JP6920244B2 - プラズマ処理方法 - Google Patents
プラズマ処理方法 Download PDFInfo
- Publication number
- JP6920244B2 JP6920244B2 JP2018082128A JP2018082128A JP6920244B2 JP 6920244 B2 JP6920244 B2 JP 6920244B2 JP 2018082128 A JP2018082128 A JP 2018082128A JP 2018082128 A JP2018082128 A JP 2018082128A JP 6920244 B2 JP6920244 B2 JP 6920244B2
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- Prior art keywords
- focus ring
- organic film
- plasma processing
- formula
- organic compound
- Prior art date
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- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
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Description
FOF_L=FOF_CUR−TP(i−1)×EP_OF(P(i−1)) …(1)
なお、プラズマ処理P(i−1)は、(i−1)回目に実行された工程STP(i−1)のプラズマ処理である。
TREM=FOF_L/EREM_OF×M …(2)
(2)式において、EREM_OFは、工程ST3のプラズマエッチングにおける有機膜OFのエッチングレートであり、制御部80の記憶装置に登録されている。(2)式において、Mは、制御部80の記憶装置に登録されている数値であり、1より大きい。したがって、実行時間長TREMは、以下の(3)式で定義されるオーバーエッチングの時間長TOEを含む。
TOE=FOF_L/EREM_OF×(M−1) …(3)
DCUR=TFR_ETCH×EP_FR(P(i−1))+TOE×EOE_FR …(4)
TFR_ETCH=TP(i−1)−FOF_CUR/EP_OF(P(i−1)) …(5)
DACM=DACM+DCUR …(6)
CT=DACM−UACM …(7)
(7)式において、UACMは、フォーカスリングFRが初期の位置に対して既に上昇している量(距離)の積算量である。
UACM=UACM+UCUR …(8)
しかる後に、工程ST11が実行される。
FT=CT−UCUR …(9)
Claims (9)
- フォーカスリングが基板のエッジを囲むように支持台上に配置された状態でプラズマ処理装置によって行われるプラズマ処理方法であって、該プラズマ処理装置は、チャンバと、該チャンバ内に設けられ、その上に載置される前記基板を支持するように構成された前記支持台と、を備え、
該方法は、
鉛直方向における前記フォーカスリングの上面の位置と基準位置との間の差を算出して、該差を減少させるよう、前記フォーカスリング上に有機膜を形成する工程であり、該基準位置は、前記基板の全体にわたって、イオンが垂直に入射するように予め定められた位置である、該工程と、
前記有機膜の形成後に前記基板に対してプラズマ処理を実行する工程と、
を含み、
有機膜を形成する前記工程では、第1の有機化合物を含む第1のガス及び第2の有機化合物を含む第2のガスが前記チャンバ内に供給され、
前記有機膜は、前記第1の有機化合物と前記第2の有機化合物の重合により形成される、
プラズマ処理方法。 - 有機膜を形成する前記工程とプラズマ処理を実行する前記工程が繰り返し実行される、請求項1に記載のプラズマ処理方法。
- 前記フォーカスリング内にはヒータが設けられており、
有機膜を形成する前記工程において前記フォーカスリング上で選択的に重合が生じるように、前記ヒータによって前記フォーカスリングが加熱される、
請求項1又は2に記載のプラズマ処理方法。 - フォーカスリングが基板のエッジを囲むように支持台上に配置された状態でプラズマ処理装置によって行われるプラズマ処理方法であって、該プラズマ処理装置は、チャンバと、該チャンバ内に設けられ、その上に載置される前記基板を支持するように構成された前記支持台と、を備え、
該方法は、
鉛直方向における前記フォーカスリングの上面の位置と基準位置との間の差を算出して、該差を減少させるよう、前記フォーカスリング上に有機膜を形成する工程であり、該基準位置は、前記基板の全体にわたって、イオンが垂直に入射するように予め定められた位置である、該工程と、
前記有機膜の形成後に前記基板に対してプラズマ処理を実行する工程と、
を含み、
前記プラズマ処理装置は、前記フォーカスリングを上昇させるように構成された駆動機構を更に備え、
該プラズマ処理方法は、前記差を反映する目標補正量が前記駆動機構による前記フォーカスリングの最小移動制御量以上である場合に、前記駆動機構を用いて、前記目標補正量以下の最大の移動量で前記フォーカスリングを上昇させる工程を更に含み、
有機膜を形成する前記工程では、前記目標補正量から前記最大の移動量を差し引いた量を減少させるように、前記有機膜が形成される、
プラズマ処理方法。 - 有機膜を形成する前記工程とプラズマ処理を実行する前記工程が繰り返し実行される、請求項4に記載のプラズマ処理方法。
- 有機膜を形成する前記工程では、第1の有機化合物を含む第1のガス及び第2の有機化合物を含む第2のガスが前記チャンバ内に供給され、
前記有機膜は、前記第1の有機化合物と前記第2の有機化合物の重合により形成される、
請求項4又は5に記載のプラズマ処理方法。 - 前記フォーカスリング内にはヒータが設けられており、
有機膜を形成する前記工程において前記フォーカスリング上で選択的に重合が生じるように、前記ヒータによって前記フォーカスリングが加熱される、
請求項4〜6の何れか一項に記載のプラズマ処理方法。 - 前記フォーカスリング上に有機膜を形成する前記工程において、前記フォーカスリングの温度が、0℃以上、150℃以下の温度に設定される、請求項1〜3、6、及び7の何れか一項に記載の方法。
- 前記第1の有機化合物は、イソシアネート又はカルボン酸であり、前記第2の有機化合物は、アミン又は水酸基を有する化合物である、請求項1〜3及び6の何れか一項に記載の方法。
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