JP6715445B2 - Clamping device and sheet work processing device - Google Patents

Description

The present invention relates to, for example, a clamp device for clamping a sheet-shaped work and a sheet work processing apparatus having the clamp device.

Patent Documents 1 and 2 disclose devices for clamping a work.
In these devices, a pair of clamp pieces provided with a clamp portion for clamping a work piece at its tip end is rotatably supported by a shaft, and a clamp for clamping a work piece between both clamp pieces by a magnetic force of a magnet. Power is applied. Then, in these devices of Patent Document 1 and Patent Document 2, both clamp pieces are formed in the same shape.

JP-A-11-105116 JP, 2013-121884, A

By the way, an apparatus having a clamper of this kind often clamps a sheet-like work, and the sheet-like work is etched in a clamped state by the clamper, or the etching liquid is flushed with water or moisture is removed. It is blown with air to remove it. In this case, in the configurations of Patent Document 1 and Patent Document 2, since both clamp pieces have the same shape, the flow of fluid such as liquid or air in the gap between the clamp pieces is apt to stagnant, so that cleaning or water removal can be performed. There was a possibility that it could not be done effectively. In order to allow the fluid to flow smoothly, both clamp pieces may be formed in a narrow shape, but in this shape, when a magnet for applying a clamping force to the clamp pieces is provided, the magnets are large. It is not possible to use one that cannot secure a strong clamping force.

Further, in the configurations of Patent Document 1 and Patent Document 2, the pair of clamp pieces have the same shape. Therefore, it is difficult to open the one clamp piece against the magnetic force of the magnet by the pressing member that is separate from the two clamp pieces. Therefore, it becomes difficult to exert a strong clamping force by using a magnet having a strong magnetic force.

An object of the present invention is to provide a structure that allows a fluid to flow between the clamp pieces without interruption.

In order to achieve the above-mentioned object, the invention relating to the clamping device is such that a plurality of clampers for clamping the outer peripheral edge of the sheet-shaped work in a stretched state of the work are provided on the holding frame with mutual intervals, and The clamper is arranged so as to be oriented inward, and the clamper connects the first clamp piece to the second clamp piece so that the second clamp piece can be opened and closed by a shaft, and the magnetic force of the magnet clamps the tip of the first clamp piece. Part and the clamp part at the tip of the second clamp piece are configured to be able to clamp a work, and one clamp piece of the first clamp piece and the second clamp piece is narrower than the other clamp piece. It is characterized by having done.

Here, one of the first clamp piece and the second clamp piece may be at a fixed position and the other may be rotated, or both may be rotated.
In the above configuration, since one clamp piece is narrower than the other clamp piece, the flow of the cleaning liquid or the fluid such as air passing between both clamp pieces is smooth, and the cleaning and liquid removal by the air are delayed. Can be done without. Further, since the wide magnet can be provided on the wide clamp piece, the clamping force by the magnet can be increased. Further, in the above configuration, the outer peripheral edge of the work can be clamped by the plurality of clampers, and the work can be appropriately clamped even if the work has a large area.

The invention according to the sheet work processing apparatus, wherein the work is clamped by the clamper of the clamp device and held in the holding frame, and has a processing unit for processing the work in that state. In the above, the positioning means of the clamp device is provided on the carry-in side of the clamp device with respect to the processing portion, and is used to position the clamp device in a plane parallel to the stretching surface of the workpiece with a reference point as a reference. Is characterized by.

In the above configuration, since the clamp device can be positioned in a plane parallel to the stretched surface of the work, the clamp device having the work can be supplied while maintaining an accurate positional relationship with respect to the processing portion, Can be processed with high precision.

According to the present invention, it is possible to flow the fluid between the clamp pieces without a stagnation, and it is possible to appropriately wash the work.

The top view of the whole sheet work processing apparatus. The front view of the whole sheet work processing apparatus. The perspective view of a clamp device. The top view of a clamp device. (A) is a side view showing a relationship between a clamp device and a knock pin of a carry-in side clamp positioning device, and (b) is a side view showing a knock pin of a carry-out side clamp positioning device. FIG. 3 is a simplified front view showing the relationship between the clamper and the knock pin. FIG. 3 is a simplified diagram showing a joint portion between a long side member and a short side member of a holding frame. The perspective view of a clamper part. FIG. 3 is a partially cutaway exploded perspective view of a clamper portion. Sectional drawing which shows a clamper part. The top view of a clamper part. Sectional drawing which shows the magnetization process with respect to a ferrite. FIG. 3 is a plan view showing a work positioning device in the work carry-in station. Sectional drawing which shows the workpiece|work positioning apparatus by the side of carrying in. The top view which shows the clamp positioning device of the carrying in side. Sectional drawing which shows the relationship between a knock pin and a clamper. FIG. 3 is a plan view showing a work-side work clamp device, a clamp device, and a chuck device. FIG. 6A is a plan view showing a chuck device on a loading side, and FIG. 9B is a side view showing a work chuck portion. The side view which shows a work stock apparatus. The top view which shows the inspection device of magnetic force. The side view which shows the inspection device of magnetic force. Sectional drawing which shows the inspection state of a magnetic force. The block diagram which shows the electric constitution of a sheet work processing apparatus. The flowchart which shows operation|movement of a magnetic force inspection apparatus. The top view which shows the workpiece positioning apparatus by the side of carrying out. Sectional drawing which shows the workpiece positioning apparatus by the side of carrying out. FIG. 3 is a plan view showing a chuck device on the unloading side. The top view which shows the example of a change of a structure of a 2nd clamp piece. The front view which shows the example of a change of a structure without an edge. The front view which shows another example of a change of a structure without an edge.

(Embodiment)
Hereinafter, embodiments embodying the present invention will be described with reference to the drawings.
(Outline of sheet work processing equipment)
First, the schematic configuration and operation of the sheet work processing apparatus according to the embodiment will be described. This sheet work processing apparatus performs etching and cleaning after etching on a thin sheet-like work made of flexible copper or the like.

As shown in FIGS. 1 and 2, the sheet work processing apparatus includes a processing line 73 as a processing unit including an etching processing unit 71 and a cleaning processing unit 72 located on the downstream side of the etching processing unit 71. It is provided. Then, the work 100 is held by a holding frame 12 of a work clamp device (hereinafter, referred to as a clamp device) 11 as a jig shown in FIG. 3, and the clamp device 11 is unidirectionally shown by an arrow P in FIGS. 1 and 2. Be transported to. Therefore, the etching processing unit 71 performs etching on the work 100, and then the cleaning processing unit 72 performs cleaning for dropping the etching liquid. As shown in FIG. 2, on the upper side of the processing line 73, a return line 70 for returning the clamp device 11 used for processing the workpiece in the direction opposite to the arrow P direction is provided.

A work carry-in station 74 is provided on the upstream side of the processing line 73, and a work stock station 75, an inspection station 76, and a work station are provided on the downstream side of the processing line 73 along the carrying direction of the work 100 in the direction of arrow P. A carry-out station 77 is provided.

At the work loading station 74, the work 100 is united and held by the clamp device 11 from the transfer conveyor 80 on the return line 70, and in that state, the clamp device 11 is loaded on the transfer conveyor 80 on the processing line 73. The work unloading station 77 separates the processed work 100 from the clamp device 11 and sends the work 100 to the next step of the sheet work processing device, and moves the clamp device 11 to the return line 70. The work stock station 75 temporarily holds the work 100 together with the clamp device 11 when the work 100 cannot be conveyed to the next process of the processing line 73 such as when a trouble occurs in the next process of the processing line 73. It is something to stock. The inspection station 76 is for inspecting the degree of deterioration of permanent magnets 281, 282, 361, 362 of the clamp device 11 which does not hold the work 100 when the work 100 is not processed.

As shown in FIGS. 1 and 2, a loading-side work positioning device 78 for positioning the work 100 on the basis of a reference position in a plane parallel to the tensioned position is disposed in the work loading station 74. There is. Further, in the work carry-in station 74, a carry-in side clamp positioning device 79 as a clamp device positioning means for positioning the clamp device 11 in a plane parallel to the stretched surface of the work 100 with the reference position as a reference, and FIG. And the chuck device 83 as the work tensioning means shown in FIG. 18 are arranged. At the work unloading station 77, a carry-out side clamp positioning device 81 for positioning the clamp device 11, a carry-out side work positioning device 82 for positioning the work 100, and a chuck device 83 shown in FIG. 27 are arranged. ing.

Then, the one work 100 introduced into the carry-in side work positioning device 78 of the work carry-in station 74 is positioned by the carry-in side work positioning device 78. On the other hand, the empty clamp device 11 from the return line 70 is moved rearward, then lowered, placed on the carry-in side clamp positioning device 79, and positioned by the carry-in side clamp positioning device 79. Then, the positioned work 100 is carried into the clamp device 11 in the positioned state by the chuck device 83 and held by the clamp device 11. The clamp device 11 thus configured is carried into the etching processing section 71 via the conveyor 80 of the processing line 73.

The clamp device 11 that has passed from the etching processing portion 71 to the cleaning processing portion 72 is transported to the work unloading station 77 via the transport conveyor 80, and subsequently transported to the rear unloading side clamp positioning device 81 and positioned. In the positioning state, the work 100 on the clamp device 11 is separated from the clamp device 11 by the chuck device 83, is carried into the carry-out side work positioning device 82, is positioned by the device 82, and is positioned after the work carry-out station 77. It is delivered to the process.

The clamp device 11 in which the work 100 has been separated and emptied is lifted from the carry-out side clamp positioning device 81, sent to the return line 70, and conveyed to the work carry-in station 74 via the return line 70.

Except for the transport conveyor 80, the transport means for transporting the clamp device 11, the chuck devices 83, 87, etc. is executed by a transport robot (not shown).
The detailed configuration and operation of each part will be described below.

(Clamp device 11)
The clamp device 11 will be described.
As shown in FIGS. 3 and 4, the clamp device 11 includes a flat holding frame 12 having an oblong rectangular ring shape. The holding frame 12 includes a pair of long side members 13 forming the long sides of the long quadrangle, and a pair of short side members 14 forming the short sides of the long quadrangle. As shown in FIGS. 5 and 7, the long side member 13 and the short side member 14 are provided with overlapping portions 19 and 20 at both ends thereof, and one of the overlapping portions 20 is provided with a protrusion 191 and the other overlapping portion is formed. A fitting groove 201 is formed in 19. Then, the overlapping portions 19 and 20 are overlapped in a state where the protrusion 191 and the fitting groove 201 are fitted to each other, and the overlapping portions 19 and 20 are tightened and fixed by the screw 22 shown in FIG. Has been done. The upper overlapping portion 19 may be formed on either the long side member 13 or the short side member 14, and the vertical relationship between the protrusion 191 and the fitting groove 201 may be reversed.

As shown in FIGS. 3 to 5, a plurality of clampers 15 are installed at equal intervals on the long side and the short side of the holding frame 12, respectively. In this embodiment, the holding frame 12 and the clamper 15 are made of titanium or titanium alloy which is a corrosion resistant material. The clamper 15 includes a first clamp piece 16 located on the lower side and a second clamp piece 17 located on the upper side. The first clamp piece 16 is formed integrally with the long side member 13 and the short side member 14.

As shown in FIG. 8 and FIG. 9, the first clamp piece 16 has a root portion 25 that narrows in width toward the tip end side, and a narrow width of the root portion 25 on the tip end side. The part 26 is integrally formed. On the upper surface of the tip end portion of the narrow portion 26, clamp teeth 27 that protrude upward as a clamp portion are integrally formed.

As shown in FIGS. 9 and 10, the base portion 25 and the narrow portion 26 are respectively formed with downwardly open and continuous recesses 251 and 252, and the recesses 251 and 252 have a flat surface. The shape is similar to the outer shapes of the base portion 25 and the narrow portion 26. In the recesses 251, 252, the yoke 32 having the contours of the recesses 251 and 252 and made of a magnetic material and having an open upper surface is fitted without a gap. In the yoke 32, permanent magnets 281 and 282 having a shape similar to the outer shapes of the root portion 25 and the narrow portion 26 are fitted without a gap. The lower surface openings of the recesses 251 and 252 are closed by a cover plate 35, and the cover plate 35 is welded to the outer peripheral wall of the first clamp piece 16 without any gap. For this reason, the yoke 32 and the permanent magnets 281 and 280 are enclosed in the first clamp piece 16. The root portion 25 is formed thicker than the narrow width portion 26, and correspondingly, the recess 251 on the root width portion 25 side is formed deeper than the recess 252 on the narrow width portion 26 side, and the inner bottom surface between them, that is, the ceiling surface. Has a step. Therefore, the permanent magnet 281 on the root 25 side is formed thick. An inclined surface 162 is formed on the upper surface between the base portion 25 and the narrow portion 26.

As shown in FIGS. 9 and 11, recesses 21 are formed in the upper surface of the holding frame 12 on both sides of the first clamp piece 16, and the bearings that form a part of the first clamp piece 16 are formed in the recesses 21. The member 29 is fixed by the screw 23. The second clamp piece 17 is supported between the bearing members 29 by a shaft 31 so as to be vertically rotatable at the base end portion.

As shown in FIGS. 8 and 9, the second clamp piece 17 is formed wider than the root portion 25 and the narrow portion 26 of the first clamp piece 16, and corresponds to the root portion 25 and the narrow portion 26. Both width ends of the second clamp piece 17 of the portion to be formed are wide portions.

As shown in FIGS. 8 to 11, the second clamp piece 17 is formed with continuous recesses 172 and 173 that are opened upward, respectively, and these recesses 172 and 173 are the second recesses. The shape is similar to the outer shape of the clamp piece 17. The recesses 172 and 173 are made of a magnetic material and have the contours of the recesses 172 and 173, and the yoke 39 having an open lower surface is fitted without any clearance. Not fitted. Therefore, the permanent magnets 361 and 362 have similar shapes to the outer shape of the second clamp piece 17. The upper surface openings of the recesses 172 and 173 are closed by a cover plate 40, and the cover plate 40 is welded to the outer peripheral wall of the second clamp piece 17 without any gap. Therefore, the yoke 39 and the permanent magnets 361 and 362 are enclosed in the second clamp piece 17. The bottom base end of the second clamp piece 17 is formed thicker than the bottom front end, the recess 172 on the base end side is correspondingly formed deep, and a step is formed between both recesses 172 and 173. Therefore, the permanent magnet 361 on the base end side is formed thicker than the permanent magnet 362 on the tip end side. An inclined surface 175 is formed on the upper surface between the base end and the tip of the lower surface of the second clamp piece 17.

As shown in FIGS. 8 and 9, the lower surface of the tip of the second clamp piece 17 is integrally provided with a clamp tooth 34 as a clamp portion facing the clamp tooth 27 and capable of coming into contact with and separating from the clamp tooth 27. Has been formed. The clamper 15 is arranged so as to face the inside of the holding frame 12 so that the clamp teeth 27 and 34 are located inside the holding frame 12. A magnetic attraction force acts between the lower and upper permanent magnets 281, 282, 361, 362, and this magnetic attraction force causes the second clamp piece 17 to close the first clamp piece 16. In other words, it is urged between the clamp teeth 27 and 34 in a direction to clamp the work. In this case, the magnetic fluxes of the permanent magnets 281, 282, 361, 362 are aligned by the yokes 32, 39, and the magnetic attraction force between the first and second clamp pieces 16, 17 is strengthened.

In this case, both clamp teeth 27 and 34 need to have a clamping force such that the work 100 is not deformed or moved by its own weight in the clamped state. In other words, if the work 100 is thin, the work 100 may be deformed by its own weight so that the central portion side is depressed. Further, the clamp teeth 27 and 34 have a large area for suppressing the concentrated stress caused by the clamp on the work 100 and leaving no clamp mark, and moreover, the liquid cleaning or the air blow of the cleaning portion 72 is performed. It is preferable that the area is as small as possible so as not to disturb the above.

As shown in FIG. 10, a gap 30 is formed between the first clamp piece 16 and the second clamp piece 17, except for the portions of both clamp teeth 27 and 34. As shown in FIG. 6, chamfers having an arc-shaped cross section are formed on the upper and lower edges of the outer periphery of the first clamp piece 16 and the second clamp piece 17 as the edgeless structure 18 except for the portions of both clamp teeth 27 and 34. Has been done. In addition, in each figure of this embodiment except FIG. 6, illustration of this chamfer is omitted. Further, although not shown, in addition to the upper and lower edge portions, the corner portions of the holding frame 12 and the clamper 15 are formed in an arc shape or an inclined surface shape so that angular corner portions are not formed on the outer surfaces thereof. It may be chamfered.

Next, a method of magnetizing the permanent magnets 281, 282, 361, 362 will be described.
As shown in FIGS. 10 and 11, in the concave portions 251, 252, 172, 173 of the first clamp piece 16 and the second clamp piece 17, the yokes 32, 39 and the permanent magnets 281, 282, 361, 362 are provided. The non-magnetized hard type ferrite is enclosed. That is, in the first and second clamp pieces 16 and 17, after assembling the yokes 32 and 39 and the ferrite, the openings of the recessed portions 251, 252, 172 and 173 are closed by the cover plates 35 and 40, and in that state, the cover plate 35. , 40 are welded to the first and second clamp pieces 16, 17. After that, the second clamp piece 17 is assembled on the long side member 13 and the short side member 14 via the bearing member 29 and the shaft 31 to form a plurality of clampers 15 arranged at intervals.

Then, as shown in FIG. 12, the clamper 15 is set in the magnetizing device 60, and the strong magnetic flux passing through the pair of cores 61 of the magnetizing device 60 magnetizes the ferrite to lower the ferrite. The permanent magnets 281, 282, 361, 362 are attracted by the attraction between the side and the upper side. At this time, the permanent magnets 281, 282 of the first clamp piece 16 are magnetized so that the same surface, for example, the lower surface has the same magnetic pole. Similarly, the permanent magnets 361 and 362 of the second clamp piece 17 are magnetized so that the same surface, for example, the upper surface has the same magnetic pole. Next, the long side member 13 having the clamper 15 and the short side member 14 are assembled to form the long quadrangular annular holding frame 12.

(Operation of the clamp device 11)
The clamp device 11 configured as described above operates as follows.
That is, as shown by the solid line in FIG. 9, the empty clamping device 11 that is not clamping the workpiece 100 is closed by the attraction action of the permanent magnets 281, 282, 361, 362, and the clamping teeth 27, 34 come into contact with each other. It is in the state of having done.

In this state, the second clamp piece 17 of the clamper 15 causes the magnetic attraction force of the permanent magnets 281, 282, 361, 362 by the knock pin 42 as a releasing means described later, as shown by a two-dot chain line in FIGS. 6 and 16. The clamp teeth 27, 34 are separated from each other by being rotated upward against the force. Therefore, in this state, the tip end portion of the second clamp piece 17 retracts from the position of the tip end portion of the first clamp piece 16 toward the outside of the holding frame 12. In this state, the work 100 is lowered from above the holding frame 12, and as is apparent from FIG. 5, without passing through the tip portion of the retracted second clamp piece 17, through the region between the tip portions. It is placed on the clamp teeth 27 of the first clamp piece 16.

Then, the knock pin 42 moves downward. Along with this downward movement, the second clamp piece 17 is rotated downward by the pressing force of the pressing pin 38, the attraction force of the permanent magnets 281, 282, 361, 362, and the self-weight of the second clamp piece 17, which will be described later. The outer peripheral edge of the work 100 is clamped between the 34.

Then, in this state, the clamp device 11 is conveyed to the etching processing section 71 of the processing line 73, and the work 100 is etched. After that, the clamp device 11 is moved to the cleaning processing unit 72, and the clamp device 11 and the work 100 are cleaned by the cleaning liquid from the cleaning liquid supply pipe 43 shown in FIGS. 4 and 5 to remove the etching liquid. Further, the clamp device 11 is sent to the cleaning processing unit 72, and the cleaning liquid adhering to the work 100 and the clamp device 11 is removed by the air from the air supply pipe 45. In these cleaning process and cleaning liquid removing process, the cleaning liquid and air flow in the gap 30 of the clamper 15.

That is, as shown in FIG. 4 and FIG. 5, in the cleaning processing section 72, cleaning liquid supply pipes 43 are arranged at the upper and lower positions of the conveyance area of the clamp device 11, respectively. The cleaning liquid is supplied to the work 100 and the clamp device 11 from the supply ports 44 arranged in the vertical direction. In the cleaning processing section 72, air supply pipes 45 are respectively arranged at upper and lower positions of the clamp device 11, and the work 100 and the clamp 100 are supplied from the supply ports 46 arranged in the length direction of the air supply pipes 45. Air for blowing and removing the cleaning liquid is ejected to the device 11 by air blow.

The clamp device 11 configured as described above has the following effects.
(1) Since the clamper 15 obtains the clamping force of the work 100 by the magnetic force of the permanent magnets 281, 282, 361, 362, unlike the configuration in which the clamping force is obtained by the spring, the second clamp piece 17 is provided. There is no squeak or abnormal noise in the opening/closing operation, and the operation of the second clamp piece 17 becomes smooth. Further, it is possible to avoid sudden occurrence of inconvenience such as breakage of the spring. Further, since the second clamp piece 17 has a wide width, a wide and large permanent magnet can be used. Therefore, a strong clamping force based on a strong magnetic force can be obtained.

(2) A gap 30 is formed between the clamp pieces 16 and 17, and the permanent magnets 281, 283, 361 and 362 are not in contact with each other. Therefore, the mechanical load on the permanent magnets 281, 282, 361, 362 can be reduced at the time of clamping the work, and the life of the permanent magnets 281, 282, 361, 362 can be extended.

(3) Since the permanent magnets 281, 282, 361, 362 are provided on both of the clamp pieces 16, 17, a strong clamping force can be obtained. By the way, it is conceivable to provide a permanent magnet on one clamp piece and configure the other clamp piece with a magnetic material, but this construction is disadvantageous in obtaining a strong magnetic attraction force, that is, a strong clamping force. is there.

(4) Since the permanent magnets 281, 282, 361, 362 of both clamp pieces 16, 17 are divided, even if the yokes 32, 39 for accommodating the permanent magnets 281, 282, 361, 362 are complicated in shape. The permanent magnets 281, 282, 361, 362 can be easily processed. As a result, the shapes of the clamp pieces 16 and 17 can be freely set.

(5) Since the second clamp piece 17 of the clamper 15 has the permanent magnets 361 and 362, when the magnetic force of the permanent magnets 361 and 362 is deteriorated, the bearing member 29 is detached to remove the second magnet. The clamp piece 17 can be easily replaced.

(6) Since the narrow portion 26 is formed on the tip end side of the first clamp piece 16 and the tip end side of the second clamp piece 17 has a tapered sharpened shape, the portion of the clamper 15 that clamps the workpiece 100 is projected. The area becomes smaller. Therefore, the cleaning liquid and the air of the air blow smoothly flow to the work 100 without any delay, and the cleaning and the air blow can be appropriately performed.

(7) Since the permanent magnets 281, 282, 361, 362 and the yokes 32, 39 are enclosed in the first and second clamp pieces 16, 17, the permanent magnets 281, 282, 361, 362 and the yokes 32, 39 are included. Can be prevented from being damaged by pickling.

(8) Since the permanent magnets 281, 282, 361, 362 are arranged between the shaft 31 and the clamp teeth 27, 34, both clamp pieces 16, 17 are different from the devices of Patent Document 1 and Patent Document 2. Can be shortened, the overall shape of the clamper 15 can be reduced, and the weight can be reduced. Therefore, it is possible to reduce the size and weight of the clamp device 11.

(9) Since the second clamp piece 17 is formed to be wider than the first clamp piece 16, the knock pin 42 passing through both sides of the first clamp piece 16 causes the second clamp piece 17 to move with respect to the first clamp piece 16. Be released. Therefore, the second clamp piece 17 can be smoothly opened by raising the knock pin 42.

(10) Since the gap 30 is provided between the first and second clamp pieces 16 and 17 except for the clamp teeth 27 and 34 of the first clamp piece 16 and the second clamp piece 17, As a result, the cleaning liquid can be easily supplied, and the cleaning liquid can be easily removed by air. Therefore, the work such as cleaning of the work 100 and the removal of the cleaning liquid can be appropriately performed.

(11) By forming the tapered root portion 25 and the narrow width portion 26 in the first clamp piece 16 located on the lower side to make the first clamp piece 16 narrower than the second clamp piece 17, the cleaning liquid The liquid such as the air smoothly flows between the clamp pieces 16 and 17 by the air. Therefore, the liquid such as the cleaning liquid can be appropriately removed.

(12) The yokes 32, 39 suppress the leakage magnetic flux from the permanent magnets 281, 282, 361, 362 to the surroundings so that the magnetic flux is concentrated and directed to the counterpart permanent magnets 281, 282, 361, 362. I chose Therefore, the attractive force between the permanent magnets 281, 282, 361, 362 can be increased, the clamping force by the clamp teeth 27, 34 can be increased, and the work 100 can be clamped more reliably.

(13) The polarities of the permanent magnets 281, 282, 361, 362 are set to be in the same direction. Therefore, when replacing the long side member 13 or the short side member 14 having the first clamp piece 16, or the second clamp piece 17, it is necessary to consider the combination of the magnetic pole orientations of the first and second clamp pieces 16 and 17. And there is no need to replace it.

(14) A step is provided on the ceiling or bottom of the recesses 251, 252, 172, 173 of the first and second clamp pieces 16, 17 so that the thick permanent magnets 281 and 361 can be used. The magnets 281 and 361 can be brought close to each other. Therefore, the magnetic attraction force between the first and second clamp pieces 16 and 17 can be increased.

(15) An edgeless structure 18 formed by an arcuate chamfer is formed on the outer peripheral edge portions of the first clamp piece 16 and the second clamp piece 17 so that the edges do not stand. As a result, when the working liquid, the cleaning liquid, or the air flows, the outer peripheral edge portions of the clamp pieces 16 and 17 exert an adverse effect on the flows of the various liquids and the air, such as turbulence and vortex formation. Can be suppressed. Therefore, various liquids and air can be smoothly flowed, and operations such as cleaning and removal of the cleaning liquid can be appropriately performed.

(16) The permanent magnets 281, 282, 361, 362 are incorporated with ferrite in a non-magnetized state, and the ferrite is magnetized after the lid plates 35, 40 are welded. Therefore, it is possible to prevent the magnetic force of the permanent magnets 281, 282, 361, 362 from decreasing due to heat during welding.

(Work loading station 74)
Next, the configuration and operation of the work carry-in station 74 will be described.
(Incoming work positioning device 78)
First, the loading-side workpiece positioning device 78 will be described.

At the work loading station 74, as described above, the loading side work positioning device 78 shown in FIGS. 13 and 14 is fixedly arranged. The loading-side workpiece positioning device 78 includes a base plate 412 and a rectangular table 413 fixed above the base plate 412. On the upper surface of the table 413, a plurality of air ejection nozzles 414 connected to an air supply source (not shown) are arranged in a substantially even distribution. The air ejection nozzle 414 includes a short cylindrical body 415 and an open-cell porous body 416 packed in the cylindrical body 415. Then, an air flow is ejected upward from the upper end of the porous body 416, and the work 100 placed above the air flow is levitated by the air flow.

An actuator 411 composed of a single-axis robot is mounted on the base plate 412 so as to be positioned corresponding to the four sides of the table 413, and a positioning member 417 is attached to the tip of the shaft. Then, by the operation of the actuator 411, the positioning member 417 is moved between a solid line position for positioning the work 100 in the floating position and a two-dot chain line position spaced apart from the position of the work 100 outward. An edge sensor 410 including a light projector 419 and a light receiver 420 is attached to the positioning member 417. Then, when the positioning member 417 moves toward the workpiece 100, the edge of the workpiece 100 contacts the inner surface of the positioning member 417 and the workpiece 100 is positioned, and the edge sensor 410 detects the edge of the workpiece 100. To be done. When the sensor 410 detects the workpiece 100, the driving of the detected actuator 410 on the sensor 410 side is stopped, and the movement of the positioning member 417 to the workpiece 100 side is stopped. As a result, the positioning of the work 100 is executed.

In this case, the workpiece 100 is positioned so that the two sides of the workpiece 100 are located on the reference lines β and γ that are orthogonal to each other and pass through the two positioning members 417 that are adjacent to each other across the diagonal line α. The corner of the work 100 is located on the reference point ε which is the intersection of the reference lines β and γ. Then, the stop position of each actuator 411, that is, the data of the position of each side of the work 100 is stored in the storage device 85 of the main control device 84 shown in FIG.

The upper and lower positions of the light projector 419 and the light receiver 420 are not limited.
(Carry positioning device 79 for loading side)
The carry-in side clamp positioning device 79 will be described.

As shown in FIG. 1, the loading side clamp positioning device 79 shown in FIGS. 15 and 16 is installed behind the work positioning device 78. The carry-in side clamp positioning device 79 includes a base plate 422 and an elongated rectangular frame-shaped positioning frame 423 located above the base plate 422. In this case, a pair of reference rollers 425 for positioning are supported at fixed positions on the sides of the positions on the reference lines β1 and γ1 side. That is, the outer peripheral surfaces of the pair of reference rollers 425 are located on the orthogonal reference lines β1 and γ1.

A pair of cylinders 426 is mounted on the other pair of sides of the positioning frame 423, and a pressing roller 427 is supported by the piston rod thereof. The pressing roller 427 pushes the holding frame 12 installed on the positioning frame 423 against the opposing reference roller 425 by the operation of the cylinder 426. As a result, the holding frame 12 is positioned with reference to the reference lines β1 and γ1 and the reference point ε1 on the diagonal line α1 that is the intersection of the reference lines β1 and γ1.

As shown in FIG. 16, a cylinder 428 is mounted on the base plate 422 at a position corresponding to the four sides of the positioning frame 423, and an elevating frame 41 is mounted on the piston rod thereof. In the elevating frame 41 shown in FIGS. 5A and 16, a plurality of pairs of knock pins 42 corresponding to both sides of the clamper 15 are directed upward with the holding frame 12 positioned on the positioning frame 423. It is projected. Therefore, the knock pins 42 are arranged corresponding to the four sides of the positioning frame 423 and are arranged along the reference lines β1 and γ1. The tip of each knock pin 42 is formed in a hemispherical shape. Then, as shown in FIGS. 6 and 16, when the elevating frame 41 is raised, the knock pins 42 pass through both sides of the narrow portion 26 of the first clamp piece 16 and contact the lower surface of the second clamp piece 17. Then, the second clamp piece 17 is rotated upward as the knock pin 42 moves upward. As a result, the second clamp piece 17 is opened against the attractive force of the permanent magnets 281, 282, 361, 362.

As shown in FIG. 16, the cylinder 428 is installed so that its axis line is inclined. Due to this inclination, the knock pin 42 is also inclined, and the inclination direction is a direction in which the knock pin 42 rises from the lower end side of the second clamp piece 17 to the upper end side of the base end. Therefore, even if the second clamp piece 17 becomes narrower toward the tip side, the knock pin 42 can appropriately open the second clamp piece 17.

As shown in FIG. 5A, the knock pins 42 of each pair are formed to be lower as the pair of knock pins 42 is closer to the reference point ε1 which is the intersection of the reference lines β1 and γ1.
As shown in FIG. 16, a plurality of cylinders 429 corresponding to each clamper 15 are installed on the base plate 422 via stays (not shown), and the pressing pin 38 is supported on the piston rod of the cylinder 429. ing. The pressing pin 38 is moved forward and backward by the operation of the cylinder 429, and at the time of forward movement, the second clamp piece 17 in the open state is pushed in the closing direction.

Then, when the empty clamp device 11 from the return line 70 is returned to the work loading station 74, the clamp device 11 is moved rearward and then lowered to be positioned on the positioning frame 423 of the loading side clamp positioning device 79. Placed. In this state, the clamp device 11 is located in the area surrounded by the reference roller 425 and the pressing roller 427 of the positioning frame 423. Then, in this state, the pressing roller 427 is moved to the reference roller 425 side by the action of the cylinder 426, and the clamp device 11 is positioned by the reference roller 425. Therefore, the two adjacent sides of the clamp device 11 are located on the reference lines β1 and γ1, and the two opposing corners are located on the diagonal line α1 having the reference point ε1 to position the clamp device 11.

(Chuck device 83)
The chuck device 83 will be described.
As shown in FIGS. 17 and 18, in the work loading station 74, as shown by a thick arrow in FIG. 17, a position near the loading side work positioning device 78, a position of the loading side work positioning device 78, and a loading position. A chuck device 83 is provided which is moved so as to reciprocate the side clamp positioning device 79.

As shown in FIGS. 18A and 18B, the frame 432 of the chuck device 83 supports first to fourth chucks 433 to 436. Each of the chucks 433 to 436 has a first chuck piece 430 and a second chuck piece 431. The first chuck piece 430 moves forward to the work 100 side by the operation of the cylinder 437, and is retracted to a position separated from the work 100. The second chuck piece 431 is moved up and down by the operation of the cylinder 438, and by lowering it, the peripheral edge portion of the work 100 can be chucked between the second chuck piece 431 and the first chuck piece 430 in the forward position.

The first chuck 433 is arranged at a fixed position, the second chuck 434 is movable in one direction (direction orthogonal to the arrow P direction) by the cylinder 439, and the third chuck 435 is moved in one direction by the cylinder 440. Can be moved in the other direction (counter arrow P direction) orthogonal to. The fourth chuck 436 is movable in the one direction and the other direction by the cylinders 439 and 440. Therefore, in a state where the first to fourth chucks 433 to 436 chuck the peripheral edge of the work 100, the first to fourth chucks 433 to 436 are moved outward in the respective directions, so that the first ~ The work 100 chucked by the fourth chucks 433 to 436 is tensioned in the direction away from the reference point ε. Therefore, the tension force acts on the work 100.

(Operation of work loading station 74)
Next, the operation of the work loading station 74 will be described.
The empty clamp device 11 from the return line 70 is transferred to the positioning frame 423 of the loading side clamp positioning device 79 shown in FIG. 15 and placed on the positioning frame 423. Here, the positioning frame 423 is positioned in a plane parallel to the work 100 that is positioned by the loading-side work positioning device 78 described later. Therefore, the clamp device 11 on the positioning frame 423 is located in a plane parallel to the stretching plane of the work 100. Then, the pressing roller 427 is moved by the operation of the cylinder 426 on the positioning frame 423, the holding frame 12 of the clamp device 11 is pressed by the reference roller 425, and is positioned with reference to the reference position on the diagonal line α1. .. In this state, the knock pin 42 shown in FIG. 16 is raised, and the second pin 17 of each clamper 15 is opened by the knock pin 42, and the opened state is maintained.

On the other hand, the unworked work 100 is carried into the work carry-in station 74 from the preceding step of the sheet work processing apparatus of the present embodiment, and the first and second chuck pieces 430 and 431 of the chucks 433 to 436 of the chuck device 83 are carried. Chucked by. Then, the work 100 is conveyed by the movement of the chuck device 83 onto the carry-in side work positioning device 78 shown in FIGS. 13 and 14 in which the positioning member 417 is in the retracted position. Here, the work 100 is released from the chucks by the first to fourth chucks 433 to 436 of the chuck device 83. Then, the work 100 is floated by the air from the air ejection nozzle 414. At the same time, the positioning member 417 is moved to the work 100 side by the operation of the actuator 411 of the carry-in side work positioning device 78, and the two adjacent sides of the work 100 in the floating state become the reference lines β and γ by the positioning member 417. Positioned to match. Therefore, the two corners of the work 100 are located on the diagonal line α. At this time, the positioning members 417 on the two sides corresponding to the positions of the reference lines β and γ are stopped at the positions of the reference lines β and γ. On the other hand, the other two side positioning members 417 push the work 100 toward the two side positioning members 417. When the edge of the work 100 is detected by the sensor 410, the operation of the actuator 411 is stopped and the movement of the positioning member 417 is stopped. In this state, the corner of the work 100 is located on the reference point ε.

The stop position of the actuator 411, in other words, the position data of the actuator 411 indicating the stop of the work 100 and the posture of the work 100 is stored in the storage device 85 of the main control device 84.

Then, the positioned work 100 is re-chucked by the chuck device 83 without changing its posture, and the chuck device 83 moves to move the clamp device 11 on the released first clamp piece 16 by the movement of the chuck device 83. Placed in. Therefore, both of the clamp device 11 and the workpiece 100 are positioned relative to each other so that the diagonal lines of the clamp device 11 and the workpiece 100 coincide with each other, and are prepared for machining in the subsequent machining line 73.

Then, the knock pin 42 is retracted downward, and the second clamp piece 17 is closed by its own weight and the magnetic force of the permanent magnets 281, 282, 361, 362. At this time, the protrusion of the pressing pin 38 assists the second clamp piece 17 to be closed more reliably.

Further, at this time, since the height of the knock pin 42 is different, the second clamp piece 17 is closed with a time lag from the one closer to the reference point ε.
On the other hand, at this time, the first chuck 433 of the chuck device 83 holds the fixed position, but the second chuck 434 is given a moving force in the direction orthogonal to the arrow P direction by the cylinder 439, and the third chuck 435 is the cylinder 440. As a result, a moving force is applied in the opposite arrow P direction. Further, the fourth chuck 436 is provided with a moving force in the direction opposite to the arrow P and in the direction orthogonal to the arrow P direction by the cylinders 439 and 440. Therefore, the chuck 100 applies tension to the work 100 in a direction away from the reference point ε. Then, as described above, since the chuck of the work 100 is provided with the time difference, the application of the tension is enabled, the work 100 does not loosen, and the tension is maintained at the position based on the reference point ε. Clamped.

As described above, the clamp device 11 and the work 100 are positioned, and the work 100 is sent to the processing line 73 in a stretched state, and the work 100 is processed with high accuracy.

Therefore, in the work carry-in station 74 configured as described above, the following effects can be obtained.
(17) The work 100 is positioned by the work-in-side work positioning device 78. At this time, since the work 100 is kept in a floating state by the air from the air ejection nozzle 414, even if the work 100 is thin and easily bent, the work 100 is positioned with almost no resistance and positioned accurately. ..

(18) The clamp device 11 is positioned on the carry-in side clamp positioning device 79, and in that state, the work 100 positioned by the carry-in side work positioning device 78 is combined with the clamp device 11. Then, in the positioned state, the holding frame 12 is conveyed into the processing line 73, and the work 100 is processed by etching or the like. Therefore, it is possible to perform accurate processing on a predetermined position of the work 100.

(19) When the workpiece 100 is clamped by the clamper 15 in the loading side clamp positioning device 79, the workpiece 100 is maintained in a stretched state with the reference point ε as a reference. Then, the clamper 15 performs the clamping operation in order from the one closer to the reference point ε. For this reason, the work 100 is sequentially clamped in a state of being pulled from the reference point ε side. Therefore, in a state where the clamping is completed by all the clampers 15, the work 100 is stretched without slack in a positioning state with the reference point ε as a reference. Is set up. Therefore, the work 100 can be processed with high accuracy.

(20) Since the knock pin 42 is inclined so as to rise toward the base end side of the clamper 15, that is, toward the rotation center side of the second clamp piece 17, even if the raising stroke of the knock pin 42 is small, the second clamp The piece 17 is appropriately opened.

(21) Since the pressing pin 38 that presses and assists the closing operation of the second clamp piece 17 is provided, even if there is a factor that obstructs the closing operation of the second clamp piece 17, or a permanent magnet. Even if the magnetic force of 281, 282, 361, 362 becomes weak, the second clamp piece 17 can be appropriately closed.

(Workstock Station 75)
Next, the work stock station 75 will be described.
As shown in FIG. 19, a stock device 86 as stock means is installed behind the transfer conveyor 80 for the work 100. The stock device 86 includes a stocker 443 that can be moved up and down by a lifting robot 442. The stocker 443 is provided with a plurality of shelves 444 (in the embodiment, 10 shelves) in the vertical direction on which the clamp device 11 can be placed. The stocker 443 is moved up and down by the arrangement pitch of the shelves 444. The number of stages of the shelf 444 is equal to the number of stays of the clamp device 11 in the processing line 73. The clamp device 11 on the transfer conveyor 80 of the processing line 73 is transferred between the transfer conveyor 80 side and the shelf 444.

(Operation of work stock station 75)
The work stock station 75 operates as follows.
Normally, the empty stocker 443 in which the clamp device 11 is not stocked is arranged at the lower position shown by the solid line in FIG. In this state, if some problem occurs in the post-process of the processing line 73 and it becomes inconvenient to carry out the work 100 from the processing line 73, the conveyor 80 continues to operate, but the work carry-in to the processing line 73 is carried out. The loading of the clamp device 11 from the station 74 is stopped. At the same time, at the end position of the processing line 73, the clamper 11 on the conveyor 80 is lifted to the upper end position of the stocker 443 by the operation of the lifter 446. Then, the lifted clamp device 11 is drawn into the upper end shelf 444 and placed on the shelf 444. Then, the lifter 446 and the transfer robot are returned to their original positions.

Next, the elevating robot 442 raises the stocker 443 by one step, and the lower shelf 444 of the shelf 444 to which the clamp device 11 has already been carried is placed at the work loading position from the transport conveyor 80. Thereafter, similarly, the clamp device 11 on the transport conveyor 80 is carried in and placed on the shelf 444.

In this way, when a problem occurs in the post process of the processing line 73, the clamp device 11 in the processing line 73 is stocked in the stocker 443 and temporarily waits.
Then, when the problem of the post-process of the processing line 73 is solved, the loading of the clamp device 11 from the work loading station 74 to the processing line 73 is restarted. Further, the stocker 443 is once arranged at the lower position shown by the solid line in FIG. 19, and the clamp device 11 in the stocker 443 is the same as when it is carried into the shelf 444 while rising intermittently from the lower position at a predetermined pitch. They are returned to the conveyor 80 in order, that is, from the upper shelf 444. Therefore, the clamp device 11 on the transport conveyor 80 is sent to the work unloading station 77.

Therefore, the work stock station 75 has the following effects.
(22) Since the clamp device 11 holding the work 100 can be temporarily stocked in the stocker 443, when a problem occurs in the post process of the processing line 73, the work 100 is temporarily sent without sending the work 100 to the subsequent process. You can wait. For this reason, the work 100 is not stopped in the processing line 73 for a predetermined time or longer, excessive etching of the work 100 can be avoided, and processing defects of the work 100 can be prevented from occurring.

(23) When the clamp device 11 in the standby state is returned from the stocker 443 to the transport conveyor 80, the clamp device 11 loaded prior to the shelf 444 is sequentially returned from the shelf 444 to the transport conveyor 80. For this reason, it is possible to prevent the clamp device 11 that was previously carried into the shelf 444 from being left on the shelf 444 for an excessively long time. Therefore, it is possible to suppress the difference in the state change of the workpiece 100 on the clamp device 11 which is on standby.

(Inspection station 76)
Next, the inspection station 76 will be described.
As shown in FIG. 1, FIG. 20 and FIG. 21, in the inspection station 76, an inspection device 51 as an inspection means is arranged at the rear position of the conveyor 80. The inspection device 51 includes a lower inspection unit 452 in which a base frame 451 is arranged at a fixed position, and a base frame 454 above the lower inspection unit 452 that can be moved up and down by a lifting device (not shown) such as a cylinder. An inspection unit 455 is provided.

A plurality of detection members 460 are provided on the upper surface of the base frame 451 of the lower inspection unit 452 and the lower surface of the base frame 454 of the upper inspection unit 455 so as to correspond to the clamper 15 of the clamp device 11. Similarly, the detection member 460 of the lower inspection unit 452 is fixed to the upper surface of the base frame 451 so as to correspond to the clamper 15.

As shown in FIG. 22, each of the detection members 460 includes a case body 50, and inside the case body 50, one board 52 and Hall element units 53 mounted on both boards 52 are provided. Is provided. The Hall element unit 53 of the detection member 460 of the lower inspection unit 452 is provided on the upper surface of the substrate 52, and the Hall element unit 53 of the detection member 460 of the upper inspection unit 455 is provided on the lower surface of the substrate 52.

As shown in FIG. 23, an inspection control device 54 is provided in the main control device 84. The inspection control device 54 is provided for controlling the inspection device 51. The inspection control device 54 has a central processing unit 55 and a storage device 56. The central processing unit 55 controls the operation of the inspection device 51 as a whole. The storage device 56 stores a program for operating the inspection device 51 and temporary data.

When the clamp device 11 is used a predetermined number of times, the clamp device 11 is removed from the transport conveyor 80 in an empty state in which the transport work 100 is not held, and the inspection process is configured as shown in FIGS. Sent to the inspection device 51 shown in FIG. 1 and the inspection device 51 inspects the strength of the magnetic force of the permanent magnets 281, 282, 361, 362.

(Operation of the inspection device 51)
That is, the inspection device 51 operates as follows. FIG. 24 is a flowchart showing the operation of the program stored in the storage device 56. The operation shown in this flowchart proceeds under the control of the central processing unit 55, and the operation for magnetic force inspection is executed for each one of the permanent magnets 281, 282, 361, 362.

As shown by the chain double-dashed line in FIG. 21, the upper inspection unit 455 is lowered from the upper retracted position, and the clamp device 11 to be inspected has the permanent magnets 281, 282, 361, 362 of the clamper 15 moved up and down. The detection member 460 is disposed between the Hall element units 53 of the pair of upper and lower substrates 52.

In this state, in step S (hereinafter, simply referred to as S) 1 in FIG. 24, the Hall element unit 53 detects the magnetic force of each one permanent magnet 281, 282, 361, 362 of the clamper 15. Then, in S2, the strength level of the residual magnetic force in each of the lower and upper permanent magnets 281, 282, 361, 362 is calculated according to the strength of the detected magnetic force. By the way, the magnetic force of the permanent magnets 281, 282, 361, 362 is attenuated by a mechanical load such as vibration applied to the permanent magnets 281, 282, 361, 362 or a temperature rise. Then, in S3, it is determined whether or not the individual strength levels of the residual magnetic forces of the lower and upper permanent magnets 281, 282, 361, 362 are each less than a predetermined threshold value of the magnetic force. To be determined.

If it is determined in the threshold value determination in S3 that the residual magnetic force exceeds the threshold level, in S4, the permanent magnet is maintained while the residual magnetic force is maintained at the strength level above the threshold value. The number of times the 281, 282, 361, 362 can be used is calculated. In other words, the number of times the clamper 15 is used for processing until the residual magnetic force falls below the threshold value is calculated. Here, the usable state is a state in which a magnetic force for appropriately clamping the work 100 is exerted. Then, in the next S5, it is determined whether or not the usable number of times is a predetermined number of times or more, for example, the number of times of processing up to the next inspection step. If the usable number of times is equal to or more than the predetermined number of times until the next inspection process for executing the magnetic force detection, the usable number of times and the holding of the permanent magnets 281, 283, 361, 362 to be inspected in this routine are held in S6. The position on the frame 12 is stored in the storage device 56. Then, in S7, the number of times of processing up to the inspection step for detecting the next magnetic force, in other words, the detection timing of the next inspection step is stored.

When the residual magnetic force is determined to be less than the threshold value in the determination in S3, the state of the residual magnetic force of the inspected permanent magnets 281, 282, 361, 362 is checked in the display (not shown) in S8. The display indicating that it is less than the threshold value is executed. Next, in S9, it is determined that the usable number of times is zero, that is, since the level of the residual magnetic force is not suitable for use, in S10, the display and the sound generation device (not shown) generate an alarm by a screen display and a sound display, respectively. Is displayed. Then, after the stop processing of the routine of S11, the processing of the inspection process ends.

When the usable number of times is less than the predetermined number of times in the determination in S5, that effect is displayed in S8, and after the determination in S9, in S7, the timing at which the processing for the usable number of times is finished is performed next time. The process ends by storing the detection timing of detecting the magnetic force.

In this way, the inspection process of the permanent magnets 281, 282, 361, 362 of the clamper 15 is completed.
When it is determined that at least one of the permanent magnets 281, 282, 361, 362 of the clamp device 11 is in the unusable state, the clamp device 11 is transferred to the repair process after the inspection process is completed. In the repair process, the permanent magnets 281, 282, 361, 362 are re-magnetized depending on the situation, the second clamp piece 17 having the unusable permanent magnets 281, 282, 361, 362, or the long magnet The side member 13 or the short side member 14 may be replaced.

This embodiment has the following effects.
(24) By detecting the residual magnetic force of the permanent magnets 281, 282, 361, 362 in the inspection step, it is possible to determine whether or not the clamper 15 can be properly used. Therefore, it is possible to avoid the use of the clamper 15 whose magnetic force is weakened, and it is possible to prevent an inconvenient situation such as a work clamp error in the processing of the work 100.

(Work unloading station 77)
Next, the configuration and operation of the work unloading station 77 will be described.
(Unloading side clamp positioning device 81)
The unloading side clamp positioning device 81 of the work unloading station 77 has the same configuration as the clamp positioning device 79 of the work unloading station 74 except for the configuration of the height of the knock pin 42.

That is, as shown in FIG. 5B, the knock pins 42 of the carry-out side clamp positioning device 81 are formed at the same height.
(Downstream chuck device 87)
As shown in FIG. 27, the chuck device 87 basically has a configuration similar to that of the chuck device 83 of the work carry-in station 74, but the first to fourth chucks 433 of the chuck device 87 of the work carry-out station 77. Nos. to 436 are arranged at fixed positions of the chuck frame 432 and do not have a function of tensioning the work 100 by the cylinder.

(Work-out side work positioning device 82)
As shown in FIGS. 25 and 26, the unloading-side work positioning device 82 of the work unloading station 77 includes a base plate 512 and a rectangular table 513, and the top surface of the table 513 has a flat “T”-shaped protrusion. 514 is provided. A plurality of recesses 515 are formed between the protrusions 514. A vent hole 516 connected to an air supply/suction source (not shown) is formed on the upper surface of the ridge 514, and an air flow for suction and a jet for ejection are formed on the upper surface of the ridge 514 through the air hole 516. An air flow is generated. The ridges 514 have an arrangement pattern that avoids the etched portion of the work 100 after processing and corresponds to a portion where the etched portion does not exist.

An actuator 517 composed of a single-axis robot is mounted on the base plate 512 corresponding to the four sides of the table 513, and a positioning member 518 is supported at the tip of the operator. Then, by the operation of the actuator 517, the positioning member 518 is moved between a position for positioning the work 100 in the floating position and a position for separating from the work 100. In this case, the positioning position of the positioning member 518 is determined by operating the actuator 517 based on the size and posture of the work 100 stored in the storage device 85 of the main controller 84.

(Operation of work loading station 74)
Next, the operation of the work carry-in station 74 will be described.
The clamp device 11 holding the processed work 100 from the processing line 73 is transferred from the transport conveyor 80 onto the positioning frame 423 of the carry-out side clamp positioning device 81 and placed on the positioning frame 423. Then, the pressing roller 427 is moved by the operation of the cylinder 426 on the positioning frame 423, the holding frame 12 of the clamp device 11 is pressed by the pressing roller 427, and the reference roller 425 positions the holding frame 12 with the reference lines β1 and γ1 as a reference. It Then, the second clamp piece 17 is opened by the knock pin 42, and the opened state is maintained.

Next, the workpiece 100 on the clamp device 11 is chucked by the chuck device 87, the positioning member 518 is conveyed to the unloading side workpiece positioning device 82 at the retracted position, and the chuck by the chuck device 87 is released. Then, the work 100 is floated by the air blown out from the ventilation hole 516. In this floating state, the positioning member 518 is moved to the positioning position, and the positioning member 518 positions the work 100.

Next, the air from the vent holes 516 of the ridges 514 is switched to suction, and the workpiece 100 that has been positioned is adsorbed to the upper surface of the ridges 514 by the suctioned air and temporarily held. Then, the positioning member 518 is retracted, and the work 100 is picked up by a transfer device (not shown) in the subsequent process and sent to the subsequent process.

The clamp device 11 from which the work 100 is detached is conveyed from the clamp positioning device 81 to the upstream position of the return line 70.
In the work carry-in station 74 configured as described above, the following effects can be obtained.

(25) The work 100 is carried out to the subsequent process in a state where the work 100 is positioned by the carry-out side work positioning device 82. Therefore, it is possible to avoid an inconvenient situation such as a chuck error of the work 100 in the subsequent process.

(Example of change)
The present invention is not limited to the above embodiment, but can be embodied in the following modes.

-A permanent magnet should be provided on one clamp piece and the other clamp piece should be made of a magnetic material such as iron. When the clamp piece is made of a magnetic material such as iron, it is preferable to provide a corrosion-resistant coating on the outer surface of the clamp piece in order to prevent the clamp piece from being corroded by acid.

-To integrate the permanent magnets 281, 282, 361, 362 of at least one of the clamp pieces 16, 17 without dividing them.
-Omit the yokes 32 and 39 of at least one clamp piece 16 and 17.

-To omit the cover plates 35, 40 covering the permanent magnets 281, 282, 361, 362 and expose the permanent magnets 281, 283, 361, 362 to the outside. In this case, it is necessary to cover the outer circumference of the permanent magnets 281, 282, 361, 362 with a corrosion resistant coating. Further, the permanent magnets 281, 282, 361, 362 and the yokes 32, 39 are preferably fixed to the clamp pieces 16, 17 with an adhesive.

The first clamp piece 16 is configured separately from the long side member 13 and the short side member 14, and the first clamp piece 16 is fixed to the long side member 13 and the short side member 14 with screws or the like. With this configuration, the clamper 15 can be easily replaced.

In the above-described embodiment, the holding frame 12 and the clamper 15 are made of titanium or titanium alloy, but other materials having corrosion resistance, such as stainless steel or steel base plated with chrome, may be used. .. That is, at least the surfaces of the holding frame 12 and the clamper 15 should have corrosion resistance. In the chrome-plated configuration, the first clamp piece 16 and the second clamp piece 17 may be made of a material that is easily corroded, such as iron. When the steel pieces are used as the clamp pieces 16 and 17, it is possible to provide the clamp pieces 16 and 17 with a yoke function.

As shown in FIG. 28, the second clamp piece 17 is formed to have a narrow width substantially similarly to the first clamp piece 16, and the wide portion 37 with which the knock pin 42 is brought into contact with a part of the second clamp piece 17. To form. With this configuration, the weight of the second clamp piece 17, and thus the clamper 15, can be reduced, and since the second clamp piece 17 is formed to have a narrow width except for the wide portion 37, cleaning liquid and air can be removed. The flow becomes smooth.

In the above-described embodiment, arc-shaped chamfers are formed on the upper and lower outer peripheral edge portions of the first clamp piece 16 and the second clamp piece 17 to provide the edgeless structure 18, but as the edgeless structure 18, As shown in FIG. 29, beveled chamfers are formed on the upper and lower outer peripheral edge portions.

An arc-shaped or planar chamfer as the edgeless structure 18 is provided on the outer peripheral edge of at least one of the first clamp piece 16 and the second clamp piece 17 only on the gap 30 side.
As shown in FIG. 30, the outer peripheral end surfaces of the first clamp piece 16 and the second clamp piece 17 are inclined surfaces that recede toward the gap 30 side.

-The tips of the clamp teeth 27, 34 should be saw-toothed, hemispherical or sharpened.
-Providing a flexible cushioning material for protecting the work 100 at the tips of the clamp teeth 27, 34.

When the first clamp piece 16 is formed wide, the first clamp piece 16 should be provided with a hole or notch through which the knock pin 42 passes.
A structure in which the vertical relationship between the first clamp piece 16 and the second clamp piece 17 is reversed so that the downward knock pin 42 comes down from above and the second clamp piece 17 located on the lower side is opened downward. To do.

When the workpiece 100 is positioned in the pre-process of the work loading station 74 and the post process of the work unloading station 77, the positioning of the work 100 in the work loading station 74 and the work unloading station 77 can be omitted.

-In the said embodiment, although the workpiece|work 100 was positioned in the two adjacent sides, positioning the workpiece|work 100 on the basis of the center.
(Other technical ideas)
The technical idea grasped from the above embodiment is as follows.

(A) The second clamp piece is connected to the first clamp piece by a shaft so that the second clamp piece can be opened and closed, and the magnetic force of the magnet connects the clamp portion at the tip of the first clamp piece and the clamp portion at the tip of the second clamp piece. In the clamper that can clamp the work between
A clamper in which one of the first clamp piece and the second clamp piece has a narrower shape than the other clamp piece.

(B) The clamper according to item (A) of the technical idea, in which the magnet is arranged between the shaft and the clamp portion.
(C) The technical idea (A) or (B), in which the first clamp piece and the second clamp piece are made of a corrosion-resistant material and the magnet is enclosed in both clamp pieces. Clamper.

(D) The clamper according to the above-mentioned technical concept (C), wherein the magnet is provided with a yoke for increasing an attractive magnetic force between the first clamp piece and the second clamp piece.
(E) The clamper according to any one of the technical ideas (A) to (D) in which the magnetic poles of the magnet are aligned in the same direction.

(F) The sheet work processing apparatus according to any one of claims 6 to 12, wherein a carry-out side work positioning means for positioning a work to be carried out is provided on a carry-out side of the processing section.

(G) The sheet work processing apparatus according to claim 13, wherein the carry-in side work positioning means is provided with an air floating means for floating the work by air during positioning.
(H) An inspection method for inspecting the magnetic force of the magnet of the clamper according to any one of claims 1 to 5 by a magnetic force inspection device using a Hall element.

According to this method, the strength level of the magnetic force of the clamper magnet can be detected by the Hall element, and the strength level can be accurately discriminated.
(I) The inspection method according to (H), wherein the detected magnetic force is compared with a predetermined threshold value of the magnetic force to determine the suitability for use of the clamper.

According to this method, the use eligibility as a clamper can be appropriately recognized by comparing with the threshold value.
(J) In the clamper according to any one of the above technical ideas (A) to (E), a ferrite in a non-magnetized state is incorporated into the clamper, and the ferrite is added after the step involving welding in the vicinity of the ferrite. A manufacturing method of a clamper for magnetizing.

According to this manufacturing method, it is possible to avoid weakening of the magnetic force of the permanent magnet due to heat during welding.

11... Clamping device, 12... Holding frame, 15... Clamper, 16... First clamp piece, 17... Second clamp piece, 18... Edgeless structure, 27... Clamp teeth, 30... Gap, 31... Shaft, 32... Yoke , 34... Clamp teeth, 39... Yoke, 51... Inspection device, 53... Hall element unit, 281... Permanent magnet, 282... Permanent magnet, 361... Permanent magnet, 362... Permanent magnet, ε... Reference point, ε1... Reference point ..

Claims (12)

A plurality of clampers for clamping the outer peripheral edge of the sheet-shaped work in a stretched state of the same work are arranged with a mutual interval on the holding frame, and are arranged with the inside of the holding frame being oriented.
The clamper is
The second clamp piece is connected to the first clamp piece by a shaft so that the second clamp piece can be opened and closed, and the work is provided between the clamp portion at the tip of the first clamp piece and the clamp portion at the tip of the second clamp piece by the magnetic force of the magnet. And a clamp device in which one of the first clamp piece and the second clamp piece is narrower than the other clamp piece. The clamp device according to claim 1, wherein the holding frame has an annular shape. The clamp device according to claim 1, wherein the holding frame, the first clamp piece, and the second clamp piece are made of a corrosion-resistant material, and the magnet is enclosed in both clamp pieces. The clamp device according to claim 3, wherein the magnet is provided with a yoke for increasing a magnetic attraction force between the first clamp piece and the second clamp piece. A gap is formed between the first clamp piece and the second clamp piece, and at least one of the first clamp piece and the second clamp piece is provided with an edgeless structure at the edge portion on the gap side. The clamp device according to any one of claims 1 to 4. A processing unit for clamping a work by the clamper of the clamp device according to any one of claims 1 to 5, holding the work in the holding frame, and processing the work in the state. In the sheet work processing device that has,
A sheet work processing apparatus provided on the carrying-in side of the clamp device with respect to the processing unit, and provided with a clamp device positioning means for positioning the clamp device in a plane parallel to the stretching surface of the work with a reference point as a reference. .. 7. The carry-in means for carrying in a work to the clamp device is provided, and the carry-in side work positioning means for positioning the work with reference to the reference position is provided in the carry-in means. Sheet work processing equipment. The sheet work processing apparatus according to claim 7, wherein the carry-in means is provided with work tensioning means for clamping the peripheral edge of the work and tensioning the work. 9. The sheet work processing apparatus according to claim 7, wherein the carry-in side work positioning means is provided with an air levitation means for floating the work by air during positioning. A plurality of opening means capable of engaging with the second clamp piece are provided on the carry-in side of the processing section so as to be able to move forward and backward. The second clamp piece is opened, and the opening means is retracted to close the second clamp piece by the magnetic force of the magnet. The opening means is located at a position away from the reference point. 10. The sheet work processing apparatus according to claim 8 or 9, wherein the closing of the second clamp piece is delayed as it is closed. The sheet work processing apparatus according to any one of claims 6 to 10, wherein stocking means for temporarily stocking the clamp device so as to be able to be taken in and out is provided on a carry-out side of the processing section. The sheet work processing apparatus according to any one of claims 6 to 11, wherein an inspection unit for detecting a magnetic force of the magnet is provided on a carry-out side of the processing unit.