JP6804284B2 - 静電容量型センサ - Google Patents
静電容量型センサ Download PDFInfo
- Publication number
- JP6804284B2 JP6804284B2 JP2016242282A JP2016242282A JP6804284B2 JP 6804284 B2 JP6804284 B2 JP 6804284B2 JP 2016242282 A JP2016242282 A JP 2016242282A JP 2016242282 A JP2016242282 A JP 2016242282A JP 6804284 B2 JP6804284 B2 JP 6804284B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- capacitor
- noise
- detection
- detection unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 claims description 84
- 239000003990 capacitor Substances 0.000 claims description 71
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 238000011088 calibration curve Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005394 sealing glass Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/069—Protection against electromagnetic or electrostatic interferences
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0091—Transmitting or indicating the displacement of liquid mediums by electrical, electromechanical, magnetic or electromagnetic means
- G01L9/0095—Transmitting or indicating the displacement of liquid mediums by electrical, electromechanical, magnetic or electromagnetic means using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
なお、図3中のFG−SG拘束部は、フレーム接地とシグナル接地とを絶縁するものであり、そのインピーダンスは、矩形波電圧の周波数に対して十分に低く、Vfg(ac)=Vsg(ac)であることを前提としている。接尾記号(ac)は、SG電位から見た各信号の交流電圧成分を示す(以下、本明細書において同様)。
Vdiv=[Vexc(ac)×Cs+Vfg(ac)×Cd]/(Cs+Cd)
Vdiv(ac)=
{[Vclk(ac)+Vac_fg]×Cs+Vfg(ac)×Cd}/(Cs+Cd)
ここで、Vac_fg=Vfg(ac)であることから、
Vdiv(ac)=[Vclk(ac)×Cs]/(Cs+Cd)+Vac_fg
Vsubt(ac)=[Vclk(ac)×Cs]/(Cs+Cd)
したがって、直流電圧変換部9には、ノイズ電圧Vfg(ac)が重畳した場合と重畳しない場合のいずれの場合であっても、ノイズ電圧Vfg(ac)の影響が除かれた交流電圧成分Vsubt(ac)が出力される。
例えば、前記実施形態のセンサは、圧力を検出するものであったが、加速度を検出するものであっても良い。
2・・・検出コンデンサ
21・・・ダイアフラム
22・・・固定電極
3・・・固定コンデンサ
4・・・初期電圧生成部
5・・・ノイズ電圧検出部
51・・・コンデンサ
52・・・抵抗
6・・・ノイズ電圧加算部
7・・・分圧検出部
72・・・コンデンサ
73・・・抵抗
8・・・ノイズ電圧減算部
9・・・直流電圧変換部
10・・・圧力演算部
Claims (3)
- 外力を受けて変形するダイアフラム及び固定電極により形成された検出コンデンサと、当該検出コンデンサと直列に接続された固定コンデンサとを有し、これらのコンデンサに電圧を印加して、前記検出コンデンサにかかる分圧を検出するものであり、前記ダイアフラムがフレームに接続された静電容量型センサであって、
前記フレームに接続されて、前記フレームに生じるノイズ電圧を検出するノイズ電圧検出部と、
前記検出コンデンサ及び前記固定コンデンサに印加される電圧に前記ノイズ電圧を足し合わせるノイズ電圧加算部と、
前記検出コンデンサの分圧から前記足し合わせたノイズ電圧を差し引くノイズ電圧減算部とを備える静電容量型センサ。 - 前記ノイズ電圧検出部は、前記ノイズ電圧の交流電圧成分を通過させるコンデンサと、当該コンデンサの後段に一端が接続されて他端が接地された抵抗とを備える、請求項1記載の静電容量型センサ。
- 前記検出コンデンサにかかる分圧を検出する分圧検出部を備え、
前記分圧検出部は、前記分圧の交流電圧成分を通過させるコンデンサと、当該コンデンサの後段に一端が接続されて他端が接地された抵抗とを備え、
前記ノイズ電圧検出部の時定数と前記分圧検出部の時定数とが同一である、請求項2記載の静電容量型センサ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016242282A JP6804284B2 (ja) | 2016-12-14 | 2016-12-14 | 静電容量型センサ |
EP17002029.1A EP3336504A1 (en) | 2016-12-14 | 2017-12-13 | Capacitance type sensor |
US15/840,837 US10514313B2 (en) | 2016-12-14 | 2017-12-13 | Capacitance type sensor including detection and fixed capacitors |
KR1020170171137A KR20180068878A (ko) | 2016-12-14 | 2017-12-13 | 정전 용량형 센서 |
TW106143931A TW201821778A (zh) | 2016-12-14 | 2017-12-14 | 靜電電容型感測器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016242282A JP6804284B2 (ja) | 2016-12-14 | 2016-12-14 | 静電容量型センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018096867A JP2018096867A (ja) | 2018-06-21 |
JP6804284B2 true JP6804284B2 (ja) | 2020-12-23 |
Family
ID=60673434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016242282A Active JP6804284B2 (ja) | 2016-12-14 | 2016-12-14 | 静電容量型センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10514313B2 (ja) |
EP (1) | EP3336504A1 (ja) |
JP (1) | JP6804284B2 (ja) |
KR (1) | KR20180068878A (ja) |
TW (1) | TW201821778A (ja) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4752741A (en) * | 1986-11-26 | 1988-06-21 | Honeywell Inc. | Noise extraction circuit |
US4912427A (en) * | 1988-12-16 | 1990-03-27 | Motorola, Inc. | Power supply noise rejection technique for amplifiers |
US6151967A (en) * | 1998-03-10 | 2000-11-28 | Horizon Technology Group | Wide dynamic range capacitive transducer |
DE69922727T2 (de) * | 1998-03-31 | 2005-12-15 | Hitachi, Ltd. | Kapazitiver Druckwandler |
US6958594B2 (en) * | 2004-01-21 | 2005-10-25 | Analog Devices, Inc. | Switched noise filter circuit for a DC-DC converter |
JP6357090B2 (ja) | 2014-12-02 | 2018-07-11 | 株式会社堀場エステック | 静電容量型センサ |
JP6581443B2 (ja) * | 2015-09-04 | 2019-09-25 | 日立オートモティブシステムズ株式会社 | センサ装置 |
-
2016
- 2016-12-14 JP JP2016242282A patent/JP6804284B2/ja active Active
-
2017
- 2017-12-13 US US15/840,837 patent/US10514313B2/en not_active Expired - Fee Related
- 2017-12-13 EP EP17002029.1A patent/EP3336504A1/en not_active Withdrawn
- 2017-12-13 KR KR1020170171137A patent/KR20180068878A/ko not_active Application Discontinuation
- 2017-12-14 TW TW106143931A patent/TW201821778A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
KR20180068878A (ko) | 2018-06-22 |
US10514313B2 (en) | 2019-12-24 |
TW201821778A (zh) | 2018-06-16 |
US20180164172A1 (en) | 2018-06-14 |
JP2018096867A (ja) | 2018-06-21 |
EP3336504A1 (en) | 2018-06-20 |
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