JP6709457B2 - Processing method and processing apparatus for workpiece - Google Patents

Description

TECHNICAL FIELD The present invention relates to a processing method and a processing apparatus for a member to be processed such as a honeycomb core member used in aircraft and automobile parts. More specifically, the present invention relates to a method and apparatus for processing a member to be processed such that a member to be processed such as a honeycomb core member is fixed to a table and processed into a predetermined shape.

Conventionally, various processing members such as sapphire, silicon carbide, and silicon have been cut by a processing device such as a wire saw. Prior to cutting these members to be processed, the members to be processed are previously bonded and fixed to a dummy member (for example, carbon, glass, ceramics), the dummy member is attached to a base member, and the base member is attached to a processing device. It is attached and held. For example, when a wire saw is used as the processing device, a member to be processed that is adhesively fixed to the dummy member is attached to the wire saw via the base member. Then, the wire on which the wire saw travels is pressed against the member to be processed, so that the member to be processed is cut into a thin plate shape.

Recently, a lightweight and highly rigid material has been demanded to improve the efficiency of aircrafts and automobiles, and a honeycomb core member is known as one of the materials. The honeycomb core member is formed by assembling a large number of cells formed of a fiber-reinforced resin such as aramid resin or a lightweight member such as aluminum into a honeycomb arrangement. Therefore, the honeycomb core member has mechanical characteristics that it has high strength with respect to weight.

Therefore, recently, the honeycomb core member is cut using the wire saw (for example, Patent Document 1).

Further, it is necessary to fix the honeycomb core member before processing the honeycomb core member. This fixing is performed by, for example, clamping the honeycomb core member or adhering it to a table. .. In addition, a wood screw having a diameter larger than the cell diameter is screwed into and fixed in the cells of the honeycomb core member (for example, Patent Document 2).
JP, 2014-73549, A JP, 2003-117750, A

By the way, the honeycomb core member has a space formed along the axial direction of the cells, and has air permeability along the axial direction. When holding such a honeycomb core member, the honeycomb core member has a high strength along the axial direction of the cells, but has a problem that the strength is not so high in the orthogonal direction orthogonal to the axial direction. There was a problem that the honeycomb core member was damaged when fixed with a clamp in a direction orthogonal to the direction.

Further, in the method as disclosed in Patent Document 2, a wood screw is screwed into the cell, and the cell is damaged, so that the use area of the honeycomb core member is narrowed and there is a problem that the material cannot be effectively used. Further, after finishing the processing with the processing device, it is necessary to remove a plurality of wood screws from the cell in order to replace the next member to be processed, which causes a problem that it takes time to replace the honeycomb core member.

As described above, the honeycomb core member is preferably held in the axial direction of the cell from the viewpoint of strength, and adsorption fixing is suitable for easy attachment and detachment. However, since the honeycomb core member has air permeability in the axial direction, there is a problem that it cannot be simply adsorbed and held. Further, even when the suction holding is performed from the direction of the cell axis, when the curved surface is processed by the processing device, a force in the rotation direction is applied to the honeycomb core member, so that the suction holding force needs to be increased.

Therefore, it is an object of the present invention to provide a processing method and a processing apparatus for processing a workpiece having air permeability so as to hold the processing apparatus so as to withstand the load of the processing apparatus and not to interfere with the processing apparatus.

According to a first aspect of the present invention, there is provided a processing device for a workpiece, wherein the workpiece is processed by a processing unit while the workpiece is held on a table.
The table is
An inner table having a mounting surface for the workpiece, and a plurality of suction holes provided in the mounting surface;
An outer housing provided to surround the outer side of the inner table and forming a suction chamber by fitting the inner table;
A plurality of up-and-down elevating pins provided in the outer housing and inserted through the suction holes of the inner table;
The inner table is provided so as to be vertically movable relative to the outer housing, and is located in a raised position when the workpiece is placed, and lowered when a negative pressure is applied to the suction chamber. Configured to descend to a position,
The lifting pins are
Urged toward the mounting surface by the elastic member,
When the inner table is in the raised position, the lifting pins are located in the suction holes of the inner table,
The processing device for a workpiece employs a configuration in which the lifting pins project from the mounting surface of the inner table when the inner table is in the lowered position.

According to a second aspect of the present invention, in the apparatus for processing a workpiece according to the first aspect, the processing apparatus employs a configuration in which the processing apparatus is a wire saw provided at a tip of a movable robot arm. Is.

According to a third aspect of the present invention, in the apparatus for processing a processed member according to claim 1 or 2, a plurality of openings are formed on at least one surface of the processed member.
The member to be processed is placed on the inner table, and a suction force is generated on the mounting surface of the inner table to adsorb and hold the member to be processed, whereby the inner table is lowered to the lowered position, and the lifting pins are moved. An apparatus for processing a processed member adopting a configuration in which at least one of the elevating pins is inserted into the opening of the processed member by projecting, and the member to be processed is adsorbed and fixed to the table by the elevating pin. Is.

The invention of claim 4 is the apparatus for processing a processed member according to any one of claims 1 to 3, wherein the processed member is a honeycomb core member formed by assembling cylindrical cells. The apparatus for processing a processed member employs a configuration in which the honeycomb core member is covered with a non-air-permeable member to generate an adsorbing force on the mounting surface of the table.

According to a fifth aspect of the present invention, in the processing device for a processed member according to any one of the first to fourth aspects, the elevating pin is urged toward the mounting surface by an elastic member, The processing device for a processed member adopts a configuration in which only the lifting pins corresponding to the openings of the processed member project from the mounting surface of the table.

According to a sixth aspect of the present invention, there is provided a method for processing a workpiece, wherein the workpiece is held on a table and the workpiece is fixed to the table.
The table is provided so as to surround an inner table in which a plurality of suction holes are provided on a mounting surface of a member to be processed and an outer side of the inner table, and the inner table is fitted to form a suction chamber. It is formed with an outer casing, and a plurality of vertically movable lifting pins are inserted through the suction holes of the inner table.
The workpiece is mounted on the mounting surface of said inner table,
By adopting a configuration in which the suction chamber is set to a negative pressure and the inner table is lowered to the lowered position so that the elevating pin at a position that does not interfere with the suction surface of the workpiece can be projected from the mounting surface. It is a method of processing a member to be processed.

The invention of claim 7 is the method of processing a workpiece according to the invention of claim 6, wherein the processing is performed by a wire saw provided at the tip of a movable robot arm.

According to the present invention, the work member can be firmly fixed by fixing the work member by suction and the elevating pin, and moreover, a plurality of elevating pins so as to withstand the force in the rotational direction due to curved surface processing or the like. Since the member to be processed can be fixed by this, accurate processing can be performed. Further, after the machining is completed, both the suction fixation and the fixation by the lifting pins can be released only by releasing the suction, and the exchange time can be shortened, so that the efficient machining can be performed. Further, even a processed member having air permeability can be firmly adsorbed and fixed.

Further, when the lifting pins receive resistance, the lifting pins do not project from the mounting surface of the table. There is no.

FIG. 1 is an overall perspective view of a processing device using a wire saw according to an embodiment of the present invention. FIG. 2 is a partially cutaway plan view of the wire saw of FIG. 1. FIG. 3 is a front view of the wire saw of FIG. 2. FIG. 4 is a plan view of a table portion of the processing apparatus of the present invention. FIG. 5 is a sectional view taken along the line AA of FIG. (A) And (b) is explanatory drawing of the state which fixes a to-be-processed member to a table. FIG. 4 is an enlarged explanatory view in the cross-sectional direction of the table portion in the state where the member to be processed is fixed to the table in the processing apparatus of the present invention. FIG. 4 is an explanatory plan view showing a state in which a member to be processed is placed on a table in the processing apparatus of the present invention. FIG. 4 is a partially enlarged explanatory view of a state in which a member to be processed is placed on the table in the processing apparatus of the present invention. FIG. 4 is an explanatory diagram showing a state in which a member to be processed is processed by the processing device of the present invention.

An embodiment of the processing apparatus of the present invention will be described below with reference to FIGS. 1 to 4.

As shown in FIG. 1, the processing apparatus 1 of the present invention is provided on a machine base 2, a movable articulated robot 3 standing on the machine base 2, and a tip shaft 3a of an arm of the articulated robot 3. The tool changer 4, a processing unit 5 that is detachably provided via the tool changer 4, a table 20 for mounting and fixing a workpiece W to be processed, and the like are configured.

The machine base 2 is fixed to an appropriate floor surface, wall surface, or the like. An articulated robot 3 is provided on the machine base 2, and an arm is movably controlled by a control mechanism (not shown). The tip shaft 3a of the arm of the articulated robot 3 is rotatable by an appropriate drive source (not shown).

A tool changer 4 is provided on the tip shaft 3 a of the arm of the articulated robot 3. The tool changer 4 includes, for example, a ball plunger, and the processing unit 5 is detachably supported via the tool changer 4. The tool changer 4 can be configured by using an appropriate means such as an engagement pin or an electromagnet that can be engaged.

A wire saw is used as the processing unit 5 in the present embodiment. As shown in FIG. 2, the processing unit 5 includes a U-shaped frame 8, a plurality of guide pulleys 9 (see FIG. 2) housed in the frame 8, and an endless shape suspended on the guide pulley 9. The wire 6 and a gas injection nozzle 7 which is provided in the vicinity of the wire 6 and cools the wire 6 and blows away the processing waste.

As shown in FIG. 2, the guide pulley 9 is axially supported by the inner wall of the frame 8, and at least one guide pulley 9 is provided with an appropriate drive source (not shown). Further, the wire 6 in the cutting region for processing the workpiece W is provided so that the axes of the guide pulleys 9a on both sides are perpendicular to the processing direction of the workpiece W, and the resistance when the workpiece W is processed is increased. Is received by the groove of the guide pulley 9a. Therefore, when the tip shaft 3a of the multi-joint robot 3 rotates, the wire 6 in the cutting region makes a swinging arc motion along the processing direction of the workpiece W. By swinging the wire 6 in an oscillating circular motion, the contact between the wire 6 and the workpiece W approaches point contact, and the cutting load is reduced, so that the processing speed is improved and the wire 6 is prevented from being shaken by an unreasonable load. Processing accuracy is improved. Further, it becomes easy to discharge the processing waste, the processing speed is improved, and the processing accuracy is improved. A load sensor such as a load cell may be provided on at least one pulley shaft of the guide pulley 9a to control the articulated robot 3 according to the cutting load.

As described above, the shafts of the guide pulleys 9a on both sides are provided so as to be perpendicular to the processing direction of the workpiece W, and the resistance when processing the workpiece W is received by the groove of the guide pulley 9a. Therefore, the processing can be performed without depending on the pocket of the frame 8 of the processing unit 5. That is, since it is possible to reduce the interference of the processing unit 5 with the table or the like, it is possible to easily perform free-form processing of the workpiece W.

Note that, in the present embodiment, the wire 6 is configured to move in a swinging circular motion only by rotating the distal end shaft 3a of the articulated robot 3, but the articulated robot 3 itself is moved to rock the wire 6 in a predetermined direction. It can also be moved. However, it is preferable that the articulated robot 3 is configured so as to perform a swinging arc motion only by turning the tip shaft 3a in terms of ease of control and a narrow movable range of the articulated robot 3.

In the present embodiment, the wire 6 is formed by endlessly forming a fixed abrasive wire in which diamond abrasive particles are electrodeposited on the core wire of the wire 6 or fixed by a resin or the like. The abrasive grains may be made of silicon carbide, boron, alumina, or the like, depending on the material to be processed. When a single long wire is used instead of the endless wire, a supply reel and a recovery reel may be mounted, and the wire may be supplied from the supply reel for processing. The wire 6 is driven and driven by a drive source (not shown) provided on the guide pulley 9 to enable one-way traveling or reciprocating traveling. Further, a tension mechanism that applies a predetermined tension to the wire 6 may be provided.

The injection nozzle 7 is provided in the vicinity of a cutting area of the wire 6 for cutting the workpiece W. Cooling air is ventilated through the spray nozzle 7 from an appropriate pump (not shown) and sprayed from the tip of the spray nozzle 7. The cooling air may be appropriately cooled by a cooling mechanism depending on the material of the workpiece W.

Since the processing is performed while cooling with the cooling air as described above, it is possible to cut in a dry environment, and to the workpiece W that is weak in the processing liquid (for example, one that causes a chemical change or one that dissolves in the liquid). Can also be preferably applied. In addition, in the case of processing the member W to be processed, which does not pose a problem even if the working liquid is applied, it is possible to use the working liquid instead of the cooling air.

The table 20 is provided near the processing unit 5 and is erected on a base (not shown). The table 20 includes an inner table 21 for mounting and fixing the workpiece W on an upper surface thereof, and an outer casing 22 surrounding the outer side of the inner table 21 and fitted with the inner table 21. Is configured.

As shown in FIGS. 4 and 5, the inner table 21 has a plurality of suction holes 23 formed on the mounting surface. The inner table 21 is supported by guide members 26 provided at the four corners of the outer casing 22, and is urged upward by elastic members 26a such as springs provided on the guide member 26.

A non-breathable cover 24 is attached along the side surface of the inner table 21, and the cover 24 is covered on the outer side of the outer housing 22. Therefore, the inner table 21 and the outer housing 22 form a suction chamber 30 via the cover 24. A suction adapter 25 is provided on the outer housing 22, and a suction means such as a blower (not shown) is connected to the suction adapter 25. When the suction hole 23 is closed, suction is performed by the suction means, so that the suction chamber 30 has a negative pressure.

Then, when the suction chamber 30 is at atmospheric pressure or positive pressure, the inner table 21 is located in the raised position, and when the suction chamber 30 is depressurized to a negative pressure, the inner table 21 is It descends against the elastic member 26a and is positioned at the lowered position. A stopper 27 is provided on the inner wall of the outer casing 22 so that the inner table 21 stops at the lowered position when the inner table 21 descends.

Elevating pins 28 are inserted into the suction holes 23, respectively, and tips of the elevating pins 28 are flush with or slightly below the mounting surface of the inner table 21 located at the raised position. Is provided. The lower end of the elevating pin 28 is supported by a guide member 29 provided upright on the bottom surface of the outer casing 22 so that the elevating pin 28 can be elevated. An elastic member 29a such as a spring is provided on the guide member 29, and the elastic member 29a biases the elevating pin 28 upward.

Therefore, when the suction chamber 30 is set to a negative pressure and the inner table 21 is lowered to the lowered position, the elevating pins 28 project from the mounting surface of the inner table 21. When the suction hole 23 is blocked by the workpiece W, the lifting pin 28 receives resistance and the elastic member 29a is compressed, so that the lifting pin 28 does not project. .. The protruding length of the elevating pin 28 may be appropriately changed according to the length of the opening of the workpiece W, and for example, about 20 to 80% of the length of the opening is preferable. However, the present invention is not limited to this, and it is also possible to fix the lifting pin 28 without inserting it in balance with the suction holding force.

In the embodiment of the present invention, as the workpiece W, for example, a honeycomb core member used for aircraft parts, automobile parts, etc. is used.

The honeycomb core member is formed by collecting a large number of hexagonal cells (cylindrical bodies) 10 in a honeycomb shape (honeycomb arrangement), and has air permeability along the axial direction of the cells 10. The cell 10 is made of a fiber reinforced resin such as aramid resin or a light weight metal such as aluminum, and has high strength with respect to weight. Since the honeycomb core member has air permeability in the axial direction of the cells 10, even if the honeycomb core member is held on the table 20 as it is, adsorption leakage occurs and the honeycomb core member cannot be held. Therefore, in the embodiment of the present invention, the honeycomb core member is placed on the table 20, and the upper surface of the honeycomb core member is covered with the non-permeable sheet S. The non-breathable sheet S may have a size that covers at least the position facing the suction hole 23 of the table 20.

In the present embodiment, a breathable honeycomb core member is processed as the workpiece W, but a breathable member other than the honeycomb core member can also be processed. In this case, the non-breathable sheet S may be covered as in the case of the honeycomb core member. Further, as the honeycomb core member, not only hexagonal cells but also members formed by cells of various shapes such as rectangles and triangles can be processed. Further, even a member which is an air-impermeable member and has an opening into which the elevating pin 28 can be inserted on the mounting surface side of the workpiece W can be preferably processed. In this case, the suction holding and the lifting pins 28 can be used for fixing without using the non-breathable sheet S.

The above is the configuration of the processing apparatus according to the embodiment of the present invention. Next, a method for sucking and holding the workpiece W using the processing apparatus of the present invention will be described below with reference to FIGS. 6 to 9. ..

6A and 6B are explanatory views showing a state in which the workpiece W (honeycomb core member) is fixed to the table 20.

As shown in FIG. 6A, the inner table 21 is positioned at the raised position, and the workpiece W is mounted on the mounting surface of the inner table 21. Next, the non-breathable sheet S is put on the workpiece W. The non-breathable sheet S may have a size that covers the cells 10 of the workpiece W corresponding to the plurality of suction holes 23 of the inner table 21.

As shown in FIG. 6B, the inner table 21 is lowered by reducing the pressure by a suction means (not shown) connected to the suction adapter 25 and generating a negative pressure in the suction chamber 30. When the inner table 21 contacts the stopper 27, the lowering of the inner table 21 is stopped and the inner table 21 is positioned at the lowered position.

As the inner table 21 descends, the lifting pins 28 project from the mounting surface of the inner table 21. At this time, only the lifting pins 28 that do not interfere with the cell wall 11 of the workpiece W enter the cells 10 of the workpiece W. The lifting pins 28 that interfere with the cell wall 11 of the workpiece W do not project from the mounting surface of the inner table 21 due to the contraction of the elastic members 29a, as shown in FIGS. 6B and 7. In this way, the elevating pin 28 is biased upward by the elastic member 29a, and the elevating pin 28 that interferes with the member W to be processed does not project. Therefore, in the case of the member W to be processed having no opening, The workpiece W having an opening that can be held by suction can be held by the suction and lifting pins 28. Therefore, the various processed members W can be efficiently held on the table 20 without depending on the air permeability and non-air permeability of the processed member W.

Further, as shown by the arrow in FIG. 7, the workpiece W is suction-held on the inner table 21 by the suction force in the axial direction of the cell 10 (the vertical direction in the drawing), and a plurality of the lifting pins 28 are inserted. Thus, the movement of the cell 10 in the direction perpendicular to the axis is restricted. The tip shape of the lifting pins 28 is preferably a curved surface or a flat surface so that the workpiece W is not damaged even if it contacts the cell wall 11 of the workpiece W. Further, it is preferable that the tip end is inclined and formed in a conical shape so that the elevating pin 28 can smoothly enter the cell 10. Further, it is more preferable that the tip of the lifting pin 28 is formed in a conical shape and the end portion of the cone is formed in a spherical shape in terms of smoothly inserting the lifting pin into the cell 10. The diameter of the lifting pin 28 may be appropriately selected according to the size of the cell 10, and may be any diameter that can be inserted into the cell 10.

8 and 9 are explanatory views schematically showing the relationship with the lifting pins 28 when the workpiece W is placed on the table 20.

As shown in FIG. 8, when the workpiece W is placed on the table 20, the position where the plurality of lifting pins 28 interfere with the cells of the workpiece W and the lifting pins 28 inside the cell 10 without interference. And where is inserted. Since a large number of lifting pins 28 are arranged, any one of the plurality of lifting pins 28 is inserted into the cell 10 of the workpiece W. The arrangement and diameter of the lifting pins 28 can be appropriately changed according to the shape of the workpiece W to be held. For example, the diameter of the lifting pin 28 is about 2 to 3 mm, but it can be appropriately changed according to the size of the opening of the member W to be processed and can be smoothly inserted into and removed from the opening of the member W to be processed. It can be preferably used.

As shown in FIG. 9, the lifting pins 28 inserted into the workpiece W are represented by black dots, and the lifting pins 28 represented by dotted lines interfere with the cell wall 11 of the workpiece W and do not project. Is represented. The movement of the lifting pin 28 represented by a black dot is restricted by the cell wall 11 indicated by the arrow in the figure. Therefore, the member W to be processed is firmly held on the table 20 due to the holding force by suction and the lateral displacement limited by the lifting pins 28.

Further, by releasing the suction and setting the inside of the suction chamber 30 to atmospheric pressure or positive pressure, the inner table 21 rises to the raised position, and the lifting pins 28 are set in the suction holes 23 of the inner table 21. The W can be easily removed from the table 20.

Next, with reference to FIG. 10, a processing method using the method of fixing the workpiece W to the table 20 will be described.

As described above, the workpiece W is placed on the placement surface of the table 20 and the non-breathable sheet S is covered. The non-breathable sheet S may be a member made of flexible vinyl or the like or a hard thin plate made of resin or the like.

Next, the inside of the suction chamber 30 of the table 20 is set to a negative pressure to fix the workpiece W on the table 20. Subsequently, the processing unit 5 (a wire saw in this embodiment) mounted on the articulated robot 3 is controlled to press the wire 6 traveling by the processing unit 5 against the workpiece W held on the table 20. At this time, cooling air is jetted from the jet nozzle 7 to cool the wire 6 and blow off the cutting waste. Further, the processing unit 5 causes the tip shaft 3a of the articulated robot 3 to rotate in the forward and reverse directions to cause the wire 6 to perform an oscillating circular motion, if necessary.

After the workpiece W is cut into a predetermined shape, the suction of the table 20 is released to remove the workpiece W that has been cut.

The above is the embodiment of the processing apparatus and the processing method for a member to be processed according to the present invention, but can be appropriately changed within the scope of the invention.

Although the wire saw is used as the processing unit in the present invention, various processing tools such as a band saw and a knife can be used. Further, the shape of the table 20 is not limited to a rectangle, but may be a circle, a triangle, or another polygon. Further, in the present embodiment, the non-breathable cover 24 is used on the outer side of the inner table 20, but other sealing means such as a rubber ring may be used. When a rubber ring is used, it is preferable that the inner table 21 and the outer housing 22 be configured so that they can move smoothly.

W Workpiece member (Honeycomb core member)
S Non-breathable sheet 1 Processing device 2 Machine stand 3 Articulated robot 3a Tip axis 4 Tool changer 5 Processing unit 5a Axis 6 Wire 7 Injection nozzle 8 Frame
9 Guide pulley
9a Guide pulley
9b Guide pulley 10 Cell 11 Cell wall 20 Table 21 Inner table 22 Outer housing 23 Suction hole 24 Cover 25 Suction adapter 26 Guide member 26a Elastic member 27 Stopper 28 Lifting pin 29 Guide member 29a Elastic member 30 Suction chamber

Claims (7)

In a processing device for a workpiece to be processed by a processing unit, the workpiece being held on a table,
The table is
An inner table having a mounting surface for the workpiece, and a plurality of suction holes provided in the mounting surface;
An outer housing provided to surround the outer side of the inner table and forming a suction chamber by fitting the inner table;
A plurality of up-and-down elevating pins provided in the outer housing and inserted through the suction holes of the inner table;
The inner table is provided so as to be vertically movable relative to the outer housing, and is located in a raised position when the workpiece is placed, and lowered when a negative pressure is applied to the suction chamber. Configured to descend to a position,
The lifting pins are
Urged toward the mounting surface by the elastic member,
When the inner table is in the raised position, the lifting pins are located in the suction holes of the inner table,
A processing device for a processed member configured such that when the inner table is in the lowered position, the elevating pins project from the mounting surface of the inner table. The apparatus for processing a workpiece according to claim 1, wherein the processing unit is a wire saw provided at a tip of a movable robot arm. The workpiece is formed with a plurality of openings on at least one surface,
The member to be processed is placed on the inner table, and a suction force is generated on the mounting surface of the inner table to adsorb and hold the member to be processed, whereby the inner table is lowered to the lowered position, and the lifting pins are moved. 3. At least one of the elevating pins is inserted into the opening of the member to be machined by projecting, and the member to be machined is fixed to the table by suction and the elevating pin. A processing device for a member to be processed according to item 1. The member to be processed is a honeycomb core member formed by collecting cylindrical cells, and the honeycomb core member is covered with an air-impermeable member to generate an adsorption force on the mounting surface of the table. The processing device for a processed member according to claim 1, wherein the processing member is processed. The elevating pin is urged toward the mounting surface by the elastic member, and only the elevating pin corresponding to the opening of the workpiece is projected from the mounting surface of the table. Item 5. The processing device for a member to be processed according to any one of items 3. In the method of processing a workpiece, the workpiece is held on a table, and the workpiece is processed in a state where the workpiece is fixed to the table.
The table is provided so as to surround an inner table in which a plurality of suction holes are provided on a mounting surface of a member to be processed and an outer side of the inner table, and the inner table is fitted to form a suction chamber. It is formed with an outer casing, and a plurality of vertically movable lifting pins are inserted through the suction holes of the inner table.
The workpiece is mounted on the mounting surface of said inner table,
The workpiece to be machined is configured so that the elevating pin at a position where it does not interfere with the suction surface of the workpiece can be projected from the placement surface by lowering the suction chamber to a negative pressure and lowering the inner table to the lowered position. How to process parts. The method for processing a member to be processed according to claim 6, wherein the processing is performed by a wire saw provided at a tip of a movable robot arm.

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