JP6798313B2 - リブ型光導波路およびそれを用いた光合分波器 - Google Patents
リブ型光導波路およびそれを用いた光合分波器 Download PDFInfo
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2808—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs
- G02B6/2813—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs based on multimode interference effect, i.e. self-imaging
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29344—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by modal interference or beating, i.e. of transverse modes, e.g. zero-gap directional coupler, MMI
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/40—Transceivers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12164—Multiplexing; Demultiplexing
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Description
本発明に係る第1の実施形態について説明する。本実施形態においては、半導体リブ型光導波路をベースとする2×2MMI光合分波器を適用する。本実施形態に係る2×2MMI光合分波器の斜視図を図1Aに、図1AのA−A’線において切断した時の断面図を図1Bに示す。図1A、図1Bにおいて、2×2MMI光合分波器100は、SOI基板(SOI:Semiconductor−on−Insulator)200、入力光導波路300a、300b、出力光導波路400a、400b、テーパ型光導波路500a、500b、500c、500d、リブ型MMI領域600を備える。なお、特に区別する必要がない場合、入力光導波路300a、300b、出力光導波路400a、400b、テーパ型光導波路500a、500b、500c、500dを、単に、入力光導波路300、出力光導波路400、テーパ型光導波路500と記載する。
第1の実施形態で説明した2×2MMI光合分波器100の動作について説明する。基板210上に厚さ3μmのSiO2膜から成る絶縁膜220および厚さ1.5μmの半導体層であるSOI層230を配置することによってSOI基板200を形成した。さらに、SOI基板200上のSOI層230をフォトリソグラフィ技術を用いて光導波路パターンを高精度加工することにより、第1の実施形態で説明した2×2MMI光合分波器100を形成する。
式(1)において、Pbarは入力光導波路300の一方から入力された電力Pinの信号光が直進した先にある出力光導波路400のポート(バー出力ポート)へ出力される電力、PcrossはMMI部610の対角線の先にある出力光導波路400のポート(クロス出力ポート)へ出力される電力である。
第2の実施形態について説明する。本実施形態に係る2×2MMI光合分波器100Bの斜視図を図6Aに、B−B’線において切断した時の断面図を図6Bに示す。本実施形態では、狭幅段差部620aB、620bBを、第1の実施形態の実施例で説明した直方体型の狭幅段差部620a、620bの面積を維持したまま、角部を直方体状に切欠くことによって階段状に形成した。
20 基板
30 多モード光干渉領域
100 2×2MMI光合分波器
200 SOI基板
210 基板
220 絶縁膜
230 SOI層
300a、300b 入力光導波路
400a、400b 出力光導波路
500a、500b、500c、500d テーパ型光導波路
600 リブ型MMI領域
610 MMI部
620a、620b 狭幅段差部
Claims (9)
- 基板および該基板の上面に形成されたリブ型光導波路からなる多モード光干渉領域を備え、前記多モード光干渉領域のコア領域の両側面はそれぞれ、段差状に形成され、
前記リブ型光導波路における、主電場が前記基板に水平な場合の基本モードの実効屈折率と第1次高次モードの実効屈折率の差と、主電場が前記基板に垂直な場合の基本モードの実効屈折率と第1次高次モードの実効屈折率の差とが、ほぼ同じであることを特徴とする、リブ型光導波路。 - 基板および該基板の上面に形成されたリブ型光導波路からなる多モード光干渉領域を備え、前記多モード光干渉領域の両側面はそれぞれ、段差状に形成され、前記リブ型光導波路における、主電場が前記基板に水平な場合の基本モードの実効屈折率と第1次高次モードの実効屈折率の差と、主電場が前記基板に垂直な場合の基本モードの実効屈折率と第1次高次モードの実効屈折率の差、の比がほぼ1であることを特徴とする、リブ型光導波路。
- 前記段差の幅は伝搬波長以下であり、前記段差の高さは伝搬波長の半分以下である、請求項1または2に記載のリブ型光導波路。
- 基板の上面には、絶縁膜および半導体層が配置され、
前記リブ型光導波路のコアは、前記半導体層をストライプ状に加工することによって形成される、請求項1から3のいずれか一項に記載のリブ型光導波路。 - 前記段差は2段以上の階段型に形成されている、請求項1乃至4のいずれか1項に記載のリブ型光導波路。
- 単一モードリブ型光導波路からなるM本の入力光導波路およびN本の出力光導波路と、
入力光導波路および出力光導波路と、多モード光干渉領域と、の間を滑らかに接続するM+N個のリブ型光導波路から成る可逆テーパ領域と、
請求項1乃至5のいずれか1項に記載のリブ型光導波路と、
を備え、
前記入力光導波路、出力光導波路、多モード光干渉領域および可逆テーパ領域は、前記基板上に形成されていることを特徴とする光合分波器。 - 前記基板の上面には、絶縁膜および半導体層が配置され、
前記入力光導波路、出力光導波路、多モード光干渉領域および可逆テーパ領域のコアは、前記半導体層をストライプ状に加工することによって形成される、請求項6に記載の光合分波器。 - 前記入力光導波路および出力光導波路は同一の断面形状を有する、請求項6または7に記載の光合分波器。
- 前記M+N個の可逆テーパ領域は全て、同一長さ、同一テーパ幅を有する、請求項6乃至8のいずれか1項に記載の光合分波器。
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JP2014204120 | 2014-10-02 | ||
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PCT/JP2015/004689 WO2016051698A1 (ja) | 2014-10-02 | 2015-09-15 | リブ型光導波路およびそれを用いた光合分波器 |
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EP (1) | EP3203282B1 (ja) |
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JP7480488B2 (ja) * | 2019-10-04 | 2024-05-10 | 富士通オプティカルコンポーネンツ株式会社 | 光半導体素子及び受信器 |
US10862610B1 (en) | 2019-11-11 | 2020-12-08 | X Development Llc | Multi-channel integrated photonic wavelength demultiplexer |
US11187854B2 (en) * | 2019-11-15 | 2021-11-30 | X Development Llc | Two-channel integrated photonic wavelength demultiplexer |
US11360268B1 (en) | 2021-03-17 | 2022-06-14 | Cisco Technology, Inc. | Low-loss and low-crosstalk optical mode multiplexer and optical crossover |
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GB1525492A (en) | 1974-09-20 | 1978-09-20 | Max Planck Gesellschaft | Self imaging system using a waveguide |
JPH04247408A (ja) | 1991-02-01 | 1992-09-03 | Ibiden Co Ltd | 光導波路 |
WO1999059012A1 (en) | 1998-05-08 | 1999-11-18 | The Trustees Of Columbia University In The City Of New York | Reduced size multimode interference based coupler |
JP2001183710A (ja) | 1999-12-27 | 2001-07-06 | Kddi Corp | 多モード干渉導波路型光スイッチ |
US6856732B2 (en) * | 2001-06-13 | 2005-02-15 | Intel Corporation | Method and apparatus for adding/droping optical signals in a semiconductor substrate |
FI20020698A0 (fi) * | 2002-04-11 | 2002-04-11 | Valtion Teknillinen | Integroidun optisen piirin valokanava ja menetelmä valokanavan valmistamiseksi |
SE528653C2 (sv) * | 2005-05-30 | 2007-01-09 | Phoxtal Comm Ab | Integrerat chip |
US7116880B1 (en) * | 2005-06-30 | 2006-10-03 | Xerox Corporation | Decreased crosstalk in adjacent photonic waveguides |
US7184207B1 (en) * | 2005-09-27 | 2007-02-27 | Bookham Technology Plc | Semiconductor optical device |
GB2438222A (en) * | 2006-05-17 | 2007-11-21 | Bookham Technology Plc | Multimode interference waveguide coupler |
JP5120330B2 (ja) | 2009-04-27 | 2013-01-16 | 三菱電機株式会社 | 半導体光素子とその製造方法 |
US8472766B2 (en) * | 2009-08-14 | 2013-06-25 | Massachusetts Institute Of Technology | Waveguide coupler having continuous three-dimensional tapering |
JP5413865B1 (ja) * | 2012-12-27 | 2014-02-12 | 株式会社フジクラ | 光導波路素子及び光変調器 |
CN204302526U (zh) * | 2014-12-26 | 2015-04-29 | 江苏尚飞光电科技有限公司 | 偏振分束旋转器 |
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US10082623B2 (en) | 2018-09-25 |
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US20170227712A1 (en) | 2017-08-10 |
EP3203282B1 (en) | 2022-01-26 |
EP3203282A4 (en) | 2018-06-06 |
WO2016051698A1 (ja) | 2016-04-07 |
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