JP6924014B2 - 傾動格子出力カプラのためのシステム及び方法 - Google Patents
傾動格子出力カプラのためのシステム及び方法 Download PDFInfo
- Publication number
- JP6924014B2 JP6924014B2 JP2016217772A JP2016217772A JP6924014B2 JP 6924014 B2 JP6924014 B2 JP 6924014B2 JP 2016217772 A JP2016217772 A JP 2016217772A JP 2016217772 A JP2016217772 A JP 2016217772A JP 6924014 B2 JP6924014 B2 JP 6924014B2
- Authority
- JP
- Japan
- Prior art keywords
- output coupler
- tilt
- grid output
- tilting
- lattice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
- G02B6/29313—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide characterised by means for controlling the position or direction of light incident to or leaving the diffractive element, e.g. for varying the wavelength response
- G02B6/29314—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide characterised by means for controlling the position or direction of light incident to or leaving the diffractive element, e.g. for varying the wavelength response by moving or modifying the diffractive element, e.g. deforming
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Description
前記基板の上方で懸架された傾動表面と、
前記傾動表面の傾動を選択的に制御するように構成されたアクチュエータと、
前記傾動表面によって支持された格子出力カプラと、を含む、格子出力カプラアセンブリ。
前記第2格子出力カプラを支持する第2傾動表面と、
前記第2傾動表面の傾動を選択的に制御するように構成された第2アクチュエータと、を含む、付記3に記載の格子出力カプラアセンブリ。
前記フォトニック回路に接続された格子出力カプラアセンブリと、を含み、前記格子出力カプラアセンブリは、
基板と、
前記基板の上方で懸架された傾動表面と、
前記傾動表面の傾動を選択的に制御するように構成されたアクチュエータと、
前記傾動表面によって支持された格子出力カプラと、を含む、LIDARシステム。
前記第2格子出力カプラを支持する第2傾動表面と、
前記第2傾動表面の傾動を選択的に制御するように構成された第2アクチュエータと、を含む、付記11に記載のLIDARシステム。
傾動表面の傾動を選択的に制御するように構成されたアクチュエータを用いて、基板の上方に前記傾動表面を懸架し、
前記傾動表面上に格子出力カプラを配置し、
前記格子出力カプラをフォトニック回路に光学的に接続する、方法。
Claims (10)
- 基板と、
前記基板の上方で懸架された傾動表面と、
前記傾動表面の傾動を選択的に制御するように構成されたアクチュエータと、
前記傾動表面によって支持された格子出力カプラと、
前記格子出力カプラをフォトニック回路の送信機及び受信機のうちの一方と接続させる導波路と、を含み、
前記導波路は、前記アクチュエータの一部上をその長さ方向に延びるように形成されている、格子出力カプラアセンブリ。 - 第2格子出力カプラをさらに含み、前記格子出力カプラは、送信素子として機能するように構成されており、前記第2格子出力カプラは、受信素子として機能するように構成されている、請求項1に記載の格子出力カプラアセンブリ。
- 前記傾動表面は、前記格子出力カプラ及び前記第2格子出力カプラの両方を支持する、請求項2に記載の格子出力カプラアセンブリ。
- さらに、
前記第2格子出力カプラを支持する第2傾動表面と、
前記第2傾動表面の傾動を選択的に制御するように構成された第2アクチュエータと、を含み、前記傾動表面の傾動は、前記第2傾動表面の傾動とは独立して調節可能である、請求項2に記載の格子出力カプラアセンブリ。 - 前記アクチュエータは、前記基板に形成されたキャビティの上方で前記傾動表面を懸架するトーションバーを含む、請求項1〜4のいずれかに記載の格子出力カプラアセンブリ。
- フォトニック回路と、
前記フォトニック回路に接続された、請求項1〜5のいずれかに記載の前記格子出力カプラアセンブリと、を含む、LIDARシステム。 - LIDARシステムを組み立てる方法であって、
傾動表面の傾動を選択的に制御するように構成されたアクチュエータを用いて、基板の上方で前記傾動表面を懸架し、
前記傾動表面上に格子出力カプラを配置し、
前記アクチュエータの一部上をその長さ方向に延びるように導波路を配置して、前記格子出力カプラをフォトニック回路に光学的に接続する、方法。 - さらに、第2傾動表面上に第2格子出力カプラを配置し、前記傾動表面の傾動および前記第2傾動表面の傾動を互いに独立して調節する、請求項7に記載の方法。
- さらに、前記傾動表面上に第2格子出力カプラを配置する、請求項7に記載の方法。
- 基板と、
前記基板の上方で懸架された傾動表面と、
前記傾動表面の傾動を選択的に制御するように構成されたアクチュエータと、
前記傾動表面によって支持されるとともに、送信素子として機能するように構成された格子出力カプラと、
受信素子として機能するように構成され第2格子出力カプラと、
前記第2格子出力カプラを支持する第2傾動表面と、
前記第2傾動表面の傾動を選択的に制御するように構成された第2アクチュエータと、を含み、
前記傾動表面の傾動は、前記第2傾動表面の傾動とは独立して調節可能である、格子出力カプラアセンブリ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/944,621 US9746611B2 (en) | 2015-11-18 | 2015-11-18 | Systems and methods for tiltable grating out-couplers |
US14/944,621 | 2015-11-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017097340A JP2017097340A (ja) | 2017-06-01 |
JP6924014B2 true JP6924014B2 (ja) | 2021-08-25 |
Family
ID=57046942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016217772A Active JP6924014B2 (ja) | 2015-11-18 | 2016-11-08 | 傾動格子出力カプラのためのシステム及び方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9746611B2 (ja) |
EP (1) | EP3171198B1 (ja) |
JP (1) | JP6924014B2 (ja) |
IL (1) | IL247061B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10788582B2 (en) * | 2018-05-11 | 2020-09-29 | Silc Technologies, Inc. | Optical sensor chip |
WO2021260950A1 (ja) * | 2020-06-26 | 2021-12-30 | 三菱電機株式会社 | 光走査デバイス及び測距装置 |
DE102021201373A1 (de) | 2021-02-12 | 2022-08-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | MEMS-aktuierte Lichtemissionseinrichtung und Verfahren zur Positionsänderung einer Lichtemissionseinrichtung |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5003550A (en) | 1990-03-09 | 1991-03-26 | Spectra Diode Laboratories, Inc. | Integrated laser-amplifier with steerable beam |
JPH05232519A (ja) | 1991-02-14 | 1993-09-10 | Ibiden Co Ltd | 光偏向素子 |
JPH10111524A (ja) | 1996-10-04 | 1998-04-28 | Minolta Co Ltd | 光偏向器及びこの光偏向器を用いた走査光学装置 |
US7382959B1 (en) | 2006-10-13 | 2008-06-03 | Hrl Laboratories, Llc | Optically oriented three-dimensional polymer microstructures |
US9086229B1 (en) | 2006-10-13 | 2015-07-21 | Hrl Laboratories, Llc | Optical components from micro-architected trusses |
US9606273B2 (en) * | 2012-01-11 | 2017-03-28 | Lumentum Operations Llc | Diffractive MEMS device |
JP5697699B2 (ja) * | 2013-03-08 | 2015-04-08 | キヤノン株式会社 | ラマン散乱計測装置およびラマン散乱計測方法 |
US10150665B2 (en) * | 2013-03-15 | 2018-12-11 | The Board Of Trustees Of The Leland Stanford Junior University | In-plane-strain-actuated out-of-plane actuator |
US9404860B2 (en) * | 2014-05-09 | 2016-08-02 | Apple Inc. | Micro-electro-mechanical system optical sensor with tilt plates |
-
2015
- 2015-11-18 US US14/944,621 patent/US9746611B2/en active Active
-
2016
- 2016-07-27 EP EP16181404.1A patent/EP3171198B1/en active Active
- 2016-08-02 IL IL247061A patent/IL247061B/en active IP Right Grant
- 2016-11-08 JP JP2016217772A patent/JP6924014B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
IL247061A0 (en) | 2016-12-29 |
IL247061B (en) | 2021-05-31 |
EP3171198A1 (en) | 2017-05-24 |
US20170139141A1 (en) | 2017-05-18 |
JP2017097340A (ja) | 2017-06-01 |
US9746611B2 (en) | 2017-08-29 |
EP3171198B1 (en) | 2020-06-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106908914B (zh) | 光子芯片光栅耦合器 | |
JP2022120032A (ja) | 多波長ライダー設計 | |
JP4789619B2 (ja) | 光学装置および光学装置を組み込んだ光学アセンブリ | |
Selvaraja et al. | Highly efficient grating coupler between optical fiber and silicon photonic circuit | |
JP6924014B2 (ja) | 傾動格子出力カプラのためのシステム及び方法 | |
JP2015118372A (ja) | 放射線カプラ | |
KR100422037B1 (ko) | 광경로 변환형 가변 광학 감쇠기 | |
GB2583174A (en) | Optical components for imaging | |
JP2007500370A (ja) | 中空導波路を組み込むモノリシック光送信及び受信装置 | |
JP2012533089A (ja) | 2次元回折格子を備える偏光ダイバーシチ回折格子カプラ | |
TW200302367A (en) | Optical circuit fabrication method and device | |
EP3575824B1 (en) | Optical system including an optical body with waveguides aligned along an imaginary curved surface for enhanced beam steering and related methods | |
CN103311790A (zh) | 一种激光束双向收发的自适应光纤耦合或准直器控制系统 | |
US20220214509A1 (en) | Beam Steering Structure with Integrated Polarization Splitter | |
JP2024522314A (ja) | マイクロレンズアレイとlidar光学スイッチアレイ | |
JP2022532113A (ja) | 偏光回転子 | |
US9964702B1 (en) | Surface-normal optical coupling interface with thermal-optic coefficient compensation | |
CN214795505U (zh) | 一种光学相控阵天线 | |
US20230213703A1 (en) | Optical coupling and mode-selective separation or superposition of optical fields | |
CN108333681B (zh) | 基于部分透射式角反射镜组的片上集成部分反射器 | |
JP5301875B2 (ja) | 可変光減衰器および可変光減衰器搭載光送受信器 | |
JP2019219459A (ja) | 平面光波回路及び光デバイス | |
CN111740786B (zh) | 一种集成光波导波束赋形装置 | |
CN115576146A (zh) | 一种光学相控阵天线 | |
US11675134B1 (en) | Optical bandpass filter based on reflective devices |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191011 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200730 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200908 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201130 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210316 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210608 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210706 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210730 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6924014 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |