JP6804224B2 - レーザ加工装置およびレーザ加工方法 - Google Patents

レーザ加工装置およびレーザ加工方法 Download PDF

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Publication number
JP6804224B2
JP6804224B2 JP2016123735A JP2016123735A JP6804224B2 JP 6804224 B2 JP6804224 B2 JP 6804224B2 JP 2016123735 A JP2016123735 A JP 2016123735A JP 2016123735 A JP2016123735 A JP 2016123735A JP 6804224 B2 JP6804224 B2 JP 6804224B2
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Japan
Prior art keywords
laser
mirror
hole
optical system
machining
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Active
Application number
JP2016123735A
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English (en)
Japanese (ja)
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JP2017225994A (ja
JP2017225994A5 (https=
Inventor
呉屋　真之
真之 呉屋
団野　実
実 団野
渡辺　俊哉
俊哉 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
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Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP2016123735A priority Critical patent/JP6804224B2/ja
Priority to US16/308,891 priority patent/US11117221B2/en
Priority to PCT/JP2017/022694 priority patent/WO2017221931A1/ja
Publication of JP2017225994A publication Critical patent/JP2017225994A/ja
Publication of JP2017225994A5 publication Critical patent/JP2017225994A5/ja
Application granted granted Critical
Publication of JP6804224B2 publication Critical patent/JP6804224B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/001—Turbines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles ; Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/18—Dissimilar materials
    • B23K2103/26—Alloys of Nickel and Cobalt and Chromium

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP2016123735A 2016-06-22 2016-06-22 レーザ加工装置およびレーザ加工方法 Active JP6804224B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016123735A JP6804224B2 (ja) 2016-06-22 2016-06-22 レーザ加工装置およびレーザ加工方法
US16/308,891 US11117221B2 (en) 2016-06-22 2017-06-20 Laser machining device and laser machining method
PCT/JP2017/022694 WO2017221931A1 (ja) 2016-06-22 2017-06-20 レーザ加工装置およびレーザ加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016123735A JP6804224B2 (ja) 2016-06-22 2016-06-22 レーザ加工装置およびレーザ加工方法

Publications (3)

Publication Number Publication Date
JP2017225994A JP2017225994A (ja) 2017-12-28
JP2017225994A5 JP2017225994A5 (https=) 2019-04-11
JP6804224B2 true JP6804224B2 (ja) 2020-12-23

Family

ID=60784592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016123735A Active JP6804224B2 (ja) 2016-06-22 2016-06-22 レーザ加工装置およびレーザ加工方法

Country Status (3)

Country Link
US (1) US11117221B2 (https=)
JP (1) JP6804224B2 (https=)
WO (1) WO2017221931A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018216940A1 (de) 2018-10-02 2020-04-02 3D-Micromac Ag Laserbearbeitungssystem
JP7291510B2 (ja) 2019-03-25 2023-06-15 三菱重工業株式会社 レーザ加工方法
JP7297568B2 (ja) 2019-07-08 2023-06-26 三菱重工業株式会社 レーザ加工方法
US20230010203A1 (en) * 2019-12-20 2023-01-12 Nippon Telegraph And Telephone Corporation Cleaning Method and Device
CN111571037B (zh) * 2020-06-15 2025-04-01 福建源造数字科技有限公司 激光加工装置、方法及弹性网面材料激光加工方法
CN113290386B (zh) * 2021-05-10 2022-07-08 长春理工大学 稳流区激光/超声复合低损伤复杂微结构加工装置及方法
CN113798706A (zh) * 2021-09-18 2021-12-17 苏州凯尔博精密机械有限公司 一种塑料件激光切割滑台机构
JP7812674B2 (ja) * 2022-01-31 2026-02-10 株式会社ディスコ ウエーハ生成装置
CN115041816B (zh) * 2022-05-09 2025-11-14 中国科学院沈阳自动化研究所 一种基于脉冲编码控制的微结构加工装置及方法
CN117161541A (zh) * 2022-05-27 2023-12-05 中国科学院理化技术研究所 一种激光加工设备
CN116275564A (zh) * 2022-12-22 2023-06-23 立川(无锡)半导体设备有限公司 一种激光切割光学系统及其切割方法
CN116213975A (zh) * 2023-03-01 2023-06-06 苏州德龙激光股份有限公司 双工位fpc紫外激光切割设备
CN120680146B (zh) * 2025-01-20 2026-04-07 东莞市雷宇激光设备有限公司 一种双激光加工装置

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JPS5746203A (en) * 1980-09-05 1982-03-16 Kokusai Denshin Denwa Co Ltd <Kdd> Optical switch
GB2227965B (en) 1988-10-12 1993-02-10 Rolls Royce Plc Apparatus for drilling a shaped hole in a workpiece
US5216808A (en) 1990-11-13 1993-06-08 General Electric Company Method for making or repairing a gas turbine engine component
JPH09164493A (ja) * 1995-12-18 1997-06-24 Mitsubishi Electric Corp レーザ加工装置
JP4209615B2 (ja) * 2001-12-28 2009-01-14 株式会社ニデック レーザ加工装置
JP2003215477A (ja) * 2002-01-24 2003-07-30 Miyachi Technos Corp 光路切り替え装置
US7411150B2 (en) * 2002-06-12 2008-08-12 Alstom Technology Ltd. Method of producing a composite component
US7057133B2 (en) * 2004-04-14 2006-06-06 Electro Scientific Industries, Inc. Methods of drilling through-holes in homogenous and non-homogenous substrates
EP1810774A1 (de) 2006-01-24 2007-07-25 Siemens Aktiengesellschaft Verfahren zur Herstellung eines Loches
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JP2008055478A (ja) * 2006-08-31 2008-03-13 Honda Motor Co Ltd 仕上げ加工方法
JP5354969B2 (ja) * 2008-06-17 2013-11-27 ミヤチテクノス株式会社 ファイバレーザ加工方法及びファイバレーザ加工装置
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JP5908009B2 (ja) 2013-08-20 2016-04-26 三菱重工業株式会社 レーザ加工方法及びレーザ加工装置

Also Published As

Publication number Publication date
JP2017225994A (ja) 2017-12-28
US20190176271A1 (en) 2019-06-13
WO2017221931A1 (ja) 2017-12-28
US11117221B2 (en) 2021-09-14

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