JP6729115B2 - 容器収納設備 - Google Patents

容器収納設備 Download PDF

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Publication number
JP6729115B2
JP6729115B2 JP2016139587A JP2016139587A JP6729115B2 JP 6729115 B2 JP6729115 B2 JP 6729115B2 JP 2016139587 A JP2016139587 A JP 2016139587A JP 2016139587 A JP2016139587 A JP 2016139587A JP 6729115 B2 JP6729115 B2 JP 6729115B2
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JP
Japan
Prior art keywords
storage
container
supply
gas
wall portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016139587A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017186161A (ja
Inventor
真輔 河村
真輔 河村
忠浩 吉本
忠浩 吉本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to TW106108142A priority Critical patent/TWI718270B/zh
Priority to US15/474,364 priority patent/US10583983B2/en
Priority to KR1020170040537A priority patent/KR102337178B1/ko
Priority to CN201710207102.4A priority patent/CN107265032B/zh
Publication of JP2017186161A publication Critical patent/JP2017186161A/ja
Application granted granted Critical
Publication of JP6729115B2 publication Critical patent/JP6729115B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Flow Control (AREA)
JP2016139587A 2016-03-31 2016-07-14 容器収納設備 Active JP6729115B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW106108142A TWI718270B (zh) 2016-03-31 2017-03-13 容器收納設備
US15/474,364 US10583983B2 (en) 2016-03-31 2017-03-30 Container storage facility
KR1020170040537A KR102337178B1 (ko) 2016-03-31 2017-03-30 용기 수납 설비
CN201710207102.4A CN107265032B (zh) 2016-03-31 2017-03-31 容器收纳设备

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016070793 2016-03-31
JP2016070793 2016-03-31

Publications (2)

Publication Number Publication Date
JP2017186161A JP2017186161A (ja) 2017-10-12
JP6729115B2 true JP6729115B2 (ja) 2020-07-22

Family

ID=60045267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016139587A Active JP6729115B2 (ja) 2016-03-31 2016-07-14 容器収納設備

Country Status (4)

Country Link
JP (1) JP6729115B2 (zh)
KR (1) KR102337178B1 (zh)
CN (1) CN107265032B (zh)
TW (1) TWI718270B (zh)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0179405B1 (ko) * 1993-04-12 1999-04-15 마스다 쇼오이치로오 크린장치가 부착된 하물보관설비
JP4807579B2 (ja) * 2006-09-13 2011-11-02 株式会社ダイフク 基板収納設備及び基板処理設備
TW200948688A (en) * 2007-12-18 2009-12-01 Entegris Inc Methods and apparatuses for controlling contamination of substrates
JP4706938B2 (ja) * 2008-11-21 2011-06-22 村田機械株式会社 クリーンルーム用の自動倉庫と自動倉庫での物品の保管方法
JP5440871B2 (ja) * 2010-08-20 2014-03-12 株式会社ダイフク 容器保管設備
JP5709011B2 (ja) 2011-12-26 2015-04-30 株式会社ダイフク 物品保管設備
JP5979089B2 (ja) * 2013-06-26 2016-08-24 株式会社ダイフク 保管設備
JP6217854B2 (ja) * 2014-06-16 2017-10-25 村田機械株式会社 パージストッカ及びパージ方法
JP2016021429A (ja) * 2014-07-11 2016-02-04 村田機械株式会社 パージストッカ

Also Published As

Publication number Publication date
CN107265032B (zh) 2023-05-16
KR102337178B1 (ko) 2021-12-07
KR20170113389A (ko) 2017-10-12
TW201737399A (zh) 2017-10-16
TWI718270B (zh) 2021-02-11
JP2017186161A (ja) 2017-10-12
CN107265032A (zh) 2017-10-20

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