JP6704847B2 - アルミニウム−炭化珪素質複合体及びパワーモジュール用ベース板 - Google Patents
アルミニウム−炭化珪素質複合体及びパワーモジュール用ベース板 Download PDFInfo
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- JP6704847B2 JP6704847B2 JP2016508767A JP2016508767A JP6704847B2 JP 6704847 B2 JP6704847 B2 JP 6704847B2 JP 2016508767 A JP2016508767 A JP 2016508767A JP 2016508767 A JP2016508767 A JP 2016508767A JP 6704847 B2 JP6704847 B2 JP 6704847B2
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- 239000002131 composite material Substances 0.000 title claims description 141
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 116
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 title claims description 103
- 239000000835 fiber Substances 0.000 claims description 74
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 66
- 239000000919 ceramic Substances 0.000 claims description 64
- 229910021426 porous silicon Inorganic materials 0.000 claims description 42
- 229910000838 Al alloy Inorganic materials 0.000 claims description 31
- 230000002093 peripheral effect Effects 0.000 claims description 25
- 229910052782 aluminium Inorganic materials 0.000 claims description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 11
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 description 33
- 238000007747 plating Methods 0.000 description 28
- 230000000052 comparative effect Effects 0.000 description 17
- 229910000679 solder Inorganic materials 0.000 description 17
- 230000017525 heat dissipation Effects 0.000 description 11
- 238000005470 impregnation Methods 0.000 description 11
- 238000005242 forging Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- 229910018104 Ni-P Inorganic materials 0.000 description 8
- 229910018536 Ni—P Inorganic materials 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 229910003460 diamond Inorganic materials 0.000 description 7
- 239000010432 diamond Substances 0.000 description 7
- 238000000227 grinding Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000013001 point bending Methods 0.000 description 6
- 230000035882 stress Effects 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 239000011362 coarse particle Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000004512 die casting Methods 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Description
[特許文献1]特許3468358号
[特許文献2]特表平5−507030号公報
原料である炭化珪素粉末(必要に応じて例えばシリカ等の結合材を添加する)を、成形、焼成して多孔質炭化珪素成形体を作製する。多孔質炭化珪素成形体の製造方法に関して特に制限はなく、公知の方法で製造することが可能である。例えば、炭化珪素粉末にシリカ或いはアルミナ等を結合材として添加して混合、成形し、800℃以上で焼成することによって得ることができる。成形方法についても特に制限は無く、プレス成形、押し出し成形、鋳込み成形等を用いることができ、必要に応じて保形用バインダーの併用が可能である。
炭化珪素粉末A(大平洋ランダム社製:NG−150、平均粒径:100μm)100g、炭化珪素粉末B(大平洋ランダム社製:NG−220、平均粒径:60μm)100g、炭化珪素粉末C(屋久島電工社製:GC−1000F、平均粒径:10μm)100g、及びシリカゾル(日産化学社製:スノーテックス)30gを秤取し、攪拌混合機で30分間混合した後、190mm×140mm×5.5mmの寸法の平板状に圧力10MPaでプレス成形した。
炭化珪素粉末A(大平洋ランダム社製:NG−150、平均粒径:100μm)100g、炭化珪素粉末B(大平洋ランダム社製:NG−220、平均粒径:60μm)100g、炭化珪素粉末C(屋久島電工社製:GC−1000F、平均粒径:10μm)100g、及びシリカゾル(日産化学社製:スノーテックス)30gを秤取し、攪拌混合機で30分間混合した後、190mm×140mm×5.5mmの寸法の平板状に圧力10MPaでプレス成形した。
セラミックスファイバーの体積率を20体積%としたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。
実施例1のアルミニウム−炭化珪素質複合体を平面研削盤にてダイヤモンド製の砥石を用いて1.0mm研削加工してアルミニウム−炭化珪素質複合体を露出させ、187×137×4mmの形状とした。次に、得られた加工体は、加工時の歪み除去のために、電気炉で530℃の温度で1時間アニール処理を行った。次いで、圧力0.4MPa、搬送速度1.0m/minの条件でアルミナ砥粒にてブラスト処理を行い清浄化した後、無電解Ni―P及びNi−Bめっきを行った。複合体表面に8μm厚(Ni−P:6μm+Ni−B:2μm)のめっき層を形成した。
アルミニウム炭化珪素質複合体中の炭化珪素の含有率を50体積%、80体積%としたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。
多孔質炭化珪素質成形体を平面研削盤でダイヤモンド製の砥石を用いて、1.8mm、5.8mmの厚みに面加工し、アルミニウム−炭化珪素質複合体の厚みを2.0mm、6.0mmとしたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。
セラミックスファイバーの平均繊維径を20μm、平均アスペクト比を100、体積率を5体積%としたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。
炭化珪素粉末A(大平洋ランダム社製:NG−150、平均粒径:100μm)100g、炭化珪素粉末B(大平洋ランダム社製:NG−220、平均粒径:60μm)100g、炭化珪素粉末C(屋久島電工社製:GC−1000F、平均粒径:10μm)100g、及びシリカゾル(日産化学社製:スノーテックス)30gを秤取し、攪拌混合機で30分間混合した後、190mm×140mm×5.5mmの寸法の平板状に圧力10MPaでプレス成形した。
アルミニウム炭化珪素質複合体中の炭化珪素の含有率を45体積%としたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。
アルミニウム炭化珪素質複合体中の炭化珪素の含有率を85体積%としたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。得られたアルミニウム−炭化珪素質複合体を超音波探傷装置にて内部探傷検査を行ったところ、アルミニウム−炭化珪素質複合体にクラックが確認された。
多孔質炭化珪素質成形体を平面研削盤でダイヤモンド製の砥石を用いて、1.3mmの厚みに面加工し、アルミニウム−炭化珪素質複合体の厚みを1.5mmとしたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。得られたアルミニウム−炭化珪素質複合体を超音波探傷装置により、内部探傷検査を行ったところ、アルミニウム−炭化珪素質複合体にクラックが確認された。
多孔質炭化珪素質成形体を平面研削盤でダイヤモンド製の砥石を用いて、6.3mmの厚みに面加工し、アルミニウム−炭化珪素質複合体の厚みを6.5mmとしたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。
セラミックスファイバーの平均繊維径を25μm、平均アスペクト比を90、体積率を5体積%としたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。得られたアルミニウム−炭化珪素質複合体の外周を目視で確認したところ、外周アルミニウム−セラミックスファイバー複合体部にクラックが確認された。
セラミックスファイバーの平均繊維径を15μm、平均アスペクト比を120、体積率を25体積%としたこと以外は、実施例1と同様にして、アルミニウム−炭化珪素質複合体を得た。
b)アルミニウム−セラミックスファイバー複合体を含む外周部
c)φ7mmの貫通穴
d)φ10−4mmの皿穴
e)表面アルミニウム合金層
Claims (7)
- 炭化珪素の含有率が50〜80体積%の多孔質炭化珪素成形体にアルミニウムを含有する金属を含浸してなる板厚2〜6mmの平板状のアルミニウム−炭化珪素質複合体からなる第一相の両主面を除く外周に、平均繊維径が20μm以下、平均アスペクト比が100以上のセラミックスファイバーを体積率3〜20%の割合で含むアルミニウム−セラミックスファイバー複合体からなる第二相を有し、該第二相に含まれるアルミニウム−セラミックスファイバー複合体の存在割合が、前記第一相の外周面積の50面積%以上であることを特徴とするアルミニウム−炭化珪素質複合体。
- 前記アルミニウム−セラミックスファイバー複合体の熱膨張係数が20×10−6/K未満であり、25℃での強度が200MPa以上であり、150℃での強度が150MPa以上である、請求項1に記載のアルミニウム−炭化珪素質複合体。
- 両主面が、アルミニウム合金層またはアルミニウム−セラミックスファイバー層で覆われている、請求項1または2に記載のアルミニウム−炭化珪素質複合体。
- 一主面が、アルミニウム合金層またはアルミニウム−セラミックスファイバー層で覆われている、請求項1または2に記載のアルミニウム−炭化珪素質複合体。
- 前記第二相に含まれるアルミニウム−セラミックスファイバー複合体中のセラミックスファイバーの含有率が、アルミニウム−セラミックスファイバー複合体全体に対して3〜20体積%である、請求項1〜4のいずれか一項に記載のアルミニウム−炭化珪素質複合体。
- セラミックスファイバーが、アルミナ、シリカ、窒化硼素、炭化珪素、及び窒化珪素から選ばれる一種または二種以上からなる、請求項1〜5のいずれか一項に記載のアルミニウム−炭化珪素質複合体。
- 請求項1〜6のいずれか一項に記載のアルミニウム−炭化珪素質複合体の表面に、めっきを施してなることを特徴とするパワーモジュール用ベース板。
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