JP6795819B2 - 処理ローラーおよびその製造方法ならびに処理装置 - Google Patents

処理ローラーおよびその製造方法ならびに処理装置 Download PDF

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Publication number
JP6795819B2
JP6795819B2 JP2016168705A JP2016168705A JP6795819B2 JP 6795819 B2 JP6795819 B2 JP 6795819B2 JP 2016168705 A JP2016168705 A JP 2016168705A JP 2016168705 A JP2016168705 A JP 2016168705A JP 6795819 B2 JP6795819 B2 JP 6795819B2
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Japan
Prior art keywords
flat plate
cylindrical portion
groove
planar shape
flow path
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JP2016168705A
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English (en)
Japanese (ja)
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JP2018035392A5 (enExample
JP2018035392A (ja
Inventor
寛 岩田
寛 岩田
敏幸 根津
敏幸 根津
勇太 高桑
勇太 高桑
直弥 岡田
直弥 岡田
佐藤　一平
一平 佐藤
尚憲 柴田
尚憲 柴田
敬一 橋本
敬一 橋本
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Keihin Ramtech Co Ltd
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Keihin Ramtech Co Ltd
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Priority to JP2016168705A priority Critical patent/JP6795819B2/ja
Application filed by Keihin Ramtech Co Ltd filed Critical Keihin Ramtech Co Ltd
Priority to KR1020207009231A priority patent/KR20200036065A/ko
Priority to PCT/JP2017/002463 priority patent/WO2017169029A1/ja
Priority to EP17773579.2A priority patent/EP3438322B1/en
Priority to KR1020177024162A priority patent/KR20180032523A/ko
Priority to CN201910226747.1A priority patent/CN109881166B/zh
Priority to KR1020187031762A priority patent/KR20180121798A/ko
Priority to US15/735,847 priority patent/US20180171464A1/en
Priority to CN201780001627.0A priority patent/CN107614747B/zh
Publication of JP2018035392A publication Critical patent/JP2018035392A/ja
Priority to US16/297,121 priority patent/US10692708B2/en
Publication of JP2018035392A5 publication Critical patent/JP2018035392A5/ja
Priority to US16/897,762 priority patent/US20200303173A1/en
Priority to US17/089,100 priority patent/US20210050196A1/en
Application granted granted Critical
Publication of JP6795819B2 publication Critical patent/JP6795819B2/ja
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JP2016168705A 2016-03-30 2016-08-31 処理ローラーおよびその製造方法ならびに処理装置 Active JP6795819B2 (ja)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP2016168705A JP6795819B2 (ja) 2016-08-31 2016-08-31 処理ローラーおよびその製造方法ならびに処理装置
PCT/JP2017/002463 WO2017169029A1 (ja) 2016-03-30 2017-01-25 スパッタリングカソード、スパッタリング装置および成膜体の製造方法
EP17773579.2A EP3438322B1 (en) 2016-03-30 2017-01-25 Sputtering device, and method for producing film-formed body
KR1020177024162A KR20180032523A (ko) 2016-03-30 2017-01-25 스퍼터링 캐소드, 스퍼터링 장치 및 성막체의 제조 방법
CN201910226747.1A CN109881166B (zh) 2016-03-30 2017-01-25 溅射阴极、溅射装置和成膜体的制造方法
KR1020187031762A KR20180121798A (ko) 2016-03-30 2017-01-25 스퍼터링 캐소드, 스퍼터링 장치 및 성막체의 제조 방법
KR1020207009231A KR20200036065A (ko) 2016-03-30 2017-01-25 스퍼터링 캐소드, 스퍼터링 장치 및 성막체의 제조 방법
US15/735,847 US20180171464A1 (en) 2016-03-30 2017-01-25 Sputtering cathode, sputtering device, and method for producing film-formed body
CN201780001627.0A CN107614747B (zh) 2016-03-30 2017-01-25 溅射阴极、溅射装置和成膜体的制造方法
US16/297,121 US10692708B2 (en) 2016-03-30 2019-03-08 Sputtering cathode, sputtering device, and method for producing film-formed body
US16/897,762 US20200303173A1 (en) 2016-03-30 2020-06-10 Heat-transfer roller for sputtering and method of making the same
US17/089,100 US20210050196A1 (en) 2016-03-30 2020-11-04 Heat-Transfer Roller for Sputtering and Method of Making the Same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016168705A JP6795819B2 (ja) 2016-08-31 2016-08-31 処理ローラーおよびその製造方法ならびに処理装置

Related Child Applications (2)

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JP2018075110A Division JP6360986B2 (ja) 2018-04-10 2018-04-10 デバイスの製造方法およびフィルムの製造方法
JP2020149559A Division JP6801911B2 (ja) 2020-09-07 2020-09-07 バッキングプレートおよびその製造方法

Publications (3)

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JP2018035392A JP2018035392A (ja) 2018-03-08
JP2018035392A5 JP2018035392A5 (enExample) 2019-10-10
JP6795819B2 true JP6795819B2 (ja) 2020-12-02

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019189913A (ja) * 2018-04-26 2019-10-31 京浜ラムテック株式会社 スパッタリングカソード、スパッタリングカソード集合体およびスパッタリング装置
JP7244362B2 (ja) * 2019-05-28 2023-03-22 株式会社アルバック 搬送室

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3672949B2 (ja) * 1994-10-05 2005-07-20 三菱伸銅株式会社 蒸着装置
JPH1060628A (ja) * 1996-08-16 1998-03-03 Sony Corp 材料飛翔装置及び材料飛翔源
JP6252402B2 (ja) * 2014-08-18 2017-12-27 住友金属鉱山株式会社 加熱ロールおよびそれを備えた成膜装置
JP6417964B2 (ja) * 2015-01-23 2018-11-07 住友金属鉱山株式会社 積層体基板、配線基板ならびにそれらの製造方法
JP2016144873A (ja) * 2015-02-06 2016-08-12 凸版印刷株式会社 ガスバリア性積層体の製造方法

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