JP6890797B2 - 測定装置、光学式センサ、測定方法及びプログラム - Google Patents

測定装置、光学式センサ、測定方法及びプログラム Download PDF

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Publication number
JP6890797B2
JP6890797B2 JP2016254494A JP2016254494A JP6890797B2 JP 6890797 B2 JP6890797 B2 JP 6890797B2 JP 2016254494 A JP2016254494 A JP 2016254494A JP 2016254494 A JP2016254494 A JP 2016254494A JP 6890797 B2 JP6890797 B2 JP 6890797B2
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light
optical path
light receiving
receiving unit
measuring
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Japanese (ja)
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JP2018105796A (ja
JP2018105796A5 (enExample
Inventor
真幸 丸山
真幸 丸山
和田　智之
智之 和田
徳人 斎藤
徳人 斎藤
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RIKEN
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RIKEN
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Priority to PCT/JP2017/046484 priority patent/WO2018123992A1/ja
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Publication of JP2018105796A5 publication Critical patent/JP2018105796A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP2016254494A 2016-12-27 2016-12-27 測定装置、光学式センサ、測定方法及びプログラム Active JP6890797B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016254494A JP6890797B2 (ja) 2016-12-27 2016-12-27 測定装置、光学式センサ、測定方法及びプログラム
PCT/JP2017/046484 WO2018123992A1 (ja) 2016-12-27 2017-12-25 測定装置、光学式センサ、測定方法及びプログラム

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JP2016254494A JP6890797B2 (ja) 2016-12-27 2016-12-27 測定装置、光学式センサ、測定方法及びプログラム

Publications (3)

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JP2018105796A JP2018105796A (ja) 2018-07-05
JP2018105796A5 JP2018105796A5 (enExample) 2020-01-23
JP6890797B2 true JP6890797B2 (ja) 2021-06-18

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JP (1) JP6890797B2 (enExample)
WO (1) WO2018123992A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12215968B2 (en) 2020-05-19 2025-02-04 Nippon Telegraph And Telephone Corporation Angle measurement device and method
EP4517255B1 (de) * 2023-08-30 2025-06-04 Sick Ag Aufnahme von 3d-bilddaten mit einem lichtschnittverfahren

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0452619A (ja) * 1990-06-20 1992-02-20 Fujitsu Ltd 光学走査方法およびその装置
US5032023A (en) * 1990-07-02 1991-07-16 General Electric Company Optical fiber based sensor for a variable depth range camera
JPH0566116A (ja) * 1991-09-09 1993-03-19 Sumitomo Electric Ind Ltd 三次元位置測定装置
JP3162749B2 (ja) * 1991-09-10 2001-05-08 株式会社アマダ 溶接線検出装置
US9068952B2 (en) * 2009-09-02 2015-06-30 Kla-Tencor Corporation Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system

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JP2018105796A (ja) 2018-07-05
WO2018123992A1 (ja) 2018-07-05

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