CN107222974A - A kind of ductility circuit fabrication method - Google Patents

A kind of ductility circuit fabrication method Download PDF

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Publication number
CN107222974A
CN107222974A CN201710528331.6A CN201710528331A CN107222974A CN 107222974 A CN107222974 A CN 107222974A CN 201710528331 A CN201710528331 A CN 201710528331A CN 107222974 A CN107222974 A CN 107222974A
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China
Prior art keywords
layer
circuit
ductility
auxiliary substrate
conductive
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CN201710528331.6A
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CN107222974B (en
Inventor
吴志刚
朱斌
彭鹏
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Priority to CN201710528331.6A priority Critical patent/CN107222974B/en
Publication of CN107222974A publication Critical patent/CN107222974A/en
Priority to PCT/CN2017/112770 priority patent/WO2019006962A1/en
Priority to JP2019501694A priority patent/JP6796703B2/en
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0058Laminating printed circuit boards onto other substrates, e.g. metallic substrates
    • H05K3/0064Laminating printed circuit boards onto other substrates, e.g. metallic substrates onto a polymeric substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0502Patterning and lithography
    • H05K2203/0531Decalcomania, i.e. transfer of a pattern detached from its carrier before affixing the pattern to the substrate

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

The invention discloses a kind of ductility circuit fabrication method, using " volume to volume " formula technique, including:Conductive layer and the first auxiliary substrate are closed to be formed layer by layer by S1 is made coiled material after one, end is unreeled using one end of the coiled material as initial charge, expansion setting length after unreeling, S2 is patterned on the coiled material conductive layer of expansion setting length, circuit structure needed for preparing, S3 regard the first elastomer layer for being provided with substrate as feed end, feeding is to roller, circuit structure is transferred to the first elastomer layer surface, the first auxiliary substrate layer is removed again, S4 is using poor to roll press and viscous force, chip is fitted together with circuit structure, obtain ductility circuit layer semi-finished product, S5 is by the second elastomeric transfer to ductility circuit layer surface of semi-finished, second elastomer layer is used for the encapsulated layer of ductility circuit layer semi-finished product.The production efficiency of ductility circuit is greatly improved by the way that the technique for making ductility circuit is combined with volume to volume motion platform in the inventive method.

Description

A kind of ductility circuit fabrication method
Technical field
The invention belongs to the making field of ductility circuit, and in particular to ductility circuit is made of volume to volume method.
Background technology
Ductility electronics can be summarized as being that organic/inorganic materials electronic device is produced on into Drawability plastics or thin metal matrix plate On new electronic technology, the features such as with its unique light weight, thickness of thin, with ductility, in information, the energy, medical treatment, state The field such as anti-has wide application prospect, such as flexible electronic displays, Organic Light Emitting Diode OLED, printing RFID, film too Positive energy cell panel, bionic skin, intelligent wearable device etc..Ductility electronic technology is possible to bring an electronic technology leather Life, causes global extensive concern and is developed rapidly.The U.S.《Science》Organic electronic technical progress is classified as by magazine One of big scientific and technological achievement in the world ten in 2000, with human genome sketch, biological cloning technology etc. it is great find it is arranged side by side.
As traditional IC technology, manufacturing process and the main drive that equipment is also flexibility/ductility electronic technology development. Ductility circuit is on the basis of flexible circuit is flexible, to be further added by extendable characteristic, but in manufacture craft, both have Very big difference, mainly the former requirement to material is higher.
The Chinese patent application of Application No. 201510638404.8 discloses a kind of making side for making ductility circuit board Method, it is by the way that first by photosensitive resin layer formation in removable auxiliary substrate, selectivity removes photosensitive resin and forms specific Groove, conducting metal concordant photosensitive resin surface is then filled in groove, finally removes and embedded photosensitive resin is formed after substrate Ductility circuit board.
The Chinese patent application of Application No. 201310090363.4 discloses a kind of ductility circuit interconnection architecture of making Technique, it is that direct write goes out one-level wave pattern on silicon chip first with electrostatic spinning, is then transferred to the elastic substrate of pre-stretching On, elastic substrate is recovered after nature, forms the pattern of secondary wave line structure.
On the whole, these methods for making flexibility/ductility circuit all lay particular emphasis on the improvement to circuit performance, when in face of big When scale makes, all there is larger defect, and the whole overall not to making ductility circuit in processing efficiency this respect Processing technology be more limited in terms of integrated and integration, efficiency.
Accordingly, it would be desirable to develop a kind of new ductility circuit fabrication method, it is desirable to which it can have in extensive make Larger processing efficiency.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of manufacture ductility of combination volume to volume The method of circuit, it is intended that by the way that the technique for making ductility circuit is combined with volume to volume motion platform, prolonging production The efficiency of property circuit is greatly improved.
To achieve the above object, according to one aspect of the present invention there is provided a kind of ductility circuit fabrication method, use " volume to volume " technique, specifically includes following steps:
S1:Conductive layer and the first auxiliary substrate are closed to be formed layer by layer coiled material are made after one, using one end of the coiled material as Initial charge unreels end, expansion setting length after unreeling,
S2:Patterned on the coiled material conductive layer of expansion setting length, the circuit structure needed for preparing carries out pattern The method of change includes machinery to roller erasing, cross cutting, biological etching, chemical etching or laser patterning,
S3:Using the first elastomer layer for being provided with substrate as feed end, send into roller, by roll press and viscous force Difference, the first elastomer layer surface is transferred to by circuit structure, then is removed the first auxiliary substrate layer as waste material winding,
S4:The corresponding position of circuit structure will be transported to the chip of the second auxiliary substrate layer carrying, and make chip and the The circuit structure alignment of one surface of elastomer, using to roll press, chip is fitted together with circuit structure, then auxiliary by second Help basalis to wind as waste material to remove, obtain ductility circuit layer semi-finished product,
S5:Using the second elastomer layer for being provided with the 3rd auxiliary substrate as feed end, send between mutually reply roller, by right Roll press and viscous force are poor, and the second elastomer layer is transferred into ductility circuit layer surface of semi-finished, and the second elastomer layer is used for ductility The encapsulated layer of circuit layer semi-finished product, is completed after encapsulation, then winds removal using the 3rd auxiliary substrate as waste material, obtains ductility electricity Road.
Said process is a kind of typical most basic technological process, can be with according to specific ductility circuit structure demand Raw material is unreeled and is combined with waste material wrapup procedure, patterning process, transfer process etc., similar to the series connection and parallel connection of circuit Deng combination, such as to make multilayer circuit layer, then need repeatedly to be patterned, the intermediate elastomeric layer of circuit interlayer turns The steps such as print, the transfer of circuit interlayer connection conductor.
Further, the conductive layer is selected from the conductive film of conductive metal film and non-metallic material, the conductive gold Belonging to film includes copper foil, aluminium foil, goldleaf, silver foil and iron thin film, the conductive film of the non-metallic material include silicon material film, Conducting polymer thin film, conductivity ceramics and conductive hydrogel.As long as in principle can as conductor material, conductive thin The thickness of film is less than 20 microns more excellent.
Further, first, second elastomer layer can be silica gel, such as common are dimethyl silicone polymer (PDMS) or tetramethylene adipate and the copolymer of mutual-phenenyl two acid bromide two alcohol ester (ECOFLEX) etc., it has preferable The features such as ductility, extension at break or thermoplastic polyurethane (TPU) or hydrogel etc. elastomer rubber, it is described The thickness of elastomer layer is then determined according to the particular use of made ductility circuit.
Further, the surface of the auxiliary substrate layer can increase by one layer of glue line, and this is for the ease of fixed quilt Carrier and meet transfer process viscous force difference demand.
Further, in order to protect chip and elastomer enter the process before not by the physics shadow such as collision of other objects Ring and ensure performance reliability, layer protective layer can also be further added by the chip or surface of elastomer of respective web, i.e. the volume Material is further added by a stripping off device by auxiliary substrate layer, chip/elastomer, protective layer up of three layers before corresponding process is entered Protective layer is removed;Chip or elastomer can also directly be picked up by modes such as mechanical arms to be placed into auxiliary substrate and transmitted Come over, so as to avoid enter into inside coiled material and collide influence by the auxiliary substrate of adjacent layer.Similarly, it is last in technique, for protection Packaged ductility circuit is overall, and one layer of similar protective layer can also be added to enter back into winding link on its surface, or directly Finished product collection device is picked and placed into by modes such as mechanical arms.
Further, the auxiliary substrate, substrate or protective layer can be poly terephthalic acid class plastics (PET), gather The films such as carbonic ester (PC), polyethylene (PE), polyvinyl chloride (PVC), polypropylene (PP).Substantially, above-mentioned plastics are also not necessarily limited to Film, as long as with certain intensity, can carry carried thing, the thin-film material not deformed in real work is i.e. Can.
Further, in the step S4, the specific assembling mode between chip and circuit is not limited, such as using conduction Then increase corresponding steps in gemel connection or welding manner, technique, such as on the chip mounting location of circuit structure in advance Apply the auxiliary substance such as conducting resinl or soldering paste.
Further, in addition to step S6, step S6 are:Packaged ductility circuit is integrally post-processed, finally Winding.Post processing in the step S6 can to the overall further reinforcing of ductility circuit, such as improve the reliable of encapsulation Property and circuit stability, other operation can be directly by the finished product made carry out secondary operation, such as be fixed in The two-dimensional surface or three-dimensional surface of required target object.
Further, in the appropriate step of whole technique, laminated, transfer the progress of such as conductive layer and auxiliary substrate layer, The separation of auxiliary substrate layer, the assembling of chip, the stripping of protective layer and laminated etc., can add heating or cooling device with auxiliary Assistant engineer skill is smoothed out.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it can obtain down and show Beneficial effect:
By placement, the making of conductive layer, conductive layer and the basalis of whole techniques of ductility circuit production, including basalis The processing step such as bonding, the installation of chip, the collection of finished product integrated using the design concept of " volume to volume ", realize The automation of ductility circuit production, and the advantage of volume to volume mode is made full use of, realize the high efficiency of ductility circuit production.
Brief description of the drawings
Fig. 1 is to complete unreeling and laminated structural representation for ductility circuit production according to the inventive method embodiment;
Fig. 2 be according to the inventive method embodiment complete ductility circuit production when ductility circuit is integrally added protective layer and The structural representation finally wound;
Fig. 3 (a), (b) is two kinds of different transfer modes structural representations in the embodiment of the present invention;
Fig. 4 is the schematic flow sheet according to complete set during the inventive method embodiment completion ductility circuit production.
In all of the figs, identical reference is used for representing identical element or structure, wherein:
100 represent emptying roller, and 200 represent to roller, and 300 represent material receiving roller, and 400 represent help roll, and 500 represent separate roller, 600 represent patterning apparatus;A is the conductive layer after patterning, and b is elastomer layer, and c is chip, and d, e are respectively first, second Semi-finished product, f is overall for packaged ductility circuit.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below Not constituting conflict each other can just be mutually combined.
Fig. 1 is to complete unreeling and laminated structural representation for ductility circuit production according to the inventive method embodiment, its In:Two emptying rollers 100 carry out blowing to conductive layer and auxiliary substrate layer respectively, and the laminated of the two is completed to roller 200.
Fig. 2 be according to the inventive method embodiment complete ductility circuit production when ductility circuit is integrally added protective layer and The structural representation finally wound, that is, the packaged ductility circuit global approach conveyed, adds first with to roller 200 to it The protective layer of layer of surface, it is ensured that it can not be influenceed after winding by other substrates, carry out the winding of finished product coiled material again afterwards.
Fig. 3 (a), (b) is two kinds of different transfer modes structural representations in the embodiment of the present invention, and both of which is Realize and transfer with twin rollers structure, but in Fig. 3 before and after (a) figure representative transfer, the substrate of main body changes, (b) figure in Fig. 3 Represent before and after transfer, the substrate of main body does not change, and both of which is all reclaimed to auxiliary substrate, rewinding in such as Fig. 3 Roller 300 is used to reclaim auxiliary substrate.
In Practical Project practice, it can be opened according to the demand of specific transferring effect from the acceptor of transferred object and transfer Beginning touches transfer and terminates the separation of the two, can adjust this section of contact length or increase to roller to improve transfer in centre Effect.As contact length is to roller 200 to separate roller 500, in Fig. 3 in (b) figure then only to roller 200 in (a) figure in Fig. 3 Contact, can also be in figure 3 in (a) figure to being further added by aiding in roller transfer between roller 200 and separate roller 500.
With reference to above retractable volume and transfer modes, the inventive method proposes that one kind realizes ductility circuit system using volume to volume The entire flow schematic diagram of work is as shown in figure 4, it comprises the following steps:
S1:The conductive layer and the first auxiliary substrate layer that make coiled material are unreeled by two emptying rollers 100 respectively, and Carried out by laminated mechanism 200 laminated;
S2:Conductive layer is patterned, i.e., by the method for patterning, such as machinery loses to roller erasing, cross cutting, chemistry The modes such as quarter, biological etching, laser obtain required conductive layer a to conductive layer optionally pattern-making;
S3:The conductive layer a made is transferred on the first elastomer layer b with substrate, i.e., first with emptying roller 100 The the first elastomer layer b carried with basalis is unreeled, it is poor by viscous force, conductive layer a is transferred to the first elastomer layer b Surface, obtains the first semi-finished product d, then the first auxiliary substrate layer is wound as waste material by material receiving roller 300;
S4:The assembling of circuit chip, i.e., convey first with 100 couples of chip c with the layer carrying of the second auxiliary substrate of emptying roller To near the conductive layer a on the first elastomer layer b surfaces relevant position, then it is aided with for example mode such as machine vision and carries out alignment group Dress, obtains the second semi-finished product e, then the second auxiliary substrate layer is wound as waste material by material receiving roller 300;
S5:The encapsulation of ductility circuit, i.e., first with 100 pairs of second elastomers with the layer carrying of the 3rd auxiliary substrate of emptying roller Layer b carries out blowing, again by the mode of transfer, regard the second elastomer layer b as the ductility circuit semi-finished product for installing chip Top layer, complete encapsulation, obtain ductility circuit entirety f, then the 3rd auxiliary substrate layer is received as waste material by material receiving roller 300 Volume;
S6:Packaged ductility circuit entirety f is post-processed and other operations, carried out finally by material receiving roller 300 Final winding.
Said process is a kind of typical most basic flow, simply to illustrate that how to carry out Fig. 1-Fig. 3 mode Technique is connected.
In Practical Project practice, raw material can be unreeled according to specific ductility circuit structure demand and be wound with waste material Journey, patterning process, transfer process etc. are combined, and are combined similar to series connection and parallel connection of circuit etc., such as many to make Layer circuit layer, then need multiple patterning, the transfer of the intermediate elastomeric layer of circuit interlayer, the transfer of circuit interlayer connection conductor Etc. step.
In addition, also omit some such as actual volume to volume such as carry-over pinch rolls, error-correction structure, tonometry and control in Fig. 4 Necessary device in technique.
Further, in the step S4, the specific assembling mode between chip and circuit is not limited, such as using conduction Then increase corresponding steps in gemel connection or welding manner, technique, such as on the chip mounting location of circuit structure in advance Apply the auxiliary substance such as conducting resinl or soldering paste.
Further, the post processing in the step S6 can to the overall further reinforcing of ductility circuit, such as be carried The reliability of height encapsulation and the stability of circuit, other operations can be that the finished product made directly is carried out into secondary operation, than The two-dimensional surface or three-dimensional surface of target object needed for being such as fixed in.
Specifically, the conductive layer is selected from the conductive film of conductive metal film and non-metallic material, the conducting metal Film includes copper foil, aluminium foil, goldleaf, silver foil and iron thin film, and the conductive film of the non-metallic material includes silicon material film, led Electric polymer film, conductivity ceramics and conductive hydrogel.As long as in principle can as conductor material, conductive film Thickness for less than 20 microns it is more excellent.As long as in principle can as conductor material.
The elastomer layer can be silica gel, such as common are dimethyl silicone polymer (PDMS) or adipic acid fourth two Alcohol ester and the copolymer of mutual-phenenyl two acid bromide two alcohol ester (ECOFLEX) etc., with spies such as preferable ductility, extension at breaks The elastomer rubber such as point or thermoplastic polyurethane (TPU) or hydrogel, the thickness of the elastomer layer is then according to institute The particular use for making ductility circuit is determined;
Auxiliary substrate/substrate/the protective layer can be poly terephthalic acid class plastics (PET), makrolon (PC), gather The films such as ethene (PE), polyvinyl chloride (PVC), polypropylene (PP), substantially, are also not necessarily limited to above-mentioned plastic sheeting, as long as tool Have certain intensity, carried thing can be carried, the thin-film material not deformed in real work, for and it is conductive What layer was contacted has also needed to insulation characterisitic.
In the present invention, mainly use transfer to realize that target object is transferred to another object table from a body surface The process in face.Transfer is when a target object is contacted when separating again with two objects simultaneously, due to target object and both sides thing Viscous force size between body has differences, and can be inclined to a kind of technique adhered on the larger side object of viscous force.In the inventive method, For the ease of fixing carried thing and meeting the demand of viscous force difference in different transfer process, the surface of the auxiliary substrate layer can To increase the glue line with particular size viscous force.
In the present invention, in order to protect chip and elastomer entering before the process not by the physics shadow such as collision of other objects Ring and ensure performance reliability, layer protective layer can be further added by the chip or surface of elastomer of respective web, i.e. the coiled material By auxiliary substrate layer, chip/elastomer, protective layer up of three layers.A stripping off device is further added by before corresponding process is entered will Protective layer removes.Chip or elastomer can also directly be picked up by modes such as mechanical arms to be placed into auxiliary substrate and upload and passed through Come, so as to avoid enter into inside coiled material and collide influence by the auxiliary substrate of adjacent layer.Similarly, it is last in technique, it is tamper seal The ductility circuit installed is overall, and one layer of similar protective layer can also be added to enter back into putting in winding link, such as Fig. 2 on its surface Material roller 100 is to provide layer protective layer to protect final circuit, or directly picks up and place by modes such as mechanical arms To finished product collection device.
In the present invention, in the appropriate location of whole technique, laminated, transfer the progress of such as conductive layer and auxiliary substrate layer, The separation of auxiliary substrate layer, the assembling of chip, the stripping of protective layer and laminated etc., can add heating or cooling device with auxiliary Assistant engineer skill is smoothed out.
" volume to volume motion platform " in the present invention includes multipair active or passive roller, in other words including multipair right Roller, volume to volume English name is Roll to Roll, domestic general abbreviation R2R, the device processed primarily directed to film-like materials, By the actively or passively rotation of roller, to realize a kind of processing mode efficiently, inexpensive to material.There is scholar (Sukang Bae,Hyeongkeun Kim,Youngbin Lee,et al.Roll-to-roll production of 30- inch graphene films for transparent electrodes[J].Nature Nanotechnology,2010, 5:5574-578.) Graphene electrodes are made by means of which, some scholars (Krebs F C, Gevorgyan S A, Alstrup J.A roll-to-roll process to flexible polymer solar cells:model studies,manufacture and operational stability studies[J].Journal of Materials Chemistry,2009,19(30):5442-5451.) be used for making solar cell.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, it is not used to The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the invention etc., it all should include Within protection scope of the present invention.

Claims (6)

1. a kind of ductility circuit fabrication method, it is characterised in that use " volume to volume " technique, specifically include following steps:
S1:Conductive layer and the first auxiliary substrate are closed to be formed layer by layer coiled material is made after one, using one end of the coiled material as initial Charging unreels end, expansion setting length after unreeling,
S2:Patterned on the coiled material conductive layer of expansion setting length, the circuit structure needed for preparing is patterned Method includes machinery to roller erasing, cross cutting, biological etching, chemical etching or laser patterning,
S3:The first elastomer layer of substrate will be provided with as feed end, feeding is roller, by poor to roll press and viscous force, Circuit structure is transferred to the first elastomer layer surface, then removed the first auxiliary substrate layer as waste material winding,
S4:The corresponding position of circuit structure will be transported to the chip of the second auxiliary substrate layer carrying, makes chip and the first bullet The circuit structure alignment of elastomeric surface, using to roll press, chip is fitted together with circuit structure, then aid in base by second Bottom winds as waste material and removed, and obtains ductility circuit layer semi-finished product,
S5:Using the second elastomer layer for being provided with the 3rd auxiliary substrate as feed end, send between mutually reply roller, by roll-in Close and viscous force is poor, the second elastomer layer is transferred to ductility circuit layer surface of semi-finished, the second elastomer layer is used for ductility circuit The encapsulated layer of layer semi-finished product, is completed after encapsulation, then winds removal using the 3rd auxiliary substrate as waste material, obtains ductility circuit.
2. ductility circuit fabrication method as claimed in claim 1, it is characterised in that the conductive layer is selected from conductive metal film With the conductive film of non-metallic material,
The conductive metal film includes copper foil, aluminium foil, goldleaf, silver foil and iron thin film,
The conductive film of the non-metallic material includes silicon material film, conducting polymer thin film, conductivity ceramics and conductive water-setting Glue.
3. ductility circuit fabrication method as claimed in claim 2, it is characterised in that the first, second elastomer layer material Selected from silica gel, thermoplastic polyurethane and hydrogel.
4. ductility circuit fabrication method as claimed in claim 3, it is characterised in that the first, second, third auxiliary base Bottom, the substrate material are selected from poly terephthalic acid class plastics, makrolon, polyethylene, polyvinyl chloride and polypropylene.
5. ductility circuit fabrication method as claimed in claim 4, it is characterised in that in step S4, is set on circuit structure Conducting resinl or soldering paste, for making circuit structure and chip strong bonded.
6. ductility circuit fabrication method as claimed in claim 1, it is characterised in that also including step S6:Packaged is prolonged Property circuit is integrally post-processed, and is finally wound.
CN201710528331.6A 2017-07-01 2017-07-01 A kind of ductility circuit fabrication method Active CN107222974B (en)

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CN201710528331.6A CN107222974B (en) 2017-07-01 2017-07-01 A kind of ductility circuit fabrication method
PCT/CN2017/112770 WO2019006962A1 (en) 2017-07-01 2017-11-24 Method for manufacturing ductile circuit
JP2019501694A JP6796703B2 (en) 2017-07-01 2017-11-24 Manufacturing method of ductile circuit

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WO2019006962A1 (en) * 2017-07-01 2019-01-10 华中科技大学 Method for manufacturing ductile circuit
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CN112888185A (en) * 2020-12-30 2021-06-01 江苏新澄瑞材料科技有限公司 Preparation method, product and application of flexible circuit
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