JP6834881B2 - 構造物 - Google Patents

構造物 Download PDF

Info

Publication number
JP6834881B2
JP6834881B2 JP2017182304A JP2017182304A JP6834881B2 JP 6834881 B2 JP6834881 B2 JP 6834881B2 JP 2017182304 A JP2017182304 A JP 2017182304A JP 2017182304 A JP2017182304 A JP 2017182304A JP 6834881 B2 JP6834881 B2 JP 6834881B2
Authority
JP
Japan
Prior art keywords
peak intensity
less
diffraction angle
yttrium
ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017182304A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018082154A (ja
Inventor
芦澤　宏明
宏明 芦澤
清原　正勝
正勝 清原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd filed Critical Toto Ltd
Priority to US15/716,847 priority Critical patent/US10087109B2/en
Publication of JP2018082154A publication Critical patent/JP2018082154A/ja
Priority to US16/112,020 priority patent/US10618847B2/en
Application granted granted Critical
Publication of JP6834881B2 publication Critical patent/JP6834881B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/553—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on fluorides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62222—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic coatings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/624—Sol-gel processing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/781—Nanograined materials, i.e. having grain sizes below 100 nm
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/963—Surface properties, e.g. surface roughness
    • C04B2235/9638—Tolerance; Dimensional accuracy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Drying Of Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Coating By Spraying Or Casting (AREA)
JP2017182304A 2016-11-10 2017-09-22 構造物 Active JP6834881B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US15/716,847 US10087109B2 (en) 2016-11-10 2017-09-27 Structure
US16/112,020 US10618847B2 (en) 2016-11-10 2018-08-24 Structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016219787 2016-11-10
JP2016219787 2016-11-10

Publications (2)

Publication Number Publication Date
JP2018082154A JP2018082154A (ja) 2018-05-24
JP6834881B2 true JP6834881B2 (ja) 2021-02-24

Family

ID=62159371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017182304A Active JP6834881B2 (ja) 2016-11-10 2017-09-22 構造物

Country Status (4)

Country Link
JP (1) JP6834881B2 (ko)
KR (2) KR102057480B1 (ko)
CN (1) CN108069717B (ko)
TW (2) TWI663142B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7426796B2 (ja) 2019-10-10 2024-02-02 三星電子株式会社 部材、その製造方法、その製造装置、及び半導体製造装置
US20240026515A1 (en) * 2019-12-18 2024-01-25 Shin-Etsu Chemical Co., Ltd. Yttrium-fluoride-based sprayed coating, sprayed member, and method for producing yttrium-fluoride-based sprayed coating
JPWO2024047746A1 (ko) 2022-08-30 2024-03-07
JP7501813B1 (ja) 2022-09-09 2024-06-18 日本イットリウム株式会社 成膜用材料及び皮膜の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101110371B1 (ko) * 2010-04-26 2012-02-15 한국세라믹기술원 내플라즈마 결정질 세라믹 코팅막 및 그 제조방법
JP5911036B1 (ja) 2014-11-21 2016-04-27 日本イットリウム株式会社 焼結体
JP6128362B2 (ja) * 2015-02-10 2017-05-17 日本イットリウム株式会社 成膜用粉末及び成膜用材料

Also Published As

Publication number Publication date
TW201932435A (zh) 2019-08-16
KR20190139820A (ko) 2019-12-18
KR20180052518A (ko) 2018-05-18
TW201829352A (zh) 2018-08-16
TWI663142B (zh) 2019-06-21
JP2018082154A (ja) 2018-05-24
CN108069717A (zh) 2018-05-25
CN108069717B (zh) 2021-09-28
KR102057480B1 (ko) 2019-12-19

Similar Documents

Publication Publication Date Title
US10618847B2 (en) Structure
JP6834881B2 (ja) 構造物
KR102425887B1 (ko) 용사용 재료와 용사 피막 부착 부재
KR102405679B1 (ko) 용사용 재료
KR102266658B1 (ko) 용사용 이트륨계 과립 분말 및 이를 이용한 용사 피막
JP6772994B2 (ja) 構造物
US20180354859A1 (en) Structure
JP7115582B2 (ja) 複合構造物および複合構造物を備えた半導体製造装置
JP7140222B2 (ja) 複合構造物および複合構造物を備えた半導体製造装置
WO2023162741A1 (ja) 複合構造物および複合構造物を備えた半導体製造装置
WO2023162743A1 (ja) 複合構造物および複合構造物を備えた半導体製造装置
WO2022209933A1 (ja) 複合構造物および複合構造物を備えた半導体製造装置
WO2023162742A1 (ja) 複合構造物および複合構造物を備えた半導体製造装置
WO2022209934A1 (ja) 複合構造物および複合構造物を備えた半導体製造装置
TW202142737A (zh) 複合結構物及具備複合結構物之半導體製造裝置
JP2022153273A (ja) 複合構造物および複合構造物を備えた半導体製造装置
JP2023124889A (ja) 複合構造物および複合構造物を備えた半導体製造装置
JP2023124887A (ja) 複合構造物および複合構造物を備えた半導体製造装置
JP2022169531A (ja) 複合構造物および複合構造物を備えた半導体製造装置
JP2023124888A (ja) 複合構造物および複合構造物を備えた半導体製造装置
CN116917544A (zh) 复合结构物以及具备复合结构物的半导体制造装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20191018

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200827

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200901

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201027

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210105

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210118

R150 Certificate of patent or registration of utility model

Ref document number: 6834881

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150