JP6931487B2 - 変位検出装置 - Google Patents
変位検出装置 Download PDFInfo
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- JP6931487B2 JP6931487B2 JP2017548837A JP2017548837A JP6931487B2 JP 6931487 B2 JP6931487 B2 JP 6931487B2 JP 2017548837 A JP2017548837 A JP 2017548837A JP 2017548837 A JP2017548837 A JP 2017548837A JP 6931487 B2 JP6931487 B2 JP 6931487B2
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- position detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/202—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element
- G01D5/2026—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element constituting a short-circuiting element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
Vd=X1−X0=(a1+σ)−(a0+σ)=a1−a0
となり、時点t0,t1間における検出対象位置の正しい差分(速度データVd)を示す。このような差分値(速度データVd)を前記ステップ32で積分することにより、誤差成分σを除去した精度の良い位置データLdを得ることができる。従って、本発明によれば、誤差又はオフセット成分σを自動的に除去した精度の良い位置検出を行うことができる。
Claims (4)
- コイルと、
検出対象位置に応じて前記コイルに対して変位するように配置された磁気応答部材と、
前記コイルを発振要素として組み込み、該コイルに対する前記磁気応答部材の変位に応じた該コイルのインダクタンス変化に応じて発振周波数が変化する自励発振回路と、
前記自励発振回路の発振出力信号に基づき該自励発振回路の発振周波数に対応する計測値をデジタルの原初的位置検出データとして生成し、前記原初的位置検出データの時間的差分値をデジタル的に演算することにより速度データを生成し、該速度データを積分することにより変位データを求めるように構成された、演算部と
を備える変位検出装置。 - 前記演算部は、前記原初的位置検出データの時間的差分値をデジタル的に演算するための時間差を可変設定するように構成されている、請求項1の位置検出装置。
- 前記演算部は、さらに、前記速度データの時間的差分値をデジタル的に演算することにより加速度データを生成する、請求項1又は2の位置検出装置。
- 前記演算部は、さらに、前記生成した加速度データを積分することにより第2の速度データを求める、請求項3の位置検出装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015216767 | 2015-11-04 | ||
JP2015216767 | 2015-11-04 | ||
PCT/JP2016/082699 WO2017078110A1 (ja) | 2015-11-04 | 2016-11-02 | 変位検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017078110A1 JPWO2017078110A1 (ja) | 2018-08-23 |
JP6931487B2 true JP6931487B2 (ja) | 2021-09-08 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017548837A Active JP6931487B2 (ja) | 2015-11-04 | 2016-11-02 | 変位検出装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10775198B2 (ja) |
EP (1) | EP3372952B1 (ja) |
JP (1) | JP6931487B2 (ja) |
CN (1) | CN108351195B (ja) |
WO (1) | WO2017078110A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107462146B (zh) * | 2017-09-04 | 2023-07-25 | 中国计量大学 | 基于多互感机理的地下三维位移测量系统与方法 |
KR102059818B1 (ko) | 2017-09-28 | 2019-12-27 | 삼성전기주식회사 | 회전체 감지 장치 |
EP3514502B1 (en) * | 2018-01-22 | 2021-07-14 | Melexis Technologies SA | Inductive position sensor |
US11525701B2 (en) | 2018-01-22 | 2022-12-13 | Melexis Technologies Sa | Inductive position sensor |
KR102115525B1 (ko) * | 2018-09-14 | 2020-05-26 | 삼성전기주식회사 | 회전체 감지 장치 |
US11204258B2 (en) * | 2018-09-14 | 2021-12-21 | Samsung Electro-Mechanics Co., Ltd. | Apparatus for sensing rotating device |
US10921160B2 (en) * | 2018-11-22 | 2021-02-16 | Samsung Electro-Mechanics Co., Ltd. | Sensing circuit of moving body and moving body sensing device |
US20210388890A1 (en) * | 2020-06-16 | 2021-12-16 | American Axle & Manufacturing, Inc. | Vehicle driveline component having a sensor-less electromagnetic actuator system |
CN112284230B (zh) * | 2020-10-09 | 2021-11-16 | 珠海格力电器股份有限公司 | 位移检测装置、位移监控方法及压缩机 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4002308B2 (ja) | 1995-08-10 | 2007-10-31 | 株式会社アミテック | 誘導型回転位置検出装置 |
JP4047947B2 (ja) | 1996-03-16 | 2008-02-13 | 株式会社アミテック | 誘導型直線位置検出装置 |
JPH10173437A (ja) | 1996-12-09 | 1998-06-26 | Omron Corp | Lc発振回路及びこれを用いた近接センサ |
JPH10252549A (ja) | 1997-03-07 | 1998-09-22 | Mitsubishi Electric Corp | 回転数検出装置及び回転機械の制御装置 |
JP2000329510A (ja) | 1999-05-24 | 2000-11-30 | Hitachi Ltd | 紙葉類の厚さ検出装置 |
KR100794976B1 (ko) * | 2000-11-30 | 2008-01-16 | 아실럼 리서치 코포레이션 | 고정밀 위치 측정을 위한 개량형 선형 가변 차동 변환기 |
JP4574893B2 (ja) | 2001-05-02 | 2010-11-04 | 株式会社エスジー | 導体検出装置 |
DE102005007265A1 (de) * | 2004-09-21 | 2006-04-06 | Micro-Epsilon Messtechnik Gmbh & Co Kg | Vorrichtung und Verfahren zur Erfassung der Position und der Geschwindigkeit eines Messobjekts |
CN100492872C (zh) * | 2007-07-19 | 2009-05-27 | 清华大学 | 基于非线性鲁棒电力系统稳定器的大扰动实时仿真系统 |
JP5347446B2 (ja) | 2008-11-18 | 2013-11-20 | 株式会社ジェイテクト | 基板形複層コイル及び変位センサ装置 |
US8278915B2 (en) * | 2008-12-15 | 2012-10-02 | Chun Soo Park | Minimizing magnetic interference in a variable reluctance resolver |
US8102637B2 (en) * | 2009-07-22 | 2012-01-24 | Analog Devices, Inc. | Control techniques for electrostatic microelectromechanical (MEM) structure |
CN102032012A (zh) * | 2010-05-05 | 2011-04-27 | 天津蹊径动力技术有限公司 | 辐向永磁直线电机式电磁气门驱动系统 |
US9683829B2 (en) * | 2011-12-13 | 2017-06-20 | Amiteq Co., Ltd. | Position detection device |
EP2853861B1 (en) * | 2012-05-14 | 2017-10-18 | Amiteq Co., Ltd. | Position detection device |
-
2016
- 2016-11-02 WO PCT/JP2016/082699 patent/WO2017078110A1/ja active Application Filing
- 2016-11-02 JP JP2017548837A patent/JP6931487B2/ja active Active
- 2016-11-02 EP EP16862170.4A patent/EP3372952B1/en active Active
- 2016-11-02 US US15/772,831 patent/US10775198B2/en active Active
- 2016-11-02 CN CN201680064578.0A patent/CN108351195B/zh active Active
Also Published As
Publication number | Publication date |
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EP3372952B1 (en) | 2020-09-09 |
US20180313665A1 (en) | 2018-11-01 |
EP3372952A1 (en) | 2018-09-12 |
EP3372952A4 (en) | 2019-05-08 |
JPWO2017078110A1 (ja) | 2018-08-23 |
CN108351195B (zh) | 2020-07-14 |
US10775198B2 (en) | 2020-09-15 |
WO2017078110A1 (ja) | 2017-05-11 |
CN108351195A (zh) | 2018-07-31 |
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