JP6698134B2 - クライオトランスファーホルダ及びワークステーション - Google Patents
クライオトランスファーホルダ及びワークステーション Download PDFInfo
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- JP6698134B2 JP6698134B2 JP2018201511A JP2018201511A JP6698134B2 JP 6698134 B2 JP6698134 B2 JP 6698134B2 JP 2018201511 A JP2018201511 A JP 2018201511A JP 2018201511 A JP2018201511 A JP 2018201511A JP 6698134 B2 JP6698134 B2 JP 6698134B2
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- 238000012546 transfer Methods 0.000 title claims description 16
- 239000004020 conductor Substances 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 5
- 239000002470 thermal conductor Substances 0.000 claims description 5
- 239000000523 sample Substances 0.000 description 93
- 239000002826 coolant Substances 0.000 description 11
- 230000033001 locomotion Effects 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000001493 electron microscopy Methods 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 239000012530 fluid Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 239000012520 frozen sample Substances 0.000 description 2
- 239000012472 biological sample Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/42—Low-temperature sample treatment, e.g. cryofixation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0216—Means for avoiding or correcting vibration effects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2005—Seal mechanisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20207—Tilt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/204—Means for introducing and/or outputting objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Description
Claims (8)
- 極低温度に保持されたサンプルを電子顕微鏡内に取り付けるためのクライオトランスファーホルダであって、
サンプルホルダと、
外側デュワー筐体及び、前記サンプルホルダに熱的に接続された内側デュワー容器を含む円筒形デュワーとを備え、
前記円筒形デュワーが液体寒剤を保持するように構成され、
前記サンプルホルダに熱的に接続された熱導体と、
筐体中心軸線を有した熱導体筐体とを更に備え、
前記円筒形デュワーが、
直径と、
長さと、
円筒軸線と、
前記熱導体筐体に取り付けられる外側デュワー筐体と、
内側デュワー容器とを含み、
前記デュワー円筒軸線が、前記熱導体筐体中心軸線と一直線であり、
前記熱導体が、前記熱導体筐体を通過し、且つ前記熱導体筐体中心軸線と一直線であり、
前記内側デュワー容器が中央開口部を有し、前記熱導体が前記中央開口部を前記内側デュワー容器に触れることなく通過して、前記内側デュワー容器内に収容された液体寒剤と接触するようになっている、クライオトランスファーホルダ。 - 前記デュワー直径が前記デュワー長さよりも大きい、請求項1に記載のクライオトランスファーホルダ。
- 前記クライオトランスファーホルダが、前記デュワーが空の際に、前記中心軸線周りに回転させている間、前記中心軸線に対する重心を維持する、請求項1に記載のクライオトランスファーホルダ。
- 前記クライオトランスファーホルダが、前記デュワーが液体寒剤を収容している際に、前記中心軸線周りに回転させている間、前記中心軸線に対する重心を維持する、請求項1に記載のクライオトランスファーホルダ。
- サンプルホルダシャッターと、
シャッター制御ロッドと、
シャッター制御ノブとを更に備え、
前記シャッター制御ロッドが、前記サンプルホルダシャッターから前記デュワーを越える位置まで、前記筐体中心軸線に沿って前記熱導体を通過し、
前記シャッター制御ノブが、前記シャッター制御ロッドに対して解放可能に接続される、請求項1に記載のクライオトランスファーホルダ。 - 摺動して前記サンプルホルダを覆うように構成されるシャッターと、
前記熱導体内に配置されて、前記シャッターに接続され、且つ解放可能な接続によって手動シャッター制御ノブに接続されるシャッター制御ロッドとを更に備え、
前記熱導体が、前記筐体を通過し且つ前記筐体中心軸線と一直線である、請求項1に記載のクライオトランスファーホルダ。 - 摺動して自身を覆うように構成されるシャッターと、
前記シャッター、及び、解放可能な接続によって手動シャッター制御ノブに接続されるシャッター制御ロッドとを更に備え、
前記手動シャッター制御ノブが、前記クライオトランスファーホルダが電子顕微鏡に取り付けられると、電子顕微鏡の外側に配置される、
請求項1に記載のクライオトランスファーホルダ。 - 極低温度において、サンプル支持プラットフォーム及び中心軸線を有する、請求項1に記載のクライオトランスファーホルダ内へと試料を取り付けるためのワークステーションであって、
前記クライオトランスファーホルダを受け入れるための受入冶具を備え、
前記受入冶具が、
固定サンプル輸送容器と、
前記クライオトランスファーホルダを受け入れるための細長チャンバとを含み、
前記細長チャンバが、前記クライオトランスファーホルダを前記受入冶具に取り付けた際にその中心軸線周りの回転を可能にするように構成される軸受表面を含み、
前記クライオトランスファーホルダを前記受入冶具に取り付けると、前記サンプル支持プラットフォームが前記サンプル輸送容器内へと延在する、ワークステーション。
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US201762579040P | 2017-10-30 | 2017-10-30 | |
US62/579,040 | 2017-10-30 |
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JP2019083191A JP2019083191A (ja) | 2019-05-30 |
JP6698134B2 true JP6698134B2 (ja) | 2020-05-27 |
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US (2) | US10832887B2 (ja) |
EP (2) | EP3477680B1 (ja) |
JP (1) | JP6698134B2 (ja) |
CN (1) | CN109720737B (ja) |
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JP6995099B2 (ja) * | 2019-09-30 | 2022-01-14 | 日本電子株式会社 | 試料取付装置 |
CN111048385A (zh) * | 2019-12-24 | 2020-04-21 | 中国科学院合肥物质科学研究院 | 一种透射电镜低温样品杆 |
EP4167013A1 (en) * | 2021-10-15 | 2023-04-19 | Leica Mikrosysteme GmbH | Sample holder transfer device |
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WO1983003707A1 (en) * | 1982-04-20 | 1983-10-27 | Nicholson, Walter, Anthony, Patrick | Low temperature stage for microanalysis |
JPH04135153U (ja) * | 1991-06-07 | 1992-12-16 | 株式会社日立製作所 | 電子線応用装置の試料冷却ステージ |
JP2965186B2 (ja) * | 1993-01-18 | 1999-10-18 | 日本電子株式会社 | 電子顕微鏡等の試料装置 |
US5753924A (en) | 1997-03-12 | 1998-05-19 | Gatan, Inc. | Ultra-high tilt specimen cryotransfer holder for electron microscope |
US6410925B1 (en) | 2000-07-31 | 2002-06-25 | Gatan, Inc. | Single tilt rotation cryotransfer holder for electron microscopes |
US7132673B2 (en) * | 2004-07-30 | 2006-11-07 | E.A. Fischione Instruments, Inc. | Device and method for milling of material using ions |
US7659510B2 (en) * | 2008-03-28 | 2010-02-09 | Chih-Yu Chao | Cryo-charging specimen holder for electron microscope |
WO2009145377A1 (en) * | 2008-05-30 | 2009-12-03 | Korea Basic Science Institute | Workstation for cryo transmission electron microscope |
JP5250470B2 (ja) * | 2009-04-22 | 2013-07-31 | 株式会社日立ハイテクノロジーズ | 試料ホールダ,該試料ホールダの使用法、及び荷電粒子装置 |
US8336405B2 (en) * | 2010-07-28 | 2012-12-25 | E.A. Fischione Instruments, Inc. | Cryogenic specimen holder |
JP6008965B2 (ja) * | 2011-08-05 | 2016-10-19 | イー エイ フィシオネ インストルメンツ インコーポレーテッドE.A.Fischione Instruments, Inc. | 改良型低温試料ホルダ |
JP5732006B2 (ja) | 2012-06-28 | 2015-06-10 | 株式会社日立ハイテクノロジーズ | 試料冷却ホルダー及び冷却源容器 |
DE102014110722B4 (de) | 2014-07-29 | 2016-06-09 | Leica Mikrosysteme Gmbh | Ladestation zum Umladen von gefrorenen Proben bei tiefen Temperaturen |
DE102015100727A1 (de) | 2015-01-20 | 2016-07-21 | Leica Mikrosysteme Gmbh | Probentransfereinrichtung |
JP6127191B1 (ja) * | 2016-10-03 | 2017-05-10 | 株式会社メルビル | 試料ホルダー |
NL2019247B1 (en) * | 2017-07-14 | 2019-01-28 | Hennyz B V | Cryotransfer system |
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2018
- 2018-10-26 JP JP2018201511A patent/JP6698134B2/ja active Active
- 2018-10-26 EP EP18202746.6A patent/EP3477680B1/en active Active
- 2018-10-26 EP EP22215538.4A patent/EP4174903A1/en active Pending
- 2018-10-29 US US16/173,307 patent/US10832887B2/en active Active
- 2018-10-29 CN CN201811266789.XA patent/CN109720737B/zh active Active
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2020
- 2020-10-27 US US17/080,937 patent/US11908655B2/en active Active
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Publication number | Publication date |
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US20210110991A1 (en) | 2021-04-15 |
CN109720737A (zh) | 2019-05-07 |
US10832887B2 (en) | 2020-11-10 |
EP3477680A1 (en) | 2019-05-01 |
EP4174903A1 (en) | 2023-05-03 |
CN109720737B (zh) | 2020-10-16 |
US20190131106A1 (en) | 2019-05-02 |
US11908655B2 (en) | 2024-02-20 |
EP3477680B1 (en) | 2022-12-28 |
JP2019083191A (ja) | 2019-05-30 |
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