JP6694033B2 - Electron multiplier and photomultiplier tube - Google Patents

Description

  The present invention relates to a method for manufacturing an electron multiplier, a photomultiplier tube, and a photomultiplier.

  Patent Document 1 describes an electron multiplier having a rectangular parallelepiped dynode element provided with a wavy passage. In this electron multiplier, a passage and a dynode element are formed by combining two blocks having wavy groove portions.

U.S. Pat. No. 3,244,922

  As described above, in the electron multiplier described in Patent Document 1, the wavy groove is formed in each of the two blocks, and these blocks are combined to form a passage (channel). However, it is difficult to improve the processability of the channel by such a method.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a method for manufacturing an electron multiplier, a photomultiplier tube, and a photomultiplier that can improve the processability of a channel. ..

  A method of manufacturing an electron multiplier according to the present invention is a secondary body which is opened in one end surface and the other end surface of the main body portion in the first direction and which is incident on the main body portion in the first direction. A method of manufacturing an electron multiplier including an electron-emitting channel, comprising: a first plate-shaped member having a front surface and a back surface opposite to the front surface; and a pair of second plate-shaped members. And a hole forming step of forming hole portions extending from the front surface to the back surface and extending along the front surface and the back surface in the first plate-shaped member, and the first plate-shaped member as a pair of second plate-shaped members. By laminating the first and second plate-shaped members on each other so as to be sandwiched by the two, a stacking step of forming a channel defined by the holes in the stack and an integrated process of integrating the stack And the cutting process that forms the main body by cutting the integrated laminate. Comprising a step, a layer formation step of forming a the inner surface of the channel resistance layer and the secondary electron multiplication layer, and in the cutting step, the channel on one end surface and other end surface cuts the laminate so as to be opened.

  In this method of manufacturing an electron multiplier, holes are formed in the first plate-shaped member from the front surface to the back surface and extend along the front surface and the back surface. Then, the first plate-shaped member is sandwiched between the pair of second plate-shaped members so as to be laminated with each other to form a laminated body, and a channel defined by the hole is formed. The main body is configured by integrally cutting the laminated body. In addition, a resistance layer and a secondary electron multiplication layer are formed on the inner surface of the channel. According to such a method, the processability of the channel can be improved due to the fact that it is relatively easy to form the hole in the plate-shaped member. Further, for the same reason, the manufacturing cost can be reduced.

  In the method for producing an electron multiplier according to the present invention, in the layer forming step, the resistance layer and the secondary electron multiplying layer may be formed by an atomic layer deposition method (ALD: Atomic Layer Deposition). In this case, the resistance layer and the secondary electron multiplication layer can be easily formed on the inner surface of the channel.

  In the method for manufacturing an electron multiplier according to the present invention, the first and second plate-shaped members are made of a conductor, and an insulating film is formed on the surface of the main body and the inner surface of the channel before the layer forming step. An insulating film forming step may be further provided. In this case, since the conductors can be used as the first and second plate-shaped members, the electron multiplier can be manufactured with various materials.

  In the method of manufacturing the electron multiplier according to the present invention, in the hole forming step, the hole may be formed so as to reach one end or the other end of the first plate-shaped member in the first direction. In this case, before the cutting step, the hole is formed at either one end or the other end of the first plate-shaped member. Therefore, in the cutting step, it is possible to open the channel on the one end surface and the other end surface of the main body portion by cutting only one of the one end and the other end of the first plate-shaped member. Further, before the cutting step, the hole is not formed on either the one end or the other end of the first plate-shaped member. Therefore, it is possible to prevent the first plate-shaped member from separating into two parts. These can improve workability. In addition, the width of the channel can be made accurately and easily.

  In the method of manufacturing the electron multiplier according to the present invention, in the hole forming step, the hole may be formed so as not to reach the end of the first plate member. In this case, before the cutting step, no hole has reached the end of the first plate-shaped member. Therefore, it is possible to more reliably prevent the first plate-shaped member from separating into two parts. Thereby, workability can be improved. In addition, the width of the channel can be made accurately and easily.

  In the electron multiplier according to the present invention, the thickness of the first and second plate-shaped members may be 5 mm or less. In this case, the holes can be formed more easily by making the first and second plate-shaped members relatively thin. Therefore, the processability of the channel can be further improved.

  In the method for manufacturing an electron multiplier according to the present invention, in the preparing step, the plurality of first plate-shaped members are prepared, and further the third plate-shaped member is further prepared, and in the laminating step, the first plate is prepared. The first, second, and third plate-shaped members such that the first and third plate-shaped members are sandwiched between the pair of second plate-shaped members while the third plate-shaped member is interposed between the plate-shaped members. You may laminate | stack on each other and may comprise a laminated body. In this case, the first plate-shaped member is sandwiched between the third plate-shaped member and the pair of second plate-shaped members to form a plurality of channels in the stacking direction thereof. Therefore, a multi-channel electron multiplier can be easily manufactured.

  In the method of manufacturing an electron multiplier according to the present invention, a plurality of holes may be formed in the first plate-shaped member in the hole forming step. In this case, a plurality of channels are formed in the direction along the front surface and the back surface of the first plate-shaped member. Therefore, a multi-channel electron multiplier can be easily manufactured.

  A photomultiplier tube according to the present invention includes an electron multiplier manufactured by the method for manufacturing an electron multiplier described above, a tubular body that houses the electron multiplier, and a channel opening on one end face thereof. A secondary electron emitted from the channel according to the photoelectrons incident on the channel, which is provided in the tube body and is disposed inside the tube so as to face the photocathode for supplying photoelectrons to the channel and the opening of the channel on the other end surface. And an anode for receiving.

  This photomultiplier tube has an electron multiplier manufactured by the above-described method for manufacturing an electron multiplier. For this reason, the above-mentioned effects can be suitably exhibited.

  A photomultiplier according to the present invention is provided with an electron multiplier manufactured by the method for manufacturing an electron multiplier described above, and a photocathode that is provided so as to close an opening of a channel on one end face and supplies photoelectrons to the channel. And an anode that is provided so as to close the opening of the channel on the other end surface and receives secondary electrons emitted from the channel in response to photoelectrons incident on the channel.

  This photomultiplier is equipped with the electron multiplier manufactured by the method for manufacturing the electron multiplier described above. For this reason, the above-mentioned effects can be suitably exhibited.

  According to the present invention, the processability of the channel can be improved.

It is sectional drawing of the photomultiplier tube which concerns on this embodiment. It is a perspective view of the electron multiplier concerning this embodiment. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on this embodiment. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on this embodiment. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on this embodiment. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on this embodiment. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on this embodiment. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on this embodiment. It is a figure which shows the electron multiplier manufactured by the manufacturing method of the electron multiplier which concerns on a 1st modification. It is a figure which shows the electron multiplier produced by the manufacturing method of the electron multiplier which concerns on a 2nd modification. It is a perspective view of an electron multiplier manufactured by a manufacturing method of an electron multiplier concerning the 3rd modification. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on a 3rd modification. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on a 3rd modification. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on a 3rd modification. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on a 3rd modification. It is a figure which shows 1 process of the manufacturing method of the electron multiplier which concerns on a 3rd modification. FIG. 3 is a sectional view of a photomultiplier to which the electron multiplier shown in FIG. 2 is applied.

  Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts will be denoted by the same reference numerals and redundant description will be omitted.

  FIG. 1 is a sectional view of a photomultiplier tube according to this embodiment, and FIG. 2 is a perspective view of an electron multiplier according to this embodiment. As shown in FIGS. 1 and 2, the photomultiplier tube 1 includes an electron multiplier 2, a tube body 3, a photocathode 4, and an anode 5. The electron multiplier 2 multiplies electrons by emitting secondary electrons in response to the incidence of electrons. The electron multiplier 2 has a main body 6 and a channel 8.

  The main body portion 6 extends in the first direction D1. The main body 6 has a rectangular parallelepiped shape. The main body portion 6 has one end surface 6a in the first direction D1 and the other end surface 6b. At least the surface of the main body 6 is formed of an insulator. Here, as an example, the main body 6 is made of ceramic, which is an insulator.

  The channel 8 emits secondary electrons according to the incident electrons. The channel 8 includes an electron incident part 8a and a multiplication part 8b. The electron incident portion 8 a is an entrance portion for injecting electrons from the outside of the body portion 6 into the inside of the body portion 6. The electron incident portion 8a is provided on the main body portion 6 so as to open on the one end surface 6a of the main body portion 6 in the first direction D1. The opening of the electron incident portion 8a on the one end face 6a has a rectangular shape when viewed from the first direction D1. Further, the electron incident portion 8a gradually narrows in the second direction D2, which will be described later, along the first direction D1. That is, the electron incident portion 8a has a tapered shape that shrinks along the first direction D1.

  The multiplier section 8b emits secondary electrons according to the electrons incident from the electron incident section 8a. The multiplication section 8b is open to the other end surface 6b of the main body section 6 in the first direction D1. The opening of the multiplication part 8b on the other end surface 6b faces the anode 5. The multiplication section 8b is provided in the main body section 6 so as to reach the electron incident section 8a. Therefore, the channel 8 is open to the one end surface 6a and the other end surface 6b of the main body portion 6 as a whole.

  The multiplication section 8b includes a first inner surface 9 and a second inner surface 10 that extend over the entire multiplication section 8b in the first direction D1 and face each other. The first inner surface 9 and the second inner surface 10 are separated from each other in a second direction D2 that intersects the first direction D1. The second direction D2 is a direction from the first inner surface 9 toward the second inner surface 10, and here is a direction perpendicular to the first direction D1.

  The first inner surface 9 includes convex first bent portions 9a and concave second bent portions 9b that are alternately arranged along the first direction D1. The first inner surface 9 also includes a plurality of first inclined surfaces 9c that define the first bent portion 9a and the second bent portion 9b, respectively. The first inclined surface 9c has a planar shape. In the present embodiment, the first bent portion 9a and the second bent portion 9b are bent in a rectangular shape.

  The second inner surface 10 includes convex third bent portions 10a and concave fourth bent portions 10b, which are alternately arranged along the first direction D1. The second inner surface 10 also includes a plurality of second inclined surfaces 10c defining the third bent portion 10a and the fourth bent portion 10b, respectively. The second inclined surface 10c has a planar shape. In the present embodiment, the third bent portion 10a and the fourth bent portion 10b are bent in a square shape.

  That is, the first inner surface 9 and the second inner surface 10 are formed to repeat bending in a zigzag shape (for example, a wavy shape) along the first direction D1. Here, in the first inner surface 9 and the second inner surface 10, the first bent portion 9a and the fourth bent portion 10b face each other in the second direction D2, and the second bent portion 9b and The third bent portion 10a faces each other, and the first inclined surface 9c and the second inclined surface 10c face each other.

A resistance layer and a secondary electron multiplication layer are provided on the inner surface of the electron incident portion 8a and the inner surface of the multiplication portion 8b (at least the first inner surface 9 and the second inner surface 10) so as to be laminated on each other. .. The surface layer of the electron incident portion 8a and the surface layer of the multiplication portion 8b are secondary electron multiplication layers. As the material of the resistance layer, for example, a mixed film of Al ₂ O ₃ (aluminum oxide) and ZnO (zinc oxide) or a mixed film of Al ₂ O ₃ and TiO ₂ (titanium dioxide) can be used. .. Further, as a material of the secondary electron multiplication layer, for example, Al ₂ O ₃ or MgO (magnesium oxide) can be used.

  Further, metal layers 11 and 12 each containing a nickel-based metal are provided on one end surface 6a and the other end surface 6b of the main body 6 by a method such as vapor deposition. A potential difference is applied to the main body portion 6 such that the metal layer 12 provided on the other end surface 6b has a higher potential than the metal layer 11 provided on the one end surface 6a. Since the potential difference is applied in this way, a potential difference along the first direction D1 also occurs in the channel 8.

  In addition, the main body portion 6 includes first and second plate-shaped members such that a plurality of (here, four) first plate-shaped members 21 are sandwiched by a pair of second plate-shaped members 22, as described later. The members 21 and 22 are laminated on each other. Thereby, the holes 24 formed in each of the first plate-shaped members 21 are connected to each other, and both ends in the stacking direction are closed by the second plate-shaped members, so that the channel 8 is configured.

  The tube body 3 houses the electron multiplier 2. As shown in FIG. 1, the tube body 3 extends in the first direction D1. In the first direction D1, one end 3a of the tubular body 3 is open and the other end 3b is sealed. Here, the one end face 6a of the main body 6 of the electron multiplier 2 is located on the one end 3a side of the tube body 3, and the other main body portion 6 of the electron multiplier 2 is on the other end 3b side of the tube body 3. The end surface 6b is located.

  The photocathode 4 generates photoelectrons in response to the incidence of light. The photocathode 4 has a flat plate shape. The photocathode 4 is provided so as to close the opening at the one end 3a of the tubular body 3. The photocathode 4 faces the opening of the electron incident portion 8a on the one end surface 6a of the main body 6 of the electron multiplier 2. As a result, the photoelectrons generated on the photocathode 4 are supplied to the electron incident portion 8a. The inside of the tubular body 3 is decompressed with the opening of the one end 3a of the tubular body 3 closed by the photocathode 4.

  The anode 5 receives secondary electrons emitted from the channel 8 in response to photoelectrons incident on the channel 8. The anode 5 has a flat plate shape. The anode 5 is arranged in the tube body 3 so as to face the opening of the multiplication portion 8b on the other end surface 6b of the main body portion 6. The anode 5 is arranged apart from the other end surface 6b of the main body 6 and the other end 3b of the tubular body 3. A detector (not shown) that detects a pulse of an electric signal corresponding to the secondary electrons received by the anode 5 is connected to the anode 5.

  Subsequently, a method of manufacturing the electron multiplier 2 as described above will be described. In this manufacturing method, first, as shown in FIG. 3, a plurality of (here, four) first plate-shaped members 21 each having a front surface 21a and a back surface 21b opposite to the front surface 21a, and A pair of second plate-shaped members 22 is prepared (preparation step). In addition, here, the hole 24 described later is not formed in the first plate-shaped member 21. The first and second plate-shaped members 21 and 22 have a rectangular shape. The thickness of each of the first and second plate-shaped members 21 and 22 is 5 mm or less. The first and second plate-shaped members 21 and 22 are made of ceramic, which is an insulator. In addition, since the first and second plate-shaped members 21 and 22 are formed of ceramic here, the first and second plate-shaped members 21 and 22 are formed by performing the stacking step by roll compaction. It can be formed relatively thin.

  In the subsequent step, a plurality of (here, six) holes 24 are formed in the first plate-shaped member 21 (hole forming step). The hole 24 can be formed by, for example, laser processing or punching with a die. The hole 24 extends from the front surface 21a to the back surface 21b and extends along the front surface 21a and the back surface 21b. The holes 24 are arranged two-dimensionally along the first direction D1 and the second direction D2.

  The hole 24 extends along the first direction D1. Specifically, the hole portion 24 has a triangular portion 24a formed in a triangular shape that spreads in a direction opposite to the first direction D1, and the triangular portion 24a extends in the first direction D1. And an extending portion 24b that extends as a whole. However, the hole portion 24 is formed so as not to reach the end portion (particularly, the one end 25 and the other end 26 in the first direction D1) of the first plate-shaped member 21.

  In the subsequent step, as shown in FIGS. 4 and 5, the first and second plate-shaped members 21 and 22 are sandwiched between the first plate-shaped member 21 and the second plate-shaped member 22. The layers are laminated on each other to form the laminated body 27 (laminating step). Here, four first plate-shaped members 21 are sandwiched by a pair of second plate-shaped members 22. By laminating the first and second plate-shaped members 21 and 22 in this manner, a plurality of channels 8 defined by the holes 24 are formed in the laminated body 27. Here, the triangular portion 24a of the hole 24 constitutes the electron incident portion 8a, and the extending portion 24b constitutes the multiplication portion 8b (see FIG. 7). The width of the channel 8 in the stacking direction of the plate members can be adjusted by adjusting the number of stacked first plate members 21.

  In the subsequent step, the laminated body 27 is integrated (integration step). Here, the first and second plate-shaped members 21 and 22 made of ceramic are integrated by pressing and sintering.

  In the subsequent step, as shown in FIGS. 6 and 7, the body 6 is configured by cutting the integrated laminated body 27 (cutting step). In this cutting step, the stacked body 27 is cut along the virtual lines to be cut L1, L2, L3 set on the stacked body 27. The lines to be cut L1, L2, L3 are set in a grid pattern so as to divide the channels 8 arranged two-dimensionally along the first direction D1 and the second direction D2 one by one. The planned cutting line L1 is set along the first direction D1. The planned cutting line L1 defines the width of the main body portion 6 along the second direction D2. Each of the scheduled cutting lines L2 and L3 is set along the second direction D2. The planned cutting lines L2, L3 define the length of the main body portion 6 along the first direction D1. The planned cutting line L2 is set so that the electron incident part 8a is opened in the cutting surface when the cutting is performed along the planned cutting line L2. Further, the planned cutting line L3 is set so that the multiplication section 8b is opened in the cutting surface when the cutting is performed along the planned cutting line L3. By cutting the stacked body 27 along the cutting lines L1, L2, L3 as described above, a plurality of main body portions 6 each having a single channel 8 are configured.

  In the subsequent step, the resistance layer and the secondary electron multiplication layer are formed on the inner surface of the channel 8 formed in the main body 6 (layer forming step). The resistance layer and the secondary electron multiplication layer are formed here by an atomic layer deposition method. Through the above steps, a plurality of electron multipliers 2 as shown in FIG. 8 are manufactured.

  As described above, in the method for manufacturing the electron multiplier 2 according to the present embodiment, the hole portion 24 extending from the front surface 21a to the back surface 21b and extending along the front surface 21a and the back surface 21b is formed in the first plate member 21. Form. Then, the first plate-shaped member 21 is laminated by sandwiching it between the pair of second plate-shaped members 22 to form a laminated body 27, and the channel 8 defined by the hole 24 is formed. The main body 6 is formed by integrally cutting the laminated body 27. In addition, a resistance layer and a secondary electron multiplication layer are formed on the inner surface of the channel 8. According to such a method, the processability of the channel 8 can be improved due to the relative ease of forming the hole 24 in the plate-shaped member. Further, for the same reason, the manufacturing cost can be reduced.

  Further, in the method of manufacturing the electron multiplier 2, in the layer forming step, the resistance layer and the secondary electron multiplier layer are formed by the atomic layer deposition method. Therefore, the resistance layer and the secondary electron multiplication layer can be easily formed on the inner surface of the channel 8.

  Further, in the method of manufacturing the electron multiplier 2, the hole 24 is formed so as not to reach the end of the first plate-shaped member 21 in the hole forming step. Therefore, before the cutting step, the hole 24 does not reach the end of the first plate-shaped member 21. Therefore, it is possible to more reliably prevent the first plate-shaped member 21 from separating into two parts. Thereby, workability can be improved. Further, the width of the channel 8 can be accurately and easily made.

  Further, in the electron multiplier 2, the thickness of the first and second plate-shaped members 21 and 22 is 5 mm or less. Therefore, the holes 24 can be formed more easily by making the first and second plate members 21, 22 relatively thin. Therefore, the workability of the channel 8 can be further improved.

  The photomultiplier tube 1 according to the present embodiment includes the electron multiplier 2 manufactured by the method for manufacturing the electron multiplier 2 described above, and thus the above-described operational effects can be suitably exhibited.

[First Modification]
Next, a method of manufacturing the electron multiplier according to the first modification will be described. As shown in FIG. 9A, the electron multiplier 31 according to the first modified example has a funnel-shaped (for example, funnel-shaped) electron incident portion 8a. That is, the opening of the electron incident portion 8a on the one end surface 6a of the main body portion 6 is wide at the central portion in the stacking direction of the plate-shaped members and becomes narrower toward both end portions.

  As shown in FIG. 9B, in order to configure the electron incident portion 8a as described above, in the method of manufacturing the electron multiplier 31, in the hole forming step, each of the first plate-shaped members 21 is formed. On the other hand, the holes 24 having different divergence angles of the triangular portions 24a are formed. Then, in the laminating step, the plurality of first plate-shaped members 21 are laminated so that the electron incident portion 8a exhibits the funnel shape described above. With such a process, the channel 8 having the above-described shape can be easily formed.

[Second Modification]
Next, a method of manufacturing the electron multiplier according to the second modification will be described. As shown in FIGS. 10 (a) and 10 (b), the electron multiplier 32 according to the second modification has a channel 8 having a three-dimensionally bent shape (for example, a spiral shape). Have. In the method of manufacturing the electron multiplier 32, in the hole forming step, the hole portions 24 in which the shapes of the triangular portion 24a and the extending portion 24b are different from each other are formed in each of the first plate-shaped members 21. .. Then, in the laminating step, the plurality of first plate-shaped members 21 are laminated so that the channel 8 has a three-dimensionally bent shape. With such a process, the channel 8 having the above-described shape can be easily formed.

[Third Modification]
Next, a method of manufacturing the electron multiplier 33 will be described. As shown in FIG. 11, the electron multiplier 33 according to the third modification has a plurality of channels 8 arranged two-dimensionally along the stacking direction of the plate-shaped members and the second direction D2. .. That is, the electron multiplier 33 is a multi-channel electron multiplier 33. In such a method for manufacturing the electron multiplier 33, first, a plurality of first plate-shaped members 21, a pair of second plate-shaped members 22, and a third plate-shaped member 23 are prepared (preparation Process). The shape and material of the third plate-shaped member 23 can be the same as those of the first and second plate-shaped members 21 and 22.

  In the subsequent step, as shown in FIG. 12, a plurality of holes 24 are formed in the first plate-shaped member 21 (hole forming step). Here, the holes 24 are two-dimensionally arranged along the first direction D1 and the second direction D2. In the example shown in FIG. 12, two holes 24 are formed side by side in the first direction D1 and two holes 24 in the second direction D2.

  In the subsequent step, as shown in FIG. 13, the first plate-shaped member 21 is connected to the pair of second plate-shaped members 21 while the third plate-shaped member 23 is interposed between the first plate-shaped members 21. The first, second, and third plate-shaped members 23 are laminated so as to be sandwiched by 22 to form a laminated body 27 (laminating step). That is, here, the second plate-shaped member 22, the two first plate-shaped members 21, the third plate-shaped member 23, the two first plate-shaped members 21, and the second plate-shaped member 22. Are stacked in this order. By stacking the first, second, and third plate-shaped members 23 on each other in this way, in each of the first plate-shaped members 21 on both surface sides of the third plate-shaped member 23, inside the stacked body 27. The channels 8 defined by the holes 24 are formed in each of the holes (see FIG. 16).

  In the subsequent step, as shown in FIG. 14, the laminated body 27 is integrated (integration step).

  In the subsequent step, as shown in FIGS. 15 and 16, the body portion 6 is configured by cutting the integrated laminated body 27 (cutting step). In this cutting step, the stacked body 27 is cut along the virtual lines to be cut L1, L2, L3 set on the stacked body 27. The planned cutting lines L1, L2, L3 divide the channels 8 arranged two-dimensionally along the first direction D1 and the second direction D2 into a plurality of pieces (here, two pieces). It is set in a grid pattern. The planned cutting line L1 is set along the first direction D1. The planned cutting line L1 is set so as to separate two adjacent channels 8 in the second direction D2 as one set. Each of the scheduled cutting lines L2 and L3 is set along the second direction D2. The planned cutting line L2 is set such that when cutting is performed along the planned cutting line L2, the electron incident portions 8a of the two channels 8 are opened in the cutting surface. Further, the planned cutting line L3 is set such that when the cutting is performed along the planned cutting line L3, the respective multiplication parts 8b of the two channels 8 are opened in the cutting surface. By cutting the stacked body 27 along the cutting lines L1, L2, L3 as described above, the plurality of main body portions 6 including the two channels 8 adjacent to each other in the second direction D2 are configured.

  In the subsequent step, the resistance layer and the secondary electron multiplication layer are formed on the inner surface of the channel 8 formed in the main body 6 (layer forming step). Through the above steps, the multi-channel electron multiplier 33 as shown in FIG. 11 is manufactured.

  In the method for manufacturing the electron multiplier 33, in the preparing step, the plurality of first plate-shaped members 21 are prepared, and the third plate-shaped member 23 is further prepared, and in the laminating step, the first plate-shaped members 21 are prepared. The first, second, and the first and third plate-shaped members 21, 23 are sandwiched between the pair of second plate-shaped members 22 while the third plate-shaped member 23 is interposed between the plate-shaped members 21. The plate-shaped members 21, 22, 23 of No. 3 are laminated on each other to form a laminated body 27. Therefore, by sandwiching the first plate-shaped member 21 between the third plate-shaped member 23 and the pair of second plate-shaped members 22, a plurality of channels 8 are formed in the stacking direction thereof. To be done. Therefore, the multi-channel electron multiplier 33 can be easily manufactured.

  In the method of manufacturing the electron multiplier 33, the plurality of holes 24 are formed in the first plate member 21 in the hole forming step. Therefore, a plurality of channels 8 are formed in the direction along the front surface 21a and the back surface 21b of the first plate-shaped member 21. Therefore, the multi-channel electron multiplier 33 can be easily manufactured.

  The above embodiments describe one embodiment of the method for producing an electron multiplier, the photomultiplier tube, and the photomultiplier according to the present invention. Therefore, the method for producing an electron multiplier, the photomultiplier tube, and the photomultiplier according to the present invention are not limited to those described above. The method for producing an electron multiplier, the photomultiplier tube, and the photomultiplier according to the present invention can be arbitrarily modified from those described above without departing from the scope of the claims.

  For example, in the hole forming step, the hole 24 may be formed so as to reach the one end 25 or the other end 26 of the first plate-shaped member 21. In this case, before the cutting step, the hole portion 24 reaches one of the one end 25 and the other end 26 of the first plate-shaped member 21. Therefore, in the cutting step, the channel 8 is opened in the one end face 6a and the other end face 6b of the main body portion 6 only by cutting either the one end 25 or the other end 26 of the first plate-shaped member 21. You can In addition, before the cutting step, the hole portion 24 does not reach either the one end 25 or the other end 26 of the first plate-shaped member 21. Therefore, it is possible to suppress the first plate-shaped member 21 from separating into two parts. These can improve workability. Further, the width of the channel 8 can be accurately and easily made.

  Further, as shown in FIG. 17, the electron multiplier 2 can be used as a photomultiplier 35 using the photocathode 29 and the anode 30. The photocathode 29 has a shape that is substantially the same as the outer shape of the main body portion 6 of the electron multiplier 2 when viewed from the first direction D1. The photocathode 29 has a flat plate shape. The photocathode 29 is provided on the one end surface 6a so as to close the opening of the electron incident portion 8a on the one end surface 6a of the main body portion 6. As a result, the photoelectrons generated on the photocathode 29 are supplied to the electron incident portion 8a.

  The anode 30 receives secondary electrons emitted from the channel 8 in response to photoelectrons incident on the channel 8. The anode 30 is provided in the channel 8 so as to close the opening of the channel 8 in the other end surface 6b of the main body portion 6. As a result, the anode 30 receives the secondary electrons that have traveled through the channel 8 of the electron multiplier 2 and reached the other end surface 6b.

  The photomultiplier 35 according to this embodiment includes the electron multiplier 2 described above. Therefore, the function and effect of the electron multiplier 2 can be suitably obtained.

  Further, in the above embodiment, the layer forming step is performed after the cutting step, but may be performed after the laminating step or may be performed after the integrating step.

  Moreover, you may use the 1st and 2nd plate-shaped members 21 and 22 which consist of conductors, such as a metal. In that case, an insulating film forming step of forming an insulating film on the surface of the main body portion 6 and the inner surface of the channel 8 is further performed after the cutting step and before the layer forming step. In this case, since a conductor such as a metal can be used as the first and second plate-shaped members 21 and 22, the electron multiplier 2 can be manufactured with various materials.

  DESCRIPTION OF SYMBOLS 1 ... Photomultiplier tube, 2, 31, 32, 33 ... Electron multiplier, 6 ... Main body part, 6a ... One end surface, 6b ... Other end surface, 8 ... Channel, 21 ... 1st plate-shaped member, 21a ... Front surface, 21b ... Back surface, 22 ... Second plate member, 24 ... Hole portion, 27 ... Laminated body, 35 ... Photomultiplier, D1 ... First direction.

Claims (4)

A rectangular parallelepiped main body portion having one end surface and the other end surface and extending from the one end surface in the first direction;
A channel that extends from the one end face to the other end face, opens to the one end face and the other end face, and emits secondary electrons according to incident electrons,
A resistance layer and an electron multiplication layer formed on the inner surface of the channel,
A metal layer provided on the one end surface and the other end surface,
The main body portion is provided with a potential difference so that the metal layer provided on the other end surface has a higher potential than the metal layer provided on the one end surface,
The channel has an electron incident portion provided in the main body portion so as to open at the one end surface,
The main body part has a plurality of first plate-like members formed with a hole defining the channel and divided into a plurality of parts by the hole, and viewed from a direction intersecting the first direction. Sometimes has a pair of second plate-like members that form the channel by closing the hole from the one end surface to the other end surface ,
The first and second plate-shaped members are made of ceramic,
It said body portion, a plurality of said first plate member with a pair of said second of said first and second plate-like member so as to sandwich a plate-shaped member are stacked together, the first stacked An electron multiplier, which is formed by sintering the first and second plate-shaped members.   The electron multiplier according to claim 1, wherein the electron incident portion has a tapered shape that contracts along the first direction.   The electron multiplier according to claim 1, wherein the channel is formed to bend. An electron multiplier according to any one of claims 1 to 3,
A tube containing the electron multiplier,
A photocathode that is provided on the tube body so as to face the opening of the channel on the one end surface and supplies photoelectrons to the channel,
A photoelectron multiplier comprising: an anode that is disposed in the tubular body so as to face the opening of the channel on the other end surface, and that receives a secondary electron emitted from the channel in response to the photoelectrons incident on the channel. tube.

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