JP2017097340A - 傾動格子出力カプラのためのシステム及び方法 - Google Patents
傾動格子出力カプラのためのシステム及び方法 Download PDFInfo
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
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- 238000005259 measurement Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
- G02B6/29313—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide characterised by means for controlling the position or direction of light incident to or leaving the diffractive element, e.g. for varying the wavelength response
- G02B6/29314—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide characterised by means for controlling the position or direction of light incident to or leaving the diffractive element, e.g. for varying the wavelength response by moving or modifying the diffractive element, e.g. deforming
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
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- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
Description
前記基板の上方で懸架された傾動表面と、
前記傾動表面の傾動を選択的に制御するように構成されたアクチュエータと、
前記傾動表面によって支持された格子出力カプラと、を含む、格子出力カプラアセンブリ。
前記第2格子出力カプラを支持する第2傾動表面と、
前記第2傾動表面の傾動を選択的に制御するように構成された第2アクチュエータと、を含む、付記3に記載の格子出力カプラアセンブリ。
前記フォトニック回路に接続された格子出力カプラアセンブリと、を含み、前記格子出力カプラアセンブリは、
基板と、
前記基板の上方で懸架された傾動表面と、
前記傾動表面の傾動を選択的に制御するように構成されたアクチュエータと、
前記傾動表面によって支持された格子出力カプラと、を含む、LIDARシステム。
前記第2格子出力カプラを支持する第2傾動表面と、
前記第2傾動表面の傾動を選択的に制御するように構成された第2アクチュエータと、を含む、付記11に記載のLIDARシステム。
傾動表面の傾動を選択的に制御するように構成されたアクチュエータを用いて、基板の上方に前記傾動表面を懸架し、
前記傾動表面上に格子出力カプラを配置し、
前記格子出力カプラをフォトニック回路に光学的に接続する、方法。
Claims (10)
- 基板と、
前記基板の上方で懸架された傾動表面と、
前記傾動表面の傾動を選択的に制御するように構成されたアクチュエータと、
前記傾動表面によって支持された格子出力カプラと、を含む、格子出力カプラアセンブリ。 - さらに、前記格子出力カプラをフォトニック回路の送信機及び受信機のうちの一方と接続させる導波路を含む、請求項1に記載の格子出力カプラアセンブリ。
- 第2格子出力カプラをさらに含み、前記格子出力カプラは、送信素子として機能するように構成されており、前記第2格子出力カプラは、受信素子として機能するように構成されている、請求項1又は2に記載の格子出力カプラアセンブリ。
- 前記傾動表面は、前記格子出力カプラ及び前記第2格子出力カプラの両方を支持する、請求項3に記載の格子出力カプラアセンブリ。
- さらに、
前記第2格子出力カプラを支持する第2傾動表面と、
前記第2傾動表面の傾動を選択的に制御するように構成された第2アクチュエータと、を含み、前記傾動表面の傾動は、前記第2傾動表面の傾動とは独立して調節可能である、請求項3に記載の格子出力カプラアセンブリ。 - 前記アクチュエータは、前記基板に形成されたキャビティの上方で前記傾動表面を懸架するトーションバーを含む、請求項1〜5のいずれかに記載の格子出力カプラアセンブリ。
- フォトニック回路と、
前記フォトニック回路に接続された、請求項1〜6のいずれかに記載の前記格子出力カプラアセンブリと、を含む、LIDARシステム。 - LIDARシステムを組み立てる方法であって、
傾動表面の傾動を選択的に制御するように構成されたアクチュエータを用いて、基板の上方で前記傾動表面を懸架し、
前記傾動表面上に格子出力カプラを配置し、
前記格子出力カプラをフォトニック回路に光学的に接続する、方法。 - さらに、第2傾動表面上に第2格子出力カプラを配置し、前記傾動表面の傾動および前記第2傾動表面の傾動を互いに独立して調節する、請求項8に記載の方法。
- さらに、前記傾動表面上に第2格子出力カプラを配置する、請求項8に記載の方法。
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US14/944,621 US9746611B2 (en) | 2015-11-18 | 2015-11-18 | Systems and methods for tiltable grating out-couplers |
US14/944,621 | 2015-11-18 |
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JP2017097340A true JP2017097340A (ja) | 2017-06-01 |
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US (1) | US9746611B2 (ja) |
EP (1) | EP3171198B1 (ja) |
JP (1) | JP6924014B2 (ja) |
IL (1) | IL247061B (ja) |
Cited By (2)
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JP2021523386A (ja) * | 2018-05-11 | 2021-09-02 | シルク テクノロジーズ インコーポレイティッド | 光センサチップ |
JPWO2021260950A1 (ja) * | 2020-06-26 | 2021-12-30 |
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DE102021201373A1 (de) | 2021-02-12 | 2022-08-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | MEMS-aktuierte Lichtemissionseinrichtung und Verfahren zur Positionsänderung einer Lichtemissionseinrichtung |
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US5003550A (en) | 1990-03-09 | 1991-03-26 | Spectra Diode Laboratories, Inc. | Integrated laser-amplifier with steerable beam |
JPH05232519A (ja) | 1991-02-14 | 1993-09-10 | Ibiden Co Ltd | 光偏向素子 |
JPH10111524A (ja) | 1996-10-04 | 1998-04-28 | Minolta Co Ltd | 光偏向器及びこの光偏向器を用いた走査光学装置 |
US9086229B1 (en) | 2006-10-13 | 2015-07-21 | Hrl Laboratories, Llc | Optical components from micro-architected trusses |
US7382959B1 (en) | 2006-10-13 | 2008-06-03 | Hrl Laboratories, Llc | Optically oriented three-dimensional polymer microstructures |
US9606273B2 (en) * | 2012-01-11 | 2017-03-28 | Lumentum Operations Llc | Diffractive MEMS device |
JP5697699B2 (ja) * | 2013-03-08 | 2015-04-08 | キヤノン株式会社 | ラマン散乱計測装置およびラマン散乱計測方法 |
US10150665B2 (en) * | 2013-03-15 | 2018-12-11 | The Board Of Trustees Of The Leland Stanford Junior University | In-plane-strain-actuated out-of-plane actuator |
US9404860B2 (en) * | 2014-05-09 | 2016-08-02 | Apple Inc. | Micro-electro-mechanical system optical sensor with tilt plates |
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2015
- 2015-11-18 US US14/944,621 patent/US9746611B2/en active Active
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- 2016-07-27 EP EP16181404.1A patent/EP3171198B1/en active Active
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JP2021523386A (ja) * | 2018-05-11 | 2021-09-02 | シルク テクノロジーズ インコーポレイティッド | 光センサチップ |
JPWO2021260950A1 (ja) * | 2020-06-26 | 2021-12-30 | ||
JP7109673B2 (ja) | 2020-06-26 | 2022-07-29 | 三菱電機株式会社 | 光走査デバイス及び測距装置 |
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JP6924014B2 (ja) | 2021-08-25 |
EP3171198A1 (en) | 2017-05-24 |
US20170139141A1 (en) | 2017-05-18 |
IL247061B (en) | 2021-05-31 |
IL247061A0 (en) | 2016-12-29 |
US9746611B2 (en) | 2017-08-29 |
EP3171198B1 (en) | 2020-06-10 |
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