JP6735382B2 - Three-dimensional fine movement measuring device - Google Patents

Description

The present invention relates to a three-dimensional fine movement measuring device such as a scanning probe microscope having a mechanism for driving a stage.

The scanning probe microscope measures a surface shape of a sample by bringing a probe attached to the tip of a cantilever into proximity with or in contact with the sample surface. The measurement modes of the scanning probe microscope are (1) contact mode in which the atomic force between the probe and the sample is kept constant and the surface shape of the sample is measured, (2) the resonance frequency of the cantilever using a piezo element, etc. A method of measuring the shape of the sample by utilizing the fact that the amplitude of the probe is attenuated by the intermittent contact between the two when the probe is brought close to the sample by forcibly vibrating in the vicinity.・"Force mode (DFM measurement mode)"), (3) The cantilever is forced to vibrate near the resonance frequency by a piezo element etc., and when the probe is brought close to the sample, the force between them acts to resonate the probe. A method of measuring the shape and physical properties of a sample by utilizing the change of state (hereinafter, referred to as "non-contact mode (NC-AFM measurement mode)") is known.

Further, the scanning probe microscope includes two (two-axis) fine movement mechanisms (piezoelectric elements or the like) for scanning the sample in the xy (plane) directions and one (1) for scanning the sample in the z (height) direction. The sample is placed on the surface of a stage, which is provided on, for example, a fine movement unit including a fine movement mechanism (piezoelectric element or the like) for the axis. Since the voltage applied to the piezoelectric element is proportional to the displacement of the piezoelectric element to some extent, the height information of the sample surface can be calculated from the voltage applied to the piezoelectric element. However, since the operating characteristics of the piezoelectric element have hysteresis and creep, it is difficult to find the exact position of the piezoelectric element from the applied voltage.
Therefore, a technique has been developed in which a position detection sensor using impedance is provided on the piezoelectric element (see Patent Document 1). By using such a technique, it is possible to detect the positions of the three (three-axis) piezoelectric elements of the fine movement part and calculate the three-dimensional position of the sample placed on the fine movement part. is there.

JP 2009-225654 A

By the way, when the three-dimensional position of the sample is calculated by using the position detection sensor on each of the triaxial piezoelectric elements, the displacement of one axis detected for each piezoelectric element is combined in three directions. However, as shown in FIG. 6, since the piezoelectric element 1100a is slightly displaced in two orthogonal axes (for example, the y direction) other than the moving direction (x direction), the position detection sensor 1100s on the piezoelectric element 1100a can be used. The measured displacement amount in the x direction is d1, whereas the actual displacement amount is dx, which is a combination of d1 and a minute displacement in the y direction. Therefore, even if the displacement amounts detected by the position detection sensors of the triaxial piezoelectric elements are combined in the three directions, an error occurs between the displacement amount and the actual displacement amount.
On the other hand, since the sample measured by the scanning probe microscope is often fine, it is difficult to directly detect the position of this sample. Further, even if the position of the sample is to be measured, the position on the stage and the shape of the sample are different for each sample, so that the measurement conditions are also different, and it takes a lot of time and labor to adjust the measurement conditions.

The present invention has been made to solve the above-mentioned problems, and a three-dimensional position of a fixing member, which fixes a moving body such as a cantilever, does not move relative to a fine movement of the moving body or a base portion. It is an object of the present invention to provide a three-dimensional fine movement measuring device that can easily and accurately measure the position of a fixed member, and by extension, the position of a moving body by directly detecting the amount of movement by means of a moving amount detecting means fixed to the moving part.

The three-dimensional fine movement measuring apparatus of the present invention includes a moving body forming a cantilever, a fixing member to which the moving body is fixed,
The fixing member is fixed, and includes a three-dimensional fine movement unit capable of finely moving the moving body in three dimensions via the fixing member, and a three-dimensional coarse movement unit capable of coarse movement with a movement amount larger than that of the three-dimensional fine movement unit. The three-dimensional fine movement unit is fixed, and a first three-dimensional coarse movement unit that roughly moves the three-dimensional fine movement unit to one axis in the three-dimensional direction, which is the direction of gravity, and a first three-dimensional coarse movement unit. A three-dimensional coarse moving section including a second three-dimensional coarse moving section in which two axes different from the coarse moving axis coarsely move; and a base section to which the first and second three-dimensional coarse moving sections are fixed,
A three-dimensional fine movement measuring device, comprising: a movement amount detecting means fixed to the first three-dimensional coarse movement portion to detect a movement amount of the fixing member, wherein the three-dimensional fine movement portion and the second The three-dimensional coarse movement unit is fixed so as to face each other at different positions of the base unit, and a sample stage for arranging an object to be measured is installed on the moving body side of the second three-dimensional coarse movement unit. Become.
According to this three-dimensional fine movement measuring device, the movement amount detecting means fixed to the three-dimensional coarse movement portion that does not move the three-dimensional position of the fixing member to which the moving body is fixed relative to the fine movement of the moving body. The position of the fixed member, and by extension, the moving body can be easily and accurately measured by directly detecting the position.
Further, when an object placed on the opposite side of the moving body is placed via the three-dimensional coarse movement part, the heavier the object, the more the three-dimensional coarse movement position tends to drift due to the weight of the object. is there. Therefore, by attaching one axis of the three-dimensional coarse movement unit to the fixed member side opposite to the object, the three-dimensional coarse movement can be performed while suppressing the influence of the drift.

In the three-dimensional fine movement measuring device of the present invention, the base portion may be U-shaped when viewed from the side.
In the three-dimensional fine movement measuring device of the present invention, the position of the three-dimensional coarse movement unit may be independently controlled by a coarse movement control circuit.
In the three-dimensional fine movement measuring device of the present invention, the movement amount detecting means may detect the detection surface of the fixing member.
According to this three-dimensional fine movement measuring device, for example, a highly accurate diffraction grating (volume hologram grating) is used as the detection surface, and this is detected by the movement amount detection means for detecting the diffracted laser light, whereby the position of the moving body is detected. Can be measured more accurately.

The detection surface may be arranged on each of the three-dimensional axes, and the movement amount detection means may be provided for each detection surface of each of the axes to detect the corresponding detection surface.
According to this three-dimensional fine movement measuring device, the position of the moving body can be measured more accurately by detecting the displacement of each of the three-dimensional axes by the movement amount detecting means.

When the movement amount detecting means is a non-contact type sensor, the position of the moving body can be measured more accurately.

When the non-contact type sensor is a sensor using capacitance, optical interference or optical diffraction, the position of the moving body can be measured more accurately.

A control unit may be provided for controlling the position of at least one axis of the three-dimensional position of the moving body by closed loop control based on the movement amount detected by the movement amount detecting means.
According to this three-dimensional fine movement measuring device, the position of the moving body can be measured while accurately controlling the three-dimensional position of the moving body to perform positioning with high accuracy or controlling the moving amount.

According to the present invention, the three-dimensional position of the fixing member, which fixes the moving body such as the cantilever, is fixed by the movement amount detecting means fixed to the base portion or the coarse moving portion which does not move relatively compared to the fine movement of the moving body. By directly detecting, the position of the fixed member, and hence the moving body can be easily and accurately measured.

1 is a block diagram of a three-dimensional fine movement measuring device (scanning probe microscope) according to a first embodiment of the present invention. It is sectional drawing which follows the AA line of FIG. It is a block diagram of the three-dimensional fine movement measurement device concerning a reference example. It is a block diagram which shows the modification of the three-dimensional fine movement measuring apparatus which concerns on another embodiment of this invention . It is a block diagram of the three-dimensional fine movement measuring device concerning another reference example. It is a figure which shows the displacement of the conventional piezoelectric element.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram of a three-dimensional fine movement measuring device (scanning probe microscope) 200A according to the first embodiment of the present invention, and FIG. 2 is a sectional view taken along the line AA of FIG.
In FIG. 1, a scanning probe microscope 200A has a triaxial structure in which a cantilever 1 holding a probe at its tip, a cantilever mounting portion (slope block) 101, and piezoelectric elements for scanning in the x, y, and z directions are laminated. A cylindrical scanner 111 formed of a piezoelectric element, a base portion 13 that forms a frame that supports each component of the scanning probe microscope, a non-contact sensor 130, and detection signals from the non-contact sensor 130. The detection surface 132, the three-dimensional coarse movement part 122, the sample stage 102 installed on the three-dimensional coarse movement part 122, the probe microscope controller 24 and the control part (computer) 40 which control the whole are provided.
The computer 40 has a control board for controlling the operation of the scanning probe microscope 200A, a CPU (central processing unit), storage means such as ROM and RAM, an interface, and an operation section.
The cantilever 1, the cantilever mounting portion 101, the scanner 111, and the non-contact type sensor 130 correspond to the "moving body", "fixing member", "three-dimensional fine movement portion", and "movement amount detecting means" in the claims, respectively.

The base portion 13 is formed in a substantially U-shape when viewed from the side surface, the three-dimensional coarse movement part 122 is fixed to the upper surface of the lower member of the U-shape, and the sample stage 102 installed on the three-dimensional coarse movement part 122. The sample 300 is placed at a predetermined position.
On the other hand, the scanner 111 is fixed to the lower surface of the U-shaped upper member of the U-shaped base portion 13, and the cantilever mounting portion 101 is fixed to the lower surface of the scanner 111. The cantilever mounting portion 101 is formed into a substantially rectangular column having a sloping end face, and the cantilever 1 is attached to the front end face in a cantilever manner. The cantilever 1 faces the sample 300, and the probe at the tip of the cantilever 1 contacts or approaches the sample 300 to detect the surface shape and surface characteristics of the sample 300.

Then, laser light is emitted from a laser light source 30 arranged above the base portion 13, and the laser light is directed downward from an irradiation hole 13h penetrating an upper member of the base portion 13 via a dichroic mirror 31. Is illuminated on the back of the. The laser light reflected from the cantilever 1 is reflected by the mirror 32 and detected by the displacement detector 5. The amount of vertical movement (z direction) of the cantilever 1 is reflected in the change (incident position) of the optical path of the laser incident on the dichroic mirror 31. Therefore, the displacement detector 5 detects the displacement amount of the cantilever 1 from this incident position.
As described above, the scanning probe microscope 200A of the first embodiment employs the optical lever method in which the positional deviation of the reflected light of the light emitted to the cantilever 1 is detected as the displacement of the cantilever 1 (probe). Further, the scanning probe microscope 200A is a lever scanning scanning probe microscope that scans the cantilever mounting portion 101 to which the cantilever 1 is mounted for measurement.

The probe microscope controller 24 has a Z control circuit 20, a fine movement control circuit (X, Y, Z output amplifiers) 22, a coarse movement control circuit 23, and a sensor controller 25, which will be described later. The probe microscope controller 24 is connected to the computer 40 to enable high speed data communication. The computer 40 controls the operating conditions of the circuit in the probe microscope controller 24, fetches and controls the measured data, and realizes surface shape measurement, surface physical property measurement, frequency/vibration characteristics, force curve measurement, and the like.

The scanner 111 moves (finely moves) the cantilever mounting portion 101 (and the cantilever 1) three-dimensionally, and two (biaxial) scanning the cantilever mounting portion 101 in the xy (plane of the sample 300) direction. It is configured by a triaxial piezoelectric element including piezoelectric elements 111a and 111b and a piezoelectric element 111c that scans the cantilever mounting portion 101 in the z (height) direction.
A piezoelectric element is an element in which the crystal is distorted when an electric field is applied, and an electric field is generated when the crystal is forcibly distorted by an external force.As the piezoelectric element, PZT (lead zirconate titanate), which is a type of ceramics, is generally used. It can be used, but is not limited to this.
The piezoelectric elements 111a to 111c are connected to the fine movement control circuit 22, and by outputting a predetermined control signal (voltage) to the fine movement control circuit 22, the piezoelectric elements 111a and 111b are respectively driven in the xy directions, and the piezoelectric element 111c is moved in the z direction. Drive in the direction.

The three-dimensional coarse movement unit 122 roughly moves the sample stage 102 in three dimensions to bring the sample 300 closer to the cantilever 1, and includes an x stage 122a, ay stage 122b, and az stage 122c. The three-dimensional coarse movement unit 122 operates by driving a screw mechanism by a step motor, for example, and is controlled by the coarse movement control circuit 23.

Further, as shown in FIG. 2, the cantilever mounting portion 101 has a substantially square pole with a slanted end surface. The non-contact sensor 130 is composed of three non-contact sensors 130a to 130c. The non-contact sensor 130a faces the cantilever mounting portion 101 from the back surface (base portion 13) of the cantilever mounting portion 101, and the non-contact sensor 130a. 130b and 130c face the cantilever mounting portion 101 from both side surfaces of the cantilever mounting portion 101 (the direction of the paper surface of FIG. 1).
On the other hand, detection surfaces 132a to 132c are provided on the three surfaces of the cantilever mounting portion 101 facing the non-contact sensors 130a to 130c, respectively.
The non-contact sensor 130a is attached to the tip of a stay 135a that is attached to the inner surface of a member of the base portion 13 that extends in the vertical direction and that extends in the horizontal direction. Further, the non-contact sensors 130b and 130c are attached to the upper surfaces of the base portion 13 and attached to the tips of stays 135b and 135c extending downward.

Then, in the first embodiment, the detection surfaces 132a to 132c are diffraction gratings (volume hologram holograms), the non-contact sensors 130a to 130c are corresponding laser displacement meters, and the detection surfaces 132a to 132c are also “movable”. It constitutes a part of the "quantity detecting means".
This laser displacement meter has a photodetector that detects laser light diffracted by the volume hologram grating, a polarization beam splitter that splits the laser light into S-polarized light and P-polarized light, a mirror, and the like. The interference state of the laser light changes when moving to one axis), and the interference light is bright and dark according to one pitch of the grating, so that the displacement on one axis is detected.
Therefore, for example, as shown in FIG. 2, by installing the detection surfaces 132a, 132b, and 132c in the directions that detect the x, y, and z directions, respectively, the non-contact sensors 130a to 130c will be described later. The displacement of the cantilever mounting portion 101 in the x, y, and z directions is detected.

Next, the operation of the scanning probe microscope 200A will be described.
First, the three-dimensional coarse moving unit 122 is operated to roughly three-dimensionally move the sample stage 102 to bring the sample 300 close to the cantilever 1 (probe). Further, the scanner 111 is appropriately moved in the xy directions to adjust the positional relationship between the cantilever 1 and the sample 300, and the arbitrary position of the sample 300 is measured. Then, the piezoelectric element 111c of the scanner 111 moves the cantilever 1 in the z direction to a position where the cantilever 1 contacts the sample 300.
In this way, the probe of the cantilever 1 is brought close to or in contact with the sample 300. At this time, the displacement of the cantilever 1 is detected by the optical lever method described above, and the scanner 111 displaces the cantilever 1 in the height (z) direction. The surface (xy) of the sample 300 is scanned while keeping the amount constant. Then, the physical property of the surface of the sample 300 is measured by using the control signal for keeping the displacement amount of the cantilever 1 constant as physical property information.
When the displacement is detected by the optical lever method, the amplitude of the electric signal of the displacement detector 5 is converted into a DC level signal by the AC/DC converting mechanism 6 and further input to the Z control circuit 20. The Z control circuit 20 transmits a control signal to the z signal portion of the fine movement control circuit 22 so that the displacement amount of the cantilever 1 in the height (z) direction is kept constant, and the z signal portion causes the piezoelectric element 111c to move in the z direction. The control signal (voltage) for driving to is output. That is, the displacement in the height (z) direction of the cantilever 1 caused by the interatomic force acting between the sample 300 and the probe is detected by the above mechanism, and the piezoelectric element 111c is displaced so that the displacement becomes constant. Then, in this state, the fine movement control circuit 22 displaces the piezoelectric elements 111a and 111b in the xy directions to scan the sample 300 and map the surface shape and physical property values.

Here, in the first embodiment, when measuring the shape and physical properties of the surface of the sample 300 by the cantilever 1 in the scanning probe microscope 200A, the three-dimensional position of the cantilever mounting portion 101 is set to the non-contact sensor 130a. It is detected directly at ~130c. The detection signals of the non-contact type sensors 130a to 130c are sequentially acquired by the control unit 40 via the sensor controller 25 as an actual three-dimensional displacement amount when mapping the surface shape and physical property values. Then, the three-dimensional shape or the like of the sample surface is reconstructed based on the detection signal (information) acquired by the control unit 40. Therefore, the data such as these three-dimensional shapes are subject to interference from other directions as compared with the three-dimensional displacement amount acquired by the conventional scanning probe microscope based on the applied voltage to the piezoelectric elements 111a, 111b, and 111c. There will be no high precision.
Therefore, since the position of the cantilever 1 fixed to the cantilever mounting portion 101 and the position of the sample 300 facing the cantilever 1 and contacting or approaching the cantilever 1 can be accurately measured, the sample 300 is scanned by the cantilever 1. The positioning accuracy and the measurement accuracy and resolution of the surface shape and physical property value of the sample 300 are improved.
Further, the movement (position) in the XY plane may be closed loop control based on the detection signals of the non-contact type sensors 130a to 130c, so that the movement can be performed while performing more accurate positioning. This makes it possible to perform control with a smaller positioning error in the XY plane.
It should be noted that when observing a normal surface shape in the present embodiment, it is sufficient to directly read the detection signal (sensor value) for the movement (position) in the Z direction, and therefore closed loop control need not be performed. .. However, when it is necessary to control the movement amount in the Z direction as in the force curve measurement, closed loop control based on the detection signal in the Z direction of the non-contact sensor 130c may be performed.
The closed loop control can be performed by the probe microscope controller 24 and the control unit 40. The closed loop control is a known feedback control for feeding back the data of the detection signal to the control unit 40.

Further, in this embodiment, the detection surfaces 132a to 132c are arranged on each of the three-dimensional axes, and the non-contact type sensors 130a to 130c are provided for each of the detection surfaces 132a to 132c of each axis to detect the corresponding detection surface. .. Therefore, it is possible to more accurately measure the three-dimensional position of the cantilever mounting portion 101 on which the detection surfaces 132a to 132c are installed.

FIG. 3 is a block diagram of a scanning probe microscope 200B according to a reference example. In the scanning probe microscope 200B, a three-dimensional coarse movement unit 122 is interposed between the scanner 111 and the base unit 13, and the sample stage 102 is directly fixed to the lower surface of the U-shaped upper member of the base unit 13. , And the attachment structure of the non-contact type sensor 130d is different, the configuration is the same as that of the scanning probe microscope 200A according to the first embodiment, and therefore, the same components will be denoted by the same reference numerals and description thereof will be omitted.
In the scanning probe microscope 200B, a coarse movement stage 125 is arranged between the three-dimensional coarse movement unit 122 and the scanner 111, and the coarse movement stage 125 is three-dimensionally displaced along with the coarse movement of the three-dimensional coarse movement unit 122. The scanner 111 is fixed to a part of the lower surface of the coarse movement stage 125, and a stay 136 extending downward is fixed to the surface of the coarse movement stage 125 on which the scanner 111 is not fixed. Further, a non-contact sensor 130d facing the back surface of the cantilever mounting portion 101 is attached to the tip of the stay 136.
In the second embodiment, only one non-contact sensor 130d is installed to detect the displacement of the cantilever mounting portion 101 in the z direction. Further, the non-contact sensor 130d is a capacitance sensor, and the diffraction grating as in the first embodiment is installed as a detection surface on one surface (back surface) of the cantilever mounting portion 101 facing the non-contact sensor 130d. It is not necessary to do so, and the back surface is the detection surface as it is.

Here, the heavier the sample 300 placed on the three-dimensional coarse movement unit 122, the more the three-dimensional coarse movement position tends to drift due to the own weight of the sample 300. Therefore, by attaching the three-dimensional coarse movement portion 122 to the cantilever attachment portion 101 side opposite to the sample 300, it is possible to suppress the influence of the drift and perform the three-dimensional coarse movement.
In addition, in the example of FIG. 3, all three axes (x stage 122a, y stage 122b, z stage 122c) of the three-dimensional coarse movement unit 122 are attached to the cantilever attachment unit 101 side, but the scanning probe microscope of FIG. As shown in 200C, at least one of the three axes of the three-dimensional coarse movement section 122 may be attached to the cantilever attachment section 101 side. In particular, since the drift of the sample 300 due to its own weight is remarkable in the vertical (z) direction, it is preferable to mount at least the z axis (z stage 122c) on the cantilever mounting portion 101 side. In this case, the two axes of the three-dimensional coarse movement unit 122 (x stage 122a, y stage 122b) are interposed between the sample stage 102 and the base unit 13.
Here, in the scanning probe microscope 200C, the two axes of the three-dimensional coarse movement unit 122 (x stage 122a, y stage 122b) correspond to the "second three-dimensional coarse movement unit" in the claims.

However, when the three-dimensional coarse moving section 122 is fixed to the base section 13 as in the second embodiment, when the non-contact type sensor 130a is fixed to the base section 13, the scanner 111 which is largely displaced by the three-dimensional coarse moving section 122. The position of the upper cantilever mounting portion 101 must be detected, which exceeds the measurement range of the non-contact sensor 130a, which makes detection difficult. Therefore, by fixing the non-contact sensor 130a to the three-dimensional coarse movement unit 122, the displacement amount of the fine movement of the scanner 111 fixed to the three-dimensional coarse movement unit 122 is not affected by the displacement due to the three-dimensional coarse movement. Can be accurately detected.

Also in the scanning probe microscope 200B of the second embodiment, similar to the first embodiment, the position of the cantilever 1 fixed to the cantilever mounting portion 101, and the cantilever 1 facing the cantilever 1 are brought into contact with or close to the cantilever 1. Since the position of the sample 300 can be accurately measured, the positioning accuracy when the sample 300 is scanned by the cantilever 1 and the measurement accuracy and resolution of the surface shape and physical property values of the sample 300 are improved.

FIG. 5 is a block diagram of a scanning probe microscope 200D according to another reference example. The scanning probe microscope 200D is according to the first embodiment except that the scanner 111 is interposed between the sample stage 102 and the base portion 13 and the mounting structure of the non-contact sensor 130a is different. Since it is the same as the scanning probe microscope 200A, the same components are designated by the same reference numerals and the description thereof will be omitted.
As described above, the scanning probe microscope 200D of the present embodiment is a sample scanning scanning probe microscope that scans the sample stage 102 on which the sample 300 is placed and performs measurement.
Further, in the scanning probe microscope 200D, a non-contact sensor 130a facing the back surface of the sample stage 102 is attached to the inner surface of the member of the base portion 13 that extends in the vertical direction of the U-shape. The non-contact sensor 130a detects displacement of the sample stage 102 in the z direction. Further, the non-contact type sensor 130a is a laser displacement meter similar to that of the first embodiment, and a detection surface 132a made of a diffraction grating is provided on one surface (back surface) of the sample stage 102 facing the non-contact type sensor 130a. It is installed.
Here, in the scanning probe microscope 200D, the sample 300 and the sample stage 102 correspond to the "moving body" and the "fixing member" in the claims, respectively.

As in the first embodiment, the scanning probe microscope 200D detects the displacement of the cantilever 1 (probe) by the optical lever method and operates the scanner 111 to control the height on the sample stage 102 side. , The surface (xy) of the sample 300 is scanned while keeping the displacement amount of the cantilever 1 in the height (z) direction constant.

The present invention is not limited to the above embodiment. The moving body is not limited to a cantilever or a sample, and for example, a prober (indenter) terminal used in an IC tester or the like, a precision machining blade (drill for a drilling machine, a lathe tool, an end mill for a milling machine, a blade for an NC lathe, etc.), Examples include pipettes used in patch clamp systems (manipulators) and the like. Among them, the prober is too thin and it is difficult to directly measure the position with the sensor, and it is difficult to directly measure the position with the sensor because the drill and the end mill are rotating. Further, since the cutting tool is worn by machining, the value becomes inaccurate even if the position is directly measured by the sensor. Since the pipette has a thin diameter of about 10 μm and is used as a disposable type by reattaching it one by one, it becomes difficult to adjust the initial position of the sensor each time it is reattached, even if the position is directly measured by the sensor. As described above, by measuring the fixing member to which the moving body is fixed, the above problem can be avoided.

The moving amount detecting means is not limited to the above, and may be, for example, a sensor using capacitance, optical interference or optical diffraction, an optical sensor including an optical fiber and an optical interferometer, or an electric sensor such as a strain gauge. However, it is preferable to use a sensor using capacitance, optical interference, or a diffraction grating because the detection accuracy is high. However, the non-contact sensor 130 is not particularly limited and may be.
Further, the movement amount detecting means may detect the movement amount of the fixing member in at least one direction (one axis).

When the three-dimensional micromotion measuring device of the present invention is applied to a scanning probe microscope, in the above example, the amount of displacement of the sample in the height (z) direction is kept constant to maintain the height of the sample. A three-dimensional shape image was measured from the displacement. In addition, (ii) a phase image from the phase value in the resonance state, (iii) an error signal image due to the difference from the target value of the vibration amplitude, and (iv) a probe sample It is also possible to measure a multifunctional measurement image from the physical property between the two. Also, other frequency/vibration characteristics can be measured.

1 Moving body (cantilever)
13 Base Part 101 Fixing Member (Cantilever Attachment Part)
102 fixing member (sample stage)
111 Three-dimensional fine movement unit (scanner)
122 three-dimensional coarse moving section 122a, 122b second three-dimensional coarse moving section (x stage, y stage)
130, 130a to 130d Moving amount detecting means 132, 132a to 132c Detection surface 200A to 200D Three-dimensional fine movement measuring device (scanning probe microscope)
300 Moving object (sample)

Claims (8)

A moving body that forms a cantilever ,
A fixed member to which the moving body is fixed,
A three-dimensional fine movement unit to which the fixing member is fixed and which can finely move the moving body in three dimensions via the fixing member;
A three-dimensional coarse movement unit capable of coarsely moving with a movement amount larger than that of the three-dimensional fine movement unit, wherein the three-dimensional fine movement unit is fixed, and the three-dimensional fine movement unit is roughly moved to one axis in the direction of gravity in three dimensions. And a three-dimensional coarse moving section including a first three-dimensional coarse moving section to be moved and a second three-dimensional coarse moving section having two axes coarsely moving different from an axis about which the first three-dimensional coarse moving section coarsely moves. ,
A base portion to which the first and second three-dimensional coarse movement portions are fixed,
A three-dimensional fine movement measuring device, comprising: a movement amount detection unit fixed to the first three-dimensional coarse movement unit to detect a movement amount of the fixing member,
The three-dimensional fine movement portion and the second three-dimensional coarse movement portion are fixed so as to face different positions of the base portion, respectively.
A three-dimensional fine movement measuring device in which a sample stage for placing a measurement object is installed on the moving body side of the second three-dimensional coarse movement unit. The three-dimensional fine movement measuring device according to claim 1, wherein the base portion is U-shaped when viewed from the side . The three-dimensional fine movement measuring device according to claim 1 or 2, wherein the position of the three-dimensional coarse movement unit is independently controlled by a coarse movement control circuit . The three-dimensional fine movement measuring device according to any one of claims 1 to 3, wherein the movement amount detecting means detects a detection surface of the fixing member . The three-dimensional fine movement measuring device according to claim 4 , wherein the detection surface is arranged on each of three-dimensional axes, and the movement amount detecting means is provided for each detection surface of each of the axes to detect a corresponding detection surface . The three-dimensional fine movement measuring device according to claim 1 , wherein the movement amount detecting means is a non-contact type sensor . The three-dimensional micromotion measurement device according to claim 6, wherein the non-contact sensor is a sensor that uses capacitance, optical interference, or optical diffraction . The control unit for controlling the position of at least one axis of the three-dimensional position of the moving body by closed loop control based on the movement amount detected by the movement amount detecting means . The three-dimensional fine movement measurement device according to any one of claims.

Images