JP6796703B2 - Manufacturing method of ductile circuit - Google Patents

Manufacturing method of ductile circuit Download PDF

Info

Publication number
JP6796703B2
JP6796703B2 JP2019501694A JP2019501694A JP6796703B2 JP 6796703 B2 JP6796703 B2 JP 6796703B2 JP 2019501694 A JP2019501694 A JP 2019501694A JP 2019501694 A JP2019501694 A JP 2019501694A JP 6796703 B2 JP6796703 B2 JP 6796703B2
Authority
JP
Japan
Prior art keywords
layer
ductile
circuit
conductive
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019501694A
Other languages
Japanese (ja)
Other versions
JP2019525466A (en
Inventor
志▲剛▼ ▲呉▼
志▲剛▼ ▲呉▼
斌 朱
斌 朱
▲鵬▼ 彭
▲鵬▼ 彭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huazhong University of Science and Technology
Original Assignee
Huazhong University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huazhong University of Science and Technology filed Critical Huazhong University of Science and Technology
Publication of JP2019525466A publication Critical patent/JP2019525466A/en
Application granted granted Critical
Publication of JP6796703B2 publication Critical patent/JP6796703B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0058Laminating printed circuit boards onto other substrates, e.g. metallic substrates
    • H05K3/0064Laminating printed circuit boards onto other substrates, e.g. metallic substrates onto a polymeric substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0502Patterning and lithography
    • H05K2203/0531Decalcomania, i.e. transfer of a pattern detached from its carrier before affixing the pattern to the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

本発明は、延性回路の製造分野に属し、具体的には、ロールツーロール方法で延性回路を製造することに関する。
The present invention belongs to the field of manufacturing ductile circuits, and specifically relates to manufacturing ductile circuits by a roll-to-roll method.

延性電子技術は、有機/無機材料電子機器を延性プラスチック又は薄い金属基板上に製造する新規電子技術に総括でき、その特有の質量が軽い、厚さが薄い、拡張性を有する等の利点により、情報、エネルギー、医療、国防等の分野において、例えば、フレキシブル電子ディスプレイ、有機発光ダイオードOLED、印刷RFID、薄膜太陽電池パネル、バイオニック電子スキン、スマートウェアラブルデバイス等、広範な応用の見通しを持っている。延性電子技術は、電子技術革命をもたらし、全世界の幅広い関心を引き起こし、迅速な発展が得られる可能性がある。米国≪サイエンス≫雑誌は、有機電子技術の発展を2000年の世界十大科学技術成果の一つに挙げ、人類のゲノムスケッチ(human genome sketch)、バイオクローン技術(bio-cloning technology)等の重大な発見と並べられている。 Dexterity electronic technology can be summarized as a new electronic technology for manufacturing organic / inorganic material electronic devices on ductile plastic or thin metal substrates, due to its unique advantages such as light weight, thin thickness, and expandability. In the fields of information, energy, medical care, national defense, etc., it has a wide range of applications prospects such as flexible electronic displays, organic light emitting diode OLEDs, printing RFIDs, thin film solar panel, bionic electronic skins, smart wearable devices, etc. .. Ductile electronic technology will bring about an electronic technology revolution, raise widespread interest around the world, and have the potential for rapid development. The US «Science» magazine cites the development of organic and electronic technology as one of the world's top ten scientific and technological achievements in 2000, and is important for human genome sketch, bio-cloning technology, etc. It is lined up with various discoveries.

従来のIC技術と同じく、製造プロセス及び装置もフレキシブル/延性電子技術の発展の主な駆動力である。延性回路はフレキシブル回路の柔軟性に基づき、延性可能な特性が更に加えられるが、製造プロセスにおいて、両者は、大きく異なり、主に前者は材料に対する要求がより高い。 Like conventional IC technology, manufacturing processes and equipment are the main drivers of the development of flexible / ductile electronic technology. The ductile circuit is based on the flexibility of the flexible circuit and further has ductile properties, but in the manufacturing process, the two are very different, mainly the former is more demanding on the material.

出願番号201510638404.8の中国特許出願は、感光樹脂層を除去可能な補助基板上に形成し、感光樹脂を選択的に除去して特定の溝を形成し、溝内に導電金属を充填して、感光樹脂表面を平坦にし、最後に基板を除去してから、感光樹脂を埋め込んだ延性回路基板を形成する延性回路基板の製造方法を公開している。 In the Chinese patent application of application number 20151063840.4.8, the photosensitive resin layer is formed on a removable auxiliary substrate, the photosensitive resin is selectively removed to form a specific groove, and the groove is filled with a conductive metal. A method for manufacturing a ductile circuit board, which forms a ductile circuit board in which a photosensitive resin is embedded after flattening the surface of the photosensitive resin and finally removing the substrate, is disclosed.

出願番号201310090363.4の中国特許出願は、静電紡糸(electrostatic spinning)によってシリコンプレートに一次波紋パターンを書き出し、それから、予め引っ張った弾性基材上に転写し、弾性基材が自然な状態に回復した後、二次波紋構造のパターンを形成する延性回路の相互接続構造の製造プロセスを公開している。 The Chinese patent application of application number 201310090363.4 writes a primary ripple pattern on a silicon plate by electrostatic spinning and then transfers it onto a pre-pulled elastic substrate to restore the elastic substrate to its natural state. After that, the manufacturing process of the interconnection structure of the ductile circuit that forms the pattern of the secondary ripple structure is disclosed.

全体的に、これらのフレキシブル/延性回路を製造する方法は、回路性能の改良に重点が置かれており、大量生産時に、加工効率の点において、いずれも大きな欠陥が存在し、且つ、延性回路全体を製造する全ての加工プロセスに対して集積及び一体化されておらず、効率の点において更に制限される。 Overall, the methods of manufacturing these flexible / ductile circuits are focused on improving circuit performance, and during mass production, all have major defects in terms of processing efficiency, and ductile circuits. It is not integrated and integrated for all processing processes that make the whole, further limiting in terms of efficiency.

したがって、新しい延性回路の製造方法を開発する必要があり、大量生産時に、大きな加工効率を有することが要求される。
Therefore, it is necessary to develop a new method for manufacturing a ductile circuit, and it is required to have a large processing efficiency at the time of mass production.

従来技術の以上の欠陥又は改善要求について、本発明は、延性回路の製造プロセスとロールツーロール移動ステージとを結合することで、延性回路の生産効率を大幅に高めることを目的とする、ロールツーロールを結合した延性回路の製造方法を提供する。 With respect to the above defects or improvement requirements of the prior art, the present invention aims to significantly improve the production efficiency of the ductile circuit by combining the manufacturing process of the ductile circuit with the roll-to-roll moving stage. Provided is a method for manufacturing a ductile circuit in which rolls are coupled.

上記目的を実現するために、本発明の一つの方面に基づき、“ロールツーロール”プロセス(roll−to−roll process)を用い、具体的に以下のステップを含む延性回路の製造方法を提供する:
S1:導電層と第一補助基板層とをラミネートして、ロール材を形成し、前記ロール材の一端を初期フィード巻き出し端として、巻き出す、
S2:巻き出されたロール材導電層上にパターニングを行い、所望の回路構造を製造し、そのうち、パターニングを行う方法は、ペアローラの機械的消去、ダイカット、バイオエッチング、ケミカルエッチング又はレーザーパターニングを含む、
S3:基板が設けられた第一弾性体層をフィード端として、ペアローラ間に送り込み、ペアローラのプレス及び粘着力の差によって、回路構造を第一弾性体層表面に転写し、それから第一補助基板層をスクラップとして巻き取り除去する、
S4:第二補助基板層によって搭載されたチップを回路構造の対応する位置に送り、チップと第一弾性体表面の回路構造を位置合わせし、ペアローラのプレスによって、チップと回路構造を一つに組み立て、それから、第二補助基板層をスクラップとして巻き取り除去し、延性回路層の半製品を得る、
S5:第三補助基板層が設けられた第二弾性体層をフィード端として、対応するペアローラ間に送り込み、ペアローラのプレス及び粘着力の差によって、第二弾性体層を延性回路層の半製品表面に転写し、第二弾性体層は、延性回路層の半製品のパッケージング層に用いられ、パッケージング完了後、第三補助基板層をスクラップとして巻き取り除去し、延性回路を得る。
In order to achieve the above object, a method for manufacturing a ductile circuit including the following steps is specifically provided by using a "roll-to-roll process" based on one aspect of the present invention. :
S1: conductive layer and by laminating the first auxiliary substrate layer to form a roll material, one end of the roll material as an end unwinding initial feed, to output winding,
S2: winding out has been subjected to patterning to roll material conductive layer, to produce a desired circuit structures, of which a method of performing patterning includes mechanical erasing Pearora, die cut, bio etching, chemical etching or laser patterning ,
S3: The first elastic layer on which the substrate is provided is used as a feed end and fed between the pair rollers, and the circuit structure is transferred to the surface of the first elastic layer by the difference in the press and adhesive force of the pair rollers, and then the first auxiliary substrate. Take up and remove the layer as scrap,
S4: The chip mounted by the second auxiliary substrate layer is sent to the corresponding position of the circuit structure, the chip and the circuit structure on the surface of the first elastic body are aligned, and the chip and the circuit structure are united by pressing the pair roller. Assemble, then wind up and remove the second auxiliary substrate layer as scrap to obtain a semi-finished ductile circuit layer,
S5: The second elastic body layer provided with the third auxiliary substrate layer is used as a feed end and fed between the corresponding pair rollers, and the second elastic body layer is a semi-finished product of the ductile circuit layer due to the difference in press and adhesive force of the pair rollers. Transferred to the surface, the second elastic layer is used as a semi-finished packaging layer of the ductile circuit layer, and after the packaging is completed, the third auxiliary substrate layer is wound up and removed as scrap to obtain a ductile circuit.

上記プロセスは、典型的な最も基本的なプロセスフローであり、具体的な延性回路の構造要求に基づき、原料巻き出し及びスクラップ巻き取りプロセス、パターニングプロセス、転写プロセス等を組合わせてもよく、回路の直列及び並列等のような組合わせ、例えば、多層の回路層を製造しようとする場合、複数回のパターニング、回路層間の中間弾性体層の転写、回路層間接続導体の転写等のステップを行うことが必要になる。 The above process is a typical most basic process flow, and a raw material unwinding and scrap winding process, a patterning process, a transfer process, etc. may be combined based on a specific structural requirement of a ductile circuit. In a combination such as series and parallel, for example, when manufacturing a multi-layer circuit layer, steps such as patterning a plurality of times, transferring an intermediate elastic layer between circuit layers, and transferring a circuit interlayer connecting conductor are performed. Is needed.

更に、前記導電層は、導電金属薄膜と非金属材質の導電薄膜から選ばれ、前記導電金属薄膜は、銅箔、アルミ箔、金箔、銀箔及び鉄薄膜を含み、前記非金属材質の導電薄膜は、シリコン薄膜、導電ポリマー薄膜、導電セラミクス及び導電ヒドロゲルを含む。原則的に、導体とすることができる材料であればよく、導電薄膜の厚さは20μm以下が好ましい。 Further, the conductive layer is selected from a conductive metal thin film and a conductive thin film made of a non-metallic material, the conductive metal thin film includes a copper foil, an aluminum foil, a gold foil, a silver foil and an iron thin film, and the conductive thin film made of the non-metallic material is , Silicon thin film, conductive polymer thin film, conductive ceramics and conductive hydrogel. In principle, any material may be used as a conductor, and the thickness of the conductive thin film is preferably 20 μm or less.

更に、前記第一、第二弾性体層は、シリカゲル(silica gel)であってもよく、例えば、一般的なポリジメチルシロキサン(PDMS)又はブチレンアジぺート及びブチレンテレフタレートの共重合体(ECOFLEX)等を有し、良好な拡張性、断裂伸長性等の利点を有し、熱可塑性ポリウレタン(TPU)やヒドロゲル等の弾性体ゴムであってもよく、前記弾性体層の厚さは、製造される延性回路の具体的な用途によって確定すればよい。 Further, the first and second elastic layers may be silica gel, for example, general polydimethylsiloxane (PDMS) or a copolymer of butylene adipate and butylene terephthalate (ECOFLEX) and the like. It has advantages such as good expandability and tear elongation, and may be an elastic rubber such as thermoplastic polyurethane (TPU) or hydrogel, and the thickness of the elastic layer is manufactured. It may be determined according to the specific use of the ductile circuit.

更に、前記補助基板層の表面に一層の粘着剤層を加えてもよく、これは、被搭載物を固定し易くし、転写プロセスにおける粘着力の差の要求を満たすためである。 Further, a single pressure-sensitive adhesive layer may be added to the surface of the auxiliary substrate layer in order to facilitate fixing of the mounted object and to satisfy the demand for a difference in adhesive strength in the transfer process.

更に、チップ及び弾性体を保護するために、該プロセスに入る前に、その他の物体の衝突等の物理的な影響を受けず、性能の信頼性を保証するために、対応するロール材のチップや弾性体表面に一層の保護層を更に加えてもよく、つまり、該ロール材は、補助基板層、チップ/弾性体、保護層の三層からなり、対応するプロセスに入る前に、1つの剥離装置を更に加えて保護層を除去しても良い。チップや弾性体を直接ロボットアーム等の方式によって補助基板上にピックアップ、セットして、送られる。それによって、ロール材内部に入って、隣接する層の補助基板に衝突、影響されることを回避してもよい。同様に、プロセスの最後に、パッケージングされた延性回路全体を保護するために、表面に一層の類似する保護層を加えて、巻き取りリンクに再び入ってもよく、又は直接ロボットアーム等の方式によって完成品収集装置にピックアップして、セットしても良い。 In addition, to protect the chips and elastic bodies, the corresponding roll material chips to ensure performance reliability without being physically affected by collisions with other objects before entering the process. A single layer of protective layer may be added to the surface of the elastic body, that is, the roll material consists of three layers, an auxiliary substrate layer, a chip / elastic body, and a protective layer, one before entering the corresponding process. The protective layer may be removed by further adding a peeling device. Chips and elastic bodies are directly picked up and set on an auxiliary board by a method such as a robot arm, and then sent. As a result, it is possible to avoid entering the inside of the roll material and colliding with and being affected by the auxiliary substrate of the adjacent layer. Similarly, at the end of the process, one layer of similar protective layer may be added to the surface to protect the entire packaged ductile circuit and re-enter the take-up link, or a method such as a robot arm directly. You may pick it up in the finished product collection device and set it.

更に、前記補助基板、基板又は保護層は、ポリエチレンテレフタレート類プラスチック(PET)、ポリカーボネート(PC)、ポリエチレン(PE)、ポリ塩化ビニル(PVC)、ポリプロピレン(PP)等の薄膜であってもよい。実質的に、上記プラスチック薄膜に限定されず、被搭載物を搭載できる一定の強度を有していればよく、実用上、変形しない薄膜材料であればよい。 Further, the auxiliary substrate, the substrate or the protective layer may be a thin film such as polyethylene terephthalate plastic (PET), polycarbonate (PC), polyethylene (PE), polyvinyl chloride (PVC), polypropylene (PP) or the like. Substantially, it is not limited to the above-mentioned plastic thin film, and any thin film material that does not deform in practice may be used as long as it has a certain strength that allows the mounted object to be mounted.

更に、前記ステップS4において、チップと回路間の具体的な組み立て方式は限定されず、例えば、導電性接着剤又は溶接方式により接続してもよく、回路構造のチップ実装位置に導電性接着剤やはんだペースト等の補助物質を予め適用するといった、対応するステップをプロセス中に加えてもよい。 Further, in step S4, the specific assembly method between the chip and the circuit is not limited, and for example, it may be connected by a conductive adhesive or a welding method, and a conductive adhesive or a conductive adhesive may be used at the chip mounting position of the circuit structure. Corresponding steps may be added during the process, such as pre-applying an auxiliary material such as solder paste.

更に、パッケージングされた延性回路全体を後処理して、最後に巻き取るステップS6を更に含む。前記ステップS6中の後処理は、延性回路全体の更なる強化であり、例えば、パッケージングの信頼性や回路の安定性を高め、その他の操作によって、製造された製品を直接二次加工してもよく、例えば、所望の目標物体の二次元表面や三次元表面に固定する。 Further including step S6 of post-processing the entire packaged ductile circuit and finally winding it up. The post-treatment in step S6 is a further enhancement of the entire ductile circuit, for example, to improve packaging reliability and circuit stability, and to directly secondary process the manufactured product by other operations. Also, for example, it is fixed to a two-dimensional surface or a three-dimensional surface of a desired target object.

更に、導電層と補助基板層のラミネーション、転写の実行、補助基板層の分離、チップの組立、保護層の剥離及びラミネーション等の全体のプロセスの適切なステップに、加熱又は冷却装置を加えて、プロセスをスムーズに進行するために補助することができる。 In addition, heating or cooling devices are added to the appropriate steps of the entire process, such as lamination of the conductive and auxiliary substrate layers, execution of transfer, separation of the auxiliary substrate layers, chip assembly, stripping of the protective layer and lamination. It can assist in the smooth progress of the process.

以上より、本発明の構想とする上記技術案を従来技術と比較することで、以下の有益な効果が得られる。
延性回路を製造する全プロセスは、基板層のセット、導電層の製造、導電層と基板層との貼り合わせ、チップの実装、製品の収集などのプロセス工程は、“ロールツーロール”の設計構想によって一体に統合されて、延性回路製造の自動化を実現し、ロールツーロール方式の利点を充分に利用して、延性回路製造の高効率を実現する。
From the above, the following beneficial effects can be obtained by comparing the above technical proposal as the concept of the present invention with the prior art.
The entire process of manufacturing a ductile circuit is a "roll-to-roll" design concept, such as setting the substrate layer, manufacturing the conductive layer, bonding the conductive layer and the substrate layer, mounting the chip, and collecting the product. It is integrated together to realize the automation of the ductile circuit manufacturing, and realizes the high efficiency of the ductile circuit manufacturing by fully utilizing the advantages of the roll-to-roll method.

本発明の方法実施形態によって延性回路製造の巻き出し及びラミネーションを完了する構造模式図である。It is a structural schematic diagram which completes unwinding and lamination of ductile circuit manufacturing by the method embodiment of this invention. 本発明の方法実施形態によって延性回路製造時の延性回路全体に保護層を加えることと最後の巻き取りを完了する構造模式図である。It is a structural schematic diagram which adds a protective layer to the whole ductile circuit at the time of manufacturing a ductile circuit, and completes the final winding by the method embodiment of this invention. (a)、(b)は、本発明の実施形態の2種類の異なる転写方式の構造模式図である。(A) and (b) are structural schematic diagrams of two different transfer methods according to the embodiment of the present invention. 本発明の方法実施形態によって延性回路製造を完了する時の全体のフロー模式図である。It is a schematic diagram of the whole flow at the time of completing the ductile circuit manufacturing by the method embodiment of this invention.

全ての図面において、同じ図面の標記は、同じ部材又は構造を表す。ここで、100はフィードローラを表し、200はペアローラを表し、300はレシーブローラを表し、400は補助ローラを表し、500は分離ローラを表し、600はパターンニング装置を表し、aはパターンニング後の導電層であり、bは弾性体層であり、cはチップであり、d、eはそれぞれ第一、第二半製品であり、fはパッケージングされた延性回路全体である。 In all drawings, the markings in the same drawing represent the same member or structure. Here, 100 represents a feed roller, 200 represents a pair roller, 300 represents a receive roller, 400 represents an auxiliary roller, 500 represents a separation roller, 600 represents a patterning device, and a represents after patterning. Is a conductive layer, b is an elastic layer, c is a chip, d and e are first and second semi-finished products, respectively, and f is the entire packaged ductile circuit.

本発明の目的、技術案及び利点を更に明確にするために、以下に図面と実施形態を結合して、本発明を更に詳細に説明する。理解すべきこととして、ここで述べる具体的な実施形態は、本発明を説明するためだけのものであって、本発明を限定するためのものではない。また、以下に述べる本発明の各実施方式が関与する技術的特徴は、互いに衝突しなければ、互いに結合してもよい。 In order to further clarify the object, technical proposal and advantages of the present invention, the present invention will be described in more detail by combining the drawings and the embodiments below. It should be understood that the specific embodiments described herein are for the purpose of explaining the present invention and not for limiting the present invention. In addition, the technical features involved in each of the embodiments of the invention described below may be combined with each other as long as they do not collide with each other.

図1は、本発明の方法実施形態によって延性回路製造の巻き出し及びラミネーションを完了する構造模式図である。ここで、2本のフィードローラ100は、それぞれ導電層と補助基板層とをフィードし、ペアローラ200は、両者のラミネーションを完了させる。 FIG. 1 is a schematic structural diagram for completing unwinding and lamination of ductile circuit manufacturing according to the method embodiment of the present invention. Here, the two feed rollers 100 feed the conductive layer and the auxiliary substrate layer, respectively, and the pair roller 200 completes the lamination of both.

図2は、本発明の方法実施形態によって延性回路製造時の延性回路全体に保護層を加えることと最後の巻き取りを完了する方法、即ち、送られてきたパッケージングされた延性回路全体を得る方法であり、まず、ペアローラ200を用いて、それに対して一層の表面の保護層を加えて、巻き取り後にその他の基板の影響を受けないことを保証し、その後、完成品ロール材の巻き取りを行う。 FIG. 2 shows a method of adding a protective layer to the entire ductile circuit during manufacturing of the ductile circuit and completing the final winding according to the method embodiment of the present invention, that is, obtaining the entire packaged ductile circuit sent. The method is as follows: First, a pair roller 200 is used to add a layer of surface protective layer to it to ensure that it is not affected by other substrates after winding, and then winding the finished roll material. I do.

図3の(a)、(b)は、本発明の実施形態の2種類の異なる転写方式の構造模式図である。2種類の方式はいずれもペアローラ機構によって転写が実現されるが、図3(a)は、転写前後で、主体の基板に変更が発生したことを表し、図3(b)は、転写前後で、主体の基板に変更が発生しないことを表し、2種類の方式はいずれも補助基板を回収し、図3にあるように、レシーブローラ300は、補助基板を回収するのに用いられる。 (A) and (b) of FIG. 3 are structural schematic views of two different transfer methods according to the embodiment of the present invention. In both of the two methods, transfer is realized by a pair roller mechanism, but FIG. 3 (a) shows that a change has occurred in the main substrate before and after transfer, and FIG. 3 (b) shows before and after transfer. , Representing that no change occurs in the main substrate, both of the two methods collect the auxiliary substrate, and as shown in FIG. 3, the receive roller 300 is used to collect the auxiliary substrate.

実際の工程の実施において、具体的な転写効果の要求に基づき、被転写物と転写受容体とが接触し始めてから、転写が終了し両者が分離するまで、この接触長さを調整したり、又は、中間にペアローラを追加したりして、転写効果を高めることができる。図3(a)にあるように、接触長さは、ペアローラ200から分離ローラ500までであり、図3(b)は、ペアローラ200においてのみ接触し、図3(a)のペアローラ200と分離ローラ500の間にペアローラを更に加えて転写を補助してもよい。 In the actual implementation of the process, based on the specific requirements for the transcription effect, the contact length may be adjusted from the start of contact between the object to be transferred and the transcription receptor until the transfer is completed and the two are separated. Alternatively, a pair roller can be added in the middle to enhance the transfer effect. As shown in FIG. 3A, the contact length is from the pair roller 200 to the separation roller 500, and FIG. 3B is in contact only with the pair roller 200 and is in contact with the pair roller 200 of FIG. 3A and the separation roller. A pair of rollers may be added during the 500 to assist the transfer.

以上の巻き取り、巻き出し及び転写方式を結合すると、本発明の方法は、ロールツーロールによって延性回路製造を実現する完全なフロー模式図は図4に示すように提供され、以下のステップを含む。
S1:ロール材に形成した導電層と第一補助基板層をそれぞれ2本のフィードローラ100によって巻き出し、ラミネーション機構200によってラミネートする。
S2:導電層をパターニングする。即ち、ペアローラの機械的消去、ダイカット、ケミカルエッチング、バイオエッチング、レーザー等の方式のパターニングの方法によって導電層に対してパターンを選択的に製造して、所望の導電層aを得る。
S3:製造された導電層aを基板付きの第一弾性体層b上に転写する。即ち、フィードローラ100によって基板層によって搭載されている第一弾性体層bを巻き出し、粘着力の差によって、導電層aを第一弾性体層b表面に転写し、第一半製品dを得て、それから、第一補助基板層をスクラップとして、レシーブローラ300によって巻き取る。
S4:回路チップの組み立て、即ち、フィードローラ100を用いて第二補助基板層によって搭載されたチップcを第一弾性体層b表面の導電層aに対応する位置付近に送ってから、機械視覚等の方式で位置合わせを行って組み立てて、第二半製品eを得て、それから、第二補助基板層をスクラップとして、レシーブローラ300によって巻き取る。
S5:延性回路のパッケージング、即ち、フィードローラ100を用いて第三補助基板層によって搭載された第二弾性体層bにフィードを行い、再度転写方式によって、第二弾性体層bをチップが組み立てられた延性回路半製品の表層として、パッケージングを完了し、延性回路全体fを得て、それから、第三補助基板層をスクラップとして、レシーブローラ300によって巻き取る。
S6:パッケージングされた延性回路全体fを後処理及びその他の操作を行い、最後にレシーブローラ300によって最終巻き取りを行う。
Combining the above winding, unwinding and transfer methods, the method of the present invention provides a complete flow schematic for roll-to-roll ductile circuit fabrication as shown in FIG. 4, including the following steps. ..
S1: The conductive layer and the first auxiliary substrate layer formed on the roll material are each unwound by two feed rollers 100 and laminated by the lamination mechanism 200.
S2: The conductive layer is patterned. That is, a pattern is selectively produced on the conductive layer by a patterning method such as mechanical erasing of a pair roller, die cutting, chemical etching, bio-etching, or laser to obtain a desired conductive layer a.
S3: The manufactured conductive layer a is transferred onto the first elastic layer b with a substrate. That is, the first elastic layer b mounted by the substrate layer is unwound by the feed roller 100, the conductive layer a is transferred to the surface of the first elastic layer b due to the difference in adhesive strength, and the first semi-finished product d is produced. The first auxiliary substrate layer is then scrapped and wound up by the receive roller 300.
S4: Assembling the circuit chip, that is, using the feed roller 100, the chip c mounted by the second auxiliary substrate layer is sent to the vicinity of the position corresponding to the conductive layer a on the surface of the first elastic body layer b, and then mechanical visual observation is performed. The second semi-finished product e is obtained by aligning and assembling by a method such as, and then the second auxiliary substrate layer is taken up as scrap by a receive roller 300.
S5: Packaging of the ductile circuit, that is, feeding to the second elastic body layer b mounted by the third auxiliary substrate layer using the feed roller 100, and again by the transfer method, the chip attaches the second elastic body layer b. As the surface layer of the assembled ductile circuit semi-finished product, packaging is completed to obtain the entire ductile circuit f, and then the third auxiliary substrate layer is taken up as scrap by the receive roller 300.
S6: The entire packaged ductile circuit f is post-processed and other operations are performed, and finally the final winding is performed by the receive roller 300.

上記プロセスは、典型的な最も基本的なフローであり、図1〜図3の方式のプロセス接続を如何にして行うのか説明するためだけのものである。 The above process is a typical and most basic flow, and is only for explaining how to perform the process connection of the methods of FIGS. 1 to 3.

実際の工程の実施において、具体的な延性回路の構造要求に基づき、原料巻き出し及びスクラップ巻き取りプロセス、パターニングプロセス、転写プロセス等を組合わせてもよく、回路の直列及び並列等の組合わせに類似しており、例えば、多層の回路層を製造しようとする場合、複数回のパターニング、回路層間の中間弾性体層の転写、回路層間の接続導体の転写等のステップが必要になる。 In the actual implementation of the process, the raw material unwinding and scrap winding processes, the patterning process, the transfer process, etc. may be combined based on the specific structural requirements of the ductile circuit, and the combination of the circuits in series and in parallel, etc. Similar, for example, when trying to manufacture a multi-layered circuit layer, steps such as multiple patterning, transfer of an intermediate elastic layer between circuit layers, and transfer of a connecting conductor between circuit layers are required.

また、図4は、いくつかの例えば、ガイドローラ、訂正構造、張力測定及び制御等、実際のロールツーロールプロセスに必要な装置も省略している。 FIG. 4 also omits some equipment required for the actual roll-to-roll process, such as guide rollers, correction structures, tension measurement and control.

更に、前記ステップS4において、チップと回路間の具体的な組み立て方式は限定されず、例えば、導電性接着剤により接続方式や溶接方式のいずれでもよく、回路構造のチップ実装位置に導電性接着剤やはんだペースト等の補助物質を予め適用するといった、対応するステップをプロセス中に加えてもよい。 Further, in step S4, the specific assembly method between the chip and the circuit is not limited, and for example, a connection method or a welding method may be used depending on the conductive adhesive, and the conductive adhesive may be placed at the chip mounting position of the circuit structure. Corresponding steps may be added during the process, such as pre-applying ancillary materials such as or solder paste.

更に、前記ステップS6の後処理は、延性回路全体の更なる強化であってもよく、例えば、パッケージングの信頼性及び回路の安定性を高め、その他の操作によって、製造された完成品を直接二次加工してもよく、例えば、所望の目標物体の二次元表面や三次元表面に固定する。 Further, the post-treatment of step S6 may be a further enhancement of the entire ductile circuit, for example, to enhance the reliability of the packaging and the stability of the circuit, and to directly produce the finished product produced by other operations. Secondary processing may be performed, for example, fixing to a two-dimensional surface or a three-dimensional surface of a desired target object.

具体的には、前記導電層は、導電金属薄膜と非金属材質の導電薄膜から選ばれ、前記導電金属薄膜は、銅箔、アルミ箔、金箔、銀箔及び鉄薄膜を含み、前記非金属材質の導電薄膜は、シリコン薄膜、導電ポリマー薄膜、導電セラミクス及び導電ヒドロゲルを含む。原則的に、導体とできる材料であればよく、導電薄膜の厚さは20μm以下が好ましい。原則的に、導体とすることができる材料であればよい。 Specifically, the conductive layer is selected from a conductive metal thin film and a conductive thin film made of a non-metallic material, and the conductive metal thin film includes a copper foil, an aluminum foil, a gold foil, a silver foil and an iron thin film, and is made of the non-metallic material. Conductive thin films include silicon thin films, conductive polymer thin films, conductive ceramics and conductive hydrogels. In principle, any material can be used as a conductor, and the thickness of the conductive thin film is preferably 20 μm or less. In principle, any material that can be used as a conductor will do.

前記弾性体層は、シリカゲルであってもよく、例えば、一般的なポリジメチルシロキサン(PDMS)又はブチレンアジぺート及びブチレンテレフタレートの共重合体(ECOFLEX)等を有し、良好な拡張性、断裂伸長性等の利点を有し、熱可塑性ポリウレタン(TPU)やヒドロゲル等の弾性体ゴムであってもよく、前記弾性体層の厚さは、製造される延性回路の具体的な用途によって確定すればよい。 The elastic layer may be silica gel, and has, for example, general polydimethylsiloxane (PDMS) or a copolymer of butylene adipate and butylene terephthalate (ECOFLEX), and has good expandability and tear elongation. It may be an elastic rubber such as thermoplastic polyurethane (TPU) or hydrogel, which has advantages such as properties, and the thickness of the elastic layer is determined by the specific use of the ductile circuit to be manufactured. Good.

前記補助基板/基板/保護層は、ポリエチレンテレフタレート類プラスチック(PET)、ポリカーボネート(PC)、ポリエチレン(PE)、ポリ塩化ビニル(PVC)、ポリプロピレン(PP)等の薄膜であってもよく、実質的に、上記プラスチック薄膜に限定されず、被搭載物を搭載できる一定の強度を有していればよく、実用上、変形しない薄膜材料であればよく、導電層と接触するものに対して絶縁特性を更に必要とする。 The auxiliary substrate / substrate / protective layer may be a thin film such as polyethylene terephthalate plastic (PET), polycarbonate (PC), polyethylene (PE), polyvinyl chloride (PVC), polypropylene (PP), and is substantially. In addition, it is not limited to the above-mentioned plastic thin film, as long as it has a certain strength for mounting an object to be mounted, and practically, it may be a thin film material that does not deform, and has insulating properties against a material that comes into contact with a conductive layer. Need more.

本発明において、主に、転写によって、目標物体が一つの物体表面から別の物体表面に移されるプロセスを実現するものである。転写は、一つの目標物体が二つの物体と同時に接触してから分離する時に、目標物体と両側の物体間の粘着力の大きさに差が存在するため、粘着力が大きい方の物体上に粘着する傾向がある一種のプロセスである。本発明の方法において、被搭載物を固定し易くし、異なる転写プロセスにおける粘着力の差の要求を満たすために、前記補助基板層の表面に特定の大きさの粘着力を有する粘着剤層を加えてもよい。 In the present invention, it mainly realizes a process in which a target object is transferred from one object surface to another by transfer. In transfer, when one target object comes into contact with two objects at the same time and then separates, there is a difference in the amount of adhesive force between the target object and the objects on both sides, so the transfer is performed on the object with the larger adhesive force. It is a kind of process that tends to stick. In the method of the present invention, an adhesive layer having a specific size of adhesive force is provided on the surface of the auxiliary substrate layer in order to facilitate fixing of the object to be mounted and to satisfy the demand for a difference in adhesive force in different transfer processes. May be added.

本発明において、チップ及び弾性体を保護するために、該プロセスに入る前に、その他の物体の衝突等の物理的な影響を受けず、性能の信頼性を保証するために、対応するロール材のチップや弾性体表面に一層の保護層を更に加えてもよく、つまり、該ロール材は、補助基板層、チップ/弾性体、保護層の三層からなる。対応するプロセスに入る前に、1つの剥離装置を更に加えて保護層を除去する。直接チップや弾性体をロボットアーム等の方式によって補助基板上にピックアップ、セットして、送られて、ロール材内部に入って、隣接する層の補助基板に衝突、影響されることを回避してもよい。同様に、プロセスの最後に、パッケージングされた延性回路全体を保護するために、表面に同様の一層の保護層を加えて、巻き取りリンクに再び入ってもよく、図2のフィードローラ100にあるように、一層の保護層を提供して最終的な回路を保護したり、ロボットアーム等の方式によって直接完成品収集装置にピックアップして、セットする。 In the present invention, in order to protect chips and elastic bodies, the corresponding roll material is to ensure the reliability of performance without being physically affected by collisions with other objects before entering the process. A further protective layer may be added to the surface of the chip or elastic body, that is, the roll material is composed of three layers of an auxiliary substrate layer, a chip / elastic body, and a protective layer. Before entering the corresponding process, one additional stripping device is added to remove the protective layer. Avoid directly picking up, setting, and sending chips and elastic bodies on the auxiliary board by a method such as a robot arm, entering the inside of the roll material, and colliding with and being affected by the auxiliary board of the adjacent layer. May be good. Similarly, at the end of the process, a similar layer of protective layer may be added to the surface to re-enter the take-up link to protect the entire packaged ductile circuit, to the feed roller 100 of FIG. As there is, a layer of protection is provided to protect the final circuit, or it is picked up and set directly on the finished product collection device by a method such as a robot arm.

本発明において、導電層と補助基板層とのラミネーション、転写の実行、補助基板層の分離、チップの組み立て、保護層の剥離及びラミネーション等のプロセス全体の適切な位置に、加熱又は冷却装置を加えて、プロセスをスムーズに進行するために補助することができる。 In the present invention, a heating or cooling device is added at an appropriate position in the entire process such as lamination between the conductive layer and the auxiliary substrate layer, execution of transfer, separation of the auxiliary substrate layer, chip assembly, peeling of the protective layer and lamination. It can assist in the smooth progress of the process.

本発明の“ロールツーロール移動ステージ”は、複数ペアの能動ローラや受動ローラを含む、又は複数ペアのペアローラを含み、ロールツーロールの英語名はRoll to Rollであり、国内では一般的にR2Rと略称され、主に、薄膜類材料に対する加工装置であり、ローラの能動回転や受動回転によって材料の高効率、低コストの加工方式を実現する。ある学者(Sukang Bae,Hyeongkeun Kim,Youngbin Lee, et al. Roll−to−roll production of 30−inch graphene films for transparent electrodes[J].Nature Nanotechnology, 2010, 5:5574−578. )は、このような方式でグラフェン電極を製造し、ある学者(Krebs F C, Gevorgyan S A, Alstrup J. A roll−to−roll process to flexible polymer solar cells: model studies, manufacture and operational stability studies[J]. Journal of Materials Chemistry, 2009, 19(30):5442−5451.)は、太陽電池を製造するために用いている。 The "roll-to-roll moving stage" of the present invention includes a plurality of pairs of active rollers and passive rollers, or includes a plurality of pairs of pair rollers, and the English name of the roll-to-roll is Roll to Roll, which is generally R2R in Japan. It is a processing device mainly for thin film materials, and realizes a high efficiency and low cost processing method for materials by active rotation and passive rotation of rollers. A scholar (Sukang Bee, Hyeongken Kim, Youngbin Lee, et al. Roll-to-roll product of 30-inch graphene films for Nature Nanotechnology, 10N. A scholar (Krebs FC, Govergyan SA, Alstrup J. A roll-to-roll process to flexibul polimer solar cells: model studios: model studios) Materials Chemistry, 2009, 19 (30): 5442-5451.) Are used to manufacture solar cells.

上述は本発明の好ましい実施形態でしかなく、本発明を制限するためではないことを当業者は容易に理解でき、本発明の精神と原則内で行われた補正、等価置換及び変更等は、いずれも本発明の保護範囲内に含まれる。




Those skilled in the art can easily understand that the above is only a preferred embodiment of the invention and not to limit the invention, and any amendments, equivalent substitutions, modifications, etc. made within the spirit and principles of the invention Both are included within the scope of protection of the present invention.




Claims (6)

“ロールツーロール”プロセスを用い、具体的に以下のステップを含むことを特徴とする延性回路の製造方法であって、
S1:導電層と第一補助基板層とをラミネートしてロール材を形成し、前記ロール材の一端を初期フィード巻き出し端として、巻き出し、
S2:巻き出されたロール材導電層上にパターニングを行い、所望の回路構造を製造し、パターニングを行う方法は、ペアローラの機械的消去、ダイカット、バイオエッチング、ケミカルエッチング又はレーザーパターニングを含み、
S3:基板が設けられた第一弾性体層をフィード端として、ペアローラ間に送り込み、ペアローラのプレス及び粘着力の差によって、回路構造を第一弾性体層表面に転写し、それから第一補助基板層をスクラップとして巻き取り除去し、
S4:第二補助基板層によって搭載されたチップを回路構造の対応する位置に送り、チップと第一弾性体表面の回路構造を位置合わせし、ペアローラのプレスによって、チップと回路構造を一つに組み立て、それから、第二補助基板層をスクラップとして巻き取り除去し、延性回路層の半製品を得、
S5:第三補助基板層が設けられた第二弾性体層をフィード端として、対応するペアローラ間に送り込み、ペアローラのプレス及び粘着力の差によって、第二弾性体層を延性回路層の半製品表面に転写し、第二弾性体層は、延性回路層の半製品のパッケージング層に用いられ、パッケージング完了後、第三補助基板層をスクラップとして巻き取り除去し、延性回路を得る、
延性回路の製造方法。
A method of manufacturing a ductile circuit using a "roll-to-roll" process and specifically including the following steps.
S1: by laminating the conductive layer and the first auxiliary substrate layer to form a roll material, one end of the roll material as an end unwinding initial feed, and exit wound,
S2: winding out has been subjected to patterning to roll material conductive layer, to produce a desired circuit structure, a method of performing patterning includes mechanical erasing Pearora, die cut, bio etching, chemical etching or laser patterning,
S3: The first elastic layer on which the substrate is provided is used as a feed end and fed between the pair rollers, and the circuit structure is transferred to the surface of the first elastic layer by the difference in the press and adhesive force of the pair rollers, and then the first auxiliary substrate. Take up and remove the layer as scrap,
S4: The chip mounted by the second auxiliary substrate layer is sent to the corresponding position of the circuit structure, the chip and the circuit structure on the surface of the first elastic body are aligned, and the chip and the circuit structure are united by pressing the pair roller. Assembled, then the second auxiliary substrate layer was wound up and removed as scrap to obtain a semi-finished ductile circuit layer.
S5: The second elastic body layer provided with the third auxiliary substrate layer is used as a feed end and fed between the corresponding pair rollers, and the second elastic body layer is a semi-finished product of the ductile circuit layer due to the difference in press and adhesive force of the pair rollers. Transferred to the surface, the second elastic layer is used as a semi-finished packaging layer of the ductile circuit layer, and after the packaging is completed, the third auxiliary substrate layer is wound up and removed as scrap to obtain a ductile circuit.
A method for manufacturing a ductile circuit.
前記導電層は、導電金属薄膜と非金属材質の導電薄膜から選ばれ、
前記導電金属薄膜は、銅箔、アルミ箔、金箔、銀箔及び鉄薄膜を含み、
前記非金属材質の導電薄膜は、シリコン薄膜、導電ポリマー薄膜、導電セラミクス及び導電ヒドロゲルを含むことを特徴とする請求項1に記載の延性回路の製造方法。
The conductive layer is selected from a conductive metal thin film and a non-metal conductive thin film.
The conductive metal thin film includes copper foil, aluminum foil, gold leaf, silver foil and iron thin film.
The method for manufacturing a ductile circuit according to claim 1, wherein the conductive thin film made of a non-metallic material includes a silicon thin film, a conductive polymer thin film, conductive ceramics, and a conductive hydrogel.
前記第一、第二弾性体層の材質は、シリカゲル、熱可塑性ポリウレタン及びヒドロゲルから選ばれることを特徴とする請求項2に記載の延性回路の製造方法。 The method for producing a ductile circuit according to claim 2, wherein the material of the first and second elastic layers is selected from silica gel, thermoplastic polyurethane, and hydrogel. 前記第一、第二、第三補助基板、前記基板の材質はいずれもポリエチレンテレフタレート類プラスチック、ポリカーボネート、ポリエチレン、ポリ塩化ビニル及びポリプロピレンから選ばれることを特徴とする請求項3に記載の延性回路の製造方法。 The ductile circuit according to claim 3, wherein the first, second, and third auxiliary substrates and the materials of the substrates are all selected from polyethylene terephthalates plastic, polycarbonate, polyethylene, polyvinyl chloride, and polypropylene. Production method. ステップS4において、回路構造とチップを強固に結合するのに用いられる導電性接着剤又ははんだペーストを回路構造上に設けることを特徴とする請求項4に記載の延性回路の製造方法。 The method for manufacturing a ductile circuit according to claim 4, wherein in step S4, a conductive adhesive or a solder paste used to firmly bond the circuit structure and the chip is provided on the circuit structure. パッケージングされた延性回路全体を後処理して、最後に巻き取るステップS6を更に含むことを特徴とする請求項1に記載の延性回路の製造方法。 The method of manufacturing a ductile circuit according to claim 1, further comprising step S6 of post-processing the entire packaged ductile circuit and finally winding it up.
JP2019501694A 2017-07-01 2017-11-24 Manufacturing method of ductile circuit Active JP6796703B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201710528331.6 2017-07-01
CN201710528331.6A CN107222974B (en) 2017-07-01 2017-07-01 A kind of ductility circuit fabrication method
PCT/CN2017/112770 WO2019006962A1 (en) 2017-07-01 2017-11-24 Method for manufacturing ductile circuit

Publications (2)

Publication Number Publication Date
JP2019525466A JP2019525466A (en) 2019-09-05
JP6796703B2 true JP6796703B2 (en) 2020-12-09

Family

ID=59951565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019501694A Active JP6796703B2 (en) 2017-07-01 2017-11-24 Manufacturing method of ductile circuit

Country Status (3)

Country Link
JP (1) JP6796703B2 (en)
CN (1) CN107222974B (en)
WO (1) WO2019006962A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107222974B (en) * 2017-07-01 2019-04-12 华中科技大学 A kind of ductility circuit fabrication method
CN108323025B (en) * 2018-02-01 2020-01-14 北京启创驿讯科技有限公司 Preparation method of printed circuit board and copper foil for processing
CN110739233B (en) * 2019-10-24 2021-08-24 京东方科技集团股份有限公司 Method for manufacturing flexible sensor
CN111885841B (en) * 2020-07-31 2023-04-07 西安工程大学 Preparation method of flexible stretchable conductive circuit
CN112275564B (en) * 2020-10-10 2022-03-01 山东华冠智能卡有限公司 Processing device based on graphene RFID antenna
CN112203432A (en) * 2020-10-13 2021-01-08 中山市立体光电科技有限公司 Method for manufacturing flat wire mesh circuit board
CN112888185A (en) * 2020-12-30 2021-06-01 江苏新澄瑞材料科技有限公司 Preparation method, product and application of flexible circuit
CN113543503B (en) * 2021-09-16 2021-12-10 新恒汇电子股份有限公司 Preparation method of conductive ceramic coating carrier tape
CN115709582B (en) * 2022-11-16 2024-05-28 中南大学 Roll-to-roll integrated high-efficiency manufacturing system of microfluidic chip

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0668722A (en) * 1992-08-24 1994-03-11 Mitsubishi Cable Ind Ltd Manufacture of flat wiring body
JP3495211B2 (en) * 1996-12-16 2004-02-09 京セラ株式会社 Transfer sheet for forming wiring board, method for manufacturing the same, and method for manufacturing wiring board
FR2760209B1 (en) * 1997-03-03 1999-05-21 Ier METHOD AND SYSTEM FOR ISSUING IDENTIFICATION TAGS
ATE276109T1 (en) * 2000-10-12 2004-10-15 Amedeo Candore MACHINE FOR HOT LAMINATION OF A DRY PHOTORESIST FILM TO A BOARD FOR A CIRCUIT BOARD
JP2002352206A (en) * 2001-05-30 2002-12-06 Toppan Forms Co Ltd Method for manufacturing data transmitting/receiving body
JP2003037352A (en) * 2001-07-25 2003-02-07 Nitto Denko Corp Method of manufacturing wiring circuit board
DE102004006457A1 (en) * 2004-02-04 2005-08-25 Bielomatik Leuze Gmbh + Co Kg Method and device for the continuous production of electronic film components
KR101254277B1 (en) * 2004-07-30 2013-04-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Laminating system, IC sheet, scroll of IC sheet, and method for manufacturing IC chip
DE102006044525B3 (en) * 2006-09-21 2008-01-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for production of integrated circuit, involves continuous making of flexible substrate having conductive strip structure, where flexible integrated circuit is connected with conductive strip structure of flexible substrate
KR100824067B1 (en) * 2007-01-19 2008-04-21 한국과학기술원 Printed circuit board manufacturing apparatus using friction electrification
CN101308953A (en) * 2008-07-04 2008-11-19 汤献维 Special membrane and method for manufacturing radio-frequency label antenna
US8361840B2 (en) * 2008-09-24 2013-01-29 Eastman Kodak Company Thermal barrier layer for integrated circuit manufacture
JP5351789B2 (en) * 2010-01-29 2013-11-27 サトーホールディングス株式会社 RFID label and method of processing RFID label
EP2355144A1 (en) * 2010-02-09 2011-08-10 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Component placement on flexible and/or stretchable substrates
KR101147988B1 (en) * 2010-07-13 2012-05-24 포항공과대학교 산학협력단 Method of manufacturing flexible electronic device using physical peel-off method, flexible electronic device and flexible substrate
JP2014075253A (en) * 2012-10-04 2014-04-24 Nitto Denko Corp Method for manufacturing organic electroluminescent device
CN104244585A (en) * 2013-07-04 2014-12-24 漳州市福世通电子有限公司 Process method for bonding between roll type FPC line base material and sheet type cover film
KR20170051695A (en) * 2015-10-30 2017-05-12 주식회사 잉크테크 Manufacturing Method for FPCB and Manufacturing Apparatus for FPCB
CN107222974B (en) * 2017-07-01 2019-04-12 华中科技大学 A kind of ductility circuit fabrication method

Also Published As

Publication number Publication date
CN107222974B (en) 2019-04-12
CN107222974A (en) 2017-09-29
WO2019006962A1 (en) 2019-01-10
JP2019525466A (en) 2019-09-05

Similar Documents

Publication Publication Date Title
JP6796703B2 (en) Manufacturing method of ductile circuit
Yan et al. Deterministic assembly of 3D mesostructures in advanced materials via compressive buckling: A short review of recent progress
KR101959576B1 (en) Metal foil pattern laminate, method for punching metal foil, circuit board, method for producing same, and solar cell module
CN106373983B (en) Flexible display panel and flexible display screen
TWI424348B (en) Flexible projective capacitive touch sensor structure
TWI407865B (en) Method for manufacturing rigid-flexible printed circuit board
EP3120381A1 (en) Flexible electronics apparatus and associated methods
CN105722317B (en) Rigid-flexible combination printed circuit board and preparation method thereof
JP2009520251A5 (en)
EP3013483B1 (en) Coating for aircraft fuselage surfaces to produce electricity for mission-critical systems on military aircraft
CN104145539B (en) The method for manufacturing flexible circuit
CN104105363B (en) Rigid-flex combined board and preparation method thereof
KR20200030069A (en) Photovoltaic device and method
CN106373917A (en) Manufacturing method for flexible display screen and preparing device for flexible display screen
CN106449817B (en) A kind of imitative fish scale structure solar cell and preparation method thereof
CN106531819A (en) Packaging film for solar cell, manufacturing method of packaging film and solar cell module packaging structure
US10910510B2 (en) Encapsulated flexible electronic device, and corresponding manufacturing method
KR20160071735A (en) Film Touch Sensor and Method for Fabricating the Same
CN113540314A (en) Photoelectric device, curved surface device and preparation method thereof
CN101640976A (en) Manufacturing method of flexible circuit board
KR102211774B1 (en) Method of preparing a Touch screen panel and Touch screen panel prepared by using the same
DE102016119906A1 (en) A method of manufacturing an optoelectronic device and an optoelectronic device produced by the method
CN102201390A (en) Chip on film (COF) packaging substrate for high-pixel camera module and manufacturing method thereof
CN109103147A (en) Flexible package framework, production method and the wearable device with the framework
CN102106035A (en) Antenna for chip card production

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190115

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190717

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20191225

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200128

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200422

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20201020

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20201116

R150 Certificate of patent or registration of utility model

Ref document number: 6796703

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250