JP6775421B2 - 照明パターン形成を用いた計測光学系及び方法 - Google Patents
照明パターン形成を用いた計測光学系及び方法 Download PDFInfo
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/84—Systems specially adapted for particular applications
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- G01N21/84—Systems specially adapted for particular applications
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- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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Description
本出願は、その全体を本願に引用して援用する、2014年3月20日に出願した米国仮特許出願第61/955,793号の利益を主張するものである。
Claims (10)
- 主成分分析を用いた測定量に対する感度の分析に従って、強度のパターンとともに、スペクトルのパターンと偏光のパターンの少なくともいずれかを事前に用意するステップと、
パターン形成された照明を生成すべく、そのスペクトル範囲およびその偏光のうちの少なくとも1つに対して計測目標の照明をパターン形成するステップと、
前記パターン形成された照明によって前記計測目標を照明するステップと、
第1の意図的なオーバーレイと相関する画素群のみを含むように瞳面に配置された1つ又はそれ以上の制御可能なミラー装置で第1の収集関数を成形し、かつ第2の意図的なオーバーレイと相関する画素群のみを含むように第2の収集関数を成形することで、瞳面において選択された瞳面の画素を複数の単一検出器に向け、前記計測目標から散乱された放射を測定するステップであり、前記第1の意図的なオーバーレイと前記第2の意図的なオーバーレイは異なるオーバーレイの値を有する、ステップと、
を含む方法。 - 請求項1に記載の方法であって、前記パターン形成するステップは、前記照明の瞳面において実行される方法。
- 請求項1に記載の方法であって、収集パターンは、照明パターンに関連するように構成されている方法。
- 請求項1に記載の方法であって、前記計測目標の照明は、前記スペクトル範囲と前記偏光の両方に対してパターン形成される方法。
- 請求項1に記載の方法であって、前記計測目標の照明は、スペクトルプログラマによって前記スペクトル範囲に関してパターン形成される方法。
- パターン形成された照明を生成すべく、そのスペクトル範囲およびその偏光のうちの少なくとも1つに対して計測目標の照明をパターン形成するように構成されている照明源と、
圧縮センシング装置であって、第1の意図的なオーバーレイと相関する画素群のみを含むように瞳面に配置された1つ又はそれ以上の制御可能なミラー装置で第1の収集関数を成形し、かつ第2の意図的なオーバーレイと相関する画素群のみを含むように第2の収集関数を成形することで、瞳面において選択された瞳面の画素を圧縮センシング装置の複数の単一検出器に向け、前記計測目標から散乱された放射を測定するステップであり、前記第1の意図的なオーバーレイと前記第2の意図的なオーバーレイは異なるオーバーレイの値を有する、圧縮センシング装置と、
を備え、主成分分析を用いた測定量に対する感度の分析に従って、強度のパターンとともに、スペクトルのパターンと偏光のパターンの少なくともいずれかが事前に用意される、
計測光学系。 - 請求項6に記載の計測光学系であって、前記パターン形成は、前記照明源の瞳面において実行される計測光学系。
- 請求項6に記載の計測光学系であって、収集パターンは、前記パターン形成された照明のパターンに関連するように構成されている計測光学系。
- 請求項6に記載の計測光学系であって、前記計測目標の照明は、前記スペクトル範囲とその前記偏光の両方に対してパターン形成されている計測光学系。
- 請求項6に記載の計測光学系であって、前記スペクトル範囲に対して前記計測目標の照明をパターン形成するように構成されている、複数の副分散経路および副結合経路を備えるスペクトルプログラマをさらに備える計測光学系。
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US201461955793P | 2014-03-20 | 2014-03-20 | |
US61/955,793 | 2014-03-20 | ||
PCT/US2015/021843 WO2015143378A1 (en) | 2014-03-20 | 2015-03-20 | Compressive sensing with illumination patterning |
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JP2017516075A JP2017516075A (ja) | 2017-06-15 |
JP2017516075A5 JP2017516075A5 (ja) | 2018-04-26 |
JP6775421B2 true JP6775421B2 (ja) | 2020-10-28 |
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JP (1) | JP6775421B2 (ja) |
KR (1) | KR102135999B1 (ja) |
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US9793178B2 (en) * | 2014-08-28 | 2017-10-17 | University Of Rochester | Focused beam scatterometry apparatus and method |
WO2017097532A1 (en) | 2015-12-09 | 2017-06-15 | Asml Holding N.V. | A flexible illuminator |
CN108700816A (zh) * | 2015-12-17 | 2018-10-23 | Asml荷兰有限公司 | 散射测量中的偏振调谐 |
WO2017153130A1 (en) | 2016-03-07 | 2017-09-14 | Asml Netherlands B.V. | Illumination system and metrology system |
EP3477392A1 (en) * | 2017-10-31 | 2019-05-01 | ASML Netherlands B.V. | Metrology apparatus, method of measuring a structure, device manufacturing method |
IL273836B2 (en) * | 2017-10-31 | 2023-09-01 | Asml Netherlands Bv | A measuring device, a method for measuring a structure, a method for making a device |
WO2019129456A1 (en) | 2017-12-28 | 2019-07-04 | Asml Netherlands B.V. | Apparatus for and a method of removing contaminant particles from a component of an apparatus |
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JP2003161888A (ja) * | 2001-11-26 | 2003-06-06 | Inst Of Physical & Chemical Res | 特定の波長で照明できる顕微鏡 |
US7580559B2 (en) * | 2004-01-29 | 2009-08-25 | Asml Holding N.V. | System and method for calibrating a spatial light modulator |
US7446877B2 (en) * | 2004-08-27 | 2008-11-04 | Bwt Property Inc. | All-fiber spectroscopic optical sensor |
US20060239336A1 (en) * | 2005-04-21 | 2006-10-26 | Baraniuk Richard G | Method and Apparatus for Compressive Imaging Device |
US7916284B2 (en) * | 2006-07-18 | 2011-03-29 | Asml Netherlands B.V. | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
US7580131B2 (en) * | 2007-04-17 | 2009-08-25 | Asml Netherlands B.V. | Angularly resolved scatterometer and inspection method |
NL1036123A1 (nl) * | 2007-11-13 | 2009-05-14 | Asml Netherlands Bv | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method. |
ITFI20070260A1 (it) * | 2007-11-21 | 2009-05-22 | Light 4 Tech Firenze S R L | Dispositivo per illuminare un oggetto con una sorgente di luce multispettrale e rivelare lo spettro della luce emessa. |
WO2011103601A2 (en) * | 2010-02-22 | 2011-08-25 | William Marsh Rice University | Improved number of pixels in detector arrays using compressive sensing |
JP2011191199A (ja) * | 2010-03-15 | 2011-09-29 | Japan Science & Technology Agency | 顕微鏡システム |
US8917395B2 (en) * | 2010-04-19 | 2014-12-23 | Florida Atlantic University | MEMS microdisplay optical imaging and sensor systems for underwater scattering environments |
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US8681413B2 (en) * | 2011-06-27 | 2014-03-25 | Kla-Tencor Corporation | Illumination control |
CN104025257B (zh) * | 2011-10-24 | 2017-09-19 | 株式会社尼康 | 照明光学系统、曝光装置及组件制造方法 |
US9952140B2 (en) * | 2012-05-29 | 2018-04-24 | Kla-Tencor Corporation | Small spot size spectroscopic ellipsometer |
US9341769B2 (en) * | 2012-12-17 | 2016-05-17 | Kla-Tencor Corporation | Spectral control system |
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JP2017516075A (ja) | 2017-06-15 |
US20160025646A1 (en) | 2016-01-28 |
KR20160135769A (ko) | 2016-11-28 |
US9719940B2 (en) | 2017-08-01 |
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