JP2024039132A - cutting blade - Google Patents

Abstract

To reduce the frequency of end face correction and simplify the work of end face correction.SOLUTION: A cutting blade that includes a cylindrical boss portion and a flange portion provided at the base end of the boss portion and protruding outward from the boss portion in the radial direction of the boss portion, and is attached to a blade mount fixed to the tip of a spindle includes an annular base having a fitting hole in the radial center portion that fits into the boss portion, a cutting blade provided on the outer periphery of one side of the annular base and protruding outward from the outer periphery of the annular base in the radial direction of the annular base, and a protection film that is provided in an annular area located inside the cutting blade in the radial direction on one side of the annular base, and comes into contact with the flange when mounted on the blade mount to prevent contact between the flange and the annular base.SELECTED DRAWING: Figure 5

Description

The present invention relates to a cutting blade having an annular base and a cutting blade provided on the outer periphery of one side of the annular base.

Electronic devices such as mobile phones and personal computers are equipped with semiconductor device chips. Semiconductor device chips are usually manufactured by dividing a semiconductor wafer, on which a plurality of devices such as ICs (Integrated Circuits) are formed on the front surface, into device units using a cutting machine.

The cutting device has a spindle that can rotate at high speed. For example, a hub blade is attached to the tip of the spindle. The hub blade has a disc-shaped base made of aluminum alloy.

A fitting hole is formed in the radial center of this substrate. That is, the base is an annular base, and an annular cutting blade formed by electrodeposition is fixed to the outer periphery of one surface of the annular base (see, for example, Patent Document 1).

When attaching the hub blade to the tip of the spindle, a blade mount fixed to the tip of the spindle and an annular fixing nut are used. The blade mount has a cylindrical boss portion that fits into the fitting hole of the hub blade.

A male thread is formed on the outer circumferential side of the tip of the boss portion. Further, a disk-shaped flange portion is provided at the base end portion of the boss portion so as to protrude outward in the radial direction of the boss portion. An annular convex portion is provided on the outer peripheral portion of the flange portion so as to protrude in the same direction as the boss portion over the entire circumferential direction of the flange portion.

When the fitting hole of the hub blade is fitted into the boss part and the female thread of the fixing nut is engaged with the male thread of the boss part, the annular base of the hub blade will fit into the annular convex part of the flange part in the longitudinal direction of the spindle. It is fixed to the spindle by being sandwiched between a fixing nut and a fixing nut.

By the way, when the hub blade is repeatedly attached and detached from the blade mount, scratches may be formed on the annular end surface of the annular convex portion of the flange portion that contacts the annular base. When scratches are formed, the adhesion between the end face of the annular convex portion and the annular base may deteriorate, and precision cutting may become impossible.

Further, if the attachment and detachment are repeated in the same manner, the material of the annular base may adhere to the end face of the annular convex portion of the flange portion. If a new hub blade is installed with the material of the annular base attached to the end face of the annular convex part of the flange, the cutting blade may run out when the spindle rotates, making it impossible to perform precise cutting. .

Therefore, after repeated attachment and detachment a certain number of times, the end surface of the annular convex portion is usually flattened by grinding it using a special jig (for example, see Patent Documents 2 to 4). ). However, since the cutting of the semiconductor wafer is interrupted while the end face is being corrected, the operating rate of the cutting device is reduced.

Japanese Patent Application Publication No. 2000-87282 Japanese Patent Application Publication No. 8-339977 JP2009-297855A Japanese Patent Application Publication No. 2011-11299

The present invention has been made in view of the above problems, and aims to reduce the frequency of end face correction and to simplify the work of end face correction.

According to one aspect of the present invention, the spindle includes a cylindrical boss portion and a flange portion provided at the base end portion of the boss portion and protruding outward from the boss portion in the radial direction of the boss portion. A cutting blade that is attached to a blade mount fixed to a tip portion, the annular base having a fitting hole in the radial center portion that fits into the boss portion, and an outer peripheral portion on one side of the annular base. a cutting blade that is provided on the annular base and protrudes outward from the outer circumferential end of the annular base in the radial direction; A cutting blade is provided, comprising: a protective film provided in an annular region located at the blade mount, contacting the flange portion when mounted on the blade mount, and preventing contact between the flange portion and the annular base. Ru.

Preferably, the protective film is an organic film having a thickness of 10 μm or more and 20 μm or less.

Further, preferably, the protective film is a water-insoluble organic film.

A protective film is provided on one surface of the annular base in the cutting blade according to one aspect of the present invention in an annular region located inside the cutting blade in the radial direction of the one surface. The protective film comes into contact with the flange portion when the cutting blade is mounted on the blade mount, and prevents the flange portion from coming into contact with the annular base.

Therefore, since the annular base is less likely to be damaged, the frequency of end face correction at the flange portion can be reduced. In addition, as the cutting blade is attached and detached, dirt from the protective film etc. may adhere to the flange, but since the dirt can be wiped off with an organic solvent such as alcohol, it is easier to clean the end face than by grinding. The end face modification work can be simplified.

FIG. 1(A) is a perspective view of the outer surface of the hub blade according to the first embodiment, and FIG. 1(B) is a perspective view of the inner surface of the hub blade according to the first embodiment. It is a perspective view of a cutting device. FIG. 3 is an exploded perspective view of the cutting unit. FIG. 3 is a partially cross-sectional side view of the cutting unit before a hub blade is attached. FIG. 3 is a partially sectional side view of the cutting unit with a hub blade attached thereto. FIG. 6(A) is a perspective view of the outer side of the hub blade according to the modified example, and FIG. 6(B) is a perspective view of the inner side of the hub blade according to the modified example.

Embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1(A) is a perspective view of the outer surface 2a side of the hub blade (cutting blade) 2 according to the first embodiment, and FIG. 1(B) is a perspective view of the inner surface of the hub blade 2 according to the first embodiment. It is a perspective view of the 2b side.

As shown in FIG. 1(A), the hub blade 2 has a disc-shaped annular base 4. As shown in FIG. The annular base 4 is made of metal such as an aluminum alloy and has an outer diameter of about 50 mm. The annular base 4 includes a first annular portion 4a in the shape of a truncated cone (see FIG. 4) and a second annular portion 4b in the shape of a disc.

The second annular portion 4b is provided on the small-diameter toric surface (that is, the upper surface of a truncated cone) of the first annular portion 4a in the thickness direction 4c of the annular base 4. The second annular portion 4b is used when a worker or a transfer robot grips the hub blade 2.

A fitting hole 4e having a diameter of about 20 mm is formed in the center of the annular base 4 in the radial direction 4d so as to pass through the annular base 4 in the thickness direction 4c. The fitting hole 4e is fitted into the second boss portion 60 of the blade mount 56 when the hub blade 2 is mounted on the blade mount 56 (see FIGS. 3 to 5), which will be described later.

The large-diameter toric surface (ie, the lower surface of the truncated cone) of the first annular portion 4a corresponds to the inner surface (one surface) 2b of the first annular portion 4a. An annular cutting blade 6 is provided on the outer peripheral portion 2b ₁ (see FIG. 4) of the inner surface 2b. The cutting blade 6 is formed, for example, by electrodeposition, and is fixed to the outer peripheral portion _2b1 of the inner surface 2b.

The cutting blade 6 has abrasive grains made of diamond. Each abrasive grain is fixed with a bond material made of metal such as nickel (Ni). The cutting blade 6 protrudes outward from the outer peripheral end 4a ₁ (see FIG. 4) of the first annular portion 4a in the radial direction 4d.

On the inner surface 2b of the first annular portion 4a, a protective film 8 is provided in an annular region 2b ₂ (see FIG. 4) located inside the outer peripheral portion 2b ₁ in which the cutting blade 6 is provided in the radial direction 4d. ing. In FIG. 1B, the protective film 8 is colored for convenience of explanation, but the protective film 8 may be transparent to visible light.

As will be described later, the protective film 8 protects the flange portion 62 by coming into contact with the end surface 62a ₁ of the annular convex portion 62a of the flange portion 62 when the hub blade 2 is mounted on the blade mount 56 (see FIG. 5). Contact between the end surface 62a ₁ and the inner surface 2b of the annular base 4 is prevented.

In this embodiment, a protective film 8 is provided over the entire annular region 2b ₂ excluding the outer peripheral portion 2b ₁ on the inner surface 2b. However, the protective film 8 may be provided only in the region that contacts the end surface _62a1 of the annular convex portion 62a.

By the way, if only to prevent contact between the end surface 62a ₁ of the flange portion 62 and the inner surface 2b of the annular base 4, an anodized coating formed by anodizing the annular base 4 (i.e., alumite) It is also conceivable to employ as the protective film 8 a DLC (diamond-like carbon) film formed by (amorphous alumina film), PVD (Physical Vapor Deposition), or CVD (Chemical Vapor Deposition).

However, the anodic oxide film and the DLC film have higher hardness than organic films and are more likely to damage the end surface _62a1 of the annular convex portion 62a. Therefore, it is preferable that the protective film 8 is an organic film having a hardness lower than that of the metal material forming the annular convex portion 62a. A suitable example of the material constituting the protective film 8 is resin.

The protective film 8 of this embodiment is a water-insoluble organic film made of polyvinyl butyral (PVB), polymethyl methacrylate (PMMA), polyethylene terephthalate (PET), polyimide (PI), polystyrene (PS), polyethylene (PE), polypropylene (PP), polyurethane (PU), or other resin.

When forming the protective film 8, a liquid film in which the organic material constituting the protective film 8 is dispersed in an organic solvent is formed in the annular region _2b2 using, for example, silk screen printing, spray coating, etc. do. Thereafter, the protective film 8 is formed by volatilizing the organic solvent by drying.

However, the formation of the protective film 8 is not limited to the above-described printing or coating. For example, a protective film 8 previously created to have a shape corresponding to the annular region 2b ₂ may be attached to the annular region 2b ₂ .

Further, as the water-insoluble organic film, an ultraviolet curing resin such as an acrylic resin or an epoxy resin may be used. If the protective film 8 is formed of an ultraviolet curable resin, the polymerization reaction will be completed and the resin will solidify in a few seconds due to ultraviolet irradiation, so the time required to form the protective film 8 can be shortened compared to the case where a liquid film is dried.

Note that the protective film 8 may be a water-soluble organic film instead of a water-insoluble film. For the water-soluble organic film, one of the materials listed below may be used alone, or two or more of the materials may be used in combination.

Polyvinylpyrrolidone, polyvinyl alcohol, polyethylene glycol, polyethylene oxide, methyl cellulose, ethyl cellulose, hydroxypropyl cellulose, polyacrylic acid (polyacrylic acid), poly-N-vinylacetamide, polystyrene sulfonic acid, special nylon, phenolic resin, methylolmelamine resin, polyglycerin ), and their graft polymers (eg, polyvinyl pyrrolidone grafted onto polyvinyl alcohol).

The protective film 8 has a predetermined thickness that is thinner than the thickness of the cutting blade 6. The predetermined thickness is, for example, 10 μm or more and 20 μm or less. If the protective film 8 exceeds 20 μm, the in-plane variation in the thickness of the protective film 8 will increase, and furthermore, the fixing nut 64 (see FIG. 3) may become more likely to loosen due to a decrease in the amount of tightening of the fixing nut 64 (see FIG. 3). There are concerns.

If the protective film 8 is less than 10 μm, there is a possibility that the protective film 8 will at least partially peel off and disappear after being attached and detached several times. Partial disappearance due to peeling of the protective film 8 may lead to surface runout of the cutting blade 6.

Moreover, the entire disappearance of the protective film 8 due to peeling leads to contact between the annular region 2b ₂ of the inner surface 2b and the end surface 62a ₁ of the annular convex portion 62a. Therefore, the thickness of the protective film 8 is preferably 10 μm or more and 20 μm or less.

Next, the cutting device 12 in which the hub blade 2 is used will be described with reference to FIGS. 2 to 5. FIG. 2 is a perspective view of the cutting device 12. Note that the X-axis direction, Y-axis direction, and Z-axis direction shown in FIG. 2 are orthogonal to each other.

The cutting device 12 includes a base 14 that supports each component. A support base 16 that moves up and down along the Z-axis direction is provided at the front corner (one side in the Y-axis direction) of the base 14 . A cassette 18 that can accommodate a plurality of workpieces (not shown) is placed on the upper surface of the support table 16.

A rectangular opening 14a whose longitudinal portion is arranged along the X-axis direction is formed at the rear of the support base 16 (on the other side in the Y-axis direction). A rectangular table cover 20 is provided within the opening 14a.

Bellows-shaped cover members 22 having a dust-proof and drip-proof function are provided on both sides of the table cover 20 in the X-axis direction. Furthermore, a disc-shaped chuck table 24 is provided on the table cover 20.

The chuck table 24 includes a metal frame and a porous plate fixed to a disc-shaped recess provided on the upper surface of the frame. The frame and the upper surface of the porous plate constitute a holding surface 24a for suctioning and holding the workpiece under negative pressure.

A ball screw type X-axis movement mechanism (not shown) for moving the chuck table 24 along the X-axis direction is provided below the table cover 20 and the cover member 22. An inverted L-shaped support structure 26 is provided behind the opening 14a.

The support structure 26 is provided with a ball screw type Y-axis direction movement mechanism 28 . The Y-axis direction movement mechanism 28 has a pair of guide rails 30 arranged substantially parallel to the Y-axis direction. A moving plate 32 is slidably attached to the pair of guide rails 30.

A ball screw 34 is arranged between the pair of guide rails 30 substantially parallel to the Y-axis direction. A nut portion (not shown) is provided on the back side of the movable plate 32, and a ball screw 34 is rotatably connected to the nut portion via a plurality of balls (not shown).

A driving source (not shown) such as a stepping motor is connected to one end of the ball screw 34 . When the drive source is operated, the moving plate 32 moves along the Y-axis direction. A ball screw type Z-axis direction moving mechanism 36 is provided on the front side of the moving plate 32.

The Z-axis direction movement mechanism 36 has a pair of guide rails 38 arranged substantially parallel to the Z-axis direction. A moving plate 40 is slidably attached to the pair of guide rails 38. A ball screw 42 is arranged between the pair of guide rails 38 substantially parallel to the Z-axis direction.

A nut portion (not shown) is provided on the back side of the moving plate 40, and a ball screw 42 is rotatably connected to the nut portion via a plurality of balls (not shown). A driving source 44 such as a stepping motor is connected to the upper end of the ball screw 42 . When the drive source 44 is operated, the moving plate 40 moves along the Z-axis direction.

A microscope camera unit 46 is fixed to the side of the lower end of the movable plate 40, which is arranged so as to face the holding surface 24a. The microscope camera unit 46 is used for detecting dividing lines (not shown) set on the workpiece, confirming the positions of cutting grooves (kerfs) formed on the workpiece, and the like.

A cutting unit 50 is fixed to the lower end of the movable plate 40. The cutting unit 50 has a spindle housing 52 whose longitudinal portion is arranged along the Y-axis direction. As shown in an enlarged view in FIG. 3, a part of a cylindrical spindle 54 is rotatably accommodated in the spindle housing 52 by an air bearing.

FIG. 3 is an exploded perspective view of the cutting unit 50, and FIG. 4 is a partially sectional side view of the cutting unit 50 before the hub blade 2 is attached. A blade mount 56 is fixed to the tip 54a of the spindle 54.

The blade mount 56 (including the first boss portion 58, the second boss portion 60, and the flange portion 62) is made of relatively strong metal such as stainless steel, pure titanium, and titanium alloy. However, the metal material constituting the blade mount 56 is not limited to these examples.

The blade mount 56 has a cylindrical first boss portion 58 that includes a fitting hole 58a (see FIG. 4) that fits into the tip 54a of the spindle 54. A cylindrical second boss portion (boss portion) 60 is provided on the proximal end side of the first boss portion 58 so as to protrude to the opposite side from the first boss portion 58 .

A male thread 60a is formed on the outer circumferential side of the tip of the second boss portion 60. Further, the second boss portion 60 is formed with a substantially cylindrical hollow portion 60b that reaches the fitting hole 58a of the first boss portion 58.

A disk-shaped flange portion 62 is provided at the base end portion of the second boss portion 60 so as to protrude to the outside of the second boss portion 60 in the radial direction 60c of the second boss portion 60 (see FIG. 4). . An annular convex portion 62 a is provided on the outer peripheral portion of the flange portion 62 so as to protrude in the same direction as the second boss portion 60 over the entire circumferential direction of the flange portion 62 .

The annular convex portion 62a includes an end surface _62a1 that is a substantially flat annular plane. The end surface _62a1 is substantially orthogonal to a straight line parallel to the central axis direction 60d of the second boss portion 60 (see FIG. 4).

When attaching the hub blade 2 to the blade mount 56, first, the fitting hole 4e of the annular base 4 is fitted into the second boss portion 60. Then, the fixing nut 64 is screwed to the second boss part 60 so that the female thread 64a of the fixing nut 64 is engaged with the male thread 60a of the second boss part 60.

As a result, the annular base 4 of the hub blade 2 is fixed to the spindle 54 by being sandwiched between the annular convex portion 62a of the flange portion 62 and the fixing nut 64 in the central axis direction 60d of the second boss portion 60. (See Figure 5).

FIG. 5 is a partially sectional side view of the cutting unit 50 with the hub blade 2 attached. In this embodiment, when the hub blade 2 is mounted on the blade mount 56, the protective film 8 comes into contact with the end surface _62a1 of the flange portion 62, so that contact between the flange portion 62 and the annular base 4 is prevented.

As a result, the annular base 4 is less likely to be damaged, so the frequency of end face correction in the flange portion 62 can be reduced. Furthermore, as the hub blade 2 is attached and detached, dirt on the protective film 8 and the like may adhere to the flange portion 62, but since the dirt can be wiped off with an organic solvent such as alcohol, it is recommended that the end face be corrected by grinding. In comparison, the end face modification work can be simplified.

(Modification) Next, a modification will be described with reference to FIGS. 6(A) and 6(B). FIG. 6(A) is a perspective view of the outer surface 2a side of a hub blade 72 according to a modification, and FIG. 6(B) is a perspective view of the inner surface 2b side of the hub blade 72 according to the modification. Note that in FIGS. 6A and 6B, the protective film 8 is colored for convenience of explanation, but the protective film 8 may be transparent to visible light.

As shown in FIG. 6(A), in the hub blade 72, a protective film 8 is provided on substantially the entire outer surface 2a of the annular base 4. As shown in FIG. That is, the protective film 8 is provided on substantially the entire side surface of the truncated conical first annular portion 4a, and on substantially the entire side surface and toric surface of the disc-shaped second annular portion 4b.

Of course, as shown in FIG. 6(B), the protective film 8 is also provided on the annular region _2b2 on the inner surface 2b side of the first annular portion 4a. In addition, the structure, method, etc. according to the above-described embodiments can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

In addition to the annular region _2b2 of the inner surface 2b of the first annular portion 4a, the protective film ₈ may also be provided on the end surface 62a1 of the annular convex portion 62a of the flange portion 62. Further, the manufacturing method of the hub blades 2, 72 is not limited to electrodeposition, but can be formed by pasting and fixing a washer blade that functions as the cutting blade 6 to the outer circumferential portion _2b1 of the inner surface 2b of the first annular portion 4a. You can.

2,72: Hub blade (cutting blade)
2a: outer surface (other surface), 2b: inner surface (one surface), 2b ₁ : outer peripheral part, 2b ₂ : annular region 4: annular base, 4a: first annular part, 4a ₁ : outer peripheral end, 4b: second Annular portion 4c: thickness direction, 4d: radial direction, 4e: fitting hole 6: cutting blade, 8: protective film 12: cutting device, 14: base, 14a: opening, 16: support stand, 18: cassette 20 : table cover, 22: cover member, 24: chuck table, 24a: holding surface 26: support structure, 28: Y-axis direction movement mechanism, 30: guide rail, 32: moving plate 34: ball screw, 36: Z-axis direction Moving mechanism, 38: Guide rail, 40: Moving plate 42: Ball screw, 44: Drive source, 46: Microscope camera unit 50: Cutting unit, 52: Spindle housing, 54: Spindle, 54a: Tip portion 56: Blade mount, 58: First boss part, 58a: Fitting hole 60: Second boss part (boss part)
60a: Male thread, 60b: Hollow portion, 60c: Radial direction, 60d: Central axis direction 62: Flange portion, 62a: Annular convex portion, 62a ₁ : End face 64: Fixing nut, 64a: Female thread

Claims (3)

A blade mount fixed to a tip end of a spindle, the blade mount having a cylindrical boss part and a flange part provided at the base end of the boss part and protruding outward from the boss part in the radial direction of the boss part. A cutting blade to be mounted,
an annular base having a fitting hole in the radial center portion that fits into the boss portion;
a cutting blade provided on the outer periphery of one surface of the annular base and protruding outward from the outer periphery of the annular base in the radial direction of the annular base;
It is provided in an annular region located inside the cutting blade in the radial direction on the one surface of the annular base, and comes into contact with the flange portion when attached to the blade mount, so that the flange portion and the annular base A protective film that prevents contact with the stand,
A cutting blade characterized by comprising: The cutting blade according to claim 1, wherein the protective film is an organic film having a thickness of 10 μm or more and 20 μm or less. The cutting blade according to claim 1 or 2, wherein the protective film is a water-insoluble organic film.

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