JP6875675B2 - On-board trueing equipment and machine tools - Google Patents

Description

The present invention relates to an on-machine truing dressing device and a machine tool, and more particularly to a truing device for truing a tool on a machine tool by electric machining, and a machine tool provided with the truing device.

A dicing device has been proposed as a machine tool for cutting or grooving a workpiece made of a brittle material such as a silicon wafer or a glass substrate.

The dicing device has a form in which a disk-shaped (ring-shaped) blade is attached to a rotating spindle (rotating shaft), and the work is cut by cutting and feeding the outer peripheral portion of the blade relative to the work. Alternatively, the work is configured to be grooved.

By the way, such a dicing device is mainly used for cutting and grooving semiconductor wafers, but with the recent miniaturization and high integration of semiconductor devices, blades capable of high-precision machining of workpieces are possible. And the provision of dicing equipment is required.

In order to realize such high-precision processing, the applicants have proposed a blade using a sintered diamond (PCD: Poly Crystalline Diamond) formed by sintering a minute diamond on the outer peripheral portion (PCD: Poly Crystalline Diamond). For example, see Patent Document 1).

International Publication No. 2013/161849

A dicing device that employs a blade whose outer circumference is made of sintered diamond can achieve higher precision machining than a dicing device that employs a conventional blade (for example, a blade with a diamond chip embedded in the outer circumference). is there.

However, a dicing apparatus that employs a blade whose outer peripheral portion is made of sintered diamond also has the following problems, and improvement thereof has been desired.

That is, the disk-shaped blade has an advantage that it can be machined efficiently because the entire circumference of the outer peripheral portion acts as a cutting blade, and the blade life (blade replacement cycle) is long and economical. If the machine tool is not accurately attached to the spindle (if there is an error in the attachment of the blade), there is a problem that the machining efficiency is lowered, the life of the blade is shortened, and the machining accuracy is lowered.

Specifically, for example, if the mounting position of the blade deviates in the radial direction of the spindle, the blade swings in the radial direction with the rotation of the spindle, so-called center shake occurs. When such core deviation occurs, only a part of the outer peripheral portion functions as a cutting edge, which is inefficient, causes partial wear, shortens the life of the blade, and further. , There is a problem that the processing accuracy is lowered due to partial wear.

It should be noted that such a defect associated with the attachment of the blade (tool) occurs not only in the above-mentioned core deviation but also when the blade swings in the axial direction of the spindle. Further, the same problem may occur not only in a dicing device but also in other machine tools such as a grinding machine, a milling machine, and a machining center as long as the machine tool is of a type in which a tool is mounted on a rotating spindle.

The present invention has been made in view of such problems, and an object of the present invention is to provide a versatile on-board truing device without being affected by tool mounting accuracy. The purpose is to provide a machine tool capable of high-precision machining.

In order to achieve the above object, the on-machine truing device according to claim 1 of the present invention is an on-machine truing device for truing a tool attached to a rotating shaft of a machine tool on the machine tool. It is equipped with a control unit that controls the relative distance between the tool and the trueing electrode based on the number of discharges that change with the rotation of the tool, and the outer peripheral surface of the tool becomes annular during discharge machining while rotating the tool. so as to be molded, a truing mechanism for correcting the mounting error of the tool, the shape measurement mechanism for measuring the shape of the tool, by changing the position of the truing mechanism and the shape measurement mechanism, these mechanisms The shape measuring mechanism has a position control mechanism for controlling the relative distance between the tool and the tool, and the shape measuring mechanism rotates the contour shape of the tool when the tool is stationary and the tool in rotation without contact with the tool. It is characterized by being provided with a shape measuring means capable of measuring the shape including the rotational runout of the tool in the state of being in the state.

The on- board truing device according to claim 2 is the on-board truing device according to claim 1 , wherein the truing mechanism includes an insulating means for electrically insulating from the machine tool. And.

The on- machine truing device according to claim 3 is the on-machine truing device according to claim 1 or 2 , wherein the truing mechanism supplies a processing medium between the tool and the electrode for truing. It is characterized by having means.

The on- board truing device according to claim 4 is the on-board truing device according to any one of claims 1 to 3 , wherein the shape measuring mechanism provides a protective means for preventing foreign matter from adhering to the shape measuring means. It is characterized by having.

The on- board truing device according to claim 5 is the on-board truing device according to any one of claims 1 to 4 , wherein the position control mechanism is relative to the truing mechanism, the shape measuring mechanism, and the tool. It is characterized by being provided with a distance measuring means for measuring a distance.

The on- board truing device according to claim 6 is the on-board truing device according to any one of claims 1 to 5 , characterized in that it includes means for attaching and detaching to and from the machine tool.

The machine tool according to claim 7, as a truing apparatus of the tool, the machine truing device according to any one of claims 1 to 6, characterized in that it is fitted.

According to the present invention, in addition to the truing mechanism for truing the shape of the tool, the on-machine truing device is provided with a shape measuring mechanism for measuring the shape of the tool and a position control mechanism for changing the position of these mechanisms. Therefore, it is possible to perform tool truing without coordinating with the machine tool side in terms of control. Therefore, it is possible to provide a highly versatile on-machine truing device, and it is possible to realize high-precision machining in various machine tools without being affected by the tool mounting accuracy.

In particular, in a dicing device that employs a blade made of sintered diamond, a slight mounting error of the blade causes a significant decrease in processing accuracy. The error can be easily and timely corrected on the user side, making it easier to maximize the benefits of the sintered diamond blade. In other words, by applying truing in a timely manner, the continuous cutting edge spacing and protrusion height can be made uniform over the entire circumference of the blade, so that high-hardness materials such as silicon carbide (SiC) can be made uniform without breaking. It is possible to process in ductility mode.

It is explanatory drawing which shows an example of the schematic structure of the on-board truing device which concerns on this invention. It is explanatory drawing which shows typically an example of the power feeding means to a blade in the on-the-machine truing device. It is explanatory drawing which shows typically the modification example of the tool which performs truing by the truing device on the machine, and the truing electrode. It is explanatory drawing which shows typically the tool which performs truing by the truing device on the machine, and other modification examples of the truing electrode. It is explanatory drawing which arbitrarily showed the tool which performs truing by the truing device on the machine, and other modification examples of the truing electrode.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
Embodiment 1
FIG. 1 shows a schematic configuration of the on-board truing device 1 according to the present invention. The on-machine truing device 1 is a device for truing (creating a shape) a tool on a machine tool, and in the present embodiment, it is applied to a dicing device 100 provided with a disk-shaped blade 101 as a tool, and the blade 101 is applied. An on-board truing device for dicing the outer peripheral surface 101a of the above is shown.

The on-board truing device 1 controls a truing mechanism 2 for truing the blade 101, a shape measuring mechanism 3 for measuring the shape of the blade 101, and a relative distance between the truing mechanism 2 and the shape measuring mechanism 3 and the blade 101. The position control mechanism 4 and the control unit 5 that controls the entire device are provided as main parts, and the processing medium supply means 6 that supplies the processing medium between the blade 101 and the trueing electrode 21 described later, and the electric power to each part of the device. It is configured to include a power supply unit 7 for supplying the above.

More specifically, the position control mechanism 4 is configured to include a stage (for example, a 3-axis stage) 41 that can move in the front-back, left-right, and up-down directions, and the trueing mechanism 2 and the shape measurement mechanism are mounted on the stage 41. It is said that 3 is placed in the form. Then, by moving (changing the position) the stage 41 under the control of the control unit 5, the truing mechanism 2 and the shape measuring mechanism 3 can be selectively arranged in the vicinity of the blade 101 (in the illustrated example, directly below the blade 101). It is configured as follows. That is, when performing truing, the truing mechanism 2 is moved to a truing position (see FIG. 1) arranged in the vicinity of the blade 101, while when performing shape measurement of the blade 101, the shape measurement mechanism 3 is moved. It is configured to move to a shape measurement position (see the position indicated by the alternate long and short dash line in FIG. 1) arranged in the vicinity of the blade 101.

The truing mechanism 2 is a mechanism for truing the shape of the outer peripheral surface 101a of the blade 101 by electric discharge machining, and is configured to face the outer peripheral surface 101a of the blade 101, and a feeding electrode 21 for supplying power to the blade 101. The means 22 and the cut amount control means 23 for controlling the cut amount at the time of growing are configured as main parts.

The truing electrode 21 is composed of a metal electrode having a discharge surface 21a having a shape corresponding to the truing finish shape of the outer peripheral surface 101a of the blade 101. Here, since the finished shape of the outer peripheral surface 101a of the blade 101 is an annular shape having a predetermined width dimension (appropriately set according to the processing purpose, for example, a width dimension of about 50 μm), this embodiment. The trueing electrode 21 shown in FIG. 21 is composed of an electrode (specifically, a plate-shaped electrode) whose discharge surface 21a forms a flat surface. That is, by forming the discharge surface 21a on a flat surface, the outer peripheral surface 101a of the blade 101 is formed in an annular shape by truing while rotating the blade 101 (details will be described later).

Then, as shown in FIG. 1, the truing electrode 21 is configured such that the cutting amount at the time of truing can be controlled by the cutting amount controlling means 23. Specifically, in the cutting amount control means 23, the base end portion is fixed to the stage 41 via the insulating member 24, and the tip end portion is fixed to the back surface (discharge surface 21a) of the trueing electrode 21 via the cover member 25. It is composed of a piezo actuator 26 fixed to the opposite surface), and the piezo actuator 26 is controlled by the control unit 5 to bring the truing electrode 21 closer to the outer peripheral surface 101a of the blade 101 in the vertical direction (that is, to approach the relative distance to the outer peripheral surface 101a of the blade 101).・ It is configured to be movable in the direction of separation).

As is well known, the piezo actuator 26 is a piezoelectric element to which the piezo piezoelectric effect is applied, and is suitable for an on-board truing device because it can be accurately positioned in a compact size. In the present embodiment, the piezo actuator 26 is used as the depth of cut control means 23 by utilizing such characteristics. However, if highly accurate positioning of the trueing electrode 21 is possible, a positioning means other than the piezo actuator 26 Can also be used as the cutting amount control means 23. Further, if the position control mechanism 4 can position the truing electrode 21 with high accuracy, the piezo actuator 26 may be omitted. The drive power supply for the piezo actuator 26 is supplied from the actuator drive circuit 72 of the power supply unit 7.

The insulating member 24 is an insulating means provided for electrically insulating the trueing electrode 21 and the dicing device 100. In the present embodiment, the insulating member 24 is formed in a box shape having an open upper portion, and the bottom portion thereof is formed. It is fixed on the stage 41. The piezo actuator 26 described above is housed in the insulating member 24. Specifically, the base end portion of the piezo actuator 26 is fixed to the bottom surface of the insulating member 24. The insulating member 24 is made of a known insulating material such as plastic or ceramics.

The cover member 25 is a member that prevents the processing medium (particularly the liquid processing medium) supplied from the processing medium supply means 6 from being applied to the piezo actuator 26 and constitutes a base for attaching the trueing electrode 21. In the present embodiment, the insulating member 24 is composed of a member having a shape that allows play on the outside of the opening (in the illustrated example, a box shape with an opening at the bottom).

Then, the trueing electrode 21 is interchangeably fixed on the upper surface of the cover member 25. In the illustrated example, the truing electrode 21 is configured to be fixed to the cover member 25 by the screw 8. Further, the tip portion of the piezo actuator 26 is detachably fixed to the inner bottom surface of the cover member 25 (the ceiling surface covering the opening of the insulating member 24). In the illustrated example, the tip of the piezo actuator 26 is configured to be fixed to the cover member 25 by the screw 9.

Thus, the cover member 25 configured in this way brings the truing electrode 21 closer to the blade 101 as the piezo actuator 26 moves forward (extension operation), while the truing electrode 21 approaches the blade 101 as the piezo actuator 26 moves backward (shortening operation). It operates so as to separate the electrode 21 from the blade 101.

Further, in the cover member 25, the truing electrode 21 and the power supply unit 7 (specifically, the discharge power supply unit 71) are also connected. That is, at the mounting position of the trueing electrode 21, a power feeding pin 10 that penetrates the cover member 25 and can come into contact with the trueing electrode 21 is provided, and the power feeding pin 10 is connected to the discharge power supply unit 71. Since the energization of the truing electrode 21 is performed via the cover member 25 in this way, it is preferable that the cover member 25 is also made of an insulator.

As shown in FIG. 2, the power feeding means 22 to the blade 101 includes a feeding brush 11 and a coupler 12 that receives power from the feeding brush 11 as a main part as a part of the growing mechanism.

The power supply brush 11 is connected to the discharge power supply unit 71 of the power supply unit 7, and is configured to supply the electric power supplied from the discharge power supply 71 to the coupler 12. The coupler 12 rotates at high speed together with the spindle 102 of the dicing device 100 as described later, and the power supply brush 11 is configured to maintain electrical contact (energized state) with the coupler 12 during this rotation. ing.

The coupler 12 is provided with a spindle mounting portion 13 that can be mounted on the tip of the spindle 102 of the dicing device 100 at its base end, and a tool mounting portion 14 on which the blade 101 can be mounted is provided at the tip. There is.

The specific shapes of the spindle mounting portion 13 and the tool mounting portion 14 are appropriately set according to the shape of the spindle of the machine tool to which the coupler 12 is mounted and the shape of the tool. It is in the form of a fitting hole that can be engaged with the tapered shank portion 102a provided at the tip of the spindle 102. Further, the tool mounting portion 14 is in the form of a taper shank having the same shape as the taper shank portion 102a of the spindle 102. Then, as shown in FIG. 2, the coupler 12 is mounted on the tip of the spindle 102, and the blade 101 is mounted on the tool mounting portion 14 of the coupler 12. The attachment of the coupler 12 to the spindle 102 and the attachment of the blade 101 to the coupler 12 are both removable, that is, the coupler 12 and the blade 101 are both interchangeable.

Further, as shown in FIG. 2, the coupler 12 has a double structure consisting of an outer member 15 forming a tip portion and an outer peripheral portion and an inner member 16 forming a central portion (main shaft mounting portion 13) of the base end portion. Has been done. Specifically, the outer member 15 is made of a conductor such as metal. This is because, as shown in FIG. 2, the power supply brush 11 is brought into contact with the outer peripheral portion of the coupler 12 so that the electric power for discharge is supplied to the blade 101. On the other hand, the inner member 16 is made of an insulator. This is to prevent the electric power for discharge supplied to the coupler 12 via the feeding brush 11 from being supplied to the dicing device 100 through the spindle 102, and the insulator (internal member 16) on the coupler 12 side and the truing mechanism. The insulating member on the second side serves as an insulating means, and the on-board truing device 1 and the dicing device 100 are electrically insulated.

In the present embodiment, the blade 101 is attached to the coupler 12 and the coupler 12 is attached to the spindle 102 by a connecting bolt 17 penetrating them, as shown in FIG. As a result, the blade 101 can rotate together with the spindle 102. The connecting bolt 17 is made of an insulator to prevent the main shaft 102 from being energized via the bolt 17.

The shape measuring mechanism 3 is a mechanism for measuring the shape of the blade 101 (specifically, the shape of the outer peripheral surface 101a of the blade 101) by a non-contact method, and in the present embodiment, the shape measuring mechanism 3 is used. A capacitance sensor 31 is used as the shape measuring means, and the measurement result of the sensor 31 is configured to be input to the control unit 5.

Here, the shape of the blade 101 to be measured by the shape measuring mechanism 3 is not only the shape when the blade 101 is stationary (contour shape) but also the shape when the blade 101 is rotated, that is, the blade. The shape (rotational locus of the blade 101) including the rotational runout (blur) when the 101 is rotated is also included. As will be described later, the rotational runout is measured by measuring the state of the blade 101 with the capacitance sensor 31 while rotating the blade 101, and the control unit 5 analyzes the state of the rotational runout. In measuring the rotational runout, it is preferable to perform the measurement in a state where the blade 101 is rotated at the same rotation speed as during machining.

In the present embodiment, the case where the capacitance sensor 31 is used as the shape measurement mechanism 3 is shown, but if the shape measurement (including rotational runout) of the blade 101 is possible, the capacitance sensor 31 is used. Alternatively, other sensors such as a laser displacement meter and a CCD camera can be used, or these can be used in combination.

Further, although the sensors constituting the shape measuring mechanism 3 are not shown in particular, foreign matter such as a processing medium may have a shape such as being housed in a protective case having an opening / closing door that opens at the time of shape measurement or having an air curtain. It is preferable to provide a protective means for preventing the measuring means from adhering to the measuring means.

As described above, the position control mechanism 4 includes the stage 41. The stage 41 is provided on the stage base 42, and is configured to be movable in the front-rear, left-right, and up-down directions on the base 42. The upper surface of the stage 41 is a flat surface as shown in FIG. 1, and the trueing mechanism 3 and the shape measuring mechanism 4 are placed and fixed on the stage 41.

The position control mechanism 4 is further provided with a distance measuring means (not shown) for measuring the relative distance between the truing mechanism 2 and the shape measuring mechanism 3 and the blade 101. This distance measuring means measures the relative distance between the discharge surface 21a of the trueing electrode 21 and the outer peripheral surface 101a of the blade 101 and the relative distance between the capacitance sensor 31 and the outer peripheral surface 101a of the blade 101, and this distance measurement is performed. The information obtained by the means is also configured to be supplied to the control unit 5. The distance measuring means has the same configuration as the shape measuring means, that is, sensors that measure the relative distance by a non-contact method (for example, a capacitance sensor, a laser displacement meter, and an image sensor such as a CCD camera). Etc.) are used. Further, it is preferable to provide a protective means for preventing the adhesion of foreign matter to the distance measuring means as well.

The stage base 42 constitutes the base of the stage 41, and is provided with a mounting mechanism (not shown) for mounting the on-board truing device 1 on the dicing device 100. It is preferable that this mounting mechanism has a structure in which the on-board turwing device 1 is detachably mounted on the dicing device 100. For example, a mechanism for gripping a specific portion of the dicing device 100, a mechanism for fitting with a convex portion or a concave portion provided in the dicing device 100, or the like is preferably adopted. Further, it is preferable that these mounting mechanisms are configured so as to fix the on-board truing device 1 to the dicing device 100 and to position the on-board truing device 1. It should be noted that this mounting mechanism is not intended for mounting on a specific machine tool, and it is desirable that the mounting mechanism is a versatile mounting mechanism that can be applied to an unspecified machine tool.

The control unit 5 is composed of a control device that controls the entire on-board truing device 1. The control unit 5 is configured to include a microcomputer, and calculates the depth of cut of the truing electrode 21 based on the information obtained from the shape measuring mechanism 3 and the information obtained from the distance measuring means, and also calculates the depth of cut of the truing electrode 21. It is configured to execute various processes such as driving control of the piezo actuator 26 based on the calculation result, the number of discharges generated, and the voltage between the electrodes.

The processing medium supply means 6 provides a processing medium (for example, electric discharge machining oil, deionized water, ultrapure water, or other liquid having a high specific resistance value or cutting) between the blade 101 and the turwing electrode 21 when the blade 101 is slewed. It constitutes a supply means for supplying oil, water-soluble cutting oil, water-soluble grinding oil, electrolytic solution, or air, nitrogen, argon, helium, or other gas. In the illustrated example, a nozzle for liquid injection is shown as the processing medium supply means 6, and the processing medium injected from the nozzle 6 is supplied between the blade 101 and the trueing electrode 21. Further, the processing medium supply means 6 preferably has a position adjusting mechanism.

The power supply unit 7 is a power supply device that supplies electric power to each unit of the on-board truing device 1, and includes a discharge power supply unit 71 and a drive circuit 72 of the piezo actuator 26 as main units as described above. A known power supply device used for electric discharge machining is used for the power supply unit 71 for electric discharge. For example, a power supply device including an RC discharge circuit, a transistor circuit, or the like is used. As the pulse waveform output from the discharge power supply unit 71, a unipolar pulse or a bipolar pulse, or a pulse having a specific waveform in which the number of pulses, the pause time, or the voltage application time is changed according to the polarity is used. Can be done.

Next, the truing procedure by the on-board truing device 1 configured in this way will be described.

(1) The on-board truing device 1 is mounted at a predetermined position of the dicing device 100.
This mounting is performed using the mounting mechanism provided on the stage base 42 of the position control mechanism 4 as described above. As a result, the on-board truing device 1 is positioned and fixed to the dicing device 100.

(2) Next, the shape of the blade 101 is measured using the shape measuring mechanism 3.
In measuring the shape of the blade 101, first, the position control mechanism 4 is operated to move the shape measuring mechanism 3 to the shape measuring position. Then, in this state, the spindle 102 of the dicing device 100 is rotated. Here, the rotation start / rotation stop control (operation) of the spindle 102 is performed by the control (operation) on the dicing device 100 side. That is, the control (operation) related to the rotation of the spindle 102 is exclusively performed on the dicing device 100 side. As the rotation speed of the spindle 102 at this time, for example, the same rotation speed as the rotation speed at the time of processing by the dicing device 100 is used.

Then, in a state where the spindle 102 is rotating, that is, a state where the blade 101 is rotating, the shape of the blade 101 is measured by the capacitance sensor 31, and the control unit 5 is made to calculate the cutting amount at the time of growing. .. In this shape measurement, the relative distance between the capacitance sensor 31 and the blade 101 is measured by using a distance measuring means, and the data acquired by the shape measurement is corrected based on the measurement result. You may.

(3) When the shape measurement of the blade 101 and the calculation of the depth of cut at the time of truing are completed, the control unit 5 finishes the acquisition of data from the capacitance sensor 31 and operates the position control mechanism 4 to truing. The mechanism 2 is moved to the truing position, and the truing of the blade 101 is started.

In this tsuruing, the control unit 5 controls the drive of the piezo actuator 26 based on the calculated depth of cut, and performs tsuruing by the tsuruing electrode 21. That is, discharge is performed between the discharge surface 21a of the trueing electrode 21 and the outer peripheral surface 101a of the blade 101, and the blade 101 is subjected to trueuing. At that time, the control unit 5 controls the drive of the piezo actuator 26 while checking the relative distance between the blade 101 and the trueing electrode 21, the number of discharges generated, and the voltage between poles using a distance measuring means.

In this truing, the position control mechanism 3 may be slid in the horizontal direction in combination with the cutting by the forward movement of the piezo actuator 26.

(4) When the cutting by the truing electrode 21 is completed, the control unit 5 retracts the piezo actuator 26 to end the truing.

At that time, the shape measuring mechanism 3 may be moved to the shape measuring position again after the completion of the truing to measure the shape of the blade 101 for confirming the finished state of the truing.

As described above, according to the on-board truing device 1 according to the present invention, in addition to the truing mechanism 2 that trues the shape of the blade 101, the shape measuring mechanism 3 that measures the shape of the blade 101 and these mechanisms 2 and 3 Since the position control mechanism 4 for changing the position is provided in the on-board truing device 1, the control unit 5 of the on-board truing device 1 does not cooperate with the dicing device 100 side in terms of control, and the blade 101 Can carry out dicing. Therefore, it is possible to provide a highly versatile on-machine truing device 1, and it is possible to realize high-precision machining in various machine tools without being affected by the tool mounting accuracy.

For example, with respect to the tool, the on-machine truing device 1 according to the present invention can be applied even to the blade 101 with a shaft as shown in FIG. Further, by forming the shape of the truing electrode 21 into a U shape as shown in FIG. 4, the side surface of the blade 101 can be trued in addition to the outer peripheral surface 101a of the blade 101. Further, tools other than blades (for example, an end mill 101'as shown in FIG. 5, a cup-type grindstone (not shown), and the like can also be trued by the on-board truing device 1 of the present invention.

Further, by adopting the present invention in the dicing apparatus 100 that employs a blade made of sintered diamond, the mounting error of the blade 101 can be easily corrected on the user side, and the sintered diamond blade. It is possible to maximize the benefits of. That is, by appropriately performing trueing on the user side, the continuous cutting edge spacing and the protrusion height can be made uniform over the entire circumference of the blade 101, so that a high hardness material such as silicon carbide (SiC) can be broken. It is possible to process in ductile mode without doing so.

It should be noted that the above-described embodiment shows a preferred embodiment of the present invention, and the present invention is not limited to these, and various design changes can be made within the scope of the present invention.

For example, in the above-described embodiment, the case where the dicing device 100 is used as the machine tool is shown. However, if the machine tool 1 according to the present invention is a machine tool of a type in which a tool is attached to a spindle, for example, grinding is performed. It can also be applied to other types of machine tools such as machines, milling machines and machining centers.

Further, in the above-described embodiment, the case where the truing is performed by using electric discharge machining is shown, but in the case of electrical machining (electric machining), laser machining, electrolytic machining, and a combination of these are combined. It is also possible to configure it to perform truing with.

Further, in the above-described embodiment, a case where a block electrode method using a plate-shaped electrode for the truing electrode 21 is adopted as the electric discharge machining method used for truing has been shown, but depending on the material and shape of the tool to be trued, Other electric discharge machining methods (for example, a wire electric discharge machining method using a wire electrode, a WEDG (Wire Electro-Discharge Grinding) method having a wire electrode backup mechanism, and a machining method in which these are combined in combination) are used. It is also possible to configure it to perform tsuruing. That is, in the case of true wing using electric discharge machining, the shape of the true wing electrode 21 can be appropriately redesigned according to the shape of the target tool and the like.

Further, in the above-described embodiment, the case where sintered diamond is used as the material of the tool is shown, but if the tool can be trued by electric processing (for example, a cemented carbide tool), the material of the tool can be changed as appropriate. It is possible.

Further, in the above-described embodiment, the case where the stage 41 of the position control mechanism 4 is configured on a flat surface is shown. For example, the angle between the stage on which the truing mechanism 2 is placed and the stage on which the shape measurement mechanism 3 is placed is angled. It is also possible to arrange them in a "<" shape with a sword, so that the trueing by the true wing mechanism 2 and the shape measurement by the shape measurement mechanism 3 can be performed at the same time.

Furthermore, as described above, the on-board truing device according to the present invention can also be used as a tool dressing device. That is, since the on-machine truing device according to the present invention is configured to perform tool truing by electrical machining, it can be used as a dressing device for sharpening tools by utilizing this electrical machining function. It can also be used as a device for performing both truing and dressing (truing dressing device).

Specifically, when dressing a tool using the on-board truing device according to the present invention, the truing electrode 21 is used as an electrode for electrolytic dressing or discharge dressing, and the truing electrode 21 and the tool are provided by the position control mechanism 4. Tool dressing (electrolytic dressing or discharge dressing) is performed while controlling the relative distance to and from the dressing to a distance suitable for dressing. When the present invention is used as a dressing device (trueing dressing device), the tool to be dressed may be any type as long as it is a tool capable of electrolytic dressing or discharge dressing (for example, a metal bond grindstone). Further, the shape of the tool (for example, a cup-shaped grindstone) can be appropriately adjusted by making the shape of the trueing electrode 21 correspond to the shape of the tool.

1 Machine tooling device 2 Truing mechanism 3 Shape measurement mechanism 4 Position control mechanism 5 Control unit 6 Processing medium supply means 11 Feeding brush 12 Coupler 13 Spindle mounting part 14 Tool mounting part 21 Truing electrode 21a Discharge surface 22 Power feeding means 23 Notch Quantity control means 24 Insulation member 25 Cover member 26 Piezo actuator 100 Dying device (machine tool)
101 blade (tool)
102 Spindle (rotating shaft)

Claims (7)

It is an on-machine tooling device that performs tooling of tools attached to the rotating shaft of a machine tool on the machine tool.
It is provided with a control unit that controls the relative distance between the tool and the trueing electrode based on the number of electric discharges generated depending on the relative distance between the tool and the trueing electrode, and the outer circumference of the tool is subjected to electric discharge machining while rotating the tool. A trueing mechanism that corrects the shape of the tool, including rotational runout, so that the surface is formed into an annular shape.
A shape measuring mechanism for measuring the shape of the tool and
It has a position control mechanism that controls the relative distance between these mechanisms and the tool by changing the positions of the truing mechanism and the shape measuring mechanism.
The shape measuring mechanism can measure the contour shape of the tool when the tool is stationary and the shape including the rotational runout of the tool when the tool is rotated without contacting the tool. An on-board truing device characterized by being equipped with means. The on-machine truing device according to claim 1 , wherein the truing mechanism includes an insulating means for electrically insulating the machine tool from the machine tool. The on-machine truing device according to claim 1 or 2 , wherein the truing mechanism includes a processing medium supply means for supplying a processing medium between the tool and an electrode for truing. The on-board truing device according to any one of claims 1 to 3 , wherein the shape measuring mechanism includes a protective means for preventing foreign matter from adhering to the shape measuring means. The on-machine according to any one of claims 1 to 4 , wherein the position control mechanism includes a truing mechanism, a shape measuring mechanism, and a distance measuring means for measuring a relative distance to the tool. Truing device. The on-machine truing device according to any one of claims 1 to 5 , further comprising a detachable means for attaching / detaching to / from the machine tool. A machine tool characterized in that the on-machine truing device according to any one of claims 1 to 6 is mounted as the tool truing device.

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