JP6897398B2 - 三次元形状測定装置、ロボットシステム、及び三次元形状測定方法 - Google Patents

三次元形状測定装置、ロボットシステム、及び三次元形状測定方法 Download PDF

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Publication number
JP6897398B2
JP6897398B2 JP2017147587A JP2017147587A JP6897398B2 JP 6897398 B2 JP6897398 B2 JP 6897398B2 JP 2017147587 A JP2017147587 A JP 2017147587A JP 2017147587 A JP2017147587 A JP 2017147587A JP 6897398 B2 JP6897398 B2 JP 6897398B2
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Japan
Prior art keywords
phase pattern
pattern image
dimensional shape
phase
image
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JP2017147587A
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Japanese (ja)
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JP2019027921A (ja
JP2019027921A5 (enExample
Inventor
健太郎 塚本
健太郎 塚本
智紀 原田
智紀 原田
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2017147587A priority Critical patent/JP6897398B2/ja
Priority to CN201810835367.3A priority patent/CN109323668B/zh
Priority to US16/048,421 priority patent/US11118902B2/en
Publication of JP2019027921A publication Critical patent/JP2019027921A/ja
Publication of JP2019027921A5 publication Critical patent/JP2019027921A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/55—Depth or shape recovery from multiple images
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10016—Video; Image sequence
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10141—Special mode during image acquisition
    • G06T2207/10152—Varying illumination
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/695—Control of camera direction for changing a field of view, e.g. pan, tilt or based on tracking of objects

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Human Computer Interaction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Manipulator (AREA)
  • Image Analysis (AREA)
JP2017147587A 2017-07-31 2017-07-31 三次元形状測定装置、ロボットシステム、及び三次元形状測定方法 Active JP6897398B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017147587A JP6897398B2 (ja) 2017-07-31 2017-07-31 三次元形状測定装置、ロボットシステム、及び三次元形状測定方法
CN201810835367.3A CN109323668B (zh) 2017-07-31 2018-07-26 三维形状测定装置、机器人系统以及三维形状测定方法
US16/048,421 US11118902B2 (en) 2017-07-31 2018-07-30 Three-dimensional shape measurement device, robot system, and three-dimensional shape measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017147587A JP6897398B2 (ja) 2017-07-31 2017-07-31 三次元形状測定装置、ロボットシステム、及び三次元形状測定方法

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JP2019027921A JP2019027921A (ja) 2019-02-21
JP2019027921A5 JP2019027921A5 (enExample) 2020-08-27
JP6897398B2 true JP6897398B2 (ja) 2021-06-30

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US (1) US11118902B2 (enExample)
JP (1) JP6897398B2 (enExample)
CN (1) CN109323668B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018129766A1 (de) * 2018-11-26 2020-05-28 Gom Gmbh Vorrichtung und Verfahren für die Vermessung von Objekten
JP7424477B2 (ja) * 2020-05-12 2024-01-30 日本電信電話株式会社 ３次元計測システム
DE102022204922A1 (de) * 2022-05-18 2023-11-23 MICRO-EPSILON-MESSTECHNIK GmbH & Co. K.G. Vorrichtung und Verfahren zur messtechnischen Erfassung von Eigenschaften von Messobjekten

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JP2878409B2 (ja) * 1989-09-04 1999-04-05 株式会社リコー ３次元物体撮像方式
JP3358584B2 (ja) * 1999-03-30 2002-12-24 ミノルタ株式会社 ３次元情報入力カメラ
JP2009031150A (ja) * 2007-07-27 2009-02-12 Omron Corp 三次元形状計測装置、三次元形状計測方法、三次元形状計測プログラム、および記録媒体
EP2286368B1 (en) * 2008-05-06 2013-09-04 Flashscan3d, Llc System and method for structured light illumination with frame subwindows
JP4715944B2 (ja) * 2009-04-03 2011-07-06 オムロン株式会社 三次元形状計測装置、三次元形状計測方法、および三次元形状計測プログラム
JP2012093235A (ja) * 2010-10-27 2012-05-17 Nikon Corp 三次元形状測定装置、三次元形状測定方法、構造物の製造方法および構造物製造システム
US9124873B2 (en) * 2010-12-08 2015-09-01 Cognex Corporation System and method for finding correspondence between cameras in a three-dimensional vision system
JP5683002B2 (ja) * 2011-02-01 2015-03-11 Ｊｕｋｉオートメーションシステムズ株式会社 ３次元測定装置、３次元測定方法及びプログラム
JP5430612B2 (ja) * 2011-05-31 2014-03-05 Ｃｋｄ株式会社 三次元計測装置
JP5864950B2 (ja) * 2011-08-15 2016-02-17 キヤノン株式会社 三次元計測装置、三次元計測方法およびプログラム
WO2013136620A1 (ja) * 2012-03-14 2013-09-19 独立行政法人産業技術総合研究所 高次元輝度情報を用いた縞画像の位相分布解析方法、装置およびそのプログラム
JP6078984B2 (ja) * 2012-05-23 2017-02-15 富士通株式会社 処理装置，処理方法，処理プログラム及び管理装置
JP5971050B2 (ja) 2012-09-18 2016-08-17 富士通株式会社 形状計測装置及び形状計測方法
WO2015105360A1 (ko) * 2014-01-10 2015-07-16 주식회사 고영테크놀러지 3차원 형상측정장치 및 방법
JP2015203588A (ja) * 2014-04-11 2015-11-16 株式会社ニコン 検出装置、検出方法、形状測定装置、形状測定方法、構造物製造システム、構造物製造方法、及び形状測定プログラム
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KR101784276B1 (ko) * 2015-02-27 2017-10-12 주식회사 고영테크놀러지 기판 검사 방법 및 시스템
CN104697469B (zh) * 2015-03-30 2017-11-10 四川大学 利用谐波幅值判定饱和的高动态三维测量方法
EP3101383A1 (en) * 2015-06-01 2016-12-07 Canon Kabushiki Kaisha Shape measurement apparatus, shape calculation method, system, and method of manufacturing an article
JP2017110991A (ja) * 2015-12-16 2017-06-22 セイコーエプソン株式会社 計測システム、計測方法、ロボット制御方法、ロボット、ロボットシステムおよびピッキング装置
US10531064B2 (en) * 2016-04-15 2020-01-07 Canon Kabushiki Kaisha Shape reconstruction using electronic light diffusing layers (E-Glass)
JP6691837B2 (ja) * 2016-06-27 2020-05-13 株式会社キーエンス 測定装置
EP3489621A4 (en) * 2016-09-27 2020-04-08 National Institute of Advanced Industrial Science and Technology DEVICE AND METHOD FOR MEASURING THREE-DIMENSIONAL SHAPE, MOVEMENT AND CONSTRAINT USING A PERIODIC PATTERN, AND PROGRAM THEREOF

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Publication number Publication date
US20190033065A1 (en) 2019-01-31
CN109323668B (zh) 2022-01-11
JP2019027921A (ja) 2019-02-21
CN109323668A (zh) 2019-02-12
US11118902B2 (en) 2021-09-14

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