JP6770455B2 - Eddy current flaw detection inspection device - Google Patents

Eddy current flaw detection inspection device Download PDF

Info

Publication number
JP6770455B2
JP6770455B2 JP2017027541A JP2017027541A JP6770455B2 JP 6770455 B2 JP6770455 B2 JP 6770455B2 JP 2017027541 A JP2017027541 A JP 2017027541A JP 2017027541 A JP2017027541 A JP 2017027541A JP 6770455 B2 JP6770455 B2 JP 6770455B2
Authority
JP
Japan
Prior art keywords
coil
detection
exciting coil
eddy current
space portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017027541A
Other languages
Japanese (ja)
Other versions
JP2018132469A (en
Inventor
史也 神山
史也 神山
啓貴 間宮
啓貴 間宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yazaki Energy System Corp
Original Assignee
Yazaki Energy System Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yazaki Energy System Corp filed Critical Yazaki Energy System Corp
Priority to JP2017027541A priority Critical patent/JP6770455B2/en
Publication of JP2018132469A publication Critical patent/JP2018132469A/en
Application granted granted Critical
Publication of JP6770455B2 publication Critical patent/JP6770455B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Description

本発明は、渦電流探傷検査装置に関する。 The present invention relates to an eddy current flaw detection inspection device.

従来、電線内部の傷や腐食など、被測定物の損傷を検出する検査装置として、渦電流探傷検査装置が知られている。渦電流探傷検査装置は、励磁コイルと検出コイルとを有し、励磁コイルに交流電圧を印加して磁束を発生させることで被測定物に渦電流を発生させ、渦電流の磁束に基づく検出コイルの検出値により、被測定物の探傷を検査する。上記の励磁コイルおよび検出コイルは、励磁コイルの磁束が検出コイルの検出値に与える影響を小さくするため、上記コイルの軸方向から見て、励磁コイルおよび検出コイルの一部を重ね合わせて筐体に保持される。 Conventionally, an eddy current flaw detection inspection device is known as an inspection device for detecting damage to an object to be measured such as scratches and corrosion inside an electric wire. The eddy current flaw detection inspection device has an exciting coil and a detection coil, and an AC voltage is applied to the exciting coil to generate a magnetic flux to generate an eddy current in the object to be measured, and the detection coil based on the magnetic flux of the eddy current. The flaw detection of the object to be measured is inspected based on the detected value of. In the above-mentioned exciting coil and the detection coil, in order to reduce the influence of the magnetic field of the exciting coil on the detected value of the detection coil, the exciting coil and a part of the detection coil are overlapped with each other when viewed from the axial direction of the coil. Is held in.

特許第5286127号公報Japanese Patent No. 5286127

上記の励磁コイルの磁束において、励磁コイルおよび検出コイルの一部を重ねることにより、励磁コイルの磁束のうち径方向外側および径方向内側にそれぞれ対向する向きに生じている磁束が相殺し合うこととなり、相殺できなかった励磁コイルの磁束の一部が検出コイルの検出値に影響を与えることとなる。したがって、励磁コイルの磁束が検出値に与える影響を、より小さくすることで、被測定物の損傷の検出精度の向上が望まれる。 In the above-mentioned magnetic flux of the exciting coil, by overlapping a part of the exciting coil and the detection coil, the magnetic fluxes of the exciting coil generated in the directions facing the radial outer side and the radial inner side cancel each other out. , A part of the magnetic flux of the exciting coil that could not be offset affects the detected value of the detection coil. Therefore, it is desired to improve the detection accuracy of damage to the object to be measured by reducing the influence of the magnetic flux of the exciting coil on the detected value.

本発明は上記に鑑みてなされたものであり、被測定物の損傷の検出精度の向上を図ることができる渦電流探傷検査装置を提供することを目的とする。 The present invention has been made in view of the above, and an object of the present invention is to provide an eddy current flaw detection inspection device capable of improving the detection accuracy of damage to an object to be measured.

上記目的を達成する為、本発明に係る渦電流探傷検査装置は、リング状に形成され、被測定物に渦電流を発生させるために交流電圧が印加される励磁コイルと、リング状に形成され、前記被測定物に発生した渦電流による磁束を検出する検出コイルと、前記励磁コイルおよび前記検出コイルを互いの軸方向が平行であり、かつ前記軸方向から見た場合に、前記励磁コイルおよび前記検出コイルの一部が重なり合うように、内部に保持する筐体と、を有するプローブと、前記励磁コイルに前記交流電圧を印加する電源部と、前記検出コイルの検出値を表示する表示部と、を備え、前記筐体は、非磁性材料で形成されており、前記励磁コイルおよび前記検出コイルのうち、一方の前記コイルが保持される第一空間部と、前記励磁コイルおよび前記検出コイルのうち、他方の前記コイルが保持される第二空間部と、非磁性材料で形成されており、かつ前記励磁コイルおよび前記検出コイルのうち、少なくとも一方を前記軸方向と直交し、互いに交差する二方向に移動させる移動機構と、を有し、前記第一空間部および前記第二空間部のうち、前記移動機構により前記コイルを移動させることができる空間部は、前記軸方向から見た場合に、前記励磁コイルおよび前記検出コイルの中心間線上において、前記励磁コイルおよび前記検出コイルが重なり合うコイル間距離を、前記検出コイルの検出値に基づいた所定距離とすることができる位置に、前記励磁コイルおよび前記検出コイルのうち、少なくとも一方の前記コイルが前記移動機構により移動することを許容する空間部であることを特徴とする。 In order to achieve the above object, the eddy current flaw detection inspection device according to the present invention is formed in a ring shape, and is formed in a ring shape with an exciting coil to which an AC voltage is applied to generate a vortex current in the object to be measured. When the detection coil for detecting the magnetic flux due to the eddy current generated in the object to be measured and the exciting coil and the detection coil are axially parallel to each other and viewed from the axial direction, the exciting coil and A probe having a housing internally held so that a part of the detection coil overlaps, a power supply unit for applying the AC voltage to the excitation coil, and a display unit for displaying the detection value of the detection coil. The housing is made of a non-magnetic material, and the first space portion of the exciting coil and the detection coil in which one of the coils is held, and the exciting coil and the detection coil. Of these, a second space portion in which the other coil is held and at least one of the exciting coil and the detection coil, which is formed of a non-magnetic material, is orthogonal to the axial direction and intersects with each other. Of the first space portion and the second space portion, which has a moving mechanism for moving in the direction, the space portion in which the coil can be moved by the moving mechanism is when viewed from the axial direction. On the center line between the exciting coil and the detection coil, the exciting coil is located at a position where the distance between the coils where the exciting coil and the detection coil overlap can be a predetermined distance based on the detection value of the detection coil. And, among the detection coils, at least one of the coils is a space portion that is allowed to move by the moving mechanism.

また、上記の渦電流探傷検査装置において、前記二方向は、前記第一空間部および前記第二空間部が隣り合って形成される第一方向と、前記第一方向と直交する第二方向である
ことが好ましい。
Further, in the eddy current flaw detection inspection device, the two directions are the first direction in which the first space portion and the second space portion are formed adjacent to each other and the second direction orthogonal to the first direction. It is preferable to have.

また、上記の渦電流探傷検査装置において、前記移動機構は、前記筐体の外部と前記空間部とを貫通し、内周面に雌ネジ溝が形成された貫通孔と、前記雌ネジ溝に螺合する雄ネジ溝が外周面に形成されるネジ部材と、を有することが好ましい。 Further, in the eddy current flaw detection inspection device, the moving mechanism penetrates the outside of the housing and the space portion, and has a through hole having a female screw groove formed on the inner peripheral surface and the female screw groove. It is preferable to have a screw member in which a male screw groove to be screwed is formed on an outer peripheral surface.

また、上記の渦電流探傷検査装置において、前記筐体は、前記励磁コイルおよび前記検出コイルのうち、一方の前記コイルに対応する第一保持部と、前記励磁コイルおよび前記検出コイルのうち、他方の前記コイルに対応する第二保持部と、を有し、前記第一保持部は、一方の前記コイルを前記第一空間部に対する移動を規制して保持するものであり、前記第二保持部は、前記第一保持部に対して、前記励磁コイルおよび前記検出コイルの一部が重なり合うように固定されるものであり、前記移動機構は、前記第二保持部に設けられることが好ましい。 Further, in the vortex current flaw detection inspection device, the housing has a first holding portion corresponding to one of the exciting coil and the detection coil, and the other of the exciting coil and the detection coil. The first holding portion has a second holding portion corresponding to the coil, and the first holding portion regulates and holds one of the coils with respect to the first space portion. Is fixed to the first holding portion so that a part of the exciting coil and the detection coil overlap each other, and the moving mechanism is preferably provided in the second holding portion.

上記目的を達成する為、本発明に係る渦電流探傷検査装置は、励磁コイルおよび検出コイルの中心間線上において、励磁コイルおよび検出コイルが重なり合うコイル間距離を、移動機構により、検出コイルの検出値に基づいた所定距離とすることができるので、移動機構により励磁コイルの磁束が検出値に与える影響を小さくすることができ、被測定物の損傷の検出精度を向上することができる。 In order to achieve the above object, the eddy current flaw detection inspection device according to the present invention uses a moving mechanism to determine the distance between the coils where the exciting coil and the detection coil overlap on the center line of the exciting coil and the detection coil, and the detection value of the detection coil. Since the predetermined distance can be set based on the above, the influence of the magnetic flux of the exciting coil on the detected value can be reduced by the moving mechanism, and the accuracy of detecting damage to the object to be measured can be improved.

図1は、実施形態1に係る渦電流探傷検査装置の構成図である。FIG. 1 is a configuration diagram of an eddy current flaw detection inspection device according to the first embodiment. 図2は、実施形態1に係る渦電流探傷検査装置のブロック図である。FIG. 2 is a block diagram of the eddy current flaw detection inspection device according to the first embodiment. 図3は、実施形態1に係る渦電流探傷検査装置の部分拡大図である。FIG. 3 is a partially enlarged view of the eddy current flaw detection inspection device according to the first embodiment. 図4は、実施形態1に係る渦電流探傷検査装置の部分拡大図である。FIG. 4 is a partially enlarged view of the eddy current flaw detection inspection device according to the first embodiment. 図5は、検出値の変化を示す図である。FIG. 5 is a diagram showing changes in detected values. 図6は、実施形態2に係る渦電流探傷検査装置の部分拡大図である。FIG. 6 is a partially enlarged view of the eddy current flaw detection inspection device according to the second embodiment. 図7は、実施形態2に係る渦電流探傷検査装置の部分拡大図である。FIG. 7 is a partially enlarged view of the eddy current flaw detection inspection device according to the second embodiment.

以下に、本発明に係る渦電流探傷検査装置の実施形態を図面に基づいて詳細に説明する。なお、この実施形態によりこの発明が限定されるものではない。また、下記の実施形態における構成要素には、当業者が容易に想定できるもの、あるいは実質的に同一のものが含まれる。また、下記の実施形態における構成要素は、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。 Hereinafter, embodiments of the eddy current flaw detection inspection apparatus according to the present invention will be described in detail with reference to the drawings. The present invention is not limited to this embodiment. In addition, the components in the following embodiments include those that can be easily assumed by those skilled in the art or those that are substantially the same. In addition, the components in the following embodiments can be omitted, replaced, or changed in various ways without departing from the gist of the invention.

[実施形態1]
まず、実施形態1に係る渦電流探傷検査装置について説明する。図1は、実施形態1に係る渦電流探傷検査装置の構成図である。図2は、実施形態1に係る渦電流探傷検査装置のブロック図である。図3は、実施形態1に係る渦電流探傷検査装置の部分拡大図である。図3は、筐体から筐体カバーを取り外した状態の図である。図4は、実施形態1に係る渦電流探傷検査装置の部分拡大図である。図3および図4におけるX方向は、筐体の幅方向であり、第一方向である。Y方向は、筐体の奥行き方向であり、X方向と直交する方向である。また、第二方向である。Z方向は、鉛直方向であり、X方向およびY方向と直交する方向である。また、軸方向である。Z1方向は鉛直上方向であり、Z2方向は鉛直下方向である。
[Embodiment 1]
First, the eddy current flaw detection inspection device according to the first embodiment will be described. FIG. 1 is a configuration diagram of an eddy current flaw detection inspection device according to the first embodiment. FIG. 2 is a block diagram of the eddy current flaw detection inspection device according to the first embodiment. FIG. 3 is a partially enlarged view of the eddy current flaw detection inspection device according to the first embodiment. FIG. 3 is a view showing a state in which the housing cover is removed from the housing. FIG. 4 is a partially enlarged view of the eddy current flaw detection inspection device according to the first embodiment. The X direction in FIGS. 3 and 4 is the width direction of the housing and is the first direction. The Y direction is the depth direction of the housing and is orthogonal to the X direction. It is also the second direction. The Z direction is a vertical direction and is a direction orthogonal to the X direction and the Y direction. It is also in the axial direction. The Z1 direction is vertically upward, and the Z2 direction is vertically downward.

本実施形態における渦電流探傷検査装置1は、被測定物の損傷を検出する検査装置のうち、被測定物に渦電流を発生させることにより被測定物の損傷を検査する。渦電流探傷検査装置1は、被測定物として例えば電線が挙げられ、電線の内部に位置する芯線の腐食状況を非破壊検査するものである。渦電流探傷検査装置1は、図1〜図4に示すように、プローブ2と、制御装置10とを有する。渦電流探傷検査装置1は、制御装置10が外部の交流電源100と電気的に接続され、プローブ2と制御装置10とは、ハーネス11により電気的に接続される。 The eddy current flaw detection inspection device 1 in the present embodiment inspects the damage of the object to be measured by generating an eddy current in the object to be measured among the inspection devices for detecting the damage of the object to be measured. The eddy current flaw detection inspection device 1 includes, for example, an electric wire as an object to be measured, and non-destructively inspects the corrosion state of the core wire located inside the electric wire. The eddy current flaw detection inspection device 1 has a probe 2 and a control device 10 as shown in FIGS. 1 to 4. In the eddy current flaw detection inspection device 1, the control device 10 is electrically connected to the external AC power supply 100, and the probe 2 and the control device 10 are electrically connected by the harness 11.

プローブ2は、渦電流探傷検査装置1において、被測定物の探傷を行うものである。プローブ2は、渦電流探傷検査装置1において、上記のように探傷検査作業の際、作業者により被測定物に対して走査される部分である。プローブ2は、励磁コイル3と、検出コイル4と、筐体5Aと、溝部6と、移動機構7とを有する。 The probe 2 detects an object to be measured by the eddy current flaw detection inspection device 1. The probe 2 is a portion of the eddy current flaw detection inspection device 1 that is scanned by the operator with respect to the object to be measured during the flaw detection inspection work as described above. The probe 2 has an exciting coil 3, a detection coil 4, a housing 5A, a groove 6, and a moving mechanism 7.

励磁コイル3は、交流電圧が印加されることで、被測定物に渦電流を発生させるものである。励磁コイル3は、導電性を有する金属線(例えば銅線)を複数回、同心円状に巻いて束状にしたものであり、リング状に形成される。励磁コイル3は、後述の制御装置10の電源部12と電気的に接続される。励磁コイル3は、外部の交流電源100から供給され電源部12を介して、交流電圧が印加される。励磁コイル3は、交流電圧が印加されることにより交流電流が流れ、励磁コイル3の周囲に磁束を発生させる。この磁束は、交流電流により発生するものなので、磁束の向きが変化することとなる。したがって、被測定物は、励磁コイル3の磁束の変化による電磁誘導により、渦電流を発生することとなる。 The exciting coil 3 generates an eddy current in the object to be measured by applying an AC voltage. The exciting coil 3 is formed by winding a conductive metal wire (for example, a copper wire) a plurality of times in a concentric manner to form a bundle, and is formed in a ring shape. The exciting coil 3 is electrically connected to the power supply unit 12 of the control device 10 described later. The exciting coil 3 is supplied from an external AC power source 100, and an AC voltage is applied via the power supply unit 12. When an AC voltage is applied to the exciting coil 3, an AC current flows, and a magnetic flux is generated around the exciting coil 3. Since this magnetic flux is generated by an alternating current, the direction of the magnetic flux changes. Therefore, the object to be measured generates an eddy current by electromagnetic induction due to a change in the magnetic flux of the exciting coil 3.

検出コイル4は、被測定物に発生した渦電流による磁束を検出するものである。検出コイル4は、導電性を有する金属線(例えば銅線)を複数回、同心円状に巻いて束状にしたものであり、リング状に形成される。本実施形態における検出コイル4は、励磁コイル3と同一形状に形成される。検出コイル4は、後述の制御装置10の検出部13と電気的に接続される。ここで、被測定物は、渦電流を発生することで、磁束を発生する。検出コイル4は、渦電流の磁束による相互誘導により、検出コイルの両端において誘導起電力を生じる。すなわち、検出コイル4は、誘導起電力による電圧値を渦電流による検出値として検出するものである。 The detection coil 4 detects the magnetic flux due to the eddy current generated in the object to be measured. The detection coil 4 is formed by winding a conductive metal wire (for example, a copper wire) a plurality of times in a concentric manner to form a bundle, and is formed in a ring shape. The detection coil 4 in this embodiment is formed in the same shape as the exciting coil 3. The detection coil 4 is electrically connected to the detection unit 13 of the control device 10 described later. Here, the object to be measured generates a magnetic flux by generating an eddy current. The detection coil 4 generates an induced electromotive force at both ends of the detection coil by mutual induction by the magnetic flux of the eddy current. That is, the detection coil 4 detects the voltage value due to the induced electromotive force as the detection value due to the eddy current.

筐体5Aは、励磁コイル3および検出コイル4を内部に保持するものである。筐体5Aは、絶縁性を有し、かつ磁束を透磁する非磁性材料により形成される。本実施形態において、筐体5Aは、合成樹脂部材により略直方体形状に形成される。筐体5Aは、筐体5Aを構成する外周面において、鉛直方向に対向する面のうち鉛直上方向側の外周面51に溝部6が形成される。筐体5Aは、外周面51と対向して筐体カバー8がネジなどの締結部材により取り付けられる。筐体5Aは、外周面51において複数の締結用貫通孔52が形成される。実施形態1においては、締結用貫通孔52は、内周面に雌ネジ溝が形成されたネジ孔である。 The housing 5A holds the exciting coil 3 and the detection coil 4 inside. The housing 5A is made of a non-magnetic material that has insulating properties and allows magnetic flux to pass through. In the present embodiment, the housing 5A is formed into a substantially rectangular parallelepiped shape by a synthetic resin member. In the housing 5A, on the outer peripheral surface constituting the housing 5A, a groove 6 is formed on the outer peripheral surface 51 on the vertically upward direction side of the surfaces facing in the vertical direction. A housing cover 8 is attached to the housing 5A by a fastening member such as a screw so as to face the outer peripheral surface 51. The housing 5A has a plurality of fastening through holes 52 formed on the outer peripheral surface 51. In the first embodiment, the fastening through hole 52 is a screw hole having a female screw groove formed on the inner peripheral surface.

溝部6は、外周面51から鉛直下方向に向かって凹形状に形成される。溝部6は、励磁コイル3が保持される第一溝部61と、検出コイル4が保持される第二溝部62とから形成される。第一溝部61および第二溝部62は、凹形状に形成されることにより、第一溝部61は励磁コイル3が保持される第一空間部61a、および第二溝部62は検出コイル4が保持される第二空間部62aを形成する。第一溝部61および第二溝部62は、鉛直上方向から見てリング状に形成される。第一溝部61および第二溝部62は、各溝部の中心が幅方向、すなわち第一方向に沿って並んで形成される。第一溝部61および第二溝部62は、軸方向から見て、第一溝部61と第二溝部62とが重なり合うように形成される。すなわち、第一溝部61および第二溝部62は、励磁コイル3および検出コイル4を、互いの軸方向が平行であり、かつ軸方向(鉛直上方向)から見た場合に、励磁コイル3および検出コイル4の一部が重なり合うように、第一空間部61aおよび第二空間部62aに励磁コイル3および検出コイル4を保持する。 The groove portion 6 is formed in a concave shape from the outer peripheral surface 51 in the vertical downward direction. The groove portion 6 is formed of a first groove portion 61 in which the exciting coil 3 is held and a second groove portion 62 in which the detection coil 4 is held. Since the first groove portion 61 and the second groove portion 62 are formed in a concave shape, the first groove portion 61 holds the first space portion 61a in which the exciting coil 3 is held, and the second groove portion 62 holds the detection coil 4. The second space portion 62a is formed. The first groove portion 61 and the second groove portion 62 are formed in a ring shape when viewed from the vertically upward direction. The first groove portion 61 and the second groove portion 62 are formed so that the centers of the respective groove portions are arranged side by side in the width direction, that is, in the first direction. The first groove portion 61 and the second groove portion 62 are formed so that the first groove portion 61 and the second groove portion 62 overlap each other when viewed from the axial direction. That is, the first groove portion 61 and the second groove portion 62 detect the exciting coil 3 and the detection coil 4 when the exciting coil 3 and the detection coil 4 are parallel to each other in the axial direction and viewed from the axial direction (vertically upward direction). The excitation coil 3 and the detection coil 4 are held in the first space portion 61a and the second space portion 62a so that a part of the coil 4 overlaps.

第一溝部61および第二溝部62は、励磁コイル3および検出コイル4が移動機構7により、軸方向と直交する方向、すなわち軸方向と直交する平面上を移動できるように、第一空間部61aおよび第二空間部62aを形成する。第一溝部61および第二溝部62は、鉛直上方向から見て、各溝の幅が励磁コイル3および検出コイル4の幅よりも大きく形成される。第一溝部61および第二溝部62は、励磁コイル3および検出コイル4を第一空間部61aおよび第二空間部62aにおいて、軸方向から見た場合に、励磁コイル3および検出コイル4の中心間線上において、励磁コイル3および検出コイル4が重なり合うコイル間距離dを、予め設定された所定距離Aとすることができる位置に、移動機構7により移動することを許容する第一空間部61aおよび第二空間部62aを形成する。ここで、所定距離Aは、検出コイル4の検出値に基づく距離であり、被測定物がない場合における検出コイル4の検出値、すなわち誘導起電力による電圧値が、所望する被測定物の損傷を検出することができる低い値となる、励磁コイル3および検出コイル4の重なり合うコイル間距離dである。本実施形態における所定距離Aは、被測定物がない場合における検出コイル4の検出値が最も低い値となるコイル間距離dである。筐体5Aにおいて第一溝部61および第二溝部62は、第一溝部61および第二溝部62の中心間の距離を所定距離Aとし、各溝部61,62の直径を各コイル3,4の直径よりも広く、例えば、合成樹脂部材による物性を考慮した公差分は少なくとも広くなるように設計され、設計に基づいて第一溝部61および第二溝部62が形成される。ここで、励磁コイル3が検出コイル4に与える影響について、検出コイル4の検出値には、先述のように、渦電流による磁束の他、励磁コイル3の磁束が影響するこことなる。そこで、軸方向から見て、励磁コイル3および検出コイル4の一部を重ねることにより、励磁コイル3のうち検出コイル4の径方向内側に位置する領域は、励磁コイル3の径方向外側と径方向内側との、互いに対向する向きに生じる磁束により、互いに磁束を打消し合うこととなる。 In the first groove portion 61 and the second groove portion 62, the first space portion 61a is provided so that the exciting coil 3 and the detection coil 4 can be moved by the moving mechanism 7 in a direction orthogonal to the axial direction, that is, on a plane orthogonal to the axial direction. And the second space portion 62a is formed. The width of each groove of the first groove portion 61 and the second groove portion 62 is formed to be larger than the width of the exciting coil 3 and the detection coil 4 when viewed from the vertically upward direction. The first groove portion 61 and the second groove portion 62 are located between the centers of the exciting coil 3 and the detection coil 4 when the exciting coil 3 and the detection coil 4 are viewed from the axial direction in the first space portion 61a and the second space portion 62a. The first space portion 61a and the first space portion 61a and the first space portion 61a that allow the moving mechanism 7 to move the distance d between the coils on which the exciting coil 3 and the detection coil 4 overlap on the wire to a position where the preset predetermined distance A can be set. The two space portions 62a are formed. Here, the predetermined distance A is a distance based on the detection value of the detection coil 4, and the detection value of the detection coil 4 when there is no object to be measured, that is, the voltage value due to the induced electromotive force is the desired damage to the object to be measured. Is a distance d between the overlapping coils of the exciting coil 3 and the detection coil 4, which is a low value at which the above can be detected. The predetermined distance A in this embodiment is the inter-coil distance d at which the detection value of the detection coil 4 is the lowest value when there is no object to be measured. In the housing 5A, the first groove portion 61 and the second groove portion 62 have a predetermined distance A between the centers of the first groove portion 61 and the second groove portion 62, and the diameters of the groove portions 61 and 62 are the diameters of the coils 3 and 4. The first groove portion 61 and the second groove portion 62 are formed based on the design, for example, the tolerance is designed to be wider in consideration of the physical properties of the synthetic resin member. Here, regarding the influence of the exciting coil 3 on the detection coil 4, the detection value of the detection coil 4 is affected by the magnetic flux of the exciting coil 3 in addition to the magnetic flux due to the eddy current as described above. Therefore, when viewed from the axial direction, the exciting coil 3 and a part of the detection coil 4 are overlapped so that the region of the exciting coil 3 located inside the detection coil 4 in the radial direction is the radial outside and the diameter of the exciting coil 3. The magnetic fluxes generated in the directions facing each other with the inside of the direction cancel each other out.

第一溝部61および第二溝部62は、凹形状、つまり溝形状に形成されることにより、第一底部61bおよび第二底部62bを有する。第一底部61bに励磁コイル3が載置され、第二底部62bに検出コイル4が載置される。すなわち、第一底部61bおよび第二底部62bは、励磁コイル3および検出コイル4の鉛直下方向の移動を規制するものである。第二底部62bは、第一底部61bより検出コイル4の軸方向における厚み分だけ、鉛直下方向側に形成される。したがって、励磁コイル3および検出コイル4は、第一空間部61aおよび第二空間部62aに保持された際、軸方向において接触した状態で保持される。 The first groove portion 61 and the second groove portion 62 have a first bottom portion 61b and a second bottom portion 62b by being formed in a concave shape, that is, a groove shape. The exciting coil 3 is mounted on the first bottom portion 61b, and the detection coil 4 is mounted on the second bottom portion 62b. That is, the first bottom portion 61b and the second bottom portion 62b regulate the movement of the exciting coil 3 and the detection coil 4 in the vertical downward direction. The second bottom portion 62b is formed vertically downward by the thickness of the detection coil 4 in the axial direction from the first bottom portion 61b. Therefore, when the exciting coil 3 and the detection coil 4 are held in the first space portion 61a and the second space portion 62a, they are held in contact with each other in the axial direction.

移動機構7は、第一空間部61aおよび第二空間部62aにおいて、励磁コイル3および検出コイル4を、軸方向と直交し、互いに交差する二方向に移動させるものである。本実施形態における二方向とは、第一空間部61aおよび第二空間部62aとが隣り合って形成される第一方向と、第一方向と直交する第二方向であり、第一方向が筐体5Aの幅方向であり、第二方向が筐体5Aの奥行き方向である。移動機構7は、筐体5Aと同じ非磁性材料により形成される。本実施形態においては、筐体5Aと同様に、合成樹脂部材により形成される。移動機構7は、複数の貫通孔71と、ネジ部材72とを有する。 The moving mechanism 7 moves the exciting coil 3 and the detection coil 4 in the first space portion 61a and the second space portion 62a in two directions that are orthogonal to the axial direction and intersect with each other. The two directions in the present embodiment are a first direction in which the first space portion 61a and the second space portion 62a are formed adjacent to each other, and a second direction orthogonal to the first direction, and the first direction is a casing. The width direction of the body 5A, and the second direction is the depth direction of the housing 5A. The moving mechanism 7 is made of the same non-magnetic material as the housing 5A. In the present embodiment, it is formed of a synthetic resin member like the housing 5A. The moving mechanism 7 has a plurality of through holes 71 and a screw member 72.

貫通孔71は、内周面に雌ネジ溝が形成された、いわゆるネジ孔である。貫通孔71は、筐体5Aの外部と第一空間部61aおよび第二空間部62aとをそれぞれ貫通して形成される。貫通孔71は、第一方向に沿って形成される第一貫通孔71aと、第二方向に沿って形成される第二貫通孔71bとを有する。第一貫通孔71aは第一溝部61において、第一溝部61の中心を通り互いに対向して2つ設けられ、第二貫通孔71bは第一溝部61において、第一溝部61の中心を通り互いに対向して2つ設けられる。第二溝部62においても同様に、第一貫通孔71aは第二溝部62の中心を通り互いに対向して2つ設けられ、第二貫通孔71bは第二溝部62において、第二溝部62の中心を通り互いに対向して2つ設けられる。すなわち、本実施形態において、貫通孔71は、筐体5Aに8つが設けられることとなる。ネジ部材72は、外周面に貫通孔71の雌ネジ溝と螺合する雄ネジ溝が形成される。ネジ部材72は、例えば止めネジである。ネジ部材72は、各貫通孔71にそれぞれ対応して設けられる。各ネジ部材72は、各貫通孔71にそれぞれ挿入され雌ネジ溝と螺合することで、第一空間部61aおよび第二空間部62aに先端部が露出する。 The through hole 71 is a so-called screw hole in which a female screw groove is formed on the inner peripheral surface. The through hole 71 is formed so as to penetrate the outside of the housing 5A and the first space portion 61a and the second space portion 62a, respectively. The through hole 71 has a first through hole 71a formed along the first direction and a second through hole 71b formed along the second direction. Two first through holes 71a are provided in the first groove 61 through the center of the first groove 61 and opposed to each other, and two second through holes 71b pass through the center of the first groove 61 in the first groove 61 and face each other. Two are provided facing each other. Similarly, in the second groove portion 62, two first through holes 71a pass through the center of the second groove portion 62 and face each other, and two second through holes 71b are provided in the second groove portion 62 at the center of the second groove portion 62. Two are provided facing each other through. That is, in the present embodiment, eight through holes 71 are provided in the housing 5A. The screw member 72 has a male screw groove formed on the outer peripheral surface thereof to be screwed with the female screw groove of the through hole 71. The screw member 72 is, for example, a set screw. The screw member 72 is provided corresponding to each through hole 71. Each screw member 72 is inserted into each through hole 71 and screwed into the female screw groove, so that the tip portion is exposed to the first space portion 61a and the second space portion 62a.

筐体カバー8は、第一空間部61aおよび第二空間部62aにそれぞれ保持した励磁コイル3および検出コイル4が、筐体5Aから落下することおよび外部に露出することを防ぐものである。筐体カバー8は、筐体5Aと同様に、合成樹脂部材により形成される。筐体カバー8は、外周面51と対向し、かつ接触して、締結部材により筐体5Aに取り付けられる。筐体カバー8が筐体5Aに取り付けられることにより、第一空間部61aおよび第二空間部62aは、閉塞され、筐体5Aの外部と遮断された閉空間となる。筐体カバー8は、筐体5Aにおける各締結用貫通孔52に対して筐体カバー8を介して挿入される合成樹脂部材のネジ(締結部材)があるため、筐体カバー8を筐体5Aに取り付けた状態において、各締結用貫通孔52に対応する位置にそれぞれ貫通孔が設けられる。 The housing cover 8 prevents the exciting coil 3 and the detection coil 4 held in the first space portion 61a and the second space portion 62a, respectively, from falling from the housing 5A and being exposed to the outside. The housing cover 8 is formed of a synthetic resin member like the housing 5A. The housing cover 8 is attached to the housing 5A by a fastening member so as to face and contact the outer peripheral surface 51. When the housing cover 8 is attached to the housing 5A, the first space portion 61a and the second space portion 62a are closed to form a closed space isolated from the outside of the housing 5A. Since the housing cover 8 has a screw (fastening member) of a synthetic resin member that is inserted into each fastening through hole 52 in the housing 5A via the housing cover 8, the housing cover 8 is mounted on the housing 5A. A through hole is provided at a position corresponding to each fastening through hole 52 in the state of being attached to the above.

制御装置10は、渦電流探傷検査装置1を制御するものである。制御装置10は、電源部12と、検出部13と、表示部14と、を備える。電源部12は、外部の交流電源100と電気的に接続され、励磁コイル3に交流電圧を印加するものであり、例えば、商用電源である。検出部13は、検出コイル4の誘導起電力による電圧値を検出するものである。検出部13は、増幅回路13aと、電圧計13bとを備える。増幅回路13aは、検出コイル4と電気的に接続されており、検出コイル4の両端において発生した誘導起電力による電圧を増幅する。電圧計13bは、増幅された電圧の電圧値を検出値として検出する。表示部14は、検出部13と電気的に接続されており、電圧計13bが検出した電圧を、波形などで出力し、作業者が認識できるように表示するモニターである。 The control device 10 controls the eddy current flaw detection inspection device 1. The control device 10 includes a power supply unit 12, a detection unit 13, and a display unit 14. The power supply unit 12 is electrically connected to an external AC power supply 100 and applies an AC voltage to the exciting coil 3, and is, for example, a commercial power supply. The detection unit 13 detects the voltage value due to the induced electromotive force of the detection coil 4. The detection unit 13 includes an amplifier circuit 13a and a voltmeter 13b. The amplifier circuit 13a is electrically connected to the detection coil 4 and amplifies the voltage due to the induced electromotive force generated at both ends of the detection coil 4. The voltmeter 13b detects the voltage value of the amplified voltage as a detection value. The display unit 14 is a monitor that is electrically connected to the detection unit 13 and outputs the voltage detected by the voltmeter 13b as a waveform or the like so that the operator can recognize it.

次に、プローブ2の組み付けの一例について説明する。まず、作業員は、筐体5Aの第二溝部62に検出コイル4を挿入し、次に第一溝部61に励磁コイル3を挿入する。次に、作業員は、各貫通孔71に対しそれぞれネジ部材72を挿入し、各貫通孔71に対して各ネジ部材72を螺合させる。作業員が、各ネジ部材72を螺合させ続けることにより、各ネジ部材72は、第一空間部61a側および第二空間部62a側にそれぞれ移動し、第一空間部61aおよび第二空間部62aにそれぞれ突出する。第一空間部61aおよび第二空間部62aに突出したネジ部材72は、励磁コイル3および検出コイル4とそれぞれ当接し、励磁コイル3および検出コイル4の第一空間部61aおよび第二空間部62aに対する位置を規制する。ここで、励磁コイル3および検出コイル4のそれぞれの導体の端部には、不図示の端子が電気的に接続されている。これらの端子は、筐体5Aの不図示のコネクタ部と嵌合されるようになっている。したがって、上記の端子とコネクタ部とを嵌合させることにより、励磁コイル3は電源部12と、検出コイル4は検出部13とそれぞれ電気的に接続されることとなる。次に、作業員は、筐体5Aに筐体カバー8を取り付け、締結用貫通孔52にネジを挿入して筐体5Aと筐体カバー8を締結させる。以上により、プローブ2の組み付けが完了する。 Next, an example of assembling the probe 2 will be described. First, the worker inserts the detection coil 4 into the second groove portion 62 of the housing 5A, and then inserts the excitation coil 3 into the first groove portion 61. Next, the worker inserts the screw member 72 into each through hole 71, and screwes each screw member 72 into each through hole 71. As the worker keeps screwing each screw member 72, each screw member 72 moves to the first space portion 61a side and the second space portion 62a side, respectively, and the first space portion 61a and the second space portion 62a, respectively. Each protrudes to 62a. The screw member 72 protruding from the first space portion 61a and the second space portion 62a comes into contact with the exciting coil 3 and the detection coil 4, respectively, and the first space portion 61a and the second space portion 62a of the exciting coil 3 and the detection coil 4 respectively. Regulate the position with respect to. Here, terminals (not shown) are electrically connected to the ends of the conductors of the exciting coil 3 and the detection coil 4. These terminals are fitted with a connector portion (not shown) of the housing 5A. Therefore, by fitting the terminal and the connector portion, the exciting coil 3 is electrically connected to the power supply unit 12, and the detection coil 4 is electrically connected to the detection unit 13. Next, the worker attaches the housing cover 8 to the housing 5A, inserts a screw into the fastening through hole 52, and fastens the housing 5A and the housing cover 8. As described above, the assembly of the probe 2 is completed.

次に、作業者が、励磁コイル3および検出コイル4を移動機構7により移動させ、コイル間距離dを所定距離Aとするための調整作業について説明する。まず、作業者は、励磁コイル3および検出コイル4のコイル間距離dを所定距離Aに対しておおまかに合わせるため、励磁コイル3および検出コイル4を移動させる方向において、最も検出コイル4の検出値に影響を与える方向である、第一方向に対して調整を行う。作業者は、被測定物がない状態において、まず各第一貫通孔71aに挿入された各ネジ部材72を、表示部14に表示された検出コイル4の検出値を確認しながら、第一空間部61aおよび第二空間部62aにおいて、それぞれネジ部材72の第一貫通孔71aに対する挿抜方向に移動させる。このとき、励磁コイル3および検出コイル4は、ネジ部材72が当接し第一方向に沿って押圧されることで、第一空間部61aおよび第二空間部62aを幅方向、すなわち第一方向に沿って移動する。作業員が、励磁コイル3および検出コイル4を移動させ、表示部14に表示された検出値が最も小さくなったとき、励磁コイル3および検出コイル4の幅方向、すなわち第一方向における位置が決定される。次に、作業者は、励磁コイル3および検出コイル4を第二方向に対して移動させ、微細な調整を行う。作業者は、各第二貫通孔71bに挿入された各ネジ部材72に対して、幅方向と同様に、検出コイル4の検出値を確認しながら、各ネジ部材72を各第二貫通孔71bに対する挿抜方向に移動させ、励磁コイル3および検出コイル4を奥行き方向、すなわち第二方向に沿って移動させる。そして、表示部14に表示された検出値が最も小さくなったとき、励磁コイル3および検出コイル4の奥行き方向、すなわち第二方向における位置が決定される。以上により、励磁コイル3および検出コイル4は、重なり合うコイル間距離dが所定距離Aとなるように調整され、筐体5Aに保持される。 Next, an adjustment work for the operator to move the exciting coil 3 and the detection coil 4 by the moving mechanism 7 and set the distance d between the coils to a predetermined distance A will be described. First, in order to roughly match the distance d between the coils of the exciting coil 3 and the detection coil 4 with respect to the predetermined distance A, the operator roughly adjusts the detection value of the detection coil 4 in the direction of moving the excitation coil 3 and the detection coil 4. Make adjustments to the first direction, which is the direction that affects. In the state where there is no object to be measured, the operator first inserts each screw member 72 into each first through hole 71a into the first space while checking the detection value of the detection coil 4 displayed on the display unit 14. In the portion 61a and the second space portion 62a, the screw member 72 is moved in the insertion / removal direction with respect to the first through hole 71a, respectively. At this time, the exciting coil 3 and the detection coil 4 are pressed against the screw member 72 in the first direction to move the first space portion 61a and the second space portion 62a in the width direction, that is, in the first direction. Move along. When the worker moves the exciting coil 3 and the detection coil 4 and the detected value displayed on the display unit 14 becomes the smallest, the positions of the exciting coil 3 and the detection coil 4 in the width direction, that is, in the first direction are determined. Will be done. Next, the operator moves the exciting coil 3 and the detection coil 4 in the second direction to make fine adjustments. The operator makes each screw member 72 into each second through hole 71b while checking the detection value of the detection coil 4 for each screw member 72 inserted into each second through hole 71b in the same manner as in the width direction. The exciting coil 3 and the detection coil 4 are moved in the depth direction, that is, in the second direction. Then, when the detected value displayed on the display unit 14 becomes the smallest, the positions of the exciting coil 3 and the detection coil 4 in the depth direction, that is, in the second direction are determined. As described above, the exciting coil 3 and the detection coil 4 are adjusted so that the distance d between the overlapping coils is a predetermined distance A, and is held in the housing 5A.

本実施形態における渦電流探傷検査装置1は、第一空間部61aおよび第二空間部62aにおいて、励磁コイル3および検出コイル4が移動機構7により移動できるように形成される。第一空間部61aおよび第二空間部62aは、励磁コイル3および検出コイル4を移動機構7により移動する際に、コイル間距離dを所定距離Aとすることができる位置することが許容されている空間部に形成される。従って、励磁コイル3および検出コイル4は、第一空間部61aおよび第二空間部62aにそれぞれ保持した励磁コイル3および検出コイル4を、移動機構7により、コイル間距離dが所定距離Aとなるように調整して配置することができる。 The eddy current flaw detection inspection device 1 in the present embodiment is formed in the first space portion 61a and the second space portion 62a so that the exciting coil 3 and the detection coil 4 can be moved by the moving mechanism 7. When the exciting coil 3 and the detection coil 4 are moved by the moving mechanism 7, the first space portion 61a and the second space portion 62a are allowed to be positioned so that the distance d between the coils can be set to a predetermined distance A. It is formed in the space where it is. Therefore, the exciting coil 3 and the detection coil 4 have the exciting coil 3 and the detection coil 4 held in the first space portion 61a and the second space portion 62a, respectively, by the moving mechanism 7, and the distance d between the coils becomes a predetermined distance A. It can be adjusted and arranged as follows.

ここで、調整時における検出値の変化について説明する。図5は、検出値の変化を示す図である。縦軸は検出コイル4の検出値の変化[db]であり、横軸は周波数[Hz]である。検出値の変化には、コイル内径20ミリの励磁コイル3および検出コイル4を用いた。なお、L1は、被測定物があり、かつコイル間距離dを所定距離Aにした場合の検出コイル4の検出値である。L2は、被測定物がなく、かつコイル間距離dを所定距離Aに調整した場合の検出コイル4の検出値である。L3は、被測定物がなく、励磁コイル3を、コイル間距離dが所定距離Aとなる位置から第二方向に、微小、ここでは−1[mm]移動させた場合の検出コイル4の検出値である。L4は、被測定物がなく、励磁コイル3を、コイル間距離dが所定距離Aとなる位置から第二方向に、微小、ここでは+1[mm]移動させた場合の検出コイル4の検出値である。 Here, the change of the detected value at the time of adjustment will be described. FIG. 5 is a diagram showing changes in detected values. The vertical axis is the change [db] of the detected value of the detection coil 4, and the horizontal axis is the frequency [Hz]. An exciting coil 3 and a detection coil 4 having a coil inner diameter of 20 mm were used to change the detected value. L1 is a detection value of the detection coil 4 when there is an object to be measured and the distance d between the coils is set to a predetermined distance A. L2 is a detection value of the detection coil 4 when there is no object to be measured and the distance d between the coils is adjusted to a predetermined distance A. L3 detects the detection coil 4 when there is no object to be measured and the exciting coil 3 is slightly moved in the second direction from a position where the distance d between the coils is a predetermined distance A, here, by -1 [mm]. The value. L4 is the detection value of the detection coil 4 when there is no object to be measured and the exciting coil 3 is slightly moved in the second direction from the position where the distance d between the coils is the predetermined distance A, here, by +1 [mm]. Is.

励磁コイル3および検出コイル4をコイル間距離dが所定距離Aとなるように配置すると、被測定物の有無により検出値の差ΔVは、約25[db]の差を示している。一方、励磁コイル3および検出コイル4をコイル間距離dが所定距離Aとなる位置から±1[mm]となるように配置すると、コイル間距離dが所定距離Aの検出値と比較して、約5[db]の検出値の差が生じる。1[mm]はコイル内径に対して約5%であるが、5[db]は検出値の差ΔVに対して約20%である。つまり、コイル間距離dが所定距離Aから微小約5%ずれるだけで、検出値に大きな影響を与える。 When the exciting coil 3 and the detection coil 4 are arranged so that the distance d between the coils is a predetermined distance A, the difference ΔV of the detected values depending on the presence or absence of the object to be measured shows a difference of about 25 [db]. On the other hand, when the exciting coil 3 and the detection coil 4 are arranged so as to be ± 1 [mm] from the position where the distance d between the coils is the predetermined distance A, the distance d between the coils is compared with the detected value of the predetermined distance A. There is a difference of about 5 [db] detected values. 1 [mm] is about 5% with respect to the inner diameter of the coil, while 5 [db] is about 20% with respect to the difference ΔV of the detected values. That is, even if the distance d between the coils deviates from the predetermined distance A by about 5%, the detected value is greatly affected.

従って、本実施形態における渦電流探傷検査装置1は、移動機構7により、励磁コイル3および検出コイル4の相対位置を微細に調整することで、励磁コイル3の磁束が検出コイル4の検出値に与える影響を小さくする所定距離Aに、コイル間距離dを一致(ほぼ一致も含む)させることができる。これにより、被測定物の有無による検出値の差ΔVを大きくすることができ、被測定物に損傷があった場合における検出値の変化を大きくすることができるので、被測定物の損傷の検出精度を向上することができる。また、渦電流探傷検査装置1は、被測定物の損傷の検出精度を向上することにより、被測定物の損傷が微小であっても損傷として検出することができる。 Therefore, in the eddy current flaw detection inspection device 1 in the present embodiment, the magnetic flux of the exciting coil 3 becomes the detected value of the detection coil 4 by finely adjusting the relative positions of the exciting coil 3 and the detection coil 4 by the moving mechanism 7. The distance d between the coils can be made to match (including substantially the same) with the predetermined distance A that reduces the influence. As a result, the difference ΔV between the detected values depending on the presence or absence of the object to be measured can be increased, and the change in the detected value when the object to be measured is damaged can be increased, so that the damage to the object to be measured can be detected. The accuracy can be improved. Further, the eddy current flaw detection inspection device 1 can detect even a minute damage to the object to be measured as damage by improving the detection accuracy of the damage to the object to be measured.

また、励磁コイル3および検出コイル4は、導線を複数回巻き付けて束状にして形成されるので、個々の寸法にバラツキが生じ、励磁コイル3と検出コイル4との組み合わせによっては、励磁コイル3の磁束が検出コイル4の検出値に与える影響を最も小さくするコイル間距離dが所定距離Aと微小ながら異なる場合がある。本実施形態における渦電流探傷検査装置1は、移動機構7により、励磁コイル3および検出コイル4の相対位置を微細に調整することができるので、被測定物に損傷があった場合における検出値の変化を大きくすることができるので、被測定物の損傷の検出精度を向上することができる。 Further, since the exciting coil 3 and the detection coil 4 are formed by winding the conducting wire a plurality of times to form a bundle, the individual dimensions vary, and depending on the combination of the exciting coil 3 and the detection coil 4, the exciting coil 3 is formed. The inter-coil distance d, which minimizes the influence of the magnetic flux on the detection value of the detection coil 4, may be slightly different from the predetermined distance A. In the eddy current flaw detection inspection device 1 of the present embodiment, the relative positions of the exciting coil 3 and the detection coil 4 can be finely adjusted by the moving mechanism 7, so that the detected value when the object to be measured is damaged. Since the change can be made large, the accuracy of detecting damage to the object to be measured can be improved.

また、本実施形態における渦電流探傷検査装置1は、移動機構7における貫通孔71が、第一空間部61aと第二空間部62aとが隣り合って形成される第一方向と、第一方向と直交する第二方向に沿って形成されるので、作業員は、検出コイル4の検出値に最も影響が出る第一方向に沿って励磁コイル3および検出コイル4を移動させて両コイルをある程度位置決めした後、第二方向に沿って励磁コイル3および検出コイル4を移動させて微小に調整することができるので、より簡単に、励磁コイル3および検出コイル4を移動させて調整を行うことができる。 Further, in the eddy current flaw detection inspection device 1 of the present embodiment, the through hole 71 in the moving mechanism 7 is formed in the first direction in which the first space portion 61a and the second space portion 62a are adjacent to each other, and in the first direction. Since it is formed along the second direction orthogonal to, the worker moves the exciting coil 3 and the detection coil 4 along the first direction in which the detection value of the detection coil 4 is most affected, and moves both coils to some extent. After positioning, the exciting coil 3 and the detection coil 4 can be moved along the second direction to make fine adjustments. Therefore, it is easier to move the exciting coil 3 and the detection coil 4 to make adjustments. it can.

また、本実施形態における移動機構7は、内周面に雌ネジ溝が形成された貫通孔71、いわゆるネジ孔と、上記雌ネジ溝に螺合する雄ネジ溝が外周面に形成されたネジ部材72であるので、上記ネジ溝の径およびピッチを計算して設定することで、ネジ部材72の螺合の際の回転量に対応して、第一空間部61aおよび第二空間部62aにおける励磁コイル3および検出コイル4の移動量を微小に調整することができる。従って、渦電流探傷検査装置1は、作業者が励磁コイル3および検出コイル4を直接手で移動させる場合と比較し、励磁コイル3および検出コイル4の移動をより簡易に、かつ微小な調整によりコイル間距離dを所定距離Aとするように調整することができる。 Further, in the moving mechanism 7 of the present embodiment, a through hole 71 having a female screw groove formed on the inner peripheral surface, a so-called screw hole, and a screw having a male screw groove screwed into the female screw groove formed on the outer peripheral surface. Since it is a member 72, by calculating and setting the diameter and pitch of the screw groove, the first space portion 61a and the second space portion 62a correspond to the amount of rotation when the screw member 72 is screwed. The amount of movement of the exciting coil 3 and the detection coil 4 can be finely adjusted. Therefore, in the eddy current flaw detection inspection device 1, the movement of the exciting coil 3 and the detection coil 4 can be performed more easily and by fine adjustment, as compared with the case where the operator directly moves the exciting coil 3 and the detection coil 4 by hand. The distance d between the coils can be adjusted to be a predetermined distance A.

また、移動機構7は、ネジ孔である貫通孔71とネジ部材72であることにより、ネジ部材72の締め付けトルクを調整することができるので、ネジ部材72が励磁コイル3および検出コイル4を押圧する力を調整することができ、励磁コイル3および検出コイル4が、ネジ部材72から押圧されることで変形することを抑制することができる。 Further, since the moving mechanism 7 has the through hole 71 which is a screw hole and the screw member 72, the tightening torque of the screw member 72 can be adjusted, so that the screw member 72 presses the exciting coil 3 and the detection coil 4. The force to be applied can be adjusted, and the exciting coil 3 and the detection coil 4 can be prevented from being deformed by being pressed by the screw member 72.

[実施形態2]
次に、実施形態2に係る渦電流探傷検査装置1について説明する。図6は、実施形態2に係る渦電流探傷検査装置の部分拡大図である。図7は、実施形態2に係る渦電流探傷検査装置の部分拡大図である。実施形態2に係る渦電流探傷検査装置1が実施形態1に係る渦電流探傷検査装置1と異なる点は、検出コイル4が筐体5Bにインサート成形によって固定されて保持される点である。なお、上述した実施形態1と共通する構成、作用、効果については、重複した説明はできるだけ省略する。
[Embodiment 2]
Next, the eddy current flaw detection inspection device 1 according to the second embodiment will be described. FIG. 6 is a partially enlarged view of the eddy current flaw detection inspection device according to the second embodiment. FIG. 7 is a partially enlarged view of the eddy current flaw detection inspection device according to the second embodiment. The eddy current flaw detection inspection device 1 according to the second embodiment is different from the eddy current flaw detection inspection device 1 according to the first embodiment in that the detection coil 4 is fixed and held in the housing 5B by insert molding. The configuration, operation, and effect common to the above-described first embodiment will be omitted as much as possible.

筐体5Bは、検出コイル4に対応する第一保持部5B1と、励磁コイル3に対応する第二保持部5B2とを有する。第一保持部5B1および第二保持部5B2は、鉛直方向において重ねられて合成樹脂部材のネジなどにより締結され、筐体5Bを構成する。第一保持部5B1は、第二保持部5B2の鉛直下方向に位置する。 The housing 5B has a first holding portion 5B1 corresponding to the detection coil 4 and a second holding portion 5B2 corresponding to the exciting coil 3. The first holding portion 5B1 and the second holding portion 5B2 are overlapped in the vertical direction and fastened with screws of a synthetic resin member or the like to form a housing 5B. The first holding portion 5B1 is located in the vertically downward direction of the second holding portion 5B2.

第一保持部5B1は、一方のコイルである検出コイル4を第一空間部54に対して移動を規制して保持するものである。本実施形態における第一保持部5B1は、検出コイル4をインサート成形により内部に保持する。つまり、第一空間部54は、検出コイル4が存在する部分であり、検出コイル4との間に隙間が形成されていない。検出コイル4は、第一保持部5B1の外周面53に近接した状態で保持される。第一保持部5B1には、外周面53に、第二保持部5B2とネジなどにより締結されるための複数の不図示のネジ孔が設けられる。 The first holding portion 5B1 regulates and holds the detection coil 4, which is one of the coils, with respect to the first space portion 54. The first holding portion 5B1 in the present embodiment holds the detection coil 4 inside by insert molding. That is, the first space portion 54 is a portion where the detection coil 4 exists, and no gap is formed between the first space portion 54 and the detection coil 4. The detection coil 4 is held in a state close to the outer peripheral surface 53 of the first holding portion 5B1. The first holding portion 5B1 is provided with a plurality of screw holes (not shown) for being fastened to the second holding portion 5B2 by screws or the like on the outer peripheral surface 53.

第二保持部5B2は、励磁コイル3を保持するための第二溝部62が外周面51に形成され、第二空間部62aに他方のコイルである励磁コイル3が保持される。第二保持部5B2は、第一保持部5B1に対して、励磁コイル3および検出コイル4が重なり合うように固定されるものである。 In the second holding portion 5B2, a second groove portion 62 for holding the exciting coil 3 is formed on the outer peripheral surface 51, and the exciting coil 3 which is the other coil is held in the second space portion 62a. The second holding portion 5B2 is fixed to the first holding portion 5B1 so that the exciting coil 3 and the detection coil 4 overlap each other.

本実施形態における第二溝部62についても、実施形態1と同様に、励磁コイル3を第二空間部62aにおいて、軸方向から見た場合に、コイル間距離dを、予め設定された所定距離Aとすることができる位置に、移動機構7により移動することを許容する第二空間部62aを形成する。第二保持部5B2において第二溝部62は、第一空間部54および第二溝部62の中心間の距離を所定距離Aとし、第二溝部62の直径を励磁コイル3の直径よりも広く、例えば、合成樹脂部材による物性を考慮した公差分は少なくとも広くなるように設計され、設計に基づいて第二溝部62が形成される。 Regarding the second groove portion 62 in the present embodiment, similarly to the first embodiment, when the exciting coil 3 is viewed from the axial direction in the second space portion 62a, the distance d between the coils is set to a preset predetermined distance A. A second space portion 62a that is allowed to move by the moving mechanism 7 is formed at a position where the moving mechanism 7 can be used. In the second holding portion 5B2, the second groove portion 62 has a predetermined distance A between the centers of the first space portion 54 and the second groove portion 62, and the diameter of the second groove portion 62 is wider than the diameter of the exciting coil 3, for example. The tolerance of the synthetic resin member in consideration of the physical properties is designed to be at least wide, and the second groove portion 62 is formed based on the design.

第二溝部62は、溝形状に形成されることにより、第二底部62bを有する。第二底部62bに励磁コイル3が載置される。すなわち、第二底部62bは、励磁コイル3の鉛直上方向の移動を規制するものである。第二底部62bは、励磁コイル3の軸方向における厚み分だけ、鉛直上方向側に形成される。したがって、励磁コイル3および検出コイル4は、第二空間部62aおよび第一空間部54に保持された際、軸方向において近接した状態で保持される。 The second groove portion 62 has a second bottom portion 62b because it is formed in a groove shape. The exciting coil 3 is placed on the second bottom portion 62b. That is, the second bottom portion 62b regulates the vertical movement of the exciting coil 3. The second bottom portion 62b is formed on the vertically upward side by the thickness of the exciting coil 3 in the axial direction. Therefore, when the exciting coil 3 and the detection coil 4 are held in the second space portion 62a and the first space portion 54, they are held in a state of being close to each other in the axial direction.

移動機構7は、第二保持部5B2に設けられる。第二保持部5B2には、実施形態1と同様に、複数の貫通孔71が設けられることとなり、第一方向に沿って形成される第一貫通孔71aと、第二方向に沿って形成される第二貫通孔71bとが形成される。第一貫通孔71aは第二溝部62の中心を通り、互いに対向して2つ設けられ、第二貫通孔71bは第二溝部62の中心を通り、互いに対向して2つ設けられる。 The moving mechanism 7 is provided in the second holding portion 5B2. Similar to the first embodiment, the second holding portion 5B2 is provided with a plurality of through holes 71, and the first through holes 71a formed along the first direction and the first through holes 71a formed along the second direction are formed. A second through hole 71b is formed. The first through hole 71a passes through the center of the second groove portion 62 and is provided so as to face each other, and the second through hole 71b passes through the center of the second groove portion 62 and is provided so as to face each other.

第二保持部5B2は、第二底部62bに励磁コイル3を載置し、各ネジ部材72によって保持した状態で、外周面51を鉛直下方向側にして、すなわち第一保持部5B1の鉛直上方向側の外周面53と接触して、第一保持部5B1と締結される。従って、第二空間部62aは、第一保持部5B1の外周面53により閉空間となり、励磁コイル3が筐体5Bの外部に露出することが抑制される。第二保持部5B2は、外周面51から鉛直方向に対向する外周面まで、第一保持部5B1と第二保持部5B2とを締結するネジ孔が貫通する、複数の締結用貫通孔52が設けられる。 In the second holding portion 5B2, the exciting coil 3 is placed on the second bottom portion 62b and held by each screw member 72, and the outer peripheral surface 51 is vertically downward, that is, vertically above the first holding portion 5B1. It comes into contact with the outer peripheral surface 53 on the directional side and is fastened to the first holding portion 5B1. Therefore, the second space portion 62a is closed by the outer peripheral surface 53 of the first holding portion 5B1, and the exciting coil 3 is suppressed from being exposed to the outside of the housing 5B. The second holding portion 5B2 is provided with a plurality of fastening through holes 52 through which the screw holes for fastening the first holding portion 5B1 and the second holding portion 5B2 penetrate from the outer peripheral surface 51 to the outer peripheral surface facing in the vertical direction. Be done.

次に、作業者が、励磁コイル3を移動機構7により移動させ、コイル間距離dを所定距離Aとするための調整作業について説明する。まず、作業者は、第一方向において励磁コイル3の調整を行う。作業者は、実施形態1と同様に、被測定物がない状態において、各第一貫通孔71aに挿入された各ネジ部材72を、表示部14に表示された検出コイル4の検出値を確認しながら、第二空間部62aにおいて、ネジ部材72の第一貫通孔71aに対する挿抜方向に移動させる。このとき、励磁コイル3は、ネジ部材72により、第一方向に沿って移動する。作業員が、励磁コイル3を移動させ、表示部14に表示された検出値が最も小さくなったとき、励磁コイル3の第一方向における位置が決定される。次に、作業者は、第二方向において励磁コイル3を移動させ、微調整を行う。作業者は、各第二貫通孔71bに挿入された各ネジ部材72に対して、幅方向と同様に検出コイル4の検出値を確認しながら、各ネジ部材72を各第二貫通孔71bに対する挿抜方向に移動させ、励磁コイル3を奥行き方向、すなわち第二方向に沿って移動させる。そして、表示部14に表示された検出値が最も小さくなったとき、励磁コイル3の奥行き方向、すなわち第二方向における位置が決定される。以上により、励磁コイル3および検出コイル4は、重なり合うコイル間距離dが所定距離Aとなるように調整され、筐体5Bに保持される。 Next, an adjustment work for the operator to move the exciting coil 3 by the moving mechanism 7 and set the distance d between the coils to a predetermined distance A will be described. First, the operator adjusts the exciting coil 3 in the first direction. Similar to the first embodiment, the operator confirms the detection value of the detection coil 4 displayed on the display unit 14 for each screw member 72 inserted into each first through hole 71a in a state where there is no object to be measured. At the same time, in the second space portion 62a, the screw member 72 is moved in the insertion / removal direction with respect to the first through hole 71a. At this time, the exciting coil 3 is moved along the first direction by the screw member 72. When the worker moves the exciting coil 3 and the detected value displayed on the display unit 14 becomes the smallest, the position of the exciting coil 3 in the first direction is determined. Next, the operator moves the exciting coil 3 in the second direction to make fine adjustments. The operator applies each screw member 72 to each second through hole 71b while checking the detection value of the detection coil 4 for each screw member 72 inserted into each second through hole 71b in the same direction as in the width direction. It is moved in the insertion / extraction direction, and the exciting coil 3 is moved along the depth direction, that is, the second direction. Then, when the detected value displayed on the display unit 14 becomes the smallest, the position of the exciting coil 3 in the depth direction, that is, in the second direction is determined. As described above, the exciting coil 3 and the detection coil 4 are adjusted so that the distance d between the overlapping coils is a predetermined distance A, and is held in the housing 5B.

実施形態2における渦電流探傷検査装置1は、第一保持部5B1に検出コイル4が保持されているが、第二保持部5B2の励磁コイル3が移動機構7により移動可能に保持される。従って、実施形態1と同様に、励磁コイル3および検出コイル4は、第一空間部54および第二空間部62aにそれぞれ保持した検出コイル4および励磁コイル3のうち、励磁コイル3を移動機構7により、調整することで、コイル間距離dが所定距離Aとなるように配置することができる。これにより、渦電流探傷検査装置1は、被測定物の有無による検出値の差ΔVを大きくすることができ、被測定物に損傷があった場合における検出値の変化を大きくすることができるので、被測定物の損傷の検出精度を向上することができる。 In the eddy current flaw detection inspection device 1 according to the second embodiment, the detection coil 4 is held by the first holding portion 5B1, but the exciting coil 3 of the second holding portion 5B2 is movably held by the moving mechanism 7. Therefore, as in the first embodiment, the exciting coil 3 and the detection coil 4 move the exciting coil 3 among the detection coil 4 and the exciting coil 3 held in the first space portion 54 and the second space portion 62a, respectively. Therefore, by adjusting, the distance d between the coils can be arranged so as to be a predetermined distance A. As a result, the eddy current flaw detection inspection device 1 can increase the difference ΔV between the detected values depending on the presence or absence of the object to be measured, and can increase the change in the detected value when the object to be measured is damaged. , It is possible to improve the detection accuracy of damage to the object to be measured.

実施形態2における渦電流探傷検査装置1は、検出コイル4がインサート成形により第一保持部5B1に保持される。つまり、検出コイル4を移動させず、移動機構7を設けた第二保持部5B2に保持された励磁コイル3のみを移動させることにより、重なり合うコイル間距離dを調整する。従って、作業員は、励磁コイル3のみに対して調整作業を行えばよいので、調整作業に係る負荷を抑制することができる。 In the eddy current flaw detection inspection device 1 according to the second embodiment, the detection coil 4 is held by the first holding portion 5B1 by insert molding. That is, the distance d between the overlapping coils is adjusted by moving only the exciting coil 3 held by the second holding portion 5B2 provided with the moving mechanism 7 without moving the detection coil 4. Therefore, since the worker only needs to perform the adjustment work on the exciting coil 3, the load related to the adjustment work can be suppressed.

本実施形態における移動機構7は、すべて同一のネジ部材72を用いたが、これに限らない。例えば、対向する貫通孔71におけるネジ部材72のうちの一方を、非磁性材料であり、かつ弾性を有する例えば樹脂バネにしてもよい。これにより、各コイルの移動に対する一方側を、樹脂バネの弾性変形により保持することができ、ネジ部材72で保持する場合と同様の効果が得られる。 The moving mechanism 7 in the present embodiment uses the same screw member 72, but is not limited to this. For example, one of the screw members 72 in the facing through holes 71 may be made of a non-magnetic material and has elasticity, for example, a resin spring. As a result, one side of each coil with respect to movement can be held by elastic deformation of the resin spring, and the same effect as when holding by the screw member 72 can be obtained.

本実施形態における第二方向は、第一方向と直交する方向であるとしたが、これに限らない。第一方向に対して、鋭角や鈍角で交差する方向であっても、各コイルを軸方向と直交する平面上を移動させることができる。 The second direction in the present embodiment is assumed to be a direction orthogonal to the first direction, but is not limited to this. Each coil can be moved on a plane orthogonal to the axial direction even in a direction intersecting the first direction at an acute angle or an obtuse angle.

1 渦電流探傷検査装置
10 制御装置
11 ハーネス
12 電源部
13 検出部
14 表示部
2 プローブ
3 励磁コイル
4 検出コイル
5A,5B 筐体
5B1 第一保持部
5B2 第二保持部
51 外周面
53 外周面
54 第一空間部
6 溝部
61 第一溝部
61a 第一空間部
62 第二溝部
62a 第二空間部
7 移動機構
71 貫通孔
72 ネジ部材
8 筐体カバー
100 交流電源
1 Eddy current flaw detection inspection device 10 Control device 11 Harness 12 Power supply unit 13 Detection unit 14 Display unit 2 Probe 3 Excitation coil 4 Detection coil 5A, 5B Housing 5B1 First holding part 5B2 Second holding part 51 Outer surface 53 Outer surface 54 1st space part 6 Groove part 61 1st groove part 61a 1st space part 62 2nd groove part 62a 2nd space part 7 Moving mechanism 71 Through hole 72 Screw member 8 Housing cover 100 AC power supply

Claims (4)

リング状に形成され、被測定物に渦電流を発生させるために交流電圧が印加される励磁コイルと、
リング状に形成され、前記被測定物に発生した渦電流による磁束を検出する検出コイルと、
前記励磁コイルおよび前記検出コイルを互いの軸方向が平行であり、かつ前記軸方向から見た場合に、前記励磁コイルおよび前記検出コイルの一部が重なり合うように、内部に保持する筐体と、
を有するプローブと、
前記励磁コイルに前記交流電圧を印加する電源部と、
前記検出コイルの検出値を表示する表示部と、
を備え、
前記筐体は、非磁性材料で形成されており、
前記励磁コイルおよび前記検出コイルのうち、一方の前記コイルが保持される第一空間部と、
前記励磁コイルおよび前記検出コイルのうち、他方の前記コイルが保持される第二空間部と、
非磁性材料で形成されており、かつ前記励磁コイルおよび前記検出コイルのうち、少なくとも一方を前記軸方向と直交し、互いに交差する二方向に移動させる移動機構と、
を有し、
前記第一空間部および前記第二空間部のうち、前記移動機構により前記コイルを移動させることができる空間部は、
前記軸方向から見た場合に、前記励磁コイルおよび前記検出コイルの中心間線上において、前記励磁コイルおよび前記検出コイルが重なり合うコイル間距離を、前記検出コイルの検出値に基づいた所定距離とすることができる位置に、前記励磁コイルおよび前記検出コイルのうち、少なくとも一方の前記コイルが前記移動機構により移動することを許容する空間部であることを特徴とする、
渦電流探傷検査装置。
An exciting coil that is formed in a ring shape and to which an AC voltage is applied to generate an eddy current in the object to be measured.
A detection coil that is formed in a ring shape and detects the magnetic flux due to the eddy current generated in the object to be measured.
A housing that holds the exciting coil and the detection coil inside so that the exciting coil and a part of the detection coil overlap each other when the exciting coil and the detection coil are parallel to each other in the axial direction and viewed from the axial direction.
With a probe with
A power supply unit that applies the AC voltage to the exciting coil,
A display unit that displays the detected value of the detection coil and
With
The housing is made of a non-magnetic material and
A first space portion in which one of the exciting coil and the detection coil is held,
Of the exciting coil and the detection coil, the second space portion in which the other coil is held and
A moving mechanism that is made of a non-magnetic material and that moves at least one of the exciting coil and the detection coil in two directions that are orthogonal to the axial direction and intersect with each other.
Have,
Of the first space portion and the second space portion, the space portion in which the coil can be moved by the moving mechanism is
When viewed from the axial direction, the distance between the coils where the exciting coil and the detection coil overlap on the center line between the exciting coil and the detection coil shall be a predetermined distance based on the detection value of the detection coil. It is characterized in that it is a space portion that allows at least one of the exciting coil and the detection coil to move by the moving mechanism at a position where the coil can be moved.
Eddy current flaw detection inspection device.
請求項1に記載の渦電流探傷検査装置において、
前記二方向は、前記第一空間部および前記第二空間部が隣り合って形成される第一方向と、前記第一方向と直交する第二方向である、
渦電流探傷検査装置。
In the eddy current flaw detection inspection apparatus according to claim 1,
The two directions are a first direction in which the first space portion and the second space portion are formed adjacent to each other, and a second direction orthogonal to the first direction.
Eddy current flaw detection inspection device.
請求項1または2に記載の渦電流探傷検査装置において、
前記移動機構は、
前記筐体の外部と前記空間部とを貫通し、内周面に雌ネジ溝が形成された貫通孔と、
前記雌ネジ溝に螺合する雄ネジ溝が外周面に形成されるネジ部材と、
を有する、
渦電流探傷検査装置。
In the eddy current flaw detection inspection apparatus according to claim 1 or 2.
The moving mechanism
A through hole that penetrates the outside of the housing and the space and has a female screw groove formed on the inner peripheral surface.
A screw member having a male screw groove screwed into the female screw groove formed on the outer peripheral surface,
Have,
Eddy current flaw detection inspection device.
請求項1〜3のいずれか1つに記載の渦電流探傷検査装置において、
前記筐体は、
前記励磁コイルおよび前記検出コイルのうち、一方の前記コイルに対応する第一保持部と、

前記励磁コイルおよび前記検出コイルのうち、他方の前記コイルに対応する第二保持部と、
を有し、
前記第一保持部は、一方の前記コイルを前記第一空間部に対する移動を規制して保持するものであり、
前記第二保持部は、前記第一保持部に対して、前記励磁コイルおよび前記検出コイルの一部が重なり合うように固定されるものであり、
前記移動機構は、前記第二保持部に設けられる、
渦電流探傷検査装置。
In the eddy current flaw detection inspection device according to any one of claims 1 to 3.
The housing is
A first holding portion corresponding to one of the exciting coil and the detection coil,

Of the exciting coil and the detection coil, the second holding portion corresponding to the other coil and
Have,
The first holding portion regulates and holds one of the coils with respect to the first space portion.
The second holding portion is fixed to the first holding portion so that a part of the exciting coil and the detection coil overlap each other.
The moving mechanism is provided in the second holding portion.
Eddy current flaw detection inspection device.
JP2017027541A 2017-02-17 2017-02-17 Eddy current flaw detection inspection device Active JP6770455B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017027541A JP6770455B2 (en) 2017-02-17 2017-02-17 Eddy current flaw detection inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017027541A JP6770455B2 (en) 2017-02-17 2017-02-17 Eddy current flaw detection inspection device

Publications (2)

Publication Number Publication Date
JP2018132469A JP2018132469A (en) 2018-08-23
JP6770455B2 true JP6770455B2 (en) 2020-10-14

Family

ID=63249608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017027541A Active JP6770455B2 (en) 2017-02-17 2017-02-17 Eddy current flaw detection inspection device

Country Status (1)

Country Link
JP (1) JP6770455B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7475783B2 (en) 2020-07-07 2024-04-30 矢崎エナジーシステム株式会社 Conductor Deterioration Detection Device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56163450A (en) * 1980-05-21 1981-12-16 Hitachi Ltd Probing coil for detecting crack by utilizing eddy current
JPH10318988A (en) * 1997-03-19 1998-12-04 株式会社原子力エンジニアリング Eddy current flaw detection probe
JP2002221514A (en) * 1998-08-06 2002-08-09 Mitsubishi Heavy Ind Ltd Eddy current flaw detection probe
US6501267B1 (en) * 1998-08-06 2002-12-31 Mitsubishi Heavy Industries, Ltd. Eddy-current flaw detector probe
JP5286127B2 (en) * 2009-03-25 2013-09-11 矢崎エナジーシステム株式会社 Shield member abnormality detection method and shield member abnormality detection device
JP5495227B2 (en) * 2010-01-22 2014-05-21 株式会社環境総合テクノス Method and apparatus for measuring conductivity by equilibrium induction
JP2012173121A (en) * 2011-02-21 2012-09-10 Toshiba Corp Eddy current-utilizing flaw detection testing apparatus and testing method of the same

Also Published As

Publication number Publication date
JP2018132469A (en) 2018-08-23

Similar Documents

Publication Publication Date Title
US9851265B2 (en) Apparatus and method for measuring properties of a ferromagnetic material
JP3197155U (en) Screw detection device
US20110089938A1 (en) Device and Method for the Detection of Electrically Conducting Objects
JP2020034431A (en) Conductor degradation detecting device
US9915689B2 (en) Measurement device and mounting unit
JP2020034432A (en) Conductor degradation detecting device
US9482700B2 (en) Current detector to sense current without being in series with conductor
JP6770455B2 (en) Eddy current flaw detection inspection device
JP5730072B2 (en) Current sensor, table tap with current sensor, current sensor cover
US11092622B2 (en) Current detection device
US8289016B2 (en) Eddy-current flaw detection method and apparatus
US9689904B2 (en) Current sensor with stray magnetic field rejection
JP2011252778A (en) Method for detecting partial discharge of electrical device using magnetic field probe
JP6891021B2 (en) Eddy current displacement meter
JP5286127B2 (en) Shield member abnormality detection method and shield member abnormality detection device
WO2018142519A1 (en) Positioning jig for film thickness gauge
JP5281941B2 (en) Shield member abnormality detection method and shield member abnormality detection device
JP2016133459A (en) Eddy current flaw detection probe, and eddy current flaw detection device
JP5103117B2 (en) Induction heating device
JP5243828B2 (en) Eddy current flaw detection method and eddy current flaw detection sensor
WO2013018458A1 (en) Surface current probe
JP3168999U (en) Dissimilar gear inspection system
JP6962727B2 (en) Position detector
WO2020218132A1 (en) Magnetic sensor element, magnetic detector, motor having magnetic sensor element, and device having magnetic detector
JP2011053160A (en) Magnetic detection sensor

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200117

TRDD Decision of grant or rejection written
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200909

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200915

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200925

R150 Certificate of patent or registration of utility model

Ref document number: 6770455

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250