JP6834903B2 - 検査装置および検査装置故障確認方法 - Google Patents
検査装置および検査装置故障確認方法 Download PDFInfo
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- JP6834903B2 JP6834903B2 JP2017203906A JP2017203906A JP6834903B2 JP 6834903 B2 JP6834903 B2 JP 6834903B2 JP 2017203906 A JP2017203906 A JP 2017203906A JP 2017203906 A JP2017203906 A JP 2017203906A JP 6834903 B2 JP6834903 B2 JP 6834903B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/04664—Failure or abnormal function
- H01M8/04686—Failure or abnormal function of auxiliary devices, e.g. batteries, capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8848—Polarisation of light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/068—Optics, miscellaneous
- G01N2201/0683—Brewster plate; polarisation controlling elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/288—Filters employing polarising elements, e.g. Lyot or Solc filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/1004—Fuel cells with solid electrolytes characterised by membrane-electrode assemblies [MEA]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
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- General Health & Medical Sciences (AREA)
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- Pathology (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Fuel Cell (AREA)
- Polarising Elements (AREA)
Description
Claims (8)
- ワークの表面に付着した異物や汚れの有無を検査する検査装置であって、
前記ワークを載置する載置部と、
前記ワークの表面に光を照射する光源部と、
前記載置部および前記光源部を覆い、前記検査装置の外部に位置する外部光源からの光の前記検査装置内への入射を遮断するカバー部と、
を備え、
前記カバー部に設けられている開口窓に、第1の方向に偏光軸を有する第1の偏光板が取り付けられるとともに、前記第1の方向と直交する第2の方向に偏光軸を有する第2の偏光板が開閉可能に取り付けられ、
前記第2の偏光板が閉じた状態で、前記第1の偏光板と重なり、前記第2の偏光板が開いた状態で、前記外部光源と前記ワークとを結ぶ直線上に前記第1の偏光板および前記第2の偏光板が存在することを特徴とする検査装置。 - 前記第2の偏光板が開いた状態で、前記第2の偏光板と前記第1の偏光板とのなす角が
90度以内であることを特徴とする請求項1に記載の検査装置。 - 前記カバー部の開口窓は、前記カバー部の側面でかつ前記外部光源よりも下方の位置に設けられており、
前記第2の偏光板は、前記開口窓に対して上開き可能に取り付けられていることを特徴とする請求項1または請求項2に記載の検査装置。 - 前記第2の偏光板を開いた状態に保持する保持手段を有することを特徴とする請求項3に記載の検査装置。
- 前記ワークは、燃料電池セルからなることを特徴とする請求項1から請求項4のいずれか一項に記載の検査装置。
- ワークの表面に付着した異物や汚れの有無を検査する検査装置の故障を確認する検査装置故障確認方法であって、
前記検査装置が、前記ワークを載置する載置部と、前記ワークの表面に光を照射する光源部と、前記載置部および前記光源部を覆い、前記検査装置の外部に位置する外部光源からの光の前記検査装置内への入射を遮断するカバー部と、を備え、前記カバー部に設けられている開口窓に、第1の方向に偏光軸を有する第1の偏光板が取り付けられるとともに、前記第1の方向と直交する第2の方向に偏光軸を有する第2の偏光板が開閉可能に取り付けられ、前記第2の偏光板が閉じた状態で、前記第1の偏光板と重なり、前記第2の偏光板が開いた状態で、前記外部光源と前記ワークとを結ぶ直線上に前記第1の偏光板および前記第2の偏光板が存在するよう構成され、
前記第2の偏光板を開いた状態で、前記第1の偏光板を通して、前記検査装置の内部が目視されることで、前記検査装置の故障が確認されることを特徴とする検査装置故障確認方法。 - 前記第2の偏光板が開いた状態で、前記第2の偏光板と前記第1の偏光板とのなす角が
90度以内であることを特徴とする請求項6に記載の検査装置故障確認方法。 - 前記ワークは、燃料電池セルからなることを特徴とする請求項6または請求項7に記載の検査装置故障確認方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017203906A JP6834903B2 (ja) | 2017-10-20 | 2017-10-20 | 検査装置および検査装置故障確認方法 |
DE102018125027.4A DE102018125027B4 (de) | 2017-10-20 | 2018-10-10 | Prüfvorrichtung, Prüfanlage und Fehlerbestätigungsverfahren für Prüfvorrichtung |
US16/157,625 US10481103B2 (en) | 2017-10-20 | 2018-10-11 | Inspection device, inspection facility and inspection device failure confirmation method |
CN201811196343.4A CN109696440B (zh) | 2017-10-20 | 2018-10-15 | 检查装置、检查设施和检查装置故障确认方法 |
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JP2017203906A JP6834903B2 (ja) | 2017-10-20 | 2017-10-20 | 検査装置および検査装置故障確認方法 |
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JP2019078568A JP2019078568A (ja) | 2019-05-23 |
JP6834903B2 true JP6834903B2 (ja) | 2021-02-24 |
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JP2017203906A Active JP6834903B2 (ja) | 2017-10-20 | 2017-10-20 | 検査装置および検査装置故障確認方法 |
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US (1) | US10481103B2 (ja) |
JP (1) | JP6834903B2 (ja) |
CN (1) | CN109696440B (ja) |
DE (1) | DE102018125027B4 (ja) |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000151916A (ja) * | 1998-11-12 | 2000-05-30 | Fuji Photo Film Co Ltd | 画像情報読取装置 |
US6861660B2 (en) * | 2002-07-29 | 2005-03-01 | Applied Materials, Inc. | Process and assembly for non-destructive surface inspection |
JP2004170495A (ja) * | 2002-11-18 | 2004-06-17 | Micronics Japan Co Ltd | 表示用基板の検査方法及び装置 |
GB2446822A (en) * | 2007-02-23 | 2008-08-27 | Enfis Ltd | Quality control of meat products using optical imaging |
JP2012002792A (ja) | 2010-06-18 | 2012-01-05 | Micro Brain:Kk | 透明フィルム検査装置及び欠陥検出方法 |
CA2859616A1 (en) * | 2011-01-31 | 2012-08-09 | Dosi - Medical Imaging Systems Ltd. | Optical polarimetric imaging |
JP2014188066A (ja) | 2013-03-26 | 2014-10-06 | Canon Inc | 被検体情報取得装置およびその制御方法 |
CN203587509U (zh) * | 2013-05-10 | 2014-05-07 | 江苏赢洋实业股份有限公司 | 一种表面光滑水果成像检测中的耀斑消减装置 |
WO2015063552A2 (en) | 2013-10-30 | 2015-05-07 | Premium Genetics (Uk) Ltd. | Microfluidic system and method with focused energy apparatus |
KR20160044802A (ko) * | 2014-10-16 | 2016-04-26 | 동우 화인켐 주식회사 | 시트상 제품 검사 시스템, 시트상 제품 검사 방법 및 그러한 검사에서 사용하기 위한 편광판 |
CN105738369A (zh) * | 2014-12-10 | 2016-07-06 | 钦州市晶通科技有限公司 | 一种触摸屏目检暗箱 |
CN105549216A (zh) * | 2016-02-19 | 2016-05-04 | 天津市职业大学 | 多人实时可视化宝石偏光镜 |
CN205404430U (zh) * | 2016-02-19 | 2016-07-27 | 天津市职业大学 | 实时可视化宝石偏光装置 |
CN107481952A (zh) * | 2017-09-14 | 2017-12-15 | 旭科新能源股份有限公司 | 一种太阳能电池激光划刻线的缺陷检测系统及方法 |
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- 2017-10-20 JP JP2017203906A patent/JP6834903B2/ja active Active
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2018
- 2018-10-10 DE DE102018125027.4A patent/DE102018125027B4/de not_active Expired - Fee Related
- 2018-10-11 US US16/157,625 patent/US10481103B2/en active Active
- 2018-10-15 CN CN201811196343.4A patent/CN109696440B/zh not_active Expired - Fee Related
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Publication number | Publication date |
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US20190120772A1 (en) | 2019-04-25 |
JP2019078568A (ja) | 2019-05-23 |
CN109696440A (zh) | 2019-04-30 |
DE102018125027B4 (de) | 2022-08-25 |
US10481103B2 (en) | 2019-11-19 |
CN109696440B (zh) | 2021-08-24 |
DE102018125027A1 (de) | 2019-04-25 |
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