity. The blade body 30 can have a function as a touch sensor.

  In addition, according to the hub type blade mounting structure 100 according to the first embodiment, the hub type blade 1 is formed individually, and the hub 10 and the blade body 30 that have passed the inspection of the outer diameter and the like are bonded to the double-sided adhesive tape 20. Therefore, the outer diameter of the hub 10 can be formed to a set dimension with high accuracy, and the radial position corresponding to the peripheral edge of the hub of the blade body 30 can be accurately determined by the blade pressing portion 51. Can be pressed.

  Further, according to the hub type blade mounting structure 100 according to the first embodiment, since the blade body 30 is connected to the hub 10 via the double-sided adhesive tape 20, the blade body 30 is caused by the elasticity of the double-sided adhesive tape 20. The sudden bending at the outer edge of the hub 10 is alleviated, and the blade body 30 can be prevented from cracking when the blade body 30 hits the workpiece.

Second Embodiment
Hereinafter, a hub type blade mounting structure according to a second embodiment of the present invention will be described with reference to FIG.
FIG. 3 is a conceptual diagram for explaining an example of the outline of the hub type blade mounting structure according to the second embodiment of the present invention, and FIG. 3 (A) is a diagram showing a schematic configuration of the blade pressing plate. FIG. 3B is a schematic diagram illustrating a schematic configuration in a state where the hub type blade is separated from the rotation shaft, and FIG. 3C is a schematic diagram illustrating a schematic configuration in a state where the hub type blade is attached to the rotation shaft.
In FIG. 3, reference numeral 200 denotes a hub type blade mounting structure, reference numeral 1A denotes a hub type blade, reference numeral 10A denotes an aluminum hub, reference numeral 20A denotes an adhesive resin portion, reference numeral 30A denotes a blade body, and reference numeral 60 denotes a blade pressing plate. Show.

  As shown in FIG. 3, the hub-type blade mounting structure 200 includes, for example, a rotary drive shaft 40, a blade pressing plate 60, and a blade mounting nut (blade mounting member) 45. The blade pressing plate 60, the hub type blade 1A, and the blade mounting nut 45 are mounted in this order from the end side. Others are the same as those in the first embodiment, and thus the same reference numerals are given and description thereof is omitted.

  As shown in FIG. 3B, the hub type blade 1A includes, for example, an aluminum hub 10A, an adhesive resin portion 20A, and a blade body 30A. The aluminum hub 10A and the blade body 30A are connected by the adhesive resin portion 20A.

  The aluminum hub 10A has, for example, a maximum outer diameter of 55.4 mm, a blade mounting surface 10B formed on one side in the axis O direction (base end side R in the axis O direction), and the blade mounting surface 10B has an adhesive resin portion 20A. In order to ensure effective fixing, for example, the surface is preferably finished to a surface roughness Rmax of 5 to 50 μm (JIS B0601 1982) by, for example, sand blasting or shot blasting. Since others are the same as that of the aluminum hub 10 of 1st Embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted.

The adhesive resin portion 20A is, for example, an adhesive mainly composed of an epoxy resin or a cyanoacrylate resin applied in a donut shape corresponding to the outer diameter of the aluminum hub 10A and the inner diameter of the blade body (the inner diameter of the blade material). Is formed by curing.
Note that the adhesive resin portion 20A may be formed of an acrylic resin adhesive or the like instead of the epoxy resin or cyanoacrylate resin, and the configuration of the adhesive resin portion 20A can be arbitrarily set.
Further, the outer diameter, thickness (for example, 40 μm to 100 μm), elastic coefficient, holding force (adhesive force), etc. of the adhesive resin portion 20A hold the flatness (perpendicularity with respect to the axis O) of the blade body 30A, for example. It is preferable that the torsional deformation caused by the cutting torque when the hub type blade 1 cuts the object is set so as not to cause damage to the blade body 30A.

  Further, the adhesive resin portion 20A is preferably conductive enough to function as a touch sensor between the aluminum hub 10A and the blade body 30A, but whether or not the adhesive resin portion 20A has conductivity. Can be set arbitrarily.

  As the conductive adhesive, for example, ThreeBond 3380 (trade name: manufactured by ThreeBond Co., Ltd.) in which silver (Ag) filler is mixed with epoxy resin can be diluted with a solvent (for example, ethyl acetate) and applied. It is.

  In addition, for example, a cyanoacrylate-based instant adhesive (for example, ALTERCO CN2 (trade name: manufactured by Arteco), ALTERCO CN4 (trade name: manufactured by Arteco), Cemedine 3000DXF (trade name: manufactured by Cemedine Co., Ltd.), Cemedine 3000 DXL (trade name: manufactured by Cemedine Co., Ltd.), Cemedine 3000 DXL (trade name: manufactured by Cemedine Co., Ltd.), Aron Alpha EXTRA impact (trade name: manufactured by Toagosei Co., Ltd.), Aron Alpha EXTRA 4000 (product name: manufactured by Toagosei Co., Ltd.) The adhesive resin portion 20A may be formed by applying an adhesive having no conductivity such as.

  Moreover, when applying the adhesive agent which does not have electroconductivity, metals, such as gold | metal | money (Au) and silver (Ag), for example including micro pearl AU-201 (brand name: Sekisui Chemical Co., Ltd. product) The conductive particles (for example, 10 μm in diameter) formed by coating the particles with an epoxy adhesive or an acrylic adhesive are mixed and applied and cured, so that the aluminum hub 10A and the blade body 30A are electrically conductive particles. It is good also as electricity supply via.

  The blade body 30A is formed in a disk shape, for example, and a chamfered corner 30C is formed on one side and the other side in the direction of the axis O of the outer periphery, and an axis O, for example, is formed on the inner periphery of the blade body 30A. And a circular hole 30 </ b> H that is coaxial with each other.

  Further, the diamond superabrasive grains 32 are exposed from the metal base material 31 made of nickel plating over the entire exposed surface 30F located on the opposite side of the aluminum hub 10A and the connection surface 30D to which the adhesive is applied. Since others are the same as that of the aluminum hub 10 of 1st Embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted.

  In this embodiment, the blade body 30A is formed by bonding an original plate of the blade body 30A having an inner diameter processed to an adhesive applied to the aluminum hub 10A, and then processing the outer diameter coaxially with the aluminum hub 10A. Note that the inner diameter processing and outer diameter processing of the original plate of the blade body 30A are the same as those in the first embodiment, and thus description thereof is omitted.

As shown in FIG. 3A, the blade pressing plate 60 is formed of, for example, a ceramic whose outer shape is circular (for example, zirconia, alumina-titanium carbide, silicon carbide, etc.), and the outer diameter is a hub type. The blade 1A is formed to have substantially the same diameter as the outer diameter of the hub 10A. One surface 60A can be seated on the mounting seat 43, and the other surface 60B has a blade pressing portion 61 formed on the outer peripheral edge. .
Further, the blade pressing plate 60 has, for example, a conductive layer (conductivity imparting portion) formed by nickel (Ni) plating over the entire surface 60B on the other side in order to provide conductivity between the blade body 30A and the rotary drive shaft 40. ) (Not shown). The nickel (Ni) plating may be formed in a part of the circumferential direction along the radial direction.

The blade pressing portion 61 is formed so as to include a circumference centered on the axis O, and corresponds to a radial direction corresponding to the outer peripheral edge portion of the aluminum hub 10A of the blade body 30A of the hub type blade 1A attached to the blade mounting shaft 42. The position is configured to be pressed from the proximal end side R toward the distal end side F.
Further, on the inner peripheral side of the blade pressing portion 61, a relief portion 62 is formed between the blade pressing plate 60 and the blade main body 30A to secure a gap in the axis O direction.
Here, the outer peripheral edge of the aluminum hub 10A is preferably set to 0 mm to 3 mm from the outer diameter of the aluminum hub 10A to the inner peripheral side, and more preferably set to 0 mm to 1 mm from the outer diameter to the inner peripheral side. Is preferred.

  Further, a circular hole 60H is formed coaxially with the axis O on the inner periphery of the blade pressing plate 60, and the blade pressing plate 60 can be attached to the rotary drive shaft 40 by inserting the blade mounting shaft 42. .

  Further, the blade pressing plate 60 is provided in the direction of the axis O relative to the radial length of the mounting seat 43 and the blade pressing portion 61 generated by a bending moment based on the axial force in the direction of the axis O when the hub type blade 1 is mounted on the rotary drive shaft 40. Has sufficient strength and rigidity to be a set dimension (for example, 10 μm or less).

  According to the hub-type blade attachment structure 200 according to the second embodiment, the hub-type blade 1A can be easily attached to the rotary drive shaft 40 with a simple structure, and the height of the blade body 30A can be reduced while suppressing run-out. The substrate can be cut accurately and stably.

  Further, according to the hub type blade mounting structure 200 according to the second embodiment, the blade pressing shaft 60 is inserted into the blade pressing plate 60 and seated on the mounting seat 43 and mounted on the rotary drive shaft 40. 60 can be easily attached to and detached from the rotary drive shaft 40, and even if the outer diameter of the hub 10A of the hub type blade 1 is changed, the blade pressing plate 60 can be replaced and easily and efficiently removed from the hub of the hub type blade 1A. Can be adjusted to the diameter.

  According to the hub type blade mounting structure 200 according to the second embodiment, since the blade pressing plate 60 has conductivity, the blade main body 30 is touched even when the adhesive resin portion 20A does not have conductivity. A function as a sensor can be provided.

  In addition, according to the hub type blade mounting structure 200 according to the second embodiment, the hub type blade 1A is individually formed by bonding the hub 10A and the blade body 30A that have passed the inspection with respect to the outer diameter and the like. Therefore, the outer diameter of the hub 10A can be formed with a set dimension with high accuracy, and the radial position corresponding to the peripheral edge of the hub of the blade body 30A can be accurately determined by the blade pressing portion 61. Can be pressed.

  Further, according to the hub type blade mounting structure 200 according to the second embodiment, since the blade body 30 is connected to the hub 10A via the adhesive resin portion 20A, the blade body 30A is caused by the elasticity of the adhesive resin portion 20A. The sudden bending at the outer edge of the hub 10A is alleviated, and the blade body 30A can be prevented from cracking when the blade body 30A hits the workpiece.

According to the hub type blade mounting structure 200 according to the second embodiment, since the relief portion 62 is formed on the inner peripheral side of the blade pressing portion 61, when the hub type blade 1A is pressed, the blade pressing portion 61 The surface pressure with respect to the blade body 30A can be increased.
As a result, the hub type blade 1A can be attached to the rotary drive shaft 40 with high accuracy and more stably.

In addition, about the technical matter described in the said embodiment, it is possible to add a various change in the range which does not deviate from the meaning of invention.
In the above-described embodiment, the case where the blade pressing plates 50 and 60 are formed separately from the rotary drive shaft 40 has been described. For example, the blade pressing plate may be a base end of the blade mounting shaft 42 of the rotary drive shaft 40. It may be formed integrally with the rotational drive shaft 40 on the side R. In this case, it is possible to arbitrarily set whether the surface on the side pressing the hub-type blade 1 or 1A is flat or the escape portion is formed on the inner peripheral side.

  In the above embodiment, the case where the blade pressing plate 50 is applied to the hub type blade 1 and the blade pressing plate 60 is applied to the hub type blade 1A has been described. However, the correspondence between the blade pressing plate and the hub type blade is arbitrary. Can be set.

  In the above embodiment, the case where the blade pressing plate 50 and the blade pressing plate 60 have conductivity has been described. However, whether or not the blade pressing plate has conductivity can be arbitrarily set.

  In the above-described embodiment, the blade pressing plate 50 is formed of a cemented carbide alloy and is formed into a donut-shaped disk with flat sides, the blade pressing plate 60 is formed of ceramics, and the relief portion 62 is formed on the inner peripheral side of the blade pressing portion 61. However, for the material of the blade pressing plate, various metals such as stainless steel (SUS) can be applied, and the material and form are arbitrarily set. be able to. Moreover, you may apply the ceramic which has electroconductivity.

  Further, in the above-described embodiment, the hub type blade 1 has the hub 10 and the blade body 30 connected by the double-sided adhesive tape (connection portion) 20, and the hub type blade 1A has the hub 10A and the blade body 30A bonded to the adhesive resin portion 20A. However, in place of the double-sided adhesive tape 20 and the adhesive resin portion (adhesive) 20A, connection portions by various diffusion bonding including ultrasonic bonding, nuggets by spot welding, brazing It may be configured to be connected by a connecting portion formed by equal welding, a connecting portion constituted by a fastening member for fastening the hub and the blade body, or a hub in which the blade body is directly formed by plating or vapor deposition. A mold blade may be applied.

  Moreover, in the said embodiment, although the hub 10 and 10A which comprise the hub type braid | blade 1 demonstrated the case where it was formed with aluminum alloy or aluminum, it replaced with aluminum alloy or aluminum, and pure titanium (Ti) ( JIS class 1), various metal materials including titanium alloys and magnesium alloys, engineering plastics such as polycarbonate, fiber reinforced plastics, and various practical plastic materials such as acrylic plastics. May be.

  Moreover, in the said embodiment, although the braid | blade main body 30 demonstrated the case where the diamond superabrasive grain 32 was disperse | distributed to the metal base material 31 which consists of nickel plating, for example, Ni-P plating, Ni-Co plating, Ni -B plating, metal blades in which abrasive grains are dispersed in various applicable metal base materials including copper (Cu) and copper alloys (for example, Cu-Sn), resin blades made of phenol resin, etc., abrasive grains Various blade bodies such as a Vito blade formed by firing glass powder (inorganic material) containing a ceramic powder mixed with bismuth and a blade formed of cemented carbide may be used.

  According to the hub type blade mounting structure and the substrate cutting apparatus according to the present invention, it is possible to easily mount the hub type blade to the rotary drive shaft with a simple structure, and it is highly accurate while suppressing the runout of the blade body. And since it can cut | disconnect a board | substrate stably, it can utilize industrially.

O Rotation axis (axis)
1, 1A Hub type blade 10, 10A Aluminum hub (hub)
10F Blade mounting surface 10H Hub type blade mounting hole 20 Double-sided adhesive tape 20A Adhesive resin portion 30, 30A Blade body 30T, 30D Connection surface 30H Circular hole 31 Metal base material (nickel plating)
32 Diamond superabrasive (abrasive)
40 Rotation Drive Shaft 41 Mounting Shaft 43 Mounting Seat 44 Screw Part 45 Mounting Nut (Mounting Member)
50, 60 Blade pressing plate 51, 61 Blade pressing part 62 Relief part 100, 200 Hub type blade mounting structure 500 Hub type blade mounting structure

Claims (7)

A rotary drive shaft formed with a blade mounting shaft that is rotated about an axis and a hub type blade is mounted on the tip side;
A blade pressing plate disposed on a base end side of a blade mounting shaft on which the hub type blade is mounted on the rotary drive shaft;
A blade attachment member for fixing a hub-type blade attached to the rotary drive shaft on the tip side of the blade attachment shaft;
With
The blade pressing plate is
A blade pressing portion that presses a region including a circumference corresponding to the outer peripheral edge portion of the hub of the hub type blade in the radial direction with the axis as the center,
A hub-type blade mounting structure configured to press the blade body of the hub-type blade by the blade pressing portion. The hub type blade mounting structure according to claim 1,
The rotary drive shaft is formed with a mounting seat on the base end side of the blade mounting shaft, and the blade pressing plate is detachable from the rotary drive shaft,
The blade pressing plate is
A hub-type blade mounting structure, wherein a mounting hole for inserting the blade mounting shaft is formed and a base end side can be supported by the mounting seat. The hub type blade mounting structure according to claim 1 or 2,
The blade pressing plate is
A hub-type blade mounting structure, wherein an escape portion that forms a gap with the blade body is formed on an inner peripheral side of the blade pressing portion. The hub type blade mounting structure according to any one of claims 1 to 3,
A hub-type blade mounting structure, wherein the blade pressing plate is formed with a conductivity providing portion for ensuring conductivity between at least the blade pressing portion and the rotation drive shaft.   The hub type blade mounting structure according to any one of claims 1 to 4, wherein the hub type blade has a double-sided adhesive tape as a connecting portion for connecting the hub and the blade body.   The hub type blade attachment structure according to any one of claims 1 to 4, wherein the hub type blade is provided with an adhesive resin portion as a connection portion for connecting the hub and the blade body.   A board cutting apparatus comprising the hub-type blade mounting structure according to claim 1.

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